CN114001856B - Six-dimensional force sensor - Google Patents
Six-dimensional force sensor Download PDFInfo
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- CN114001856B CN114001856B CN202111172303.8A CN202111172303A CN114001856B CN 114001856 B CN114001856 B CN 114001856B CN 202111172303 A CN202111172303 A CN 202111172303A CN 114001856 B CN114001856 B CN 114001856B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/166—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
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Abstract
The invention discloses a six-dimensional force sensor, which comprises a sensor base, an elastic deformation module, a measuring grating and a six-dimensional grating encoder, wherein the measuring grating is arranged on the sensor base; the sensor base is used for bearing the elastic deformation module; the elastic deformation module is used for bearing and representing the force born by the object; the measuring grating is arranged on the object and used for reflecting the deformation of the elastic deformation module and reflecting the measuring light beam from the six-dimensional grating encoder to obtain a coherent light beam; the six-dimensional grating encoder receives the coherent light beam reflected by the measuring grating and measures six-dimensional pose change information of the object when the object is stressed according to the coherent light beam so as to obtain six-dimensional stress information of the object.
Description
Technical Field
The invention relates to the technical field of mechanical sensors, in particular to a six-dimensional force sensor for optical detection by utilizing a grating.
Background
The six-dimensional force sensor is capable of detecting a three-dimensional axial force (F x ,F y ,F z ) And three-dimensional moment (M) x ,M y ,M z ) Thus becoming a research hotspot. Has important theoretical and practical significance for research and application.
Currently, a six-dimensional force sensor generally adopts a mode of attaching a strain gauge, such as a multi-dimensional force sensor invented by Harbin university of industry Liu Hong and the like (patent application number CN 00236964.8); there is also a piezoelectric six-dimensional force sensor (patent application number CN 201510203135.2) invented by Stewart structural hybrid piezoelectric materials, such as university of ji nan Li Yuqin. However, some of these prior art solutions have too many strain gages required and the decoupling is quite complex; some structures are very complex and are difficult to meet practical requirements.
Disclosure of Invention
The invention mainly aims to overcome the defects of the prior art, and provides a six-dimensional force sensor which is used for solving the problems of complex structure, difficult decoupling and low feasibility of the existing six-dimensional force sensor.
The invention adopts the following technical scheme for solving the problems:
a six-dimensional force sensor comprises a sensor base, an elastic deformation module, a measuring grating and a six-dimensional grating encoder; the sensor base is used for bearing the elastic deformation module; the elastic deformation module is used for bearing and representing the force born by the object; the measuring grating is arranged on the object and used for reflecting the deformation of the elastic deformation module and reflecting the measuring light beam from the six-dimensional grating encoder to obtain a coherent light beam; the six-dimensional grating encoder receives the coherent light beam reflected by the measuring grating and measures six-dimensional pose change information of the object when the object is stressed according to the coherent light beam so as to obtain six-dimensional stress information of the object.
Furthermore, the sensor base is of a hollow structure in the middle, the elastic deformation module is located at the hollow part of the sensor base, and the periphery of the elastic deformation module is connected with the sensor base and the inner side of the elastic deformation module is in contact with the object.
Furthermore, the elastic deformation module comprises four elastic components with the same shape, the four elastic components are distributed in a cross shape at the hollowed-out part of the sensor base, the outer ends of the four elastic components are respectively connected with the sensor base, and the inner ends of the four elastic components are contacted with the object, so that the object is positioned at the center of the elastic deformation module.
Further, the cross sections of the four elastic components are rectangular, circular or I-shaped.
Further, the measuring grating is closely attached to the surface of the object, and has the same pose change as the object.
Further, the six-dimensional grating encoder is located directly above the measurement grating, and sends a measurement beam to the measurement grating.
Further, when the object is stressed, the six-dimensional grating encoder detects the axial displacement of the object on one hand through the coherent light beam reflected by the measuring grating, and then calculates the force applied by the object in the corresponding axial direction according to the axial displacement; on the other hand, the angle data of the axial rotation of the object is detected, and then the moment of the object stressed in the corresponding axial direction is calculated according to the angle data.
Further, the force applied to the object in the x-axis, y-axis and z-axis directions is setIs F x 、F y 、F z Corresponding moments are M respectively x 、M y 、M z Then:
wherein a is the cross-sectional side length of the elastic component of the elastic deformation module, E is the elastic modulus of the elastic component, L is the length of the elastic component in the extending direction from an object to a sensor base, G is the shear modulus of the elastic component, I z 、I p Respectively the moment of inertia and the polar moment of inertia of the elastic component, and Deltax, deltay and Deltaz respectively represent the displacement in the directions of the x axis, the y axis and the z axis when the object is stressed, and theta x 、θ y 、θ z The rotation angles of the object in the x-axis, y-axis and z-axis directions are respectively shown when the object is stressed.
Further, if the spot of the measuring beam emitted by the six-dimensional grating encoder is not located at the geometric center of the measuring grating, then:
when the object is stressedRotation about the x-axis produces a first additional displacement in the z-axis, denoted as Δz x Detecting Δz by the six-dimensional grating encoder (4) x And has a delta z x ＝e x ·θ x ；
When the object is forced to rotate around the y-axis, a second additional displacement is generated in the z-axis, which is marked as deltaz y Detecting Δz by the six-dimensional grating encoder (4) y And has a delta z y ＝e y ·θ y ；
When the object is forced to rotate around the z-axis, a third additional displacement delta x is generated in the x-axis and the y-axis respectively z Fourth additional displacement deltay z And has Deltax z ＝e x -ρ·cos(θ+θ z )，Δy z ＝ρ·sin(θ+θ z )-e y ；
Wherein e x 、e y The displacement of the light spot relative to the X-axis and the displacement of the light spot relative to the geometric center of the measuring grating are respectively shown in the specification;
at this time, the axial displacement of the x axis, the y axis and the z axis of the object under stress is respectively corrected as follows:
Δx 0 ＝Δx-Δx z ；
Δy 0 ＝Δy-Δy z ；
Δz 0 ＝Δz-Δz x -Δz y ；
thus, the axial forces applied to the object in the x-axis, y-axis and z-axis are corrected as follows:
six-dimensional mechanical data of the integrated object are as follows:
still further, the measurement grating is a two-dimensional absolute grating.
The technical scheme of the invention has the beneficial effects that: according to the invention, through an integrated six-dimensional measurement system, quantitative detection of the grating pose, namely deformation of the stressed object, can be realized through data measured by the photoelectric detector, and the six-dimensional force applied to the object is finally obtained through calculation according to the deformation quantity and a related material mechanical formula. The invention has the advantages of simple structure, easy operation, small influence by environment and the like.
In a further technical scheme of the invention, two-dimensional gratings with higher grating line number can be further arranged, so that the detection precision is improved.
Drawings
FIG. 1 is a schematic diagram of one embodiment of six-dimensional force sensor detection of the present invention;
FIG. 2 is a diagram of a six-dimensional force sensor of the present invention detecting axial force F x Is a stress deformation schematic diagram;
FIG. 3 is a diagram of a six-dimensional force sensor of the present invention detecting axial force F y Is a stress deformation schematic diagram;
FIG. 4 is a diagram of a six-dimensional force sensor of the present invention detecting axial force F z Is a stress deformation schematic diagram;
FIG. 5 is a diagram of a six-dimensional force sensor of the present invention detecting a moment M about the x-axis x Is a stress deformation schematic diagram;
FIG. 6 is a diagram of a six-dimensional force sensor of the present invention detecting a moment M about the y-axis y Is a stress deformation schematic diagram;
FIG. 7 is a diagram of a six-dimensional force sensor of the present invention detecting moment M about the z-axis z Is a force-deformation schematic diagram.
Detailed Description
The invention will be further described with reference to the drawings and the detailed description.
