CN113967874A - Silicon crystal bar grinding processing equipment for semiconductor wafer preparation - Google Patents
Silicon crystal bar grinding processing equipment for semiconductor wafer preparation Download PDFInfo
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- CN113967874A CN113967874A CN202111359361.1A CN202111359361A CN113967874A CN 113967874 A CN113967874 A CN 113967874A CN 202111359361 A CN202111359361 A CN 202111359361A CN 113967874 A CN113967874 A CN 113967874A
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- silicon crystal
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/02—Lapping machines or devices; Accessories designed for working surfaces of revolution
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
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- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses silicon crystal bar grinding processing equipment for semiconductor wafer preparation, which comprises a shell and a door plate, wherein the left side wall and the right side wall of the shell are not closed, and the front side wall of the shell is movably connected with the door plate. According to the silicon crystal grinding device, the three inner shells and the adjusting mechanism are arranged, and the adjusting mechanism can adjust the silicon crystal rods according to different silicon crystal rods, so that the universality of the device is improved, and the grinding sheets in the three inner shells are sequentially arranged in a coarse grinding mode, a fine grinding mode and a fine grinding mode, so that the silicon crystal rods can finish grinding through the inner shells at one time, and the grinding efficiency is greatly improved; through being provided with clamping mechanism and second motor, can make things convenient for and firm realization through clamping mechanism to the tight fixed operation of clamp of silicon crystal stick for convenient operation, and can realize the convenient material loading grinding operation to the silicon crystal stick, the simple operation through the use of both sides second motor. The invention has the advantages of high grinding efficiency and convenient operation.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to silicon crystal bar grinding processing equipment for semiconductor wafer preparation.
Background
With the development of technology, semiconductor technology has been greatly improved, and the prior art needs to use silicon ingot raw material in the process of preparing semiconductor wafers. Silicon crystal bars are subjected to a number of processing operations, one of which is a grinding operation, before being formed into wafers. Among the prior art need pass through many times grinding process to the grinding operation of silicon crystal stick, just so can process the silicon crystal stick to the degree that meets the requirements, but the inconvenience of operation ten minutes like this, it is inefficient, be unfavorable for production to among the prior art to the inconvenience of material loading operation ten minutes when silicon crystal stick grinds, very easily lead to the damage of silicon crystal stick in the material loading process, make processing inconvenient, this is another not enough of prior art. Based on the above reasons, the present invention provides a silicon ingot grinding processing equipment for semiconductor wafer preparation to solve the deficiencies of the prior art.
Disclosure of Invention
The invention aims to overcome the defects of low grinding efficiency and inconvenient operation in the prior art and provides silicon crystal bar grinding and processing equipment for semiconductor wafer preparation. The silicon crystal bar grinding processing equipment for semiconductor wafer preparation has the characteristics of high grinding efficiency, convenience in operation and the like.
In order to achieve the purpose, the invention provides the following technical scheme: a silicon crystal bar grinding processing device for semiconductor wafer preparation comprises an outer shell, wherein the left side wall and the right side wall of the outer shell are all arranged in an unsealed manner, a door plate is movably connected onto the front side wall of the outer shell, a handle is fixedly connected onto the door plate, a plurality of fixing tubes are fixedly connected onto the top surface of the outer shell, three inner shells are uniformly and fixedly distributed in the inner cavity of the outer shell, the left side wall of each inner shell is not sealed, the inner shells are arranged in an outer square and an inner circle, an annular shell is movably connected into the inner shells, an adjusting mechanism is arranged in the annular shell, an annular gear is fixedly connected onto the outer side wall of the annular shell, two mounting plates are fixedly connected onto the top surface of the inner cavity of the outer shell in a bilateral symmetry manner, a first motor is fixedly connected onto the side wall of each mounting plate, a rotating shaft is fixedly connected onto a rotor of the first motor, penetrates through the three inner shells and is movably connected with the mounting plate on the other side, the rotary shaft is movably connected with the inner shell, the rotary shaft is positioned on the side wall of the inner cavity of the inner shell and is fixedly connected with a first gear, the first gear is meshed with a ring gear, the two sides of the outer shell are respectively provided with a movable plate which is arranged in an L shape, the bottom edge of one movable plate is fixedly connected with a control mechanism at one side close to the center of the outer shell, the top surfaces of the bottom edges of the two movable plates are respectively and fixedly connected with a fixed block, the bottom surface of the outer shell is provided with two movable grooves, the fixed block is movably connected with the movable grooves, the fixed block is in threaded connection with a threaded rod, the two ends of the threaded rod are respectively and movably connected with the side walls at the left side and the right side of the movable grooves, one ends of the two threaded rods, which are far away from the center of the bottom surface of the outer shell, penetrate through the side wall of the outer shell and are fixedly connected with a second motor, and the outer shell are fixedly connected, the threaded rod is movably connected with the shell, and a clamping mechanism is arranged on one side, close to the shell, of the vertical edge of the movable plate.
Preferably, adjustment mechanism includes the connecting plate, the connecting plate is L shape setting, a plurality of connecting plate of annular shell inner chamber evenly distributed swing joint, the long limit of connecting plate runs through annular shell inside wall and fixedly connected with abrasive sheet, evenly distributed has seted up a plurality of on the left side wall of annular shell and has erect the groove, erect the groove and run through lateral wall before the annular shell, swing joint has the annular plate on the left side wall of annular shell, evenly distributed has seted up a plurality of chute on the annular plate, the minor face of connecting plate run through erect the groove and with swing joint between the chute, threaded connection has positioning bolt on the lateral wall of annular plate, evenly distributed has seted up a plurality of jack on the left side wall of annular shell, positioning bolt inserts one of them jack.
Preferably, the clamping mechanism comprises a square rod, a groove is formed in the side wall of the movable plate close to one side of the shell, the square rod penetrates through the groove and is movably connected with the groove, a round table plate is fixedly connected to one end of the square rod close to the shell, the diameter of the round table plate close to one side of the shell is smaller than that of the other side of the shell, a plurality of movable rods are uniformly and movably connected to the side wall of the round table plate, the movable rods are arranged in a T shape, a plurality of side grooves are uniformly formed in the side wall of the groove, one ends of the movable rods are movably connected with the side grooves, a clamping plate is fixedly connected to one end of the long side of each movable rod, a side plate is fixedly connected to one end of the square rod far from the round table plate, a first spring is sleeved on the square rod, one end of the first spring is fixedly connected with the inner wall of the groove, the other end of the square rod is fixedly connected with the round table plate, and a plurality of clamping grooves are symmetrically formed in the front and back of the side wall of the square rod, two flat boards of shell one side front and back symmetry fixedly connected with are kept away from to the fly leaf, swing joint has the round bar on the flat board, the round bar is close to square pole one end fixedly connected with latch, one of them draw-in groove is inserted to the latch, round bar other end fixedly connected with limiting plate, the cover is equipped with the second spring on the round bar, second spring one end and dull and stereotyped fixed connection, the second spring other end and limiting plate fixed connection.
Preferably, a circular groove is formed in the right side wall of the inner cavity of the inner shell, a plurality of movable blocks are uniformly distributed and fixedly connected to the outer wall of the right side of the annular shell, and the movable blocks are movably connected with the circular groove.
Preferably, a rectangular groove is formed in a corner of the movable plate, which is close to one side of the shell, and the length and the width of the rectangular groove are both larger than those of the second motor.
Preferably, the limiting plates are two on the left side and are respectively fixedly connected with a fixing plate on the side wall, away from one side of the round rod, of the limiting plate, the fixing plates are arranged in an L shape, the fixing plates are arranged on the side wall, away from one side of the limiting plate, of the fixing plates, and the inclined plates are symmetrically arranged in the front and back direction.
Preferably, a plurality of sliding grooves are uniformly distributed on the side wall of the circular table plate, a sliding block is fixedly connected to one end, close to the circular table plate, of the movable rod, and the sliding block is movably connected with the sliding grooves.
Preferably, the clamping plates are arranged in an arc shape, and the side walls of the opposite sides of the plurality of clamping plates are fixedly connected with anti-slip pads.
A use method of silicon crystal bar grinding processing equipment for semiconductor wafer preparation comprises the following steps:
s1: when the device is used, firstly, a produced silicon crystal bar is inserted into the clamping mechanism on the movable plate on the left side, the silicon crystal bar pushes the wafer plate to move towards one side of the inner cavity of the groove, the wafer plate drives the square rod to move towards the side far away from the shell, and at the moment, the sliding block on the movable rod moves in the sliding groove on the wafer plate, so that the movable rod drives the clamping plate to clamp one end of the silicon crystal bar, and the locking of the positions of the square rod and the clamping plate is realized through the clamping of the clamping teeth in the clamping groove on the side wall of the square rod, thereby firmly and stably clamping the silicon crystal bar;
s2: then the door plate on the front side wall of the shell is opened through the handle, then the positioning bolt is rotated, so that the positioning bolt is drawn out from the insertion hole, the annular plate is driven to rotate through the positioning bolt, the connecting plate can move in the chute through the movement of the annular plate, so that the connecting plate drives the grinding sheets to change in position, when the distance between the grinding sheets and the diameter of the silicon crystal rod are proper, the rotation of the positioning bolt is stopped, and the positioning bolt is inserted into the insertion hole in the proper position through rotating the positioning bolt again, so that the annular plate is positioned;
s3: repeating the operation of the previous step, completing the adjustment operation of the other two adjusting mechanisms, and closing the door plate, so that the device can be suitable for grinding silicon crystal rods with different diameters;
s4: then the fixed tube is connected with an external air exhaust device through a pipeline, the first motor and the left side are started through an external power supply to obtain a second motor, the threaded rod is driven to rotate through the left side second motor, the threaded rod can be meshed with the fixed block to move in the movable groove, and the fixed block drives the left movable plate to move towards one side of the shell, so that the fixed silicon crystal bar moves towards the inner cavity of the shell;
