CN114024145A - Phase-adjustable metamaterial device and preparation method thereof - Google Patents
Phase-adjustable metamaterial device and preparation method thereof Download PDFInfo
- Publication number
- CN114024145A CN114024145A CN202111313750.0A CN202111313750A CN114024145A CN 114024145 A CN114024145 A CN 114024145A CN 202111313750 A CN202111313750 A CN 202111313750A CN 114024145 A CN114024145 A CN 114024145A
- Authority
- CN
- China
- Prior art keywords
- phase
- hole
- filling material
- nano
- hole structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 5
- 239000002086 nanomaterial Substances 0.000 claims abstract description 61
- 239000000463 material Substances 0.000 claims abstract description 57
- 238000004806 packaging method and process Methods 0.000 claims abstract description 14
- 239000011148 porous material Substances 0.000 claims description 15
- 239000000945 filler Substances 0.000 claims description 7
- 239000011343 solid material Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000005538 encapsulation Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000011800 void material Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000003921 oil Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 6
- 230000001105 regulatory effect Effects 0.000 abstract description 6
- 238000009826 distribution Methods 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000002061 nanopillar Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
- H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
- H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
Landscapes
- Micromachines (AREA)
Abstract
The invention discloses a phase-adjustable metamaterial device and a preparation method thereof. According to the embodiment of the invention, the nano structure in the hole structure is moved, the relative distance between the nano structure and the packaging structure is changed, and the structure size of the filling material is changed, so that the transmission phase is actively regulated, the hole structure, the nano structure and the filling material realize the miniaturization of the device, and the method can be widely applied to the technical field of devices.
Description
Technical Field
The invention relates to the technical field of devices, in particular to a phase-adjustable metamaterial device and a preparation method thereof.
Background
In recent years, with the continuous development of micromachining technology, miniaturized devices become an important development direction, and electromagnetic metamaterials are artificially designed structures, have extraordinary physical properties which natural materials do not have, and can realize flexible control over polarization, amplitude, phase or other parameters of electromagnetic waves. Because the electromagnetic metamaterial has the advantages of flexible design space and miniaturization, the electromagnetic metamaterial is widely applied to devices for regulating and controlling the phase of electromagnetic waves. The phase type metamaterial realizes the control of the behavior of emitting electromagnetic waves or reflecting electromagnetic waves by manufacturing unit structures which are specially distributed and have the function of regulating and controlling the phase of the electromagnetic waves on the surface of a device, and has great development potential in aspects of superlenses, holographic imaging or light deflection control and the like.
In the related art, different materials or bent structures are used for realizing specific phase distribution, the limitation of the materials is realized, the prepared device is heavy, when the phase distribution of the phase type metamaterial is fixed, the phase distribution is difficult to actively regulate and control after the device is manufactured, and the device is difficult to be applied in the fields of imaging and the like.
Disclosure of Invention
In view of this, an object of the embodiments of the present invention is to provide a phase-adjustable metamaterial device and a method for manufacturing the same, which can achieve active control and miniaturization of transmission phases.
In a first aspect, an embodiment of the present invention provides a phase-adjustable metamaterial device, including a hole structure, a nanostructure, an encapsulation structure, and a filling material, which are periodically arranged, where the size of the nanostructure is matched with that of the hole structure, the nanostructure is movable in the hole structure, and the hole structure, the nanostructure, and the filling material, which are periodically arranged, are sealed in the encapsulation structure.
Optionally, the hole structure comprises a regularly shaped hole structure.
Optionally, the hole structure comprises a regular quadrilateral hole.
Optionally, the nanostructures comprise regular quadrilateral nano-pillars.
Optionally, the filler material comprises any one of a liquid, a gas, a gel, or a fine solid.
Optionally, the material of the pore structure and the nanostructure comprises silicon dioxide, and the filler material comprises silicone oil.
Optionally, the spacing of the hole structures is less than 100 nm.
In a second aspect, an embodiment of the present invention provides a method for preparing a phase-adjustable metamaterial device, including:
providing a solid material, and etching a periodically arranged hole structure in the solid material;
depositing movable nanostructures within the pore structure;
sealing the pore structure and the nanostructure in the encapsulation structure;
and filling materials into the vacant parts of the packaging structures.
