CN113928857B - Quick-response electrostatic adsorption device and electrostatic adsorption method - Google Patents
Quick-response electrostatic adsorption device and electrostatic adsorption method Download PDFInfo
- Publication number
- CN113928857B CN113928857B CN202111135729.6A CN202111135729A CN113928857B CN 113928857 B CN113928857 B CN 113928857B CN 202111135729 A CN202111135729 A CN 202111135729A CN 113928857 B CN113928857 B CN 113928857B
- Authority
- CN
- China
- Prior art keywords
- electrode
- electrostatic adsorption
- polar plate
- power supply
- desorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/92—Devices for picking-up and depositing articles or materials incorporating electrostatic or magnetic grippers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
Abstract
The invention provides a quick-response electrostatic adsorption device and an electrostatic adsorption method, comprising an electrostatic adsorption unit (30) and a power supply unit, wherein the power supply unit comprises a power supply capacitor (10); the desorption unit comprises a parallel polar plate (20) and a conductive cantilever beam (24) structure, when in adsorption operation, the power supply capacitor (10) can quickly supply power to the electrostatic adsorption unit (30), and when in desorption operation, the parallel polar plate (20) and the conductive cantilever beam (24) structure can quickly consume the charges of the electrostatic adsorption unit (30), so that quick desorption is realized.
Description
Technical Field
The invention relates to a material adsorption and pickup technology, in particular to a mechanism and an adsorption method for adsorption by utilizing static electricity.
Background
The electrostatic adsorption is to induce charges opposite to the electrodes on the surface of the adsorbed object due to electrostatic induction phenomenon by electrifying the electrodes in the electrostatic adsorption unit, so that electrostatic force is generated between the electrostatic adsorption unit and the adsorbed object for adsorption.
At present, the application of the electrostatic adsorption technology mainly focuses on the fields of intelligent robots, cloth sorting, cargo handling and the like, the used electrostatic adsorption units are generally of a three-layer structure, and a dielectric layer, an electrode layer and an insulating layer are respectively arranged from near to far according to the distance from an adsorbed object. When the dielectric layer is purely an insulator, the electrostatic adsorption unit is called a coulomb type electrostatic adsorption unit; when the dielectric layer is doped with a conductor, the electrostatic adsorption unit is called a J-R type electrostatic adsorption unit. In the conventional patents, attention is paid to a number of methods for manufacturing an electrostatic adsorption unit (for example, patent document CN 112219273A), and manufacturing processes using an additive material, a subtractive material, and the like are well developed.
However, the electrostatic adsorption technology in the prior art has the defects that:
(1) the power supply device is complicated. The power supply device commonly used for the electrostatic adsorption unit is a high-voltage power supply or a low-voltage power supply matched with a boosting module, and the devices have complicated structures and higher manufacturing cost.
(2) Due to the dielectric relaxation phenomenon, after electrification, the dielectric layer and the surface of an adsorbed object can be polarized for a while, so that long adsorption preparation time is caused; after the power is cut off, the polarization state of the dielectric layer and the surface of the adsorbed object is difficult to recover rapidly, so that a long desorption time is caused.
(3) At present, the research on accelerating adsorption response after electrification is less; methods for accelerating desorption response after power failure mainly include jet mechanical separation (Robot group for Use With fibre Materials-g.j. Monkman-The International Journal of Robot Research-vol.14, no.2, april 1995, pp.144-151), resonance mechanical separation (Elastic electrical separation With Rapid Release by Integrated resource division-Xing Gao-Advanced Materials Technologies-2018), grounding of positive and negative electrodes (for example, patent document CN 2777688Y), and power supply polarity reversal (for example, patent document US20130186699 A1), but The mechanical separation method increases complexity and weight of The device structure, the electrode grounding method needs grounding conditions, and The power supply polarity reversal method needs programming power sources, and these methods have inherent defects in many application scenes.
Therefore, it is necessary to develop an electrostatic adsorption apparatus and an implementation method that can solve the above problems.
Disclosure of Invention
The present invention is directed to solving at least one of the above problems.
