CN114033806A - Radial adsorption high-speed rotating shaft structure - Google Patents
Radial adsorption high-speed rotating shaft structure Download PDFInfo
- Publication number
- CN114033806A CN114033806A CN202111498282.9A CN202111498282A CN114033806A CN 114033806 A CN114033806 A CN 114033806A CN 202111498282 A CN202111498282 A CN 202111498282A CN 114033806 A CN114033806 A CN 114033806A
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- CN
- China
- Prior art keywords
- sealer
- main shaft
- oil seal
- rotating main
- shaft
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
- F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
- F16C35/12—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with ball or roller bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
- F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
- F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
- F16C35/063—Fixing them on the shaft
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Abstract
The invention relates to a radial adsorption high-speed rotating shaft structure which comprises a rotating main shaft, a fixed end cover, an upper sealer and a lower sealer, wherein the upper sealer and the lower sealer are positioned through a plurality of pluggable conical pins and then connected together through screws, the rotating main shaft is installed in shaft holes of the upper sealer and the lower sealer from top to bottom, a rolling bearing is installed on the rotating main shaft and positioned outside a shaft hole of the upper sealer, a first oil seal is installed in the shaft hole of the upper sealer below the rolling bearing, a deep groove ball bearing is installed on the rotating main shaft and positioned outside the shaft hole of the lower sealer above the deep groove ball bearing, and a second oil seal is installed in the shaft hole of the lower sealer above the deep groove ball bearing. The invention is divided into an upper sealer component, a lower sealer component and a rotating main shaft, wherein the upper sealer component and the lower sealer component are fixed by pluggable taper pins in the processing process, then the rotating cavity is integrally processed, the integral concentricity is ensured, and the concentricity can be ensured by the taper pins directly in the subsequent assembling and maintaining processes.
Description
Technical Field
The invention relates to the technical field related to chip processing, in particular to a radial adsorption high-speed rotating shaft structure.
Background
At present, chip processing is more and more accurate, and in the manufacturing process, if suffer dust particles, the pollution of metal causes the damage of chip very easily, consequently need earlier in the chip course of working evenly to holistic wafer spraying protection liquid, carries out flow such as laser cutting of wafer afterwards, washs the wafer after the processing to the protection chip receives the pollution in the course of working.
The wafer coating protection liquid is required to be smoothly adsorbed on a processing platform in the cleaning process, the whole processing platform needs to rotate at a high speed to be matched with processing, at present, a plurality of rotating shafts need to be axially connected with air to be adsorbed in the high-speed rotation process, and the vacuum adsorption effect is easily weakened, the concentricity deviation is easily caused in the long-time high-speed rotation process.
The invention relates to a high-speed rotating shaft for generating adsorption by radial gas connection, which solves the problems of ensuring the vacuum degree and concentricity and the like in the radial gas connection and high-speed rotation of the rotating shaft.
In view of the above-mentioned drawbacks, the present designer is actively making research and innovation to create a radial absorption high-speed rotating shaft structure, so that the radial absorption high-speed rotating shaft structure has industrial application value.
Disclosure of Invention
In order to solve the above technical problems, an object of the present invention is to provide a radial absorption high-speed rotating shaft structure.
In order to achieve the purpose, the invention adopts the following technical scheme:
radial absorption high-speed rotation axis structure, including the rotating main shaft, the fixed end cover, go up sealer and sealer down, go up the sealer and be in the same place through screw connection after the pluggable taper pin location of a plurality of between the sealer down, rotating main shaft top-down installs in the shaft hole of last sealer and sealer down, the fixed end cover is installed to the top of going up the sealer, rolling bearing is installed in the shaft hole outside that the rotating main shaft is located the sealer, install first oil blanket in the shaft hole of sealer in the rolling bearing below, deep groove ball bearing is installed in the shaft hole outside that the rotating main shaft is located the sealer down, install the second oil blanket in the shaft hole of sealer under the deep groove ball bearing top.
As a further improvement of the invention, the top of the rolling bearing is limited by a fixed end cover, and a second locking nut is arranged on a rotating main shaft at the bottom of the rolling bearing.
As a further improvement of the invention, the first oil seal is limited by a clamp spring at the top, and the second oil seal is limited by a clamp spring at the bottom.
As a further improvement of the invention, the bottom of the upper sealer is provided with an O-shaped sealing ring which is positioned between the upper sealer and the lower sealer.
As a further improvement of the invention, a first locking nut is arranged on a rotating main shaft at the bottom of the deep groove ball bearing, and the first locking nut is positioned at the outer side of the bottom of the lower sealer.
As a further improvement of the invention, the first oil seal and the second oil seal are both fluororubber oil seals.
As a further improvement of the invention, the first oil seal and the second oil seal tightly clamp the rotating main shaft and form a sealed cavity with the upper sealer and the lower sealer, and the sealed cavity is connected with the outer quick connector of the air pipe.
