CN114017575B - Pulse damper and semiconductor equipment - Google Patents
Pulse damper and semiconductor equipment Download PDFInfo
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- CN114017575B CN114017575B CN202210007994.4A CN202210007994A CN114017575B CN 114017575 B CN114017575 B CN 114017575B CN 202210007994 A CN202210007994 A CN 202210007994A CN 114017575 B CN114017575 B CN 114017575B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 268
- 238000013016 damping Methods 0.000 claims abstract description 13
- 230000008859 change Effects 0.000 claims abstract description 12
- 230000009471 action Effects 0.000 claims description 13
- 238000001125 extrusion Methods 0.000 claims description 13
- 230000002787 reinforcement Effects 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 26
- 238000000034 method Methods 0.000 abstract description 4
- 238000004891 communication Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000010349 pulsation Effects 0.000 description 3
- 230000035485 pulse pressure Effects 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 230000005483 Hooke's law Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 210000004712 air sac Anatomy 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/04—Devices damping pulsations or vibrations in fluids
- F16L55/045—Devices damping pulsations or vibrations in fluids specially adapted to prevent or minimise the effects of water hammer
- F16L55/05—Buffers therefor
- F16L55/052—Pneumatic reservoirs
- F16L55/053—Pneumatic reservoirs the gas in the reservoir being separated from the fluid in the pipe
- F16L55/054—Pneumatic reservoirs the gas in the reservoir being separated from the fluid in the pipe the reservoir being placed in or around the pipe from which it is separated by a sleeve-shaped membrane
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/04—Devices damping pulsations or vibrations in fluids
- F16L55/045—Devices damping pulsations or vibrations in fluids specially adapted to prevent or minimise the effects of water hammer
- F16L55/055—Valves therefor
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pipe Accessories (AREA)
- Details Of Valves (AREA)
Abstract
The invention provides a pulse damper and a semiconductor device, wherein the pulse damper comprises a shielding shell forming a sealed cavity and a liquid bag arranged in the shielding shell; the sealed cavity is isolated by the liquid bag to form a liquid cavity with variable volume and a gas cavity, the shielding shell is provided with an air outlet valve communicated with the gas cavity, the air outlet valve comprises an air outlet valve body, and the air outlet valve body forms an air outlet channel for air to be discharged out of the gas cavity and a vent hole communicated with the air outlet channel; the air outlet valve body is internally provided with a movable opening and closing component movably accommodated by the air outlet channel so as to trigger the movable opening and closing component to shield and expose the vent hole through the volume change of the liquid cavity caused by the liquid flowing through the liquid bag. Through this application, reduced the liquid in the liquid pipe-line system and at the in-process that delivers through the circulating pump and the pressure pulse value that produces and weakened the impact of liquid to the liquid pipe-line system, eliminated the water hammer phenomenon to through the damping principle, realized the rectification to the transport liquid in the liquid pipe-line system.
Description
Technical Field
The invention relates to the technical field of liquid circulation control, in particular to a pulse damper and semiconductor equipment.
Background
The damper is a device which consumes energy of motion by providing resistance to motion to achieve vibration damping and energy dissipation. During the transportation of water (or other liquid) by a liquid pipeline system, the flow rate of the liquid such as water is suddenly changed due to some external reasons (such as sudden closing of a valve and sudden stop of a circulating pump), so that water hammer is caused, and the water hammer phenomenon is caused. The water hammer phenomenon can cause liquid pulse to semiconductor equipment with a liquid circulation system, such as a semiconductor cleaning machine, and the like, and can generate adverse effects on a liquid pipeline system, the semiconductor equipment and a process flow applying the semiconductor equipment, and even threatens the safety and the reliability of the semiconductor equipment.
Therefore, it is important to provide a flow regulating device for a liquid conveying system, which is installed in a liquid pipeline system to reduce the pressure pulse value generated by a circulating pump during operation and reduce the impact and vibration of the liquid on the liquid pipeline system to eliminate the adverse effect of the water hammer phenomenon on the liquid pipeline system.
In view of the above, there is a need for an improved damper in the prior art to solve the above problems.
Disclosure of Invention
The invention aims to disclose a pulse damper and semiconductor equipment, which are used for reducing a pressure pulse value generated by the change of a circulating pump due to the change of the flow rate of liquid in the running process of a liquid pipeline system, eliminating the phenomenon of water hammer, and reducing the impact and vibration on the liquid pipeline system so as to protect and prolong the service life of the semiconductor equipment.
To achieve one of the above objects, the present invention provides a pulse damper comprising:
the liquid bag comprises a shielding shell forming a sealed cavity and a liquid bag arranged in the shielding shell;
the sealed cavity is isolated by the liquid bag to form a liquid cavity with variable volume and a gas cavity, the shielding shell is provided with an air outlet valve communicated with the gas cavity, the air outlet valve comprises an air outlet valve body, and the air outlet valve body forms an air outlet channel for air to be discharged out of the gas cavity and a vent hole communicated with the air outlet channel;
the air outlet valve body is internally provided with a movable opening and closing component movably accommodated by the air outlet channel so as to trigger the movable opening and closing component to shield and expose the vent hole through the volume change of the liquid cavity caused by the liquid flowing through the liquid bag.
As a further aspect of the present invention, the movable opening and closing assembly comprises: the piston and the first elastic piece are movably contained in the air outlet channel, the liquid bag and the air outlet valve body clamp the piston and the first elastic piece together, and the piston slides in the air outlet channel under the combined action of thrust applied to the piston by the liquid bag and elastic force which is applied to the piston by the first elastic piece and is opposite to the thrust action direction so as to form a state of shielding or exposing the vent hole.
