CN113953611A - Auxiliary welding workpiece of target backboard and welding method using auxiliary welding workpiece - Google Patents
Auxiliary welding workpiece of target backboard and welding method using auxiliary welding workpiece Download PDFInfo
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- CN113953611A CN113953611A CN202111392095.2A CN202111392095A CN113953611A CN 113953611 A CN113953611 A CN 113953611A CN 202111392095 A CN202111392095 A CN 202111392095A CN 113953611 A CN113953611 A CN 113953611A
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- 238000003466 welding Methods 0.000 title claims abstract description 133
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000003825 pressing Methods 0.000 claims abstract description 30
- 238000005219 brazing Methods 0.000 claims abstract description 29
- 230000006835 compression Effects 0.000 claims description 25
- 238000007906 compression Methods 0.000 claims description 25
- 238000005476 soldering Methods 0.000 claims description 25
- 239000013077 target material Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- 229910001209 Low-carbon steel Inorganic materials 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000012459 cleaning agent Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 238000001816 cooling Methods 0.000 description 8
- 239000000498 cooling water Substances 0.000 description 8
- 238000003756 stirring Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 239000000945 filler Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012043 crude product Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Butt Welding And Welding Of Specific Article (AREA)
Abstract
The invention provides an auxiliary welding workpiece of a target backboard and a welding method using the auxiliary welding workpiece, wherein the auxiliary welding workpiece comprises an auxiliary base and an auxiliary cover plate, a placing groove for placing the target backboard is formed in the auxiliary base, the auxiliary cover plate is opposite to the placing groove, and the auxiliary base is connected with the auxiliary base through at least two fixing bolts; at least two pressing threaded holes are formed in the middle area of the auxiliary cover plate and above the auxiliary cover plate corresponding to the placing groove, pressing bolts are detachably fixed on the auxiliary cover plate through the pressing threaded holes, the back plate cover plate is pressed, and the target back plate is obtained through a vacuum brazing method; the auxiliary welding workpiece ensures that the back plate is uniformly stressed during welding through the adjusting bolt, reduces deformation after welding, can be used for welding the back plates with different thicknesses, can process the placing groove according to the shapes of the back plates, and is flexible to apply; the welding method can improve the one-time welding passing rate, improve the production stability of the back plate and reduce the production cost.
Description
Technical Field
The invention belongs to the field of sputtering target preparation, and particularly relates to an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece.
Background
The target for semiconductor sputtering generates a large amount of heat during operation, and cooling water needs to flow through the position of the target back plate in order to reduce the temperature of a product during the operation of the target. Generally, the cooling back plate is divided into two types according to the types of sputtering machines: the back plate with cooling water channel and the back plate without cooling water channel.
The cooling of the sputtering target is an important influence factor in the sputtering process, and a backboard with a cooling water channel is generally processed into a water channel structure in a welding mode, but if the structural design is unreasonable, a welding flux is selected incorrectly, a welding process is not appropriate, and the like, welding defects and product deformation are generated, so that the water channel leaks and damages equipment.
CN112045309A discloses a preparation method of a waterway back plate for a target, which comprises the following steps: (1) processing a T-shaped groove on the copper back plate main body, wherein the T-shaped groove comprises a cover plate groove and a water groove which are arranged from top to bottom; (2) placing a cover plate on the cover plate groove to obtain a copper back plate of the water path to be welded; (3) fixing a welding workpiece on a rigid tool; (4) arranging a laser above the copper back plate of the waterway to be welded; (5) firstly, spot welding is carried out on a copper back plate of a waterway to be welded; (6) carrying out primary welding; (7) carrying out secondary welding: and gradually rotating the welding needle into the joint to enable the focus to be positioned at the joint between the copper back plate main body and the cover plate, then simultaneously starting the stirring friction head and the laser, and simultaneously synchronously feeding the stirring friction head and the focus according to the same feeding amount in the welding direction. The method has complex welding steps and is easy to generate water leakage.
CN112410740A discloses a target cooling back plate and a preparation method thereof, wherein a flange connecting piece of a water inlet and a water outlet is integrally designed on a base of the target cooling back plate to be a part of the base, and a cooling water channel in the base and the water inlet and the water outlet are correspondingly changed into an inclined water channel, so that the leakage problem at the water inlet and the water outlet is effectively prevented; according to the preparation method, the thickness of a cover plate of the target cooling back plate is increased to 4.5-5mm, sand blasting is carried out on the inner surface of a cooling water channel of a base, then the cover plate and the base are welded by adopting vacuum brazing to obtain a crude product of the target cooling back plate, and then machining is carried out by means of supporting and fixing of bosses with equal heights to obtain the target cooling back plate. The target material cooling back plate obtained by the method has complex processing steps and is easy to have the condition of uneven back plate cover plate.
The existing copper back plate with the water channel is poor in welding bonding rate of materials around the water channel after being processed, so that the water channel is easy to leak, and the welding success rate is low due to the fact that the welding process of the structure of the water channel is unstable, and serious cost waste is caused.
Therefore, it is necessary to develop a new welding process for the target backing plate, so that the backing plate has a smooth surface and is not easy to leak water, and the production efficiency is high.
Disclosure of Invention
The invention aims to provide an auxiliary welding workpiece of a target backboard and a welding method using the auxiliary welding workpiece, wherein the auxiliary welding workpiece comprises an auxiliary base and an auxiliary cover plate, the auxiliary base is provided with a placing groove for placing the target backboard, the auxiliary cover plate is over against the placing groove, the edge position of the auxiliary base and the edge position of the auxiliary cover plate are respectively provided with at least two fixing threaded holes, and the auxiliary base is connected with the auxiliary base through at least two fixing bolts; the deformation after welding can be reduced, the welding process can be used repeatedly, the one-time welding pass rate is improved, the production stability of the back plate is improved, and the production cost is reduced.
In order to achieve the purpose, the invention adopts the following technical scheme:
one of the purposes of the invention is to provide an auxiliary welding workpiece for a target backboard, which comprises an auxiliary base and an auxiliary cover plate, wherein a placing groove for placing the target backboard is formed in the auxiliary base, the auxiliary cover plate is over against the placing groove, at least two fixing threaded holes are respectively formed in the edge position of the auxiliary base and the edge position of the auxiliary cover plate, and the auxiliary base is connected with the auxiliary base through at least two fixing bolts.
The auxiliary welding workpiece adopts the auxiliary base and the auxiliary cover plate to fix the target material back plate, so that the deformation after welding can be reduced, the auxiliary welding workpiece can be reused, the one-time welding pass rate is improved, the production stability of the back plate is improved, and the production cost is reduced.
It should be noted that, the edge position of the auxiliary base refers to the peripheral area of the placement groove, and the fixing threaded holes on the auxiliary base and the fixing threaded holes on the auxiliary cover plate are correspondingly arranged.
As a preferable technical solution of the present invention, the auxiliary base and the auxiliary cover plate have the same shape and size.
Preferably, the material of the sub-base comprises low carbon steel.
Preferably, the flatness of the sub-base is less than 0.1mm, and may be, for example, 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, 0.06mm, 0.07mm, 0.08mm, 0.09mm, 0.099mm, etc., but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
Preferably, the material of the auxiliary cover plate comprises low carbon steel.
Preferably, the flatness of the auxiliary cover plate is less than 0.1mm, and may be, for example, 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, 0.06mm, 0.07mm, 0.08mm, 0.09mm, 0.099mm, etc., but is not limited to the values listed, and other values not listed in the above numerical range may be applied.
As a preferred technical solution of the present invention, the depth of the placement groove is smaller than the thickness of the target backing plate.
As a preferable technical scheme of the invention, at least two pressing threaded holes are formed in the middle area of the auxiliary cover plate.
Preferably, the opening area of the pressing threaded hole corresponds to the upper part of the placing groove.
As a preferable technical solution of the present invention, the auxiliary welding workpiece further includes a compression bolt.
