CN114040557B - Array type dielectric barrier glow discharge device - Google Patents
Array type dielectric barrier glow discharge device Download PDFInfo
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- CN114040557B CN114040557B CN202111301269.XA CN202111301269A CN114040557B CN 114040557 B CN114040557 B CN 114040557B CN 202111301269 A CN202111301269 A CN 202111301269A CN 114040557 B CN114040557 B CN 114040557B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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Abstract
The invention discloses an array type dielectric barrier glow discharge device, which can be suitable for atmospheric pressure, is not easy to oxidize, and has the characteristics of simple structure and long service life; the driving circuit can adjust the amplitude, the phase and the frequency of the finally output high voltage in real time by adjusting the input digital signal, thereby realizing the control of the discharge intensity. The discharge device is characterized by comprising an electrode lead-out wire, insulating plastic and an array electrode; the array electrode is composed of three parallel electrodes and three vertical electrodes and is arranged in the insulating plastic, wherein the three parallel electrodes and the three vertical electrodes are arranged and fixed in a # -shaped manner; the tail parts of the three electrodes in the same direction are connected in series to form two electrode lead-out wires; the electrode lead-out wire extends to the outside of the insulating plastic and is connected with a driving circuit. The driving circuit comprises a MOS tube control circuit, an energy storage control circuit and a transformer circuit.
Description
Technical Field
The invention relates to the technical field of dielectric barrier glow, in particular to an array type dielectric barrier glow discharge device.
Background
The medium barrier glow discharge combines the advantages of the traditional medium barrier discharge and glow discharge, does not need a vacuum environment, can generate plasma with good uniformity, and can meet the requirements of the industrial fields of ozone generation, pollutant treatment, material surface modification and cleaning, thin film deposition and the like. However, since the dielectric barrier glow discharge mode changes with the increase of the discharge intensity, i.e. the uniform discharge is converted into the non-uniform discharge, the control of the intensity of the dielectric barrier glow discharge is the key point for promoting the further development.
Disclosure of Invention
In view of this, the invention provides an array type dielectric barrier glow discharge device, which can realize control on the intensity of dielectric barrier glow discharge.
In order to achieve the purpose, the technical scheme of the invention is as follows: an array type medium barrier glow discharge device comprises an electrode outgoing line, insulating plastic and an array electrode.
The array electrode is composed of three parallel electrodes and three vertical electrodes and is arranged in the insulating plastic, wherein the three parallel electrodes and the three vertical electrodes are arranged and fixed in a # -shaped manner; the tail parts of the three electrodes in the same direction are connected in series to form two electrode lead-out wires.
The electrode lead-out wire extends to the outside of the insulating plastic and is connected with a driving circuit.
Further, the array electrode is composed of a metal wire and a ceramic sleeve wrapped outside the metal wire.
Further, the driving circuit comprises a MOS tube control circuit, an energy storage control circuit and a transformer circuit.
The externally input drive signals include an input Q1 drive signal FD _ NP, an input Q3 drive signal FD _ PP, an input Q2 drive signal FD _ OFF, and an input Q4 drive signal FD _ ON.
The number of the MOS tubes is 4, and the MOS tubes are respectively a first MOS tube Q1-Q4, wherein Q4 is an NMOS tube, and the others are PMOS tubes.
The MOS tube control circuit adopts two TC4427 to be respectively marked as U10 and U11, both U10 and U11 are powered by a 12V power supply, the U10 shapes externally input FD _ OFF and FD _ ON and then respectively outputs an OFF signal and an ON signal, and the OFF signal and the ON signal are respectively used for controlling the connection and disconnection of a second MOS tube Q2 and a fourth MOS tube Q4; the U11 shapes the FD _ NP and FD _ PP input from the outside and then respectively outputs an NP signal and a PP signal, wherein the NP signal and the PP signal are respectively used for controlling the on-off of a first MOS tube Q1 and a third MOS tube Q3; the ON signal is connected in series with the capacitor C23 and is pulled up by the resistor R27, and NP, OFF and PP are respectively connected to the gates of the PMOS transistors Q1, Q2 and Q3 after being respectively connected with the series resistors R25, R26 and R28.