As a further aspect of the present invention,
when the pushing force applied by the liquid bag to the piston is smaller than or equal to the elastic force which is applied by the first elastic piece to the piston and points to the liquid bag, the first elastic piece pushes the piston to abut against the surface of the liquid bag and exposes the vent hole;
when the pushing force exerted by the liquid bag on the piston is larger than the elastic force which is exerted by the first elastic piece on the piston and is directed to the liquid bag, the impact force exerted by the liquid bag on the piston resists the elastic force exerted by the first elastic piece on the piston so as to drive the piston to shield the vent hole.
As a further aspect of the present invention, the shielding housing includes a liquid passing seat and a cover plate separately disposed, and a cover body having two ends respectively connected to the liquid passing seat and the cover plate in a sealing manner, the liquid bag is connected to the liquid passing seat in a sealing manner, and the cover plate is connected to the air inlet valve and the air outlet valve;
the liquid inlet channel and the liquid outlet channel are arranged in the liquid passing seat and communicated with the liquid bag, and the air inlet hole communicated with the air inlet valve and the air outlet hole communicated with the air outlet valve are arranged in the cover plate.
As a further aspect of the present invention, the air intake valve includes an air intake valve body connected to the cover plate and an air intake valve core accommodated in the air intake valve body, and the air intake valve body forms an air intake channel communicated with the air intake hole for injecting air into the air cavity;
the air inlet valve core comprises a first valve rod accommodated in the air inlet channel and a second elastic piece sleeved on the first valve rod, one end of the first valve rod forms a first movable part used for extending into the air inlet channel, and the first movable part moves in the air inlet channel to shield or expose the air inlet channel under the combined action of extrusion force applied to the first movable part by air and elastic force which is applied to the first movable part by the second elastic piece and has the direction opposite to the action direction of the extrusion force.
As a further aspect of the present invention,
when the extrusion force of the gas injected into the gas inlet channel on the first movable part is less than or equal to the elastic force of the second elastic part on the first movable part, the first movable part shields the gas inlet channel;
when the pressing force of the gas injected into the gas inlet channel on the first movable part is larger than the elastic force of the second elastic part on the first movable part, the first movable part exposes the gas inlet channel.
As a further aspect of the present invention, the gas outlet valve includes a gas outlet valve core accommodated in the gas outlet valve body, the gas outlet valve core includes a second valve rod accommodated in the gas outlet channel and a third elastic member sleeved on the second valve rod, one end of the second valve rod forms a second movable portion extending into the gas outlet channel, and the second movable portion moves in the gas outlet channel to shield or expose the gas outlet channel under the combined action of an extrusion force applied by gas to the second movable portion and an elastic force, which is applied by the third elastic member to the second movable portion and has a direction opposite to the direction of the extrusion force.
As a further aspect of the present invention,
when the extrusion force of the gas exhausted from the gas outlet channel on the second movable part is less than or equal to the elastic force of the third elastic piece on the second movable part, the second movable part shields the gas outlet channel;
when the extrusion force of the gas exhausted from the gas outlet channel on the first movable part is greater than the elastic force of the third elastic piece on the second movable part, the second movable part exposes the gas outlet channel.
As a further aspect of the present invention, the liquid bag includes an elastic sidewall and a top cover formed by extending from the elastic sidewall in a radial direction, and the top cover protrudes into the liquid chamber to a support shaft pointing to the liquid passing seat;
the height of the support shaft is equal to the height of the elastic side wall in the contracted state of the liquid bag, and the elastic side wall provides a damping force for preventing the volume of the liquid chamber from expanding.
As a further aspect of the present invention, one end of the elastic side wall, which is far away from the top cover, protrudes along an extending direction of the telescopic side wall to form a retaining portion, the liquid passing seat is concavely provided with a clamping groove, and the retaining portion is fastened with the clamping groove in a sealing manner to form a completely sealed liquid chamber.
As a further aspect of the present invention, the cross-sectional area of the liquid inlet channel is larger than the cross-sectional area of the liquid outlet channel.
Based on the same idea, the present invention also discloses a semiconductor apparatus comprising:
a liquid pipe system, and a pulse damper according to any one of the above inventions incorporated in the liquid pipe system.
Compared with the prior art, the invention has the beneficial effects that:
firstly, in the application, a liquid bag is arranged in a sealed cavity to isolate the sealed cavity to form a liquid cavity with variable volume and a gas cavity, and the liquid bag is provided with an elastic side wall to provide damping force for preventing the volume of the liquid cavity from expanding, so that the primary reduction of pressure pulse existing in liquid injected into the liquid cavity is realized;
secondly, setting an air inlet valve and an air outlet valve which are communicated with the gas cavity, wherein the air inlet valve and the air outlet valve jointly preset the minimum value of the gas pressure in the gas cavity;
meanwhile, a movable opening and closing assembly is arranged in the gas outlet valve, the movable opening and closing assembly is clamped by the liquid bag and the gas outlet valve body together, liquid flows through the liquid bag to cause the volume change of the liquid cavity to trigger the movable opening and closing assembly to shield and expose a gas outlet channel formed by the gas valve, so that when the volume of the liquid cavity is increased, the volume of the gas cavity is reduced, and meanwhile, the gas pressure of gas in the gas cavity is increased, so that the larger the volume of the liquid cavity is, the larger the damping force provided by the gas in the gas cavity is, so that the pressure pulse value existing in the liquid is reduced, the rectification effect on water flow is realized, and the pulse pressure value of the liquid in the liquid pipeline system is reduced.
