CN113942835A - Glass loading device - Google Patents
Glass loading device Download PDFInfo
- Publication number
- CN113942835A CN113942835A CN202111269221.5A CN202111269221A CN113942835A CN 113942835 A CN113942835 A CN 113942835A CN 202111269221 A CN202111269221 A CN 202111269221A CN 113942835 A CN113942835 A CN 113942835A
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- Prior art keywords
- glass
- sensor module
- position sensor
- accommodating space
- height sensor
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- 239000011521 glass Substances 0.000 title claims abstract description 124
- 238000000034 method Methods 0.000 claims abstract description 14
- 230000000712 assembly Effects 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
Landscapes
- Packaging Frangible Articles (AREA)
Abstract
The application provides a glass loading device, includes: the cartridge comprises N containing spaces, wherein the containing space at the bottom of the cartridge is defined as a first containing space, and the containing space at the top of the cartridge is defined as an Nth containing space; the height sensor module senses whether the glass deviates from a preset line in a first direction in the process of entering and exiting the first accommodating space; the position sensor module is used for sensing whether the glass deviates from a preset route in a second direction in the process of entering and exiting the first accommodating space; and the display terminal is used for receiving and displaying the sensing data of the height sensor module and the position sensor module and obtaining corresponding adjusting parameters according to the sensing data so as to adjust the glass to be positioned at the designated position. The glass loading device provided by the application can reduce the error of taking and placing glass by the mechanical arm, and avoid collision, scratch and the like.
Description
Technical Field
The application relates to the technical field of glass loading, in particular to a glass loading device.
Background
In the current liquid crystal panel factory, the cassette is used for loading glass in the front cutting process, and the cassette has the advantages of large glass loading amount, easy high-speed transportation, direct butt joint with a mechanical arm, small occupied equipment space and the like, and is widely used in the industry at present.
The manipulator arm is to the confirming of position is deposited to the card casket, what adopt is that one person operates, one gets the mode of data to two people, gets the data and adopts the square to go on, because of the inner space of card casket is little, personnel's operation is inconvenient, need personnel to lie on the port position of loading the card casket completely at some times and measure and get, the data error that personnel read is great, and same card casket position record finishes, the data that need to get are more, adopt pure artificial mode degree of accuracy not high, and inefficiency. For a liquid crystal panel factory, cassette point positions need to be retested regularly, an accurate and quick measurement method is not available, a large amount of labor cost is caused, measurement is performed twice, and if different personnel perform measurement, the picking and placing accuracy of a mechanical arm is greatly influenced by errors observed by the personnel (for example, the reading error of the personnel with different cassette point positions at the first layer is 2mm, the accumulated error of the machinery at the uppermost layer can reach 8-10mm when one cassette is calculated according to 28 layers, and picking and placing crashes are easily caused.
Disclosure of Invention
Therefore, the glass loading device can reduce the error of taking and placing glass by the mechanical arm, and avoid the problems of collision, scratching and the like.
The application provides a glass loading device, includes:
the cassette comprises N accommodating spaces; the N accommodating spaces are arranged in a stacked mode at intervals in the first direction; the glass is accommodated in the accommodating space; defining an accommodating space at the bottom of the cassette as a first accommodating space, and defining an accommodating space at the top of the cassette as an Nth accommodating space; wherein N is a positive integer and is greater than or equal to 2;
the height sensor module is arranged in the first accommodating space; in the process that the glass enters and exits the first accommodating space, the height sensor module senses whether the glass deviates from a preset line in the first direction;
the position sensor module is arranged in the first accommodating space; the position sensor module is used for sensing whether the glass deviates from a preset route in a second direction in the process of entering and exiting the first accommodating space; and
and the display terminal is used for receiving and displaying the sensing data of the height sensor module and the position sensor module and obtaining corresponding adjusting parameters according to the sensing data so as to adjust the glass to be positioned at the appointed position.
In an optional embodiment of the present application, the cassette further includes a housing and a plurality of support members, the plurality of support members are fixed on the housing to form N receiving spaces;
the shell also comprises at least one opening, the opening corresponds to at least one accommodating space, and the opening is used as an entrance for glass to enter and exit the accommodating space;
the shell also comprises two first side walls and a second side wall connected with the two first side walls; the opening is opposite to the second side wall; and
the height sensor module and the position sensor module are both fixed on the first side wall and/or the second side wall of the shell.