s5: the silicon crystal rod is conveyed to the inner cavity of the shell through the movable plate and penetrates through the annular shell layer by layer, the first gear on the rotating shaft is driven to rotate through the first motor, the first gear is meshed with the annular gear on the annular shell to rotate, the annular shell drives the grinding sheet to grind the silicon crystal rod, and the grinding sheet sequentially realizes coarse grinding, fine grinding and fine grinding of the silicon crystal rod from left to right, so that efficient and effective grinding operation of the silicon crystal rod is realized;
s6: dust generated in the grinding process is discharged through the fixed pipe on the top surface of the shell by using an external air exhaust device, so that pollution is effectively avoided, and the using effect is good;
s7: when the fixed block on the movable plate on the left side moves to the rightmost side of the movable groove, the right end of the silicon crystal bar is inserted into the groove on the movable plate on the right side, the clamping mechanism realizes the fixed clamping operation on the right end of the silicon crystal bar, and the inclined plate drives the fixed plate to move away from one side of the movable plate through the contact between the inclined plate and the left side wall of the shell, so that the latch is separated from the clamping groove, and the left clamping mechanism unlocks the silicon crystal bar under the condition that the first spring and the right movable plate move;
s8: the bottom edges of the two movable plates are contacted, so that the control mechanism is opened, the control mechanism closes the second motor on the left side and opens the second motor on the right side, the second motor on the right side drives the threaded rod to rotate, the movable plate on the right side drives the silicon crystal bar to move towards the right side, the whole surface grinding operation of the silicon crystal bar can be realized, and the grinding operation is convenient and has good effect;
s9: after the silicon crystal stick moves out of the shell through the motion whole body of the right side movable plate, the power supply of the device is closed, the ground silicon crystal stick is hoisted through an external device, and the clamping teeth are separated from the clamping grooves in the square rods through pulling the two limiting plates on the right side clamping mechanism, so that the clamping locking of the silicon crystal stick is removed, the silicon crystal stick can be conveniently taken down, and the operation is convenient and efficient.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the silicon crystal grinding device, the three inner shells and the adjusting mechanism are arranged, and the adjusting mechanism can adjust the silicon crystal rods according to different silicon crystal rods, so that the universality of the device is improved, and the grinding sheets in the three inner shells are sequentially arranged in a coarse grinding mode, a fine grinding mode and a fine grinding mode, so that the silicon crystal rods can finish grinding through the inner shells at one time, and the grinding efficiency is greatly improved;
2. the clamping mechanism and the second motors are arranged, so that the clamping and fixing operation on the silicon crystal bar can be conveniently and firmly realized through the clamping mechanism, the operation is convenient, and the convenient feeding and grinding operation on the silicon crystal bar can be realized through the use of the second motors on two sides, so that the operation is convenient;
3. through being provided with fixed pipe, the realization that can be convenient through fixed pipe absorbs the powder of shell inner chamber, and effectual pollution reduction and to operating personnel's injury, the protectiveness is good.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic view of the structure of the plane A-A of FIG. 2 according to the present invention;
FIG. 4 is a schematic view of the structure of the plane B-B of FIG. 2 according to the present invention;
FIG. 5 is an enlarged view of FIG. 2 at C of the present invention;
fig. 6 is a schematic perspective view of the square bar of the present invention.
Reference numbers in the figures: 1. a housing; 2. a door panel; 3. a handle; 4. a fixed tube; 5. an inner shell; 6. an annular shell; 7. an adjustment mechanism; 8. a ring gear; 9. mounting a plate; 10. a first motor; 11. a rotating shaft; 12. a first gear; 13. a movable plate; 14. a control mechanism; 15. a fixed block; 16. a movable groove; 17. a threaded rod; 18. a second motor; 19. a clamping mechanism; 20. a connecting plate; 21. a polishing sheet; 22. a vertical slot; 23. an annular plate; 24. a chute; 25. positioning the bolt; 26. a jack; 27. a square bar; 28. a groove; 29. a round table plate; 30. a movable rod; 31. a side groove; 32. a splint; 33. a side plate; 34. a first spring; 35. a card slot; 36. a flat plate; 37. a round bar; 38. clamping teeth; 39. a limiting plate; 40. a second spring; 41. a circular groove; 42. a movable block; 43. a rectangular groove; 44. a fixing plate; 45. a sloping plate; 46. a chute; 47. a slider; 48. a non-slip mat.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: a silicon crystal bar grinding processing device for semiconductor wafer preparation comprises an outer shell 1, wherein the left side wall and the right side wall of the outer shell 1 are not hermetically arranged, a door plate 2 is movably connected to the front side wall of the outer shell 1, a handle 3 is fixedly connected to the door plate 2, a plurality of fixed tubes 4 are fixedly connected to the top surface of the outer shell 1, three inner shells 5 are uniformly and fixedly distributed in the inner cavity of the outer shell 1, the left side wall of each inner shell 5 is not hermetically arranged, the inner shells 5 are arranged in an outer square and an inner circle, an annular shell 6 is movably connected in the inner shell 5, a circular groove 41 is formed in the right side wall of the inner cavity of the inner shell 5, a plurality of movable blocks 42 are uniformly and fixedly distributed in the right side outer wall of the annular shell 6, the movable blocks 42 are movably connected with the circular grooves 41, the annular shell 6 can conveniently rotate to realize a grinding function, an adjusting mechanism 7 is arranged in the annular shell 6, the adjusting mechanism 7 comprises connecting plates 20, the connecting plates 20 are arranged in an L shape, and a plurality of connecting plates 20 are uniformly and movably connected in the inner cavity of the annular shell 6, the long edge of