Drawings
FIG. 1 is an exploded view of a pulse dampener disclosed herein;
FIG. 2 is an axial cross-sectional view of a pulse dampener disclosed herein;
FIG. 3 is a perspective view of the liquid passing base of the present invention;
FIG. 4 is a perspective view of a fluid bladder of the present invention;
FIG. 5 is a cross-sectional view of a fluid bladder of the present invention;
FIG. 6 is an exploded view of the intake valve of the present invention;
FIG. 7 is a perspective cross-sectional view of the first sleeve and the first end mount of the present invention;
FIG. 8 is a top view of the first sleeve insert of the present invention;
FIG. 9 is an exploded view of the assembly of the gas outlet valve, the movable opening and closing assembly and the limiting block of the present invention;
FIG. 10 is a perspective cross-sectional view of the vent body of the present invention;
FIG. 11 is a line graph of water flow versus time for a liquid piping system with and without a pulse damper under a reservoir pump pressure of 0.4 MPa;
FIG. 12 is a line graph of water pressure versus time with and without a pulse damper in the fluid piping system with the bladder pump pressure set at 0.4 MPa.
Detailed Description
The present invention is described in detail with reference to the embodiments shown in the drawings, but it should be understood that these embodiments are not intended to limit the present invention, and those skilled in the art should understand that functional, methodological, or structural equivalents or substitutions made by these embodiments are within the scope of the present invention.
It should be understood that in the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered as limiting the present disclosure.
The first embodiment is as follows:
referring to fig. 1-12, one embodiment of a pulse dampener disclosed herein is shown.
Referring to fig. 1 to 3, in the present embodiment, the pulse damper includes: a shield housing forming a sealed cavity, and a fluid bladder 40 disposed within the shield housing. The shielding shell is cylindrical and can comprise a liquid through base 10 and a cover plate 20 which are separately arranged, and a cover body 30 of which two ends are respectively connected with the liquid through base 10 and the cover plate 20 in a sealing way. An annular sealing groove 11 is formed in the contact surface of the liquid passing base 10 and the cover body 30 in the vertical direction of the shielding shell, and a first sealing ring 32 is embedded in the annular sealing groove 11, so that the liquid passing base 10 and the cover body 30 are in sealing connection; similarly, a second sealing ring 31 is embedded on the contact surface of the cover plate 20 and the cover body 30 in the vertical direction of the shielding shell to form a sealing connection between the cover plate 20 and the cover body 30. The sealed cavities are separated by a liquid pocket 40 to form a variable volume liquid chamber 400 and a gas chamber 300. It should be noted that, in the present invention, the volume of the sealed cavity is the sum of the volume of the liquid cavity 400 and the volume of the gas cavity 300, and the volume of the sealed cavity is constant; as the volume of the liquid chamber 400 increases, the volume of the gas chamber 300 decreases; as the volume of the liquid chamber 400 decreases, the volume of the gas chamber 300 increases.
A liquid inlet channel 14 and a liquid outlet channel 13 which are communicated with the liquid cavity 400 are arranged in the liquid through seat 10, wherein the liquid inlet channel 14 is externally connected with a liquid source, and liquid is injected into the liquid cavity 400 from the liquid inlet channel 14 along the direction of an arrow 100 a; the liquid outlet channel 13 is used for the liquid in the liquid cavity 400 to flow out of the pulse damper from the direction shown by the arrow 100 b. The cover plate 20 is provided with an air inlet valve 50 and an air outlet valve 60 which are communicated with the air cavity 300, and the cover plate 20 is internally provided with an air inlet hole 201 communicated with the air inlet valve 50 and an air outlet hole 202 communicated with the air outlet valve 60. The gas inlet 201 is externally connected with a gas source, and gas passes through the gas inlet 201 along the direction shown by the arrow 200a and then is injected into the gas cavity 300 through the gas inlet valve 50; the gas in the gas chamber 300 passes through the gas outlet valve 60 in the direction of arrow 200b and exits the gas chamber 300 through the gas outlet 202.
Referring to fig. 2 to 5, the liquid bladder 40 includes an elastic side wall 41 which is stretchable, a top cover 43 formed by extending the elastic side wall 41 in a radial direction, and a support shaft 44 protruding from the top cover 43 into the liquid chamber 400, and one end of the elastic side wall 41 away from the top cover 43 protrudes in an extending direction of the elastic side wall 41 to form a catching portion 42. The liquid passing base 10 is provided with a clamping groove 12 on the contact surface with the liquid bag 40 in a concave manner, and the clamping part 42 is buckled with the clamping groove 12, so that the liquid bag 40 and the liquid passing base 10 are enclosed to form a completely sealed liquid cavity 400, and the liquid is prevented from leaking from the bottom of the liquid bag 40. It should be noted that the sealing connection between the liquid bag 40 and the liquid through seat 10 is not exclusive, for example, the inner wall of the liquid bag 40 is provided with an internal thread (not shown), and the liquid through seat 10 and the liquid bag 40 form an inner and outer annular contact surface to be screwed, so that the liquid bag 40 is reliably mounted on the liquid through seat 10. The end of liquid pocket 40 facing liquid passing seat 10 is opened to realize that liquid pocket 40 and liquid passing seat 10 enclose to form completely sealed liquid chamber 400. The top cover 43 is recessed radially inward from the side wall to form an annular recess 432, and the first reinforcing member 45 is embedded in the recess 432. The first reinforcing member 45 is formed by butt-jointing a first semi-annular sub-reinforcing member 451 and a second semi-annular sub-reinforcing member 452, so that the first reinforcing member 45 is embedded in the groove 432. The second reinforcement 46 is disposed on the upper surface 431 of the top cover 43, and a fastener (e.g., a bolt) is sequentially inserted through the through holes with internal threads preset on the first reinforcement 45, the top cover 43 and the second reinforcement 46 from top to bottom and is clamped in the vertical direction, so that the second reinforcement 46 and the first reinforcement 45 clamp the top cover 43 in the vertical direction, and the top cover 43 is clamped by the first reinforcement 45 and the second reinforcement 46 together to increase the strength of the top cover 43, thereby preventing the top cover 43 from deforming after being squeezed by the gas in the gas chamber 300 and prolonging the service life of the liquid bag 40.