The invention provides a quick-response electrostatic adsorption device, which comprises,
an electrostatic adsorption unit including a first electrode and a second electrode;
a power supply unit including a power supply capacitor;
the desorption unit comprises parallel polar plates, the parallel polar plates comprise a first polar plate and a second polar plate which are arranged in parallel, the second polar plate is connected with the power supply capacitor, one end of the conductive cantilever beam is arranged to be a fixed end, at least part of the other end of the conductive cantilever beam is arranged between the first polar plate and the second polar plate to be a free end, and the free end can be excited by the first polar plate and the second polar plate to generate vibration;
when the electrostatic adsorption device executes adsorption operation, the power supply capacitor supplies power to the first electrode and the second electrode; when the electrostatic adsorption device performs a desorption operation, the desorption unit is connected to the first electrode and the second electrode.
According to the quick-response electrostatic adsorption device, during adsorption operation, the power supply capacitor quickly supplies power to the electrostatic adsorption unit, and during desorption operation, the parallel polar plate and the conductive cantilever beam structure can quickly consume the charges of the electrostatic adsorption unit, so that quick desorption is realized.
Further comprising: when the electrostatic adsorption device performs the desorption operation, the first plate of the desorption unit is connected to the second electrode terminal of the second electrode.
Further comprising: when the electrostatic adsorption device performs the desorption operation, the conductive cantilever terminal of the desorption unit is connected to the second electrode terminal of the second electrode.
Further comprising: when the electrostatic adsorption device performs the desorption operation, the second plate of the desorption unit is connected to the second electrode terminal of the second electrode.
Further comprising: the fixed end of the conductive cantilever beam is outside the parallel polar plates, and the free end can vibrate between the first polar plate and the second polar plate and can contact the polar plates at the maximum amplitude.
Further comprising: the first electrode and the second electrode both comprise comb-tooth structures, and the first electrode and the second electrode are embedded into comb-tooth gaps of the other side.
The power supply unit and the desorption unit are selectively connected into a circuit where the electrostatic adsorption unit is located, so that electrostatic adsorption and desorption operations are realized.
The invention also provides a quick-response electrostatic adsorption method, which comprises the following steps:
s1) the electrostatic adsorption device performs adsorption operation: the power supply capacitor supplies power to a first electrode and a second electrode of the electrostatic adsorption unit, the first electrode of the electrostatic adsorption unit is connected with one pole of the power supply capacitor, the second electrode of the electrostatic adsorption unit is used as a control switch and is connected with the other pole of the power supply capacitor, and the first electrode and the second electrode of the electrostatic adsorption unit are rapidly charged to realize rapid adsorption;
s2) the electrostatic adsorption device performs desorption operation: the desorption unit is connected with a first electrode and a second electrode of the electrostatic adsorption unit and comprises parallel polar plates, the parallel polar plates comprise a first polar plate and a second polar plate which are arranged in parallel, the second polar plate is connected with a power supply capacitor, one end of the conductive cantilever beam is arranged to be a fixed end, at least part of the other end of the conductive cantilever beam is arranged between the first polar plate and the second polar plate to be a free end, and the free end can be excited by the first polar plate and the second polar plate to generate vibration.
Optionally, the first electrode is connected to the capacitor and the second electrode of the parallel electrode plate respectively, the second electrode of the electrostatic adsorption unit is used as a control switch,
in step S2), the second plate of the desorption unit is connected to the second electrode.
Optionally, the first electrode is connected to the capacitor and the second electrode of the parallel electrode plate respectively, the second electrode of the electrostatic adsorption unit is used as a control switch,
in the step S2), the conductive cantilever beam terminal of the desorption unit is connected with the second electrode.
Optionally, the first electrode is connected to the capacitor and the second electrode of the parallel electrode plate respectively, the second electrode of the electrostatic adsorption unit is used as a control switch,
in step S2), the first electrode plate of the desorption unit is connected with the second electrode.
The invention has the beneficial effects that:
(1) the electrostatic adsorption response speed is accelerated. The conventional electrostatic adsorption apparatus requires a charging time of 10 seconds or more to generate sufficient adsorption force, and the time is reduced to within 1 second in the present invention.
(2) And the desorption response speed is accelerated. After the electrostatic adsorption device is directly powered off, the generated adsorption effect can be released only after a long time (usually more than 10 seconds), and the time is reduced to be less than 1 second in the invention.
