CN113933948A - Lens group adjusting mechanism, adjustable optical system and photoetching equipment - Google Patents
Lens group adjusting mechanism, adjustable optical system and photoetching equipment Download PDFInfo
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- CN113933948A CN113933948A CN202010609690.6A CN202010609690A CN113933948A CN 113933948 A CN113933948 A CN 113933948A CN 202010609690 A CN202010609690 A CN 202010609690A CN 113933948 A CN113933948 A CN 113933948A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
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Abstract
The invention provides a lens group adjusting mechanism, an adjustable optical system and photoetching equipment, wherein a centering unit comprises a deformation region and a fixed region which are alternately arranged along the circumferential direction, the deformation region is connected with a lens group fixing unit, the fixed region is connected with a lens cone, the axial rigidity and the radial rigidity of the fixed region are both larger than those of the deformation region, so that the fixed region can better play roles of fixing and limiting, the axial rigidity of the deformation region is smaller than that of the deformation region in the radial direction, the relative movement between the lens cone and the lens group fixing unit in the axial direction and the relative fixation in the radial direction can be ensured, the radial displacement of the lens group fixing unit in the adjusting process is reduced, the radial crosstalk of the lens group fixing unit in the position adjusting process is reduced, and the horizontal mode of the lens group fixing unit is improved.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a lens group adjusting mechanism, an adjustable optical system and photoetching equipment.
Background
In the semiconductor device manufacturing process, a photolithography step using an exposure apparatus is indispensable. In the photolithography step, it is necessary to process a substrate material coated with a photosensitive material such as a photoresist, that is, to illuminate a pattern on a reticle through an illumination optical system and to transfer the pattern onto a semiconductor substrate through a projection optical system.
In recent years, as the degree of integration of semiconductor devices has become higher, the feature size of the devices has become smaller, and the precision requirement for pattern transfer has become higher. In the projection optical system of the exposure equipment of the advanced photoetching machine, the requirement of the preparation process is met by needing smaller and smaller wave phase difference and distortion, and meanwhile, in the exposure equipment of the projection optical system, the changes of the phase difference and the distortion caused by various environments and other factors can be easily compensated in real time, so that the accurate control of the exposure size is realized. To solve such problems, it is generally considered to provide one or more lenses with adjustable positions for compensation.
Generally, a cantilever-type centering spring is generally adopted as a centering unit type of the movable lens group, but the radial rigidity of the cantilever-type centering spring is insufficient, so that the mode of the movable lens group is reduced, and the horizontal displacement of the movable lens group is increased under the random vibration condition generated when the objective lens moves, thereby causing the deterioration of the image plane stability index. In addition, in the vertical adjustment process of the movable lens group, the contact part of the displacement adjusting unit and the lens group fixing unit moves horizontally relatively, so that the lens group fixing unit is subjected to horizontal friction force, and when the horizontal rigidity of the cantilever type centering reed is insufficient, the lens group fixing unit moves horizontally under the action of the horizontal friction force, and radial crosstalk is introduced.
Disclosure of Invention
The present invention provides a lens group adjusting mechanism, an adjustable optical system and a lithographic apparatus, so as to reduce horizontal crosstalk of the adjustable lens group during position adjustment and improve horizontal mode of the adjustable lens group.
In order to achieve the above object, the present invention provides a lens group adjusting mechanism, comprising:
a lens barrel;
a lens group fixing unit disposed in the lens barrel;
the centering unit is arranged between the lens barrel and the lens group fixing unit in a surrounding mode to center the lens group fixing unit, the centering unit comprises deformation areas and fixing areas which are arranged alternately along the circumferential direction, the deformation areas are connected with the lens group fixing unit, the fixing areas are connected with the lens barrel, the rigidity of the fixing areas in the axial direction and the radial direction is larger than the rigidity of the deformation areas in the axial direction and the radial direction, and the rigidity of the deformation areas in the axial direction is smaller than the rigidity of the deformation areas in the radial direction.
Optionally, the centering unit includes a circular ring reed, the radial width of the fixed region is equal to the radial width of the deformation region, and the axial thickness of the deformation region is smaller than the axial thickness of the fixed region.
Optionally, the centering unit is made of a material with an elastic modulus of more than 100000N/mm2Is made of the material of (1).
Optionally, the method further includes:
the lens group fixing unit comprises a plurality of displacement adjusting units, a plurality of driving units and a plurality of lens group fixing units, wherein the displacement adjusting units are arranged along the circumferential direction of the lens cone and comprise rotating ends, first movable ends and second movable ends, the rotating ends are rotatably arranged on the lens cone, the first movable ends and the second movable ends are respectively connected with a driving device and the lens group fixing unit, the first movable ends and the second movable ends can rotate around the rotating ends so as to convert radial driving force provided by the driving device into axial displacement of the lens group fixing unit, and the axial displacement of the first movable ends and the radial displacement of the second movable ends are absorbed in a deformation and/or friction mode.