the connecting plate 20 penetrates through the inner side wall of the annular shell 6 and is fixedly connected with a grinding sheet 21, the grinding sheet 21 is sequentially arranged into coarse grinding, fine grinding and fine grinding from left to right, a plurality of vertical grooves 22 are uniformly distributed on the left side wall of the annular shell 6, the vertical grooves 22 penetrate through the front side wall of the annular shell 6, an annular plate 23 is movably connected on the left side wall of the annular shell 6, a plurality of inclined grooves 24 are uniformly distributed on the annular plate 23, the short edge of the connecting plate 20 penetrates through the vertical grooves 22 and is movably connected with the inclined grooves 24, a positioning bolt 25 is in threaded connection with the side wall of the annular plate 23, a plurality of jacks 26 are uniformly distributed on the left side wall of the annular shell 6, the positioning bolt 25 is inserted into one of the jacks 26, the device can be adjusted according to the actual diameter of the silicon crystal bar, so that the device can be suitable for the grinding operation of the silicon crystal bars with different diameters, and has good universality;
the outer side wall of the annular shell 6 is fixedly connected with a ring gear 8, the top surface of the inner cavity of the outer shell 1 is fixedly connected with two mounting plates 9 in bilateral symmetry, the side wall of one mounting plate 9 is fixedly connected with a first motor 10, a rotor of the first motor 10 is fixedly connected with a rotating shaft 11, the rotating shaft 11 penetrates through the three inner shells 5 and is movably connected with the mounting plate 9 at the other side, the rotating shaft 11 is movably connected with the inner shells 5, the rotating shaft 11 is positioned on the side wall of the inner cavity of the inner shell 5 and is fixedly connected with a first gear 12, the first gear 12 is meshed with the ring gear 8, two sides of the outer shell 1 are respectively provided with a movable plate 13, the movable plates 13 are arranged in an L shape, a rectangular groove 43 is formed in the corner of the movable plate 13 close to one side of the outer shell 1, the length and width of the rectangular groove 43 are both larger than those of the second motor 18, blocking of the second motor 18 is avoided, the use effect is good, the bottom edge of one movable plate 13 is fixedly connected with a control mechanism 14 close to one side of the center of the outer shell 1, the top surfaces of the bottom edges of the two movable plates 13 are fixedly connected with fixed blocks 15, the bottom surface of the shell 1 is provided with two movable grooves 16, the fixed blocks 15 are movably connected with the movable grooves 16, the fixed blocks 15 are in threaded connection with threaded rods 17, two ends of each threaded rod 17 are respectively movably connected with the side walls of the left side and the right side of each movable groove 16, one end of each threaded rod 17, far away from the center of the bottom surface of the shell 1, penetrates through the side wall of the shell 1 and is fixedly connected with a second motor 18, the second motor 18 is fixedly connected with the shell 1, and the threaded rods 17 are movably connected with the shell 1, so that the left-right movement operation of a silicon crystal bar can be realized, and the grinding efficiency is high;
a clamping mechanism 19 is arranged on one side, close to the shell 1, of the vertical edge of the movable plate 13, the clamping mechanism 19 comprises a square rod 27, a groove 28 is formed in the side wall, close to one side of the shell 1, of the movable plate 13, the square rod 27 penetrates through the groove 28 and is movably connected with the groove, a round table plate 29 is fixedly connected to one end, close to the shell 1, of the square rod 27, the diameter, close to one side of the shell 1, of the round table plate 29 is smaller than that of the other side of the shell, a plurality of movable rods 30 are uniformly distributed and movably connected to the side wall of the round table plate 29, a plurality of sliding grooves 46 are uniformly distributed and formed in the side wall of the round table plate 29, a sliding block 47 is fixedly connected to one end, close to the round table plate 29, of the sliding block 47 is movably connected with the sliding grooves 46, the movable rods 30 are in a T-shaped arrangement, a plurality of side grooves 31 are uniformly distributed and formed in the side wall of the groove 28, one end of each movable rod 30 is movably connected with the side groove 31, and a clamping plate 32 is fixedly connected to one end of the long side of each movable rod 30, the clamping plates 32 are arranged in an arc shape, anti-slip pads 48 are fixedly connected to the side walls of the plurality of clamping plates 32 facing each other, so that clamping is firm and stable, the side plate 33 is fixedly connected to one end, away from the circular table plate 29, of the square rod 27, the first spring 34 is sleeved on the square rod 27, one end of the first spring 34 is fixedly connected to the inner wall of the groove 28, the other end of the square rod 27 is fixedly connected to the circular table plate 29, a plurality of clamping grooves 35 are symmetrically formed in the front and back of the side wall of the square rod 27, the movable plate 13 is fixedly connected to the two flat plates 36 in a front and back symmetrical mode, one side, away from the shell 1, of the movable plate 36 is movably connected to the circular rod 37, a clamping tooth 38 is fixedly connected to one end of the circular rod 37, the clamping tooth 38 is inserted into one of the clamping grooves 35, a limiting plate 39 is fixedly connected to the other end of the circular rod 37, a second spring 40 is sleeved on the circular rod 37, one end of the flat plate 36 is fixedly connected to the other end of the second spring 40, and the limiting plate 39 is fixedly connected to the limiting plate, can realize the tight operation of clamp to the silicon crystal stick both ends, the grinding of being convenient for is used, and equal fixed connection fixed plate 44 on the lateral wall of two limiting plates 39 keep away from round bar 37 one side in the left side, and fixed plate 44 is the setting of L shape, and two fixed plates 44 keep away from equal fixedly connected with swash plate 45 in limiting plate 39 one side, and two swash plate 45 longitudinal symmetry set up, realization left side clamping mechanism 19's that can be convenient unblock operation, convenient to use.
A use method of silicon crystal bar grinding processing equipment for semiconductor wafer preparation comprises the following steps:
s1: when the device is used, firstly, a produced silicon crystal bar is inserted into the clamping mechanism 19 on the left movable plate 13, the silicon crystal bar pushes the wafer plate 29 to move towards one side of the inner cavity of the groove 28, the wafer plate 29 drives the square rod 27 to move towards the side far away from the shell 1, and at the moment, the sliding block 47 on the movable rod 30 moves in the sliding groove 46 on the wafer plate 29, so that the movable rod 30 drives the clamping plate 32 to clamp one end of the silicon crystal bar, and the clamping teeth 38 are clamped in the clamping grooves 35 on the side wall of the square rod 27 to lock the positions of the square rod 27 and the clamping plate 32, so that the silicon crystal bar is clamped firmly and stably;
s2: then the door plate 2 on the front side wall of the shell 1 is opened through the handle 3, then the positioning bolt 25 is rotated, so that the positioning bolt 25 is drawn out from the insertion hole 26, the positioning bolt 25 drives the annular plate 23 to rotate, the movement of the annular plate 23 can enable the connecting plate 20 to move in the chute 24, so that the position of the grinding sheet 21 driven by the connecting plate 20 is changed, when the distance between the grinding sheets 21 and the diameter of the silicon crystal rod are proper, the rotation of the positioning bolt 25 is stopped, and the positioning bolt 25 is rotated again, so that the positioning bolt 25 is inserted into the insertion hole 26 at the proper position, and the positioning of the annular plate 23 is realized;
s3: repeating the operation of the previous step, completing the adjustment operation of the other two adjusting mechanisms 7, and closing the door plate 2, so that the device can be suitable for grinding silicon crystal rods with different diameters;
s4: then, the fixed tube 4 is connected with an external air extractor through a pipeline, the first motor 10 and the left side are started through an external power supply to obtain a second motor 18, the threaded rod 17 is driven to rotate through the second motor 18 on the left side, so that the threaded rod 17 is meshed with the fixed block 15 to move in the movable groove 16, the fixed block 15 drives the movable plate 13 on the left side to move towards one side of the shell 1, and the fixed silicon crystal bar moves towards the inner cavity of the shell 1;
s5: silicon crystal rods are conveyed to an inner cavity of the shell 1 through the movable plate 13 and penetrate through the annular shell 6 layer by layer, the first gear 12 on the rotating shaft 11 is driven to rotate through the first motor 10, the first gear 12 is meshed with the annular gear 8 on the annular shell 6 to rotate, the annular shell 6 drives the grinding sheet 21 to grind the silicon crystal rods, and the grinding sheet 21 sequentially achieves coarse grinding, fine grinding and fine grinding of the silicon crystal rods from left to right, so that efficient and effective grinding operation of the silicon crystal rods is achieved;
s6: dust generated in the grinding process is discharged through the fixed pipe 4 on the top surface of the shell 1 by using an external air extractor, so that pollution is effectively avoided, and the using effect is good;
s7: when the fixed block 15 on the left movable plate 13 moves to the rightmost side of the movable groove 16, the right end of the silicon crystal bar is inserted into the groove 28 on the right movable plate 13, the clamping mechanism 19 realizes the right end fixing and clamping operation of the silicon crystal bar, and the inclined plate 45 is contacted with the left side wall of the shell 1, the inclined plate 45 drives the fixed plate 44 to move away from one side of the movable plate 13, so that the latch 38 is separated from the slot 35, and the left clamping mechanism 19 releases the locking of the silicon crystal bar under the condition that the first spring 34 and the right movable plate 13 move;
s8: through the contact of the bottom edges of the two movable plates 13, the control mechanism 14 is opened, the control mechanism 14 closes the second motor 18 on the left side and opens the second motor 18 on the right side, the second motor 18 on the right side drives the threaded rod 17 to rotate, so that the movable plate 13 on the right side drives the silicon crystal bar to move towards the right side, the whole surface grinding operation of the silicon crystal bar can be realized, the grinding operation is convenient, and the effect is good;
s9: after the silicon crystal bar integrally moves out of the shell 1 through the movement of the right movable plate 13, the power supply of the device is turned off, the ground silicon crystal bar is hoisted through an external device, and the clamping teeth 38 are separated from the clamping grooves 35 on the square rods 27 by pulling the two limiting plates 39 on the right clamping mechanism 19, so that the clamping and locking of the silicon crystal bar are released, the silicon crystal bar can be conveniently taken down, and the operation is convenient and efficient.
The working principle is as follows: when the device is used, firstly, a produced silicon crystal bar is inserted into the clamping mechanism 19 on the left movable plate 13, the silicon crystal bar pushes the wafer plate 29 to move towards one side of the inner cavity of the groove 28, the wafer plate 29 drives the square rod 27 to move towards the side far away from the shell 1, at the moment, the slide block 47 on the movable rod 30 moves in the slide groove 46 on the wafer plate 29, so that the movable rod 30 drives the clamping plate 32 to clamp one end of the silicon crystal bar, the clamping teeth 38 are clamped in the clamping grooves 35 on the side wall of the square rod 27 to lock the positions of the square rod 27 and the clamping plate 32, so that the silicon crystal bar is clamped firmly and stably, then the door plate 2 on the front side wall of the shell 1 is opened through the handle 3, then the positioning bolt 25 is rotated, so that the positioning bolt 25 is drawn out of the insertion hole 26, the positioning bolt 25 drives the annular plate 23 to rotate, and the movement of the annular plate 23 can enable the connecting plate 20 to move in the chute 24, thereby the position of the grinding sheets 21 is changed by the connecting plate 20, when the distance between the grinding sheets 21 and the diameter of the silicon crystal bar are suitable, the rotation of the positioning bolt 25 is stopped, the positioning bolt 25 is inserted into the jack 26 at the suitable position by rotating the positioning bolt 25 again, the positioning of the annular plate 23 is realized, the operation of the previous step is repeated, the adjusting operation of other two adjusting mechanisms 7 is completed, the door panel 2 is closed, the device can be suitable for grinding silicon crystal bars with different diameters, then the fixed tube 4 is connected with an external air extractor through a pipeline, the first motor 10 and the left side are started through an external power supply to obtain the second motor 18, the threaded rod 17 is driven to rotate by the left side second motor 18, the threaded rod 17 is meshed with the fixed block 15 to move in the movable groove 16, and the fixed block 15 drives the left side movable plate 13 to move to one side of the shell 1, thereby moving the fixed silicon crystal bar into the cavity of the shell 1, the silicon crystal bar is conveyed into the cavity of the shell 1 through the movable plate 13 and penetrates the annular shell 6 layer by layer, the first gear 12 on the rotating shaft 11 is driven to rotate through the first motor 10, the first gear 12 is meshed with the annular gear 8 on the annular shell 6 to rotate, the annular shell 6 drives the grinding sheet 21 to grind the silicon crystal bar, the grinding sheet 21 sequentially realizes coarse grinding, fine grinding and accurate grinding of the silicon crystal bar from left to right, the high-efficiency and good-effect grinding operation of the silicon crystal bar is realized, dust generated in the grinding process is discharged through the fixed pipe 4 on the top surface of the shell 1 by an external air extractor, pollution is effectively avoided, the use effect is good, when the fixed block 15 on the movable plate 13 on the left side moves to the rightmost right side of the movable groove 16, the right end of the silicon crystal bar is inserted into the groove 28 on the movable plate 13 on the right side at the moment, the clamping mechanism 19 realizes the fixed clamping operation on the right end of the silicon crystal bar, the inclined plate 45 drives the fixed plate 44 to move away from one side of the movable plate 13 through the contact between the inclined plate 45 and the left side wall of the shell 1, so that the latch 38 is separated from the clamping groove 35, the left clamping mechanism 19 unlocks the silicon crystal bar under the condition that the first spring 34 and the right side movable plate 13 move, the control mechanism 14 is opened through the contact of the bottom edges of the two movable plates 13, the control mechanism 14 closes the left second motor 18 and opens the right second motor 18, the right second motor 18 drives the threaded rod 17 to rotate, so that the right side movable plate 13 drives the silicon crystal bar to move towards the right side, the whole surface grinding operation on the silicon crystal bar can be realized, the grinding operation is convenient and good in effect, when the silicon crystal bar integrally moves out of the shell 1 through the movement of the right side movable plate 13, the power supply of the device is closed, the silicon crystal bar after grinding is hoisted through an external device, and the clamping teeth 38 are separated from the clamping grooves 35 on the square rods 27 through pulling the two limiting plates 39 on the right-side clamping mechanism 19, so that the silicon crystal bar is unlocked, the silicon crystal bar can be conveniently taken down, and the operation is convenient and the efficiency is high.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. A silicon crystal bar grinding processing equipment for semiconductor wafer preparation, includes shell (1), its characterized in that: the left side wall and the right side wall of the outer shell (1) are all arranged in an unsealed mode, the front side wall of the outer shell (1) is movably connected with a door plate (2), a handle (3) is fixedly connected with the door plate (2), a plurality of fixing pipes (4) are fixedly connected with the top surface of the outer shell (1), three inner shells (5) are fixedly connected with the inner cavity of the outer shell (1) in an evenly distributed mode, the left side wall of each inner shell (5) is not sealed, each inner shell (5) is arranged in an outer square in an inner circle mode, a ring-shaped shell (6) is movably connected with the inner shell (5), an adjusting mechanism (7) is arranged in the ring-shaped shell (6), a ring-shaped gear (8) is fixedly connected onto the outer side wall of the ring-shaped shell (6), two mounting plates (9) are fixedly connected with the inner cavity top surface of the outer shell (1) in a bilaterally symmetrical mode, one side of the side wall of each mounting plate (9) is fixedly connected with a first motor (10), fixedly connected with pivot (11) on the rotor of first motor (10), pivot (11) run through three inner shell (5) and with opposite side mounting panel (9) swing joint, swing joint between pivot (11) and inner shell (5), pivot (11) are located equal fixedly connected with first gear (12) on the lateral wall of inner shell (5) inner chamber, mesh between first gear (12) and ring gear (8), the both sides of shell (1) all are provided with fly leaf (13), fly leaf (13) are the L shape setting, one of them the base of fly leaf (13) is close to shell (1) center one side fixedly connected with control mechanism (14), two all fixedly connected with fixed block (15) on the base top surface of fly leaf (13), two activity grooves (16) have been seted up on the bottom surface of shell (1), swing joint between fixed block (15) and activity groove (16), threaded connection has threaded rod (17) on fixed block (15), the both ends of threaded rod (17) respectively with the left and right sides lateral wall swing joint of activity groove (16), two shell (1) bottom surface center one end is kept away from in threaded rod (17) all runs through shell (1) lateral wall and fixedly connected with second motor (18), fixed connection between second motor (18) and shell (1), swing joint between threaded rod (17) and shell (1), the perpendicular limit of fly leaf (13) is close to shell (1) one side and is provided with clamping mechanism (19).
2. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 1, wherein: the adjusting mechanism (7) comprises a connecting plate (20), the connecting plate (20) is arranged in an L shape, a plurality of connecting plates (20) are movably and uniformly distributed in the inner cavity of the annular shell (6), the long edge of each connecting plate (20) penetrates through the inner side wall of the annular shell (6) and is fixedly connected with a grinding sheet (21), a plurality of vertical grooves (22) are uniformly and uniformly distributed on the left side wall of the annular shell (6), the vertical grooves (22) penetrate through the front side wall of the annular shell (6), an annular plate (23) is movably and fixedly connected on the left side wall of the annular shell (6), a plurality of inclined grooves (24) are uniformly and uniformly distributed on the annular plate (23), the short edge of each connecting plate (20) penetrates through the vertical grooves (22) and is movably connected with the inclined grooves (24), a positioning bolt (25) is in threaded connection on the side wall of the annular plate (23), a plurality of jacks (26) are uniformly and uniformly distributed on the left side wall of the annular shell (6), the positioning bolt (25) is inserted into one of the insertion holes (26).
3. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 1, wherein: the clamping mechanism (19) comprises a square rod (27), a groove (28) is formed in the side wall of one side, close to the shell (1), of the movable plate (13), the square rod (27) penetrates through the groove (28) and is movably connected with the groove, a round table plate (29) is fixedly connected to one end, close to the shell (1), of the square rod (27), the diameter of one side, close to the shell (1), of the round table plate (29) is smaller than that of the other side of the round table plate, a plurality of movable rods (30) are uniformly distributed and movably connected to the side wall of the round table plate (29), the movable rods (30) are arranged in a T shape, a plurality of side grooves (31) are uniformly distributed and formed in the side wall of the groove (28), one end of each movable rod (30) is movably connected with the side groove (31), a clamping plate (32) is fixedly connected to one end of the long side of each movable rod (30), and a side plate (33) is fixedly connected to one end, far away from the round table plate (29), of the square rod (27), a first spring (34) is sleeved on the square rod (27), one end of the first spring (34) is fixedly connected with the inner wall of the groove (28), the other end of the square rod (27) is fixedly connected with the round table plate (29), a plurality of clamping grooves (35) are symmetrically arranged on the front and the back of the side wall of the square rod (27), two flat plates (36) are symmetrically and fixedly connected with one side of the movable plate (13) far away from the shell (1) in a front-back manner, a round rod (37) is movably connected on the flat plate (36), one end of the round rod (37) close to the square rod (27) is fixedly connected with a latch (38), the latch (38) is inserted into one of the slots (35), the other end of the round rod (37) is fixedly connected with a limit plate (39), a second spring (40) is sleeved on the round rod (37), one end of the second spring (40) is fixedly connected with the flat plate (36), the other end of the second spring (40) is fixedly connected with the limiting plate (39).
4. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 1, wherein: circular slot (41) have been seted up on inner shell (5) inner chamber right side wall, evenly distributed fixedly connected with a plurality of movable block (42) on the right side outer wall of annular shell (6), swing joint between movable block (42) and circular slot (41).
5. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 1, wherein: the corner that fly leaf (13) are close to shell (1) one side has seted up rectangular channel (43), the length and width of rectangular channel (43) all is greater than the length and width setting of second motor (18).
6. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 3, wherein: two on the left side equal fixed connection fixed plate (44) on the lateral wall of round bar (37) one side is kept away from to limiting plate (39), fixed plate (44) are L shape setting, two equal fixedly connected with swash plate (45), two in limiting plate (39) one side are kept away from to fixed plate (44) swash plate (45) front and back symmetry sets up.
7. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 3, wherein: a plurality of sliding grooves (46) are uniformly distributed on the side wall of the round table plate (29), a sliding block (47) is fixedly connected to one end, close to the round table plate (29), of the movable rod (30), and the sliding block (47) is movably connected with the sliding grooves (46).
8. The silicon ingot grinding processing equipment for semiconductor wafer preparation as set forth in claim 3, wherein: splint (32) are the arc setting, a plurality of splint (32) equal fixedly connected with slipmat (48) on the lateral wall of one side that faces mutually.
9. Use of the silicon ingot grinding processing equipment for semiconductor wafer preparation according to any one of claims 1 to 8, characterized by comprising the following steps:
s1: when the device is used, firstly, a produced silicon crystal rod is inserted into a clamping mechanism (19) on a left movable plate (13), a wafer plate (29) is pushed by the silicon crystal rod to move towards one side of an inner cavity of a groove (28), the wafer plate (29) drives a square rod (27) to move towards one side far away from a shell (1), and at the moment, a sliding block (47) on a movable rod (30) moves in a sliding groove (46) on the wafer plate (29), so that the movable rod (30) drives a clamping plate (32) to clamp one end of the silicon crystal rod, and the clamping teeth (38) are clamped in clamping grooves (35) in the side wall of the square rod (27), so that the positions of the square rod (27) and the clamping plate (32) are locked, and the silicon crystal rod is clamped firmly and stably;
s2: then, a door plate (2) on the front side wall of the shell (1) is opened through a handle (3), then a positioning bolt (25) is rotated, so that the positioning bolt (25) is pulled out from an insertion hole (26), the positioning bolt (25) drives the annular plate (23) to rotate, the movement of the annular plate (23) can enable the connecting plate (20) to move in the inclined groove (24), so that the connecting plate (20) drives the grinding sheets (21) to change in position, when the distance between the grinding sheets (21) and the diameter of a silicon crystal rod are proper, the rotation of the positioning bolt (25) is stopped, and the positioning bolt (25) is rotated again, so that the positioning bolt (25) is inserted into the insertion hole (26) in the proper position, and the annular plate (23) is positioned;
s3: repeating the previous step, completing the adjustment operation of the other two adjusting mechanisms (7), and closing the door plate (2), so that the device can be suitable for grinding silicon crystal rods with different diameters;
s4: then the fixed tube (4) is connected with an external air extractor through a pipeline, the first motor (10) and the left side are started through an external power supply to obtain a second motor (18), the threaded rod (17) is driven to rotate through the second motor (18) on the left side, the threaded rod (17) is meshed with the fixed block (15) to move in the movable groove (16), the fixed block (15) drives the movable plate (13) on the left side to move towards one side of the shell (1), and therefore the fixed silicon crystal rod moves towards the inner cavity of the shell (1);
s5: silicon crystal bars are conveyed to an inner cavity of the shell (1) through the movable plate (13) and penetrate through the annular shell (6) layer by layer, the first gear (12) on the rotating shaft (11) is driven to rotate through the first motor (10), the first gear (12) is meshed with the annular gear (8) on the annular shell (6) to rotate, the annular shell (6) drives the grinding sheet (21) to grind the silicon crystal bars, and the grinding sheet (21) sequentially achieves coarse grinding, fine grinding and fine grinding of the silicon crystal bars from left to right, so that efficient and effective grinding operation of the silicon crystal bars is achieved;
s6: dust generated in the grinding process is discharged through the fixed pipe (4) on the top surface of the shell (1) by using an external air extractor, so that pollution is effectively avoided, and the using effect is good;
s7: when the fixed block (15) on the movable plate (13) on the left side moves to the rightmost side of the movable groove (16), the right end of the silicon crystal bar is inserted into the groove (28) on the movable plate (13) on the right side at the moment, the clamping mechanism (19) realizes the fixed clamping operation on the right end of the silicon crystal bar, and the inclined plate (45) is in contact with the left side wall of the shell (1), the inclined plate (45) drives the fixed plate (44) to move away from one side of the movable plate (13), so that the latch (38) is separated from the clamping groove (35), and the left clamping mechanism (19) releases the locking of the silicon crystal bar under the condition that the first spring (34) and the movable plate (13) on the right side move;
s8: the control mechanism (14) is opened through the contact of the bottom edges of the two movable plates (13), the control mechanism (14) closes the second motor (18) on the left side and opens the second motor (18) on the right side, the second motor (18) on the right side drives the threaded rod (17) to rotate, the movable plate (13) on the right side drives the silicon crystal bar to move towards the right side, the whole surface grinding operation of the silicon crystal bar can be realized, the grinding operation is convenient, and the effect is good;
s9: after the silicon crystal bar integrally moves out of the shell (1) through the movement of the right movable plate (13), the power supply of the device is turned off, the ground silicon crystal bar is hoisted through an external device, and two limiting plates (39) are arranged on the right clamping mechanism (19) through pulling, so that the latch (38) is separated from a clamping groove (35) on the square rod (27), the clamping and locking of the silicon crystal bar are released, the silicon crystal bar can be conveniently taken down, and the operation is convenient and the efficiency is high.
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Cited By (1)
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| CN113967874B (en) | 2022-10-14 |
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