As shown in fig. 4, the top cover 43 protrudes inward into the liquid chamber 400 toward the support shaft 44 of the liquid passing holder 10, and the height of the support shaft 44 is equal to the height of the elastic side wall 41 formed by the liquid pocket 40 in the contracted state of the liquid pocket 40. When the liquid is injected into liquid bag 40, and the force applied by the liquid to liquid bag 40 from liquid chamber 400 to gas chamber 300 is smaller than the pressing force applied by the gas pressure generated by the gas in gas chamber 300 to liquid chamber 40 from gas chamber 300 to liquid chamber 400, support shaft 44 abuts against the upper surface of liquid through seat 10 and provides a supporting force to top cover 43, so as to prevent liquid bag 40 from being damaged (for example, liquid bag 40 is broken) due to excessive deformation of liquid bag 40 pressed by the gas, thereby protecting liquid bag 40. When liquid is injected into the liquid chamber 400 from the liquid inlet passage 14, the volume of the liquid chamber 400 increases by the action of the liquid acting on the liquid bag 40 from the liquid chamber 400 to the gas chamber 300, and at this time, the elastic side wall 41 is subjected to tensile deformation in the vertical direction to generate a damping force opposite to the tensile direction, thereby preventing the volume of the liquid chamber 400 from further expanding due to the injection of the liquid into the liquid bag 40 from the liquid inlet seat 10. Generally, as the volume of the liquid chamber 400 is larger, the damping force generated by the deformation of the elastic sidewall 41 is larger according to hooke's law, thereby preliminarily cutting down the value of the pulsation pressure of the liquid injected into the liquid chamber 400 due to the change in the flow rate.
As shown in fig. 6 to 8, the cover plate 20 is provided with an intake valve 50 communicating with the gas chamber 300, and the intake valve 50 includes an intake valve body 51 and an intake valve body 53 housed in the intake valve body 51. The intake valve body 51 is recessed near one end of the cover plate 20 to form a first receiving groove 511, and a first fitting sleeve 521 and a first end seat 522 are fitted into the first receiving groove 511. A first through groove 5211 axially penetrating through the first sleeve insert 521 is formed in the center of the first sleeve insert 521, and is coaxially disposed with the first end base 522 and the first sleeve insert 521 along the vertical direction, a central through hole 5221 is formed in the end portion of the first sleeve insert 521 near the cover plate 20, and the central through hole 5221 is communicated with the first through groove 5211 to form an axisymmetrical structure. A second receiving groove 512 communicating with the first through groove 5211 is formed in the intake valve body 51 to assist in receiving the intake valve body 53, and the second receiving groove 512 communicates with a through hole 513 radially penetrating the intake valve body 51. The central through hole 5221, the first through groove 5211, the second receiving groove 512 and the through hole 513 together form an air inlet passage, wherein the central through hole 5221 is used as an inlet of the air inlet passage and is communicated with the air inlet hole 201. The intake valve core 53 includes a first valve rod 531 accommodated in the intake passage and a second elastic member 532 sleeved on the first valve rod 531. A first movable portion 5311 extending into the first through groove 5211 (i.e., into the intake passage) is formed at one end of the first stem 531 near the first end seat 522 in the vertical direction, and the first stem 531, which is rod-shaped and connected to the first movable portion 5311, is accommodated in the second accommodating groove 512. The second elastic member 532 is sleeved on the rod of the first valve stem 531 and clamped by the first movable portion 5311 and the air inlet valve 51. The pressing force of the gas injected into the intake valve body 51 from the intake hole 201 to the first movable portion 5311, which is downward in the vertical direction and directed to the second elastic member 531, and the elastic force of the second elastic member 531 to the first movable portion 5311, which is upward in the vertical direction and directed to the intake hole 201, act on the first movable portion 5311 together. When the pressing force applied to the first movable portion 5311 by the gas injected into the intake valve body 51 from the intake hole 201 is greater than the elastic force applied to the first movable portion 5311 by the second elastic member 531, the first movable portion 5311 moves downward in the vertical direction and is separated from the first end seat 522, and when the pressing force applied to the first movable portion 5311 by the second elastic member 531 is less than the elastic force applied to the first movable portion 5311 by the second elastic member 531, the first movable portion 5311 abuts against the first end seat 522 upward in the vertical direction, so that the first movable portion 5311 slides in the first through groove 5211 to form a state of shielding or exposing the central through hole 5221 through the first movable portion 5311, respectively, thereby forming a state of shielding or exposing the intake channel. The initial state of the second elastic member 532 is a contracted state to apply an elastic force directed toward the first end seat 522 to the first movable portion 5311. In this embodiment, the first movable portion 5311 is spherical to reduce sliding friction so as to slide in the first through groove 5211, and the first movable portion 5311 slides in the first through groove 5211, so the diameter of the first movable portion 5311 needs to be smaller than or equal to the inner diameter of the first through groove 5211, and preferably the diameter of the first movable portion 5311 is equal to the inner diameter of the first through groove 5211; meanwhile, the first movable portion 5311 needs to completely shield the central through hole 5221 to prevent gas from entering the intake passage, and thus the diameter of the first movable portion 5311 needs to be larger than the inner diameter of the central through hole 5221.
Specifically, when the extrusion force of the gas injected into the intake passage from the intake hole 201 to the first movable portion 5311 is less than or equal to the elastic force applied by the second elastic member 532 to the first movable portion 5311, the first movable portion 5311 abuts against the central through hole 5221 to completely shield the central through hole 5221, so that the gas cannot pass through the central through hole 5221 to prevent the gas from entering the intake valve, i.e., completely shield the intake passage. Preferably, the abutting surface of the first end seat 522 and the first movable portion 5311 may be provided with an annular groove (not shown) matching the shape of the first movable portion 5311, so as to achieve a closer abutting of the first end seat 522 and the first movable portion 5311, thereby preventing the air from passing through the annular gap between the first end seat 522 and the first movable portion 5311 to achieve a better shielding effect. When the pressing force of the gas injected into the gas inlet hole 201 to the first movable portion 5311 is greater than the elastic force of the second elastic member 532 to the first movable portion 5311, the pressing force of the gas overcomes the elastic force of the second elastic member 532 to drive the first movable portion 5311 to separate from the first end mount 522, so that the gas enters the gas chamber 300 from the gap between the first stem 531 and the gas inlet valve 51 after passing through the central through hole 5221. In summary, the intake valve 50 presets the minimum pressure at which the gas in the gas chamber 300 can be injected by presetting the magnitude of the elastic force applied by the second elastic member 532 to the first movable portion 5311 in the initial state; meanwhile, since the first movable portion 5311 is disposed below the first end seat 522, the intake valve 50 can also perform a function of allowing only one-way gas to pass therethrough, and the gas in the gas chamber 300 cannot be exhausted through the intake valve 50.
Further, as shown in fig. 8, in the present embodiment, the first through groove 5211 includes a sliding groove 52111 and a vent groove 52112 arranged radially outside the sliding groove 52111 and communicating with the sliding groove 52111. The sliding groove 52111 has a diameter equal to that of the first movable portion 5311, and when the first movable portion 5311 and the first end mount 522 are vertically separated from each other, gas passes through the vent groove 52112. The diameter of the stem portion of the first valve stem 531 is slightly smaller than the inner diameter of the second receiving groove 512 to create a gap communicating with the vent groove 52112. As described above, the gas passes through the vent groove 52112, passes through the gap between the first stem 531 and the second receiving groove 512, and enters the gas chamber 300 through the through hole 513. It should be noted that, in the present embodiment, a plurality of communicating vent grooves 52112 are formed on the radial outer side of the sliding groove 52111 to allow gas to enter the air intake passage; as a reasonable variation of this embodiment, the diameter of the first movable portion 5311 can be set to be larger than the inner diameter of the central through hole 5221 and slightly smaller than the diameter of the sliding groove 52111.
Referring to fig. 1, 2 and 9 to 10, the cover plate 20 is provided with a gas outlet valve 60 communicating with the gas chamber 300, and the gas outlet valve 60 includes a gas outlet valve body 61 and a gas outlet valve core 63 accommodated in the gas outlet valve body 61. The end of the air outlet valve body 61 close to the cover plate 20 is recessed to form a first receiving groove 611, and the second inserting sleeve 621 and the second end seat 622 are inserted into the first receiving groove 611. The center of the second embedded sleeve 621 forms a second through groove 6211 axially penetrating the second embedded sleeve 621, and is coaxially disposed with the second end seat 622 and the second embedded sleeve 621 along the vertical direction, and a central hole (not shown) is formed at the end of the second embedded sleeve 621 far away from the cover plate 20 and communicated with the second through groove 6211. One end of the air outlet valve body 61, which is far away from the cover plate 20, is recessed to form a second accommodating groove 613, and the second accommodating groove 613 is communicated with the central hole through a communication groove 612. The second through groove 6211, the center hole, the communication groove 612, and the second receiving groove 613 collectively form an outlet passage for the gas to be discharged from the gas chamber 300, wherein the second through groove 6211 is communicated with the outlet hole 202 as an outlet of the outlet passage. The air outlet valve body 61 is provided with an air vent 614 which penetrates through the air outlet valve body 61 in the radial direction and communicates with the second accommodating groove 613. The air outlet valve core 63 includes a second valve rod 632 and a third elastic member 631 accommodated in the air outlet channel. One end of the second stem 632 includes a second movable portion 6321 that extends into the second through groove 6211, and the stem portion of the second stem 632 passes through the circular hole and is received by the communication groove 612 and the second receiving groove 613 together. The third elastic member 631 is disposed between the second movable portion 6321 and the cover plate 20, so that the third elastic member 631 is clamped by the second movable portion 6321 and the cover plate 20. The pressing force applied to the second movable portion 6321 by the gas exhausted from the gas outlet channel and the elastic force applied to the second movable portion 6321 by the third elastic member 631 act together on the second movable portion 6321, so that the second movable portion 6321 slides in the second through groove 6211, thereby forming a state of shielding or exposing the gas outlet channel. The initial state of the third elastic member 631 is a contracted state to apply an elastic force directed to the second end seat 622 to the second movable portion 6321.
It should be particularly noted that the principle of action of the air outlet valve core 63 is the same as that of the air inlet valve core 53, and a person skilled in the art can derive a specific embodiment of the air outlet valve core 63 by the above description of the air inlet valve core 53, that is, the air inlet valve core 53 and the air outlet valve core 63 have the same structure. The difference is that the moving directions of the first movable portion 5311 and the second movable portion 6321 are different, and the meaning of the minimum air pressure set by the air inlet valve core 53 and the air outlet valve core 63 is different (i.e. the air inlet valve core 53 is used for presetting the minimum air pressure of the gas that can be input into the gas chamber 300, and the air outlet valve core 63 is used for presetting the minimum air pressure of the gas that can be discharged out of the gas chamber 300), and therefore, the description thereof is omitted.
