CN113977787A - Slicing machine - Google Patents

Slicing machine Download PDF

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Publication number
CN113977787A
CN113977787A CN202111362425.3A CN202111362425A CN113977787A CN 113977787 A CN113977787 A CN 113977787A CN 202111362425 A CN202111362425 A CN 202111362425A CN 113977787 A CN113977787 A CN 113977787A
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CN
China
Prior art keywords
cutting
wire
rear end
silicon rod
slicer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111362425.3A
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Chinese (zh)
Inventor
刘秀坤
许博
姜阳
白雪情
张树礼
刘丽娟
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Linton Technologies Group
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Linton Technologies Group
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linton Technologies Group filed Critical Linton Technologies Group
Priority to CN202111362425.3A priority Critical patent/CN113977787A/en
Publication of CN113977787A publication Critical patent/CN113977787A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

The invention provides a slicing machine, which comprises a machine body; the cutting chamber is positioned on the front side of the lathe bed; the rear end feeding channel is positioned in the middle of the rear side of the lathe bed; the follow-up AGV bracket is positioned in the rear end feeding channel and is used for carrying the silicon rod; the cross beam is horizontally arranged at the top end of the cutting chamber; the vertical feeding device is fixedly connected with the cross beam, and the output end of the vertical feeding device is positioned in the cutting chamber; the fixture device is connected with the output end of the vertical feeding device and is used for clamping the silicon rod conveyed by the traveling AGV bracket; and the linear cutting mechanism is positioned in the cutting chamber and used for cutting the silicon rod into a plurality of silicon wafers. The invention can realize rear-end feeding, is separated from a manual operation area, has large and convenient manual operation space and greatly improves the safety of personnel.

Description

Slicing machine
Technical Field
The invention relates to the technical field of silicon rod cutting, in particular to a slicing machine.
Background
The slicing machine is used for cutting the silicon rod by adopting a diamond wire and cutting the silicon rod into silicon wafers, but the traditional slicing machine adopts a front end feeding mode, and most of manual operation contents of the slicing machine are all arranged at the front end of a machine tool. When the automatic project is realized, the front end feeding automatic equipment area is overlapped with the manual operation area, the personnel operation space is limited, and the danger coefficient is high.
Disclosure of Invention
According to the above technical problem, a slicer is provided.
The technical means adopted by the invention are as follows:
a microtome, comprising:
a bed body;
the cutting chamber is positioned on the front side of the lathe bed;
the rear end feeding channel is positioned in the middle of the rear side of the lathe bed, the front end of the rear end feeding channel is communicated with the top of the cutting chamber, and the rear end of the rear end feeding channel is positioned at the rear end of the lathe bed;
the follow-up AGV bracket is positioned in the rear end feeding channel and is used for carrying a horizontally arranged silicon rod entering from the rear end of the rear end feeding channel and carrying the silicon rod to the upper part of the inner part of the cutting chamber in the rear end feeding channel; the silicon rod pushing device is characterized in that a pushing cylinder is arranged on the traveling AGV bracket and used for pushing the silicon rod on the traveling AGV bracket.
The cross beam is horizontally arranged at the top end of the cutting chamber;
the vertical feeding device is fixedly connected with the cross beam, and the output end of the vertical feeding device is positioned in the cutting chamber;
the fixture device is connected with the output end of the vertical feeding device and is used for clamping the silicon rod conveyed by the traveling AGV bracket;
and the linear cutting mechanism is positioned in the cutting chamber and used for cutting the silicon rod into a plurality of silicon wafers.
The following AGV bracket can horizontally move along a track arranged on the rear end feeding channel, and when the following AGV bracket moves from the rear end to the front end of the rear end feeding channel, a pushing cylinder is preferably adopted to push the silicon rod to continue to move; then the clamp device is convenient for clamping the middle part of the silicon rod; and then the silicon rod is driven to vertically move downwards under the action of the vertical feeding device, and the linear cutting mechanism cuts the silicon rod into a plurality of silicon wafers.
The automatic feeding device can realize rear-end feeding, an automatic route area is arranged at the rear end of the machine tool, complete sealing can be realized, the automatic feeding device is separated from a manual operation area, the manual operation space is large and convenient, and the safety of personnel is greatly improved; the rear end material loading passageway comprises totally closed space, and the equipment closure improves, and is not leaked, and the liquid that drips during the unloading also directly returns the equipment cutting indoor portion by the pipeline, and the whole pollution in workshop reduces, and the clean and tidy degree in ground improves, and personnel's breathing safety can be ensured, reduces the incidence of section workman lung occupational disease.
The slicer still includes:
a wire transport mechanism that provides cutting wire to the wire cutting mechanism.
The wire transfer mechanism includes:
the pay-off device is used for paying off the cutting line and is positioned on the front side of the rear side of the lathe bed, and the cutting line paid off by the pay-off device enters the linear cutting mechanism after passing through the plurality of pay-off turning wheels, the at least one pay-off tension adjusting wheel and the pay-off and wire arranging device;
the wire take-up device is used for recovering the cutting wire and is positioned on the back side of the rear side of the lathe bed, and the cutting wire used by the wire cutting mechanism returns to the wire take-up device after passing through the plurality of wire take-up turning wheels, the at least one wire take-up tension adjusting wheel and the wire take-up and arranging device.
Preferably, the paying-off turning wheel, the taking-up tension adjusting wheel and the paying-off tension adjusting wheel are all light guide wheels;
present slicer can use a large amount of diversion wheels to change the trend of buddha's warrior attendant line in the use, and then make the buddha's warrior attendant line just can reach the effect of cutting in the cutting chamber, but present diversion wheel all adopts guide pulley and bearing frame fixed connection's mode, the guide pulley diameter is 160mm usually, can lead to its whole weight grow (more than 200 g) like this, the inertia of turning itself is big, it is serious to the copper wire wearing and tearing, the fixed connection mode of guide pulley and bearing frame adopts three fix with screw at least simultaneously, the deviation appears easily, lead to the guide pulley inclined to one side the groove.
The slicer of the present invention employs a light guide wheel, which includes:
the bearing seat is provided with a mounting part at one end, and the mounting part is used for being fixedly connected with other parts;
the bearing is arranged in the bearing seat and matched with the bearing seat, and a gas protection cavity is arranged between one side of the bearing, which is close to the mounting part of the bearing seat, and the bearing seat;
one end of the light rotating body is connected with the bearing, and the other end of the light rotating body penetrates out of one end, which is not provided with the mounting part, of the bearing seat; a bowl-shaped gasket is pressed at the end part of one end of the light rotator connected with the bearing through a bolt;
the guide wheel is fixedly connected with the other end of the light rotating body, and the diameter of the guide wheel is 100 mm;
and the bearing seat is provided with a gas-tight air inlet communicated with the gas protection cavity, and the gas-tight air inlet is provided with a plug.
The light guide wheel adopted by the invention adopts the principle that the guide wheel, the light rotating body and the bearing rotate integrally, and the bearing seat keeps non-rotating, so that the volume and the weight of the bearing seat and the guide wheel can be reduced, and meanwhile, the guide wheel and the bearing seat are not required to be fixed by a plurality of bolts, and the deviation of the guide wheel and the bearing seat is avoided.
The material consumption of the light guide wheel with the thickness of 100mm is reduced by 35% compared with that of 160mm, the light integrated wheel is an auxiliary material which needs to be used in a large amount in the slicing industry, the price is reduced due to the reduction of the material quantity, the cost of the auxiliary material for slicing is reduced, the natural degradation speed of the high polymer material is low, the material consumption is reduced, and the treatment cost of the waste guide wheel is reduced; the light guide wheel has smaller dead weight and smaller diameter, so that the rotational inertia of the guide wheel with the new size is greatly reduced, the abrasion to steel wires caused by the rotational inertia of the guide wheel can be reduced, the utilization rate of the steel wires is improved, and the wire breakage rate is reduced. The requirement of thinning is more met; the fluctuation of the tension in the operation is smaller, the operation is more stable, and the fluctuation of the tension is reduced by 50 percent compared with the original structure.
When the diamond wire of the existing slicing machine is cut, silicon powder, resin plate particles and glue residues are remained on the steel wire, and the cutting capacity of the diamond wire can be reduced in the later repeated use process. The slicing machine adopts an ultrasonic cleaning device; the cutting lines released by the pay-off mechanism and the take-up mechanism and the recovered cutting lines pass through the ultrasonic cleaning device. Utilize ultrasonic cleaning equipment, do a washing to the steel wire in the motion, clear away the higher authority impurity, improve the steel wire cutting ability, strengthen its cutting ability, the increase of service life.
Preferably, the wire cutting mechanism comprises:
the cutting device comprises three cutting rollers, wherein connecting lines of the axes of the three cutting rollers on the same longitudinal section are triangular, two cutting rollers are positioned above the cutting rollers, the rest cutting roller is positioned below the cutting rollers, wire grooves which are spirally arranged are formed in the cutting rollers, and cutting wires are wound on the three cutting rollers to form a plurality of cutting sections with the tops horizontally arranged; the both ends of cutting roller respectively through the bearing box with the lateral wall of cutting chamber rotates and is connected, and every the cutting roller all is connected with the cutting motor.
The slicer still includes:
and the cutting liquid supply device is arranged at the front end of the lathe bed and is used for supplying the cutting liquid to the cutting chamber.
The cutting fluid supply device includes:
a water tank in communication with the bottom of the cutting chamber;
the filter vat is used for filtering the cutting fluid pumped out by the water pump in the water tank;
and the input end of the spray head is communicated with the filter vat, and the input end of the spray head is positioned in the cutting chamber and used for spraying the cutting liquid to the cutting chamber.
The existing slicer adopts the combination of a stainless steel filter barrel and a cotton yarn filter element to filter, and the cotton yarn filter element requires that each knife of manual work takes out the cotton yarn filter element to be cleaned or replaced, so that the situation that no fragments and thread ends are left on the filter element can be ensured, and the filtering effect is ensured. A large amount of manual operation is needed, the process is complicated, and the cutting efficiency is reduced. For the reasons, the slicing machine adopts the novel filter barrel;
the filter vat includes:
a filter vat body;
the vertical stainless steel filter element is positioned in the filter barrel body and is used for filtering the cutting fluid;
the feed inlet is arranged on the filter barrel body and is communicated with the output end of the water pump;
the discharge port is arranged on the filter barrel body and is communicated with the input end of the spray head;
the spiral water channel is processed on the side wall of the filter barrel body;
the spiral water channel is processed on the side wall of the filter barrel body, and a clear water spray head is arranged on the side wall of the spiral water channel; and
the sewage draining outlet is arranged on the filter barrel body;
when the cutting chamber is used for cutting, the back flushing port and the sewage draining port are closed, and the feeding port and the discharging port are opened;
when the filter barrel body and the three-dimensional stainless steel filter element are backwashed, the feed inlet and the discharge outlet are closed, the back flush port and the sewage discharge outlet are opened, clean water enters the filter barrel body through the back flush port and flows along the spiral water channel to clean the filter barrel body and the three-dimensional stainless steel filter element, and then the clean water is discharged through the sewage discharge outlet.
The use of the three-dimensional filter element can achieve the effect of single-layer combined filtration, but the three-dimensional structure can contain more fragment threads and other impurities, thereby ensuring that the filter element can complete the effect of multi-cutter use; the equipment is automatically controlled and automatically washed, so that the operation of personnel is not needed, the auxiliary time is greatly reduced, and the number of slicing auxiliary personnel is reduced; is more suitable for the realization of unmanned factories.
The invention can be widely popularized in the fields of slicing machines and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a side view of a microtome in accordance with an embodiment of the present invention.
FIG. 2 is a front view of a slicer in accordance with an embodiment of the present invention.
FIG. 3 is a schematic view of a lightweight idler construction according to an embodiment of the present invention.
Fig. 4 is a schematic structural view of a light rotating body according to an embodiment of the present invention.
Fig. 5 is a schematic structural view of a filter vat according to an embodiment of the present invention.
In the figure: 1. a bed body; 2. a cutting chamber; 3. a rear end feed channel; 301. a track; 4. a pallet for a traveling AGV; 401. a push cylinder; 5. a silicon rod; 6. a cross beam; 7. a vertical feeding device; 8. a clamp device; 9. a wire cutting mechanism; 901. a cutting roller; 902. a bearing housing; 903. cutting the motor; 10. a pay-off device; 1001. paying off a turning wheel; 1002. a paying-off tension adjusting wheel; 1003. a paying-off and wire arranging device; 1004. a wire management support; 1005. a wire wheel; 1006. the wire wheel drives the motor; 1007. a connecting shaft structure; 11. a take-up device; 12. a light guide wheel; 1201. a bearing seat; 1202. a bearing; 1203. a gas protection chamber; 1204. a light rotating body; 1205. a bowl-shaped gasket; 1206. a guide wheel; 1207. air-sealing the air inlet hole; 13. a cutting fluid supply device; 1301. a water tank; 1302. a water pump; 1303. a spray head; 14. a filter vat; 1401. a filter vat body; 1402. a three-dimensional stainless steel filter element; 1403. a feed inlet; 1404. a discharge port; 1405. a spiral water channel; 1406. a back flushing port; 1407. a sewage draining outlet; 15. provided is an ultrasonic cleaning device.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the absence of any contrary indication, these directional terms are not intended to indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
As shown in fig. 1 to 5, a slicer includes:
a lathe bed 1;
the cutting chamber 2 is positioned on the front side of the lathe bed 1;
the rear end feeding channel 3 is positioned in the middle of the rear side of the lathe bed 1, the front end of the rear end feeding channel is communicated with the top of the cutting chamber 2, and the rear end of the rear end feeding channel is positioned at the rear end of the lathe bed 1;
the follow-up AGV bracket 4 is positioned in the rear end feeding channel 3 and is used for carrying a horizontally arranged silicon rod 5 entering from the rear end of the rear end feeding channel and conveying the silicon rod 5 to the upper part of the inner part of the cutting chamber in the rear end feeding channel; the silicon rod pushing device is characterized in that a pushing cylinder 401 is arranged on the traveling AGV bracket 4, and the pushing cylinder 401 is used for pushing a silicon rod 5 on the traveling AGV bracket 4.
The beam 6 is horizontally arranged at the top end of the cutting chamber 2;
the vertical feeding device 7 is fixedly connected with the cross beam 6, and the output end of the vertical feeding device is positioned in the cutting chamber 2;
the fixture device 8 is connected with the output end of the vertical feeding device 7 and is used for clamping the silicon rod 5 delivered by the traveling AGV bracket 4;
and the linear cutting mechanism 9 is positioned in the cutting chamber 2 and is used for cutting the silicon rod 5 into a plurality of silicon wafers. The linear cutting mechanism 9 comprises three cutting rollers 901, the connecting lines of the axes of the three cutting rollers 901 on the same longitudinal section are triangular, wherein two cutting rollers 901 are positioned above, the remaining cutting roller 901 is positioned below, the cutting rollers 901 are provided with spirally arranged wire grooves, and the cutting wires are wound on the three cutting rollers 901 to form a plurality of cutting sections with the tops horizontally arranged; two ends of the cutting roller 901 are rotatably connected with the side wall of the cutting chamber 2 through bearing boxes 902 respectively, and each cutting roller 901 is connected with a cutting motor 903.
The trailing AGV brackets 4 can horizontally move along rails 301 (two rails 301 are arranged at the top of the feeding channel 3, extend horizontally and are C-shaped rails, and the tops of the trailing AGV brackets are clamped in grooves of the C-shaped rails) arranged on the rear end feeding channel 3, and when the trailing AGV brackets move from the rear end to the front end of the rear end feeding channel 3, the silicon rod 5 is preferably pushed to continue to move by adopting the pushing cylinder 401; the clamp device 8 is convenient to clamp the middle part of the silicon rod 5; and then the silicon rod 5 is driven to vertically move downwards under the action of the vertical feeding device 7, and the linear cutting mechanism 9 is used for cutting the silicon rod into a plurality of silicon wafers.
The slicer of this embodiment still includes:
a wire transport mechanism that provides the cutting wire to the wire cutting mechanism 9.
The wire transfer mechanism includes:
the pay-off device 10 is used for paying off the cutting line and is positioned on the front side of the rear side of the lathe bed 1, and the cutting line paid off by the pay-off device 10 enters the linear cutting mechanism 9 after passing through the plurality of pay-off direction changing wheels 1001, the at least one pay-off tension adjusting wheel 1002 and the pay-off and wire arranging device 1003;
the wire take-up device 11 is used for recovering the cutting wires and located on the back side of the rear side of the lathe bed 1, and the used cutting wires of the wire cutting mechanism 9 are returned to the wire take-up device 11 after passing through a plurality of take-up turning wheels, at least one take-up tension adjusting wheel and a take-up wire arranging device (the structures of the take-up turning wheels, the take-up tension adjusting wheels and the take-up wire arranging device are the same as those of the pay-off turning wheels 1001, the pay-off tension adjusting wheels 1002 and the pay-off wire arranging device 1003, and no other mark is made on the take-up turning wheels, the take-up tension adjusting wheels and the pay-off wire arranging device).
The paying-off device 10 and the taking-up device 11 both comprise a wire wheel 1005, a wire wheel driving motor 1006 and a connecting shaft structure 1007 for connecting the wire wheel 1005 and the wire wheel driving motor 1006;
the cutting lines discharged and recovered by the pay-off mechanism 10 and the take-up mechanism 11 pass through an ultrasonic cleaning device 15.
The front side and the back side of the rear side of the lathe bed 1 are both fixed with a wire management support 1004, and a wire releasing tension adjusting wheel 1002, a wire releasing and arranging device 1003, at least one wire receiving tension adjusting wheel, a wire receiving and arranging device and an ultrasonic cleaning device 15 are all arranged on the wire management support 1004 corresponding to the wire releasing tension adjusting wheel; a wire releasing direction changing wheel 1001 and a wire retrieving direction changing wheel are installed on the wire management support 1004 and the side wall of the cutting chamber 2 as needed.