An INPUT power supply 12V of the energy storage control circuit is connected to an INPUT pin INPUT of a voltage stabilizing regulator LD1058 after being filtered by C16, C17, L4 and C18, wherein one end of a capacitor C16 and a capacitor C17 are connected in parallel and then connected to a 12V power supply, the other end of the capacitor C16 and the other end of the capacitor C17 are grounded, the 12V power supply is connected to the INPUT pin INPUT of the LD1058 through an inductor L4, and the INPUT pin INPUT of the LD1058 is grounded through a capacitor C18; the feedback pin 1 of the LD1058 is connected with the resistor R14 and the resistor R15 to control the amplitude of the output voltage, and charges the first and second energy storage elements C19 and C20 after passing through the current limiting resistor R16, and the voltage at the current limiting resistor R16 is directly connected with the source of the fourth MOS transistor Q4.
The transformer circuit comprises a transformer T1, the transformation model is E213, a MOS tube Q1 is connected to the No. 5 pin of the transformer through a diode D5, a MOS tube Q3 is connected to the No. 1 pin of the transformer through a diode D6, and the drains of the MOS tubes Q2 and Q4 are connected to the No. 3 pin of the transformer together; the output end of the transformer T1 is connected with an electrode outgoing line (1) of an array type medium barrier glow discharge device and is used for providing driving voltage for the array type medium barrier glow discharge device.
Further, the center frequency of the transformer should be 50 k-100 kHz.
Further, the capacitance values of the first and second energy storage elements C19 and C20 are greater than 100 uF.
Has the advantages that:
according to the array type dielectric barrier glow discharge device provided by the invention, the discharge device can be suitable for atmospheric pressure, the electrode is not easy to oxidize, and the array type dielectric barrier glow discharge device has the characteristics of simple structure and long service life; the driving circuit can adjust the amplitude, the phase and the frequency of the finally output high voltage in real time by adjusting the input digital signal, thereby realizing the control of the discharge intensity.
Drawings
FIG. 1 is a schematic structural view of a discharge device, in which 1, electrode lead-out wires, 2, insulating plastic, and 3, array electrodes;
FIG. 2 is a slope view A-A of FIG. 1; 4, a metal wire and 5, a ceramic sleeve;
fig. 3 is a driving circuit diagram.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention provides an array type dielectric barrier glow discharge device, as shown in figure 1, and a discharge structure is explained by combining figure 3: the discharge structure consists of an electrode lead-out wire 1, insulating plastic 2 and an array electrode 3, wherein the array electrode 3 consists of a metal wire 4 and a ceramic sleeve 5 wrapped outside the metal wire.
The three parallel electrodes 3 and the three vertical electrodes 3 are arranged and fixed in the insulating plastic 2 in a # -shaped manner, the tails of the three array electrodes 3 in the same direction are connected in series to form two electrode lead-out wires 1, and the electrode lead-out wires 1 extend to the outside of the insulating plastic 2 and are connected with a driving circuit.
The driving circuit mainly controls the coil to trigger and generate hundreds of volts of high voltage to promote the dielectric barrier discharge structure to be ionized.
The array electrode is composed of a metal wire and a ceramic sleeve wrapped outside the metal wire. As shown in fig. 2.
The capacitor charging control circuit controls the frequency and amplitude of the secondary output voltage of the transformer through the time and frequency of the sequential conduction of the upper MOS tube and the lower MOS tube. The FD _ NP signal is a rectangular wave signal with a certain frequency, the transformer is charged when the FD _ NP is in a high level, the transformer is discharged and generates an oscillating waveform when the FD _ NP is in a low level, the FD _ NP is alternately switched on and off at a certain frequency, the transformer is alternately charged and discharged, the charging and discharging frequency is consistent with the frequency of the FD _ NP signal, and the frequency of the output signal of the transformer can be controlled by controlling the frequency of the FD _ NP signal; when the FD _ NP is at a high level, the FD _ PP is at a low level, the Q1 is switched on by controlling the high level time of the FD _ NP, the transformer is charged through pins 3 and 5, the longer the high level time is, the higher the charging energy of the transformer is, the higher the output signal of the transformer oscillates when the transformer is switched off, the oscillation amplitude is in direct proportion to the charging energy of the transformer, and the output voltage amplitude of the transformer can be controlled by controlling the high level time of the FD _ NP; when FD _ PP is high, FD _ NP is low, and the process is the same, the output signal is opposite to the previous polarity.