An embodiment of the present invention provides a six-dimensional force sensor, and fig. 1 is a schematic diagram of an embodiment of detection of the six-dimensional force sensor, where lines with arrows in the diagram indicate light beams, and directions of the arrows indicate propagation directions of the light beams. Referring to fig. 1, the six-dimensional force sensor includes a sensor base 1, an elastic deformation module 2, a measurement grating 3, and a six-dimensional grating encoder 4. The sensor base 1 is used for bearing the elastic deformation module 2; the elastic deformation module 2 is used for bearing and representing the force exerted by the object 5; the measuring grating 3 is arranged on the object 5 and is used for reflecting the deformation of the elastic deformation module 2 and reflecting the measuring light beam 6 from the six-dimensional grating encoder 4 to obtain a coherent light beam 7; the six-dimensional grating encoder 4 receives the coherent light beam 7 reflected by the measuring grating 3, and measures six-dimensional pose change information of the object 5 when the object 5 is stressed according to the coherent light beam 7, so as to further calculate six-dimensional stress information of the object 5.
With continued reference to fig. 1, the sensor base 1 is in a hollow structure in the middle, the elastic deformation module 2 is located at the hollow part of the sensor base 1, and the periphery of the elastic deformation module 2 is connected with the sensor base 1, while the inner side contacts the object 5. In some embodiments, the elastic deformation module 2 includes four elastic components 21, 22, 23, 24 with the same shape, and the four elastic components are arranged in a cross shape at the hollowed-out part of the sensor base 1, the outer ends of the four elastic components are respectively connected with the sensor base 1, the inner ends of the four elastic components contact with the object 5, and the object 5 is located at the center of the elastic deformation module 2. It should be understood that the inner ends of the four elastic members 21, 22, 23, 24 do not contact each other, but connect four portions of the object 5, confining the object 5 to the center of the elastic deformation module 2. The four spring elements are more beam-like and may therefore be referred to as "spring beams". The cross section of the spring beam may be rectangular, circular, i-shaped or otherwise shaped, as the invention is not limited in this regard. In a preferred embodiment of the invention, this is achieved by using a resilient beam having a square cross section.
When the six-dimensional mechanical measuring device is used, the measuring grating 3 is tightly attached to the surface of the object 5 and has the same pose change with the object 5, the six-dimensional grating encoder 4 is positioned right above the measuring grating 3, a measuring light beam 6 can be sent to the measuring grating 3, when the pose change occurs to the object under stress, the measuring grating 3 reflects the same pose change, the pose change is reflected by the coherent light beam 7 reflected by the measuring grating 3, six-dimensional pose change information (comprising displacement change and rotation angle of the x axis, the y axis and the z axis) of the object under stress can be measured by the six-dimensional grating encoder 4, and 6 groups of stress information of the axial force and the moment of the x axis, the y axis and the z axis are further calculated based on the six-dimensional pose change information, so that six-dimensional mechanical measurement is realized. Specifically, when the object 5 is stressed, the six-dimensional grating encoder 4 can detect the axial displacement of the object on one hand by measuring the coherent light beam reflected by the grating 3, and then calculate the stress of the object in the corresponding axial direction according to the axial displacement; on the other hand, the axial rotation angle data (radian system) of the object can be detected, and then the moment of the object stressed in the corresponding axial direction can be calculated according to the angle data.
Based on the structure and principle, the six-dimensional force sensor provided by the invention has the following using flow:
the pose of the measurement grating 3 and the six-dimensional grating encoder 4 are adjusted well until a good interference pattern is observed by the six-dimensional grating encoder 4.
Referring to FIG. 2, to calculate the axial force F x Is a force-deformation schematic diagram. When the rigid object 5 is stressed to generate axial displacement, the six-dimensional grating encoder 4 can detect displacement data deltax in the x-axis direction by measuring the coherent light beam reflected by the grating 3. The displacement measurement relates to the theory of interference and diffraction of light, and the main method is to convert the measurement of displacement into the calculation of the period number of interference signals, wherein the calculation process is the prior art, and the specific calculation process can refer to a patent document CN212747682U detection system and a grating ruler, and is not repeated here. The displacements deltay and deltaz that occur in the y-axis and z-axis when an object is stressed can be known in the same way.
For the convenience of analysis, the cross section of the elastic beam is square (the cross section can be rectangular, circular, I-shaped, etc., and the square is taken here to be convenient for calculation formula derivation), the side length is a, the length of the elastic beam (the direction from the object to the sensor base) is L, the elastic modulus is E, the shearing modulus is G, and the inertia moment of the elastic beam is I z The polar moment of inertia of the elastic beam is I p All are international units.
Axial force F x The relationship with displacement Δx is:
referring to FIG. 3, to calculate the axial force F y Is a force-deformation schematic diagram. When the rigid object 5 is subjected to axial displacement, the six-dimensional grating encoder 4 can detect the displacement deltay of the object in the y-axis direction by measuring the coherent light beam reflected by the grating 3.
Axial force F y The relationship with displacement deltay is:
referring to FIG. 4, to calculate the axial force F z Is a force-deformation schematic diagram. When the rigid object 5 is subjected to axial displacement, the six-dimensional grating encoder 4 can detect the displacement deltaz of the object in the z-axis direction by measuring the coherent light beam reflected by the grating 3.
Axial force F z The relationship with displacement Δz is:
referring to FIG. 5, to calculate the moment M about the x-axis x Is a force-deformation schematic diagram. When the rigid object 5 is stressed to rotate around the x-axis, the elastic beams 22 and 24 are bent and deformed, the elastic beams 21 and 23 are twisted and deformed, and the six-dimensional grating encoder 4 can detect the angle data theta of the rotation around the x-axis by measuring the coherent light beam reflected by the grating 3 x (radian) this angle is equal to the moment M only x Related to the following. The principle of measuring angles is the fundamental principle of reflection of light in geometrical optics. The six-dimensional grating encoder 4 is internally provided with an optical detector, and can detect the position change of the reflected coherent light beam, and the deflection angle of the grating can be calculated according to the position change. The rotation angle of the object can be obtained because the measuring grating has the same pose change as the object. The calculation process is in the prior art, and the specific calculation process can refer to a patent document CN212747682U detection system and a grating ruler, which are not described herein. Similarly, the rotation angle theta of the object around the y axis and the z axis when the object is stressed can be known y And theta z 。
Moment M x And angle theta x The relation of (2) is:
referring to FIG. 6, to calculate the moment M about the y-axis y Is a force-deformation schematic diagram. When the rigid object 5 is stressed to rotate around the y axis, the elastic beams 22 and 24 are deformed in torsion, the elastic beams 21 and 23 are deformed in bending, and the six-dimensional grating encoder4 the angle θ can be detected by measuring the coherent light beam reflected by the grating 3 y (radian system), the angle θ y Only sum moment M y Related to the following.
Moment M y And angle theta y The relation of (2) is:
referring to FIG. 7, to calculate moment M about the z-axis z Is a force-deformation schematic diagram. When the rigid object 5 is forced to rotate around the z-axis, the six-dimensional grating encoder 4 can detect the angle theta by measuring the coherent light beam reflected by the grating 3 z (radian system), the angle θ z Only sum moment M z Related to the following.
Moment M z And angle theta z The relation of (2) is:
it should be noted that if the spot of the measuring beam emitted by the six-dimensional grating encoder is not at the geometric center of the measuring grating 3, when the rigid object 5 rotates about the x-axis, this rotation will produce an additional displacement in the z-axis, denoted as Δz x The method comprises the steps of carrying out a first treatment on the surface of the When the rigid object 5 rotates about the y-axis, this rotation produces an additional displacement in the z-axis, denoted as deltaz y The method comprises the steps of carrying out a first treatment on the surface of the When the rigid object 5 rotates about the z-axis, this rotation produces an additional displacement deltax in the x-axis and the y-axis, respectively z 、Δy z These additional displacements are detectable by the six-dimensional grating encoder 4. Moment M at this time x And angle theta x Is unchanged but with an additional displacement deltaz x Will be against axial force F z Is influenced by the solution of (2). Likewise, moment M y And angle theta y Is unchanged but with an additional displacement deltaz y Will be against axial force F z Is influenced by the solution of (2); moment M z And angle theta z Is unchanged but with an additional displacement deltax z Will be against axial force F x Is to influence and addDisplacement deltay z Will be against axial force F y Is influenced by the solution of (2). In this case, the calculation formula of the axial stress of the object needs to be corrected.
As a preferred embodiment of the measuring grating 3, a two-dimensional absolute grating is used, the absolute position of the spot on the grating being known. Taking the geometric center of the grating as an origin, and taking the positive direction of the coordinate axis as positive, wherein the displacement of the light spot from the origin in the x-axis direction and the y-axis direction is respectively e x 、e y Then add displacement deltaz x And e x The following relationship exists:
Δz y ＝e y ·θ y (7)
additional displacement Δz y And e y The following relationship exists:
Δz y ＝e y ·θ y (8)
additional displacement Deltax z 、Δy z The method comprises the following steps of:
Δx z ＝e x -ρ·cos(θ+θ z ) (9)
Δy z ＝ρ·sin(θ+θ z )-e y (10)
wherein, the liquid crystal display device comprises a liquid crystal display device,
at this time, the axial displacement of the x axis, the y axis and the z axis of the object under stress is respectively corrected as follows:
Δx 0 ＝Δx-Δx z (11)
Δy 0 ＝Δy-Δy z (12)
Δz 0 ＝Δz-Δz x -Δz y (13)
thus, the axial forces applied to the object in the x-axis, y-axis and z-axis are corrected as follows:
after integration, six-dimensional mechanical data of the object can be obtained as follows:
the foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several equivalent substitutions and obvious modifications can be made without departing from the spirit of the invention, and the same should be considered to be within the scope of the invention.
Claims (10)
1. A six-dimensional force sensor, characterized by: the sensor comprises a sensor base (1), an elastic deformation module (2), a measuring grating (3) and a six-dimensional grating encoder (4);
wherein the sensor base (1) is used for bearing the elastic deformation module (2); the elastic deformation module (2) is used for bearing and representing the force exerted by the object (5); the measuring grating (3) is arranged on the object (5) and is used for reflecting the deformation of the elastic deformation module (2) and reflecting the measuring light beam (6) from the six-dimensional grating encoder (4) to obtain a coherent light beam (7); the six-dimensional grating encoder (4) receives the coherent light beam reflected by the measuring grating (3) and measures six-dimensional pose change information of the object (5) when the object is stressed according to the coherent light beam so as to obtain six-dimensional stress information of the object (5).
2. The six-dimensional force sensor of claim 1, wherein: the sensor base (1) is of a hollow structure in the middle, the elastic deformation module (2) is located at the hollow part of the sensor base (1), and the periphery of the elastic deformation module (2) is connected with the sensor base (1) and the inner side of the sensor base is contacted with the object (5).
3. The six-dimensional force sensor of claim 2, wherein: the elastic deformation module (2) comprises four elastic components (21, 22, 23 and 24) with the same shape, the four elastic components are arranged in a cross shape at the hollowed-out part of the sensor base (1), the outer ends of the four elastic components are respectively connected with the sensor base (1), and the inner ends of the four elastic components are contacted with the object (5), so that the object (5) is positioned at the center of the elastic deformation module (2).
4. The six-dimensional force sensor of claim 3, wherein: the cross sections of the four elastic components (21, 22, 23, 24) are rectangular, circular or I-shaped.
5. The six-dimensional force sensor of claim 1, wherein: the measuring grating (3) is tightly attached to the surface of the object (5) and has the same pose change as the object (5).
6. The six-dimensional force sensor of claim 1, wherein: the six-dimensional grating encoder (4) is positioned right above the measuring grating (3) and sends measuring light beams to the measuring grating (3).
7. The six-dimensional force sensor of claim 1, wherein: when the object (5) is stressed, the six-dimensional grating encoder (4) detects the axial displacement of the object on one hand through the coherent light beam reflected by the measuring grating (3), and then calculates the force applied to the object in the corresponding axial direction according to the axial displacement; on the other hand, the angle data of the axial rotation of the object is detected, and then the moment of the object stressed in the corresponding axial direction is calculated according to the angle data.
