CN113970405A - Multi-dimensional force sensor calibration device and calibration method - Google Patents
Multi-dimensional force sensor calibration device and calibration method Download PDFInfo
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- CN113970405A CN113970405A CN202111348200.2A CN202111348200A CN113970405A CN 113970405 A CN113970405 A CN 113970405A CN 202111348200 A CN202111348200 A CN 202111348200A CN 113970405 A CN113970405 A CN 113970405A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Abstract
The utility model relates to a multi-dimensional force transducer calibration device and calibration method, multi-dimensional force transducer calibration device includes: the first calibration piece is provided with a first spherical groove; the second calibration piece is arranged above the first calibration piece at intervals; the second calibration piece is provided with a second spherical groove arranged towards the first calibration piece, and the second spherical groove and the first spherical groove are arranged in a staggered manner; a multi-dimensional force sensor connected between the first and second indexing members; the loading mechanism comprises a detection piece and two adjusting components; the two adjusting components are respectively connected to two ends of the detecting piece, and the two adjusting components are respectively rotatably connected to the first spherical groove and the second spherical groove so that the loading mechanism and the first and second calibrating pieces are arranged at an angle. The technical problem that the calibration accuracy of a traditional multi-dimensional force sensor is poor is solved.
Description
Technical Field
The disclosure relates to the technical field of sensor calibration, in particular to a multi-dimensional force sensor calibration device and a calibration method.
Background
With the rapid development of the intelligent industry, the application of the multi-dimensional force sensor in the intelligent robot is more and more extensive. In the related art, the multidimensional force sensor needs to be calibrated by adopting a special calibration system and method to acquire accurate data. At present, the common calibration method is a pulley-weight loading method, which mainly comprises installing a loading plate on a sensor, then hanging a string in different directions according to the force balance principle, then turning the string through a pulley and loading weights at the tail end. The method can keep the loading force stable; however, the calibration accuracy of the multi-dimensional force sensor is poor due to the fact that deviations such as pulley friction, bearing friction and loading angles exist, and the accuracy of the calibration force is difficult to control.
Disclosure of Invention
The disclosure provides a calibration device and a calibration method for a multi-dimensional force sensor, so as to solve the technical problem of poor calibration accuracy of the traditional multi-dimensional force sensor.
To this end, in a first aspect, an embodiment of the present disclosure provides a multi-dimensional force sensor calibration apparatus, including:
the first calibration piece is provided with a first spherical groove;
the second calibration piece is arranged above the first calibration piece at intervals; the second calibration piece is provided with a second spherical groove arranged towards the first calibration piece, and the second spherical groove and the first spherical groove are arranged in a staggered manner;
a multi-dimensional force sensor connected between the first and second indexing members;
the loading mechanism comprises a detection piece and two adjusting components; the two adjusting components are respectively connected to two ends of the detecting piece, and the two adjusting components are respectively rotatably connected to the first spherical groove and the second spherical groove so that the loading mechanism and the first and second calibrating pieces are arranged at an angle.
In one embodiment, the adjusting assembly includes a first ball, a first locking member and a first rod, the first locking member is connected to the first ball, and the first rod is connected to a side of the first locking member away from the first ball and extends in a direction away from the first ball;
the two first spheres of the two adjusting assemblies are respectively rotatably connected to the first spherical groove and the second spherical groove, and the two first rod bodies are respectively connected to two ends of the detecting piece.
In one embodiment, the first calibration piece further includes a first circular spherical track groove disposed close to the first spherical groove, a first through groove is disposed between the first spherical groove and the first circular spherical track groove, the second calibration piece further includes a second circular spherical track groove disposed in a staggered manner with the first circular spherical track groove, the second circular spherical track groove is disposed close to the second spherical groove, a second through groove is disposed between the second spherical groove and the second circular spherical track groove, the loading mechanism further includes two limiting assemblies, and the limiting assemblies are connected to one side of the adjusting assembly away from the detection piece;
the two limiting assemblies respectively penetrate through the first through groove and the second through groove and are respectively movably connected to the first spherical track groove and the second spherical track groove.
In one embodiment, a first connection hole is formed in one side of the first sphere, which is away from the first locking piece, the limiting component comprises a second rod body, a second sphere and a second locking piece, the second sphere is connected to one end of the second rod body, the second locking piece is connected to one side of the second sphere, which is away from the second rod body, and one end of the second rod body, which is away from the second sphere, is inserted into the first connection hole to connect and fasten the limiting component and the adjusting component;
the two second rod bodies of the two limiting assemblies respectively penetrate through the first through groove and the second through groove, and the two second spheres of the two limiting assemblies are respectively movably connected to the first spherical-surface track groove and the second spherical-surface track groove.
In one embodiment, the loading mechanism further comprises a first boss located between the first spherical groove and the first annular spherical track groove and a second boss located between the second spherical groove and the second annular spherical track groove.
In one embodiment, the first boss has a first ramp disposed toward the first spherical groove; and/or the presence of a gas in the gas,
the second boss has a second inclined surface disposed toward the second spherical groove.
In an embodiment, the first spherical groove is provided with a plurality of, the second spherical groove is provided with a plurality of, a plurality of the first spherical groove and a plurality of the second spherical groove are all wound around the axial interval symmetry setting of the multidimensional force sensor, the loading mechanism is provided with a plurality of, one the loading mechanism corresponds to one the first spherical groove and one the second spherical groove setting, and set up two of the both sides of the axis of the multidimensional sensor the loading mechanism is wound around the gravity center point of the multidimensional sensor and is the central symmetry setting.
In one embodiment, a plurality of layers of first spherical groove rings and a plurality of layers of second spherical groove rings corresponding to the plurality of layers of first spherical groove rings are arranged along the radial direction of the multi-dimensional force sensor, the distance between two adjacent first spherical groove rings is greater than twice the diameter of the first spherical groove or the second spherical groove, and the distance between two adjacent second spherical groove rings is greater than twice the diameter of the first spherical groove or the second spherical groove; and/or the presence of a gas in the gas,
and a plurality of layers of first spherical groove rings and a plurality of layers of second spherical groove rings which are arranged corresponding to the plurality of layers of first spherical groove rings are arranged along the radial direction of the multi-dimensional force sensor, the plurality of loading mechanisms are distributed in a layered manner, and the plurality of loading mechanisms in the same direction are parallel to each other.
In an embodiment, the calibration device further includes a first adapter and a second adapter, which are correspondingly disposed, where the first adapter is connected to a side of the first calibration piece close to the second calibration piece, and the second adapter is connected to a side of the second calibration piece close to the first calibration piece;
the multi-dimensional force sensor is connected between the first adapter and the second adapter.