As shown in fig. 1 and 9 to 10, the diameter of the second receiving groove 613 is larger than the diameter of the communication groove 612. The second receiving groove 613 (i.e. the air outlet channel) movably receives the movable opening/closing element 64 therein. The movable opening/closing assembly 64 includes a piston 642 movably received in the second receiving groove 613 and a first elastic member 641. The liquid bag 40 and the air outlet valve body 61 jointly clamp the piston 642 and the first elastic member 641, wherein the first elastic member 641 is disposed above the piston 642 (i.e., the first elastic member 641 is clamped by the piston 642 and the air outlet valve body 61). The outer diameter of the piston 642 is equal to the inner diameter of the second receiving groove 613, and the piston 642 and the second receiving groove 613 are coaxially disposed and axially movably received in the second receiving groove 613, so that the piston 642 and the second receiving groove 613 are tightly fitted, and thus the gas in the gas chamber 300 cannot enter the gas outlet channel through a gap formed between the piston 642 and the second receiving groove 613, and therefore the gas can only enter the gas outlet channel through the vent hole 614. The piston 642 slides in the second receiving groove 613 under the pushing force applied to the piston 642 by the liquid bag 40 and the elastic force applied by the first elastic member 641 to form a state of shielding or exposing the vent hole 614. An end of the second valve rod 632 remote from the second movable portion 6321 protrudes into the cavity 6421 of the piston 642 and is connected to a stopper 6322 at the end to limit the maximum sliding range of the piston 642, thereby preventing the piston 642 from falling out of the second receiving groove 613 in the contracted state of the liquid bladder 40.
Specifically, when the pushing force of the liquid bag 40 on the piston 642 is less than or equal to the elastic force of the first elastic member 641 on the piston 642 and directed to the liquid bag 40, the first elastic member 641 pushes the piston 642 against the liquid bag 40 and exposes the vent hole 614. At this point, the gas in the gas chamber 300 enters the outlet channel through the vent hole 614 and exits the gas chamber 300. When the pushing force of liquid bag 40 on piston 642 is greater than the elastic force of first elastic member 641 on piston 642 directed to liquid bag 40, the impact force of liquid bag 40 on piston 642 resists the elastic force of first elastic member 641 on piston 642 to drive piston 642 to shield vent hole 614; at this time, the gas in the gas chamber 300 cannot enter the gas outlet passage through the vent hole 614, thereby causing the gas pressure in the gas chamber 300 to increase the damping force of the gas against the liquid bladder 40 by the thrust. It should be noted that, in the initial state, first elastic member 641 is in the contracted state to apply an elastic force to piston 642 toward liquid bladder 40, thereby ensuring that piston 642 always engages with the upper surface of liquid bladder 40 to sense the volume change of liquid bladder 40. The side wall of the air outlet valve body 61 is sleeved with a limiting block 65. When liquid bladder 40 contacts stopper 65, stopper 65 will prevent further stretching of liquid bladder 40 to limit the maximum length that liquid bladder 40 can be stretched. As a reasonable extension of the present invention, the piston 642 may also be sleeved outside the air outlet valve body 61 to movably shield or expose the vent hole 614.
The operation of the present invention will be described in detail with reference to fig. 1 to 10. When liquid is injected into the liquid chamber 400 from the liquid inlet passage 14, the elastic side wall 41 of the liquid bag 40 is stretched upward by the impact force of the liquid and the pressure of the liquid, and the elastic side wall 41 is subjected to tensile deformation to generate a damping force in the direction opposite to the stretching direction, thereby preventing the volume of the liquid chamber 400 from being enlarged, and thus primarily reducing the pressure pulse value existing in the liquid. According to hooke's law, since the elastic coefficient and the deformable range of the elastic sidewall 41 are fixed, the damping force provided by the liquid bag 40 to prevent the liquid chamber 400 from expanding is limited, and when the force of the pressure pulse value in the liquid applied to the liquid bag 40 from the liquid chamber 400 to the gas chamber 300 is greater than the damping force provided by the elastic sidewall 41 due to the elastic deformation in the direction opposite to the elastic deformation direction, the volume of the liquid chamber 400 is expanded, and the volume of the shielding chamber is fixed, so that the volume of the gas chamber 300 is reduced; at the same time, liquid bladder 40 pushes piston 642 upward to shield vent 614 to prevent gas from exhausting from gas chamber 300; it further causes the gas pressure of the gas in the gas chamber 300 to rise to prevent the volume of the liquid bladder 40 from increasing by the resistance generated by the gas pressure, and further cuts down the pressure pulse value of the liquid due to the change of the flow rate, thereby eliminating the water hammer phenomenon in the liquid piping system. Further, when the pressing force generated by the pressure of the gas in the gas chamber 300 is greater than the pressure pulse value of the liquid in the liquid chamber 400, the gas in the gas chamber 300 pushes the liquid bag 40 to contract, and the liquid in the liquid chamber 400 is discharged through the liquid outlet channel 13. At this time, the elastic force of the first elastic member 641 applied to the piston 642 is greater than the pushing force of the liquid bag 40 applied to the piston 642, so that the first elastic member 641 pushes the piston 642 downward to expose the vent hole 614 to release the gas in the gas chamber 300, and the gas pressure in the gas chamber 300 is reduced. When the force of the liquid injected into liquid chamber 400 and directed toward gas chamber 300 against liquid bladder 40 is again greater than the force of the gas pressure generated by the gas in gas chamber 300 and directed toward liquid chamber 400 against liquid bladder 40, the pulse damper enters the next cycle of action that cuts the value of the pressure pulse in the liquid. Therefore, the pulse damper disclosed by the invention performs the rectification function of peak clipping and valley filling on the pulsation pressure value generated by the liquid flow speed change in the liquid pipeline system, and smoothes the pulsation of the liquid hydraulic pressure and the water flow rate in the liquid pipeline system through the change of the volume of the gas cavity 300 and the liquid cavity 400 (shown in the combination of fig. 11 and 12)
It should be noted that, in the present embodiment, the liquid inlet channel 14 includes a first horizontal section 142 communicating with the liquid source supplied by the external pipeline and a first vertical section 141 communicating with the first horizontal section 142 and connected to the liquid chamber 400, and similarly, the liquid outlet channel 13 includes a second horizontal section 132 communicating with the external pipeline and a second vertical section 131 communicating with the second horizontal section 132 and connected to the liquid chamber 400. The cross-sectional area of the first vertical section 141 formed in the horizontal direction is set larger than the cross-sectional area of the second vertical section 131 formed in the horizontal direction (as viewed from the view shown in fig. 2). From bernoulli's equation, since the cross-sectional area of second vertical section 131 is smaller than the cross-sectional area of first vertical section 141, the flow rate of the liquid in second vertical section 131 increases, resulting in a decrease in the pressure value in the liquid.
