CN114033266A - Feeding cavity door inserting device for mask repairing machine - Google Patents
Feeding cavity door inserting device for mask repairing machine Download PDFInfo
- Publication number
- CN114033266A CN114033266A CN202111286185.3A CN202111286185A CN114033266A CN 114033266 A CN114033266 A CN 114033266A CN 202111286185 A CN202111286185 A CN 202111286185A CN 114033266 A CN114033266 A CN 114033266A
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- China
- Prior art keywords
- connecting rod
- cavity door
- repairing machine
- machine
- inserting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims abstract description 15
- 238000007599 discharging Methods 0.000 abstract description 9
- 238000012423 maintenance Methods 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
- E05C19/00—Other devices specially designed for securing wings, e.g. with suction cups
- E05C19/10—Hook fastenings; Fastenings in which a link engages a fixed hook-like member
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/72—Repair or correction of mask defects
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a feeding and discharging cavity door inserting device of a mask repairing machine, which relates to the technical field of building template transmission and comprises a repairing machine, wherein a cross beam is arranged at the top of the repairing machine, two connecting rods are symmetrically arranged at the bottom of the cross beam, fixing cylinders are sleeved on the two connecting rods and connected to the connecting rods through bolts, claw hooks are arranged on one sides of the two fixing cylinders, buckles are arranged at the bottoms of the two connecting rods, and the top ends of the buckles are contacted with the bottom end of the repairing machine. Therefore, the problem of equipment maintenance cost is increased, the structure is simple, the operation is convenient, the requirement of human engineering is met, and the resource waste caused by uncontrollable factors is effectively reduced.
Description
Technical Field
The invention relates to the technical field of mask repairing, in particular to a door inserting device for a feeding and discharging cavity of a mask repairing machine.
Background
In the use process of the mask repairing machine, the mask repairing machine needs to be adjusted to lift so as to meet different work requirements of feeding and blanking.
However, when the mask plate is fed and discharged at present, the mask plate is affected by the fact that the feeding cavity door and the discharging cavity door cannot be fixed, a large amount of labor cost is wasted, the cavity door needs to be pushed manually by a person for vacuumizing during feeding, and an operator needs to hold the cavity door in advance during discharging to prevent the cavity door from breaking vacuum and then smashing down to cause equipment damage.
Disclosure of Invention
The invention aims to provide a feeding and discharging cavity door inserting device of a mask repairing machine, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a last unloading cavity door cartridge of mask patching machine is put, includes the patching machine, the top of patching machine is equipped with the crossbeam, the bottom symmetry of crossbeam is equipped with two connecting rods, two the solid fixed cylinder has been cup jointed on the connecting rod, gu fixed cylinder passes through bolted connection on the connecting rod, two one side of solid fixed cylinder all is equipped with the claw hook, two the bottom of connecting rod all is equipped with the buckle, the top of buckle contacts with the bottom of patching machine.
In a further embodiment, a straight plate is arranged at the top of the fixed cylinder, the straight plate and the connecting rod are in interference fit, and one end of the straight plate is welded with the claw hook.
In a further embodiment, the buckle and the connecting rod are in interference fit, a locking nut is arranged on one side, away from the connecting rod, of the buckle, and the locking nut is in threaded connection with the connecting rod.
In a further embodiment, the surface of the claw hook is provided with a stripe-shaped groove, and the surface of the buckle is provided with a stripe-shaped groove.
In a further embodiment, the beam is symmetrically provided with two insertion holes, the top end of the connecting rod is fixedly connected with an insertion rod, the insertion rod penetrates through the insertion holes, one side of the beam is provided with a connecting screw, and the connecting screw is in threaded connection with the inside of the beam.
Compared with the prior art, the invention has the beneficial effects that:
the cavity door is automatically locked through the claw hook, so that the problem that the door can be sucked only by manually pushing the cavity door to vacuumize when feeding is effectively solved, and an operator needs to hold the cavity door in advance after the cavity is vacuumed when discharging to prevent the equipment body and related sensors from being damaged due to smashing and falling after the cavity is vacuumed, the equipment maintenance cost is increased, the structure is simple, the operation is convenient, the requirement of ergonomics is met, and the resource waste caused by uncontrollable factors is effectively reduced.
Drawings
FIG. 1 is a schematic view of an unassembled repair machine of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic side view of the present invention;
fig. 4 is a schematic view of the main body of the assembly repair machine of the present invention.
In the figure: 1. repairing machine; 2. a connecting rod; 3. locking the nut; 4. buckling; 5. a claw hook; 6. a connecting screw; 7. a cross beam; 8. a fixed cylinder; 9. and (7) straight plates.
Detailed Description
The following will clearly and completely describe the technical solutions in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1-4, the present embodiment provides a feeding and discharging cavity door inserting device for a mask repairing machine, which includes a repairing machine 1, a cross beam 7 is disposed at the top of the repairing machine 1, two connecting rods 2 are symmetrically disposed at the bottom of the cross beam 7, fixing cylinders 8 are sleeved on the two connecting rods 2, the fixing cylinders 8 are connected to the connecting rods 2 through bolts, claw hooks 5 are disposed on one sides of the two fixing cylinders 8, buckles 4 are disposed at the bottoms of the two connecting rods 2, and top ends of the buckles 4 contact with the bottom end of the repairing machine 1.
At present, when the feeding and discharging mask plate is carried out, the cavity door cannot be fixed and influenced, a large amount of labor cost is wasted, the cavity door needs to be pushed manually by a person for vacuumizing during feeding, and an operator needs to hold the cavity door in advance during discharging to prevent equipment damage caused by smashing and falling after vacuum breaking, so that the equipment maintenance cost is increased.
Because field personnel are limited, the vacuumizing and vacuum breaking time is long, the machine cannot be kept all the time, in order to fix the cavity door of the repairing machine, the top of the fixed cylinder 8 is provided with a straight plate 9, the straight plate 9 is in interference fit with the connecting rod 2, and one end of the straight plate 9 is welded with the claw hook 5.
During the unloading, click the unloading button when the operator, a series of procedures of board automatic execution unloading, when the cavity internal gas pressure of machine of waiting to mend reaches atmospheric pressure, make the internal and external pressure differential of cavity be zero this moment, and then can make the cavity door open, because the existence of claw hook 5 this moment, just hook the handle recess of door, the door can not pound and fall off, only need lift the handle when waiting that the operator returns, make claw hook 5 and handle recess throw off, then put down gently, it can to get the mask slice again.
Example 2
Referring to fig. 2-4, a further improvement is made on the basis of embodiment 1:
when the worker leaves the machine and needs to return to the operation, the worker only needs to lift the handle at the moment to enable the hook to be separated from the handle groove, then the worker slightly puts down the hook and takes the mask plate. Then, a next mask plate is loaded, the handle is lifted upwards at the moment, when the door is attached to the cavity, the door is pressed by one hand, and the handle is pressed by the other hand to enable the hook to be embedded into the handle groove. The device is more humanized and meets the design requirement of human engineering.
In this embodiment, in order to limit the cavity, a stripe-shaped groove is cut on the surface of the claw hook 5, and a stripe-shaped groove is cut on the surface of the buckle 4.
The loading and unloading cavity door can be effectively opened and closed through the door inserting device, and the cavity door is automatically locked through the claw hook 5. The problem of need the manual cavity door evacuation of pushing away during the material loading just can be with the door suction and the broken vacuum back of cavity needs operating personnel to hold up the cavity door in advance and prevents to pound and fall to cause equipment body and relevant sensor to damage during unloading effectively to increase the plant maintenance cost is solved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a last unloading cavity door cartridge of mask patching machine is put, includes patching machine (1), the top of patching machine (1) is equipped with crossbeam (7), the bottom symmetry of crossbeam (7) is equipped with two connecting rods (2), two gu fixed cylinder (8) have been cup jointed on connecting rod (2), gu fixed cylinder (8) pass through bolted connection on connecting rod (2), two one side of gu fixed cylinder (8) all is equipped with claw hook (5), two the bottom of connecting rod (2) all is equipped with buckle (4), the top of buckle (4) contacts with the bottom of patching machine (1).
2. The loading and unloading cavity door inserting device for the mask repairing machine as claimed in claim 1, wherein: the top of a fixed cylinder (8) is provided with a straight plate (9), the straight plate (9) is in interference fit with the connecting rod (2), and one end of the straight plate (9) is welded with the claw hook (5).
3. The loading and unloading cavity door inserting device for the mask repairing machine as claimed in claim 1, wherein: adopt interference fit between buckle (4) and connecting rod (2), one side that connecting rod (2) were kept away from in buckle (4) is equipped with lock nut (3), lock nut (3) threaded connection is on connecting rod (2).
4. The loading and unloading cavity door inserting device for the mask repairing machine as claimed in claim 1, wherein: the surface of claw hook (5) is excavated and is equipped with stripe form slot, the surface of buckle (4) is excavated and is equipped with stripe form slot.
5. The loading and unloading cavity door inserting device for the mask repairing machine as claimed in claim 1, wherein: the symmetrical cutting is equipped with two jacks on crossbeam (7), the top fixedly connected with inserted bar of connecting rod (2), and the inserted bar runs through the jack, one side of crossbeam (7) is equipped with connecting screw (6), connecting screw (6) threaded connection is in crossbeam (7).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111286185.3A CN114033266A (en) | 2021-11-02 | 2021-11-02 | Feeding cavity door inserting device for mask repairing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111286185.3A CN114033266A (en) | 2021-11-02 | 2021-11-02 | Feeding cavity door inserting device for mask repairing machine |
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Publication Number | Publication Date |
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CN114033266A true CN114033266A (en) | 2022-02-11 |
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CN202111286185.3A Pending CN114033266A (en) | 2021-11-02 | 2021-11-02 | Feeding cavity door inserting device for mask repairing machine |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002051172A (en) * | 2000-08-01 | 2002-02-15 | Ricoh Co Ltd | Imaging apparatus |
JP2004039986A (en) * | 2002-07-05 | 2004-02-05 | Tokyo Seimitsu Co Ltd | Exposure mask storage container, exposure mask input/output mechanism, and regulating device for atmospheric pressure in storage container |
KR100872438B1 (en) * | 2008-07-29 | 2008-12-05 | 강봉원 | Door switching apparatus |
CN212867144U (en) * | 2020-04-19 | 2021-04-02 | 江苏万波科立机电设备有限公司 | Two-side long-tube door handle with tightening and automatic tripping functions |
CN213597799U (en) * | 2020-08-14 | 2021-07-02 | 江苏仁泽环境科技有限公司 | Access door for air pipe equipment |
CN213838149U (en) * | 2020-11-02 | 2021-07-30 | 北京中宇豪电气有限公司 | Anti-invasion rod of hanger claw for door plate |
CN113236052A (en) * | 2021-05-10 | 2021-08-10 | 中车太原机车车辆有限公司 | Flat-open type lower side door for railway open wagon |
-
2021
- 2021-11-02 CN CN202111286185.3A patent/CN114033266A/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002051172A (en) * | 2000-08-01 | 2002-02-15 | Ricoh Co Ltd | Imaging apparatus |
JP2004039986A (en) * | 2002-07-05 | 2004-02-05 | Tokyo Seimitsu Co Ltd | Exposure mask storage container, exposure mask input/output mechanism, and regulating device for atmospheric pressure in storage container |
KR100872438B1 (en) * | 2008-07-29 | 2008-12-05 | 강봉원 | Door switching apparatus |
CN212867144U (en) * | 2020-04-19 | 2021-04-02 | 江苏万波科立机电设备有限公司 | Two-side long-tube door handle with tightening and automatic tripping functions |
CN213597799U (en) * | 2020-08-14 | 2021-07-02 | 江苏仁泽环境科技有限公司 | Access door for air pipe equipment |
CN213838149U (en) * | 2020-11-02 | 2021-07-30 | 北京中宇豪电气有限公司 | Anti-invasion rod of hanger claw for door plate |
CN113236052A (en) * | 2021-05-10 | 2021-08-10 | 中车太原机车车辆有限公司 | Flat-open type lower side door for railway open wagon |
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