(3) The power supply device is simplified. The electrostatic adsorption is generally supplied with power by using a high-voltage power supply or a low-voltage power supply matched with a boosting module, the power supply device is difficult to achieve small volume and low weight, and the capacitor used in the invention has a simple structure and is easier to reduce weight and design in a miniaturized mode.
(4) The desorption apparatus and method are simplified. Aiming at the problem of long desorption response time, the prior solution generally needs a complex structure or harsh implementation conditions, but the invention only uses one group of parallel polar plates and one conductive cantilever beam between the polar plates, has simple structure and low requirement on the implementation conditions.
(5) The energy consumption is low and the repeatability is strong. The electric charge flows rapidly at the moment of adsorption, and the current is extremely small in the adsorption process. After the energy of the power supply capacitor is exhausted, the charging can be completed only by connecting the power supply capacitor with a high-voltage source.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic view of an electrical connection structure according to the present invention;
FIG. 2 is a schematic view of a comb-tooth structure of the first and second electrodes according to the present invention;
wherein, the correspondence between the reference numbers and the component names in fig. 1 to 2 is:
the electrostatic adsorption device comprises a power supply capacitor 10, a capacitor terminal 11, a parallel polar plate 20, a first polar plate 21, a conductive cantilever beam terminal 22, a second polar plate 23, a conductive cantilever beam 24, a second electrode terminal 25, an electrostatic adsorption unit 30, an insulating layer 31, a second electrode 32, a dielectric layer 33, a first electrode 34 and an adsorbate 40.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
The embodiment provides an electrostatic adsorption device can realize the quick absorption to the adsorbate, and absorption response time from prior art reduces to within 1 second from conventional more than 10 seconds, can also realize the quick desorption to the adsorbate, and desorption response time reduces to within 1 second from more than 10 seconds of direct outage, and simple structure simultaneously, energy consumption is little, and repeatability is strong. Can be used to industry wafer centre gripping (small-size), goods transport (large-scale), cloth letter sorting (flexible material), intelligent robot tongs (snatch the target), microminiature aircraft machine carries sucking disc (perch and hover) etc. and specifically the structure is as follows:
the electrostatic adsorption unit 30 comprises a first electrode 34 and a second electrode 32, and in the prior art, the electrostatic adsorption unit is of a three-layer structure comprising a dielectric layer, an electrode layer and an insulating layer. Wherein, the dielectric layer is contacted with the adsorbate 40, and rigid or flexible materials can be adopted according to requirements; the electrode layer is in contact with one side of the dielectric layer, which is far away from an adsorbate, consists of two parts which are not communicated, is respectively connected with two poles of a power supply during working, is made of good conductors such as copper and carbon black, and can be arranged in a comb-tooth shape for improving the adsorption force, namely as shown in figure 2; and the insulating layer is tightly covered on one side of the electrode layer far away from the dielectric layer, so that electric leakage is prevented. The area of the electrode layer, the density of the electrode, the thickness of the dielectric layer, the dielectric constant, the surface roughness of the adsorbate, the ambient temperature, the humidity and other parameters all affect the adsorption force, and each parameter can be adjusted according to the actual application requirements.
And the power supply unit comprises a power supply capacitor 10, and the characteristic that the capacitor can discharge rapidly is utilized to realize rapid adsorption. The capacitor is not particularly limited to a certain kind, and various types of capacitors and charge storage devices such as a generalized capacitor can be used, and different capacitor types, withstand voltage values and capacitance values can be selected according to use requirements.
When the electrostatic adsorption device performs an adsorption operation, the power supply capacitor 10 supplies power to the first electrode 34 and the second electrode 32, the first electrode 34 of the electrostatic adsorption unit 30 is connected to one pole of the capacitor, the second electrode 32 of the electrostatic adsorption unit 30 is used as a control switch, and when the electrostatic adsorption unit 30 needs to be adsorbed, the second electrode is connected to the other pole of the capacitor through the capacitor terminal 11, and the electrostatic adsorption unit 30 is rapidly charged to achieve rapid adsorption.
