CN113945870A - Nano-magnetic scanning imaging system and method - Google Patents
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Abstract
The invention discloses a nano-magnetism scanning imaging system and a method, comprising the following steps: the tested sample module is used for realizing grid type scanning imaging; the quantum probe module is used for controlling the quantum probe and a tested sample to keep a preset distance in the scanning imaging process; the objective lens module is connected with the optical module through a reflector and is used for finely aligning the distance and the position between the measured sample and the quantum probe, focusing green laser with preset wavelength transmitted by the excitation light path to an NV-color center in the quantum probe, and collecting red fluorescence emitted by the NV-color center; the control module is used for controlling the tested sample module, the quantum probe module and the objective lens module to execute corresponding actions according to the input control instruction. The system can realize the positioning of the NV-color center and the quantum scanning magnetic imaging through linkage among a plurality of modules, effectively improves the automation level, can realize imaging in changeable environments such as room temperature and atmosphere and the like, and greatly meets the requirements of microscopic magnetic imaging.
Description
Technical Field
The invention relates to the technical field of imaging, in particular to a microscopic magnetic scanning imaging system and a microscopic magnetic scanning imaging method.
Background
The high-precision weak magnetic measurement technology is an important component of modern detection technology, and is widely applied to the important fields of basic physics, spintronics, chemistry, material science, life science, petroleum exploration and the like.
At present, some simple measurements in the related art can be met, but the requirements cannot be met in some fields with higher requirements, and the problems are solved.
Disclosure of Invention
The present invention is directed to provide an important technical means for solving the above-mentioned related technical problems.
Therefore, one objective of the present invention is to provide a nanomagnetic scanning imaging system, which can realize NV-color center positioning and quantum scanning magnetic imaging through linkage among a plurality of modules, effectively improve automation level, realize imaging in changeable environments such as room temperature and atmosphere, and greatly meet the requirements of microscopic magnetic imaging.
Another objective of the present invention is to provide a nanomagnetic scanning imaging method.
In order to achieve the above object, an aspect of the present invention discloses a nanomagnetic scanning imaging system, comprising: the measured sample module is used for realizing grid type scanning imaging and keeping the distance between the NV-color center in the quantum probe and the measured sample constant through feedback; the quantum probe module is used for inducing the magnetic field change of samples at different positions by taking an NV-color center in the quantum probe as a single-spin sensor in the scanning imaging process; the objective lens module is connected with the optical module through a reflector and is used for finely aligning the distance and the position between the measured sample and the quantum probe, focusing green laser with preset wavelength transmitted by an excitation light path to an NV-color center in the quantum probe, and collecting red fluorescence emitted by the NV-color center; and the control module is respectively connected with the tested sample module, the quantum probe module and the objective lens module and is used for controlling the tested sample module, the quantum probe module and the objective lens module to execute corresponding actions according to an input control instruction so as to realize positioning of an NV-color center in the quantum probe and quantum scanning magnetic imaging.
In addition, the nanomagnetic scanning imaging system according to the above embodiment of the present invention may further have the following additional technical features:
according to an embodiment of the invention, the quantum probe module comprises: a quantum probe; a quantum probe angular displacement stage; the angle of the quantum probe is adjusted, so that the lower surface of the quantum probe is parallel to the surface of the measured sample; the quantum probe micrometer displacement platform is used for roughly aligning the longitudinal distance and the transverse position between the objective lens and the quantum probe; the quantum probe angle displacement table controller is used for controlling the quantum probe angle displacement table; and the quantum probe micron displacement table controller is used for controlling the quantum probe micron displacement table to realize movement in the x direction, the y direction and the z direction.
Preferably, according to an embodiment of the present invention, the rotation range of the quantum probe angular displacement stage is ± 5 °, and the angular displacement precision is 25 ″. It should be noted that the above description is only exemplary, the rotation range of the quantum probe angular displacement table may be greater than or less than ± 5 °, and the angular displacement precision may be greater than or less than 25 ″.
According to an embodiment of the present invention, the objective lens module includes: the objective lens is used for focusing the excitation light to the NV-color center to enable the excitation light to be polarized, and collecting red fluorescence emitted by the NV-color center; the objective lens nanometer displacement platform is used for carrying out fine alignment and confocal scanning imaging on the quantum probe to drive the objective lens to move; and the objective lens nano displacement platform controller is used for controlling the objective lens nano displacement platform.
According to one embodiment of the invention, the tested sample module comprises: a sample to be tested; the nano displacement table of the tested sample is used for moving the tested sample to realize scanning imaging; the measured sample angle displacement table is used for adjusting the angle of the measured sample so that the surface of the measured sample is parallel to the lower surface of the quantum probe; the measured sample micrometer displacement table is used for roughly aligning the measured sample and the quantum probe; the controller of the measured sample nanometer displacement platform is used for controlling the measured sample nanometer displacement platform; the controller of the measured sample angle displacement table is used for controlling the measured sample angle displacement table; and the measured sample micron displacement table controller is used for controlling the measured sample micron displacement table.
According to the nanomagnetic scanning imaging system provided by the embodiment of the invention, nitrogen-vacancy center initialization and quantum state readout in the quantum probe can be realized through the objective lens module, the probe module ensures that the distance between the quantum probe and a detected sample is constant in the scanning imaging process, and the sample module is used for realizing completion of grid type scanning imaging. Therefore, the positioning of the NV-color center and the quantum scanning magnetic imaging can be realized through linkage among the modules, the automation level is effectively improved, the imaging in changeable environments such as room temperature and atmosphere can be realized, and the requirement of microscopic magnetic imaging is greatly met.
In another aspect of the present invention, a nanomagnology scanning imaging method is disclosed, which is applied to the nanomagnology scanning imaging system, and the method includes: roughly aligning the longitudinal distance between an objective lens and the quantum probe through a quantum probe micron displacement table; fine alignment is carried out on the quantum probe through an objective lens nano displacement table; focusing green laser with a preset wavelength transmitted by an excitation light path to an NV-color center in the quantum probe through the objective lens, and collecting red fluorescence emitted by the NV-color center; counting the collected red fluorescence to judge whether the laser is focused on the quantum probe; fine alignment is carried out on the quantum probe through an objective lens nano displacement table; roughly adjusting the distance between the measured sample and the quantum probe through a measured sample micrometer displacement table; fine adjusting the distance between the sample to be measured and the quantum probe through a sample to be measured nanometer displacement platform to enable the sample to be measured and the quantum probe to reach a proper working distance; the quantum probe and the sample to be detected are kept parallel by adjusting the angular displacement table of the sample to be detected and the angular displacement table of the quantum probe; and moving the nano displacement table of the detected sample to realize the scanning imaging of the detected sample.
According to one embodiment of the invention, the rotation range of the quantum probe angle displacement table is +/-5 degrees, and the angular displacement precision is 25'.
According to the nanomagnetic scanning imaging method provided by the embodiment of the invention, nitrogen-vacancy center initialization and quantum state readout in the quantum probe can be realized through the objective lens module, the probe module ensures that the distance between the quantum probe and a detected sample is constant in the scanning imaging process, and the sample module is used for realizing completion of grid type scanning imaging. Therefore, the positioning of the NV-color center and the quantum scanning magnetic imaging can be realized through linkage among the modules, the automation level is effectively improved, the imaging in changeable environments such as room temperature and atmosphere can be realized, and the requirement of microscopic magnetic imaging is greatly met.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
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The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block schematic diagram of a nanomagnetic scanning imaging system according to an embodiment of the present invention;
FIG. 2 is a block schematic diagram of a nanomagnetic scanning imaging system in accordance with one embodiment of the present invention;
FIG. 3 is a block schematic diagram of a nanomagnetic scanning imaging system according to another embodiment of the present invention.
FIG. 4 is a flow chart of a nanomagnetic scanning imaging method according to an embodiment of the invention;
FIG. 5 is a flow diagram of a nanomagnetic scanning imaging method according to one embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
A nanomagnetic scanning imaging system and method according to embodiments of the invention are described below with reference to the drawings.
As shown in fig. 1, fig. 1 is a block diagram of a nanomagnetic scanning imaging system according to an embodiment of the invention. The nanomagnetic scanning imaging system comprises: the device comprises a sample module 100 to be tested, a quantum probe module 200, an objective lens module 300 and a control module 400.
The tested sample module 100 is used for realizing grid type scanning imaging.
According to an embodiment of the present invention, as shown in fig. 2, the measured sample module 100 includes: a measured sample 101, a measured sample nanometer displacement platform 102, a measured sample angle displacement platform 103, a measured sample micrometer displacement platform 104, a measured sample nanometer displacement platform controller 105, a measured sample angle displacement platform controller 106 and a measured sample micrometer displacement platform controller 107. The measured sample nanometer displacement platform 102 is used for moving the measured sample, performing fine adjustment on the distance between the measured sample and the quantum probe, and scanning and imaging the measured sample after the fine adjustment. The measured sample angle displacement table 103 is used for adjusting the angle of the measured sample, so that the surface of the measured sample 101 and the lower surface of the quantum probe are kept parallel. The micrometer displacement stage 104 for the measured sample is used for moving the measured sample, playing a role in navigating a target area on the measured sample, and roughly adjusting the distance between the measured sample and the quantum probe. The measured sample nano-displacement stage controller 105 is used for controlling the measured sample nano-displacement stage 102. The measured sample angle displacement stage controller 106 is used for controlling the measured sample angle displacement stage 103. The measured sample micrometer displacement stage controller 107 is used for controlling the measured sample micrometer displacement stage 104.
The quantum probe module 200 is used for controlling the quantum probe to keep a preset distance from the measured sample 102 in the scanning imaging process.
As shown in fig. 2, according to an embodiment of the present invention, a quantum probe module 200 includes: quantum probe 201, quantum probe angle displacement table 202, quantum probe micron displacement table 203, quantum probe angle displacement table controller 204 and quantum probe micron displacement table controller 205. The quantum probe angle displacement table 202 is used for adjusting the angle of the quantum probe, so that the lower surface of the quantum probe 201 is parallel to the surface of the sample 101 to be measured. The quantum probe micrometer displacement table 203 is used for roughly adjusting the position of the quantum probe 201 so as to realize rough alignment of the objective lens and the quantum probe 201 and roughly align the longitudinal distance and the horizontal position between the objective lens and the quantum probe 201. The quantum probe angular displacement stage controller 204 is used for controlling the quantum probe angular displacement stage 202. The quantum probe micrometer displacement table controller 205 is used for controlling the quantum probe micrometer displacement table 203 to realize movement in the x direction, the y direction and the z direction. It should be noted that the quantum probe module 200 has high-precision and fast positioning and position correction functions, and all components of the quantum probe module 200 are made of nonmagnetic materials or are subjected to demagnetization.
Preferably, according to one embodiment of the present invention, the quantum probe angular displacement stage has a rotation range of ± 5 ° and an angular displacement accuracy of 25 ″. It should be noted that the above description is only exemplary, the rotation range of the quantum probe angular displacement table may be greater than or less than ± 5 °, and the angular displacement precision may be greater than or less than 25 ″.
Specifically, the quantum probe 201 can be a diamond quantum probe, the diamond quantum probe is made of ultra-high-purity diamond, a position close to the lower surface inside the quantum probe contains a single NV-color center with good quality, which is introduced through micro-nano processing, and the NV-color center is used as a magnetic measurement quantum sensor and has extremely high magnetometry sensitivity. The diamond quantum probe is fixed on a probe base made of a titanium material with low thermal drift, the probe base is fixed on a probe angle displacement table through an adapter plate, the angle displacement table can realize two-dimensional angle adjustment, the rotation range is +/-5 degrees, and the angular displacement precision can reach 25'. The quantum probe angle displacement table 202 is fixed on the probe three-dimensional piezoelectric quantum probe micron displacement table 203 through the adapter plate, the three-axis movement range of the quantum probe micron displacement table 203 is 25mm, and the displacement precision is as high as 30 nm. The movement of the quantum probe angle displacement table 202 and the quantum probe micron displacement table 203 is realized by sending instructions through PC end software and through a controller, and the method is convenient, simple and easy to control. Therefore, the quantum probe module provided by the embodiment of the invention is applied to a quantum diamond atomic force microscope instrument, so that the alignment of a quantum probe, the accurate control of the imaging distance between a detected sample and the probe, the high magnetometric sensitivity and the nanoscale spatial resolution microscopic scanning magnetic imaging are realized.
The objective module 300 is connected to the optical module through a reflector, and is configured to finely align a distance and a position between the measured sample and the quantum probe, focus the green laser with the preset wavelength transmitted from the excitation light path to an NV "color center in the quantum probe, and collect red fluorescence emitted from the NV" color center.
Among them, according to one embodiment of the present invention, the objective lens module 300 includes: an objective lens 301, an objective lens nano-displacement stage 302, and an objective lens nano-displacement stage controller 303. The objective lens 301 is used to focus the excitation light into the NV-color center in the quantum probe and collect the red fluorescence emitted from the NV-color center. The objective lens nanometer displacement platform 302 is used for driving the objective lens 301 to move in the fine calibration and confocal scanning imaging of the quantum probe. The objective lens nano-stage controller 303 is used to control the objective lens nano-stage.
Specifically, the objective lens module 300 mainly includes an objective lens with a high numerical aperture, and functions to focus the green laser light with a wavelength of 532nm transmitted from the excitation optical path to the NV "color center in the quantum probe and collect the red fluorescence emitted from the color center. The objective 301 is fixed on a three-dimensional hollow objective nano displacement table 302 through an adapter plate, an optical cage plate, an adjustable lens sleeve and an adapter piece in an adapter way, and the objective nano displacement table 302 suspends the objective over a diamond quantum probe through a support rod. The accurate control of the position of the objective lens 301 is realized through the movement of the objective lens nanometer displacement platform 302, the scanning range of the x, y and z axes of the objective lens nanometer displacement platform 302 is 100um, and the positioning accuracy can reach the sub-nanometer level. The movement of the objective lens nano-displacement stage 302 is controlled by an objective lens nano-displacement stage controller 303 disposed in the control cabinet, and the command of the movement is sent to the objective lens nano-displacement stage controller 303 by an experimenter through software at the PC end.
The control module 400 is respectively connected to the sample module 100 to be tested, the quantum probe module 200 and the objective lens module 300, and is configured to control the sample module 100 to be tested, the quantum probe module 200 and the objective lens module 300 to perform corresponding actions according to an input control instruction, so as to achieve positioning of NV "color centers in the quantum probes and quantum scanning magnetic imaging.
In order to further understand the nanomagnetic scanning imaging system according to the embodiment of the present invention, the nanomagnetic scanning imaging system according to the embodiment of the present invention is described in detail with an embodiment. With reference to fig. 3, the embodiment of the present invention combines the advantages of AFM and microscopic magnetic resonance technologies, integrates the quantum sensor in the atomic force microscope probe, and combines the precise PID control of the lock-in amplifier, so as to precisely control the distance between the quantum sensor and the measured sample within the nanometer range, thereby realizing ultrahigh resolution and high sensitivity lossless magnetic property scanning imaging. And through many years of intensive research, the most advanced diamond growth, quantum probe preparation and testing technology is mastered. The quantum probe is prepared by using micro-nano processing production equipment, including ion implantation, electron beam exposure, focused ion beam etching, reactive plasma etching and the like, and the generation, positioning, processing and detection processes of the NV color center quantum probe are completed. Meanwhile, the embodiment of the invention can realize high-precision inclination angle adjustment. The surface of a sample to be detected is uneven, interference fringes can be observed in a CCD (charge coupled device), the inclination angle of the sample can be obtained through theoretical calculation, the displacement table is controlled to move to drive the sample to rotate accurately so as to counteract the inclination of the sample, the system of the embodiment of the invention has higher automation level, the scanning imaging range is large, the magnetic imaging spatial resolution can reach 50nm, and the magnetic detection sensitivity can reach 50nm
The positioning precision reaches sub-nanometer level, room temperature atmosphere multimode imaging can be realized, and the performances greatly meet the requirements of microscopic magnetic imaging.
According to the nanomagnetic scanning imaging system provided by the embodiment of the invention, nitrogen-vacancy center initialization and quantum state readout in the quantum probe can be realized through the objective lens module, the probe module ensures that the distance between the quantum probe and a measured sample is constant in the scanning imaging process, and the sample module realizes completion of grid type scanning imaging. Therefore, the positioning of the NV-color center and the quantum scanning magnetic imaging can be realized through linkage among the modules, the automation level is effectively improved, imaging in changeable environments such as room temperature and atmosphere can be realized, and the requirement of microscopic magnetic imaging is greatly met.
As shown in fig. 4, fig. 4 is a flowchart of a nanomagnetic scanning imaging method according to an embodiment of the present invention, where the method is applied to the nanomagnetic scanning imaging system, and the nanomagnetic scanning imaging method includes the following steps:
and S1, roughly aligning the longitudinal distance and the transverse position between the objective lens and the quantum probe through the quantum probe micrometer displacement platform.