The paying-off steering wheel 1001, the taking-up steering wheel, the paying-off tension adjusting wheel 1002 and the taking-up tension adjusting wheel are all light guide wheels 12;
the lightweight guide wheel 12 includes:
a bearing base 1201, one end of which has a mounting part for fixedly connecting with other components;
a bearing 1202, installed in the bearing seat 1201 and matched with the bearing seat 1021, wherein a gas protection cavity 1203 is arranged between one side of the bearing 1202, which is close to the installation part of the bearing seat 1201, and the bearing seat 1201;
a light rotating body 1204, one end of which is connected to the bearing 1202 and the other end of which penetrates through the end of the bearing base 1201 not having the mounting portion; a bowl-shaped gasket 1205 is pressed on one end part of the light rotating body 1204 connected with the bearing 1202 through a bolt;
a guide wheel 1206 fixedly connected with the other end of the light rotating body 1204, wherein the diameter of the guide wheel 1206 is 100 mm;
and a hermetic seal air inlet 1207 communicated with the gas protection cavity 1203 is arranged on the bearing seat 1201, and the hermetic seal air inlet 1207 is provided with a plug.
The slicer that provides in this embodiment still includes:
and a cutting fluid supply device 13 mounted at the front end of the bed 1 for supplying a cutting fluid to the cutting chamber 2.
The cutting fluid supply device includes:
a water tank 1301, wherein the water tank 1301 is communicated with the bottom of the cutting chamber 2;
a filter vat 14 for filtering the cutting fluid pumped out by the water pump 1302 in the water tank 1301;
and the input end of the spray head 1303 is communicated with the filter barrel 14, and the input end of the spray head is positioned in the cutting chamber 2 and used for spraying the cutting fluid to the cutting chamber 2.
The filter vat 14 comprises:
a filter vat body 1401;
the vertical stainless steel filter core 1402 is positioned in the filter barrel body 1401 and is used for filtering the cutting fluid;
the feed inlet 1403 is arranged on the filter barrel body 1401 and is communicated with the output end of the water pump 1302;
the discharge port 1404 is arranged on the filter vat body 1401 and communicated with the input end of the spray head 1303;
the spiral water channel 1405 is processed on the side wall of the filter vat body 1401, and a clear water spray head is arranged on the side wall of the spiral water channel;
a back flush port 1406 provided on the filter vat body 1401, communicating with a source of clean water and a spiral water channel 1405; and
a sewage outlet 1407 arranged on the filter vat body 1401;
when the cutting chamber 2 is used for cutting, the back flushing port 1405 and the sewage discharge port 1406 are closed, and the feed port 1403 and the discharge port 1404 are opened;
when the filter barrel body 1401 and the three-dimensional stainless steel filter core 1402 are backwashed, the feed inlet 1403 and the discharge outlet 1404 are closed, the backwashing port 1405 and the sewage outlet 1406 are opened, clean water enters the filter barrel body 1401 through the backwashing port 1405 and flows along the spiral water channel 1405 to clean the filter barrel body 1401 and the three-dimensional stainless steel filter core 1402, and then the clean water is discharged from the sewage outlet 1407.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A microtome, comprising:
a bed body;
the cutting chamber is positioned on the front side of the lathe bed;
the rear end feeding channel is positioned at the rear side of the lathe bed, the front end of the rear end feeding channel is communicated with the top of the cutting chamber, and the rear end of the rear end feeding channel is positioned at the rear end of the lathe bed;
the follow-up AGV bracket is positioned in the rear end feeding channel and is used for carrying the silicon rod entering from the rear end of the rear end feeding channel and conveying the silicon rod to the upper part of the inner part of the cutting chamber in the rear end feeding channel;
the vertical feeding device is arranged above the cutting chamber;
the fixture device is connected with the output end of the vertical feeding device and is used for clamping the silicon rod conveyed by the traveling AGV bracket; the vertical feeding device drives the silicon rod clamped by the clamp device to vertically move in the cutting chamber; and
and the linear cutting mechanism is positioned in the cutting chamber and used for cutting the silicon rod into a plurality of silicon wafers.
2. The slicer of claim 1, wherein:
further comprising:
a wire transport mechanism that provides cutting wire to the wire cutting mechanism.
3. The slicer of claim 2, wherein:
the wire transfer mechanism includes:
the pay-off device is used for paying off the cutting line and is positioned on the front side of the rear side of the lathe bed, and the cutting line paid off by the pay-off device enters the linear cutting mechanism after passing through the plurality of pay-off turning wheels, the at least one pay-off tension adjusting wheel and the pay-off and wire arranging device; and
the wire take-up device is used for recovering the cutting wire and is positioned on the back side of the rear side of the lathe bed, and the cutting wire used by the wire cutting mechanism returns to the wire take-up device after passing through the plurality of wire take-up turning wheels, the at least one wire take-up tension adjusting wheel and the wire take-up and arranging device;
the rear end feeding channel is located between the paying-off device and the take-up device.
4. The slicing machine as claimed in claim 3, wherein the paying-off direction-changing wheel, the taking-up tension adjusting wheel and the paying-off tension adjusting wheel are all light guide wheels;
the light guide wheel comprises:
a bearing housing having a mounting portion at one end thereof;
the bearing is arranged in the bearing seat and matched with the bearing seat, and a gas protection cavity is arranged between one side of the bearing, which is close to the mounting part of the bearing seat, and the bearing seat;
one end of the light rotating body is connected with the bearing, and the other end of the light rotating body penetrates out of one end, which is not provided with the mounting part, of the bearing seat; a bowl-shaped gasket is pressed at the end part of one end of the light rotator connected with the bearing through a bolt;
the guide wheel is fixedly connected with the other end of the light rotating body, and the diameter of the guide wheel is 100 mm; and
and the air sealing air inlet is processed on the bearing seat and is communicated with the air protection cavity.
5. The slicer of claim 3, wherein the pay-off mechanism and the take-up mechanism both pay-out and retrieve the cutting line through an ultrasonic cleaning device.
6. The slicer of claim 1, wherein the wire cutting mechanism comprises:
the cutting device comprises three cutting rollers, wherein connecting lines of the axes of the three cutting rollers on the same longitudinal section are triangular, two cutting rollers are positioned above the cutting rollers, the rest cutting roller is positioned below the cutting rollers, wire grooves which are spirally arranged are formed in the cutting rollers, and cutting wires are wound on the three cutting rollers to form a plurality of cutting sections with the tops horizontally arranged; the both ends of cutting roller respectively through the bearing box with the lateral wall of cutting chamber rotates and is connected, and every the cutting roller all is connected with the cutting motor.
7. The slicer of claim 1, further comprising:
and the cutting liquid supply device is arranged at the front end of the lathe bed and is used for supplying the cutting liquid to the cutting chamber.
8. The slicer of claim 7, wherein the cutting fluid supply assembly comprises:
a water tank in communication with the bottom of the cutting chamber;
the filter vat is used for filtering the cutting fluid pumped out by the water pump in the water tank; and
and the input end of the spray head is communicated with the filter vat, and the input end of the spray head is positioned in the cutting chamber and used for spraying the cutting liquid to the cutting chamber.
9. The slicer of claim 8, wherein the filter basket comprises:
a filter vat body;
the vertical stainless steel filter element is positioned in the filter barrel body and is used for filtering the cutting fluid;
the feed inlet is arranged on the filter barrel body and is communicated with the output end of the water pump;
the discharge port is arranged on the filter barrel body and is communicated with the input end of the spray head;
the spiral water channel is processed on the side wall of the filter barrel body, and a clear water spray head is arranged on the side wall of the spiral water channel;
the back flushing port is arranged on the filter barrel body and is communicated with a clean water source and the spiral water channel; and
and the sewage draining port is arranged on the filter vat body.
10. The slicer of claim 1, wherein the traveling AGV carriage has a push cylinder thereon for pushing the silicon rod thereon.
CN202111362425.3A 2021-11-17 2021-11-17 Slicing machine Pending CN113977787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111362425.3A CN113977787A (en) 2021-11-17 2021-11-17 Slicing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111362425.3A CN113977787A (en) 2021-11-17 2021-11-17 Slicing machine

Publications (1)

Publication Number Publication Date
CN113977787A true CN113977787A (en) 2022-01-28

Family

ID=79749052

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111362425.3A Pending CN113977787A (en) 2021-11-17 2021-11-17 Slicing machine

Country Status (1)

Country Link
CN (1) CN113977787A (en)

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