Optionally, the number of the displacement adjusting units is at least three, the at least three displacement adjusting units are uniformly arranged along the circumferential direction of the lens barrel, and the lens group fixing unit axially translates when radial driving forces provided by driving devices connected to each displacement adjusting unit are the same; when the radial driving force provided by the driving equipment connected with at least two displacement adjusting units is different, the lens group fixing unit inclines along the axial direction.
Optionally, the first movable end is connected to the driving device through a first flexible hinge, and the first flexible hinge is flexibly and rigidly connected to the driving device in the axial direction and the radial direction, respectively; the second movable end is connected with the lens group fixing unit through a second flexible hinge, and the second flexible hinge is respectively and rigidly connected and flexibly connected with the lens group fixing unit in the axial direction and the radial direction; when the driving device outputs a radial driving force, the first flexible hinge deforms along the axial direction, and the second flexible hinge deforms along the radial direction.
Optionally, the first flexible hinge, the second flexible hinge and the displacement adjusting unit are of an integrated structure.
Optionally, the second movable end is in contact with the lens group fixing unit through a driving ball, when the driving device outputs a radial driving force, the output end of the driving device slides axially relative to the first movable end, and the driving ball slides and/or rolls along the radial direction.
Optionally, the first movable end is in contact with the driving device through a first driving pin, the first driving pin is arranged in the displacement adjusting unit, at least part of the surface of the first driving pin is exposed out of the displacement adjusting unit, and the output end of the driving device slides on the surface of the first driving pin exposed out of the displacement adjusting unit; and/or the presence of a gas in the gas,
the second movable end is in contact with the lens group fixing unit through a second driving pin, the second driving pin is arranged in the lens group fixing unit, at least part of the surface of the second driving pin is exposed out of the lens group fixing unit, and the driving ball head slides and/or rolls on the surface of the second driving pin exposed out of the lens group fixing unit.
Optionally, the rotation end is rigidly connected to the lens barrel through a flexible bearing.
Optionally, the displacement adjusting unit is a lever structure, two ends of the lever structure are the first movable end and the second movable end, and at least a partial region between the two ends of the lever structure is used as the rotating end.
Optionally, the cross section of the lever structure along the axial direction is a right triangle.
Optionally, the centering unit is made of a material with an elastic modulus of more than 100000N/mm2Is made of the material of (1).
Optionally, the driving device is a linear motor or a fine tuning screw structure.
The present invention also provides an adjustable optical system, comprising:
a lens barrel;
a lens group fixing unit disposed in the lens barrel;
a movable lens group disposed on the lens group fixing unit;
the centering unit is arranged between the lens barrel and the lens group fixing unit in a surrounding mode to center the lens group fixing unit, the centering unit comprises deformation areas and fixing areas which are arranged alternately along the circumferential direction, the deformation areas are connected with the lens group fixing unit, the fixing areas are connected with the lens barrel, the rigidity of the fixing areas in the axial direction and the radial direction is larger than the rigidity of the deformation areas in the axial direction and the radial direction, and the rigidity of the deformation areas in the axial direction is smaller than the rigidity of the deformation areas in the radial direction.
The invention also provides a lithographic apparatus comprising the adjustable optical system.
The lens group adjusting mechanism, the adjustable optical system and the photoetching equipment provided by the invention have the following beneficial effects:
1) the centering unit comprises deformation regions and fixing regions which are alternately arranged along the circumferential direction, the deformation regions are connected with the lens group fixing unit, the fixing regions are connected with the lens cone, the axial rigidity and the radial rigidity of the fixing regions are respectively greater than the axial rigidity and the radial rigidity of the deformation regions, so that the fixing regions can better play roles in fixing and limiting, the axial rigidity of the deformation regions is less than the radial rigidity of the deformation regions, the lens cone and the lens group fixing unit can be ensured to relatively move in the axial direction and relatively fix in the radial direction, the radial displacement of the lens group fixing unit in the adjusting process is reduced, the radial crosstalk of the lens group fixing unit during position adjustment is reduced, and the horizontal mode of the lens group fixing unit is improved;
2) radial crosstalk in the process of adjusting the lens group can be further reduced through the displacement adjusting unit, and the dynamic characteristic of the lens group adjusting mechanism is improved;
3) the driving device can be arranged in the radial direction, so that the axial space is saved, the layout and the maintenance are convenient, the driving device can be replaced on line, and the downtime is saved.