The implementation of the embodiment of the invention has the following beneficial effects: the metamaterial device comprises a hole structure, a nano structure, a packaging structure and a filling material which are periodically arranged, wherein the nano structure can move in the hole structure, and the filling material is filled in the packaging structure; by moving the nano structure in the hole structure, the relative distance between the nano structure and the packaging structure is changed, and the structure size of the filling material is changed, so that the transmission phase is actively regulated, and the miniaturization of the device is realized by the hole structure, the nano structure and the filling material.
Drawings
FIG. 1 is a schematic perspective view of a phase-tunable metamaterial device according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional side view and a schematic cross-sectional top view of a phase-tunable metamaterial device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating the variation of transmission phase and transmittance of a phase-tunable metamaterial device according to the relative height of a filler material;
fig. 4 is a schematic flow chart illustrating steps of a method for manufacturing a phase-tunable metamaterial device according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments. The step numbers in the following embodiments are provided only for convenience of illustration, the order between the steps is not limited at all, and the execution order of each step in the embodiments can be adapted according to the understanding of those skilled in the art.
As shown in fig. 1, an embodiment of the present invention provides a phase-tunable metamaterial device, including a hole structure, a nanostructure, a package structure, and a filling material, which are periodically arranged, where the size of the nanostructure is matched with that of the hole structure, the nanostructure is movable in the hole structure, and the hole structure, the nanostructure, and the filling material, which are periodically arranged, are sealed in the package structure.
The filling material has the following characteristics: good fluidity, high transmittance and flowing into the fine pores.
As will be appreciated by those skilled in the art, the pore structure and the nanostructures have the following characteristics: high transmissivity, good sealing performance and low abrasion.
Referring to fig. 1 and 2, the phase tunable metamaterial device has a structure in which a nanostructure capable of moving up and down is disposed in a hole structure, and a filling material is filled above the nanostructure to maintain one surface of the filling material in the same plane. Because one surface of the filling material is in the same plane, when the nano structure moves up and down, the other surface of the filling material can be filled into a space generated by the movement of the nano structure or the nano structure is arranged, so that the length distribution of the filling material is changed. The regulation and control process of the phase-adjustable metamaterial device is as follows: the incident direction of the light source is shown by an arrow in fig. 2, the incident direction of the light source is parallel to the nano structure and is emitted to the filling material from the nano structure; when the nanostructure moves according to the arrow in fig. 1, the length of the filling material above the nanostructure changes by Δ h, and the transmission phase of the metamaterial device changes along with the length of the filling material above the nanostructure.
Referring to fig. 3, fig. 3 is a graph of the transmission phase and transmittance of a fill material as a function of the relative height of the fill material using visible light at a wavelength of 660 nm. As can be seen from fig. 3, when the relative height of the liquid material is changed from 0 micron to 1.65 microns, a 360 ° phase change can be brought to the visible light with a wavelength of 660 nm; at the same time, the transmission remains at a high level during the relatively high changes, always maintaining a transmission greater than 0.9.
The results of fig. 3 show that the phase-tunable metamaterial device in this embodiment has great potential application value in a phase-type transmission device. In addition, after the device is manufactured, the application value of the device can be greatly improved through variable phase distribution, for example, a super lens with a variable focal length is designed, a holographic metamaterial with a variable display picture is designed, a light steering device with a variable emergent light deflection angle is designed, and the like.
As can be seen from fig. 3, the structural size of the filling material is changed by stretching or compressing the space where the filling material is located, so as to adjust and control the transmission phase of the filling material. The present embodiment follows the relationship between transmission phase and structure size, and when the length of the unit structure changes, the transmission phase and the relative length are in a proportional linear relationship.
Optionally, the hole structure comprises a regularly shaped hole structure. Specifically, the regular shape includes a column having a square cross-sectional area, a column having a rectangular cross-sectional area, a column having a rhombic cross-sectional area, or the like.
Optionally, the hole structure comprises a regular quadrilateral hole.
Optionally, the nanostructures comprise regular quadrilateral nano-pillars.
It should be noted that the shapes of the pore structures and the nanostructures are designed according to the requirements, and the embodiments of the present invention are not limited in particular.
Optionally, the filler material comprises any one of a liquid, a gas, a gel, or a fine solid.
It should be noted that the filling material may be a material that freely fills the space, including but not limited to the above materials, and may be selected according to design requirements, and the embodiment is not particularly limited.
Optionally, the material of the pore structure and the nanostructure comprises silicon dioxide, and the filler material comprises silicone oil.
It should be noted that the materials of the pore structure and the nanostructure need to satisfy the characteristics of high transmittance, good sealing performance, and being not easy to wear, the filling material needs to satisfy the characteristics of good fluidity, high transmittance, and being capable of flowing into the fine pores, and the materials of the pore structure and the nanostructure and the filling material can be selected according to the design requirement, and the embodiment is not particularly limited.
Optionally, the spacing of the hole structures is less than 100 nm.
It should be noted that the dimensions of the hole structure and the nano structure are both in the nanometer level, and referring to fig. 1 and fig. 2, the cross-sectional area of the hole structure in this embodiment is square, and the nano structure is a cylinder with a square cross-sectional area, where h represents the distance from the nano structure to the package structure, P represents the side length of the nano structure with a square cross-sectional area, T represents the interval between the hole structures, and L represents the height of the cylinder of the nano structure; each dimension satisfies the following relation: p is more than or equal to 300nm and less than or equal to 500nm, T is more than or equal to 40nm and less than or equal to 60nm, L is more than or equal to 1500nm and less than or equal to 2500nm, hmin is more than L, and hmin represents the minimum value of h.
The implementation of the embodiment of the invention has the following beneficial effects: the metamaterial device comprises a hole structure, a nano structure, a packaging structure and a filling material which are periodically arranged, wherein the nano structure can move in the hole structure, and the filling material is filled in the packaging structure; by moving the nano structure in the hole structure, the relative distance between the nano structure and the packaging structure is changed, and the structure size of the filling material is changed, so that the transmission phase is actively regulated, and the miniaturization of the device is realized by the hole structure, the nano structure and the filling material.
As shown in fig. 4, an embodiment of the present invention provides a method for manufacturing a phase-adjustable metamaterial device, including:
s1, providing a solid material, and etching a hole structure which is arranged periodically in the solid material.
And S2, depositing movable nano structures in the pore structures.
S3, sealing the hole structure and the nano structure in the packaging structure.
And S4, injecting a filling material into the vacant part of the packaging structure.
It should be noted that the etching depth of the solid material is related to the selected filling material and the selected wavelength of the incident light, and the embodiment is not limited in particular.
The implementation of the embodiment of the invention has the following beneficial effects: the metamaterial device comprises a hole structure, a nano structure, a packaging structure and a filling material which are periodically arranged, wherein the nano structure can move in the hole structure, and the filling material is filled in the packaging structure; the distance between the nano structure and the packaging structure is changed by moving the nano structure in the hole structure, so that the transmission phase is actively regulated, and the miniaturization of the device is realized by the hole structure, the nano structure and the filling material.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. The phase-adjustable metamaterial device is characterized by comprising a hole structure, a nano structure, an encapsulation structure and a filling material which are arranged periodically, wherein the size of the nano structure is matched with that of the hole structure, the nano structure is movable in the hole structure, and the hole structure, the nano structure and the filling material which are arranged periodically are sealed in the encapsulation structure.
2. The device of claim 1, wherein the void structure comprises a regularly shaped void structure.
3. The device of claim 2, wherein the hole structure comprises a regular quadrilateral hole.
4. The device of claim 3, wherein the nanostructures comprise regular quadrilateral nanocolumns.
5. The device of claim 1, wherein the filler material comprises any one of a liquid, a gas, a gel, or a fine solid.
6. The device of claim 1, wherein the material of the pore structures and the nanostructures comprises silicon dioxide and the filler material comprises silicon oil.