The desorption unit comprises a parallel polar plate 20, the parallel polar plate 20 comprises a first polar plate 21 and a second polar plate 23 which are arranged in parallel, the second polar plate 23 is connected with the power supply capacitor 10, and one end of a conductive cantilever beam 24 is at least partially arranged between the first polar plate 21 and the second polar plate 23 and can be excited by the first polar plate 21 and the second polar plate 23 to generate vibration. The inner sides of the first polar plate 21 and the second polar plate 23 need to be conductive, and the positions of the connecting leads need to be communicated with the inner parts of the polar plates; the conductive cantilever 24 is connected to the conductive line at a position that is in electrical communication with the vibrating portion thereof.
Specifically, the desorption unit is essentially composed of a group of parallel polar plates and a conductive cantilever beam between the polar plates, and the quick desorption is realized by the principle of vibration transfer of electric charges of the cantilever beam. One side plate of the parallel polar plate is connected with one pole of the capacitor, the other side plate is not connected with a wire, the parallel polar plate can be made of metal such as copper and aluminum or conductive nonmetal such as graphite, and the positive area and the distance between the two polar plates can be adjusted according to actual requirements; the fixed end of the conductive cantilever beam is arranged outside the parallel plates, the free end can vibrate between the plates and can contact the polar plates on the two sides at the maximum amplitude position, and the physical properties of the conductive cantilever beam, such as length, width, thickness, rigidity, strength and the like, can be selected according to actual requirements.
One particular desorption unit may be arranged as follows: comprises an insulating support base which is not connected with any electrode and is not grounded, namely, the potential is floated; a conductive cantilever beam 24 made of various conductive materials including silicon, gold, aluminum, copper or shape memory alloy, and having one end fixed on the insulating support base and the other end horizontally suspended; two direct current driving electrodes are arranged on two sides of the conductive cantilever beam 24, wherein one polar plate is connected with a direct current positive voltage, the other polar plate is connected with a direct current negative voltage, a certain distance is kept between the two electrodes, and at the moment, the two electrodes can generate a stable electrostatic field; in the electrostatic field, the conductive cantilever 24 generates different amounts of net charges at the fixed end and the free end thereof due to the electrostatic induction effect; then, the free end of the conductive cantilever beam 24 will be subjected to electrostatic force in the electrostatic field, and overcome the elastic restoring force of the micro beam to make the micro beam generate deflection, when the elastic restoring force can not keep balance with the electrostatic force, the conductive cantilever beam 24 is destabilized and collides with the polar plates at both sides; because the conductive cantilever beam 24 is fixed on the insulating support base, and is not connected with any electrode or grounded, namely the potential floats, the collision of the conductive cantilever beam 24 and the polar plate does not cause short circuit, and the process of charging/discharging the conductive cantilever beam 24 by the polar plate is carried out simultaneously with the collision process (the potential of the conductive cantilever beam 24 is the same as that of the polar plate, if the collision is a positive electrode, the charging process is carried out, and if the collision is a negative electrode, the discharging process is carried out), and because the capacitance of the conductive cantilever beam 24 is very small, the charging/discharging process can be completed instantly; after collision and charging/discharging are finished, the electrostatic force borne by the conductive cantilever beam 24 is reversed due to the principle of opposite-polarity repulsion, and the electrostatic force and the restoring force jointly drive the conductive cantilever beam 24 to move in the opposite direction until the conductive cantilever beam collides with another polar plate and is charged/discharged; repeating the above steps, the collision and charging/discharging process between the conductive cantilever beam 24 and the electrode plate can make the conductive cantilever beam 24 form a stable resonant motion until the charge on the electrode plate is consumed. After the first electrode 34 and the second electrode 32 of the electrostatic adsorption unit 30 are respectively connected with the two pole plates, a direct current positive voltage and a direct current negative voltage are respectively input, and the electric energy is quickly converted into mechanical energy by exciting the conductive cantilever beam 24, so that the quick desorption of the desorption unit is realized.
The first electrode 34 of the electrostatic adsorption unit 30 is connected to the second plate 23 of the parallel plate 20 of the capacitor, and the second electrode 32 of the electrostatic adsorption unit 30 is used as a control switch, and there are three connection modes in the using process:
1) When the electrostatic adsorption device performs the desorption operation, the second plate 23 of the desorption unit is connected to the second electrode terminal 25 of the second electrode 32. The two electrodes of the electrostatic adsorption device are both connected with the second polar plate 23, namely the two electrodes of the electrostatic adsorption device are directly connected, pulse discharge occurs at the moment of contact, and the conductive cantilever beam 24 does not vibrate.
2) When the electrostatic adsorption device performs the desorption operation, the conductive cantilever terminal 22 of the desorption unit is connected to the second electrode terminal 25 of the second electrode 32. Because the two electrodes of the electrostatic adsorption device are provided with opposite charges, the conductive cantilever beam 24 deflects towards the second polar plate 23 under the action of coulomb force until the opposite charges are neutralized when in contact, then the coulomb force is reduced, the conductive cantilever beam 24 rebounds under the action of the self elastic restoring force, so that periodic vibration is formed, and pulse current consumes charges once in each period.
3) When the electrostatic adsorption device carries out desorption operation, the first polar plate 21 of the desorption unit is connected with the second electrode terminal 25 of the second electrode 32, at this time, the first polar plate 21 and the second polar plate 23 are respectively connected with two polar plates, the two polar plates are two driving electrodes, the conductive cantilever beam generates self-excited vibration under the action of an electrostatic field between the two polar plates, and the conductive cantilever beam contacts the two polar plates and generates periodic charge pulse flow in the vibration process, so that the charge in the electrostatic chuck is consumed, and the rapid desorption operation is realized.
According to the experiment, the speed is as follows: method 2), method 1), method 3).
The above-mentioned fast adsorption and fast desorption operations can be repeatedly performed many times, but since the charges in the power supply capacitor 10 are consumed, the adsorption force generated by the electrostatic adsorption device will gradually decrease until the remaining charges in the power supply capacitor 10 are insufficient to generate the required adsorption force.
After the energy of the power supply capacitor is exhausted, the charging can be quickly completed only by connecting a resistor in series with the power supply capacitor with an external high-voltage source, the charging time constant τ = RC (63% of charging is completed after time τ, and more than 99% of charging is completed after 5 τ), for example, if the 10nF capacitor is connected with a 100k Ω resistor in series, τ =0.001s, and charging is basically completed after 0.005 s.
Example 1:
in one embodiment, the power supply uses a 3kV-10nF ceramic capacitor (a 220k Ω protection resistor is connected in series to avoid excessive current when charging the capacitor); the desorption device uses a group of copper foil polar plates which are arranged in parallel (the distance is 5 mm) and a copper cantilever beam which is 40mm long, 2mm wide and 50 μm thick, and the copper foil polar plates and the cantilever beam are fixed on a wooden bottom plate by wood blocks; the electrostatic adsorption unit consists of silica gel and carbon fiber, the dielectric layer and the insulating layer are both the silica gel with the thickness of 10cm multiplied by 1mm, the electrode layer is the carbon fiber with the thickness of 30 mu m and a comb tooth structure, and a section of rigid supporting structure is added on the insulating layer for convenient operation; the test adsorbate was a 10cm x 10cm plank with a smooth release paper layer adhered to the adsorption surface, with a total adsorbate weight of about 15g.
In the testing process, the electrostatic adsorption unit can generate electrostatic adsorption force enough for vertically lifting the wood board at the moment of connecting the power supply end, and if the lifting state is kept, the adsorbed wood board naturally peels off after 600 seconds; after the desorption device is electrified and lifted, if the root of the cantilever beam of the desorption device is switched on, the cantilever beam starts to vibrate, and the wood board can be peeled off after about 0.5 second; the first 5 times of repeatedly electrifying to lift the wood board and desorbing to peel the wood board can produce good effect, and at the 6 th time, the electrostatic adsorption force generated by the residual charges is not enough to lift the wood board.
Example 2:
in a specific embodiment, the power supply means and the desorption means are the same as in the above-described embodiment; the electrostatic adsorption unit consists of an epoxy resin film and a copper foil, wherein the dielectric layer and the insulating layer are both made of 10cm multiplied by 0.07mm epoxy resin, the electrode layer is made of 0.1mm thick copper foil with a comb tooth structure, and a plastic plate is pasted on the insulating layer to be used as a rigid supporting structure so as to be convenient to operate; the test adsorbate is a 10cm x 10cm block of wood, with a layer of smooth release paper adhered to the adsorption surface, and the total weight of adsorbate is about 50g.
In the testing process, the electrostatic adsorption unit can generate electrostatic adsorption force enough for vertically lifting the wood block at the moment when the power supply end is switched on, and if the lifting state is kept, the adsorbed wood block naturally peels off after 30 seconds; after the desorption device is electrified and lifted, if the root of the cantilever beam of the desorption device is switched on, the cantilever beam starts to vibrate, and the wood board can be peeled off after about 0.5 second; the wood board can be lifted and the stripped wood blocks can be desorbed repeatedly in the first 2 times, and the electrostatic adsorption force generated by the residual charges is insufficient to lift the wood blocks in the 3 rd time.
In addition, it needs to be further explained that:
(1) the power supply device can use common capacitors such as ceramic dielectric capacitors, paper dielectric capacitors, metal electrolytic capacitors and the like, and other various capacitor devices which can be stored and rapidly charged and discharged;
(2) the bipolar plate and the conductive cantilever beam in the desorption device only need to meet the conductive condition, and other materials, dimensions and the like have no specific requirements, and the structure in the embodiment is only one of the materials;
(3) the electrostatic unit only needs to meet the basic three-layer structure, the specific manufacturing method and process have no specific requirements, and the electrostatic chuck in the embodiment is only schematic and is not the optimal configuration and process;
(4) the switching method in the embodiment is only an illustration, and a single chip microcomputer or other control devices can be used in practical application.
In the present invention, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless expressly limited otherwise. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; "connected" may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present specification, the description of "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. A quick-response electrostatic adsorption device is characterized by comprising,
an electrostatic adsorption unit (30), the electrostatic adsorption unit (30) comprising a first electrode (34) and a second electrode (32);
a power supply unit comprising a power supply capacitance (10);
the desorption unit comprises a parallel polar plate (20), the parallel polar plate (20) comprises a first polar plate (21) and a second polar plate (23) which are arranged in parallel, the second polar plate (23) is connected with the power supply capacitor (10), one end of a conductive cantilever beam (24) is arranged as a fixed end, the other end of the conductive cantilever beam is arranged as a free end, the free end is at least partially arranged between the first polar plate (21) and the second polar plate (23), and the free end can be excited by the first polar plate (21) and the second polar plate (23) to generate vibration; the fixed end of the conductive cantilever beam (24) is arranged outside the parallel polar plates (20), the free end can vibrate between the first polar plate (21) and the second polar plate (23) and can contact the polar plates at the maximum amplitude;
wherein, when the electrostatic adsorption device performs an adsorption operation, the power supply capacitor (10) supplies power to the first electrode (34) and the second electrode (32); when the electrostatic adsorption device performs a desorption operation, the desorption unit is connected with the first electrode (34) and the second electrode (32); the first electrode plate (21) of the desorption unit is connected to the second electrode terminal (25) of the second electrode (32).
2. The fast response electrostatic clamp of claim 1, further comprising:
the first electrode (34) and the second electrode (32) both adopt a comb-tooth structure, and the two electrodes are embedded into the comb-tooth gap of the other electrode.