Drawings
Fig. 1 is a schematic view of a lens group adjusting mechanism according to an embodiment of the present invention;
fig. 2 is another schematic view of a lens group adjusting mechanism according to an embodiment of the present invention;
fig. 3 is a schematic cross-sectional view of a lens group adjusting mechanism provided in an embodiment of the present invention, which is cut along an axial direction;
fig. 4 is a schematic cross-sectional view of a second lens group adjusting mechanism provided in the second embodiment of the present invention, which is cut along an axial direction;
wherein the reference numerals are:
000-movable mirror group; 100-a lens barrel; 110-a fixed support; 200-a lens group fixing unit; 300-a centering unit; 301-deformation zone; 302-a fixation zone; 400-a displacement adjustment unit; 410-a first flexible hinge; 420-a second flexible hinge; 430-a compliant bearing; 440-a first drive pin; 450-a drive bulb; 460-a second drive pin; 500-a drive device; 510-a lock nut; 520-a motor support; 600-a displacement sensor;
a-a first movable end; b-a second movable end; c-a rotation end.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
Fig. 1 and 2 are schematic diagrams of the optical lens group adjusting mechanism provided in this embodiment, and fig. 3 is a schematic cross-sectional diagram of the optical lens group adjusting mechanism provided in this embodiment cut along an axial direction. With reference to fig. 1, 2 and 3, the lens group adjusting mechanism includes:
a lens barrel 100;
a lens group fixing unit 200 disposed in the lens barrel 100;
the centering unit 300 is circumferentially arranged between the lens barrel 100 and the lens group fixing unit 200 to center the lens group fixing unit 200, the centering unit 300 includes deformation regions 301 and fixing regions 302 alternately arranged along the circumferential direction, the deformation regions 301 are connected with the lens group fixing unit 200, the fixing regions 302 are connected with the lens barrel 100, the axial and radial rigidity of the fixing regions 302 is greater than that of the deformation regions 301, and the axial rigidity of the deformation regions 301 is less than that of the radial rigidity.
Specifically, as shown in fig. 1 and fig. 2, the lens barrel 100 is a supporting and fixing component of the entire lens group adjusting mechanism, the axial direction in this embodiment refers to the central line direction of the lens barrel 100, that is, the optical axis direction of the movable lens group 000, and the radial direction refers to the direction perpendicular to the central line direction of the lens barrel 100. The lens group fixing unit 200 may be a lens holder for fixing the movable lens group 000, and the movable lens group 000 may be one optical lens or a combination of several axially overlapped optical lenses. The lens group fixing unit 200 is fixed in the lens barrel 100 by the centering unit 300, thereby achieving the self-centering, and the center line of the lens group fixing unit 200 coincides with the center line of the lens barrel 100, thereby defining an optical axis.
With continued reference to fig. 1 and 2, the centering unit 300 is a flat circular ring-shaped spring plate, which includes a deformation region 301 and a fixing region 302 alternately disposed. The annular widths of the deformation area 301 and the fixed area 302 in the radial direction are equal, so that the deformation area 301 and the fixed area 302 both have greater rigidity in the radial direction; however, the thickness of the deformation zone 301 in the axial direction is smaller than the thickness of the fixation zone 302 in the axial direction, so that the stiffness of the deformation zone 301 in the axial direction is smaller than the stiffness thereof in the radial direction. It should be understood that, since the deformation region 301 is thinner, the stiffness of the fixing region 302 in the radial direction is also greater than that of the deformation region 301 in the radial direction. In this embodiment, the deformation region 301 is rigidly connected to the lens group fixing unit 200, and the fixing region 302 is rigidly connected to the lens barrel 100. Specifically, the axial rigidity of the deformation region 301 is small, so that axial displacement between the lens barrel 100 and the lens group fixing unit 200 can be ensured; the deformation region 301 has a relatively high radial stiffness, so that the lens barrel 100 and the lens group fixing unit 200 are ensured to be relatively fixed in the radial position, and the radial displacement of the lens group fixing unit 200 in the adjustment process is reduced, thereby reducing the radial crosstalk of the lens group fixing unit 200 during position adjustment, and improving the horizontal mode of the lens group fixing unit 200 (i.e., improving the horizontal mode of the movable lens fixed by the lens group fixing unit 200). The fixing region 302 is configured to fix the lens group fixing unit 200 to the lens barrel 100, and perform a mechanical limiting function on the lens group fixing unit 200, in this embodiment, the axial and radial stiffness of the fixing region 302 is greater than the axial and radial stiffness of the deformation region 301, so that the fixing region 302 can better perform a fixing and limiting function on the lens group fixing unit 200.
In this embodiment, the centering unit 300 is a unitary structure, that is, the deformation region 301 and the fixing region 302 are integrally formed, but the thickness of the deformation region 301 is smaller than that of the fixing region 302. Of course, as an alternative embodiment, the deformation region 301 and the fixing region 302 may not be integrally formed, but may be separately prepared and then connected together, and the invention is not limited thereto.