7. The device of any of claims 1-6, wherein the pore structures are spaced less than 100nm apart.
8. A preparation method of a phase-adjustable metamaterial device is characterized by comprising the following steps:
providing a solid material, and etching a periodically arranged hole structure in the solid material;
depositing movable nanostructures within the pore structure;
sealing the pore structure and the nanostructure in the encapsulation structure;
and filling materials into the vacant parts of the packaging structures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111313750.0A CN114024145A (en) | 2021-11-08 | 2021-11-08 | Phase-adjustable metamaterial device and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111313750.0A CN114024145A (en) | 2021-11-08 | 2021-11-08 | Phase-adjustable metamaterial device and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114024145A true CN114024145A (en) | 2022-02-08 |
Family
ID=80062030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111313750.0A Pending CN114024145A (en) | 2021-11-08 | 2021-11-08 | Phase-adjustable metamaterial device and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114024145A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5459442A (en) * | 1995-01-23 | 1995-10-17 | Mcdonnell Douglas Corporation | High power RF phase shifter |
| WO2016087749A1 (en) * | 2014-12-05 | 2016-06-09 | Onera | Compact, multiband and optionally reconfigurable high-impedance surface device and associated process |
| US20160170098A1 (en) * | 2014-12-12 | 2016-06-16 | King Abdul Aziz City For Science And Technology | Construction of hyperbolic metamaterial for an optical spectral range |
| CN108281771A (en) * | 2018-03-22 | 2018-07-13 | 太行通信股份有限公司 | The liquid antenna of beam direction is received and dispatched using GRAVITY CONTROL |
| CN109524785A (en) * | 2018-11-28 | 2019-03-26 | 南京上沐精密电子有限公司 | Waveguide machinery phase-shift network and phased array antenna |
| CN110808473A (en) * | 2019-11-11 | 2020-02-18 | 上海电力大学 | Mechanical reconfigurable coding basic unit and super surface |
| CN111679351A (en) * | 2020-06-29 | 2020-09-18 | 福州大学 | Achromatic optical super-surface focusing element |
-
2021
- 2021-11-08 CN CN202111313750.0A patent/CN114024145A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5459442A (en) * | 1995-01-23 | 1995-10-17 | Mcdonnell Douglas Corporation | High power RF phase shifter |
| WO2016087749A1 (en) * | 2014-12-05 | 2016-06-09 | Onera | Compact, multiband and optionally reconfigurable high-impedance surface device and associated process |
| US20160170098A1 (en) * | 2014-12-12 | 2016-06-16 | King Abdul Aziz City For Science And Technology | Construction of hyperbolic metamaterial for an optical spectral range |
| CN108281771A (en) * | 2018-03-22 | 2018-07-13 | 太行通信股份有限公司 | The liquid antenna of beam direction is received and dispatched using GRAVITY CONTROL |
| CN109524785A (en) * | 2018-11-28 | 2019-03-26 | 南京上沐精密电子有限公司 | Waveguide machinery phase-shift network and phased array antenna |
| CN110808473A (en) * | 2019-11-11 | 2020-02-18 | 上海电力大学 | Mechanical reconfigurable coding basic unit and super surface |
| CN111679351A (en) * | 2020-06-29 | 2020-09-18 | 福州大学 | Achromatic optical super-surface focusing element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Watanabe et al. | Mechanism for stripe pattern formation on hydrophilic surfaces by using convective self-assembly | |
| Shim et al. | Dynamic modulation of photonic bandgaps in crystalline colloidal arrays under electric field | |
| US20130021669A1 (en) | Spectrally Tunable Optical Filter | |
| Yu et al. | Co-self-assembly of binary colloidal crystals at the air− water interface | |
| Ghosh et al. | Spontaneous pattern formation by dip coating of colloidal suspensions on homogeneous surfaces | |
| Xia et al. | Nanostructures and functional materials fabricated by interferometric lithography | |
| Kim et al. | Low-threshold lasing in 3D dye-doped photonic crystals derived from colloidal self-assemblies | |
| US10073193B2 (en) | Optical element | |
| CN112952392B (en) | Terahertz digital programmable super surface for liquid crystal regulation and control | |
| CN107479215A (en) | A kind of Terahertz Meta Materials modulator approach and products thereof | |
| US11597144B2 (en) | Systems, devices, and methods for fabricating colloidal solids | |
| US9915758B2 (en) | Mold for manufacturing optical element and production method for same, and optical element | |
| Sun et al. | Construction of size-controllable hierarchical nanoporous TiO2 ring arrays and their modifications | |
| Kanai et al. | New route to produce dry colloidal crystals without cracks | |
| WO2008087022A1 (en) | Housing for micro-mechanical and micro-optical components used in mobile applications | |
| US8455048B1 (en) | Method for making nanomaterials | |
| JP2012226353A (en) | Antireflective hierarchical structures | |
| KR20130000756A (en) | A wire grid polarizer, liquid crystal display including the same and method of manufacturing the wire grid polarizer | |
| CN111033325A (en) | Highly modulated diffractive master and method of making same | |
| CN103267997B (en) | Method for producing bandwidth tunable slow light in polymer filling photonic crystal slot waveguide | |
| CN114024145A (en) | Phase-adjustable metamaterial device and preparation method thereof | |
| Li et al. | Reversibly strain-tunable elastomeric photonic crystals | |
| KR20210035554A (en) | Optical thin film for metasurface and meta optical device including the same | |
| CN102338895A (en) | Bifocus micro lens with aspheric surface and adjustable focal length | |
| KR101463938B1 (en) | Method and device of forming structure of photo crystal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |