CN113970393A - Pressure sensing device, circuit, weighing device and pressure distribution detection system - Google Patents
Pressure sensing device, circuit, weighing device and pressure distribution detection system Download PDFInfo
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Classifications
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Abstract
A pressure sensing device, a circuit, a weighing device and a pressure distribution detection system, the pressure sensing device comprising a sensing array comprising a layer of pressure sensing material and an array electrode layer arranged in a stack, the layer of pressure sensing material and the array electrode layer forming at least one load cell element configured to change at least one electrical parameter based on the magnitude of an applied pressure. The load cell elements formed on the sensing array can change an electrical parameter when the magnitude of the applied pressure changes, so that the transformation of the electrical parameter can be directly detected under the condition of power-on to realize digital detection and recording of pressure sensing data.
Description
Technical Field
The application belongs to the technical field of pressure sensing, and particularly relates to a pressure sensing device, a circuit, a weighing device, a pressure distribution detection system and a control method based on the pressure distribution detection system.
Background
In the field of industrial production and manufacturing, when the pressing process of two contact surfaces is involved, it is necessary to know whether the pressure distribution of the pressing process is uniform, whether the automation equipment works in a preset pressure working interval and other key parameters, and the feedback control of the pressure distribution plays a decisive role at the moment. For example, the lamination of mobile phone screens, the lamination of liquid crystal display panels, the lamination of wafers, the lamination in battery production and the like in the electronic manufacturing industry, the lamination of sheet metals, tire impressions, the sealing of air cylinders and the like in the automobile industry. The mainstream practice in the industry is to use a pressure sensitive paper inspection method for decades, which is to perform a press-fit inspection before the machine is used and perform an initial calibration of the machine according to the color comparison of the pressure sensitive paper.
However, pressure sensitive paper suffers from a number of technically important drawbacks: 1) the traditional detection mode can not carry out digital recording and management and realize real-time online pressure monitoring; 2) its use is a disposable consumable, and the cost is too high. Therefore, the digital detection scheme based on the pressure distribution measurement is a critical problem to be solved urgently by various large-scale manufacturing enterprises.
Meanwhile, the pressure distribution detection system needs to meet the requirements of high measurement precision, high spatial resolution, high linearity and acquisition of large-array tactile images, and meanwhile, the sensing array needs to have full flexibility so as to be capable of adapting to more curved surface application scenes such as rollers, and the existing common pressure sensing array cannot meet the requirements.
Disclosure of Invention
The application aims to provide a pressure sensing device, a circuit, a weighing device, a pressure distribution detection system and a control method based on the pressure distribution detection system, and aims to solve the problems that a traditional pressure sensing array is high in cost and cannot achieve digital recording.
A first aspect of embodiments of the present application provides a pressure sensing device comprising a sensing array comprising a layer of pressure sensing material and an array electrode layer arranged in a stack, the layer of pressure sensing material and the array electrode layer forming at least one load sensor element configured to change at least one electrical parameter based on the magnitude of an applied pressure.
The pressure sensing device can be repeatedly used, cost is saved, and when the magnitude of applied pressure of the load sensor elements formed on the sensing array changes, the electrical parameters can be changed, so that the transformation of the electrical parameters can be directly detected under the condition of electrification to realize digital detection and recording of pressure sensing data.
In one embodiment, the array electrode layer comprises a plurality of rows of first electrodes and a plurality of columns of second electrodes which are arranged in rows and columns and respectively contacted with the pressure sensing material layer, each first electrode row comprises a plurality of first electrodes which are connected in series and arranged at intervals, and each second electrode column comprises a plurality of second electrodes which are connected in series and arranged at intervals; wherein the adjacent first electrode and the second electrode are arranged at intervals, and at least one load sensor element is formed by a pressure sensing material layer.
In one embodiment, the array electrode layer includes a substrate, the first electrodes and the second electrodes are disposed on a top surface of the substrate, the first electrodes in the same row form a series connection on the top surface, a plurality of first connection electrodes are disposed on a bottom surface of the substrate at intervals, and the second electrodes in the same column are connected to the same first connection electrodes through via holes penetrating through the substrate to be connected in series.
In one embodiment, the bottom surface of the substrate is further provided with a plurality of second connection electrodes arranged at intervals, one second connection electrode is arranged between any two adjacent first connection electrodes, and one second connection electrode is electrically connected with one first electrode row through one via hole.
In one embodiment, the first connection electrode and the second connection electrode are substantially the same in shape and size.
In one embodiment, the array electrode layer includes a substrate, the first electrodes and the second electrodes are disposed on a top surface of the substrate, the first electrodes in the same row form a series connection on the top surface, and the second electrodes in the same column form a series connection on the top surface through a bridge.
In one embodiment, a row of the second electrodes located in different second electrode columns is arranged between two adjacent rows of the first electrodes, and each second electrode is located between two adjacent first electrodes in the same row.
In one embodiment, the first electrode and the second electrode are square, rectangular, diamond-shaped, oval, circular, or polygonal with more than five sides.
In one embodiment, the substrate is a flexible film or a rigid substrate.
In one embodiment, the pressure sensing device further includes a plurality of driving electrodes, a plurality of sensing electrodes, and at least one interface component, one end of one of the driving electrodes is connected to one end of at least one of the first electrode rows located at a first side of the sensing array, one end of one of the sensing electrodes is connected to one end of at least one of the second connecting electrodes located at the first side, and the other ends of the driving electrodes and the other ends of the sensing electrodes are respectively connected to the at least one interface component.
In one embodiment, one end of one of the driving electrodes is connected to 1, 2, 3 or 4 adjacent rows of the first electrodes, and one end of one of the sensing electrodes is connected to 1, 2, 3 or 4 adjacent rows of the second electrodes.
In one embodiment, the pressure sensing device further includes an interface circuit board, the plurality of driving electrodes and the plurality of sensing electrodes are disposed on the interface circuit board, and a first electrical shielding layer covering the driving electrodes and a second electrical shielding layer covering the sensing electrodes are disposed on a surface of the interface circuit board.
In one embodiment, the layer of pressure sensing material comprises a layer of conductive material; or
The pressure sensing material layer comprises a conductive material layer and an insulating base material which is arranged in a stacking mode with the conductive material layer, and the conductive material layer is adjacent to the array electrode layer.
In one embodiment, the conductive material layer is an electronically conductive material layer or an ionically conductive material layer.
In one embodiment, the electronic conductive material layer is at least one of a conductive ink layer, a conductive polymer film, and a conductive polymer coating.
In one embodiment, the conductive ink layer comprises a polymer matrix and a conductive filler prepared on the polymer matrix;
the conductive polymer film comprises a conductive filler and a polymer matrix which are mixed, and the conductive filler and the polymer matrix are directly prepared into a film by using a calendaring and casting method after being mixed; wherein the conductive filler comprises at least one of a carbon-based conductive filler, a metal-based conductive filler, and a ceramic-based conductive filler;
the conductive polymer coating is a film formed by conductive polymer water or organic solution.
In one embodiment, the layer of ion conducting material comprises at least one of a polymer electrolyte, an ionic gel, an ionic composite.
In one embodiment, the insulating substrate comprises at least one of polyethylene terephthalate, polybutylene terephthalate, polyimide, polycarbonate, polysulfone, polyetherimide, polyphenylene sulfide, polyether ketone, and polyether ether ketone.
In one embodiment, the electrical parameter is a resistance value, a capacitance value, an impedance value, or an amount of charge.
A second aspect of the embodiments of the present application provides a pressure sensing circuit, including the above-mentioned pressure sensing apparatus and a plurality of amplifying circuits;
the input of one amplifying circuit is connected with the output of one array electrode layer, and each amplifying circuit is used for maintaining the equal potential of each output end of the array electrode layer so as to eliminate the crosstalk flow of current between the rows and the columns of the array electrode layer.
In one embodiment, the amplifying circuit includes:
the inverting input end of the operational amplifier is connected with the output end of the array electrode layer, the normal phase input end of the operational amplifier is connected with the reference voltage, and the output end of the operational amplifier outputs a detection signal;
and the feedback resistor is connected between the inverting input end of the operational amplifier and the output end of the operational amplifier.
The pressure sensing circuit adds the crosstalk elimination amplifying circuit at each output end of the sensing array, and because of the amplifying circuit, when the compression impedance of a plurality of load sensor elements between rows and columns of the sensing array changes and causes the respective impedance values to be unequal, no potential difference exists between the rows and the columns, and at this time, the compression impedance between the rows and the columns changes, and the crosstalk flow of current between a plurality of rows and a plurality of columns can not be caused any more, thereby achieving the purpose of crosstalk elimination.
A third aspect of an embodiment of the present application provides a pressure distribution detection system, including:
the excitation module is used for providing an excitation signal;
in the pressure sensing device, each input end of the array electrode layer receives the excitation signal, and each output end outputs a detection signal;
and the control module is electrically connected with the output end of the array electrode layer, determines the position and the size of the pressure applied to the pressure sensing device according to the detection signal and outputs the position and the size.
The pressure distribution detection system changes the electrical parameters of the load sensor elements when the load sensor elements formed on the sensing array change in the applied pressure, and detects the detection signals output by the array electrode layer by connecting the excitation electrodes to the input of the array electrode layer, so that the position and the size of the pressure can be obtained according to the change of the detection signals, and the digital detection and the recording of pressure sensing data are realized.
In one embodiment, the display device further comprises a plurality of amplifying circuits, one of the amplifying circuits is connected with an output end of one of the array electrode layers, and each amplifying circuit is used for maintaining each output end of the array electrode layers at the same potential so as to eliminate crosstalk flow of current between rows and columns of the array electrode layers.
In one embodiment, the amplifying circuit includes:
the inverting input end of the operational amplifier is connected with the output end of the array electrode layer, the normal phase input end of the operational amplifier is connected with the reference voltage, and the output end of the operational amplifier outputs a detection signal;
and the feedback resistor is connected between the inverting input end of the operational amplifier and the output end of the operational amplifier.
In one embodiment, the method further comprises the following steps:
the input of the first signal switching module is electrically connected with the output of the excitation module, a plurality of outputs of the first signal switching module are respectively electrically connected with the input ends of the array electrode layers, and the first signal switching module connects the excitation module with the input end of one array electrode layer at one moment;
and the plurality of inputs of the second signal switching module are electrically connected with the output ends of the array electrode layers, the output of the second signal switching module is electrically connected with the control module, and the second signal switching module is used for connecting the output end of one array electrode layer with the control module at one moment.
In one embodiment, the excitation signal is a dc signal or an ac signal.
A fourth aspect of the embodiment of the present application provides a control method based on the above pressure distribution detection system, including:
when pressure is applied to the surface of the pressure sensing material layer according to a preset rule, the excitation module provides the excitation signals for the excitation electrode rows respectively, and the control module acquires detection signals output by the force sensing electrode rows;
and the control module records the one-to-one correspondence relationship between the pressure applied by each position of the pressure sensing material layer and the detection signal of the position, and stores and outputs the pressure.
A fifth aspect of the embodiments of the present application provides a weighing apparatus, including the above-mentioned pressure sensing apparatus, or the above-mentioned pressure sensing circuit, or the above-mentioned pressure distribution detection system.
Drawings
FIG. 1 is a schematic side view of a pressure sensing device according to a first embodiment of the present disclosure;
fig. 2 is a structural diagram of a pressure sensing device according to an embodiment of the present disclosure;
FIG. 3 is an enlarged view of portion A of FIG. 2;
FIG. 4 is a schematic side view of a pressure sensing device according to a second embodiment of the present disclosure;
FIG. 5 is a schematic side view of a pressure sensing device according to a third embodiment of the present disclosure;
fig. 6 is a schematic top view of a pressure sensing device according to a third embodiment of the present disclosure;
fig. 7 is a schematic top view of a pressure sensing device according to a third embodiment of the present disclosure;
FIG. 8 is a schematic circuit diagram of a pressure sensing circuit provided in an embodiment of the present application;
FIG. 9 is a block diagram of a pressure distribution sensing system provided in accordance with a first embodiment of the present application;
FIG. 10 is a block diagram of a pressure distribution sensing system provided in accordance with a second embodiment of the present application;
FIG. 11 is a schematic circuit diagram of a pressure distribution sensing system according to a second embodiment of the present application;
fig. 12 is a block diagram of a pressure distribution detection system according to a third embodiment of the present application.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, refer to an orientation or positional relationship illustrated in the drawings for convenience in describing the present application and to simplify description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1, in a first aspect, the present application provides a pressure sensing device, which includes a sensing array 10, the sensing array 10 includes a stacked pressure sensing material layer 11 and an array electrode layer 12, the pressure sensing material layer 11 and the array electrode layer 12 together form at least one load cell element, and the load cell element is configured to change at least one electrical parameter based on the magnitude of an applied pressure.
The load cell elements formed on the sensing array 10 of the pressure sensing device can change electrical parameters when the magnitude of the applied pressure changes, so that, when energized, the transformation of the electrical parameters can be directly detected to achieve digital detection and recording of pressure sensing data.
Referring to fig. 1 to 3, the array electrode layer 12 includes a plurality of rows of first electrode rows 122 and a plurality of columns of second electrode columns 124 arranged in rows and columns and respectively contacting the pressure sensing material layer 11, each first electrode row 122 includes a plurality of first electrodes 1222 connected in series and arranged at intervals, each second electrode column 124 includes a plurality of second electrodes 1242 connected in series and arranged at intervals; wherein adjacent first electrodes 1222 and second electrodes 1242 are spaced apart and form at least one load cell element from the pressure sensing material, the load cell element being configured to change at least one electrical parameter based on the magnitude of the applied pressure.
It is understood that the array electrode layer 12 may be fabricated on the basis of a flexible circuit board, or may be fabricated on the basis of a printed circuit board. The load cell element may be a piezoresistive element, a piezoelectric element, an impedance element or a capacitive element. The load sensor element may be configured to change at least one electrical characteristic (e.g., resistance value, charge amount, impedance value, capacitance value, etc.) based on an amount or magnitude of the applied force. Alternatively, the load cell element may output a signal proportional to the magnitude of the applied pressure.
Referring to fig. 3, in one embodiment, a row of second electrodes 1242 (reference numeral 126) in different second electrode columns 124 is arranged between two adjacent rows 122 of first electrodes, and each second electrode 1242 is arranged between two adjacent first electrodes 1222 in the same row. By such a design, the first electrode 1222 and the second electrode 1242 can be located on the same plane, so that the thickness of the pressure sensing device can be reduced, and if the pressure sensing device is a flexible film, the flexibility can be further increased.
In some embodiments, when the first electrode 1222 and the second electrode 1242 are located on the same plane, the pattern shapes of the first electrode 1222 and the second electrode 1242 are polygonal shapes which may be simultaneously set as a square, a rectangle, a diamond, an ellipse, a circle, or more than five sides, and these shapes may have rounded corners. Wherein the diameter of the circle, the long side of the rectangle, the long axis of the ellipse, the side length of the square, the side length of the rhombus and the diameter of the inscribed circle of the polygon are between 0.5mm and 3 mm. The distance between the centers of the adjacent first electrodes 1222 in the same row and the adjacent second electrodes 1222 in the same column is between 1mm and 3mm, preferably 2 mm. The distance between two adjacent edges of any two electrodes is 1 mm-3 mm. The high-density single-sided array electrodes with low row and column spacing, such as a 16 × 16 array, a 32 × 16 array, a 64 × 64 array or a 128 × 128 array, can be realized in a one-step forming mode or a cutting mode, so that a high-density pressure sensing array is realized, and the acquisition of high-precision, high-spatial resolution, high linearity and large-array tactile images of measurement is met.
In other embodiments, the first electrode row 122 and the second electrode column 124 may be stacked with the pressure sensing material layer 11 therebetween.
Referring to fig. 3 and 4, in one embodiment, the array electrode layer 12 includes a substrate 12a, and the substrate 12a may be a flexible film, which is typically Polyimide (PI), Polyimide film or fluorinated ethylene propylene (fep) film. The substrate 12a may be a rigid substrate, and the material is typically a phenolic paper laminate, an epoxy paper laminate, a polyester glass mat laminate, or an epoxy glass cloth laminate.
The substrate 12a is provided with a top electrode layer 12a1 and a bottom electrode layer 12a2 (shown in dotted lines in fig. 3) on its top and bottom surfaces, respectively. Referring to fig. 1 to 4, a top electrode layer 12a1 formed of first electrodes 1222 and second electrodes 1242 is disposed on the top surface of the substrate 12a, and the first electrodes 1222 of the same row are connected in series on the top surface. In this embodiment, the adjacent first electrodes 1222 in the same row are connected by exposed copper 1224; in other ways, the exposed copper 1224 may be omitted if the size of the first electrodes 1222 is suitable, and adjacent first electrodes 1222 in the same row will be in direct contact. In addition, the lower electrode layer 12a2 provided on the bottom surface of the substrate 12a includes a plurality of first connection electrodes 12b (indicated by dotted lines in fig. 3) arranged at intervals, and the second electrodes 1242 in the same column are connected to the same first connection electrode 12b by vias 12d penetrating through the substrate 12a to be connected in series. In other embodiments, the second electrodes 1242 of the same column are connected in series on the top surface, and the first electrodes 1222 of the same row may be connected in series by being connected to the same first connection electrode 12b through the through-substrate 12a via 12 d.
In this embodiment, the first electrode 1222, the second electrode 1242 and the force sensing material form a single-layer electrode design, so that the thickness of the sensing device can be reduced, the thickness can be further reduced, the flexibility is good, and the sensing device can adapt to more curved surface application scenarios. In one embodiment, the flexibility can be increased and the elongation can be extended by making the flexible pressure sensing device while the bare copper 1224 and the first connecting electrode 12b are arranged in a shape that can be bent and extended, since the electrodes are spaced apart from each other, that is, the electrodes can be hollowed out.
In one embodiment, the bottom electrode layer 12a2 disposed on the bottom surface of the substrate 12a further includes a plurality of second connecting electrodes 12c (shown by dotted lines in fig. 3) arranged at intervals, one second connecting electrode 12c is disposed between any two adjacent first connecting electrodes 12b, and one second connecting electrode 12c is electrically connected to one first electrode row 122 through one via 12 d. Thus, the upper electrode of the sensing array 10 can be led out from one side edge thereof, which can reduce the area of the sensing array 10, realize zero frame, save the routing distance of the electrode externally connected to the sensing array 10, and improve the reliability. Certainly, the upper electrodes of the sensing array 10 can also be led out from the two opposite sides, so that the density of external wiring is reduced, and the reliability of the circuit structure is improved; the first electrode 1222 and the second electrode 1242 may be led out from different sides, so as to reduce mutual interference of signals and achieve good anti-interference performance.
In one embodiment, the array electrode layer 12 includes a substrate 12a, in which the top electrode layer 12a1, the first electrodes 1222 and the second electrodes 1222 are disposed on the top surface of the substrate, the first electrodes 1222 of the same row are connected in series on the top surface of the substrate 12a, and the second electrodes 1222 of the same column are connected in series on the top surface of the substrate 12a by a bridging process. Thus, compared with the above embodiment, the bottom electrode layer 12a2 provided on the bottom surface of the substrate 12a can be omitted, the thickness is reduced, the thickness is further reduced, the flexibility is good, and the flexible printed circuit board can adapt to more curved surface application scenarios.
In one embodiment, the first and second connection electrodes 12b and 12c are substantially the same in shape and size. Therefore, the thickness of the sensing array 10 is uniform, the pressure sensing variation is uniform, and the consistency is good.
In one embodiment, the pressure sensing device further comprises a plurality of driving electrodes 13, a plurality of sensing electrodes 14, and at least one interface component 15, wherein one of the driving electrodes 13 and the sensing electrodes 14 is used for accessing the excitation signal, and the other one is used for outputting the detection signal.
One end of one driving electrode 13 is connected to one end of one of the at least one first electrode row 122 and the second connecting electrode 12c, which is located at the first side of the sensing array 10, one end of one sensing electrode 14 is connected to one end of the other of the at least one first electrode row 122 and the second connecting electrode 12c, which is located at the first side of the sensing array 10, and the other ends of the plurality of driving electrodes 13 and the other ends of the plurality of sensing electrodes 14 are respectively connected to the at least one interface component 15. In this embodiment, the upper electrode of the sensing array 10 can be collectively led out from one side thereof, and is connected to the input/output electrical signal through two different interface components 15. The two interface components 15 may be standard 64Pin, 0.5mm pitch single-sided Flexible Circuit board (FPC) plug interfaces, the back of which may be made of Polycarbonate (PC) stiffener. The two interface components 15 may also be printed circuit board interfaces.
In one embodiment, one end of one driving electrode 13 is connected to 1, 2, 3 or 4 adjacent first electrode rows 122, and one end of one sensing electrode 14 is connected to 1, 2, 3 or 4 adjacent second connecting electrodes 12 c. Thus, a single signal can excite a first electrode 1222 and a second electrode 1242 to achieve high resolution detection, and a single signal can excite two to four or more first electrodes 1222 and two to four or more second electrodes 1242 in parallel to form a parallel electrode to achieve reduced resolution detection.
In one embodiment, the pressure sensing device further includes an interface circuit board 16, the plurality of driving electrodes 13 and the plurality of sensing electrodes 14 are disposed on the interface circuit board 16, and a surface of the interface circuit board 16 is disposed with a first electrical shielding layer 161 covering the driving electrodes 13 and a second electrical shielding layer 162 covering the sensing electrodes 14. The interface board 16 may be integrally formed with the sensing array 10, i.e., the driving electrodes 13, the sensing electrodes 14, the first electrodes 1222 and the second electrodes 1242 are fabricated on one substrate 12a at the same time. The interface board 16 may also be fabricated separately from the sensing array 10, and the sensing array 10 and the interface board 16 may be both flexible or rigid, or one may be flexible and the other rigid. Alternatively, the interface board 16 may be omitted, and the interface unit 15 may be directly disposed on the side of the sensing array 10 to directly interface with each of the first electrode rows 122 and the second connection electrodes 12 c. The first and second electric shielding layers 161 and 162 can reduce signal mutual interference between the driving and sensing electrodes 13 and 14 and interference of external signals to the driving and sensing electrodes 13 and 14.
In one embodiment, the pressure sensing material layer 11 is a film to increase flexibility and reduce thickness. In one embodiment, the layer of pressure sensing material 11 comprises a layer of conductive material. In another embodiment, the pressure sensing material layer 11 includes a conductive material layer adjacent to the array electrode layer 12 and an insulating substrate disposed in a stack with the conductive material layer.
The conductive material layer is an electronic conductive material layer or an ionic conductive material layer. When the conductive material layer is an electronic conductive material layer, the load change of the load sensor element is obvious in resistance value or impedance value change. When the conductive material layer is an ion conductive material layer, the load change of the load sensor element is obvious in capacitance value, impedance value or charge quantity change.
The electronic conductive material layer is at least one of a conductive ink layer, a conductive polymer film and a conductive polymer coating. The conductive ink layer comprises a polymer matrix and a conductive filler prepared on the polymer matrix, and the preparation method can be a screen method and a blade coating method. The conductive polymer film comprises a conductive filler and a polymer matrix which are mixed, and the conductive filler and the polymer matrix are directly prepared into a film by using a calendaring and casting method after being mixed. The conductive filler includes at least one of a carbon-based conductive filler, a metal-based conductive filler, and a ceramic-based conductive filler. The conductive polymer coating is a film formed by water or organic solution of conductive polymer.
The ion conductive material layer includes at least one of a polymer electrolyte, an ionic gel, and an ionic composite.
The insulating base material is one of Polyethylene Terephthalate (PET), Polybutylene Terephthalate (PBT), PI, polycarbonate, Polysulfone (PSU), Polyetherimide (PEI), Polyphenylene sulfide (PPS), polyether ketone (PEK), and polyether ether ketone (PEEK). So that a load change of the load sensor element formed between the first electrode 1222 and the second electrode 1242 is noticeable as a resistance change.
Referring to fig. 5 and 6, the pressure sensing material layer 11 and the array electrode layer 12 are in face-to-face contact and encapsulated at the edge portion without the electrodes. The material 18 and method used for encapsulation are not particularly limited, and any bonding means that can provide reliable bonding may be used, such as pressure sensitive adhesive, thermosetting adhesive, optical adhesive, laser welding, etc., to produce the thin film pressure sensor. The pressure sensing device can resist acid and alkali corrosion, and can meet the requirements of water resistance, moisture resistance and acid and alkali resistance. Referring to fig. 5 to 7, in an embodiment, a double-sided adhesive tape is attached between the pressure sensing material layer 11 and the array electrode layer 12 in the peripheral region around the array electrode layer 12, and a vent hole 19 is reserved. The vent holes 19 can ensure that the pressure sensing material layer 11 and the array electrode layer 12 can be completely and tightly attached, and the phenomenon of bubbling caused by uneven stress during pressing due to the existence of air is avoided.
Referring to fig. 8, a second aspect of the embodiments of the present application provides a pressure sensing circuit, which includes the above-mentioned pressure sensing device and a plurality of amplifying circuits 300;
wherein, an input of one amplifying circuit 300 is connected to an output of one array electrode layer 12, and each amplifying circuit 300 is used to maintain each output terminal of the array electrode layer 12 at the same potential, so as to eliminate the crosstalk current flowing between the rows and columns (the first electrode row 122 and the second electrode column 124) of the array electrode layer 12.
In one embodiment, the amplifying circuit 300 includes:
an operational amplifier U1 with an inverting input connected to the output of the array electrode layer 12 and a non-inverting input connected to the reference voltage VREFOutput of the output terminalDetecting a signal;
feedback resistor RFAnd is connected between the inverting input terminal of the operational amplifier U1 and the output terminal of the operational amplifier U1.
The pressure sensing circuit adds the crosstalk elimination amplifying circuit 300 at each output end of the sensing array, and as the virtual short principle of the operational amplifier is utilized, two input ends of the operational amplifier are at the same potential, when the compression impedance of a plurality of load sensor elements between rows and columns of the sensing array changes and causes the respective impedance values to be unequal, no potential difference exists between the rows and the columns, and at the moment, the compression impedance between the rows and the columns changes, the crosstalk of current between a plurality of rows and a plurality of columns can not be caused to flow, thereby achieving the purpose of crosstalk elimination.
FIG. 8 shows the case of excitation of the first electrode row with the amplitude of the excitation signal at the row end at VREFThe potential of the column terminal is also maintained at V due to the equipotential characteristic of the positive and negative terminals of the operational amplifier U1REFSo that current does not flow between the columns, which effectively solves the cross-talk problem.
Referring to fig. 9, a second aspect of the embodiments of the present application provides a pressure distribution detecting system, which includes an excitation module 100, a pressure sensing device, and a control module 200.
An excitation module 100 for providing an excitation signal; each input end of the array electrode layer 12 of the pressure sensing device receives an excitation signal, and each output end outputs a detection signal; the control module 200 is electrically connected to the output end of the array electrode layer 12, determines the position and magnitude of the pressure applied to the pressure sensing device according to the detection signal, and outputs the determined position and magnitude.
Further, with reference to fig. 3, 8 and 9, one of the first electrode row 122 and the second electrode column 124 of the pressure sensing device is an excitation electrode row, and the other is a detection electrode column, the excitation electrode row is electrically connected to the excitation module 100 through the driving electrode 13, receives the excitation signal, and the detection electrode column outputs the detection signal through the sensing electrode 14; the control module 200 is electrically connected to the detection electrode columns, determines the position and magnitude of the force applied to the pressure sensing material layer 11 according to the detection signal, and outputs the determined position and magnitude.
Referring to fig. 8 and 10, in one embodiment, the pressure distribution detecting system further includes a plurality of amplifying circuits 300, one amplifying circuit 300 is electrically connected to one detecting electrode column (i.e., the output terminal of the array electrode layer 12), and the amplifying circuit 300 is used for maintaining the respective output terminals (i.e., the detecting electrode columns) of the array electrode layer 12 at the same potential so as to eliminate the crosstalk current flowing between the rows and columns (i.e., the exciting electrode row and the detecting electrode column) of the array electrode layer 12. The amplifying circuit 300 can adjust the signal voltage range of the output end of the amplifying circuit 300 to the maximum and the optimum according to the variation range of the compression resistance of the load sensor element 101 by adjusting the amplitude of the input excitation signal and the size of the operational amplifier feedback resistance, so as to realize the optimal sampling precision. Meanwhile, according to the virtual short characteristic of the operational amplifier, the excitation electrode row end of the array electrode layer 12 is connected with an excitation signal, and the detection electrode column end is connected with a virtual short ground (0V), so that crosstalk elimination of the sensing array 10 is realized.
Referring to fig. 10, in one embodiment, the amplifying circuit 300 includes an operational amplifier 310 and a feedback resistor 320. The inverting input terminal of the operational amplifier 310 is connected to the detection electrode array, the non-inverting input terminal is grounded, and the output terminal is electrically connected to the control module 200; a feedback resistor 320 is connected between the inverting input and the output.
Referring to fig. 11, in the scheme of the operational amplifier of the amplifying circuit 30 for amplifying and sampling, all the detecting electrode rows shown in fig. 11 are at 0 potential (i.e. V) due to the virtual short characteristic of the operational amplifierREF0), this directly avoids mutual cross-talk between the individual load cell elements 101. As shown in fig. 11, the load cell elements 101(R1, R2, R4) at three adjacent positions are pressed, and since the operational amplifier inverting input terminals of the amplifier circuit 30 are all at 0 potential, the load cell elements 101 are independent from each other. The excitation signal can be finally introduced into the R3 through the R1, the R2 and the R4, so that the crosstalk misjudgment is caused.
Referring to fig. 12, in one embodiment, the pressure distribution detecting system further includes a first signal switching module 400 and a second signal switching module 500.
The input of the first signal switching module 400 is electrically connected to the output of the excitation module 100, the outputs of the first signal switching module 400 are electrically connected to the excitation electrode rows, respectively, and the first signal switching module 400 connects the excitation module 100 to one excitation electrode row at one time.
For example, the sensing array 10 is a 64 x 64 array, and only one excitation electrode row of 64 rows can be excited at a time, and sampling is performed at the column end of the detection electrode. And the analog switch is selected to realize the array multi-channel signal switching of the excitation signal. In the scheme, 1X16 analog switches are selected to realize the switching of 64 rows of excitation signals of the array.
The inputs of the second signal switching module 500 are electrically connected to the sensing electrodes 14, the output of the second signal switching module 500 is electrically connected to the control module 200, and the second signal switching module 500 is used to connect one sensing electrode 14 with the control module 200 at one time.
If the load change of the load sensor element is significant, each detection electrode row needs to be configured with one amplifier circuit 300 to achieve crosstalk cancellation for the sensing array 10. Since the hardware system Analog-to-Digital Converter (ADC) has limited resources, a data selection (MUX) switch needs to be added to the output end of the amplifying circuit 300 of all channels for switching, so as to implement ADC sampling switching of all channel signals.
In one embodiment, the excitation signal is a dc signal or an ac signal, the dc signal (typically a negative voltage) being suitable for when the load sensor element has a resistive or significant impedance change in load and the ac signal being suitable for when the charge or capacitance change is significant.
In one example, a Digital-to-analog Converter (DAC) in the control module 200 generates an adjustable voltage as an original excitation signal according to the configuration of the upper computer, performs conditioning and amplification processing through the excitation module 100, and then transmits the adjusted voltage to the row first signal switching module 400, and the control module 200 controls the row first signal switching module 400 to perform switching between different channels through I/O, so as to implement line-by-line scanning of the sensing array 10.
The signals output from the sensing array 10 row by row are amplified by the amplifying circuit 300 and then enter the second signal switching module 500, and the control module 200 controls the second signal switching module 500 through the I/O to complete the ADC sampling conversion of the sensor row by row. And carrying out corresponding processing and calculation on the converted data, packaging all the data, and transmitting the data to an upper computer through a digital interface.
A fourth aspect of the embodiments of the present application provides an operating method based on the above pressure distribution detection system, including:
while applying pressure to the surface of the pressure sensing material layer 11 according to a preset rule, the excitation module 100 provides excitation signals to each excitation electrode row, and the control module 200 acquires detection signals output by each force sensing electrode 14 row;
the control module 200 records the corresponding relationship between the magnitude of the pressure applied at each position of the pressure sensing material layer 11 and the magnitude of the detection signal at the position, and stores and/or outputs the corresponding relationship. The pressure calibration of the system is realized, and the output can be displayed and also can be uploaded to a control host.
The original pressure data signal uploaded from the pressure acquisition is itself the original value without pressure units. The calibration equipment is balanced through an upper computer system, the surface of the sensing array 10 is uniformly pressurized, the pressure is sequentially pressurized from small to large (or vice versa) according to the pressure measuring range of the sensor, and for example 4096(64 × 64 arrays) pressure grid points on the sensing array 10 are respectively recorded with original pressure values corresponding to different pressure values. Finally, a 4096 linear curve of raw pressure values versus standard pressure values is formed as calibration data for the sensing array 10. After the calibrated sensor loads the corresponding calibration file on the upper computer system, system software can convert the original pressure signal into a signal of a standard pressure value in a table look-up calculation mode and the like, so that accurate standard pressure distribution detection is realized.
A fifth aspect of the embodiments of the present application provides a weighing apparatus, including the above-mentioned pressure sensing apparatus, or the above-mentioned pressure sensing circuit, or the above-mentioned pressure distribution detection system.
The calibrated pressure sensing device can realize accurate standard pressure distribution detection, software carries out intelligent analysis and judgment through a pressure profile output by the pressure sensing device, and the actual pressure born by each grid point can be calculated by combining the area information of each pressure grid point. And counting and calculating the total pressure of partial stress points or all stress points on the pressure sensing device, namely realizing accurate weighing statistics.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present application and are intended to be included within the scope of the present application.
Claims (28)
1. A pressure sensing device comprising a sensing array comprising a layer of pressure sensing material and an array electrode layer arranged in a stack, the layer of pressure sensing material and the array electrode layer forming at least one load sensor element configured to change at least one electrical parameter based on the magnitude of an applied pressure.
2. The pressure sensing device according to claim 1, wherein the array electrode layer comprises a plurality of rows of first electrodes and a plurality of columns of second electrodes arranged in rows and columns and respectively in contact with the pressure sensing material layer, each of the first electrode rows comprises a plurality of first electrodes connected in series and arranged at intervals, and each of the second electrode columns comprises a plurality of second electrodes connected in series and arranged at intervals; wherein the adjacent first and second electrodes are arranged at intervals and form at least one load cell element by the layer of pressure sensing material.
3. The pressure sensing device according to claim 2, wherein the array electrode layer comprises a substrate, the first electrodes and the second electrodes are disposed on a top surface of the substrate, the first electrodes in the same row are connected in series on the top surface, a plurality of first connecting electrodes are disposed at intervals on a bottom surface of the substrate, and the second electrodes in the same column are connected in series to the same first connecting electrode through a via penetrating through the substrate.
4. The pressure sensing device according to claim 3, wherein the bottom surface of the substrate is further provided with a plurality of second connection electrodes arranged at intervals, one second connection electrode is arranged between any two adjacent first connection electrodes, and one second connection electrode is electrically connected to one first electrode row through one via hole.
5. The pressure sensing device of claim 4, wherein the first connecting electrode and the second connecting electrode are substantially the same shape and size.
6. The pressure sensing device of claim 2, wherein the array electrode layer comprises a substrate, the first electrodes and the second electrodes are disposed on a top surface of the substrate, the first electrodes of a same row form a series connection on the top surface, and the second electrodes of a same column form a series connection on the top surface through a bridge.
7. The pressure sensing device according to any one of claims 2 to 6, wherein a row of the second electrodes located in different second electrode columns is arranged between two adjacent rows of the first electrodes, and each of the second electrodes is located between two adjacent first electrodes in the same row.
8. The pressure sensing device of any of claims 2 to 6, wherein the first electrode and the second electrode are square, rectangular, diamond shaped, oval shaped, circular, or a polygon having more than five sides.
9. A pressure sensing device according to claim 3 or 6, wherein the substrate is a flexible membrane or a rigid substrate.
10. The pressure sensing device according to claim 4, further comprising a plurality of driving electrodes, a plurality of sensing electrodes, and at least one interface member, one end of one of the driving electrodes being connected to one end of at least one of the first electrode rows at the first side of the sensing array, one end of one of the sensing electrodes being connected to one end of at least one of the second connecting electrodes at the first side, and the other ends of the plurality of driving electrodes and the other ends of the plurality of sensing electrodes being connected to the at least one interface member, respectively.
11. The pressure sensing device of claim 10, wherein one end of one of the drive electrodes is connected to 1, 2, 3, or 4 adjacent rows of the first electrodes, and one end of one of the sense electrodes is connected to 1, 2, 3, or 4 adjacent rows of the second electrodes.
12. The pressure sensing device of claim 10, further comprising an interface circuit board on which the plurality of drive electrodes and the plurality of sense electrodes are disposed, and a surface of the interface circuit board having a first electrical shield layer disposed over the drive electrodes and a second electrical shield layer disposed over the sense electrodes.
13. The pressure sensing device of claim 1, wherein the layer of pressure sensing material comprises a layer of conductive material; or
The pressure sensing material layer comprises a conductive material layer and an insulating base material which is arranged in a stacking mode with the conductive material layer, and the conductive material layer is adjacent to the array electrode layer.
14. The pressure sensing device of claim 13, wherein the layer of conductive material is a layer of electronically conductive material or a layer of ionically conductive material.
15. The pressure sensing device of claim 14, wherein the layer of electronically conductive material is at least one of a layer of conductive ink, a film of conductive polymer, and a coating of conductive polymer.
16. The pressure sensing device of claim 15, wherein the conductive ink layer comprises a polymeric matrix and a conductive filler prepared on the polymeric matrix;
the conductive polymer film comprises a conductive filler and a polymer matrix which are mixed, and the conductive filler and the polymer matrix are directly prepared into a film by using a calendaring and casting method after being mixed; wherein the conductive filler comprises at least one of a carbon-based conductive filler, a metal-based conductive filler, and a ceramic-based conductive filler;
the conductive polymer coating is a film formed by conductive polymer water or organic solution.
17. The pressure sensing device of claim 14, wherein the layer of ionically conductive material comprises at least one of a polymer electrolyte, an ionic gel, and an ionic composite.
18. The pressure sensing device of claim 13, wherein the insulating substrate comprises at least one of polyethylene terephthalate, polybutylene terephthalate, polyimide, polycarbonate, polysulfone, polyetherimide, polyphenylene sulfide, polyether ketone, and polyether ether ketone.
19. A pressure sensing device according to any of claims 1 to 6, 10 to 18, wherein the electrical parameter is a resistance value, a capacitance value, an impedance value or an amount of charge.
20. A pressure sensing circuit comprising the pressure sensing device of any one of claims 1 to 19 and a plurality of amplification circuits;
the input of one amplifying circuit is connected with the output of one array electrode layer, and each amplifying circuit is used for maintaining the equal potential of each output end of the array electrode layer so as to eliminate the crosstalk flow of current between the rows and the columns of the array electrode layer.
21. The pressure sensing circuit of claim 20, wherein the amplification circuit comprises:
the inverting input end of the operational amplifier is connected with the output end of the array electrode layer, the normal phase input end of the operational amplifier is connected with the reference voltage, and the output end of the operational amplifier outputs a detection signal;
and the feedback resistor is connected between the inverting input end of the operational amplifier and the output end of the operational amplifier.
22. A pressure distribution detection system, comprising:
the excitation module is used for providing an excitation signal;
the pressure sensing device of any one of claims 1 to 21, wherein each input of the array electrode layer receives the excitation signal and each output outputs a detection signal;
and the control module is electrically connected with the output end of the array electrode layer, determines the position and the size of the pressure applied to the pressure sensing device according to the detection signal and outputs the position and the size.
23. The pressure distribution sensing system of claim 22, further comprising a plurality of amplifying circuits, one of said amplifying circuits being connected to an output of one of said array electrode layers, each of said amplifying circuits being configured to maintain each output of said array electrode layers at an equal potential to eliminate cross-talk current flow between rows and columns of said array electrode layers.
24. The pressure distribution sensing system of claim 23, wherein the amplification circuit comprises:
the inverting input end of the operational amplifier is connected with the output end of the array electrode layer, the normal phase input end of the operational amplifier is connected with the reference voltage, and the output end of the operational amplifier outputs a detection signal;
and the feedback resistor is connected between the inverting input end of the operational amplifier and the output end of the operational amplifier.
25. The pressure distribution detecting system according to any one of claims 22 to 24, further comprising:
the input of the first signal switching module is electrically connected with the output of the excitation module, a plurality of outputs of the first signal switching module are respectively electrically connected with the input ends of the array electrode layers, and the first signal switching module connects the excitation module with the input end of one array electrode layer at one moment;
and the plurality of inputs of the second signal switching module are electrically connected with the output ends of the array electrode layers, the output of the second signal switching module is electrically connected with the control module, and the second signal switching module is used for connecting the output end of one array electrode layer with the control module at one moment.
26. The pressure distribution sensing system of any of claims 22 to 24, wherein the excitation signal is a direct current signal or an alternating current signal.
27. A control method of the pressure distribution detecting system according to any one of claims 22 to 26, comprising:
while applying pressure to the surface of the pressure sensing material layer according to a preset rule, the excitation module provides the excitation signal to each input end of the array electrode layer, and the control module acquires detection signals output by each output end of the array electrode layer;
the control module records the one-to-one correspondence relationship between the pressure applied by each position of the pressure sensing material layer and the detection signal of the position, and stores and/or outputs the pressure.
28. A weighing apparatus comprising a pressure sensing device according to any one of claims 1 to 19, or a pressure profile sensing system according to any one of claims 20 to 21, or a pressure profile sensing system according to any one of claims 22 to 26.
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