By the scheme, the invention at least has the following advantages:
the invention is divided into an upper sealer component, a lower sealer component and a rotating main shaft, wherein the upper sealer component and the lower sealer component are fixed by pluggable taper pins in the processing process, then the rotating cavity is integrally processed, the integral concentricity is ensured, and the concentricity can be directly ensured by the taper pins in the subsequent assembling and maintaining processes; the fluororubber oil seal can ensure the sealing performance of the rotating main shaft in the long-time high-speed rotating process, so that the problems that the motor is required to be directly connected, the required rotating speed is high, and the difficulty in assembling and debugging is high are solved.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic structural diagram of a radial absorption high-speed rotating shaft structure according to the present invention;
FIG. 2 is a bottom view of FIG. 1;
fig. 3 is a schematic view of the internal structure of fig. 1.
In the drawings, the meanings of the reference numerals are as follows.
1 rotating spindle 2 fixed end cap
3 upper sealer 4 lower sealer
5 first lock nut 6 trachea quick-operation joint
7 rolling bearing 8 second lock nut
9 circlip 10 first oil seal
11 second oil seal 12 deep groove ball bearing
13O-shaped sealing ring 14 pluggable taper pin
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Examples
As shown in figures 1 to 3 of the drawings,
radial absorption high-speed rotation axis structure, including rotating main shaft 1, fixed end cover 2, go up sealer 3 and sealer 4 down, go up sealer 3 and be in the same place through screw connection after the location of a plurality of pluggable taper pin 14 between the sealer 4 down, 1 top-down of rotating main shaft installs in the shaft hole of last sealer 3 and sealer 4 down, fixed end cover 2 is installed to the top of going up sealer 3, rotating main shaft 1 is located the shaft hole outside of last sealer 3 and installs antifriction bearing 7, install first oil blanket 10 in the shaft hole of sealer 3 on antifriction bearing 7 below, deep groove ball bearing 12 is installed in the shaft hole outside that rotating main shaft 1 is located sealer 4 down, install second oil blanket 11 in the shaft hole of sealer 4 under deep groove ball bearing 12 top.
Preferably, the top of the rolling bearing 7 is limited by the fixed end cover 2, and the rotating main shaft 1 at the bottom of the rolling bearing 7 is provided with a second locking nut 8.
Preferably, the first oil seal 10 is limited by the clamp spring 9 at the top, and the second oil seal 11 is limited by the clamp spring 9 at the bottom.
Preferably, the bottom of the upper sealer 3 is provided with an O-ring 13, and the O-ring 13 is located at a position between the upper sealer 3 and the lower sealer 4.
Preferably, the first lock nut 5 is mounted on the rotating main shaft 1 at the bottom of the deep groove ball bearing 12, and the first lock nut 8 is positioned at the bottom outer side of the lower sealer 4.
Preferably, the first oil seal 10 and the second oil seal 11 are both fluororubber oil seals.
Preferably, the first oil seal 10 and the second oil seal 11 clamp the rotating main shaft 1 and form a sealed cavity with the upper sealer 3 and the lower sealer 4, and the sealed cavity is connected with the outer air pipe quick connector 6.
If the vacuum suction of the rotating shaft adopts axial air connection, the connecting mode of the rotating shaft and the motor needs to adopt a turning connecting mode and cannot be directly connected, and the precision and the stability can be difficult to ensure in the high-speed rotating motion, so the rotating shaft which is radially connected with air can adopt a direct connecting mode with the motor; at present, the radial air-receiving rotating shaft can be influenced by the vacuum degree under the condition of long-time high-speed rotation, then the concentricity requirement on the assembly of the rotating shaft is higher in the high-speed rotation process, the concentricity which needs to reach high precision in the assembly and maintenance process is difficult, and the time spent is longer.
The invention adopts the fluororubber oil seal with excellent temperature resistance and wear resistance, the whole device is divided into an upper sealer component, a lower sealer component and a rotating main shaft 1, the upper sealer and the lower sealer are fixed by a pluggable conical pin 14 in the processing process, then the rotating cavity is integrally processed to ensure the whole concentricity, the concentricity can be directly ensured by the pluggable conical pin 14 in the subsequent assembling and maintaining process, and the fluororubber oil seal can ensure the sealing performance of the rotating main shaft 1 in the long-time high-speed rotating process, thereby solving the problems of direct connection of a motor, high required rotating speed and high difficulty in assembling and debugging.
The inner ring of the rolling bearing 7 is mounted on the rotating spindle 1 and positioned and mounted by an M39 precision lock nut (second lock nut 8), and the outer ring ensures the bearing fixation by the negative tolerance between the fixed end cap 2 and the upper sealer 3. An outer ring of a 35 fluororubber oil seal (a first oil seal 10) is arranged on the upper sealer 3, a hole is limited by a clamp spring 9, and the rotating main shaft 1 is hooped by the inner diameter; the O-shaped sealing ring 13 is installed on the upper sealer 3, then the two parts of the upper sealer 3 and the lower sealer 4 are limited in position through 2 pluggable taper pins 14, the two parts are fixed and then connected through screws, the 32 fluororubber oil seal (second oil seal 11) is installed on the lower sealer 4 and is limited through the clamp spring 9, the inner diameter of the deep groove ball bearing 12 is installed on the rotating main shaft 1, and the precise locking nut (first locking nut 5) is used for positioning and installing.
The working principle and the working process of the invention are as follows:
rotatory main shaft 1 can directly link with driving motor through the shaft coupling, high-speed rotation under antifriction bearing 7's effect, but go up sealer 3 and sealer 4 down through plug taper pin 14's effect, the concentricity of two parts has been guaranteed, reach sealed effect through O type sealing washer 13 between two sealers, rotatory main shaft 1 is cramped to two fluorine rubber oil seals, form a seal chamber with upper and lower sealer, a slot hole has been bored at the center of rotatory main shaft 1, communicate with each other with seal chamber.
The invention adopts the fluororubber oil seal, the rotating main shaft 1 is made of stainless steel, the upper sealer and the lower sealer are positioned by the taper pin in the processing process, the concentricity processing of the two parts is ensured within 0.01mm, the abrasion between the oil seal and the main shaft caused by concentricity error is reduced, the design advantage is that the radial connection vacuum can be realized, and the vacuum leakage can not be caused by long-time high-speed rotation.
The upper sealer and the lower sealer are fixed by using pluggable taper pins in the processing process, then the rotating cavity is integrally processed, the integral concentricity is ensured, and the concentricity can be ensured by directly using the taper pins in the subsequent assembling and maintaining processes; the fluororubber oil seal can ensure the sealing performance of the rotating main shaft in the long-time high-speed rotating process.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (7)
1. Radial absorption high-speed rotating shaft structure, its characterized in that, including rotating main shaft (1), fixed end cover (2), upper sealer (3) and lower sealer (4), but pass through screw connection together after a plurality of plug taper pin (14) location between upper sealer (3) and lower sealer (4), rotating main shaft (1) top-down installs in the shaft hole of upper sealer (3) and lower sealer (4), fixed end cover (2) are installed to the top of upper sealer (3), rolling bearing (7) are installed to the shaft hole outside that rotating main shaft (1) is located upper sealer (3), install first oil blanket (10) in the shaft hole of rolling bearing (7) below upper sealer (3), deep groove ball bearing (12) are installed to the shaft hole outside that rotating main shaft (1) is located lower sealer (4), and a second oil seal (11) is arranged in a shaft hole of the lower sealer (4) above the deep groove ball bearing (12).
2. The radial absorption high-speed rotating shaft structure according to claim 1, wherein the top of the rolling bearing (7) is limited by the fixed end cover (2), and the rotating main shaft (1) at the bottom of the rolling bearing (7) is provided with a second locking nut (8).
3. The radial absorption high-speed rotating shaft structure according to claim 1, wherein the first oil seal (10) is limited by a clamp spring (9) at the top, and the second oil seal (11) is limited by a clamp spring (9) at the bottom.
4. The radial absorption high speed rotation shaft structure according to claim 1, wherein the bottom of the upper sealer (3) is provided with an O-ring (13), and the O-ring (13) is located at a position between the upper sealer (3) and the lower sealer (4).
5. The radial absorption high-speed rotating shaft structure as claimed in claim 1, wherein a first lock nut (5) is mounted on the rotating main shaft (1) at the bottom of the deep groove ball bearing (12), and the first lock nut (8) is positioned at the outer side of the bottom of the lower sealer (4).
6. The radial absorption high-speed rotating shaft structure according to claim 1 or 3, wherein the first oil seal (10) and the second oil seal (11) clamp the rotating main shaft (1) and form a sealed cavity with the upper sealer (3) and the lower sealer (4), and the sealed cavity is connected with the outer air pipe quick connector (6).
7. The radial absorption high-speed rotating shaft structure according to claim 1 or 6, wherein the first oil seal (10) and the second oil seal (11) are both fluororubber oil seals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111498282.9A CN114033806A (en) | 2021-12-09 | 2021-12-09 | Radial adsorption high-speed rotating shaft structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111498282.9A CN114033806A (en) | 2021-12-09 | 2021-12-09 | Radial adsorption high-speed rotating shaft structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114033806A true CN114033806A (en) | 2022-02-11 |
Family
ID=80146627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111498282.9A Pending CN114033806A (en) | 2021-12-09 | 2021-12-09 | Radial adsorption high-speed rotating shaft structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114033806A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115126785A (en) * | 2022-06-28 | 2022-09-30 | 福建省闽旋科技股份有限公司 | High-pressure-resistant and high-speed-resistant rotary sealing device |
-
2021
- 2021-12-09 CN CN202111498282.9A patent/CN114033806A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115126785A (en) * | 2022-06-28 | 2022-09-30 | 福建省闽旋科技股份有限公司 | High-pressure-resistant and high-speed-resistant rotary sealing device |
| CN115126785B (en) * | 2022-06-28 | 2024-03-29 | 福建省闽旋科技股份有限公司 | High-pressure-resistant and high-speed-resistant rotary sealing device |
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