In one embodiment, a first sinking groove is formed in the first marking piece and is arranged towards the second marking piece, a first fixing hole is formed in the first sinking groove, a second sinking groove is formed in the second marking piece and is arranged towards the first marking piece, a second fixing hole is formed in the second sinking groove, a first connecting hole penetrating through the first switching piece is formed in the first switching piece, a third connecting hole penetrating through the second switching piece is formed in the second switching piece, the calibration device further comprises a first connecting piece and a second connecting piece, and the first connecting piece penetrates through the second connecting hole and is inserted into the first fixing hole to fixedly connect the first switching piece and the first marking piece; the second connecting piece penetrates through the third connecting hole and is inserted into the second fixing hole so as to connect and fasten the second adaptor and the second calibration piece.
In one embodiment, the first scaling member comprises a scaling plate and a plurality of legs connected to a side of the scaling plate remote from the second scaling member;
the first spherical groove is arranged on the calibration plate.
In one embodiment, the support leg comprises a vertical section and a horizontal section, one end of the vertical section is connected to the calibration plate, the other end of the vertical section is connected to one end of the horizontal section, and the vertical section and the horizontal section are arranged in an L shape.
In one embodiment, the horizontal section is provided with a horizontal connecting hole penetrating through the horizontal section, and the first calibration piece further comprises a calibration fastening piece which penetrates through the horizontal connecting hole to connect and fasten the first calibration piece to an external part.
In a second aspect, an embodiment of the present disclosure further provides a calibration method of a multi-dimensional force sensor, including:
assembling the multi-dimensional force sensor calibration device, and adjusting each first sphere not to generate acting force;
applying force to the calibration device in different directions to obtain the loading force F and the loading moment M of the calibration device in different directions, and simultaneously obtaining the output voltage U of the multi-dimensional force sensor in different directionsfAnd Um；
According to the formula [ F, M]T＝K*[Uf，Um]TCalculating to obtain K; and K is a calibration coefficient of the calibration device.
In one embodiment, the specific steps of assembling the multi-dimensional force sensor calibration device as described above and adjusting each first sphere not to generate an acting force include:
the first calibration piece, the loading mechanism, the multi-dimensional force sensor and the second calibration piece are fixedly connected in sequence;
the loading mechanism is adjusted and the reading on the test piece is made zero.
In one embodiment, the specific steps of fixedly attaching the loading mechanism include:
firstly, connecting two ends of a detection piece with a first rod body of an adjusting component respectively, and then installing first spheres of the two adjusting components in a first spherical groove and a second spherical groove respectively;
then the second rod bodies of the two limiting assemblies are respectively connected to the first spheres of the two adjusting assemblies, and the second spheres of the two limiting assemblies are respectively arranged in the first annular spherical track groove and the second annular spherical track groove.
In one embodiment, the specific steps of adjusting the loading mechanism include:
and screwing the first ball body so that the detection piece connected with the first ball body is stretched or extruded and generates a stress indicating value.
In one embodiment, the calibration device is applied with forces in different directions to obtain the loading force F and the loading moment M of the calibration device in different directions, and simultaneously obtain the output voltage U of the multidimensional force sensor in different directionsfAnd Um；[F，M]T＝K*[Uf，Um]TThe specific steps of calculating K include:
applying force in the X direction to the calibration device, analyzing the stress of the loading mechanism, acquiring the stress Fx in the X direction, and acquiring the output voltage U of the multidimensional force sensor in the X directionfx；
Applying force in Y direction to the calibration device, analyzing the stress of the loading mechanism, acquiring the stress Fy in Y direction, and acquiring the stress Fy in Y directionOutput voltage U of multi-dimensional force sensor in Y directionfy；
Applying force in the Z direction to the calibration device, analyzing the stress of the loading mechanism, acquiring the stress Fz in the Z direction, and acquiring the output voltage U of the multi-dimensional force sensor in the Z directionfz；
The torque Mx around the X direction is obtained by analyzing the stress of the loading mechanism and obtaining the loading torque Mx around the X direction, and simultaneously, the output voltage U of the multidimensional force sensor when the torque Mx around the X direction is obtainedmx；
The torque My around the Y direction is obtained by analyzing the stress of the loading mechanism and obtaining the loading torque My around the Y direction, and simultaneously, the output voltage U of the multidimensional force sensor when the torque My around the Y direction is obtainedmy；
The torque Mz around the Z direction is obtained by analyzing the stress of the loading mechanism and obtaining the loading torque Mz around the Z direction, and simultaneously, the output voltage U of the multidimensional force sensor when the torque Mz around the Z direction is obtainedmz；
According to the formula [ Fx, Fy, Fz, Mx, My, Mz]T＝K*[Ufx，Ufy，Ufz，Umx，Umy，Umz]TK is calculated.
Compared with the prior art, the technical scheme provided by the disclosure has the following beneficial effects:
according to the calibration device and the calibration method for the multi-dimensional force sensor provided by the embodiment of the disclosure, the calibration device for the multi-dimensional force sensor comprises the following steps: the first calibration piece is provided with a first spherical groove; the second calibration piece is arranged above the first calibration piece at intervals; the second calibration piece is provided with a second spherical groove arranged towards the first calibration piece, and the second spherical groove and the first spherical groove are arranged in a staggered manner; a multi-dimensional force sensor connected between the first and second indexing members; the loading mechanism comprises a detection piece and two adjusting components; the two adjusting components are respectively connected to two ends of the detecting piece, and the two adjusting components are respectively rotatably connected to the first spherical groove and the second spherical groove so that the loading mechanism and the first and second calibrating pieces are arranged at an angle. This is disclosed through optimizing calibration device's concrete structure, set up first spherical groove on first calibration piece, set up the second spherical groove with first spherical groove dislocation on the second calibration piece, then through with loading mechanism's both ends difference rotatable coupling in first spherical groove and second spherical groove, make loading mechanism and first calibration piece and second calibration piece all be angle setting, so, in order to realize the sphere point contact and draw the pressure loading, the at utmost has reduced the influence of frictional force to the calibration result, calibration device's demarcation precision has effectively been improved.
Drawings
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present disclosure, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise. In addition, in the drawings, like parts are denoted by like reference numerals, and the drawings are not drawn to actual scale.
Fig. 1 is a schematic perspective view of a multi-dimensional force sensor calibration apparatus provided in an embodiment of the present disclosure;
FIG. 2 is a partial cross-sectional view of FIG. 1;
FIG. 3 is an enlarged cross-sectional view of a loading mechanism in one embodiment of the present disclosure;
FIG. 4 is an enlarged view of an adjustment assembly in one embodiment of the present disclosure;
FIG. 5 is an enlarged view of a spacing assembly in an embodiment of the present disclosure;
FIG. 6 is an enlarged view of a first index in an embodiment of the present disclosure;
FIG. 7 is an enlarged view of a second index in an embodiment of the present disclosure;
FIG. 8 is a top view of a multi-dimensional force sensor calibration apparatus in an embodiment of the present disclosure;
FIG. 9 is a flow chart of a multi-dimensional force sensor calibration method in an embodiment of the present disclosure;
fig. 10 is a flow chart of a calibration method in another embodiment of the present disclosure.
Description of reference numerals:
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are some embodiments of the present disclosure, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
See fig. 1-7. Fig. 1 is a schematic perspective view of a calibration device in an embodiment of the present disclosure; FIG. 2 is a partial cross-sectional view of FIG. 1; FIG. 3 is an enlarged partial cross-sectional view of a loading mechanism in an embodiment of the present disclosure; FIG. 4 is an enlarged view of an adjustment assembly in one embodiment of the present disclosure; FIG. 5 is an enlarged view of a spacing assembly in an embodiment of the present disclosure; FIG. 6 is an enlarged view of a first index in an embodiment of the present disclosure; fig. 7 is an enlarged view of a second index in an embodiment of the present disclosure.
The utility model provides a multidimensional force sensor calibration device, include:
a first index 100 having a first spherical groove 111;
the second calibration piece 200 is arranged above the first calibration piece 100 at intervals; the second calibration piece 200 has a second spherical groove 210 disposed toward the first calibration piece 100, and the second spherical groove 210 is disposed to be offset from the first spherical groove 111;
a multi-dimensional force sensor 300 connected between the first and second markers 100 and 200;
a loading mechanism 400 comprising a detection member 410 and two adjustment assemblies 420; the two adjusting assemblies 420 are respectively connected to two ends of the detecting member 410, and the two adjusting assemblies 420 are respectively rotatably connected to the first spherical groove 111 and the second spherical groove 210, so that the loading mechanism 400 is disposed at an angle to the first calibrating member 100 and the second calibrating member 200.
In this embodiment, in order to fix the multi-dimensional force sensor 300, the first and second calibration members 100 and 200 are disposed at intervals, the second calibration member 200 is disposed above the first calibration member 100, and two ends of the multi-dimensional force sensor 300 are respectively connected to the first and second calibration members 100 and 200. To achieve calibration of the multi-dimensional force sensor 300, a loading mechanism 400 is provided. The loading mechanism 400 is rotatably connected between the first calibration member 100 and the second calibration member 200 at a predetermined angle, so that the force applied to the loading mechanism 400 can be adjusted by the rotation of the loading mechanism 400, thereby calibrating the multi-dimensional force sensor 300. In this way, the loading mechanism 400 is disposed between the first and second calibration members 100 and 200, and the loading of the multi-dimensional force sensor 300 is realized by a pull-press loading method, which is beneficial to saving the test space.
Specifically, a first spherical groove 111 is formed in the first calibration member 100, a second spherical groove 210 is formed in the second calibration member 200, and the first spherical groove 111 and the second spherical groove 210 are arranged in a staggered manner, so that when two ends of the loading mechanism 400 are connected to the first spherical groove 111 and the second spherical groove 210 respectively, the loading mechanism 400 and the first calibration member 100 and the second calibration member 200 are arranged at an angle.
Specifically, the loading mechanism 400 includes a detecting member 410 for measuring the tension/compression loading force, and an adjusting member 420 for adjusting the force applied to the detecting member 410. For example, but not limiting of, the sensing member 410 is a pull pressure sensor. The two adjusting components 420 are respectively connected to two ends of the detecting member 410 and rotatably connected to the first spherical groove 111 and the second spherical groove 210, so that the pulling pressure is detected between the first calibrating member 100 and the second calibrating member 200 through the detecting member 410, and according to the stress balance principle, the pure stress of the multi-dimensional force sensor 300 can be effectively obtained, and the compensation and calibration can be performed on the pure stress, so that the calibration accuracy of the multi-dimensional force sensor 300 is effectively improved. Moreover, the two adjusting assemblies 420 are respectively rotatably connected to the first spherical groove 111 and the second spherical groove 210, and are loaded by spherical point contact tension and compression, so that the influence of friction on a calibration result is reduced to the maximum extent, and the calibration accuracy of the calibration device is effectively improved.
In one embodiment, the adjusting assembly 420 includes a first ball 421, a first locking member 422, and a first rod 423, wherein the first locking member 422 is connected to the first ball 421, and the first rod 423 is connected to a side of the first locking member 422 away from the first ball 421 and extends in a direction away from the first ball 421;
the two first spheres 421 of the two adjusting assemblies 420 are respectively rotatably connected to the first spherical groove 111 and the second spherical groove 210, and the two first rods 423 are respectively connected to two ends of the detecting element 410.
In this embodiment, to further reduce the frictional resistance of the loading mechanism 400, the adjusting component 420 is configured as a combination of the first ball 421, the first locking component 422 and the first rod 423. Specifically, the first ball 421, the first locking member 422 and the first rod 423 are sequentially connected, and the extending direction of the first rod 423 is the same as the combined connecting direction of the components of the adjusting assembly 420. The first ball 421 is rotatably connected to the first spherical groove 111 or the second spherical groove 210, and it should be understood that the first ball 421 is matched with the first spherical groove 111/the second spherical groove 210.
For example, but not limiting of, the first locking member 422 is a hexagonal prism that is primarily used for tool holding screws to facilitate later adjustment operations.
For example, but not limiting of, the first rod 423 is a screw provided with an external thread, which is mainly used for being in threaded connection with the detecting member 410.
In one embodiment, the first calibration element 100 further includes a first spherical track groove 112 disposed near the first spherical groove 111, a first through groove 113 is disposed between the first spherical groove 111 and the first spherical track groove 112, the second calibration element 200 further includes a second spherical track groove 220 disposed in a staggered manner with respect to the first spherical track groove 112, the second spherical track groove 220 is disposed near the second spherical groove 210, a second through groove 230 is disposed between the second spherical groove 210 and the second spherical track groove 220, the loading mechanism 400 further includes two limiting assemblies 430, and the limiting assemblies 430 are connected to a side of the adjusting assembly 420 away from the detecting element 410;
the two limiting components 430 respectively penetrate through the first through groove 113 and the second through groove 230, and are respectively movably connected to the first spherical raceway groove 112 and the second spherical raceway groove 220.
In this embodiment, to further improve the accuracy of the loading mechanism 400, two limiting assemblies 430 are disposed, a first spherical track groove 112 is disposed on the first calibration member 100 at a position close to the first spherical groove 111, a second spherical track groove 220 is disposed on the second calibration member 200 at a position close to the second spherical groove 210, and the two limiting assemblies 430 are movably connected to the first spherical track groove 112 and the second spherical track groove 220, respectively. To connect the position limiting assembly 430 and the adjusting assembly 420, a first through groove 113 is provided between the first spherical groove 111 and the first spherical track groove 112, and a second through groove 230 is provided between the second spherical groove 210 and the second spherical track groove 220, so that one end of the position limiting assembly 430 can be connected to one end of the adjusting assembly 420 far from the detecting member 410 through the first through groove 113. For example, but not limiting of, the first through slots 113 and/or the second through slots 230 are rectangular through slots. Thus, the entire loading mechanism 400 at least includes a detecting element 410, two adjusting elements 420 and two limiting elements 430. One end of the loading assembly is adjustably connected to the first index 100: that is, one of the position-limiting elements 430 is movably connected in the first spherical track groove 112, one of the adjusting elements 420 connected to the position-limiting element 430 is rotatably connected in the first spherical groove 111, and the other end of the adjusting element 420 is connected to the detecting element 410; the other end of the loading assembly is adjustably connected to a second indexing member 200: that is, another adjusting component 420 connected to the other end of the detecting component 410 is rotatably connected to the second spherical groove 210, and another limiting component 430 connected to the adjusting component 420 is movably connected to the second ring spherical track groove 220, so that the loading mechanism 400 is matched with the double spherical surfaces of the first/second calibration components 100/200 for tension/compression loading, which is beneficial to enhancing the spherical matching effect, reducing the friction force of tension/compression loading, and improving the precision of the calibration device.
In one embodiment, a first connection hole 4221 is formed on a side of the first ball 421 away from the first locking member 422, the limiting member 430 includes a second rod 431, a second ball 432 and a second locking member 433, the second ball 432 is connected to an end of the second rod 431, the second locking member 433 is connected to a side of the second ball 432 away from the second rod 431, and an end of the second rod 431 away from the second ball 432 is inserted into the first connection hole 4221 to fixedly connect the limiting member 430 and the adjusting member 420;
the two second rod bodies 431 of the two limiting assemblies 430 respectively penetrate through the first through groove 113 and the second through groove 230, and the two second spherical bodies 432 of the two limiting assemblies 430 are respectively movably connected to the first spherical-surface track groove 112 and the second spherical-surface track groove 220.
In this embodiment, to further reduce the frictional resistance of the loading mechanism 400, the limiting component 430 is configured as a combination of the second rod 431, the second ball 432 and the second locking component 433. Specifically, the second rod 431, the second sphere 432 and the second locking member 433 are sequentially connected, and the extending direction of the second rod 431 is the same as the combined connecting direction of the components of the limiting assembly 430. The second ball 432 is movably connected to the first spherical-surface track groove 112 or the second spherical-surface track groove 220, and it should be understood that the second ball 432 is adapted to the first spherical-surface track groove 112 or the second spherical-surface track groove 220.
Specifically, in order to realize the fastening of the connection between the second rod body 431 and the first sphere 421, an external thread is provided on the second rod body 431, a first connection hole 4221 having an internal thread adapted to the external thread is opened at one end of the first sphere 421 away from the detection part 410, one end of the second rod body 431 away from the second sphere 432 is inserted into the first connection hole 4221 and is connected to the first sphere 421 through the thread, so as to realize the fastening of the connection between the limiting component 430 and the adjusting component 420.
For example, but not limited to, the second rod 431 is a screw rod with an external thread, which is mainly used for connecting the first ball 421 and conveniently adjusting the limit distance. The secondary loading through the threads facilitates the detection element 410 to read the loading force, so that the loading force has continuity and visibility, and thus, the universality of the multi-dimensional force sensor 300 is improved.
For example, but not limiting of, the second locking member 433 is a hexagonal prism that is mainly used for clamping and screwing a tool, and facilitates the later adjustment operation of the position limiting assembly 430.
In one embodiment, the loading mechanism 400 further includes a first boss 440 and a second boss 450, the first boss 440 being located between the first spherical groove 111 and the first spherical-ring track groove 112, and the second boss 450 being located between the second spherical groove 210 and the second spherical-ring track groove 220.
In this embodiment, in order to further enhance the contact range between the first ball 421 and the first spherical groove 111 or the second spherical groove 210, a first boss 440 is provided on the first scaling member 100, and a second boss 450 is provided on the second scaling member 200. It should be appreciated that the first boss 440 and the second boss 450 are oppositely disposed. For example, but not limiting of, the first bosses 440 are disposed on one side of the first index 100 adjacent to the second index 200 and on the opposite side thereof, and the second bosses 450 are disposed on one side of the second index 200 adjacent to the first index 100 and on the opposite side thereof. That is, two first bosses 440 are provided, and the two first bosses 440 are simultaneously provided on the upper and lower surfaces of the first index member 100; two second bosses 450 are provided, and the two second bosses 450 are simultaneously provided on the upper and lower surfaces of the second index 200.
In one embodiment, the first boss 440 has a first inclined surface 441, and the first inclined surface 441 is disposed toward the first spherical groove 111; and/or the presence of a gas in the gas,
the second boss 450 has a second inclined surface 451, and the second inclined surface 451 is disposed toward the second spherical groove 210.
In this embodiment, the first boss 440 is inclined to increase the local thickness. Specifically, a side surface of the first protrusion 440 close to the first spherical groove 111 is an inclined surface, so as to increase a contact range between the first spherical surface and the first spherical groove 111, which is beneficial to eliminating an influence of a friction force on calibration of the multi-dimensional force sensor 300.
In order to increase the local thickness, the second boss 450 is disposed obliquely. Specifically, a side surface of the second protrusion 450 close to the second spherical groove 210 is an inclined surface, so as to increase a contact range between the second spherical surface and the second spherical groove 210, which is beneficial to eliminating an influence of a friction force on calibration of the multi-dimensional force sensor 300.
In an embodiment, the first spherical grooves 111 are provided in plurality, the second spherical grooves 210 are provided in plurality, the first spherical grooves 111 and the second spherical grooves 210 are symmetrically arranged around the axis of the multidimensional force sensor 300 at intervals, the loading mechanisms 400 are provided in plurality, one loading mechanism 400 is arranged corresponding to one first spherical groove 111 and one second spherical groove 210, and two loading mechanisms 400 arranged on two sides of the axis of the multidimensional sensor are arranged in central symmetry around the gravity center point of the multidimensional sensor.
In this embodiment, in order to further improve the calibration accuracy of the multi-dimensional force sensor 300, a plurality of loading mechanisms 400 are provided, and a plurality of first spherical grooves 111 are provided on the first calibration member 100 and a plurality of second spherical grooves 210 are provided on the second calibration member 200, and the plurality of first spherical grooves 111 and the plurality of second spherical grooves 210 are arranged in a one-to-one staggered manner.
Specifically, the two loading mechanisms 400 disposed on both sides of the axis of the multi-dimensional sensor are disposed in central symmetry around the gravity center point of the multi-dimensional sensor, so that force components in two directions can be generated when the detecting member 410 is stretched or compressed. For example, but not limited to, the two force components refer to the force components of the same loading mechanism 400 acting on the first and second indexes 100 and 200, respectively.
In one embodiment, a plurality of first spherical groove 111 circles and a plurality of second spherical groove 210 circles corresponding to the plurality of first spherical groove 111 circles are arranged along the radial direction of the multidimensional force sensor 300, the distance between two adjacent first spherical groove 111 circles is greater than twice the diameter of the first spherical groove 111 or the second spherical groove 210, and the distance between two adjacent second spherical groove 210 circles is greater than twice the diameter of the first spherical groove 111 or the second spherical groove 210; and/or the presence of a gas in the gas,
a plurality of layers of first spherical groove 111 rings and a plurality of layers of second spherical grooves 210 rings corresponding to the plurality of layers of first spherical groove 111 rings are arranged along the radial direction of the multi-dimensional force sensor 300, the plurality of loading mechanisms 400 are distributed in a layered manner, and the plurality of loading mechanisms 400 in the same direction are parallel to each other.
In this embodiment, the loading mechanisms 400 are sequentially distributed, so as to reduce the interference of force between the loading mechanisms 400, which is beneficial to reduce the error of the force analysis of the detecting element 410.
The loading mechanisms 400 are sequentially distributed, and the loading mechanisms 400 in the same direction are ensured to be parallel to each other, so that the consistency of the loading direction of the force is ensured.
In one embodiment, the calibration device further includes a first adaptor 500 and a second adaptor 600, which are correspondingly arranged, the first adaptor 500 is connected to the first calibration member 100 near the second calibration member 200, and the second adaptor 600 is connected to the second calibration member 200 near the first calibration member 100;
the multi-dimensional force sensor 300 is connected between the first adapter 500 and the second adapter 600.
In this embodiment, in order to facilitate the replacement of the multi-dimensional force sensor 300 with different sizes/specifications, a first adaptor 500 and a second adaptor 600 are disposed oppositely. The first adaptor 500 is arranged on the first calibration piece 100, and the second adaptor 600 is arranged on the second calibration piece 200, so that after two ends of the multi-dimensional force sensor 300 are respectively connected to the first adaptor 500 and the second adaptor 600, the first adaptor 500 is connected to the first calibration piece 100, and the second adaptor 600 is connected to the second calibration piece 200, so as to realize the assembly of the calibration device. Therefore, when different multidimensional force sensors 300 need to be replaced, the first adapter 500 and the second adapter 600 are firstly taken down, and then the multidimensional force sensors 300 are detached from the first adapter 500 and the second adapter 600 to be replaced.
For example, but not limiting of, for simplicity, the first adapter 500 is provided as a first adapter plate and the second adapter 600 is provided as a second adapter plate.
In one embodiment, a first sinking groove 114 is formed in the first calibration piece 100 and is disposed toward the second calibration piece 200, a first fixing hole 1141 is formed in the first sinking groove 114, a second sinking groove 240 is formed in the second calibration piece 200 and is disposed toward the first calibration piece 100, a second fixing hole 241 is formed in the second sinking groove 240, a first connecting hole 4221 penetrating through the first adapter 500 is formed in the first adapter 600, a third connecting hole (not shown in the drawings) penetrating through the second adapter 600 is formed in the second adapter 600, the calibration apparatus further includes a first connecting piece (not shown in the drawings) and a second connecting piece (not shown in the drawings), and the first connecting piece passes through the second connecting hole and is inserted into the first fixing hole 1141 to connect and fasten the first adapter 500 and the first calibration piece 100; the second connecting piece passes through the third connecting hole and is inserted into the second fixing hole 241 to connect and fasten the second adaptor 600 and the second standard 200.
In this embodiment, in order to facilitate the alignment of the first rotating member 500 and the first calibrating member 100 when they are installed, the first sinking groove 114 is formed on the first calibrating member 100. In order to improve the connection fastening between the first rotating member 500 and the first marking member 100, the first connecting member is provided, and the second connecting hole is provided on the first rotating member 500, and the first fixing hole 1141 corresponding to the second connecting hole is provided in the first sinking groove 114, so that the first connecting member passes through the second connecting hole and is inserted into the first fixing hole 1141, thereby realizing the connection fastening of the first rotating member 500 and the first marking member 100. For example, but not limiting of, the first connection member is a screw/bolt. It should be understood that, in other embodiments, in order to improve the connection firmness of the first rotating member 500 and the first calibrating member 100, a plurality of first connecting members are provided, a plurality of second connecting holes are provided on the first rotating member 500, a plurality of first fixing holes 1141 are provided in the first sinking groove 114, the plurality of first connecting members are provided in one-to-one correspondence with the plurality of second connecting holes, the plurality of second connecting holes are provided in one-to-one correspondence with the plurality of first fixing holes 1141, and the plurality of second connecting holes are provided at intervals.
In order to facilitate the alignment of the second adaptor 600 and the second index member 200 when they are installed, a second sinking groove 240 is provided on the second index member 200. In order to improve the connection tightness between the second adaptor 600 and the second scaling member 200, a second connecting member is provided, a third connecting hole is provided on the second adaptor 600, and a second fixing hole 241 corresponding to the third connecting hole is provided in the second sinking groove 240, so that the second connecting member passes through the third connecting hole and is inserted into the second fixing hole, thereby realizing the connection tightness between the second adaptor 600 and the second scaling member 200. For example, but not limiting of, the second connector is a screw/bolt. It should be understood that, in other embodiments, in order to improve the connection firmness of the second adaptor 600 and the second standard 200, a plurality of second adaptor 600 is provided, a plurality of third connecting holes are provided on the second connector, a plurality of second fixing holes 241 are provided in the first sinking groove 114, the plurality of third connecting holes are provided in one-to-one correspondence with the plurality of second fixing holes 241, and the plurality of third connecting holes are provided at intervals.
In one embodiment, the first calibration member 100 comprises a calibration plate 110 and a plurality of legs 120, the plurality of legs 120 are connected to a side of the calibration plate 110 away from the second calibration member 200;
the first spherical groove 111 is disposed on the calibration plate 110.
In this embodiment, in order to enhance the stability of the calibration device, a plurality of support legs 120 are disposed on the calibration plate 110. It should be understood that the plurality of legs 120 extend toward the side of the calibration plate 110 away from the second calibration member 200 and in a direction away from the second calibration member 200. The plurality of legs 120 are uniformly spaced on the calibration plate 110, so that the calibration plate 110 is uniformly stressed, and thus, the stability of the calibration plate 110 is maintained. For example, but not limiting of, the calibration plate 110 is a circular plate.
In one embodiment, the supporting leg 120 includes a vertical section 121 and a horizontal section 122, one end of the vertical section 121 is connected to the calibration plate 110, the other end of the vertical section 121 is connected to one end of the horizontal section 122, and the vertical section 121 and the horizontal section 122 are disposed in an L shape.
In this embodiment, the support legs 120 are disposed in an L shape to further enhance the stability of the calibration board 110. For example, but not limited to, the horizontal section 122 of the leg 120 extends toward the direction close to the calibration plate 110, so as to reduce the footprint of the entire calibration device, and thus make the calibration device more compact.
In one embodiment, the horizontal portion 122 is provided with a horizontal connection hole 1221 penetrating through the horizontal portion 122, and the first calibration member 100 further comprises a calibration fastener (not shown) passing through the horizontal connection hole 1221 to fasten the first calibration member 100 to an external part.
In this embodiment, for a simplified structure, the horizontal connection hole 1221 is formed in the horizontal section 122, and the calibration fastener is provided, so that the calibration fastener passes through the horizontal connection hole 1221 and is inserted into a corresponding mounting hole of an external component, thereby implementing connection and fastening of the first calibration piece 100 and the external component, and further implementing connection and fastening of the calibration device and the external component. For example, but not limiting of, the calibration fasteners are screws/bolts.
See fig. 8-10. FIG. 8 is a top view of a calibration apparatus with multiple loading mechanisms according to an embodiment of the present disclosure; FIG. 9 is a schematic flow chart illustrating a multi-dimensional force sensor calibration method according to an embodiment of the present disclosure; fig. 10 is a schematic flow chart of a calibration method of a multidimensional force sensor in another embodiment of the disclosure.
In a second aspect, an embodiment of the present disclosure further provides a calibration method of a multi-dimensional force sensor, including:
assembling the calibration device of the multi-dimensional force sensor 300 as described above, and adjusting each first sphere 421 not to generate an acting force;
applying force to the calibration device in different directions to obtain the loading force F and the loading moment M of the calibration device in different directions, and simultaneously obtaining the output voltage U of the multi-dimensional force sensor 300 in different directionsfAnd Um；
According to the formula [ F, M]T＝K*[Uf，Um]TCalculating to obtain K; and K is a calibration coefficient of the calibration device.
In one embodiment, the specific steps of assembling the calibration device of the multi-dimensional force sensor 300 as described above and adjusting each of the first spheres 421 not to generate an acting force include:
the first calibration piece 100, the loading mechanism 400, the multi-dimensional force sensor 300 and the second calibration piece 200 are fixedly connected in sequence;
the loading mechanism 400 is adjusted and the reading on the test element 410 is made zero.
In one embodiment, the specific steps of the fixed attachment loading mechanism 400 include:
firstly, two ends of the detecting element 410 are respectively connected with a first rod 423 of an adjusting element 420, and then the first spheres 421 of the two adjusting elements 420 are respectively arranged in the first spherical groove 111 and the second spherical groove 210;
then, the second rods 431 of the two position-limiting assemblies 430 are respectively connected to the first spheres 421 of the two adjusting assemblies 420, and the second spheres 432 of the two position-limiting assemblies 430 are respectively installed in the first spherical-surface track groove 112 and the second spherical-surface track groove 220.
In one embodiment, the specific steps of adjusting the loading mechanism 400 include:
the first sphere 421 is screwed so that the detecting element 410 connected to the first sphere 421 is stretched or pressed and generates a force indication value.
In this embodiment, the first ball 421 can be screwed manually. In other embodiments, in order to realize the automatic adjustment of the calibration device, the automatic adjustment can be performed by setting a voice coil motor or an ultrasonic motor and other micro drivers, then inputting basic parameters and a measurement range in an external control system, and automatically loading and acquiring each required data according to the algorithm.
In one embodiment, the calibration device is applied with forces in different directions to obtain the loading force F and the loading moment M of the calibration device in different directions, and simultaneously obtain the output voltage U of the multi-dimensional force sensor 300 in different directionsfAnd Um；[F，M]T＝K*[Uf，Um]TThe specific steps of calculating K include:
the calibration device is applied with force in the X direction, and the force Fx in the X direction is obtained by analyzing the stress of the loading mechanism 400 and simultaneously the output voltage U of the multidimensional force sensor 300 in the X direction is obtainedfx；
Applying force in Y direction to the calibration device, analyzing the stress of the loading mechanism 400, obtaining the stress Fy in Y direction, and obtaining the output voltage U of the multidimensional force sensor 300 in Y directionfy；
Applying a force in the Z direction to the calibration device, analyzing the stress of the loading mechanism 400, obtaining the stress Fz in the Z direction, and obtaining the output voltage U of the multi-dimensional force sensor 300 in the Z directionfz；
The loading mechanism 400 is subjected to stress analysis to obtain the loading torque Mx around the X direction, and the output voltage U of the multi-dimensional force sensor 300 is obtained when the torque Mx around the X direction is obtainedmx；
The torque My around the Y direction is obtained by analyzing the stress of the loading mechanism 400 and obtaining the loading torque My around the Y direction, and simultaneously, the output voltage U of the multi-dimensional force sensor 300 when the torque My around the Y direction is obtainedmy；
The torque Mz around the Z direction is obtained by analyzing the stress of the loading mechanism 400 and obtaining the loading torque Mz around the Z direction, and the output voltage U of the multi-dimensional force sensor 300 when the torque Mz around the Z direction is obtainedmz；
According to the formula [ Fx, Fy, Fz, Mx, My, Mz]T＝K*[Ufx，Ufy，Ufz，Umx，Umy，Umz]TK is calculated.
For clarity of the calibration method of the multi-dimensional force sensor in the present disclosure, the following specific examples are listed. In this embodiment, there are 8 loading mechanisms (a1, a2, A3, A4, A5, A6, a7, A8) and two inner and outer layers of loading mechanism rings are formed (inner ring layers are a1, A3, A5, a 7; outer ring layers are a2, A4, A6, A8., where a1 and a2 are disposed on the same side, A5 and A6 are disposed on the same side, a1 and A5 are arranged in central symmetry, a2 and A6 are arranged in central symmetry, A3 and A4 are disposed on the same side, a7 and A8 are disposed on the same side, A3 and a7 are arranged in central symmetry, and A4 and A8 are arranged in central symmetry). It should be understood that the following examples are not intended to limit the number of loading mechanism arrangements in the present disclosure, but are merely one specific embodiment thereof.
Specifically, the vertical distance between the top surface of a first calibration piece and the ground surface of a second calibration piece is measured to be H, and the distance between the projection positions of a first spherical groove and a second spherical groove of the same loading mechanism on the first calibration piece is measured to be L, so that the force application angle of the loading mechanism is obtained to be theta (H/L); measuring to obtain the weight G of the second calibration piece; the distance between two adjacent loading mechanism rings on the same calibration piece is B.
When force in the X direction is applied to the calibration device, the loading mechanisms A1 and A5 (hereinafter referred to as A1 and A5) contract, the loading mechanisms A2 and A6 (hereinafter referred to as A2 and A6) expand, and if the contraction pulls and presses the sensors (the detection piece 1 and the detection piece 5) to show the value FA15The expansion tension and compression sensor (the detecting member 2 and the detecting member 6) indicates FA15+ G/(2sin θ), so that the upward component force of a2 and a6 in the Z direction, the downward component force of a1 and a5 in the Z direction and the self weight G of the second index are balanced, and the sensor receives the pure force, wherein Fx is 2 × FA15*cosθ+2*FA15+G/sinθ。
When force in the Y direction is applied to the calibration device, the loading mechanisms A3 and A7 (hereinafter referred to as A3 and A7) contract, the loading mechanisms A4 and A8 (hereinafter referred to as A4 and A8) expand, and if the contraction pulls and presses the sensors (the detection piece 3 and the detection piece 7) to show the value FA37The expansion tension and compression sensor (the detecting member 4 and the detecting member 8) indicates FA37+ G/(2sin θ) so thatThe upward component force generated by A4 and A8 in the Z direction, the downward component force generated by A4 and A8 in the Z direction and the self weight G of the second index piece are balanced, so that the sensor receives the pure force action, and at the moment, Fy is 2FA37*cosθ+2*FA37+G/sinθ。
When a force in the Z direction is applied to the calibration device, the loading mechanisms a 1-A8 (all are set to expand, in this case, the torque generated by the inner ring loading force is in the same direction, and the torque generated by the outer ring loading force is in the same direction and opposite to the torque generated by the inner ring, because torque balance is required, when the detection elements of a1, A3, a5 and a7 have the same value and are FA1357When the detection values of A2, A4, A6 and A8 are adjusted to FA1357D/(D + B), then Fz is 8FA1357*sinθ-G。
According to the balance principle, when the torque Mx around the X direction is loaded, A1 and A2 contract, A5 and A6 expand, and the indication value of the detector is adjusted to be FA2＝FA6＝FA26，FA1＝FA5＝FA26(D + B)/D + G/2, then Mx ═ 2 × FA26*(D+B)*sinθ+G*D*sinθ/2。
When torque My around Y direction is loaded, A3 and A4 contract, A7 and A8 expand, and the indication value of the detection piece is adjusted to FA4＝FA8＝FA48，FA3＝FA7＝FA48(D + B)/D + G/2, then My ═ 2 × FA48*(D+B)*sinθ+G*D*sinθ/2。
When a torque Mz in the Z direction is applied, A1, A4, A6 and A7 contract, A2, A3, A5 and A8 expand, and the indicating value of the detecting element 1/3/5/7 is equal and is FA1357When the values of the detectors 2/4/6/8 are equal to each other, F is the valueA1357D/(D + B) + G/4, then Mz is 8FA1357*D*cosθ+2*G(D+_B)。
Meanwhile, the output voltage U of the measured multidimensional force sensor under the action of different loading forces is obtained through the action of forces in all directions, and the calibration coefficient K can be calculated through the following equation.
[Fx，Fy，Fz，Mx，My，Mz]T＝K*[Ufx，Ufy，Ufz，Umx，Umy，Umz]T
Wherein Fx is the load in the X directionForce, Fy is the loading force in the Y direction, Fz is the loading force in the Z direction; mx is a loading moment in the X direction, My is a loading moment in the Y direction, and Mz is a loading moment in the Z direction; u shapefx、Ufy、Ufz、Umx、Umy、UmzRespectively outputting voltage for the multi-dimensional force sensor; k is a constant.
It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The foregoing are merely exemplary embodiments of the present disclosure, which enable those skilled in the art to understand or practice the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (18)
1. A multi-dimensional force sensor calibration device is characterized by comprising:
the first calibration piece is provided with a first spherical groove;
the second calibration piece is arranged above the first calibration piece at intervals; the second calibration piece is provided with a second spherical groove arranged towards the first calibration piece, and the second spherical groove and the first spherical groove are arranged in a staggered manner;
a multi-dimensional force sensor connected between the first and second indexing members;
the loading mechanism comprises a detection piece and two adjusting components; the two adjusting components are respectively connected to two ends of the detecting piece, and the two adjusting components are respectively rotatably connected to the first spherical groove and the second spherical groove so that the loading mechanism and the first and second calibrating pieces are arranged at an angle.
2. The calibration device as recited in claim 1, wherein the adjustment assembly includes a first ball, a first locking member, and a first rod, the first locking member is connected to the first ball, and the first rod is connected to a side of the first locking member away from the first ball and extends in a direction away from the first ball;
the two first spheres of the two adjusting assemblies are respectively rotatably connected to the first spherical groove and the second spherical groove, and the two first rod bodies are respectively connected to two ends of the detecting piece.
3. The calibration device according to claim 2, wherein the first calibration member further includes a first spherical track groove disposed adjacent to the first spherical groove, a first through groove is disposed between the first spherical groove and the first spherical track groove, the second calibration member further includes a second spherical track groove disposed in a staggered manner with respect to the first spherical track groove, the second spherical track groove is disposed adjacent to the second spherical groove, and a second through groove is disposed between the second spherical groove and the second spherical track groove, the loading mechanism further includes two limiting assemblies, and the limiting assemblies are connected to a side of the adjusting assembly away from the detecting member;
the two limiting assemblies respectively penetrate through the first through groove and the second through groove and are respectively movably connected to the first spherical track groove and the second spherical track groove.
4. The calibration device according to claim 3, wherein a first connection hole is formed in a side of the first ball away from the first locking member, the position-limiting component includes a second rod, a second ball and a second locking member, the second ball is connected to an end of the second rod, the second locking member is connected to a side of the second ball away from the second rod, and an end of the second rod away from the second ball is inserted into the first connection hole to connect and fasten the position-limiting component and the adjusting component;
the two second rod bodies of the two limiting assemblies respectively penetrate through the first through groove and the second through groove, and the two second spheres of the two limiting assemblies are respectively movably connected to the first spherical-surface track groove and the second spherical-surface track groove.
5. The calibration apparatus as set forth in claim 3, wherein the loading mechanism further comprises a first boss and a second boss, the first boss being located between the first spherical groove and the first spherical track groove, the second boss being located between the second spherical groove and the second spherical track groove.
6. The calibration device as set forth in claim 5, wherein the first boss has a first inclined surface disposed toward the first spherical groove; and/or the presence of a gas in the gas,
the second boss has a second inclined surface disposed toward the second spherical groove.
7. The calibration device according to claim 1, wherein a plurality of first spherical grooves are provided, a plurality of second spherical grooves are provided, the plurality of first spherical grooves and the plurality of second spherical grooves are symmetrically arranged around an axis of the multidimensional force sensor at intervals, the plurality of loading mechanisms are provided, one loading mechanism is arranged corresponding to one first spherical groove and one second spherical groove, and two loading mechanisms arranged on two sides of the axis of the multidimensional sensor are symmetrically arranged around a center of gravity point of the multidimensional sensor.
8. The calibration device according to claim 7, wherein a plurality of layers of first spherical groove rings and a plurality of layers of second spherical groove rings corresponding to the plurality of layers of first spherical groove rings are arranged in a radial direction of the multi-dimensional force sensor, a distance between two adjacent first spherical groove rings is greater than twice a diameter of the first spherical groove or the second spherical groove, and a distance between two adjacent second spherical groove rings is greater than twice the diameter of the first spherical groove or the second spherical groove; and/or the presence of a gas in the gas,
and a plurality of layers of first spherical groove rings and a plurality of layers of second spherical groove rings which are arranged corresponding to the plurality of layers of first spherical groove rings are arranged along the radial direction of the multi-dimensional force sensor, the plurality of loading mechanisms are distributed in a layered manner, and the plurality of loading mechanisms in the same direction are parallel to each other.
9. The calibration device according to claim 1, further comprising a first adapter and a second adapter, which are correspondingly disposed, wherein the first adapter is connected to the first calibration member on a side close to the second calibration member, and the second adapter is connected to the second calibration member on a side close to the first calibration member;
the multi-dimensional force sensor is connected between the first adapter and the second adapter.
10. The calibration device according to claim 9, wherein a first sinking groove is formed in the first calibration member and is disposed toward the second calibration member, a first fixing hole is formed in the first sinking groove, a second sinking groove is formed in the second calibration member and is disposed toward the first calibration member, a second fixing hole is formed in the second sinking groove, a first connecting hole penetrating through the first adapter member is formed in the first adapter member, a third connecting hole penetrating through the second adapter member is formed in the second adapter member, the calibration device further comprises a first connecting member and a second connecting member, the first connecting member penetrates through the second connecting hole and is inserted into the first fixing hole to connect and fasten the first adapter member and the first calibration member; the second connecting piece penetrates through the third connecting hole and is inserted into the second fixing hole so as to connect and fasten the second adaptor and the second calibration piece.
11. The calibration device according to claim 1, wherein the first calibration member comprises a calibration plate and a plurality of support legs, the plurality of support legs being connected to a side of the calibration plate away from the second calibration member;
the first spherical groove is arranged on the calibration plate.
12. The calibrating device according to claim 11, wherein the supporting leg comprises a vertical section and a horizontal section, one end of the vertical section is connected to the calibrating plate, the other end of the vertical section is connected to one end of the horizontal section, and the vertical section and the horizontal section are arranged in an L shape.
13. The calibration device as recited in claim 12, wherein the horizontal section is provided with a horizontal connection hole extending through the horizontal section, and the first calibration member further comprises a calibration fastener, the calibration fastener passing through the horizontal connection hole to fasten the first calibration member to an external part.
14. A calibration method of a multi-dimensional force sensor is characterized by comprising the following steps:
assembling a multi-dimensional force sensor calibration device as defined in any one of claims 1 to 13, and adjusting each first sphere to generate no acting force;
applying force to the calibration device in different directions to obtain the loading force F and the loading moment M of the calibration device in different directions, and simultaneously obtaining the output voltage U of the multi-dimensional force sensor in different directionsfAnd Um；
According to the formula [ F, M]T＝K*[Uf，Um]TCalculating to obtain K; and K is a calibration coefficient of the calibration device.
15. A calibration method according to claim 14, wherein the step of assembling the multidimensional force sensor calibration device as described in any one of claims 1 to 13 and adjusting each first sphere not to generate an acting force comprises:
the first calibration piece, the loading mechanism, the multi-dimensional force sensor and the second calibration piece are fixedly connected in sequence;
the loading mechanism is adjusted and the reading on the test piece is made zero.
16. The calibration method according to claim 15, wherein the specific steps of fixedly connecting the loading mechanism include:
firstly, connecting two ends of a detection piece with a first rod body of an adjusting component respectively, and then installing first spheres of the two adjusting components in a first spherical groove and a second spherical groove respectively;
then the second rod bodies of the two limiting assemblies are respectively connected to the first spheres of the two adjusting assemblies, and the second spheres of the two limiting assemblies are respectively arranged in the first annular spherical track groove and the second annular spherical track groove.
17. The calibration method according to claim 15, wherein the specific step of adjusting the loading mechanism comprises:
and screwing the first ball body so that the detection piece connected with the first ball body is stretched or extruded and generates a stress indicating value.
18. The calibration method according to claim 14, wherein the calibration device is forced in different directions to obtain the loading force F and the loading moment M of the calibration device in different directions, and obtain the output voltage U of the multi-dimensional force sensor in different directions at the same timefAnd Um；[F，M]T＝K*[Uf，Um]TThe specific steps of calculating K include:
applying force in the X direction to the calibration device, analyzing the stress of the loading mechanism, acquiring the stress Fx in the X direction, and acquiring the output voltage U of the multidimensional force sensor in the X directionfx；
Force in the Y direction is applied to the calibration device, stress analysis is carried out on the loading mechanism, stress Fy in the Y direction is obtained, and output voltage U of the multi-dimensional force sensor in the Y direction is obtained at the same timefy；
Applying force in the Z direction to the calibration device, analyzing the stress of the loading mechanism, acquiring the stress Fz in the Z direction, and acquiring the output voltage U of the multi-dimensional force sensor in the Z directionfz；
The torque Mx around the X direction is obtained by analyzing the stress of the loading mechanism and obtaining the loading torque Mx around the X direction, and simultaneously, the output voltage U of the multidimensional force sensor when the torque Mx around the X direction is obtainedmx；
The torque My around the Y direction is obtained by analyzing the stress of the loading mechanism and obtaining the loading torque My around the Y direction, and simultaneously, the output voltage U of the multidimensional force sensor when the torque My around the Y direction is obtainedmy；
The torque Mz around the Z direction is obtained by analyzing the stress of the loading mechanism and obtaining the loading torque Mz around the Z direction, and simultaneously, the output voltage U of the multidimensional force sensor when the torque Mz around the Z direction is obtainedmz；
According to the formula [ Fx, Fy, Fz, Mx, My, Mz]T＝K*[Ufx，Ufy，Ufz，Umx，Umy，Umz]TK is calculated.
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