8. The six-dimensional force sensor of claim 7, wherein the forces applied to the object in the x-axis, y-axis, and z-axis directions are F x 、F y 、F z Corresponding moments are M respectively x 、M y 、M z Then:
wherein a is the cross-section side length of the elastic component of the elastic deformation module (2), E is the elastic modulus of the elastic component, L is the length of the elastic component in the extending direction from an object to a sensor base, G is the shear modulus of the elastic component, I z 、I p Respectively the moment of inertia and the polar moment of inertia of the elastic component, and Deltax, deltay and Deltaz respectively represent the displacement in the directions of the x axis, the y axis and the z axis when the object is stressed, and theta x 、θ y 、θ z The rotation angles of the object in the x-axis, y-axis and z-axis directions are respectively shown when the object is stressed.
9. The six-dimensional force sensor of claim 8, characterized in that if the spot of the measuring beam emitted by the six-dimensional grating encoder (4) is not located in the geometric center of the measuring grating (3), then:
when the object is forced to rotate around the x-axis, a first additional displacement is generated in the z-axis and is marked as delta z x Detecting Δz by the six-dimensional grating encoder (4) x And has a delta z x ＝e x ·θ x ；
When the object is forced to rotate around the y-axis, a second additional displacement is generated in the z-axis, which is marked as deltaz y Detecting Δz by the six-dimensional grating encoder (4) y And has a delta z y ＝e y ·θ y ；
When the object is forced to rotate around the z-axis, a third additional displacement delta x is generated in the x-axis and the y-axis respectively z Fourth additional displacement deltay z And has Deltax z ＝e x -ρ·cos(θ+θ z )，Δy z ＝ρ·sin(θ+θ z )-e y ；
Wherein e x 、e y The displacement of the light spot relative to the geometric center of the measuring grating (3) in the x-axis and the y-axis are respectively;
at this time, the axial displacement of the x axis, the y axis and the z axis of the object under stress is respectively corrected as follows:
Δx 0 ＝Δx-Δx z ；
Δy 0 ＝Δy-Δy z ；
Δz 0 ＝Δz-Δz x -Δz y ；
thus, the axial forces applied to the object in the x-axis, y-axis and z-axis are corrected as follows:
six-dimensional mechanical data of the integrated object are as follows:
10. the six-dimensional force sensor according to claim 9, characterized in that the measuring grating (3) is a two-dimensional absolute grating.
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| CN102589479A (en) * | 2012-03-06 | 2012-07-18 | 天津大学 | Three-dimensional topography central perturbation composite grating projection measuring method and device |
| CN103196629A (en) * | 2013-03-30 | 2013-07-10 | 大连交通大学 | Six-dimensional sensor calibration device |
| CN109556517A (en) * | 2018-12-28 | 2019-04-02 | 中国科学院长春光学精密机械与物理研究所 | The sufficient locating platform of one kind six end pose real-time measurement system |
| CN212747682U (en) * | 2020-08-14 | 2021-03-19 | 清华大学深圳国际研究生院 | Detection system and grating ruler |
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| JP4072506B2 (en) * | 2003-05-20 | 2008-04-09 | ミネベア株式会社 | Optical displacement sensor and external force detection device |
| JP5489538B2 (en) * | 2009-06-03 | 2014-05-14 | キヤノン株式会社 | Force sensor |
| JP2015197357A (en) * | 2014-04-01 | 2015-11-09 | キヤノン株式会社 | Optical force angle sensor and device using the same |
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|---|---|---|---|---|
| CN102589479A (en) * | 2012-03-06 | 2012-07-18 | 天津大学 | Three-dimensional topography central perturbation composite grating projection measuring method and device |
| CN103196629A (en) * | 2013-03-30 | 2013-07-10 | 大连交通大学 | Six-dimensional sensor calibration device |
| CN109556517A (en) * | 2018-12-28 | 2019-04-02 | 中国科学院长春光学精密机械与物理研究所 | The sufficient locating platform of one kind six end pose real-time measurement system |
| CN212747682U (en) * | 2020-08-14 | 2021-03-19 | 清华大学深圳国际研究生院 | Detection system and grating ruler |
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