In an alternative embodiment of the present application, a portion of the glass near the opening is defined as a front end of the glass, a portion near the second sidewall is defined as a rear end of the glass, and a portion between the front end of the glass and the rear end of the glass is defined as a middle end of the glass; wherein the content of the first and second substances,
the height sensor module comprises at least one first height sensor group and a second height sensor group;
two sensors in the first height sensor group are respectively and oppositely arranged on the two first side walls, and two sensors in the second height sensor group are arranged on the second side walls;
the first height sensor group is used for sensing the distance from the front end or the middle end of the glass to two adjacent support components; and
the second height sensor group is used for sensing the distance from the rear end of the glass to two adjacent support assemblies.
In an optional embodiment of the present application, the position sensor module includes at least one first position sensor set and at least one second position sensor set;
two position sensors in the first position sensor group are respectively and oppositely arranged on the two first side walls, and two position sensors in the second position sensor group are respectively and oppositely arranged on the two first side walls; the first set of position sensors is adjacent the opening and the second set of position sensors is adjacent the second sidewall;
the first position sensor group is used for sensing the offset of the front end of the glass in a first direction relative to a preset line; and
the second position sensor group is used for sensing the offset of the rear end of the glass in the first direction relative to a preset line.
In an optional embodiment of the present application, the position sensor module further includes a third position sensor group;
the third position sensor group is arranged on the second side wall; and
two position sensors in the third position sensor group are used for sensing the offset of the glass in the second direction relative to a preset line.
In an alternative embodiment of the present application, the glass loading device further comprises:
and the power supply device is used for supplying power to the position sensor module and the height sensor module.
In an alternative embodiment of the present application, the display terminal is formed on the housing of the cassette and avoids the opening.
In an optional embodiment of the present application, the glass in the second accommodating space to the nth accommodating space is adjusted in position according to the adjustment parameter.
In an optional embodiment of the present application, a height sensor module and a position sensor module are also disposed in the nth accommodating space, and positions and numbers of the height sensor module and the position sensor module in the nth accommodating space are consistent with those of the height sensor module and the position sensor module in the first accommodating space;
a height sensor module and a position sensor module are also arranged in the Nth accommodating space;
the height sensor module and the position sensor module in the Nth accommodating space are used for sensing the position and the height of the glass accommodated in the Nth accommodating space so as to detect whether the glass in the Nth accommodating space deviates from a preset line, and further determine whether the glass from the second accommodating space to the Nth accommodating space is at a specified position.
In an optional embodiment of the present application, the number of the glasses accommodated in the first accommodating space is greater than or equal to 1, and the number of the first position sensor group, the second position sensor group and the first height sensor group is the same as the number of the glasses.
According to the glass loading device, the height sensor module and the position sensor module are arranged in the first accommodating space and the Nth accommodating space of the cassette, the visible display terminal is arranged on the shell of the cassette, and the height sensor module is used for sensing whether the glass deviates from a preset line in the first direction or not in the process that the glass enters and exits the first accommodating space; the position sensor module is used for sensing whether the glass deviates from a preset route in a second direction in the process of entering and exiting the first accommodating space; the display terminal is used for receiving and displaying sensing data (the measuring precision can reach 2 bits after a decimal point) of the height sensor module and the position sensor module, and obtaining corresponding adjusting parameters according to the sensing data so as to adjust the position of the glass in the accommodating space. Therefore, the glass loading device can accurately record the basic point positions of the mechanical arms, the adjustment parameter standard is unified, the problems of collision, scratch and the like caused by poor point position setting of the mechanical arms can be perfectly solved, the automatic conveying efficiency of the glass loading device is improved, and the productivity is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a perspective view of a glass loading device according to a preferred embodiment of the present application.
FIG. 2 is a side view in one direction of the glass loading device shown in FIG. 1.
FIG. 3 is a block schematic diagram of the glass loading device shown in FIG. 1.
FIG. 4 is a schematic view of the arrangement of the sensors in the first receiving space of the glass loading device shown in FIG. 3.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "upper", "lower", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
The present application may repeat reference numerals and/or letters in the various implementations, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various implementations and/or configurations discussed.
The height sensor module is used for sensing whether the glass deviates from a preset line in the first direction in the process of entering and exiting the first accommodating space; the position sensor module is used for sensing whether the glass deviates from a preset route in a second direction in the process of entering and exiting the first accommodating space; the display terminal is used for receiving and displaying the sensing data of the height sensor module and the position sensor module and obtaining corresponding adjusting parameters according to the sensing data so as to adjust the position of the glass in the accommodating space. Therefore, the glass loading device can accurately record the basic point positions of the mechanical arms, the adjustment parameter standard is unified, the problems of collision, scratch and the like caused by poor point position setting of the mechanical arms can be perfectly solved, the automatic conveying efficiency of the glass loading device is improved, and the productivity is improved.
Referring to fig. 1 to 4, a glass loading device 100 is provided according to a preferred embodiment of the present application. The glass loading device 100 is used for loading glass 200.
The glass loading device 100 includes a cassette 10, a height sensor module 201, a position sensor module 202, a display terminal 30, a power supply 40, and an electrical box 50.
The cassette 10 includes N receiving spaces, and the N receiving spaces are spaced and stacked in a first direction. The glass 200 is accommodated in the accommodating space. Wherein the first direction refers to a height direction of the cassette 10.
Wherein, the accommodating space at the bottom of the cartridge 10 is defined as a first accommodating space 12, and the accommodating space at the top of the cartridge 10 is defined as an Nth accommodating space 13; wherein N is a positive integer and is greater than or equal to 2.
The cassette 10 further includes a housing 11 and a plurality of supporting members 14, and the plurality of supporting members 14 are fixed on the housing 11 to form N receiving spaces.
The housing 11 further includes at least one opening (not shown) corresponding to at least one of the accommodating spaces, and the opening is used as an entrance for the glass 200 to enter or exit the accommodating space.
The housing 11 further includes two first sidewalls 111 and a second sidewall 112 connected to the two first sidewalls 111; the opening is opposite to the second side wall 112. The height sensor module 201 and the position sensor module 202 are both fixed on the first sidewall 111 and/or the second sidewall 112 of the housing 11.
Wherein, the height sensor module 201 is disposed in the first accommodating space 12; in the process of the glass 200 entering and exiting the first accommodating space 12, the height sensor module 201 senses whether the glass 200 deviates from a preset line in the first direction.
Wherein, the position sensor module 202 is disposed in the first accommodating space 12; the position sensor module 202 is used for sensing whether the glass 200 deviates from a preset route in a second direction in the process of entering and exiting the first accommodating space 12.
In an alternative embodiment of the present application, the portion of the glass 200 near the opening is defined as a front end of the glass 200, the portion near the second sidewall 112 is defined as a rear end of the glass 200, and the portion between the front end of the glass 200 and the rear end of the glass 200 is defined as a middle end of the glass 200.
Specifically, the height sensor module 201 includes at least a first height sensor group 21 and a second height sensor group 22. Two sensors of the first height sensor group 21 are respectively and oppositely arranged on the two first side walls 111, and two sensors of the second height sensor group 22 are arranged on the second side walls 112. The first height sensor group 21 is used for sensing the distance from the front end or middle end of the glass 200 to two adjacent support assemblies 14. The second height sensor group 22 is used for sensing the distance from the rear end of the glass 200 to two adjacent support assemblies 14.
Specifically, the position sensor module 202 includes at least a first position sensor group 23, at least a second position sensor group 24, and a third position sensor group 25. Two position sensors in the first position sensor group 23 are respectively and oppositely arranged on two of the first side walls 111, two sensors in the second position sensor group 24 are respectively and oppositely arranged on two of the first side walls 111, the first position sensor group 23 is close to the opening, the second position sensor group 24 is close to the second side wall 112, and the third position sensor group 25 is arranged on the second side wall 112. Wherein, the first position sensor group 23 is used for sensing the offset of the front end of the glass 200 in the first direction relative to the preset line, the second position sensor group 24 is used for sensing the offset of the rear end of the glass 200 in the first direction relative to the preset line, and two position sensors in the third position sensor group 25 are used for sensing the offset of the glass 200 in the second direction relative to the preset line.
In an alternative embodiment of the present application, the number of the glasses 200 accommodated in the first accommodating space 12 is greater than or equal to 1, and the number of the first position sensor groups 23, the second position sensor groups 24 and the first height sensor groups 21 is the same as the number of the glasses 200.
In an alternative embodiment of the present application, the glass 200 in the second accommodating space to the nth accommodating space is adjusted in position according to the adjustment parameter.
In an optional embodiment of the present application, the nth receiving space 13 is also provided with height sensor modules (not shown) and position sensor modules (not shown), and the positions and the number of the height sensor modules and the position sensor modules in the nth receiving space are consistent with the positions and the number of the height sensor modules 201 and the position sensor modules 202 in the first receiving space 12.
The height sensor module and the position sensor module in the nth accommodating space 13 are configured to sense the position and height of the glass 200 accommodated in the nth accommodating space 13, so as to detect whether the glass 200 in the nth accommodating space 13 deviates from a preset line, and further determine whether the glasses in the second accommodating space to the nth accommodating space are at a designated position.
The display terminal 30 is configured to receive and display sensing data of the height sensor module 201 and the position sensor module 202, and obtain corresponding adjustment parameters according to the sensing data, so as to adjust the glass 200 to be located at a specific position.
The display terminal 30 may be a display screen, a mobile phone, a computer, or the like. The sensing data can be displayed on the display terminal 30 in an enlarged manner as required, so that the operator can conveniently watch, take pictures and record the sensing data.
In an alternative embodiment of the present application, the display terminal 30 is formed on the housing 11 of the cassette 10 and avoids the opening. In other embodiments, the display terminal 30 may not be formed on the cassette 10, but may be separately provided from the cassette 10.
In an optional embodiment of the present application, the glass loading device further includes a power supply device 40 and an electrical box 50, the power supply device 40 is used for supplying power to the position sensor module 202 and the height sensor module 201, and the electrical box 50 is electrically connected to the power supply device 40 and is used for providing circuit support for the power supply device 40.
In an optional embodiment of the present application, the power supply device is a lithium battery, and the lithium battery can be continuously used for 12 hours when being fully charged each time, so as to meet the actual use requirement of one day.
According to the glass loading device, the height sensor module and the position sensor module are arranged in the first accommodating space and the Nth accommodating space of the cassette, the visible display terminal is arranged on the shell of the cassette, and the height sensor module is used for sensing whether the glass deviates from a preset line in the first direction or not in the process that the glass enters and exits the first accommodating space; the position sensor module is used for sensing whether the glass deviates from a preset route in a second direction in the process of entering and exiting the first accommodating space; the display terminal is used for receiving and displaying sensing data (the measuring precision can reach 2 bits after a decimal point) of the height sensor module and the position sensor module, and obtaining corresponding adjusting parameters according to the sensing data so as to adjust the position of the glass in the accommodating space. Therefore, the glass loading device can be used for accurately recording the basic point positions of the mechanical arms, the standard of the adjustment parameters is unified, the problems of collision, scratch and the like caused by poor point position setting of the mechanical arms can be perfectly solved, the automatic conveying efficiency of the glass loading device is improved, the productivity is improved, and the accuracy and the digital management of the basic point position recording of the cartridge can be effectively improved.
The glass loading device provided by the embodiment of the present application is described in detail above, and the principle and the embodiment of the present application are explained by applying specific examples herein, and the description of the above embodiments is only used to help understanding the technical solution and the core idea of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. A glass loading device, comprising:
the cassette comprises N accommodating spaces; the N accommodating spaces are arranged in a stacked mode at intervals in the first direction; the glass is accommodated in the accommodating space; defining an accommodating space at the bottom of the cassette as a first accommodating space, and defining an accommodating space at the top of the cassette as an Nth accommodating space; wherein N is a positive integer and is greater than or equal to 2;
the height sensor module is arranged in the first accommodating space; in the process that the glass enters and exits the first accommodating space, the height sensor module senses whether the glass deviates from a preset line in the first direction;
the position sensor module is arranged in the first accommodating space; the position sensor module is used for sensing whether the glass deviates from a preset route in a second direction or not in the process of entering and exiting the first accommodating space; and
and the display terminal is used for receiving and displaying the sensing data of the height sensor module and the position sensor module and obtaining corresponding adjusting parameters according to the sensing data so as to adjust the glass to be positioned at the appointed position.
2. The glass loading device of claim 1, wherein the cassette further comprises a housing and a plurality of support members secured within the housing to form N of the receiving spaces;
the shell also comprises at least one opening, the opening corresponds to at least one accommodating space, and the opening is used as an entrance for glass to enter and exit the accommodating space;
the shell also comprises two first side walls and a second side wall connected with the two first side walls; the opening is opposite to the second side wall; and
the height sensor module and the position sensor module are both fixed on the first side wall and/or the second side wall of the shell.
3. The glass loading device of claim 2, wherein the portion of the glass proximate the opening is defined as a front end of the glass, the portion proximate the second side wall is defined as a rear end of the glass, and the portion between the front end of the glass and the rear end of the glass is defined as a middle end of the glass; wherein the content of the first and second substances,
the height sensor module comprises at least one first height sensor group and a second height sensor group;
two sensors in the first height sensor group are respectively and oppositely arranged on the two first side walls, and two sensors in the second height sensor group are arranged on the second side walls;
the first height sensor group is used for sensing the distance from the front end or the middle end of the glass to two adjacent support components; and
the second height sensor group is used for sensing the distance from the rear end of the glass to two adjacent support assemblies.
4. The glass loading device of claim 3, wherein the position sensor module comprises at least a first position sensor set and at least a second position sensor set;
two position sensors in the first position sensor group are respectively and oppositely arranged on the two first side walls, and two position sensors in the second position sensor group are respectively and oppositely arranged on the two first side walls; the first set of position sensors is adjacent the opening and the second set of position sensors is adjacent the second sidewall;
the first position sensor group is used for sensing the offset of the front end of the glass in a first direction relative to a preset line; and
the second position sensor group is used for sensing the offset of the rear end of the glass in the first direction relative to a preset line.
5. The glass loading apparatus of claim 4, wherein the position sensor module further comprises a third position sensor set;
the third position sensor group is arranged on the second side wall; and
two position sensors in the third position sensor group are used for sensing the offset of the glass in the second direction relative to a preset line.
6. The glass loading device of claim 1, further comprising:
and the power supply device is used for supplying power to the position sensor module and the height sensor module.
7. The glass loading device of claim 2, wherein the display terminal is formed on the housing of the cassette and avoids the opening.
8. The glass loading device according to claim 1, wherein the glass in the second receiving space to the Nth receiving space is adjusted in position according to the adjustment parameter.
9. The glass loading device according to any one of claims 1 to 8, wherein a height sensor module and a position sensor module are also provided in the nth housing space, and the positions and the number of the height sensor modules and the position sensor modules in the nth housing space are the same as those of the height sensor modules and the position sensor modules in the first housing space;
a height sensor module and a position sensor module are also arranged in the Nth accommodating space;
the height sensor module and the position sensor module in the Nth accommodating space are used for sensing the position and the height of the glass accommodated in the Nth accommodating space so as to detect whether the glass in the Nth accommodating space deviates from a preset line, and further determine whether the glass from the second accommodating space to the Nth accommodating space is at a specified position.
10. The glass loading apparatus according to claim 4, wherein the number of the glasses housed in the first housing space is greater than or equal to 1, and the number of the first position sensor group, the second position sensor group, and the first height sensor group is the same as the number of the glasses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111269221.5A CN113942835A (en) | 2021-10-29 | 2021-10-29 | Glass loading device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111269221.5A CN113942835A (en) | 2021-10-29 | 2021-10-29 | Glass loading device |
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| CN113942835A true CN113942835A (en) | 2022-01-18 |
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| CN207129665U (en) * | 2017-06-03 | 2018-03-23 | 昆山龙腾光电有限公司 | Glass base plate transport device |
| CN112362004A (en) * | 2020-11-05 | 2021-02-12 | 惠科股份有限公司 | Cassette detection device and method and substrate processing production line |
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