Further, the deformation region 301 is fixed on the lens group fixing unit 200 by a fixing screw, and the fixing region 302 is also fixed on the lens barrel 100 by a fixing screw 12, and of course, the fixing manner of the deformation region 301 and the fixing region 302 is not limited thereto, and may be through a pin hole fit or the like.
As shown in fig. 1 and 2, the lens group adjusting mechanism further includes a plurality of displacement adjusting units 400, which are disposed along the circumferential direction of the lens barrel 100 and include a rotation end C, a first movable end a, and a second movable end B, the rotation end C is rotatably disposed on the lens barrel 100, the first movable end a and the second movable end B are respectively connected to a driving device 500 and the lens group fixing unit 200, and the first movable end a and the second movable end B can rotate around the rotation end C to convert the radial driving force provided by the driving device 500 into the axial displacement of the lens group fixing unit 200, and absorb the axial displacement of the first movable end a and the radial displacement of the second movable end B through deformation and/or friction.
Further, the displacement adjusting units 400 are circumferentially disposed along the lens barrel 100, and can convert the radial driving force provided by the driving device 500 into the axial displacement of the lens group fixing unit 200, and at this time, the lens group fixing unit 200 can drive the movable lens group 000 to axially move together, thereby achieving the adjustment of the axial displacement of the movable lens group 000. As shown in fig. 3, the cross section of the displacement adjusting unit 400 along the axial direction is a right triangle, the area of the right triangle near the right angle is used as the rotating end C of the displacement adjusting unit 400, and the areas near two acute angles are respectively used as the first movable end a and the second movable end B, so that the displacement adjusting unit 400 can be regarded as a lever structure, and when the rotating end C of the displacement adjusting unit 400 is rotatably connected to a structure, the first movable end a and the second movable end B can rotate around the rotating end C.
It is understood that the displacement adjusting unit 400 is not limited to a lever structure with a triangular cross section, but may be other lever structures suitable for being fixed on the lens barrel 100, where two ends of the lever structure are the first movable end a and the second movable end B, and at least a partial region between the two ends of the lever structure is the rotating end C; in addition, in this embodiment, the first movable end a is connected to the driving device 500, the first movable end a is connected to the lens group fixing unit 200 (i.e. is a driven member), a portion between the first movable end a and the rotating end C can be regarded as a driving arm, and a portion between the first movable end a and the rotating end C can be regarded as a transmission arm, and the transmission ratio of the displacement adjusting unit 400 can be adjusted by adjusting the relationship between the driving arm and the transmission arm, that is, the transmission ratio of the displacement adjusting unit 400 can be adjusted by adjusting the shape and size of the displacement adjusting unit 400.
Further, the displacement adjusting unit 400 is rigidly connected to the lens barrel 100 through a fixing bracket 110, the rotating end C is rotatably disposed on the lens barrel 100 through a flexible bearing 430, a fixed end of the flexible bearing 430 is rigidly connected to the fixing bracket 110, a moving end is rigidly connected to the displacement adjusting unit 400, and when the flexible bearing 430 is stressed and deformed, the rotating end C can rotate. It should be understood that, in order to fix the displacement-adjusting unit 400 to the fixing bracket 110, in the present embodiment, a groove is cut between the mounting position of the displacement-adjusting unit 400 and the flexible bearing 430, the fixing bracket 110 is inserted into the groove, and a fastening member is inserted from the outside of the displacement-adjusting unit 400 through the groove and the portion of the fixing bracket 110 inserted into the groove so as to rigidly connect the displacement-adjusting unit 400 to the lens barrel 100. Of course, the connection manner of the displacement adjusting unit 400 and the lens barrel 100 is not limited thereto, and is not illustrated here.
The first movable end a is connected to the driving device 500 through a first flexible hinge 410, and the first flexible hinge 410 is flexibly and rigidly connected to the driving device 500 in the axial direction and the radial direction, respectively, so that the first flexible hinge 410 is flexible in the axial direction, is easy to deform, is rigid in the radial direction, and is not easy to deform, thereby achieving radial transmission, and absorbing the displacement of the displacement adjusting unit 400 relative to the driving device 500 in the axial direction through deformation, so that the position of the connection point of the first movable end a and the driving device 500 in the axial direction is kept unchanged. The second movable end B is connected to the lens group fixing unit 200 through a second flexible hinge 420, and the second flexible hinge 420 is rigidly and flexibly connected to the lens group fixing unit 200 in the axial direction and the radial direction, respectively, so that the second flexible hinge 420 is flexible in the radial direction, is easy to deform, is rigid in the axial direction, and is not easy to deform, thereby achieving axial transmission, and absorbing the position change of the displacement adjusting unit 400 in the radial direction with respect to the lens group fixing unit 200 through deformation, so that the position of the connection point of the second movable end B and the lens group fixing unit 200 in the radial direction is kept unchanged. It can be seen that the first flexible hinge 410 is radially driving, axially decoupling for the first movable end a; the second flexible hinge 420 axially couples and decouples the second movable end B, so that the function of converting the radial driving force into the axial displacement by the displacement adjusting unit 400 is accurately realized.
Specifically, when the driving device 500 outputs a radial driving force, the first flexible hinge 410 receives the radial driving force, the first movable end a and the second movable end B rotate around the rotation end C, and the second movable end B is driven to move axially, and since the second movable end B is connected to the lens group fixing unit 200, the lens group fixing unit 200 also moves axially, so that the radial driving force is converted into an axial displacement of the lens group fixing unit 200. Meanwhile, when the displacement adjusting unit 400 rotates (counterclockwise when providing a radial driving force), the first movable end a moves downward and rightward (downward is an axial displacement, and rightward is a radial displacement) relative to the output end of the driving device 500, and the output end of the driving device 500 is generally rigid and cannot be bent, so that the first flexible hinge 410 deforms in the axial direction to absorb the axial displacement, thereby achieving radial transmission and axial decoupling of the first movable end a. The second movable end B moves upward and leftward (upward is axial displacement, and leftward is radial displacement) relative to the output end of the driving device 500, and the lens group fixing unit 200 is rigid and cannot deform, so that the second flexible hinge 420 deforms in the radial direction to absorb the radial displacement, thereby achieving axial transmission and radial decoupling of the second movable end B.
It can be seen that, since the displacement adjusting unit 400 can absorb the radial displacement output by the driving device 500 when adjusting the position of the lens group fixing unit 200, only the axial displacement is converted, the radial crosstalk in the lens group adjusting process can be further reduced by the displacement adjusting unit 400, and the dynamic characteristic of the lens group adjusting mechanism is improved; and the driving device 500 can be arranged radially, so that the axial space is saved, the layout and the maintenance are convenient, the driving device can be replaced on line, and the downtime is saved.
In this embodiment, the first flexible hinge 410 and the second flexible hinge 420 are integrated with the displacement adjusting unit 400, so as to simplify the structure, the occupied space and the mass of the displacement adjusting unit 400. Specifically, the first flexible hinge 410 is formed by cutting a radially extending slot at the first movable end a, and the shape and size of the slot can match those of the output end of the driving device 500; a protrusion is disposed on the lens group fixing unit 200, the second flexible hinge 420 is formed by cutting a groove extending along the axial direction at the second movable end B, and the shape and size of the groove opening are matched with those of the protrusion of the lens group fixing unit 200. As an alternative embodiment, the first flexible hinge 410 and the second flexible hinge 420 and the displacement adjusting unit 400 may not be an integral structure, but may be a combination of separate structures, and the present invention is not limited thereto.
In this embodiment, the displacement adjusting unit 400 is connected to the lens group fixing unit 200, rather than directly contacting the movable lens group 000, so that the position of the movable lens group 000 in the radial direction can be further limited.
Further, in this embodiment, the displacement adjusting units 400 have 3, 3 displacement adjusting units 400 are uniformly arranged along the circumferential direction of the lens barrel 100, and when the radial driving force provided by the driving device 500 connected to each displacement adjusting unit 400 is the same, the lens group fixing unit 200 can move in parallel along the axial direction to change the axial position between the lens barrel 100 and the movable lens group 000; when the radial driving forces provided by the driving devices 500 connected to at least two of the displacement adjusting units 400 are different, the lens group fixing unit 200 can rotate around the axial direction, so as to change the tilt angle between the lens barrel 100 and the movable lens group 000 along the axial direction.
Of course, the number of the displacement adjusting units 400 in the present invention is not limited to 3, and may be 4, 5, or 6, etc.; the displacement adjusting units 400 are not limited to be uniformly arranged along the circumferential direction of the lens barrel 100, and in the occasion with low precision requirement, the displacement adjusting units 400 are not limited to be non-uniformly arranged along the circumferential direction of the lens barrel 100.
In this embodiment, the elastic modulus of the centering unit 300 and the elastic modulus of the displacement adjusting unit 400 are both larger than 100000N/mm2Is made of the material of (1). For example, the lens group adjusting mechanism is made of stainless steel, titanium alloy, beryllium bronze and other materials which have the characteristics of high elastic modulus and high tensile strength, and the lens group adjusting mechanism can be improved under the condition of the same structureThe rigidity of the adjusting mechanism improves the structural mode, the fatigue strength of the material with high tensile strength is high, the adjusting mechanism of the lens group can be allowed to have larger deformation, and the adjusting stroke of the adjusting mechanism of the lens group is improved.
As shown in fig. 2, the lens group adjusting mechanism may further include displacement sensors 600, the displacement sensors 600 are non-contact displacement sensors, and the displacement sensors 600 may be uniformly fixed on the outer side of the lens barrel 100 along the optical axis by fixing screws. The displacement sensor 600 is used to measure the relative displacement of the movable mirror group 000 and, for example, the fixed mirror group, so that the axial displacement of the movable mirror group 000 can be detected. The displacement sensor 600 further has an origin detection function of detecting an origin, and by reading the origin position, the axial absolute position of the movable mirror group 000 can be obtained.
Further, in this embodiment, the driving device 500 is a linear motor, and the linear motor is disposed along a radial direction, so that an axial space can be saved and a layout is facilitated. The linear motor is fixed outside the lens barrel 100 by the motor bracket 520 and the lock nut 510, so that the linear motor can be more conveniently repaired and replaced. The linear motor is rigidly connected to the motor bracket 520 through a thread, so that the linear motor has rigidity in the radial direction, which is convenient for stably providing a radial driving force, and improves the radial mode, thereby improving the dynamic response of the lens group fixing unit 200. As an alternative embodiment, the driving device 500 may also be a driving device 500 such as a fine adjustment screw structure.
Based on this, the present embodiment further provides an adjustable optical system, including:
a lens barrel 100;
a lens group fixing unit 200 disposed in the lens barrel 100;
the centering unit 300 is circumferentially arranged between the lens barrel 100 and the lens group fixing unit 200 to center the lens group fixing unit 200, the centering unit 300 includes deformation regions 301 and fixing regions 302 alternately arranged along the circumferential direction, the deformation regions 301 are connected with the lens group fixing unit 200, the fixing regions 302 are connected with the lens barrel 100, the axial and radial rigidity of the fixing regions 302 is greater than that of the deformation regions 301, and the axial rigidity of the deformation regions 301 is less than that of the radial rigidity.
It should be understood that the adjustable optical system in the present embodiment may further include the displacement adjusting unit 400.
Further, the present embodiment also provides a lithographic apparatus comprising the adjustable optical system.
Example two
Fig. 4 is a schematic cross-sectional view of the optical lens adjusting mechanism provided in the second embodiment taken along the axial direction. Referring to fig. 1, 2 and 4, the difference from the first embodiment is that in the present embodiment, the second movable end B of the displacement adjusting unit 400 is in contact with the lens group fixing unit 200 through a driving knob 450, when the driving device 500 outputs a radial driving force, the output end of the driving device 500 slides axially relative to the first movable end a to absorb the axial displacement of the first movable end a, and the driving knob 450 slides and/or rolls radially to absorb the radial displacement of the second movable end B.
Further, the first movable end a is in contact with the driving device 500 through a first driving pin 440, the first driving pin 440 is disposed in the displacement adjustment unit 400 and has an end exposed out of the displacement adjustment unit 400, and the output end of the driving device 500 slides on a surface of the first driving pin 440 exposed out of the end of the displacement adjustment unit 400. The second movable end B contacts the lens group fixing unit 200 through a second driving pin 460, the second driving pin 460 is disposed in the lens group fixing unit 200 and has an end exposed out of the lens group fixing unit 200, and the driving ball 450 slides and/or rolls on a surface of the second driving pin 460 exposed out of the end of the lens group fixing unit 200.
Specifically, when the driving device 500 outputs a radial driving force, the first driving pin 440 receives the radial driving force, the first movable end a and the second movable end B rotate around the rotation end C, and the second movable end B is driven to move axially, and since the second movable end B is connected to the lens group fixing unit 200, the lens group fixing unit 200 also moves axially, so that the radial driving force is converted into an axial displacement of the lens group fixing unit 200. Meanwhile, when the displacement adjusting unit 400 rotates (counterclockwise when providing a radial driving force), the first movable end a moves downward and rightward (downward is an axial displacement, and rightward is a radial displacement) relative to the output end of the driving device 500, and the output end of the driving device 500 is generally rigid and cannot be bent, so that the output end of the driving device 500 slides upward on the surface of the end of the first driving pin 440 to absorb the axial displacement, thereby achieving radial transmission and axial decoupling of the first movable end a. The second movable end B moves upward and leftward (upward is axial displacement, and leftward is radial displacement) relative to the output end of the driving device 500, and the lens group fixing unit 200 is rigid and cannot deform, so that the driving ball 450 slides and/or rolls in the radial direction to absorb the radial displacement, thereby achieving axial transmission and radial decoupling of the second movable end B.
In this embodiment, the first driving pin 440 and the second driving pin 460 are both T-shaped, and the first driving pin 440 and the second driving pin 460 are both exposed at ends with larger areas, so as to increase the friction area.