The applicant uses pure water as test liquid, selects an Yiweiqi FW-20 air sac pump as a power system to be communicated with the pulse damper disclosed in the first embodiment, and uses a Ginzhi GP-M010 type pressure sensor and a Ginzhi FD-Q20C type flow sensor to test the water flow and the water pressure when the pulse damper is connected and not connected in a liquid pipeline system. In the test, the pressure of the bellows pump was set to 0.4MPa, and the damping gas pressure was set to 0.2MPa (i.e., the gas pressure of the gas injected into the gas chamber was set to 0.2 MPa).
The pulse damper disclosed by the invention is connected into a liquid pipeline system, an air bag pump is started, and the numerical values measured by a pressure sensor and a flow sensor at different time points are recorded; the pulse damper is dismounted from the liquid pipeline system, the air bag pump is started, and the numerical values measured by the pressure sensor and the flow sensor at different time points are recorded; the data obtained when the pulse damper was connected and not connected to the liquid piping system were plotted as a line graph of water flow rate and a line graph of water pressure (see fig. 11 and 12).
Referring to fig. 11 and 12, when the pulse damper is connected to the liquid pipeline system, the water flow rate in the liquid pipeline system is in a range of 28.1-29.3L/min, and when the pulse damper is not provided in the liquid pipeline system, the water flow rate in the liquid pipeline system is in a range of 34.9-38.9L/min; when the pulse damper is connected into the liquid pipeline system, the range of water pressure in the liquid pipeline system is 8-18kPa, and the range of water pressure in the liquid pipeline system is 8-47kPa when the pulse damper is not arranged in the liquid pipeline system.
Compared with the situation that no damper exists in the liquid pipeline system, the pulse damper is connected into the liquid pipeline system to successfully reduce the water flow (about 75% of the water flow in the liquid pipeline system without the pulse damper) in the liquid pipeline system, so that the change of the water flow in the liquid pipeline system is more stable; meanwhile, a pulse damper is connected into the liquid pipeline system to stabilize the hydraulic pressure in the liquid pipeline system in a smaller range, so that the liquid pipeline system is protected, the impact of pressure fluctuation on the liquid pipeline system is reduced, and the damage of a water hammer phenomenon to the liquid pipeline system is reduced or even eliminated.
Example two:
based on the technical solution contained in the pulse damper disclosed in the first embodiment, the present embodiment also discloses a semiconductor device.
The semiconductor device includes: a liquid pipeline system and a pulse damper connected into the liquid pipeline system. The semiconductor devices include various types of semiconductor devices used in the related art to perform processes such as photolithography, cleaning, chemical mechanical polishing, etching, epitaxy, etc. on a wafer or an integrated circuit or an LED. Generally, a pulse pressure value is generated based on the flow of liquid in the liquid pipeline system, so that the pulse pressure value can be reduced based on the pulse damper. The liquid pipeline system in this embodiment at least comprises a circulating pump (not shown) for circulating or delivering the driving liquid in the liquid pipeline system and at least one pipeline, and the pulse damper is connected to the pipeline.
The semiconductor device disclosed in this embodiment has the same technical solutions as those in the first embodiment, and reference is made to the first embodiment, which is not repeated herein.
The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (12)
1. A pulse dampener, comprising:
the shielding shell is arranged in the shielding shell and comprises a liquid through seat and a cover plate which are separately arranged, and a cover body of which two ends are respectively connected with the liquid through seat and the cover plate in a sealing way;
the sealed cavity is isolated by the liquid bag to form a liquid cavity with variable volume and a gas cavity, the shielding shell is provided with an air outlet valve communicated with the gas cavity, the air outlet valve comprises an air outlet valve body, and the air outlet valve body forms an air outlet channel for air to be discharged out of the gas cavity and a vent hole communicated with the air outlet channel;
the air outlet valve body is internally provided with a movable opening and closing component movably accommodated by the air outlet channel so as to trigger the movable opening and closing component to shield and expose the vent hole through the volume change of the liquid cavity caused by the liquid flowing through the liquid bag;
the liquid bag includes the elasticity lateral wall and certainly the top cap that the radial extension of elasticity lateral wall formed, the top cap to protruding the orientation of stretching in the liquid cavity lead to the back shaft of liquid seat, the radial inside sunken recess that forms of top cap, first reinforcement is established to the recess is embedded, and the upper surface of top cap sets up the second reinforcement to use the fastener to run through first reinforcement, top cap and second reinforcement along vertical direction, in order to pass through first reinforcement and the common centre gripping top cap of second reinforcement.
2. The pulse damper of claim 1, wherein the movable opening and closing assembly comprises: the piston and the first elastic piece are movably contained in the air outlet channel, the liquid bag and the air outlet valve body clamp the piston and the first elastic piece together, and the piston slides in the air outlet channel under the combined action of thrust applied to the piston by the liquid bag and elastic force which is applied to the piston by the first elastic piece and is opposite to the thrust action direction so as to form a state of shielding or exposing the vent hole.