Preferably, the pressing bolt is detachably fixed on the auxiliary cover plate through the pressing threaded hole.
A second object of the present invention is to provide a welding method for assisting in welding a workpiece according to the first object, the welding method including the steps of:
(1) assembling a soldering lug, a back plate bottom plate and a back plate cover plate, then placing the soldering lug, the back plate bottom plate and the back plate cover plate into a placing groove of an auxiliary base to enable the back plate bottom plate to be in contact with the auxiliary base, placing the auxiliary base plate above the back plate cover plate, connecting the back plate bottom plate with the auxiliary base through at least two fixing bolts, and pressing the back plate cover plate tightly to obtain a component to be welded;
(2) and (3) carrying out vacuum brazing on the components to be welded in the step (1), and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
Brazing (brazing) refers to a welding method in which brazing filler metal lower than the melting point of a weldment and the weldment are heated to the melting temperature of the brazing filler metal at the same time, and then the liquid brazing filler metal is used for filling gaps of a solid workpiece to connect the metal; the vacuum brazing not only saves a large amount of expensive metal brazing flux, but also does not need a complex flux cleaning procedure, reduces the production cost, simultaneously has good wettability and fluidity, improves the yield of products, and obtains a firm and clean working surface.
According to the invention, when the soldering lug, the back plate bottom plate and the back plate cover plate are assembled, the soldering lug is arranged between the back plate bottom plate and the back plate cover plate, one side of the back plate bottom plate, which is provided with the cooling water channel, is contacted with the soldering lug, and one side of the back plate cover plate, which is provided with the connecting contact, is contacted with the soldering lug.
As a preferred technical solution of the present invention, before the step (1), the soldering terminal, the back plate base plate, and the back plate cover plate are cleaned.
Preferably, the cleaning agent used for cleaning comprises acetone.
Preferably, the material of the soldering lug in the step (1) comprises AgCu 28.
Preferably, the thickness of the soldering lug in step (1) is 0.06-0.12mm, such as 0.06mm, 0.065mm, 0.07mm, 0.075mm, 0.08mm, 0.085mm, 0.09mm, 0.095mm, 0.1mm, 0.0105mm, 0.011mm, 0.0115mm, 0.012mm, etc., but not limited to the recited values, and other values in the above range are also applicable.
As a preferred technical solution of the present invention, the method for pressing the back plate cover plate in step (1) further includes: and at least two pressing threaded holes are formed in the middle area of the auxiliary cover plate and above the auxiliary cover plate corresponding to the placing groove, and pressing bolts are detachably fixed on the auxiliary cover plate through the pressing threaded holes and press the back plate cover plate.
As a preferable technical scheme of the invention, the vacuum degree of the vacuum brazing in the step (2) is less than 10-2Pa, for example, may be 1X 10-3Pa，2×10-3Pa，3×10-3Pa，4×10-3Pa，5×10-3Pa，6×10-3Pa，7×10-3Pa，8×10- 3Pa，9×10-3Pa, etc., but are not limited to the recited values, and other values not recited within the above numerical range are also applicable.
Preferably, the temperature for vacuum brazing in step (2) is 800-.
Preferably, the vacuum brazing time in step (2) is 30-60min, such as 30min, 33min, 35min, 37min, 40min, 42min, 45min, 48min, 50min, 52min, 55min, 58min, 60min, etc., but not limited to the recited values, and other values not recited in the above range of values are also applicable.
As a preferred technical solution of the present invention, the welding method includes the steps of:
(1) assembling an AgCu28 soldering lug with the thickness of 0.06-0.12mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, and connecting the auxiliary base with the auxiliary base through at least two fixing bolts; the auxiliary welding workpiece further comprises a compression bolt, at least two compression threaded holes are formed in the middle area of the auxiliary cover plate and above the corresponding placement grooves, the compression bolt is detachably fixed on the auxiliary cover plate through the compression threaded holes and compresses the back plate cover plate to obtain a component to be welded;
(2) the assembly to be welded in the step (1) is subjected to vacuum degree of less than 10-2And carrying out vacuum brazing for 30-60min at the temperature of 800-850 ℃, and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
The recitation of numerical ranges herein includes not only the above-recited numerical values, but also any numerical values between non-recited numerical ranges, and is not intended to be exhaustive or to limit the invention to the precise numerical values encompassed within the range for brevity and clarity.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the invention, the auxiliary welding workpiece of the target backboard ensures that the backboard is stressed uniformly during welding through the adjusting bolt, and the deformation after welding can be reduced;
(2) the auxiliary welding workpiece of the target backboard can be used for welding backboards with different thicknesses and can be reused;
(3) the auxiliary welding workpiece of the target backboard can be provided with the placing groove according to the shape of the backboard, and the application is flexible;
(4) the welding method of the target backboard can improve the one-time welding throughput rate, improve the production stability of the backboard and reduce the production cost.
Drawings
FIG. 1 is a schematic view of an auxiliary cover plate of an auxiliary welding workpiece according to the present invention;
FIG. 2 is a schematic structural diagram of an auxiliary base in the auxiliary welding workpiece according to the present invention;
FIG. 3 is a schematic view of a target backing plate secured using the auxiliary welding workpiece of the present invention;
wherein, 1-auxiliary cover plate; 2-an auxiliary base; 3-placing the groove; 4-fixing the bolt; 5-fixing the threaded hole; 6, pressing the threaded hole; 7-a hold-down bolt; 8-target backing plate.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
As shown in fig. 1-3, the auxiliary welding workpiece of the present invention includes an auxiliary base 2 and an auxiliary cover plate 1, wherein a placing groove 3 for placing a target backing plate 8 is formed on the auxiliary base 2, the auxiliary cover plate 1 is directly opposite to the placing groove 3, at least two fixing threaded holes 5 are respectively formed in the edge position of the auxiliary base 2 and the edge position of the auxiliary cover plate 1, and the auxiliary welding workpiece is connected to the auxiliary base 2 through at least two fixing bolts 4; at least two pressing threaded holes 6 are formed in the middle area of the auxiliary cover plate 1, and the forming area of each pressing threaded hole 6 corresponds to the upper part of the placing groove 3; the auxiliary welding workpiece further comprises a pressing bolt 7, and the pressing bolt 7 is detachably fixed on the auxiliary cover plate 1 through the pressing threaded hole 6;
the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug, a backboard base plate and a backboard cover plate, then placing the assembled components into a placing groove 3 of an auxiliary base 2 to enable the backboard base plate to be in contact with the auxiliary base 2, placing an auxiliary cover plate 1 above the backboard cover plate, and connecting the auxiliary base 2 through at least two fixing bolts 4; the auxiliary welding workpiece further comprises a compression bolt 7, at least two compression threaded holes 6 are formed in the middle area of the auxiliary cover plate 1 and above the corresponding placement grooves 3, the compression bolt 7 is detachably fixed on the auxiliary cover plate 1 through the compression threaded holes 6 and compresses the back plate cover plate to obtain a component to be welded;
(2) and (3) after the components to be welded in the step (1) are subjected to vacuum brazing, removing the auxiliary cover plate 1 and the auxiliary base 2 to obtain a target material back plate 8.
Example 1
The embodiment provides an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece, wherein the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.1mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, and connecting the auxiliary base with the auxiliary base through four fixing bolts; the auxiliary welding workpiece further comprises a compression bolt, four compression threaded holes are formed in the middle area of the auxiliary cover plate and above the corresponding placement grooves, the compression bolt is detachably fixed on the auxiliary cover plate through the compression threaded holes and compresses the back plate cover plate to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 1 multiplied by 10-3And carrying out vacuum brazing for 30min at the temperature of 830 ℃ under Pa, and removing the auxiliary cover plate and the auxiliary base to obtain the target back plate.
Example 2
The embodiment provides an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece, wherein the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.06mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, and connecting the auxiliary base with the backboard cover plate through two fixing bolts; the auxiliary welding workpiece further comprises a compression bolt, two compression threaded holes are formed in the middle area of the auxiliary cover plate and above the corresponding placement grooves, the compression bolt is detachably fixed on the auxiliary cover plate through the compression threaded holes and compresses the back plate cover plate to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 9.9 multiplied by 10-3Vacuum brazing is carried out for 45min under the conditions of Pa and the temperature of 850 ℃, and the auxiliary cover plate are removedAnd (5) assisting the base to obtain the target material back plate.
Example 3
The embodiment provides an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece, wherein the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.12mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, and connecting the auxiliary base with the auxiliary base through four fixing bolts; the auxiliary welding workpiece further comprises a compression bolt, four compression threaded holes are formed in the middle area of the auxiliary cover plate and above the corresponding placement grooves, the compression bolt is detachably fixed on the auxiliary cover plate through the compression threaded holes and compresses the back plate cover plate to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 5 multiplied by 10-3And carrying out vacuum brazing for 60min at the temperature of 800 ℃ under Pa, and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
Example 4
The embodiment provides an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece, wherein the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.1mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, connecting the auxiliary base with the auxiliary base through four fixing bolts, and pressing the backboard cover plate tightly to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 1 multiplied by 10-3And carrying out vacuum brazing for 30min at the temperature of 830 ℃ under Pa, and removing the auxiliary cover plate and the auxiliary base to obtain the target back plate.
Example 5
The embodiment provides an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece, wherein the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.06mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, connecting the auxiliary base with the auxiliary base through two fixing bolts, and pressing the backboard cover plate tightly to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 9.9 multiplied by 10-3And carrying out vacuum brazing for 45min at the temperature of 850 ℃ under Pa, and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
Example 6
The embodiment provides an auxiliary welding workpiece of a target back plate and a welding method using the auxiliary welding workpiece, wherein the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.12mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, connecting the auxiliary base with the auxiliary base through four fixing bolts, and pressing the backboard cover plate tightly to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 5 multiplied by 10-3And carrying out vacuum brazing for 60min at the temperature of 800 ℃ under Pa, and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
Comparative example 1
The present comparative example provides an auxiliary welding workpiece of a target backing plate and a welding method using the same, which are described with reference to example 1, except that: auxiliary welding of the workpiece is not adopted; the welding method comprises the following steps:
(1) assembling an AgCu28 soldering lug with the thickness of 0.1mm, a backboard base plate and a backboard cover plate to obtain a component to be welded;
(2) putting the components to be welded in the step (1) in a vacuum degree of 1 multiplied by 10-3Carrying out vacuum brazing for 30min under the conditions of Pa and the temperature of 830 ℃, and removing the auxiliary cover plate and the auxiliary cover plateAnd (5) assisting the base to obtain the target material back plate.
Comparative example 2
The comparative example provides a welding method of a target backing plate, which includes the following steps:
(1) spot welding: spot welding positions are uniformly selected at the joint between the back plate bottom plate and the back plate cover plate, then welding pins of the stirring friction head extend into the joint, and the back plate bottom plate and the back plate cover plate are welded and fixed through high-speed rotation of the welding pins;
(2) friction stir welding: and adjusting the rotating speed of the friction stir head to 600r/min, rotating the friction stir head, and moving the friction stir head along the seam in the welding direction, so that the back plate bottom plate and the back plate cover plate are tightly fused to obtain the target back plate.
The target backing plates obtained in the above examples and comparative examples are subjected to one-time welding pass rate test, and the specific steps of the test are as follows:
and (3) introducing cooling water into the N target back plates, observing the water leakage condition, and if water leakage occurs in the N target back plates, determining the one-time welding pass rate as (1-N/N) multiplied by 100%.
The test results of the one-time welding pass rates of the above examples and comparative examples are shown in table 1.
TABLE 1
| Item | One-time weld pass rate/%) |
| Example 1 | 99.9％ |
| Example 2 | 99.7％ |
| Example 3 | 99.8％ |
| Example 4 | 99.4％ |
| Example 5 | 99.1％ |
| Example 6 | 99.3％ |
| Comparative example 1 | 91.8％ |
| Comparative example 2 | 86.4％ |
The following points can be derived from table 1:
(1) from the examples 1 to 6, when the auxiliary welding workpiece of the target backboard and the welding method are adopted to prepare the target backboard, the one-time welding throughput rate is high and reaches more than 99%;
(2) comparing the example 1 with the comparative example 1, it can be found that, as the comparative example 1 does not adopt the auxiliary welding workpiece of the invention, a gap exists between the soldering lug and the back plate bottom plate and the back plate cover plate, the three cannot be tightly welded together by vacuum brazing, and further, the one-time welding pass rate is reduced to 91.8%;
(3) comparing the example 1 with the comparative example 2, it can be found that the comparative example 2 does not adopt the auxiliary welding workpiece of the invention, does not carry out vacuum brazing, but adopts the mode of combining spot welding and friction stir welding for welding, so that the water leakage condition is easy to occur, the one-time welding through rate is low, the secondary repair welding is often needed, the labor and the time are wasted.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. The auxiliary welding workpiece is characterized by comprising an auxiliary base and an auxiliary cover plate, wherein a placing groove for placing the target backboard is formed in the auxiliary base, the auxiliary cover plate is opposite to the placing groove, at least two fixing threaded holes are formed in the edge position of the auxiliary base and the edge position of the auxiliary cover plate respectively, and the auxiliary cover plate is connected with the auxiliary base through at least two fixing bolts.
2. The auxiliary welding workpiece of a target backing plate according to claim 1, wherein the auxiliary base and the auxiliary cover plate are the same in shape and size;
preferably, the material of the auxiliary base comprises low-carbon steel;
preferably, the flatness of the auxiliary base is less than 0.1 mm;
preferably, the material of the auxiliary cover plate comprises low carbon steel;
preferably, the flatness of the auxiliary cover plate is less than 0.1 mm.
3. The auxiliary welding workpiece for the target backing plate according to claim 1 or 2, wherein the depth of the placement groove is smaller than the thickness of the target backing plate.
4. The auxiliary welding workpiece for the target backing plate according to any one of claims 1 to 3, wherein at least two pressing threaded holes are formed in the middle region of the auxiliary cover plate;
preferably, the opening area of the pressing threaded hole corresponds to the upper part of the placing groove.
5. The auxiliary weld of a target backing plate of claim 4, further comprising hold-down bolts;
preferably, the pressing bolt is detachably fixed on the auxiliary cover plate through the pressing threaded hole.
6. A welding method using the auxiliary welding workpiece as set forth in any one of claims 1 to 5, characterized in that the welding method comprises the steps of:
(1) assembling a soldering lug, a back plate bottom plate and a back plate cover plate, then placing the soldering lug, the back plate bottom plate and the back plate cover plate into a placing groove of an auxiliary base to enable the back plate bottom plate to be in contact with the auxiliary base, placing the auxiliary base plate above the back plate cover plate, connecting the back plate bottom plate with the auxiliary base through at least two fixing bolts, and pressing the back plate cover plate tightly to obtain a component to be welded;
(2) and (3) carrying out vacuum brazing on the components to be welded in the step (1), and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
7. The welding method of claim 6, wherein prior to step (1), the soldering tab, the backing plate base plate and the backing plate cover plate are cleaned;
preferably, the cleaning agent used for cleaning comprises acetone;
preferably, the material of the soldering lug in the step (1) comprises AgCu 28;
preferably, the thickness of the soldering lug in the step (1) is 0.06-0.12 mm.
8. The welding method according to claim 6 or 7, wherein the manner of pressing the backing plate cover plate in step (1) further comprises: and at least two pressing threaded holes are formed in the middle area of the auxiliary cover plate and above the auxiliary cover plate corresponding to the placing groove, and pressing bolts are detachably fixed on the auxiliary cover plate through the pressing threaded holes and press the back plate cover plate.
9. A welding method according to any one of claims 6 to 8, wherein the vacuum brazing in step (2) is performed with a degree of vacuum of less than 10-2Pa；
Preferably, the temperature of the vacuum brazing in the step (2) is 800-850 ℃;
preferably, the vacuum brazing time in the step (2) is 30-60 min.
10. Welding method according to any one of claims 6-9, characterized in that it comprises the steps of:
(1) assembling an AgCu28 soldering lug with the thickness of 0.06-0.12mm, a backboard base plate and a backboard cover plate, putting the assembled components into a placing groove of an auxiliary base to enable the backboard base plate to be in contact with the auxiliary base, placing the auxiliary cover plate above the backboard cover plate, and connecting the auxiliary base with the auxiliary base through at least two fixing bolts; the auxiliary welding workpiece further comprises a compression bolt, at least two compression threaded holes are formed in the middle area of the auxiliary cover plate and above the corresponding placement grooves, the compression bolt is detachably fixed on the auxiliary cover plate through the compression threaded holes and compresses the back plate cover plate to obtain a component to be welded;
(2) the assembly to be welded in the step (1) is subjected to vacuum degree of less than 10-2And carrying out vacuum brazing for 30-60min at the temperature of 800-850 ℃, and removing the auxiliary cover plate and the auxiliary base to obtain the target material back plate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111392095.2A CN113953611A (en) | 2021-11-23 | 2021-11-23 | Auxiliary welding workpiece of target backboard and welding method using auxiliary welding workpiece |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111392095.2A CN113953611A (en) | 2021-11-23 | 2021-11-23 | Auxiliary welding workpiece of target backboard and welding method using auxiliary welding workpiece |
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| CN113953611A true CN113953611A (en) | 2022-01-21 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101875142A (en) * | 2010-03-11 | 2010-11-03 | 常州苏晶电子材料有限公司 | Furnace brazing method using vacuum fixture |
| CN104551309A (en) * | 2013-10-14 | 2015-04-29 | 宁波江丰电子材料股份有限公司 | Target welding clamp and target welding method |
| CN108067701A (en) * | 2017-12-13 | 2018-05-25 | 北京华航无线电测量研究所 | A kind of pressure-resistant airtight cold plate vacuum brazing universal fixture |
| CN207735805U (en) * | 2017-12-16 | 2018-08-17 | 上海孚育科技有限公司 | A kind of auxiliary welding tool of medical ultrasonic probe |
| CN110587064A (en) * | 2019-09-30 | 2019-12-20 | 北京无线电测量研究所 | MCM eutectic brazing tool and eutectic brazing process |
| KR20200079722A (en) * | 2018-12-26 | 2020-07-06 | (주)유성엔코리아 | Manufacturing method of clean room steel floor and steel floor |
-
2021
- 2021-11-23 CN CN202111392095.2A patent/CN113953611A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101875142A (en) * | 2010-03-11 | 2010-11-03 | 常州苏晶电子材料有限公司 | Furnace brazing method using vacuum fixture |
| CN104551309A (en) * | 2013-10-14 | 2015-04-29 | 宁波江丰电子材料股份有限公司 | Target welding clamp and target welding method |
| CN108067701A (en) * | 2017-12-13 | 2018-05-25 | 北京华航无线电测量研究所 | A kind of pressure-resistant airtight cold plate vacuum brazing universal fixture |
| CN207735805U (en) * | 2017-12-16 | 2018-08-17 | 上海孚育科技有限公司 | A kind of auxiliary welding tool of medical ultrasonic probe |
| KR20200079722A (en) * | 2018-12-26 | 2020-07-06 | (주)유성엔코리아 | Manufacturing method of clean room steel floor and steel floor |
| CN110587064A (en) * | 2019-09-30 | 2019-12-20 | 北京无线电测量研究所 | MCM eutectic brazing tool and eutectic brazing process |
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Application publication date: 20220121 |