It should be understood that the first driving pin 440 and the second driving pin 460 in this embodiment are for providing rigid contact, and the first driving pin 440 and the second driving pin 460 may be omitted when the rigidity of the material of the lens group fixing unit 200 and the displacement adjusting unit 400 is large.
Based on this, the present embodiment further provides an adjustable optical system, including:
a lens barrel 100;
a lens group fixing unit 200 disposed in the lens barrel 100;
a movable lens group 000 disposed on the lens group fixing unit 200;
the centering unit 300 is circumferentially arranged between the lens barrel 100 and the lens group fixing unit 200 to center the lens group fixing unit 200, the centering unit 300 includes deformation regions 301 and fixing regions 302 alternately arranged along the circumferential direction, the deformation regions 301 are connected with the lens group fixing unit 200, the fixing regions 302 are connected with the lens barrel 100, the axial and radial rigidity of the fixing regions 302 is greater than that of the deformation regions 301, and the axial rigidity of the deformation regions 301 is less than that of the radial rigidity.
It is understood that, in the present embodiment, the adjustable optical system may further include the displacement adjusting unit 400.
Further, the present embodiment also provides a lithographic apparatus comprising the adjustable optical system.
In summary, in the lens group adjusting mechanism, the adjustable optical system and the lithographic apparatus provided in this embodiment, the centering unit includes the deformation regions and the fixing regions alternately arranged along the circumferential direction, the deformation regions are connected to the lens group fixing unit, the fixing regions are connected to the lens barrel, and the axial and radial rigidities of the fixing regions are greater than those of the deformation regions, so that the fixing regions can better perform fixing and limiting functions, while the axial rigidities of the deformation regions are less than those of the deformation regions in the radial direction, thereby ensuring that the lens barrel and the lens group fixing unit can relatively move in the axial direction and relatively fix in the radial direction, and reducing the radial displacement of the lens group fixing unit in the adjustment process, thereby reducing the radial crosstalk of the lens group fixing unit during position adjustment, and improving the horizontal mode of the lens group fixing unit; radial crosstalk in the process of adjusting the lens group can be further reduced through the displacement adjusting unit, and the dynamic characteristic of the lens group adjusting mechanism is improved; the driving device can be arranged in the radial direction, so that the axial space is saved, the layout and the maintenance are convenient, the driving device can be replaced on line, and the downtime is saved.
It should be noted that, in the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.
It should be noted that, although the present invention has been described with reference to the preferred embodiments, the above embodiments are not intended to limit the present invention. It will be apparent to those skilled in the art from this disclosure that many changes and modifications can be made, or equivalents modified, in the embodiments of the invention without departing from the scope of the invention. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the protection scope of the technical solution of the present invention, unless the content of the technical solution of the present invention is departed from.
It should be further understood that the terms "first," "second," "third," and the like in the description are used for distinguishing between various components, elements, steps, and the like, and are not intended to imply a logical or sequential relationship between various components, elements, steps, or the like, unless otherwise indicated or indicated.
It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to limit the scope of the present invention. It must be noted that, as used herein and in the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. For example, reference to "a step" or "an apparatus" means a reference to one or more steps or apparatuses and may include sub-steps as well as sub-apparatuses. All conjunctions used should be understood in the broadest sense. And, the word "or" should be understood to have the definition of a logical "or" rather than the definition of a logical "exclusive or" unless the context clearly dictates otherwise. Further, implementation of the methods and/or apparatus of embodiments of the present invention may include performing the selected task manually, automatically, or in combination.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (16)
1. A lens group adjusting mechanism is characterized by comprising:
a lens barrel;
a lens group fixing unit disposed in the lens barrel;
the centering unit is arranged between the lens barrel and the lens group fixing unit in a surrounding mode to center the lens group fixing unit, the centering unit comprises deformation areas and fixing areas which are arranged alternately along the circumferential direction, the deformation areas are connected with the lens group fixing unit, the fixing areas are connected with the lens barrel, the rigidity of the fixing areas in the axial direction and the radial direction is larger than the rigidity of the deformation areas in the axial direction and the radial direction, and the rigidity of the deformation areas in the axial direction is smaller than the rigidity of the deformation areas in the radial direction.
2. The mirror group adjusting mechanism according to claim 1, wherein the centering unit includes a circular ring-shaped reed, the annular width of the fixing section and the annular width of the deformable section in the radial direction are equal, and the thickness of the deformable section in the axial direction is smaller than the thickness of the fixing section in the axial direction.
3. The mirror group adjusting mechanism as claimed in claim 1 or 2, wherein the centering unit is composed of an elastic modulus of more than 100000N/mm2Is made of the material of (1).
4. The mechanism for adjusting a lens group as set forth in claim 1, further comprising:
the lens group fixing unit comprises a plurality of displacement adjusting units, a plurality of driving units and a plurality of lens group fixing units, wherein the displacement adjusting units are arranged along the circumferential direction of the lens cone and comprise rotating ends, first movable ends and second movable ends, the rotating ends are rotatably arranged on the lens cone, the first movable ends and the second movable ends are respectively connected with a driving device and the lens group fixing unit, the first movable ends and the second movable ends can rotate around the rotating ends so as to convert radial driving force provided by the driving device into axial displacement of the lens group fixing unit, and the axial displacement of the first movable ends and the radial displacement of the second movable ends are absorbed in a deformation and/or friction mode.
5. The mechanism for adjusting a lens group according to claim 4, wherein the number of the displacement adjusting units is at least three, at least three of the displacement adjusting units are uniformly arranged along the circumference of the lens barrel, and the lens group fixing unit axially translates when the radial driving force provided by the driving device connected to each of the displacement adjusting units is the same; when the radial driving force provided by the driving equipment connected with at least two displacement adjusting units is different, the lens group fixing unit inclines along the axial direction.
6. The mirror group adjustment mechanism of claim 4, wherein the first movable end is connected to the actuating device by a first flexible hinge that is flexibly and rigidly connected to the actuating device in axial and radial directions, respectively; the second movable end is connected with the lens group fixing unit through a second flexible hinge, and the second flexible hinge is respectively and rigidly connected and flexibly connected with the lens group fixing unit in the axial direction and the radial direction; when the driving device outputs a radial driving force, the first flexible hinge deforms along the axial direction, and the second flexible hinge deforms along the radial direction.
7. The mechanism of claim 6, wherein said first flexible hinge, said second flexible hinge and said displacement adjustment unit are an integral structure.
8. The mirror group adjusting mechanism according to claim 2, wherein the second movable end is in contact with the mirror group fixing unit through a driving ball, and when the driving device outputs a radial driving force, an output end of the driving device slides in an axial direction with respect to the first movable end, and the driving ball slides and/or rolls in a radial direction.
9. The mirror group adjustment mechanism according to claim 8, wherein the first movable end is in contact with the driving device through a first driving pin, the first driving pin is disposed in the displacement adjustment unit and at least a part of a surface thereof is exposed outside the displacement adjustment unit, and an output end of the driving device slides on a surface of the first driving pin exposed outside the displacement adjustment unit; and/or the presence of a gas in the gas,
the second movable end is in contact with the lens group fixing unit through a second driving pin, the second driving pin is arranged in the lens group fixing unit, at least part of the surface of the second driving pin is exposed out of the lens group fixing unit, and the driving ball head slides and/or rolls on the surface of the second driving pin exposed out of the lens group fixing unit.
10. The mirror group adjustment mechanism according to any one of claims 2 to 9, wherein the rotating end is rigidly connected to the lens barrel by a flexible bearing.
11. The mirror group adjusting mechanism according to any one of claims 2 to 9, wherein the displacement adjusting unit is a lever structure, both ends of the lever structure are the first movable end and the second movable end, respectively, and at least a partial region between both ends of the lever structure serves as the rotating end.
12. The mirror group adjustment mechanism as claimed in claim 11, wherein the lever structure has a right triangle-shaped cross section in the axial direction.
13. The mirror group adjusting mechanism as claimed in claims 2 to 9, wherein the centering unit is made of elastic modulus larger than 100000N/mm2Is made of the material of (1).
14. The mirror group adjustment mechanism of claim 1, wherein the driving device is a linear motor or a fine adjustment screw structure.
15. A tunable optical system, comprising:
a lens barrel;
a lens group fixing unit disposed in the lens barrel;
a movable lens group disposed on the lens group fixing unit;
the centering unit is arranged between the lens barrel and the lens group fixing unit in a surrounding mode to center the lens group fixing unit, the centering unit comprises deformation areas and fixing areas which are arranged alternately along the circumferential direction, the deformation areas are connected with the lens group fixing unit, the fixing areas are connected with the lens barrel, the rigidity of the fixing areas in the axial direction and the radial direction is larger than the rigidity of the deformation areas in the axial direction and the radial direction, and the rigidity of the deformation areas in the axial direction is smaller than the rigidity of the deformation areas in the radial direction.
16. A lithographic apparatus comprising an adjustable optical system according to claim 15.
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| CN202010609690.6A CN113933948B (en) | 2020-06-29 | 2020-06-29 | Lens group adjusting mechanism, adjustable optical system and photoetching equipment |
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| CN202010609690.6A CN113933948B (en) | 2020-06-29 | 2020-06-29 | Lens group adjusting mechanism, adjustable optical system and photoetching equipment |
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| CN113933948B (en) | 2023-04-07 |
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