The circuit diagram of the driving circuit is shown in fig. 3, and includes a MOS transistor control circuit, an energy storage control circuit, and a transformer circuit.
The externally input drive signals include an input Q1 drive signal FD _ NP, an input Q3 drive signal FD _ PP, an input Q2 drive signal FD _ OFF, and an input Q4 drive signal FD _ ON;
the number of the MOS tubes is 4, and the MOS tubes are respectively a first MOS tube Q1-a fourth MOS tube Q4, wherein Q4 is an NMOS tube, and the others are PMOS tubes; the Q1 and the Q3 are used for controlling the on-off of the input voltage of the transformer; the Q4 forms a power supply input channel, the Q2 forms a leakage channel to discharge residual energy on the transformer, and the Q2 is not turned on when the Q4 is turned on.
The MOS tube control circuit adopts two TC4427 to be respectively marked as U10 and U11, both U10 and U11 are powered by a 12V power supply, the U10 shapes externally input FD _ OFF and FD _ ON and then respectively outputs an OFF signal and an ON signal, and the OFF signal and the ON signal are respectively used for controlling the connection and disconnection of a second MOS tube Q2 and a fourth MOS tube Q4; the U11 shapes the FD _ NP and FD _ PP input from the outside and then respectively outputs an NP signal and a PP signal, and the NP signal and the PP signal are respectively used for controlling the on-off of the first MOS transistor Q1 and the third MOS transistor Q3; the ON signal is connected in series with a capacitor C23 and is pulled up by a resistor R27, NP, OFF and PP are respectively connected to the gates of PMOS tubes Q1, Q2 and Q3 after being respectively connected with series resistors R25, R26 and R28;
an INPUT power supply 12V of the energy storage control circuit is filtered by C16, C17, L4 and C18 and then is connected to an INPUT pin INPUT of a voltage stabilizing regulator LD1058, wherein one end of capacitors C16 and C17 is connected with the 12V power supply in parallel, the other end of the capacitors C16 and C17 is grounded, the 12V power supply is connected to the INPUT pin INPUT of the LD1058 through an inductor L4, and the INPUT pin INPUT of the LD1058 is grounded through a capacitor C18; the feedback pin 1 of the LD1058 is connected to the resistor R14 and the resistor R15 to control the amplitude of the output voltage, and charges the first and second energy storage elements C19 and C20 after passing through the current limiting resistor R16, and the voltage at the current limiting resistor R16 is directly connected to the source of the fourth MOS transistor Q4.
The transformer circuit comprises a transformer T1, the transformation model is E213, a MOS tube Q1 is connected to the No. 5 pin of the transformer through a diode D5, a MOS tube Q3 is connected to the No. 1 pin of the transformer through a diode D6, and the drains of the MOS tubes Q2 and Q4 are connected to the No. 3 pin of the transformer together; the output end of the transformer T1 is connected with an electrode outgoing line (1) of an array type medium barrier glow discharge device and is used for providing driving voltage for the array type medium barrier glow discharge device.
In the embodiment of the invention, the center frequency of the transformer is between 50k and 100 kHz.
In the embodiment of the invention, the capacitance values of the first energy storage element C19 and the second energy storage element C20 are greater than 100 uF.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. An array type dielectric barrier glow discharge device is characterized by comprising an electrode outgoing line (1), insulating plastic (2) and an array electrode (3);
the array electrodes (3) are three parallel electrodes and three vertical electrodes and are arranged in the insulating plastic, wherein the three parallel electrodes and the three vertical electrodes are arranged and fixed in a # -shaped manner; the tail parts of the three electrodes in the same direction are connected in series to form two electrode lead wires (1);
the electrode lead-out wire (1) extends to the outside of the insulating plastic and is connected with a driving circuit;
the array electrode (3) consists of a metal wire and a ceramic sleeve wrapped outside the metal wire;
the driving circuit comprises an MOS tube control circuit, an energy storage control circuit and a transformer circuit;
the externally input drive signals include an input Q1 drive signal FD _ NP, an input Q3 drive signal FD _ PP, an input Q2 drive signal FD _ OFF, and an input Q4 drive signal FD _ ON;
the number of the MOS tubes is 4, and the MOS tubes are respectively a first MOS tube Q1-a fourth MOS tube Q4, wherein Q4 is an NMOS tube, and the others are PMOS tubes;
the MOS tube control circuit adopts two TC4427 to be respectively marked as U10 and U11, both U10 and U11 are powered by a 12V power supply, the U10 shapes externally input FD _ OFF and FD _ ON and then respectively outputs an OFF signal and an ON signal, and the OFF signal and the ON signal are respectively used for controlling the connection and disconnection of a second MOS tube Q2 and a fourth MOS tube Q4; the U11 shapes the FD _ NP and FD _ PP input from the outside and then respectively outputs an NP signal and a PP signal, and the NP signal and the PP signal are respectively used for controlling the on-off of the first MOS transistor Q1 and the third MOS transistor Q3; the ON signal is connected in series with a capacitor C23 and is pulled up by a resistor R27, NP, OFF and PP are respectively connected to the gates of PMOS tubes Q1, Q2 and Q3 after being respectively connected with series resistors R25, R26 and R28;
an INPUT power supply 12V of the energy storage control circuit is connected to an INPUT pin INPUT of a voltage stabilizing regulator LD1058 after being filtered by C16, C17, L4 and C18, wherein one end of a capacitor C16 and a capacitor C17 are connected in parallel and then connected to a 12V power supply, the other end of the capacitor C16 and the other end of the capacitor C17 are grounded, the 12V power supply is connected to the INPUT pin INPUT of the LD1058 through an inductor L4, and the INPUT pin INPUT of the LD1058 is grounded through a capacitor C18; a feedback pin 1 of the LD1058 is connected with a resistor R14 and a resistor R15 to control the amplitude of output voltage, the output voltage passes through a current-limiting resistor R16 and then charges a first energy storage element C19 and a second energy storage element C20, and the voltage at a current-limiting resistor R16 is directly connected with the source electrode of a fourth MOS transistor Q4;
the transformer circuit comprises a transformer T1, the transformation model is E213, an MOS tube Q1 is connected to the No. 5 pin of the transformer through a diode D5, an MOS tube Q3 is connected to the No. 1 pin of the transformer through a diode D6, and the drains of the MOS tubes Q2 and Q4 are connected to the No. 3 pin of the transformer together; the output end of the transformer T1 is connected with the electrode outgoing line (1) of the array type medium barrier glow discharge device and is used for providing driving voltage for the array type medium barrier glow discharge device;
the capacitor charging control circuit controls the frequency and amplitude of the secondary output voltage of the transformer through the time and frequency of the sequential conduction of the upper MOS tube and the lower MOS tube; the FD _ NP signal is a rectangular wave signal with a certain frequency, the transformer is charged when the FD _ NP is in a high level, the transformer is discharged and generates an oscillating waveform when the FD _ NP is in a low level, the FD _ NP is alternately switched on and off at a certain frequency, the transformer is alternately charged and discharged, the charging and discharging frequency is consistent with the frequency of the FD _ NP signal, and the frequency of the output signal of the transformer can be controlled by controlling the frequency of the FD _ NP signal; when FD _ NP is at a high level, FD _ PP is at a low level, Q1 is switched on by controlling the high level time of the FD _ NP, the transformer is charged through pins 3 and 5, the longer the high level time is, the higher the charging energy of the transformer is, the higher the output signal of the transformer oscillates when the transformer is switched off, the oscillation amplitude is in direct proportion to the charging energy of the transformer, and the output voltage amplitude of the transformer can be controlled by controlling the high level time of the FD _ NP; when FD _ PP is high, FD _ NP is low, and the process is the same, the output signal is opposite to the previous polarity.
2. An array type dielectric barrier glow discharge device according to claim 1, wherein the center frequency of said transformer is between 50k to 100 kHz.
3. An array-type dielectric barrier glow discharge device as claimed in claim 1 wherein the capacitance of the first and second energy storage elements C19 and C20 is greater than 100 uF.
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| CN108016622B (en) * | 2017-11-25 | 2019-11-08 | 中国商用飞机有限责任公司 | A kind of active aircraft anti-icing method and device |
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