3. Pulse damper according to claim 2,
when the pushing force exerted by the liquid bag on the piston is smaller than or equal to the elastic force which is exerted by the first elastic piece to the piston and points to the liquid bag, the first elastic piece pushes the piston to abut against the surface of the liquid bag and exposes the vent hole;
when the pushing force of the liquid bag on the piston is larger than the elastic force which is applied to the piston by the first elastic piece and is directed to the liquid bag, the impact force of the liquid bag on the piston resists the elastic force applied to the piston by the first elastic piece so as to drive the piston to shield the vent hole.
4. The pulse damper as claimed in claim 1, wherein the liquid passing base is provided therein with a liquid inlet channel and a liquid outlet channel communicated with the liquid bag, and the cover plate is provided therein with a gas inlet hole communicated with the gas inlet valve and a gas outlet hole communicated with the gas outlet valve.
5. The pulse damper according to claim 4, wherein the air inlet valve comprises an air inlet valve body connected with the cover plate and an air inlet valve core accommodated in the air inlet valve body, and the air inlet valve body forms an air inlet channel communicated with the air inlet hole for injecting air into the air cavity;
the air inlet valve core comprises a first valve rod accommodated in the air inlet channel and a second elastic piece sleeved on the first valve rod, one end of the first valve rod forms a first movable part used for extending into the air inlet channel, and the first movable part moves in the air inlet channel to shield or expose the air inlet channel under the combined action of extrusion force applied to the first movable part by air and elastic force which is applied to the first movable part by the second elastic piece and has the direction opposite to the action direction of the extrusion force.
6. Pulse damper according to claim 5,
when the extrusion force of the gas injected into the gas inlet channel on the first movable part is less than or equal to the elastic force of the second elastic part on the first movable part, the first movable part shields the gas inlet channel;
when the pressing force of the gas injected into the gas inlet channel on the first movable part is larger than the elastic force of the second elastic part on the first movable part, the first movable part exposes the gas inlet channel.
7. The pulse damper according to claim 1, wherein the outlet valve includes an outlet valve core accommodated in the outlet valve body, the outlet valve core includes a second valve rod accommodated in the outlet passage and a third elastic member sleeved on the second valve rod, one end of the second valve rod forms a second movable portion extending into the outlet passage, and the second movable portion moves in the outlet passage to shield or expose the outlet passage under combined action of the pressing force applied to the second movable portion by the gas and the elastic force applied to the second movable portion by the third elastic member, the elastic force being opposite to the pressing force acting direction.
8. Pulse damper according to claim 7,
when the extrusion force of the gas exhausted from the gas outlet channel on the second movable part is less than or equal to the elastic force of the third elastic piece on the second movable part, the second movable part shields the gas outlet channel;
when the extrusion force of the gas exhausted from the gas outlet channel on the first movable part is greater than the elastic force of the third elastic piece on the second movable part, the second movable part exposes the gas outlet channel.
9. Pulse damper according to claim 4,
the height of the support shaft is equal to the height of the elastic side wall in the contracted state of the liquid bag, and the elastic side wall provides a damping force for preventing the volume of the liquid chamber from expanding.
10. The pulse damper as claimed in claim 9, wherein the end of the elastic side wall away from the top cover is protruded with a retaining part along the extending direction of the telescopic side wall, the liquid through seat is recessed with a slot, and the retaining part is sealed and buckled with the slot to form a completely sealed liquid chamber.
11. The pulse damper of claim 4, wherein the cross-sectional area of the inlet channel is greater than the cross-sectional area of the outlet channel.
12. A semiconductor device, comprising:
a liquid pipe system, and a pulse damper according to any one of claims 1 to 11 incorporated into the liquid pipe system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210007994.4A CN114017575B (en) | 2022-01-06 | 2022-01-06 | Pulse damper and semiconductor equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210007994.4A CN114017575B (en) | 2022-01-06 | 2022-01-06 | Pulse damper and semiconductor equipment |
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| CN114017575A CN114017575A (en) | 2022-02-08 |
| CN114017575B true CN114017575B (en) | 2022-05-20 |
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| CN202210007994.4A Active CN114017575B (en) | 2022-01-06 | 2022-01-06 | Pulse damper and semiconductor equipment |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0617752A (en) * | 1992-07-01 | 1994-01-25 | Iwaki:Kk | Pulsation reducing device |
| JP3310566B2 (en) * | 1997-01-10 | 2002-08-05 | 日本ピラー工業株式会社 | Pumps for semiconductor manufacturing equipment |
| JP2998083B2 (en) * | 1998-03-20 | 2000-01-11 | 日本ピラー工業株式会社 | Pump pulsation suppressor |
| JP3205909B2 (en) * | 1999-10-25 | 2001-09-04 | 日本ピラー工業株式会社 | Pump with pulsation reduction device |
| JP3564362B2 (en) * | 2000-05-10 | 2004-09-08 | 日本ピラー工業株式会社 | Pulsation damping device |
| JP3742791B2 (en) * | 2002-12-03 | 2006-02-08 | 日本ピラー工業株式会社 | pump |
| CN113915446A (en) * | 2020-07-10 | 2022-01-11 | 保定雷弗流体科技有限公司 | Pulse damper for fluid transmission and fluid transmission system |
| CN113790328A (en) * | 2021-09-18 | 2021-12-14 | 冯雪 | Water hammer eliminator for water delivery pipeline |
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Address after: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Zhicheng semiconductor equipment technology (Kunshan) Co.,Ltd. |
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Address after: 215000, No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |