CN114041799A - Stretchable patterned metal wire for electrical interconnection in flexible sensor and processing technology - Google Patents
Stretchable patterned metal wire for electrical interconnection in flexible sensor and processing technology Download PDFInfo
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- A61B5/316—Modalities, i.e. specific diagnostic methods
- A61B5/318—Heart-related electrical modalities, e.g. electrocardiography [ECG]
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- A61B5/024—Detecting, measuring or recording pulse rate or heart rate
- A61B5/02416—Detecting, measuring or recording pulse rate or heart rate using photoplethysmograph signals, e.g. generated by infrared radiation
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- A61B5/024—Detecting, measuring or recording pulse rate or heart rate
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- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/1455—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using optical sensors, e.g. spectral photometrical oximeters
- A61B5/14551—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using optical sensors, e.g. spectral photometrical oximeters for measuring blood gases
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- A61B2562/22—Arrangements of medical sensors with cables or leads; Connectors or couplings specifically adapted for medical sensors
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Abstract
The invention discloses a stretchable patterned metal wire for electrical interconnection in a flexible sensor and a processing technology thereof, wherein the stretchable patterned metal wire comprises a stretchable patterned wire, a flexible substrate and a flexible film, the stretchable patterned wire is arranged on the flexible substrate in an array manner, and the flexible film covers the stretchable patterned wire; the first solid line terminal is used for being connected with a first electric device, and the second solid line terminal is used for being connected with a second electric device, so that the first electric device and the second electric device are electrically conducted. The patterned part of the invention has the characteristics of high stretchability and good electrical transmission property, can be combined with inorganic or organic devices with small volume to form a required sensor, and miniaturizes and flexibilizes a required circuit. Meanwhile, the skin cannot be damaged, the limitation of complex monitoring conditions such as wiring of various instruments in a hospital is not needed, and the method has important significance in human health monitoring.
Description
Technical Field
The invention relates to a stretchable patterned metal wire for electrical interconnection in a flexible sensor and a processing technology, and belongs to the field of flexible electronics, optics and health monitoring.
Background
Flexible electronics is an emerging electronic technology for fabricating electronic devices of organic or inorganic materials on flexible substrates. Compared with the traditional electronic equipment, the flexible electronic device has higher flexibility, meets more equipment requirements, has good stretchability and adapts to the deformation of the equipment. The flexible electronics is applied to a lot in the field of electronic skin, the flexible electronics can be better attached to the skin, the damage to the surface of the skin is small, no stimulation is generated, however, due to the movement of people, the problem that the wire on the flexible substrate is easy to break is possibly caused, the stretchability of the wire can be greatly enhanced by patterning the wire, the device is more stable, and the device has a wide prospect in the aspect of human health detection.
Many flexible wires currently use a pattern of one-dimensional structures, but the one-dimensional structures affect the resistance of the wires in the pattern area due to the greatly increased length of the wires, and the interference between the generated currents, thereby affecting the performance of the device. While the wires of the two-dimensional structure are very stretchable while maintaining good electrical properties.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides a stretchable patterned metal wire for electrical interconnection in a flexible sensor and a processing technology. The invention relates to a flexible film type device, which is characterized in that a stretchable flexible substrate in a film shape is used, a microstructure metal lead is attached to the flexible substrate, an ACF adhesive tape or conductive silver paste is used for connecting an organic or inorganic electronic device, and the flexible film attached to the top end of the device is used for protecting the device. The required data is extracted by a system of externally applied voltage and added signal acquisition.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
a stretchable patterned metal wire for electrical interconnection in a flexible sensor comprises a stretchable patterned wire, a flexible substrate and a flexible film, wherein the stretchable patterned wire is arranged on the flexible substrate in an array mode, and the flexible film covers the stretchable patterned wire. The stretchable patterned wire comprises a first solid line end, a second solid line end and a patterned wire body, wherein the first solid line end is arranged at one end of the patterned wire body, and the second solid line end is arranged at the other end of the patterned wire body. The first solid line terminal is used for being connected with a first electric device, and the second solid line terminal is used for being connected with a second electric device, so that the first electric device and the second electric device are electrically conducted.
Preferably: the stretchable patterned conductor is formed by metal on a flexible substrate in a manner of magnetron sputtering, thermal evaporation, electron beam evaporation or ink jet printing.
Preferably: the patterned line body comprises a snake-shaped pattern line body, a hexagonal pattern line body, a rhombic pattern line body or an oval pattern line body.
Preferably: the line width of the patterned line body is between 30 and 50 microns.
Preferably: the flexible substrate is a polydimethylsiloxane substrate, a polyimide substrate, a polyethylene terephthalate substrate, a polyurethane elastomer substrate or a rubber substrate.
Preferably: the patterned wire body is made of gold, silver or copper.
A flexible sensor device comprising a photodetector, a health monitoring circuit, and the stretchable patterned-metal wire for electrical interconnection in a flexible sensor of claim 1, wherein a first solid-line end of the stretchable patterned-metal wire for electrical interconnection in a flexible sensor is connected to the photodetector, and a second solid-line end of the stretchable patterned-metal wire for electrical interconnection in a flexible sensor is connected to the health monitoring circuit.
A process for fabricating a stretchable patterned metal wire for electrical interconnection in a flexible sensor, comprising the steps of:
And 2, flatly pasting the flexible film on the silicon wafer to be used as a flexible substrate.
And 3, spin-coating AZ5214 photoresist on the flexible film of the flexible substrate obtained in the step 2, and then baking to obtain a sample.
And 4, putting the sample obtained in the step 3 into an MJB4 mask photoetching machine, and selecting a hard contact mode for exposure.
And 5, placing the exposed sample in the step 4 on a baking table for baking.
And 6, putting the sample baked in the step 5 into an MJB4 photoetching machine, and selecting a soft contact mode to perform flood exposure without placing a mask.
And 7, placing the exposed sample in the step 6 into a developing solution for developing, washing the developing solution clean by using deionized water, and drying the redundant water on the surface by using nitrogen.
And 8, performing magnetron sputtering, thermal evaporation, electron beam evaporation or ink jet printing of metal on the sample obtained in the step 7 to form a metal film, and ultrasonically cleaning the photoresist and the redundant metal on the photoresist in acetone to obtain the stretchable patterned wire attached to the flexible substrate.
And 9, uniformly pouring the flexible material on the square glass sheet, reserving a boundary, putting the square glass sheet into a vacuum pump to pump out air bubbles in the square glass sheet, horizontally placing the square glass sheet at room temperature to enable the flexible material to be self-leveling, and then putting the square glass sheet into an oven to be baked to enable the flexible material to be cured into a flexible film.
And step 10, cutting the flexible film obtained in the step 9, and then covering the cut flexible film on the stretchable patterned conducting wire attached to the flexible substrate obtained in the step 8, so as to obtain the stretchable patterned metal conducting wire for electrical interconnection in the flexible sensor.
Preferably: in step 8, before forming a metal film by performing magnetron sputtering, thermal evaporation, electron beam evaporation or ink jet printing on the sample obtained in step 7, a layer of chromium is plated on the sample obtained in step 7.
Compared with the prior art, the invention has the following beneficial effects:
the invention can be used in the electrical interconnection of the required flexible circuit, and the patterned lead can lead the flexible device to have better stretchability, can monitor the health of the human body and can not cause damage to the skin.
Drawings
Fig. 1 shows no stretching of the hexagonal wire compared to 40% stretching.
Fig. 2 shows a comparison of no stretch versus 40% stretch for a serpentine wire.
FIG. 3 shows the change in resistance from unstretched to stretched 40%.
Fig. 4 shows the measured PPG signal of a human.
Detailed Description
The present invention is further illustrated by the following description in conjunction with the accompanying drawings and the specific embodiments, it is to be understood that these examples are given solely for the purpose of illustration and are not intended as a definition of the limits of the invention, since various equivalent modifications will occur to those skilled in the art upon reading the present invention and fall within the limits of the appended claims.
Example 1:
a stretchable patterned metal wire for electrical interconnection in a flexible sensor comprises a stretchable patterned wire, a flexible substrate and a flexible film, wherein the stretchable patterned wire is arranged on the flexible substrate in an array mode, and the flexible film covers the stretchable patterned wire. The stretchable patterned wire comprises a first solid line end, a second solid line end and a patterned wire body, wherein the first solid line end is arranged at one end of the patterned wire body, and the second solid line end is arranged at the other end of the patterned wire body. The first solid line terminal is used for being connected with a first electric device, and the second solid line terminal is used for being connected with a second electric device, so that the first electric device and the second electric device are electrically conducted. The upper and lower surfaces of the stretchable patterned conductor are protected by flexible materials.
The patterned line body comprises a snake-shaped pattern line body, a hexagonal pattern line body, a rhombic pattern line body or an oval pattern line body. The microstructure (pattern) has four shapes of snake shape, hexagon shape, diamond shape and ellipse shape. The conducting wire is designed in a patterning mode, the traditional culture of simulating paper-cut is achieved, the stretchability of the conducting wire can be improved, the conducting wire is better matched with a flexible substrate, and the attractiveness of the device is improved. The stretching effect of various patterns can be simulated through finite element simulation, and the patterns with better stretching capability can be found through simulation to be hexagonal and serpentine wires. The pattern design comprises a snake-shaped pattern, a hexagonal pattern, a diamond-shaped pattern, an oval pattern and the like, and the designed lead is obviously different from a common lead in appearance. The pattern is highly arrayed, and the length, the direction and the like of the required lead can be flexibly made according to requirements. The desired pattern is processed onto the flexible substrate as a template using photolithographic techniques.
Unlike the traditional electronics industry where better performance can be achieved by changing the appearance of the leads, the rapid development of micro-fabrication technology has made such small circuits more likely, and the combination of such stretch-patterned leads with devices has made flexible electronics more likely. The stretchable circuit can be combined with various small devices to achieve different functions according to different requirements.
The line width of the patterned line body is between 30 micrometers and 50 micrometers, so that the micro-machining process is facilitated, the patterned line body has good tensile property, and can bear at least 40% of tensile condition and stable electrical property when being stretched to 40%.
The flexible substrate is a polydimethylsiloxane substrate, a polyimide substrate, a polyethylene terephthalate substrate, a polyurethane elastomer substrate or a rubber substrate. Patterned lines are easily designed on flexible substrates such as polydimethylsiloxane, polyimide, polyethylene terephthalate, polyurethane elastomers, etc., or rubber. The patterned line body is printed on the flexible substrate by a photoetching method, and the pattern can be subjected to photoetching by electron beam exposure or MJB4, wherein MJB4 photoetching can utilize positive glue S1813 and negative glue AZ5214 for experiment, and for a hydrophobic surface, the surface hydrophilicity and hydrophobicity can be changed and then photoetching is carried out. And forming a metal film on the flexible substrate by using the photoresist as a template through methods such as magnetron sputtering, thermal evaporation, electron beam evaporation, ink-jet printing and the like. The method comprises the steps of carrying out magnetron sputtering, thermal evaporation, electron beam evaporation, ink jet printing and the like under a template to cover a layer of metal film, wherein the metal film and the flexible substrate have good adhesiveness by adopting the methods of magnetron sputtering, thermal evaporation, electron beam evaporation, ink jet printing and the like, and when the flexible substrate is stretched, the metal film is also stretched along with the flexible substrate, so that the metal film is effectively prevented from being separated from the flexible substrate, and the phenomenon that a patterned line body formed by the metal film is broken due to uneven stress is avoided. The metal is gold, silver, copper and the like, or a layer of chromium is plated on the bottom layer to ensure that the gold, silver and copper on the upper layer have better adhesiveness, and then the photoresist is removed by a stripping process.
The patterned wire body is made of gold, silver or copper. The metal film is made of metal with good stretchability, conductivity and good adhesion to the substrate, such as gold, silver, copper, etc., or the bottom layer is plated with a layer of chromium to make the upper layer of gold, silver, copper have better adhesion. After evaporation or sputtering, the metal film needs to be stripped to remove the photoresist on the bottom layer to obtain a final lead structure, and the sample is generally treated by acetone soaking or ultrasonic cleaning to obtain a final structured lead.
A flexible sensor device comprising a photodetector, a health monitoring circuit, and the stretchable patterned-metal wire for electrical interconnection in a flexible sensor of claim 1, wherein a first solid-line end of the stretchable patterned-metal wire for electrical interconnection in a flexible sensor is connected to the photodetector, and a second solid-line end of the stretchable patterned-metal wire for electrical interconnection in a flexible sensor is connected to the health monitoring circuit. The stretchable patterned metal wire for electrical interconnection in the flexible sensor can be directly connected with other electronic devices to obtain the required flexible electronic devices, and can be used for health monitoring of human bodies.
The sensor can be connected with other small devices such as LED lamps and photoelectric detectors as required to form a complete flexible sensing device. The flexible sensor can be used for electrical interconnection design of a flexible sensor required by human body monitoring, is a key part for forming a stretchable sensing device, has proper line width, and enables a lead to bear large stretching force and keep good electrical characteristics. The circuit has high array performance and flexible adaptation to circuit requirements.
A processing technology of a stretchable patterned metal wire for electrical interconnection in a flexible sensor is characterized in that a stretchable wire, a photoelectric detector and LEDs with the wavelengths of 660nm and 850nm are combined to measure a PPG signal of a human body.
Taking a wire with a hexagonal stretching shape as an example, fig. 1 shows the stretching property of a hexagonal pattern, and it can be seen that a good stress state is still maintained under 40% stretching, the wire is patterned based on the pattern, and in an actual circuit, only the edge part is left to be connected with a flat cable by a solid line.
And 2, flatly pasting a Polyimide (PI) film on a silicon chip as a substrate.
And 3, spin-coating AZ5214 photoresist on the surface of the PI at the spin-coating speed of 2500rpm/min for 45s, and baking the PI on a baking table at the temperature of 100 ℃ for 100s (pre-baking).
And 4, putting the sample into an MJB4 mask photoetching machine for exposure, and selecting a hard contact mode, wherein the exposure time is 2 s.
And 5, placing the exposed sample on a baking table at 110 ℃ for baking for 120s to serve as post baking.
And 6, putting the sample into an MJB4 photoetching machine for flood exposure, selecting a soft contact mode, not placing a mask, and keeping the exposure time to be 11 s.
And 7, quickly placing the sample into a developing solution for developing for 30s, washing the developing solution clean by using deionized water, and drying the redundant water on the surface by using nitrogen.
And 8, thermally evaporating 150nm copper on the obtained sample, and ultrasonically cleaning the photoresist and the redundant copper on the photoresist in acetone.
At this point, a honeycomb patterned conductive line having a line width of 30 to 50 μm is obtained, step 9.
Electrical analysis of the pattern using comsol finite element simulation, step 10, resulted in the resistance curve shown in fig. 2, where delta of 80 microns represents 40% stretch.
And 11, connecting 660nm and 850nm LEDs and a Photoelectric Detector (PD) into the circuit on the obtained circuit by using an ACF adhesive tape and conductive silver paste.
Step 12, the AFE4900 is an analog front end that can be used for collecting ECG and PPG signals, wherein a PPG signal chain can support up to four switchable LEDs and at most three Photodetectors (PDs) to work, the AFE4900 is connected with a designed circuit by using a flat cable, and whether the LED lamp and the photodetectors can work normally is checked by controlling the currents of the LED lamps at 660nm and 850 nm.
Step 13, uniformly pouring polydimethylsiloxane prepolymer (PDMS, common model is Sylgard 184, ratio of prepolymer to cross-linking agent is 10: 1) on a square glass sheet with side length of 50mm, leaving a boundary, putting the glass sheet into a vacuum pump to pump out air bubbles in the glass sheet, horizontally placing the glass sheet at room temperature for three hours to enable the PDMS to be self-leveling, and then putting the glass sheet into an oven to be baked for 2 hours at 60 ℃ to enable the PDMS to be cured into a layer of film.
And step 14, cutting the PDMS film to a proper size by using a knife, and packaging and protecting the circuit.
And step 15, lightly placing the finger on a circuit, alternately introducing 30s of current to the 660nm LED lamp and the 850nm LED lamp, wherein the current is 100mA, storing data acquired by the Photoelectric Detector (PD) after 1 minute, and sorting to obtain an image shown in the attached drawing 3.
Example 2
An absolute amount of human tissue oxygen saturation (rSO2) is measured using a combination of a stretchable wire with a photodetector and LEDs of wavelengths 750nm and 850 nm.
Taking a wire with a serpentine shape as an example, fig. 4 shows the stretchability of the serpentine pattern, and it can be seen that a good stress state is still obtained under 40% stretch, the wire is patterned based on the pattern, and in an actual circuit, only the edge portion is left to be connected with the flat cable by a solid line.
And 2, flatly pasting a Polyimide (PI) film on a silicon chip as a substrate.
And 3, sputtering 150nm of gold on the surface of the PI by magnetron sputtering.
And 4, spin-coating S1813 photoresist on the surface of the gold at the speed of 4000rpm/min for 45S, and baking the gold on a baking table at the temperature of 115 ℃ for 60S.
And 5, putting the sample into an MJB4 mask photoetching machine for exposure, and selecting a hard contact mode, wherein the exposure time is 7 s.
And 6, then, putting the sample into a developing solution for developing for 40s, washing the developing solution clean by using deionized water, and drying the redundant water on the surface by using nitrogen.
And 7, etching the excessive gold uncovered by the photoresist by using a potassium iodide solution, and then soaking in an acetone solution for 5min to remove the photoresist on the surface.
And 8, obtaining the conducting wire with the line width of 30-50 microns in the serpentine pattern.
And 9, connecting the 750nm and 850nm LEDs and the two Photodetectors (PDs) into the circuit on the obtained circuit by using an ACF adhesive tape and conductive silver paste.
And step 10, connecting the AFE4900 with a designed circuit by using a flat cable, and checking whether the LED lamp and the photoelectric detector can work normally or not by controlling the LED lamp currents of 750nm and 850 nm.
And 11, manufacturing a PDMS film to encapsulate and protect the circuit.
And step 12, attaching the device on the forearm of the forearm, and respectively introducing currents of 50mA for 1 minute to the LED lamps with the wavelengths of 750nm and 850nm to obtain data detected by the two photoelectric detectors, so as to calculate the absolute oxygen saturation amount (rSO2) of the human tissue.
The invention can be used for various flexible sensors. The invention can carry out patterning design on the part of the lead except the external connection, the patterned part has the characteristic of high stretchability and good electrical transmission property, and can be combined with inorganic or organic devices with small volume to form a required sensor, so that a required circuit is miniaturized and flexible. After the means such as signal acquisition, signal processing have been combined, can measure multiple data as required, because of its advantage such as small, that stretchability is strong, can not cause the damage to skin again, also need not the restriction of complicated monitoring conditions such as the wiring of many instruments of hospital, have important meaning in human health monitoring.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.
Claims (9)
1. A stretchable patterned metal wire for electrical interconnection in a flexible sensor, characterized by: the flexible printed circuit board comprises stretchable patterned wires, a flexible substrate and a flexible film, wherein the stretchable patterned wires are arranged on the flexible substrate in an array mode, and the flexible film covers the stretchable patterned wires; the stretchable patterned wire comprises a first solid line end, a second solid line end and a patterned wire body, wherein the first solid line end is arranged at one end of the patterned wire body, and the second solid line end is arranged at the other end of the patterned wire body; the first solid line terminal is used for being connected with a first electric device, and the second solid line terminal is used for being connected with a second electric device, so that the first electric device and the second electric device are electrically conducted.
2. A stretchable patterned metal wire for electrical interconnection in flexible sensors according to claim 1, wherein: the stretchable patterned conductor is formed by metal on a flexible substrate in a manner of magnetron sputtering, thermal evaporation, electron beam evaporation or ink jet printing.
3. A stretchable patterned metal wire for electrical interconnection in flexible sensors according to claim 2, wherein: the patterned line body comprises a snake-shaped pattern line body, a hexagonal pattern line body, a rhombic pattern line body or an oval pattern line body.
4. A stretchable patterned metal wire for electrical interconnection in flexible sensors according to claim 3, wherein: the line width of the patterned line body is between 30 and 50 microns.
5. A stretchable patterned metal wire for electrical interconnection in flexible sensors according to claim 4, wherein: the flexible substrate is a polydimethylsiloxane substrate, a polyimide substrate, a polyethylene terephthalate substrate, a polyurethane elastomer substrate or a rubber substrate.
6. A stretchable patterned metal wire for electrical interconnection in flexible sensors according to claim 5, wherein: the patterned wire body is made of gold, silver or copper.
7. A flexible sensing device, characterized by: comprising a photodetector, a health monitoring circuit, and the stretchable patterned-metal wire for electrical interconnection in a flexible sensor as claimed in claim 1, wherein a first solid-line end of the stretchable patterned-metal wire for electrical interconnection in a flexible sensor is connected to the photodetector, and a second solid-line end of the stretchable patterned-metal wire for electrical interconnection in a flexible sensor is connected to the health monitoring circuit.
8. A process for fabricating stretchable patterned metal leads for electrical interconnection in flexible sensors according to claim 1, comprising the steps of:
step 1, designing a stretchable patterned wire;
step 2, flatly pasting the flexible film on a silicon chip as a flexible substrate;
step 3, spin-coating AZ5214 photoresist on the flexible film of the flexible substrate obtained in the step 2, and then baking to obtain a sample;
step 4, putting the sample obtained in the step 3 into an MJB4 mask photoetching machine, and selecting a hard contact mode for exposure;
step 5, placing the exposed sample in the step 4 on a baking table for baking;
step 6, putting the sample baked in the step 5 into an MJB4 photoetching machine, selecting a soft contact mode to perform flood exposure without placing a mask;
step 7, placing the exposed sample in the step 6 into a developing solution for developing, washing the developing solution clean by using deionized water, and drying redundant moisture on the surface by using nitrogen;
step 8, performing magnetron sputtering, thermal evaporation, electron beam evaporation or ink jet printing of metal on the sample obtained in the step 7 to form a metal film, and ultrasonically cleaning the photoresist and the redundant metal on the photoresist in acetone to obtain a stretchable patterned wire attached to the flexible substrate;
step 9, uniformly pouring the flexible material on a square glass sheet, reserving a boundary, putting the square glass sheet into a vacuum pump to pump out air bubbles in the square glass sheet, horizontally placing the square glass sheet at room temperature to enable the flexible material to be self-leveling, and then putting the square glass sheet into an oven to be baked to enable the flexible material to be cured into a flexible film;
and step 10, cutting the flexible film obtained in the step 9, and then covering the cut flexible film on the stretchable patterned conducting wire attached to the flexible substrate obtained in the step 8, so as to obtain the stretchable patterned metal conducting wire for electrical interconnection in the flexible sensor.
9. The process of claim 8, wherein: in step 8, before forming a metal film by performing magnetron sputtering, thermal evaporation, electron beam evaporation or ink jet printing on the sample obtained in step 7, a layer of chromium is plated on the sample obtained in step 7.
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