CN114061300A - Air knife and solar cell wet processing equipment - Google Patents

Abstract

The invention discloses an air knife and solar cell wet processing equipment, wherein the air knife comprises a first shell and a second shell, and the first shell is connected with the second shell; the first shell is provided with a first cavity, and the surface of the first shell is provided with an air inlet communicated with the first cavity; the second shell is provided with a second cavity which is communicated with the first cavity; a plurality of air exhaust channels are arranged on the first surface of the second shell, the air exhaust channels are communicated with the second cavity, and the height direction of the air exhaust channels is perpendicular to the first surface; the air exhaust channel comprises a first channel and a second channel which are communicated with each other; the length direction of the first channel is consistent with that of the second shell; the included angle between each second channel and the length direction of the second shell is equal; according to the invention, the horizontal first channel and the inclined second channel are arranged, the first channel and the second channel are mutually communicated, the first channel can improve the defects of waterlines and the like caused by the second channel, and the stability of the air knife in the use process is improved.

Description

Air knife and solar cell wet processing equipment

Technical Field

The invention relates to the field of solar cell wet processing equipment, in particular to an air knife and solar cell wet processing equipment.

Background

The solar cell is a device for converting solar energy into electric energy through photoelectric reaction, and most of the existing solar cells are realized by a silicon PN junction structure. In the process of processing the solar cell, many processes performed on solar cell wet processing equipment relate to cleaning or spraying of liquid medicine, so that the liquid medicine on the silicon wafer needs to be removed and the silicon wafer needs to be dried before the next process is performed.

In the prior art, an air knife is generally adopted to dry the silicon wafer. The existing air outlet is a hole, and the acting force area of wind pressure on the surface of the silicon wafer is a point, so that the unit area of the stressed silicon wafer is small, the pressure of gas can be increased in order to completely remove liquid on the silicon wafer, and at the moment, the silicon wafer is easy to blow and break due to the small stressed area and the large pressure of the silicon wafer; the existing air outlet is a hole, and the acting force area of wind pressure on the surface of the silicon wafer is a point, so that the unit area of the stressed silicon wafer is small, and the silicon wafer is easily blown to be broken; and only use the air exhaust passageway of slope to lead to silicon chip surface to form a plurality of waterlines easily, blow not dry, reduce the stability of air knife in the use.

Based on the defects in the prior art, an air knife and a solar cell wet processing device need to be researched to solve the problems.

Disclosure of Invention

In order to solve the technical problems, the invention discloses an air knife and solar cell wet processing equipment.

The invention discloses an air knife which comprises a first shell and a second shell, wherein one end of each of the first shell and the second shell is open, and the open end of the first shell is connected with the open end of the second shell;

the first shell is internally provided with a first cavity, the surface of the first shell is provided with an air inlet, and the air inlet is communicated with the first cavity;

the second housing includes a first surface disposed opposite the open end; a second cavity is formed in the second shell and communicated with the first cavity; a plurality of air exhaust channels are arranged on the first surface of the second shell, the air exhaust channels are communicated with the second cavity, and the height direction of the air exhaust channels is perpendicular to the first surface;

the air exhaust channel comprises a first channel and a second channel which are communicated with each other, and the first channel and the second channel are connected to form a first included angle; the length direction of the first channel is consistent with that of the second shell; and the included angle between each second channel and the length direction of the second shell is equal.

Further, the length of the first channel is equal to the length of the second channel, and the width of the first channel is equal to the width of the second channel.

Further, the range of the first included angle is greater than 90 degrees and smaller than 180 degrees, and the height direction of the first channel is consistent with that of the second channel.

Further, the first channel comprises a first end and a second end, and the first end and the second end are oppositely arranged; the second channel comprises a third end and a fourth end, and the third end and the fourth end are arranged oppositely; the second end is connected with the third end; wherein a distance between the first end and the second end is equal to a length of the first channel; the distance between the third end and the fourth end is equal to the length of the second channel.

Furthermore, a guide plate is arranged in the first shell, a plurality of guide holes are formed in the guide plate, and the guide holes are arranged along the length direction of the guide plate; the axial direction of the flow guide hole is consistent with the height direction of the first channel; the first cavity is communicated with the second cavity through the diversion hole.

Further, the first shell comprises a second surface, the second surface is perpendicular to the first surface, and the air inlet is arranged in the middle of the second surface;

the first shell is further provided with an air inlet pipe, and the air inlet pipe is communicated with the air inlet.

Further, the included angle between the second channel and the length direction of the second shell is a second included angle, and the range of the second included angle is 15 degrees to 30 degrees.

Furthermore, a plurality of the exhaust channels are uniformly distributed on the first surface.

Further, the height of the middle part of the first cavity is greater than the height of the two ends of the first cavity; the volume of the first shell is larger than that of the second shell, and the center line of the first shell is coincident with that of the second shell.

The invention also discloses solar cell wet processing equipment which comprises a conveyor belt, a fixed seat and the air knife, wherein the conveyor belt and the air knife are both connected with the fixed seat;

the silicon wafer to be dried is placed on the conveying belt, and the air knife is arranged above or below the conveying belt.

Due to the technical scheme, the invention has the following beneficial effects:

1. according to the invention, the horizontal first channel and the inclined second channel are arranged, the first channel and the second channel are mutually communicated, the first channel can improve the defects of waterlines and the like caused by the second channel, and the stability of the air knife in the use process is improved.

2. According to the air knife provided by the invention, when air enters the first cavity from the air inlet, the air spreads from the middle part of the first cavity to the two ends because the height of the middle part of the first cavity is greater than that of the two ends, so that the air is uniformly distributed in the first cavity; the air vertically enters the second cavity through the flow guide holes, so that the air is uniformly distributed in the second cavity, the air is finally blown out through the vertically arranged air exhaust channels, the speed of the air blown out by each air exhaust channel tends to be equal at the moment, and the blowing angles of the air are the same, so that the air knife uniformly blows out air, the air outlet direction and the pressure distribution on the silicon wafer are optimized, the drying effect is improved, and the fragment rate is reduced.

Drawings

In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiment or the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.

Fig. 1 is a front view of the air knife according to the embodiment of the present invention;

FIG. 2 is an isometric view of the air knife provided by an embodiment of the present invention;

FIG. 3 is a side view of the air knife provided by an embodiment of the present invention;

FIG. 4 is a top view of the air knife provided by the embodiment of the present invention;

FIG. 5 is a cross-sectional view of the air knife in the direction A-A according to the present invention;

fig. 6 is a cross-sectional view of the air knife in the direction B-B according to the embodiment of the present invention.

In the figure: 1-a first housing; 2-a second housing; 11-a first cavity; 12-an air inlet; 13-a deflector; 14-a second surface; 15-an air inlet pipe; 21-a first surface; 22-a second cavity; 23-an exhaust channel; 131-diversion holes; 231-an exhaust channel; 232-second channel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

The prior art has the following defects: the existing air outlet is a hole, and the acting force area of wind pressure on the surface of the silicon wafer is a point, so that the unit area of the stressed silicon wafer is small, and the silicon wafer is easily blown to be broken; and only use the air exhaust passageway of slope to lead to silicon chip surface to form a plurality of waterlines easily, blow not dry, reduce the stability of air knife in the use.

Aiming at the defects of the prior art, the horizontal first channel and the inclined second channel are arranged, the first channel and the second channel are communicated with each other, the first channel can improve the defects of a water line and the like caused by the second channel, and the stability of the air knife in the using process is improved.

Example 1

Referring to fig. 1 to 6, the invention discloses an air knife and a solar cell wet processing device, wherein the air knife comprises a first shell 1 and a second shell 2, both the first shell 1 and the second shell 2 are open at one end, and the open end of the first shell 1 is connected with the open end of the second shell 2;

a first cavity 11 is formed inside the first shell 1, an air inlet 12 is formed in the surface of the first shell 1, and the air inlet 12 is communicated with the first cavity 11;

the second housing 2 comprises a first surface 21, the first surface 21 being disposed opposite the open end; the second shell 2 is internally provided with a second cavity 22, and the second cavity 22 is communicated with the first cavity 11; a plurality of air exhaust channels 23 are arranged on the first surface 21 of the second shell 2, the air exhaust channels 23 are communicated with the second cavity 22, and the height direction of the air exhaust channels 23 is perpendicular to the first surface 21;

the exhaust channel 23 comprises a first channel 231 and a second channel 232 which are communicated with each other, and the first channel 231 and the second channel 232 are connected to form a first included angle; the length direction of the first passage 231 coincides with the length direction of the second housing 2; the included angle between each second channel 232 and the length direction of the second housing 2 is equal.

It should be noted that: in this embodiment, the gas enters the first cavity 11 through the air inlet 12, and because the height of the middle of the first cavity 11 is greater than the heights of the two ends, the gas spreads from the middle of the first cavity 11 to the two ends, so that the gas is uniformly distributed in the first cavity 11; the gas in the first cavity 11 enters the second cavity 22, and due to the shape of the second shell 2, the gas pressure in the second cavity 22 is equal everywhere, so the speed of the gas blown out from each exhaust channel 23 tends to be equal, and the fragmentation rate of the silicon wafer is reduced to a certain extent; set up horizontal first passageway 231 and inclined second passageway 232 simultaneously, first passageway 231 with second passageway 232 communicates each other, first passageway 231 can improve by defects such as waterline that second passageway 232 caused, improve the stability of air knife in the use.

Specifically, the cross-section of the first housing 1 can be seen as a combination of a triangle and a rectangle, and the first cavity 11 is similar to the first housing 1 in shape but has different dimensions. The main purpose of providing said first cavity 11 in such a shape is: the gas can be uniformly dispersed, the air inlet pressure can be uniform, the gas can spread from the middle part of the first cavity 11 to the two ends, and the pressure in the first cavity 11 is basically equal.

Specifically, the first cavities 11 are symmetrically arranged along a center line of the first cavity 11, and along the length direction of the first housing 1, the height of the first cavity 11 gradually transitions from a first height to a second height, then gradually transitions from the second height to the first height, the length gradually transitioning from the first height to the second height is a first length, and the length gradually transitioning from the second height to the first height is a second length; wherein the first height is less than the second height, and the first length is equal to the second length.

Specifically, the first casing 1 and the second casing 2 are respectively cast, and the first casing 1 and the second casing 2 are welded and fixed, so that the first casing 1 and the second casing 2 are relatively sealed, the first cavity 11 is communicated with the second cavity 22, and the air can only be blown out from the exhaust channel 23.

Specifically, the lengths of the first casing 1 and the second casing 2 are equal, the length of the first cavity 11 is equal to the length of the second cavity 22, the length of the plurality of diversion holes 131 arranged on the diversion plate 13 is approximately equal to the length of the first cavity 11, and the length of the plurality of exhaust channels 23 arranged on the first surface 21 is approximately equal to the length of the second cavity 22.

Preferably, the length of the first channel 231 is equal to the length of the second channel 232, and the width of the first channel 231 is equal to the width of the second channel 232.

In particular, equalizing the length of the first channel 231 and the length of the second channel 232 can better improve or eliminate waterline defects caused by the second channel 232.

Specifically, since the plurality of second passages 232 are arranged at intervals and the plurality of second passages 232 are all arranged obliquely, defects such as waterlines can occur between two adjacent second passages 232, which affects the use effect and stability of the air knife; therefore, the horizontal first channel 231 is provided to eliminate the defects of water lines and the like generated by the second channel 232.

Preferably, the first included angle ranges from greater than 90 ° to less than 180 °, and the height direction of the first channel 231 and the height direction of the second channel 232 coincide.

Specifically, the first included angle is an obtuse angle, and the first channel 231 and the second channel 232 are both perpendicular to the first surface 21, so as to ensure that the gas is blown out perpendicularly.

Preferably, the first channel 231 includes a first end and a second end, the first end and the second end being oppositely disposed; the second channel 232 comprises a third end and a fourth end, and the third end and the fourth end are oppositely arranged; the second end is connected with the third end; wherein the distance between the first end and the second end is equal to the length of the first channel 231; the distance between the third end and the fourth end is equal to the length of the second channel 232.

Preferably, a flow guide plate 13 is further disposed inside the first casing 1, a plurality of flow guide holes 131 are disposed on the flow guide plate 13, and the plurality of flow guide holes 131 are disposed along the length direction of the flow guide plate 13; the axial direction of the flow guide hole 131 is consistent with the height direction of the first channel 231; the first cavity 11 is communicated with the second cavity 22 through the diversion hole 131.

Specifically, the gas in the first cavity 11 enters the second cavity 22 through the flow guide plate 13, and the flow guide plate 13 plays a certain guiding role.

Specifically, the axis of the diversion hole 131 is perpendicular to the diversion plate 13 for the purpose of making the gas in the first cavity 11 vertically enter the second cavity 22, and the central line of the exhaust channel 23 is perpendicular to the first surface 21 for the main purpose of: the air in the second cavity 22 is blown out vertically by the air exhaust channel 23.

Specifically, the centers of a plurality of the guiding holes 131 are in a straight line, and the main purpose of this arrangement is to: the gas in the first cavity 11 uniformly enters the second cavity 22 through the plurality of flow guide holes 131, so that the gas pressure in the second cavity 22 is equalized everywhere.

Specifically, the diversion holes 131 are circular holes, and the diameter of the diversion holes 131 can be set to be in the range of 5-8 mm.

Preferably, the first housing 1 includes a second surface 14, the second surface 14 is perpendicular to the first surface 21, and the air inlet 12 is disposed in the middle of the second surface 14;

the first shell 1 is further provided with an air inlet pipe 15, and the air inlet pipe 15 is communicated with the air inlet 12.

Preferably, the included angle between the second channel 232 and the length direction of the second housing 2 is a second included angle, and the range of the second included angle is 15 ° to 30 °.

Specifically, the distance between two adjacent air exhaust channels 23 ranges from 30 mm to 50mm, and the distance between two adjacent air exhaust channels 23 is set according to actual conditions.

Specifically, the distance between two adjacent second channels 232 is equal.

Preferably, a plurality of said exhaust air channels 23 are evenly distributed over said first surface 21.

Specifically, the first channel 231 and the second channel 232 have the same structure and are both elongated openings.

Specifically, the width of the first channel 231 and the second channel 232 can be properly reduced, and the number of the exhaust channels 23 is increased under the condition that the air output is not changed, so that the coverage area is increased, and the drying is facilitated.

In other embodiments, the shapes of the first channel 231 and the second channel 232 are not specified, as long as the exhaust channel 23 is an elongated gap, the width of the gap is between 0.5 mm and 1mm, and the first channel 231 and the second channel 232 have the same structure.

Preferably, the height of the middle of the first cavity 11 is greater than the height of the two ends of the first cavity 11; the volume of the first shell 1 is larger than that of the second shell 2, and the center line of the first shell 1 is coincident with that of the second shell 2.

The invention also discloses solar cell wet processing equipment which comprises a conveyor belt, a fixed seat and the air knife, wherein the conveyor belt and the air knife are both connected with the fixed seat;

the silicon wafer to be dried is placed on the conveying belt, and the air knife is arranged above or below the conveying belt.

The air flow process in the air knife is as follows: when the gas enters the first cavity 11 from the air inlet pipe 15, the gas spreads from the middle of the first cavity 11 to both sides due to the shape of the first cavity 11, and is finally uniformly distributed in the first cavity 11. The gas enters the second cavity 22 through the plurality of flow guide holes 131 in the flow guide plate 13, the gas is uniformly distributed in the second cavity 22, the gas is blown out from the exhaust channels 23, the pressure and the amount of the gas blown out from each exhaust channel 23 are equal, the gas blown out from the first channel 231 can overcome the defects of water lines and the like left by the gas blown out from the second channel 232, and the stability of the air knife in the use process is improved.

The invention also discloses solar cell wet processing equipment which comprises a conveyor belt, a fixed seat and the air knife, wherein the conveyor belt and the air knife are both connected with the fixed seat; the silicon wafer to be dried is placed on the conveying belt, and the air knife is arranged above or below the conveying belt. The solar cell wet processing equipment with the air knife can blow the silicon wafers on the conveyor belt to dry, so that the drying effect is improved to a certain extent, and the fragment rate is reduced; simultaneously, the defects of a waterline and the like are improved, and the stability of the air knife in the using process is improved.

In this document, the terms front, back, upper and lower are used to define the components in the drawings and the positions of the components relative to each other, and are used for clarity and convenience of the technical solution. It is to be understood that the use of the directional terms should not be taken to limit the scope of the claims.

The features of the embodiments and embodiments described herein above may be combined with each other without conflict.

While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims (10)

1. The air knife is characterized by comprising a first shell (1) and a second shell (2), wherein both the first shell (1) and the second shell (2) are provided with openings at one ends, and the opening end of the first shell (1) is connected with the opening end of the second shell (2);

a first cavity (11) is formed in the first shell (1), an air inlet (12) is formed in the surface of the first shell (1), and the air inlet (12) is communicated with the first cavity (11);

the second housing (2) comprising a first surface (21), the first surface (21) being disposed opposite the open end; the second shell (2) is internally provided with a second cavity (22), and the second cavity (22) is communicated with the first cavity (11); a plurality of air exhaust channels (23) are arranged on the first surface (21) of the second shell (2), the air exhaust channels (23) are communicated with the second cavity (22), and the height direction of the air exhaust channels (23) is perpendicular to the first surface (21);

the air exhaust channel (23) comprises a first channel (231) and a second channel (232) which are communicated with each other, and the first channel (231) and the second channel (232) are connected to form a first included angle; the length direction of the first channel (231) is consistent with the length direction of the second shell (2); the included angle between each second channel (232) and the length direction of the second shell (2) is equal.

2. An air knife according to claim 1, characterized in that the length of the first channel (231) and the length of the second channel (232) are equal, and the width of the first channel (231) and the width of the second channel (232) are equal.

3. An air knife according to claim 2, characterised in that the first angle ranges from more than 90 ° to less than 180 °, the height direction of the first channel (231) and the height direction of the second channel (232) coinciding.

4. An air knife according to claim 3, characterised in that the first channel (231) comprises a first end and a second end, the first end and the second end being oppositely disposed; the second channel (232) comprises a third end and a fourth end, the third end and the fourth end being oppositely disposed; the second end is connected with the third end; wherein the distance between the first end and the second end is equal to the length of the first channel (231); the distance between the third end and the fourth end is equal to the length of the second channel (232).

5. An air knife according to claim 4, characterized in that a deflector (13) is further arranged inside the first casing (1), a plurality of deflector holes (131) are arranged on the deflector (13), and the plurality of deflector holes (131) are arranged along the length direction of the deflector (13); the axial direction of the flow guide hole (131) is consistent with the height direction of the first channel (231); the first cavity (11) is communicated with the second cavity (22) through the diversion hole (131).

6. An air knife according to claim 5, characterized in that the first housing (1) comprises a second surface (14), the second surface (14) being arranged perpendicular to the first surface (21), the air inlet (12) being arranged in the middle of the second surface (14);

the first shell (1) is further provided with an air inlet pipe (15), and the air inlet pipe (15) is communicated with the air inlet (12).

7. An air knife according to claim 6, characterised in that the second channel (232) is at a second angle to the length of the second housing (2), the second angle being in the range of 15 ° to 30 °.

8. An air knife according to claim 7, characterised in that a number of said air discharge channels (23) are evenly distributed over said first surface (21).

9. An air knife according to claim 8, characterized in that the height of the middle of the first cavity (11) is greater than the height of the two ends of the first cavity (11); the volume of the first shell (1) is larger than that of the second shell (2), and the center line of the first shell (1) is coincident with that of the second shell (2).

10. A solar cell wet processing device, which is characterized by comprising a conveyor belt, a fixed seat and an air knife according to any one of claims 1 to 9, wherein the conveyor belt and the air knife are connected with the fixed seat;

the silicon wafer to be dried is placed on the conveying belt, and the air knife is arranged above or below the conveying belt.

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