3. The electrostatic adsorption device of claim 1, wherein the power supply unit and the desorption unit are selectively connected to a circuit in which the electrostatic adsorption unit (30) is located, thereby performing the electrostatic adsorption or desorption operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111135729.6A CN113928857B (en) | 2021-09-27 | 2021-09-27 | Quick-response electrostatic adsorption device and electrostatic adsorption method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111135729.6A CN113928857B (en) | 2021-09-27 | 2021-09-27 | Quick-response electrostatic adsorption device and electrostatic adsorption method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113928857A CN113928857A (en) | 2022-01-14 |
| CN113928857B true CN113928857B (en) | 2023-03-31 |
Family
ID=79277079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111135729.6A Active CN113928857B (en) | 2021-09-27 | 2021-09-27 | Quick-response electrostatic adsorption device and electrostatic adsorption method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113928857B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1897442A (en) * | 2005-08-09 | 2007-01-17 | 谭升高 | Electrostatic repulsion engine |
| CN109643683A (en) * | 2016-08-22 | 2019-04-16 | 应用材料公司 | Bipolar electrostatic sucker and its application method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU6293586A (en) * | 1985-09-30 | 1987-04-02 | Marathon Manufacturing Company | Static inverter |
| JP2003103487A (en) * | 2001-10-01 | 2003-04-08 | Minolta Co Ltd | Electrostatic attraction manipulator |
| JP5044395B2 (en) * | 2005-05-20 | 2012-10-10 | 筑波精工株式会社 | Electrostatic holding device and electrostatic tweezers using the same |
| JP2007045618A (en) * | 2005-08-12 | 2007-02-22 | Seiren Co Ltd | Carrying device using electrostatic attraction plate |
| JP4855177B2 (en) * | 2006-08-10 | 2012-01-18 | 住友大阪セメント株式会社 | Electrostatic chuck device |
| CN102390452A (en) * | 2011-10-17 | 2012-03-28 | 郑州轻工业学院 | Improved electronically-controlled flexible adsorption device |
| CN104811090B (en) * | 2015-03-30 | 2017-08-29 | 南方科技大学 | Electrostatic energy collector and electrostatic energy collecting method |
| CN110861921B (en) * | 2018-08-28 | 2021-10-01 | 吸力奇迹（北京）科技有限公司 | Electrostatic adsorption device and preparation method thereof |
| CN111323460B (en) * | 2018-12-13 | 2022-11-22 | 夏泰鑫半导体(青岛)有限公司 | Sensing element and method for detecting electrostatic adsorption chuck by using same |
| CN112976042A (en) * | 2021-03-22 | 2021-06-18 | 柯松山 | Charging type semi-permanent electrostatic adsorption device |
-
2021
- 2021-09-27 CN CN202111135729.6A patent/CN113928857B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1897442A (en) * | 2005-08-09 | 2007-01-17 | 谭升高 | Electrostatic repulsion engine |
| CN109643683A (en) * | 2016-08-22 | 2019-04-16 | 应用材料公司 | Bipolar electrostatic sucker and its application method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113928857A (en) | 2022-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100576486C (en) | Electrostatic holding apparatus and the electrostatic tweezers that uses it | |
| CN104836478B (en) | A kind of piezoelectricity electromagnetism combined type broad band low frequency energy accumulator | |
| US8803401B2 (en) | Vibration power generator, vibration power generating device, and electronic device and communication device that have the vibration power generating device installed | |
| KR100224543B1 (en) | Rechargeable battery cell having integral vibrating means | |
| CN101860260B (en) | Piezoelectric vibration battery device | |
| Madden et al. | Fast carbon nanotube charging and actuation | |
| CN104022685B (en) | The frequency modulation array piezoelectric cantilever prisoner applying to piezoelectric harvester can method | |
| Singh et al. | A synchronous piezoelectric–triboelectric–electromagnetic hybrid generator for harvesting vibration energy | |
| CN105099256A (en) | Generator and power generation method based on electrostatic induction | |
| CN103368446A (en) | Electrostatic generator, manufacturing method thereof and self-driven sensing system | |
| CN112117928A (en) | Friction-piezoelectric-electromagnetic combined magnetic energy collecting device | |
| CN113928857B (en) | Quick-response electrostatic adsorption device and electrostatic adsorption method | |
| CN111348224A (en) | Micro-cathode arc propulsion system | |
| CN103338021A (en) | Micro electromechanical resonator based on structural self-excited vibration principle | |
| CN104604089A (en) | Non-contact power supply device | |
| EP2360757A2 (en) | High output electrical energy storage device | |
| CN108809144A (en) | One kind being based on micro- beam vibration electrostatic drive micro motor device | |
| CN105811805A (en) | Miniature generator based on train bogie railway vibrational energy collection | |
| JPH0883832A (en) | Power supply equipment | |
| Liu et al. | Dual-stage-electrode-enhanced efficient SSHI for rotational electret energy harvester | |
| WO2002049183A1 (en) | Method and device to resist sulfatizing in electric accumulators | |
| CN207222286U (en) | A kind of piezo-ceramic vibrators structure of long-life | |
| CN114012763B (en) | Rigidity-variable electrostatic adsorption gripper and control method thereof | |
| CN112042106A (en) | Vibration power generation element and vibration power generation device | |
| JP2015039258A (en) | Drive circuit and driving method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |