CN113916072A - Multi-physical-field solution MEMS security device - Google Patents
Multi-physical-field solution MEMS security device Download PDFInfo
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- CN113916072A CN113916072A CN202111307115.1A CN202111307115A CN113916072A CN 113916072 A CN113916072 A CN 113916072A CN 202111307115 A CN202111307115 A CN 202111307115A CN 113916072 A CN113916072 A CN 113916072A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C15/00—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges
- F42C15/24—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges wherein the safety or arming action is effected by inertia means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C15/00—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges
- F42C15/24—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges wherein the safety or arming action is effected by inertia means
- F42C15/26—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges wherein the safety or arming action is effected by inertia means using centrifugal force
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Abstract
A multi-physical-field security MEMS security device comprises a substrate layer, a security mechanism layer and a cover plate layer, wherein the substrate layer, the security mechanism layer and the cover plate layer are assembled into a whole; the acceleration chamber of the substrate layer and the booster explosive of the cover plate layer are in a fixed alignment state, the primary explosive in the security mechanism layer is filled in the metal partition plate, and the primary explosive, the acceleration chamber and the booster explosive are in an unaligned state in a safe state; the mass block of the security mechanism layer is arranged between the recoil mechanism substrate of the substrate layer and the ball lock mechanism groove of the cover plate layer, and the upper surface of the mass block is provided with a stainless steel ball; in a safe state, the partition plate is limited by the electric heating actuator and the recoil mechanism, the top of the acceleration chamber is covered by the metal partition plate, the initiating explosive and the booster explosive are in an unaligned state, and the flyer cannot be initiated; under the condition of the protection, the acceleration chamber, the initiating explosive and the booster explosive are on the same axis, and the flyer is used for initiating the initiating explosive and the booster explosive to complete the energy transfer of the initiation sequence; the invention has the characteristics of multi-physical-field solution, high explosion-proof strength, high overload resistance, intelligent control and the like.
Description
Technical Field
The invention relates to the technical field of security devices, in particular to a multi-physical-field security MEMS security device.
Background
The safety device is a core component for controlling the transmission of the explosion capacity in a weapon equipment system, is an important component in the weapon ammunition, can block the transmission of the accidental detonation energy in a safe state, and can ensure that the energy of the detonation sequence is smoothly transmitted in a relief state. The security device usually adopts a movable partition plate structure to realize the control of the weapon ammunition state, and the performance of the security device influences the safety and reliability of the whole weapon equipment system. Therefore, the development of a new-generation MEMS security device technology with the characteristics of driving intelligence, structural miniaturization and sequence integration combined with the advantages of the MEMS technology has become an important demand for national defense development.
The realization of the function of the MEMS security device is mainly based on the reliable condition relief of the movable partition plate, and the current main modes for driving the partition plate comprise inertia driving, electrothermal driving and electromagnetic driving. The inertial drive judges the solution condition of the security device by depending on the environmental force information in the ammunition flying process, has higher reliability and safety, but is passive solution, and has lower intelligent degree; although the electric heating driving and the electromagnetic driving can realize the active intelligent control of the state of the security device through electric signals, the safety and the reliability of the electric heating driving and the electromagnetic driving are relatively lower than those of the inertial driving.
The existing MEMS security device is difficult to realize, and the intelligent degree of the MEMS security device is improved while the high safety and reliability of the MEMS security device are ensured.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide the multi-physical-field solution MEMS security device which has the characteristics of multi-physical-field solution, high explosion-proof strength, high overload resistance, intelligent control and the like.
In order to achieve the purpose, the invention adopts the technical scheme that:
a multi-physical-field security MEMS security device comprises a substrate layer 100, a security mechanism layer 200 and a cover plate layer 300 which are arranged from bottom to top, wherein the three layers are assembled into a whole; the acceleration chamber 101 of the substrate layer 100 and the booster charge 302 of the cover plate layer 300 are in a fixed alignment state, the primary charge 214 in the security mechanism layer 200 is filled in the metal partition plate 213, and the primary charge 214, the acceleration chamber 101 and the booster charge 302 are in an unaligned state in a safe state; the proof mass 219 of the security mechanism layer 200 is between the recoil mechanism substrate 102 of the substrate layer 100 and the ball lock mechanism slot 307 of the cover plate layer 300, and a stainless steel ball 303 is placed on the upper surface of the proof mass 219.
The substrate layer 100 is of a silicon single-layer structure, the acceleration chamber 101 arranged on the substrate layer is of a through hole structure, the acceleration chamber 101 and the booster charge 302 in the cover plate layer 300 are on the same axis, the top of the acceleration chamber 101 is covered by the metal partition plate 213 in the security mechanism layer 200 in a safe state, and is aligned with the booster charge 214 in the security mechanism layer 200 in a security state; the recoil mechanism substrate 102 disposed in the substrate layer 100 is a grooved structure that aligns with the proof mass 219 in the security mechanism layer 200.
The security mechanism layer 200 is made of an SOI silicon wafer which is divided into top silicon 201 and bottom silicon 202; a partition plate slideway 203 is arranged in the top silicon 201, a partition plate I is arranged in the middle of the partition plate slideway 203, the left side of the partition plate I is matched with an electric heating actuator II, and the right side of the partition plate I is matched with a backseat mechanism III; an electrothermal actuator driving electrode 204 is arranged at the two ends of the left side of the security mechanism layer 200, and a recoil mechanism feedback electrode 205 is arranged at the two ends of the right side of the security mechanism layer 200; the electrothermal actuator II is positioned in the top silicon 201, and a heat insulation cavity 206 is arranged in the bottom silicon 202 at the bottom of the electrothermal actuator II.
The slide blocks 207 arranged at the four corners of the partition board I are matched with the partition board slideway 203, the electric heating actuator locking groove 208 arranged at the left side edge of the partition board I is matched with the electric heating actuator II, the recoil mechanism locking groove 209 arranged at the right side edge of the partition board I is matched with the recoil mechanism III, the middle part of the partition board I is a silicon partition board 210, a medicine loading hole 211 is formed in the middle of the silicon partition board I, a metal partition board mounting frame 212 arranged at the back of the partition board I is used for mounting a metal partition board 213, and the metal partition board 213 and the silicon partition board 210 form a composite partition board structure; an initiating explosive 214 is arranged in the middle of the metal partition plate 213; an S-shaped micro spring 215 is arranged on the partition plate I, and the top of the S-shaped micro spring 215 is connected with the top silicon 201.
The electrothermal actuator II comprises three groups of V-shaped silicon beams 216, two ends of each V-shaped silicon beam 216 are fixedly connected to the top silicon 201 and apply voltage through the electrothermal actuator driving electrode 204, and an electrothermal actuator locking pin 217 is arranged in the middle of each V-shaped silicon beam 216.
The recoil mechanism III consists of an elastic beam 218 and a mass block 219, the elastic beam 218 is a wide beam arranged on the top silicon 201, the fixed end of the elastic beam 218 is connected to the top silicon 201, and the movable end of the elastic beam 218 is connected to the mass block 219; a recoil mechanism latch 220 is disposed to the left of the mass 219, and a metal strain gage 221 is disposed above the spring beam 218.
The cover plate layer 300 comprises a cover plate substrate 301, an explosion-propagating medicine 302 and a stainless steel ball 303; the cover substrate 301 is made of silicon, and electrode lead-out windows 304 are respectively arranged at four corners of the cover substrate; an observation window 305 of an electric heating actuator is arranged on the left side of the cover plate substrate 301, a booster cavity 306 for filling booster 302 is arranged in the middle of the cover plate substrate, a ball lock mechanism groove 307 is arranged on the right side of the cover plate substrate, the ball lock mechanism groove 307 corresponds to the position above a mass block 219 of the recoil mechanism III, a stainless steel ball 303 is packaged inside the mass block 219 through the upper surface of the mass block 219 and the ball lock mechanism groove 307, and the stainless steel ball 303 is limited at different positions by a safety limit groove 308 and a relief limit groove 309 at the top of the ball lock mechanism groove 307.
Compared with the traditional security device, the invention has the beneficial effects that:
the metal-silicon composite partition plate structure formed by the metal partition plate 213 and the silicon partition plate 210 is utilized, so that the processing precision is ensured, and the strength of the partition plate is improved; the recoil mechanism III, the stainless steel ball 303, the ball lock mechanism groove 307 and the recoil mechanism substrate 102 realize the out-of-plane recoil release, release state locking, overload resistance and state feedback of the device; the electric heating actuator II, the partition plate I and the S-shaped micro spring 215 realize intelligent solution control, judgment of centrifugal acceleration and solution state locking of the device; the multi-physical-field solution capability of the device is realized through the intelligent active control of the recoil, centrifugal inertia driving and electric heating driving.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Fig. 3 is a schematic view of the structure of the substrate layer of the present invention.
Fig. 4 is a schematic structural diagram of a security mechanism layer according to the present invention.
FIG. 5 is a schematic structural view of the separator of the present invention, wherein FIG. (a) is a front view of the separator and FIG. (b) is a rear view of the separator.
FIG. 6 is a schematic structural diagram of an electrothermal actuator according to the present invention.
Fig. 7 is a schematic structural view of the recoil mechanism of the present invention.
Fig. 8 is a schematic structural view of a cover plate layer of the present invention.
Fig. 9 is a schematic diagram of a recoil mechanism of the present invention, wherein fig. (a) is a safe state diagram of the recoil mechanism, fig. (b) is an exploded state diagram of the recoil mechanism, fig. (c) is a safe state sectional view of the recoil mechanism, fig. (d) is an overloaded state sectional view of the recoil mechanism, fig. (e) is an exploded process sectional view of the recoil mechanism, and fig. (f) is an exploded state sectional view of the recoil mechanism.
FIG. 10 is a schematic diagram of an electrothermal actuator according to the present invention, in which (a) is a safety state diagram of the electrothermal actuator, (b) is an undeployed diagram of the electrothermal actuator, and (c) is an undeployed state diagram of the electrothermal actuator.
Fig. 11 is a basic principle diagram of the present invention, in which (a) is a device security state diagram and (b) is a device security state diagram.
Detailed Description
The present invention will be described in detail with reference to the following examples and drawings.
Referring to fig. 1, the multi-physical-field security MEMS security device includes a substrate layer 100, a security mechanism layer 200, and a cover plate layer 300 disposed from bottom to top.
Referring to fig. 2, the substrate layer 100, the security mechanism layer 200 and the cover plate layer 300 have the same overall length and width and are assembled from bottom to top. The acceleration chamber 101 of the substrate layer 100 and the booster charge 302 of the cover plate layer 300 are in a fixed alignment state, the primary charge 214 in the security mechanism layer 200 is filled in the metal partition plate 213, and the primary charge 214, the acceleration chamber 101 and the booster charge 302 are in an unaligned state in a safe state; the proof mass 219 of the security mechanism layer 200 is between the recoil mechanism substrate 102 of the substrate layer 100 and the ball lock mechanism slot 307 of the cover plate layer 300, and a stainless steel ball 303 is placed on the upper surface of the proof mass 219.
Referring to fig. 3, the substrate layer 100 is a silicon single-layer structure, the acceleration chamber 101 arranged on the substrate layer is a through hole structure, the flying speed of the flyer can be increased by matching the bottom of the acceleration chamber 101 with a flyer initiation mode, the acceleration chamber 101 and the booster 302 in the cover plate layer 300 are on the same axis, the top of the acceleration chamber 101 is covered by the metal partition plate 213 in the security mechanism layer 200 in a safe state, and is aligned with the initiator 214 in the security mechanism layer 200 in a release state; the back seat mechanism substrate 102 disposed in the substrate layer 100 is a groove structure, and the back seat mechanism substrate 102 provides a displacement space for the mass 219 in the security mechanism layer 200 and provides a support for the mass 219 in a high overload environment to prevent structural fracture.
Referring to fig. 4, the security mechanism layer 200 is made of an SOI silicon wafer, the SOI silicon wafer is divided into a top silicon 201 and a bottom silicon 202, and the top silicon 201 and the bottom silicon 202 are separated by a corrosion process; a partition plate slideway 203 is arranged in the top silicon 201, a partition plate I is arranged in the middle of the partition plate slideway 203, the left side of the partition plate I is matched with an electric heating actuator II, and the right side of the partition plate I is matched with a backseat mechanism III; an electrothermal actuator driving electrode 204 is arranged at the two ends of the left side of the security mechanism layer 200, and a recoil mechanism feedback electrode 205 is arranged at the two ends of the right side of the security mechanism layer 200; the electrothermal actuator II is positioned in the top silicon 201, and the bottom silicon 202 at the bottom of the electrothermal actuator II is provided with the heat insulation cavity 206, so that heat dissipation at the bottom of the electrothermal actuator II can be reduced, and the driving efficiency is improved.
Referring to a diagram (a) in fig. 5, the main structure of the first partition board is arranged in a top silicon 201, a sliding block 207 arranged at the four corners of the first partition board is matched with a partition board sliding way 203 to limit the displacement direction of the first partition board, an electric heating actuator locking groove 208 arranged at the left side edge of the first partition board is used for being matched with an electric heating actuator II, a recoil mechanism locking groove 209 arranged at the right side edge of the first partition board is used for being matched with a recoil mechanism III, the middle part of the first partition board is a silicon partition board 210, and a medicine filling hole 211 is formed in the middle of the silicon partition board 210. Referring to a diagram (b) in fig. 5, a metal partition plate mounting frame 212 arranged at the back of the partition plate i is used for mounting a metal partition plate 213, and the metal partition plate 213 and the silicon partition plate 210 form a composite partition plate structure, so that the explosion-proof strength of the partition plate can be increased; the middle position of the metal partition plate 213 is provided with an initiating explosive 214, and the size of the initiating explosive 214 is slightly smaller than that of the explosive charging hole 211; an S-shaped micro spring 215 is arranged on the partition plate I, the top of the S-shaped micro spring 215 is connected with the top silicon 201, and the S-shaped micro spring 215 is used for judging the centrifugal acceleration in the ammunition flying environment.
Referring to fig. 6, the main body of the electrothermal actuator ii is composed of three groups of V-shaped silicon beams 216, two ends of the V-shaped silicon beams 216 are fixedly connected to the top silicon 201 and voltage is applied through the electrothermal actuator driving electrode 204; the V-shaped silicon beam 216 will generate thermal expansion deformation when passing current, and thus has certain driving capability; an electrothermal actuator lock pin 217 is arranged in the middle of the V-shaped silicon beam 216, and the driving capability of an electrothermal actuator II can control the meshing state of the electrothermal actuator lock pin 217 and the electrothermal actuator lock groove 208 of the partition plate I, so that the motion of the partition plate I can be controlled.
Referring to fig. 7, the recoil mechanism iii is mainly composed of an elastic beam 218 and a mass 219; the elastic beam 218 is a wide beam arranged on the top silicon 201, and has lower rigidity in the vertical direction, the fixed end of the elastic beam 218 is connected to the top silicon 201, the movable end of the elastic beam 218 is connected to the mass block 219, and the backseat mechanism locking pin 220 is arranged on the left side of the mass block 219; under the action of acceleration, the mass 219 drives the elastic beam 218 to bend downwards to control the meshing state of the recoil mechanism lock pin 220 and the recoil mechanism lock groove 209 of the partition plate I; a metal strain gauge 221 is disposed above the elastic beam 218, and the metal strain gauge 221 can feed back the bending state of the elastic beam 218 to the control system through the recoil mechanism feedback electrode 205 in the form of an electrical signal.
Referring to fig. 8, the cover plate layer 300 includes a cover plate substrate 301, an explosion-propagating chemical 302 and a stainless steel ball 303; the cover plate substrate 301 is made of silicon, electrode leading-out windows 304 are respectively arranged at four corners of the cover plate substrate, and the electrode leading-out windows 304 are respectively used for leading out the electrothermal actuator driving electrode 204 and the recoil mechanism feedback electrode 205 in the security mechanism layer 200; an electrothermal actuator observation window 305 is arranged on the left side of the cover plate substrate 301 and used for observing the meshing condition of the electrothermal actuator II and the partition plate I, and the electrothermal actuator observation window 305 can reduce the heat dissipation of the top of the V-shaped silicon beam 216 so as to improve the driving efficiency; an explosion-propagating medicine cavity 306 is arranged in the middle of the cover plate substrate 301 and is used for filling an explosion-propagating medicine 302 as an explosion sequence energy output end; a ball lock mechanism groove 307 is arranged on the right side of the cover plate substrate 301, the ball lock mechanism groove 307 corresponds to the position above a mass block 219 of the rear seat mechanism III, the stainless steel ball 303 is packaged inside the mass block 219 through the upper surface of the mass block 219 and the ball lock mechanism groove 307, and the stainless steel ball 303 is limited at different positions through a safety limit groove 308 and a guarantee release limit groove 309 at the top of the ball lock mechanism groove 307.
The working principle of the invention is as follows:
referring to fig. 9 (a), in the recoil mechanism iii, in the safety state, the mass 219 is in the rest state, the stainless steel ball 303 is limited at the safety position by the safety limit groove 308, and the recoil mechanism lock pin 220 and the recoil mechanism lock groove 209 are in planar inter-engagement. Referring to fig. 9 (b), in the recoil mechanism iii, in the release state, the stainless steel ball 303 is pressed by the mass 219 and the release limiting groove 309 at the intermediate position, and the mass 219 is bent downward by a certain displacement, so that the recoil mechanism lock pin 220 and the recoil mechanism lock groove 209 are in an out-of-plane disengaged state. The specific process is as follows: referring to diagram (c) in fig. 9, under the action of no acceleration, the mass 219 has no displacement, and the stainless steel ball 303 is limited at a safe position by the safe limiting groove 308; referring to diagram (d) of fig. 9, under the impact of high overload acceleration, the squat mechanism substrate 102 will provide support for the mass 219, so that it has a certain overload resistance, and the stainless steel ball 303 will not roll under the action of short pulse high overload acceleration; referring to diagram (e) in fig. 9, under the continuous action of the specified squat acceleration, the mass 219 bends downward for a certain displacement, the stainless steel ball 303 rolls along the upper surface thereof, and the rolling time of the stainless steel ball 303 can be used as the judgment of the squat acceleration action time; referring to fig. 9 (f), when the predetermined squat acceleration action disappears, the mass 219 rebounds, pressing the stainless steel ball 303 against the relief limit groove 309, and the mass 219 is restricted to the disengaged plane state, completing the squat mechanism relief action. After the de-protection is completed, the metal strain gauge 221 on the top end of the mass 219 feeds back the resistance change to the control system in the form of an electrical signal through the strain generated by the beam bending.
Referring to the diagram (a) in fig. 10, when the control system receives the feedback signal of the recoil mechanism iii, the control system will drive the electrothermal actuator ii at the proper time according to other preset information or judgment conditions, the electrothermal actuator lock groove 208 and the electrothermal actuator lock pin 217 will be disengaged, and before that, the partition plate i will be limited at the safe position. Referring to fig. 10 (b), after the electrothermal actuator ii and the recoil mechanism iii are disengaged from the diaphragm i, the diaphragm i slides down the diaphragm slide 203 under the inertial force generated by the centrifugal acceleration. When the rotating speed of the ammunition is less than a specified value, the inertia force of the partition plate I is not enough to drive the S-shaped micro spring 215, so that the S-shaped micro spring is maintained at a force balance position and still has a certain distance from a release position. Or when the control system encounters an accident, the electric heating actuator II is powered off, and the electric heating actuator locking groove 208 is meshed with the electric heating actuator locking pin 217 to lock the partition plate I in front of the unlocking position. Referring to the graph (c) in fig. 10, in the movement process of the partition plate I, no accident happens, the partition plate I moves to the bottom position for solution, the control system drives the electric heating actuator II for a certain time, and after the partition plate I moves to the solution position, the control system stops driving the electric heating actuator II, so that the electric heating actuator locking groove 208 is meshed with the electric heating actuator locking pin 217 to lock the partition plate I to the solution position.
Referring to fig. 11 (a), in the safe state, the diaphragm i is restrained by the electric actuator ii and the recoil mechanism iii, the top of the acceleration chamber 101 is covered by the metal diaphragm 213, the initiating explosive 214 and the booster 302 are in the misaligned state, and the flyer cannot be initiated. After the action of recoil acceleration when ammunition is discharged from the chamber, the recoil mechanism III is released; the control system is used for driving the electric heating actuator II to perform the solution protection; the baffle I moves to the position of the protection from the centrifugal acceleration generated by the rotation of the ammunition. Referring to diagram (b) of fig. 11, in the release state, the acceleration chamber 101, the primary explosive 214 and the booster 302 are on the same axis, and the booster 302 is further initiated after the primary explosive 214 is initiated by the flyer, thereby completing the transfer of the initiation sequence energy.
Claims (7)
1. A multi-physical-field security MEMS security device comprises a substrate layer (100), a security mechanism layer (200) and a cover plate layer (300) which are arranged from bottom to top, and the three layers are assembled into a whole; the method is characterized in that: the acceleration chamber (101) of the substrate layer (100) and the booster explosive (302) of the cover plate layer (300) are in a fixed alignment state, the primary explosive (214) in the security mechanism layer (200) is filled in the metal partition plate (213), and the primary explosive (214), the acceleration chamber (101) and the booster explosive (302) are in an unaligned state in a safe state; the mass block (219) of the security mechanism layer (200) is arranged between the recoil mechanism substrate (102) of the substrate layer (100) and the ball lock mechanism groove (307) of the cover plate layer (300), and a stainless steel ball (303) is placed on the upper surface of the mass block (219).
2. The multi-physical-field environmental-relief MEMS security device of claim 1, wherein: the substrate layer (100) is of a silicon single-layer structure, the acceleration chamber (101) arranged on the substrate layer is of a through hole structure, the acceleration chamber (101) and the booster explosive (302) in the cover plate layer (300) are on the same axis, the top of the acceleration chamber (101) is covered by a metal partition plate (213) in the security mechanism layer (200) in a safe state, and is aligned with the primary explosive (214) in the security mechanism layer (200) in a security state; the recoil mechanism substrate (102) arranged in the substrate layer (100) is of a groove structure and is aligned with the mass block (219) in the security mechanism layer (200).
3. The multi-physical-field environmental-relief MEMS security device of claim 1, wherein: the security mechanism layer (200) adopts an SOI silicon chip which is divided into top silicon (201) and bottom silicon (202); a partition plate slideway (203) is arranged in the top silicon (201), a partition plate (I) is arranged in the middle of the partition plate slideway (203), the left side of the partition plate (I) is matched with an electric heating actuator (II), and the right side of the partition plate (I) is matched with a backseat mechanism (III); an electrothermal actuator driving electrode (204) is arranged at the two ends of the left side of the security mechanism layer (200), and a recoil mechanism feedback electrode (205) is arranged at the two ends of the right side of the security mechanism layer (200); the electrothermal actuator (II) is positioned in the top silicon (201), and a heat insulation cavity (206) is arranged in the bottom silicon (202) at the bottom of the electrothermal actuator (II).
4. The multi-physical-field environmental-relief MEMS security device of claim 3, wherein: the medical electric heating medical partition board is characterized in that sliding blocks (207) arranged at four corners of the partition board (I) are matched with a partition board slide way (203), an electric heating actuator locking groove (208) arranged at the left side edge of the partition board (I) is matched with an electric heating actuator (II), a recoil mechanism locking groove (209) arranged at the right side edge of the partition board (I) is matched with a recoil mechanism (III), the middle part of the partition board (I) is a silicon partition board (210), a medicine loading hole (211) is formed in the middle of the silicon partition board, a metal partition board mounting frame (212) arranged at the back of the partition board (I) is used for mounting a metal partition board (213), and the metal partition board (213) and the silicon partition board (210) form a composite partition board structure; an initiating explosive (214) is arranged in the middle of the metal partition plate (213); an S-shaped micro spring (215) is arranged on the partition plate (I), and the top of the S-shaped micro spring (215) is connected with the top silicon (201).
5. The multi-physical-field environmental-relief MEMS security device of claim 3, wherein: the electrothermal actuator (II) comprises a plurality of groups of V-shaped silicon beams (216), two ends of each V-shaped silicon beam (216) are fixedly connected to the top silicon (201) and apply voltage through the electrothermal actuator driving electrode (204), and an electrothermal actuator lock pin (217) is arranged in the middle of each V-shaped silicon beam (216).
6. The multi-physical-field environmental-relief MEMS security device of claim 3, wherein: the recoil mechanism (III) consists of an elastic beam (218) and a mass block (219), the elastic beam (218) is a wide beam arranged on the top silicon (201), the fixed end of the elastic beam (218) is connected to the top silicon (201), and the movable end of the elastic beam (218) is connected with the mass block (219); a backseat mechanism lock pin (220) is arranged on the left side of the mass block (219), and a metal strain gauge (221) is arranged above the elastic beam (218).
7. The multi-physical-field environmental-relief MEMS security device of claim 1, wherein: the cover plate layer (300) comprises a cover plate substrate (301), an explosion transfer agent (302) and a stainless steel ball (303); the cover plate substrate (301) is made of silicon material, and electrode leading-out windows (304) are respectively arranged at four corners of the cover plate substrate; an electric heating actuator observation window (305) is arranged on the left side of the cover plate substrate (301), an explosive propagation cavity (306) is arranged in the middle of the cover plate substrate and used for filling explosive propagation (302), a ball lock mechanism groove (307) is arranged on the right side of the cover plate substrate, the ball lock mechanism groove (307) corresponds to the position above a mass block (219) of the recoil mechanism (III), a stainless steel ball (303) is packaged inside the mass block (219) through the ball lock mechanism groove (307), and the stainless steel ball (303) is limited at different positions by a safety limit groove (308) and an environment-friendly limit groove (309) at the top of the ball lock mechanism groove (307).
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| CN202111307115.1A CN113916072B (en) | 2021-11-05 | 2021-11-05 | Multi-physical-field solution MEMS security device |
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| CN202111307115.1A CN113916072B (en) | 2021-11-05 | 2021-11-05 | Multi-physical-field solution MEMS security device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8276515B1 (en) * | 2008-05-01 | 2012-10-02 | The United States Of America As Represented By The Secretary Of The Army | Ultra-miniature electro-mechanical safety and arming device |
| CN104315929A (en) * | 2014-09-17 | 2015-01-28 | 西安交通大学 | MEMS weapon security apparatus |
| CN210089510U (en) * | 2019-05-27 | 2020-02-18 | 中国工程物理研究院电子工程研究所 | Double-stroke inertia safety mechanism |
| CN111288860A (en) * | 2020-03-13 | 2020-06-16 | 西安交通大学 | High-structural-strength MEMS security device with state self-checking function |
| CN112525022A (en) * | 2020-11-17 | 2021-03-19 | 南京理工大学 | Fuse security mechanism with modular design |
-
2021
- 2021-11-05 CN CN202111307115.1A patent/CN113916072B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8276515B1 (en) * | 2008-05-01 | 2012-10-02 | The United States Of America As Represented By The Secretary Of The Army | Ultra-miniature electro-mechanical safety and arming device |
| CN104315929A (en) * | 2014-09-17 | 2015-01-28 | 西安交通大学 | MEMS weapon security apparatus |
| CN210089510U (en) * | 2019-05-27 | 2020-02-18 | 中国工程物理研究院电子工程研究所 | Double-stroke inertia safety mechanism |
| CN111288860A (en) * | 2020-03-13 | 2020-06-16 | 西安交通大学 | High-structural-strength MEMS security device with state self-checking function |
| CN112525022A (en) * | 2020-11-17 | 2021-03-19 | 南京理工大学 | Fuse security mechanism with modular design |
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