Specifically, with reference to fig. 4 and 5, the objective module is connected to the optical module through a reflector, so as to guide the excitation light and the collected light into a confocal optical path, thereby implementing initialization of the quantum color center and readout of the quantum state; the control module (such as a PC) controls the quantum probe micron displacement table, the diamond quantum probe is moved to the position right below the objective lens by moving the x axis and the y axis, the diamond quantum probe micron displacement table is controlled to move the z axis, the longitudinal distance between the diamond quantum probe and the objective lens is changed, the diamond quantum probe is roughly adjusted to the focus of the objective lens, and the rough alignment is realized.
S2, fine alignment is carried out on the quantum probe through the objective lens nanometer displacement platform;
specifically, the control module (such as a PC) controls the objective lens nano displacement table, and the distance between the diamond quantum probe and the objective lens is changed by finely adjusting the movement of the objective lens nano displacement table, so that the laser spot focused by the objective lens just falls on the diamond quantum probe.
And S3, focusing the green laser with the preset wavelength transmitted by the excitation light path to the NV-color center in the quantum probe through the objective lens, and collecting red fluorescence emitted by the NV-color center.
And S4, counting the collected red fluorescence to judge whether the laser is focused on the quantum probe.
And S5, fine alignment is carried out on the quantum probe through the objective lens nanometer displacement platform.
Specifically, the embodiment of the invention judges the intensity of the laser reflected from the diamond quantum probe collected by the objective lens, the reflected laser intensity reaches the single photon detector through the light path and is converted into an electric signal, and the quantization is realized in a photon counting mode; and microwave signals with continuous frequency are transmitted and radiated to the diamond quantum probe area through a coaxial line, and the searching and the positioning of a single NV-color center in the diamond quantum probe are realized by utilizing the principle of Optical Detection Magnetic Resonance (ODMR).
And S6, roughly adjusting the distance and the relative position between the measured sample and the quantum probe through the micrometer displacement table of the measured sample.
And S7, finely adjusting the distance and the relative position between the sample to be measured and the NV-color center in the quantum probe through the sample to be measured nanometer displacement table.
And S8, adjusting the angle displacement table of the sample to be measured and the angle displacement table of the quantum probe to ensure that the quantum probe is parallel to the sample to be measured.
And S9, moving the measured sample nanometer displacement platform to realize the scanning imaging of the measured sample.
Specifically, the movement of the micrometer displacement table and the nanometer displacement table of the sample to be measured is controlled, and the distance between the sample to be measured and the diamond quantum probe is adjusted and stabilized at a set value. In the process, the positions of the objective lens and the diamond quantum probe are kept unchanged, the phase-locked amplifier is utilized to excite the tuning fork probe and demodulate the tuning fork probe to obtain an amplitude signal of the tuning fork probe, and the amplitude of the tuning fork probe is quickly stabilized by real-time observation and comparison of multiple set amplitude values through PID (proportion integration differentiation) feedback; the method comprises the steps that a PC controls a tested sample nano displacement table to move in a grid mode in the xy direction, the distance between a probe and a sample is kept constant through phase-locked feedback at each pixel point, and meanwhile the NV-color center is used for detecting the magnetic field intensity of the current position of the tested sample; and combining the magnetic field strengths of all the pixel points to obtain the magnetic field strength of the detected area of the sample.
Preferably, according to one embodiment of the present invention, the quantum probe angular displacement stage has a rotation range of ± 5 ° and an angular displacement accuracy of 25 ″. It should be noted that the above description is only exemplary, the rotation range of the quantum probe angular displacement table may be greater than or less than ± 5 °, and the angular displacement precision may be greater than or less than 25 ″.
It should be noted that the foregoing explanation of the embodiment of the nanomagnetic scanning imaging system is also applicable to the nanomagnetic scanning imaging method of the embodiment, and details are not repeated here.
According to the nanomagnetic scanning imaging method provided by the embodiment of the invention, nitrogen-vacancy center initialization and quantum state readout in the quantum probe can be realized through the objective lens module, the probe module ensures that the distance between the quantum probe and a measured sample is constant in the scanning imaging process, and the sample module realizes completion of grid type scanning imaging. Therefore, the positioning of the NV-color center and the quantum scanning magnetic imaging can be realized through linkage among the modules, the automation level is effectively improved, imaging in changeable environments such as room temperature and atmosphere can be realized, and the requirement of microscopic magnetic imaging is greatly met.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (7)
1. A nanomagnetic scanning imaging system, comprising:
the system comprises a tested sample module, a data acquisition module and a data processing module, wherein the tested sample module is used for realizing grid type scanning imaging;
the quantum probe module is used for controlling the quantum probe and a tested sample to keep a preset distance in the scanning imaging process; and
the objective lens module is connected with the optical module through a reflector and is used for finely aligning the distance and the position between the measured sample and the quantum probe, focusing green laser with preset wavelength transmitted by an excitation light path to an NV-color center in the quantum probe, and collecting red fluorescence emitted by the NV-color center;
and the control module is respectively connected with the tested sample module, the quantum probe module and the objective lens module and is used for controlling the tested sample module, the quantum probe module and the objective lens module to execute corresponding actions according to an input control instruction so as to realize positioning of an NV-color center in the quantum probe and quantum scanning magnetic imaging.
2. The nanomagnetic scanning imaging system of claim 1, wherein the quantum probe module comprises:
a quantum probe;
a quantum probe angular displacement stage; the angle of the quantum probe is adjusted, so that the lower surface of the quantum probe is parallel to the surface of the measured sample;
the quantum probe micrometer displacement table is used for roughly adjusting the position of the quantum probe so as to realize the rough alignment of the objective lens and the quantum probe;
the quantum probe angle displacement table controller is used for controlling the quantum probe angle displacement table;
and the quantum probe micron displacement table controller is used for controlling the quantum probe micron displacement table to realize movement in the x direction, the y direction and the z direction.
3. The nanomagnetic scanning imaging system of claim 2,
the rotation range of the quantum probe angle displacement table is +/-5 degrees, and the angular displacement precision is 25'.
4. The nanomagnetic scanning imaging system of claim 1, wherein the objective module comprises:
the objective lens is used for focusing the excitation light to the NV-color center to enable the excitation light to be polarized, and collecting red fluorescence emitted by the NV-color center;
the objective lens nanometer displacement platform is used for carrying out fine alignment and confocal scanning imaging on the quantum probe to drive the objective lens to move;
and the objective lens nano displacement platform controller is used for controlling the objective lens nano displacement platform.
5. The nanomagnetic scanning imaging system of claim 1, wherein the sample module under test comprises:
a sample to be tested;
the nano displacement table of the tested sample is used for moving the tested sample, finely adjusting the distance between the tested sample and the quantum probe and scanning and imaging the tested sample;
the measured sample angle displacement table is used for adjusting the angle of the measured sample so that the surface of the measured sample is parallel to the lower surface of the quantum probe;
the micrometer displacement table of the measured sample is used for moving the measured sample, playing a role in navigating a target area on the measured sample and roughly adjusting the distance between the measured sample and the quantum probe;
the controller of the measured sample nanometer displacement platform is used for controlling the measured sample nanometer displacement platform;
the controller of the measured sample angle displacement table is used for controlling the measured sample angle displacement table;
and the measured sample micron displacement table controller is used for controlling the measured sample micron displacement table.
6. A nanomagnetic scanning imaging method, which is applied to the nanomagnetic scanning imaging system according to any one of claims 1 to 5, and comprises:
roughly aligning the longitudinal distance between an objective lens and the quantum probe through a quantum probe micron displacement table;
fine alignment is carried out on the quantum probe through an objective lens nano displacement table;
focusing green laser with a preset wavelength transmitted by an excitation light path to an NV-color center in the quantum probe through the objective lens, and collecting red fluorescence emitted by the NV-color center;
counting the collected red fluorescence to judge whether the laser is focused on the quantum probe;
fine alignment is carried out on the quantum probe through an objective lens nano displacement table;
roughly adjusting the distance and the relative position between the measured sample and the quantum probe through a measured sample micrometer displacement table;
finely adjusting the distance and the relative position between the measured sample and the NV-color center in the quantum probe through a measured sample nanometer displacement table;
the quantum probe and the sample to be detected are kept parallel by adjusting the angular displacement table of the sample to be detected and the angular displacement table of the quantum probe;
and moving the nano displacement table of the detected sample to realize the scanning imaging of the detected sample.
7. The nanomagnetic scanning imaging method of claim 6, wherein the quantum probe angular displacement stage has a rotation range of ± 5 ° and an angular displacement precision of 25 ".
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