CN105737694A - Linear driving MEMS fuse security device based on electro-thermal effect - Google Patents
Linear driving MEMS fuse security device based on electro-thermal effect Download PDFInfo
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- CN105737694A CN105737694A CN201610069338.1A CN201610069338A CN105737694A CN 105737694 A CN105737694 A CN 105737694A CN 201610069338 A CN201610069338 A CN 201610069338A CN 105737694 A CN105737694 A CN 105737694A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C15/00—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges
- F42C15/005—Combination-type safety mechanisms, i.e. two or more safeties are moved in a predetermined sequence to each other
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Abstract
A linear driving MEMS fuse security device based on the electro-thermal effect comprises a monocrystal silicon substrate, and a silicon dioxide insulation layer and a monocrystal silicon structure layer are sequentially manufactured on the monocrystal silicon substrate; a rectangular acceleration chamber hole is formed in the monocrystal silicon substrate; two locking electric heating actuators, four pushing electric heating actuators and one partition mechanism are manufactured in the monocrystal silicon structure layer, a partition plate of the partition mechanism shields the acceleration chamber hole, voltages are applied to the four pushing electric heating actuators successively in the mode of applying voltages to the two locking electric heating actuators and unlocking the two locking electric heating actuators, lever amplification mechanisms amplify thermal deformation generated by the electric heating actuators under corresponding working voltages for pushing driving blocks in the partition mechanism to complete corresponding displacement motion, the partition plate is completely staggered from the acceleration chamber hole through displacement accumulation of four times, and finally the fuse arming motion can be completed. The device has the advantages of being low in cost, high in intelligence degree and easy to integrate.
Description
Technical field
The present invention relates to Fuze Technology field, be specifically related to a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect.
Background technology
Fuse is the vitals in armament systems, and it utilizes target and environmental information, ignites in predefined conditions or the control device (system) of the ammunition warhead charge that ignites, is typically mounted on rocket, guided missile warhead and big gun/tank/mortar ammunition etc..Safety locking motion in fuse is the important component part of fuze system, and its basic function is by eliminating the potential energy reaching main charge, stops unexpected detonation, mainly stops the energy transmission of whole explosive train to realize.For this target, safety protection device stops unexpected arming often through coaxial machinery, thus " partition " explosive train.When being in safe mode, acceleration bore is blocked by dividing plate, stops flier plate material to pass through, thus stoping the unexpected detonation of explosive train.When weapon local environment meets initiation conditions, dividing plate is removed, and opens passage for flier plate material, it is ensured that flier plate material can arrive high explosive powder charge.
There is the shortcomings such as volume is big, difficult integrated in tradition fuse.Development along with ammunition technology, it is desirable to fuze function is constantly strengthened and extension, and the volume of fuse constrains the extension of its function.MEMS technology is applied in the design of fuse, it is possible to well solve this contradiction.MEMS fuse safety insurance device has that volume is little, reliability is high, can the many advantages such as mass, conventional ammunition is made to have more space multi-sensor detection circuit and main charge, improve degree of accuracy and the lethality of ammunition, make the intellectuality of fuse and dexterityization be possibly realized.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, it is an object of the invention to propose a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect, utilize lithographic technique to make movable structure layer, there is low cost, high feature intelligent, easy of integration.
In order to achieve the above object, the technical solution adopted in the present invention is:
nullA kind of linear drives MEMS fuse safety protection device based on electrocaloric effect，Including monocrystalline substrate 7，Monocrystalline substrate 7 makes silicon dioxide insulating layer 8 and monocrystal silicon structure layer 9 successively，The thickness of monocrystalline substrate 7 is 400～500um，Monocrystalline substrate 7 makes and has the rectangle of length and width respectively 300～400um to accelerate bore 10，The thickness of silicon dioxide insulating layer 8 is 2～3um，The thickness of monocrystal silicon structure layer 9 is 50～100um，Monocrystal silicon structure layer 9 makes separating mechanism 5，Rectangle is accelerated bore hole 10 and blocks completely by separating mechanism 5，The first way block 6a and the second way block 6b is made respectively in the left and right sides of the dividing plate 51 of separating mechanism 5，First way block 6a、Second way block 6b plays the effect that restriction separating mechanism 5 above-below direction moves，The locked electrical actuator S1 of the first order fabricated above at separating mechanism 5，The the first middle brace rod S13 making the first order locked electrical actuator S1 can extend in the draw-in groove of the first locked bar 58 of separating mechanism 5 and plays locked effect，The locked electrical actuator S2 in the making second level, lower section at separating mechanism 5，The the second middle brace rod S23 making the second level locked electrical actuator S2 can extend in separating mechanism 5 and plays locked effect in the draw-in groove of the second locked bar 59，The first V-type electrical actuator 1 fabricated above at separating mechanism 5，First is made in the first V-type electrical actuator 1 to amplify the lower end of lever 15 lower than the most significant end of the first drive block 54 in separating mechanism 5，The second V-type electrical actuator 2 fabricated above at separating mechanism 5，Second is made in the second V-type electrical actuator 2 to amplify the lower end of lever 21 slightly above the most significant end of the second drive block 55 in separating mechanism 5，The 3rd V-type electrical actuator 3 is made in the lower section of separating mechanism 5，The 3rd is made in the 3rd V-type electrical actuator 3 to amplify the upper end of lever 31 slightly below the least significant end of the 3rd drive block 56 in separating mechanism 5，The 4th V-type electrical actuator 4 is made in the lower section of separating mechanism 5，The 4th is made in the 4th V-type electrical actuator 4 to amplify the upper end of lever 41 slightly below the least significant end of the 4th drive block 57 in separating mechanism 5，First way block 6a、Second way block 6b、The locked electrical actuator S1 of the first order、The locked electrical actuator S2 in the second level、First V-type electrical actuator 1、Second V-type electrical actuator 2、3rd V-type electrical actuator 3 and the 4th V-type electrical actuator 4 are all produced in monocrystal silicon structure layer 9.
nullThe locked electrical actuator S1 of the described first order includes the first electrode anchor point S12a and the second electrode anchor point S12b，First electrode S11a and the second electrode S11b is produced on the first electrode anchor point S12a and the second electrode anchor point S12b，The two ends of the first V-structure in parallel are connected with the first electrode anchor point S12a and the second electrode anchor point S12b respectively，Connect with one end of the first middle brace rod S13 in the middle part of first V-structure，The other end of the first middle brace rod S13 stretches in the draw-in groove of locked bar 58 and plays locked effect，First electrode anchor point S12a and the second electrode anchor point S12b is connected with silicon dioxide insulating layer 8，First V-structure、First middle brace rod S13、First electrode S11a and the second electrode S11b is suspension movable structure.
The structure of the described second level locked electrical actuator S2 is identical with the first order locked electrical actuator S1's, and the second level locked electrical actuator S2 and the locked electrical actuator S1 of the first order is oppositely arranged.
Described separating mechanism 5 includes dividing plate 51, the acceleration thorax bore 10 of lower section is blocked by dividing plate 51 completely, first drive block 54 and the lower end of the second drive block 55 are connected with the upside of dividing plate 51, 3rd drive block 56 and the upper end of the 4th drive block 57 are connected with the downside of dividing plate 51, the lower end of the first locked bar 58 is connected with the upside of dividing plate 51, the upper end of the second locked bar 59 is connected with the downside of dividing plate 51, the right-hand member of dividing plate 51 is connected with the left end of S type silicon spring 52, the right-hand member of S type silicon spring 52 is connected with fixed anchor point 53, fixed anchor point 53 is connected with silicon dioxide insulating layer 8, dividing plate 51, S type spring 52, four drive block 54-57 and two locked bar 58-59 are suspension movable structure.
nullThe first described V-type electrical actuator 1 includes the 3rd electrode anchor point 12a and the four electrode anchor point 12b，3rd electrode 11a and the four electrode 11b is produced on the 3rd electrode anchor point 12a and the four electrode anchor point 12b，The two ends of the second V-structure in parallel are connected with the 3rd electrode anchor point 12a and the 4th electrode anchor point 12b respectively，Second V-structure and the 3rd middle brace rod 13 connect，One end of 3rd middle brace rod 13 is amplified lever 15 by the first flexible bending curved beam 14 with first and is connected，First upper end amplifying lever 15 is connected with the 5th fixed anchor point 17 by the second flexible bending curved beam 16，First lower end amplifying lever 15 is triangular shape，And the least significant end of triangular shape contact is lower than the most significant end of the first drive block 54，Ensure that the first V-type electrical actuator 1 can promote separating mechanism 5，3rd electrode anchor point 12a、4th electrode anchor point 12b and the 5th fixed anchor point 17 are connected with silicon dioxide insulating layer 8，Second V-structure、3rd middle brace rod 13、First flexible bending curved beam 14、First amplification lever 15 and the second flexible bending curved beam 16 are suspension movable structure.
The second described V-type electrical actuator 2 is similar with the first V-type electrical actuator 1 structure, unique difference is that in the second V-type electrical actuator 2, second amplification lever 21 is broken line type, second amplifies the least significant end most significant end higher than the second drive block 55 of the triangular shape contact bottom lever 21 simultaneously, it is ensured that the separating mechanism 5 contact not amplified lever 21 by second that is moved to the left during the first V-type electrical actuator 1 promotes stops.
The structure of the 3rd described V-type electrical actuator the 3, the 4th V-type electrical actuator 4 is identical with the second V-type electrical actuator 2.
Compared with tradition fuse safety protection device, advantages of the present invention is: cost degradation, utilizes the IC technique of existing maturation, it is possible to achieve manufacture on a large scale, significantly reduces the cost of product；Intellectuality, compared with the traditional fuse safety protection device encouraged with relying on environmental forces (such as acceleration) to produce, present invention utilizes electrocaloric effect and carrys out driving element generation corresponding actions, and by signal of telecommunication control, intelligence degree is higher；Integrated, utilize the device volume that MEMS related process makes little, compared with tradition fuse safety protection device, in equal area, it is possible to more sensor integration, raising device adaptive faculty under complex environment.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention, the top view that wherein figure (a) is structure, and figure (b) is the sectional view of the Section A-A of figure (a).
Fig. 2 is the schematic diagram after the first order locked electrical actuator S1 and the locked electrical actuator S2 in the second level unlocks.
Fig. 3 is the schematic diagram that the first V-type electrical actuator 1 promotes separating mechanism 5.
Fig. 4 is the schematic diagram that the second V-type electrical actuator 2 promotes separating mechanism 5.
Fig. 5 is the schematic diagram that the 3rd V-type electrical actuator 3 promotes separating mechanism 5.
Fig. 6 is the schematic diagram that the 4th V-type electrical actuator 4 promotes separating mechanism 5.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further described.
nullWith reference to Fig. 1，A kind of linear drives MEMS fuse safety protection device based on electrocaloric effect，Including monocrystalline substrate 7，Silicon dioxide insulating layer 8 and monocrystal silicon structure layer 9 is made successively in monocrystalline substrate 7，The thickness of monocrystalline substrate 7 is 400～500um，Monocrystalline substrate 7 makes and has the rectangle of length and width respectively 300～400um to accelerate bore 10，The thickness of silicon dioxide insulating layer 8 is 2～3um，The thickness of monocrystal silicon structure layer 9 is 50～100um，Monocrystal silicon structure layer 9 makes separating mechanism 5，Rectangle is accelerated bore hole 10 and blocks completely by separating mechanism 5，The first way block 6a and the second way block 6b is made respectively in the left and right sides of the dividing plate 51 of separating mechanism 5，First way block 6a、Second way block 6b plays the effect that restriction separating mechanism 5 above-below direction moves，The locked electrical actuator S1 of the first order fabricated above at separating mechanism 5，The the first middle brace rod S13 making the first order locked electrical actuator S1 can extend in the draw-in groove of the first locked bar 58 of separating mechanism 5 and plays locked effect，The locked electrical actuator S2 in the making second level, lower section at separating mechanism 5，The the second middle brace rod S23 making the second level locked electrical actuator S2 can extend in separating mechanism 5 and plays locked effect in the draw-in groove of the second locked bar 59，The first V-type electrical actuator 1 fabricated above at separating mechanism 5，First is made in the first V-type electrical actuator 1 to amplify the lower end of lever 15 lower than the most significant end of the first drive block 54 in separating mechanism 5，The second V-type electrical actuator 2 fabricated above at separating mechanism 5，Second is made in the second V-type electrical actuator 2 to amplify the lower end of lever 21 slightly above the most significant end of the second drive block 55 in separating mechanism 5，The 3rd V-type electrical actuator 3 is made in the lower section of separating mechanism 5，The 3rd is made in the 3rd V-type electrical actuator 3 to amplify the upper end of lever 31 slightly below the least significant end of the 3rd drive block 56 in separating mechanism 5，The 4th V-type electrical actuator 4 is made in the lower section of separating mechanism 5，The 4th is made in the 4th V-type electrical actuator 4 to amplify the upper end of lever 41 slightly below the least significant end of the 4th drive block 57 in separating mechanism 5，First way block 6a、Second way block 6b、The locked electrical actuator S1 of the first order、The locked electrical actuator S2 in the second level、First V-type electrical actuator 1、Second V-type electrical actuator 2、3rd V-type electrical actuator 3 and the 4th V-type electrical actuator 4 are all produced in monocrystal silicon structure layer 9.
nullThe locked electrical actuator S1 of the described first order includes the first electrode anchor point S12a and the second electrode anchor point S12b，First electrode S11a and the second electrode S11b is produced on the first electrode anchor point S12a and the second electrode anchor point S12b，The two ends of the first V-structure in parallel are connected with the first electrode anchor point S12a and the second electrode anchor point S12b respectively，Connect with one end of the first middle brace rod S13 in the middle part of first V-structure，The other end of the first middle brace rod S13 stretches in the draw-in groove of locked bar 58 and plays locked effect，First electrode anchor point S12a and the second electrode anchor point S12b is connected with silicon dioxide insulating layer 8，First V-structure、First middle brace rod S13、First electrode S11a and the second electrode S11b is suspension movable structure.
The structure of the described second level locked electrical actuator S2 is identical with the first order locked electrical actuator S1's, and the second level locked electrical actuator S2 and the locked electrical actuator S1 of the first order is oppositely arranged.
Described separating mechanism 5 includes dividing plate 51, the acceleration thorax bore 10 of lower section is blocked by dividing plate 51 completely, first drive block 54 and the lower end of the second drive block 55 are connected with the upside of dividing plate 51, 3rd drive block 56 and the upper end of the 4th drive block 57 are connected with the downside of dividing plate 51, the lower end of the first locked bar 58 is connected with the upside of dividing plate 51, the upper end of the second locked bar 59 is connected with the downside of dividing plate 51, the right-hand member of dividing plate 51 is connected with the left end of S type silicon spring 52, the right-hand member of S type silicon spring 52 is connected with fixed anchor point 53, fixed anchor point 53 is connected with silicon dioxide insulating layer 8, dividing plate 51, S type spring 52, four drive block 54-57 and two locked bar 58-59 are suspension movable structure.
nullThe first described V-type electrical actuator 1 includes the 3rd electrode anchor point 12a and the four electrode anchor point 12b，3rd electrode 11a and the four electrode 11b is produced on the 3rd electrode anchor point 12a and the four electrode anchor point 12b，The two ends of the second V-structure in parallel are connected with the 3rd electrode anchor point 12a and the 4th electrode anchor point 12b respectively，Second V-structure and the 3rd middle brace rod 13 connect，One end of 3rd middle brace rod 13 is amplified lever 15 by the first flexible bending curved beam 14 with first and is connected，First upper end amplifying lever 15 is connected with the 5th fixed anchor point 17 by the second flexible bending curved beam 16，First lower end amplifying lever 15 is triangular shape，And the least significant end of triangular shape contact is lower than the most significant end of the first drive block 54，Ensure that the first V-type electrical actuator 1 can promote separating mechanism 5，3rd electrode anchor point 12a、4th electrode anchor point 12b and the 5th fixed anchor point 17 are connected with silicon dioxide insulating layer 8，Second V-structure、3rd middle brace rod 13、First flexible bending curved beam 14、First amplification lever 15 and the second flexible bending curved beam 16 are suspension movable structure.
The second described V-type electrical actuator 2 is similar with the first V-type electrical actuator 1 structure, unique difference is that in the second V-type electrical actuator 2, second amplification lever 21 is broken line type, second amplifies the least significant end most significant end higher than the second drive block 55 of the triangular shape contact bottom lever 21 simultaneously, it is ensured that the separating mechanism 5 contact not amplified lever 21 by second that is moved to the left during the first V-type electrical actuator 1 promotes stops.The structure of broken line type makes contact above-below direction when moving left and right also produce bigger displacement, ensure that the least significant end that separating mechanism 5 promotes period second to amplify lever 21 contact at the second V-type electrical actuator 2 can be moved downward to the most significant end lower than drive block 55, thus promoting separating mechanism 5 to be moved to the left.
The structure of the 3rd described V-type electrical actuator the 3, the 4th V-type electrical actuator 4 is identical with the second V-type electrical actuator 2.
The operation principle of the present invention is:
With reference to Fig. 2, by the first electrode S11a and the second electrode S11b, the locked electrical actuator S1 of the first order is applied driving voltage, the locked electrical actuator S1 temperature distortion of the first order produces displacement upwards, drive the first middle brace rod S13 to move up and depart from the draw-in groove of the first locked bar 58, thus completing the unblock of the locked electrical actuator S1 of the first order；The unblock principle of the second level locked electrical actuator S2 is similar with the first order locked electrical actuator S1's.
With reference to Fig. 3, keep the locked electrical actuator S2 of the first order locked electrical actuator S1 and the second level is applied voltage, by the 3rd electrode 11a and the four electrode 11b, first V-type electrical actuator 1 is applied voltage, first V-type electrical actuator 1 temperature distortion produces displacement to the left, drives the first flexible bending curved beam 14 to be moved to the left by the 3rd middle brace rod 13；Owing to the left end of the second flexible bending curved beam 16 is connected with fixed anchor point 17, second flexible bending curved beam 16 can only be bent downwardly, then first amplifies the original displacement equations that the first V-type electrical actuator 1 is produced by lever 15, final first amplifies lever 15 produces bigger displacement to the left, and promote the first drive block 54 by the contact of triangular shape, so that partition-type structures 5 produces bigger movement to the left.
With reference to Fig. 4, keep the locked electrical actuator S2 of the first order locked electrical actuator S1 and the second level is applied voltage, stop the first V-type electrical actuator 1 is applied voltage, first V-type electrical actuator 1 dispels the heat gradually and returns to the position being not powered at first when pressing, by the 5th electrode 22a and the six electrode 22b, second V-type electrical actuator 2 is applied voltage, second V-type electrical actuator 2 temperature distortion produces displacement to the left, drives the 3rd flexible bending curved beam 24 to be moved to the left by the 4th middle brace rod 23；Owing to left end and the 6th fixed anchor point 26 of the 4th flexible bending curved beam 25 are connected, 4th flexible bending curved beam 25 can only be bent downwardly, then second amplifies the original displacement equations that the second V-type electrical actuator 2 is produced by lever 21, final second amplifies lever 21 produces bigger displacement to the left, and promote the second drive block 55 by the contact of triangular shape, so that partition-type structures 5 produces bigger movement to the left, it is broken line type that second in the second V-type electrical actuator 2 amplifies lever 21；The second triangular shape contact amplifying lever 21 can produce downwards larger displacement while having larger displacement to the left, it is ensured that the least significant end of triangle contact moves to the most significant end lower than the second drive block 55, thus completing to promote the action of separating mechanism 5.
With reference to Fig. 5, keep the locked electrical actuator S2 of the first order locked electrical actuator S1 and the second level is applied voltage, stop the first V-type electrical actuator 1 and the second V-type electrical actuator 2 are applied voltage, first V-type electrical actuator 1 and the second V-type electrical actuator 2 dispel the heat gradually and return to the position being not powered at first when pressing, and the 3rd V-type electrical actuator 3 operation principle is similar with the second V-type electrical actuator 2；By the 3rd V-type electrical actuator 3 is applied voltage, finally make the 3rd amplification lever 31 promote the 3rd drive block 56, complete the action promoting separating mechanism 5 to be moved to the left.
With reference to Fig. 6, keep the locked electrical actuator S2 of the first order locked electrical actuator S1 and the second level is applied voltage, stop first V-type electrical actuator the 1, second V-type electrical actuator 2 and the 3rd V-type electrical actuator 3 are applied voltage, first V-type electrical actuator the 1, second V-type electrical actuator 2 and the 3rd V-type electrical actuator 3 dispel the heat gradually and return to the position being not powered at first when pressing, and the 4th V-type electrical actuator 4 operation principle is similar with the second V-type electrical actuator 2；By the 4th V-type electrical actuator 4 is applied voltage, the 4th amplification lever 41 is finally made to promote the 4th drive block 57, complete the action promoting separating mechanism 5 to be moved to the left, after the 4th V-type electrical actuator 4 promotes separating mechanism 5 to be moved to the left, dividing plate 51 staggers completely with accelerating thorax bore 10, completes the arming action of fuse.
Claims (7)
- null1. the linear drives MEMS fuse safety protection device based on electrocaloric effect，Including monocrystalline substrate (7)，Silicon dioxide insulating layer (8) and monocrystal silicon structure layer (9) is made successively in monocrystalline substrate (7)，The thickness of monocrystalline substrate (7) is 400～500um，The upper making of monocrystalline substrate (7) has the rectangle of length and width respectively 300～400um to accelerate bore (10)，The thickness of silicon dioxide insulating layer (8) is 2～3um，The thickness of monocrystal silicon structure layer (9) is 50～100um，Monocrystal silicon structure layer (9) makes separating mechanism (5)，Rectangle is accelerated bore hole (10) and blocks completely by separating mechanism (5)，It is characterized in that: make the first way block (6a) and the second way block (6b) respectively in the left and right sides of the dividing plate (51) of separating mechanism (5)，First way block (6a)、Second way block (6b) plays the effect that restriction separating mechanism (5) above-below direction moves，The locked electrical actuator of the first order fabricated above (S1) at separating mechanism (5)，The first middle brace rod (S13) making the locked electrical actuator of the first order (S1) can extend in the draw-in groove of the first locked bar (58) of separating mechanism (5) and plays locked effect，The locked electrical actuator in the making second level, lower section (S2) at separating mechanism (5)，The second middle brace rod (S23) making the locked electrical actuator in the second level (S2) can extend in separating mechanism (5) and plays locked effect in the draw-in groove of the second locked bar (59)，The first V-type electrical actuator (1) fabricated above at separating mechanism (5)，First is made in the first V-type electrical actuator (1) to amplify the lower end of lever (15) lower than the most significant end of the first drive block (54) in separating mechanism (5)，The second V-type electrical actuator (2) fabricated above at separating mechanism (5)，Second is made in the second V-type electrical actuator (2) to amplify the lower end of lever (21) slightly above the most significant end of the second drive block (55) in separating mechanism (5)，The 3rd V-type electrical actuator (3) is made in the lower section of separating mechanism (5)，The 3rd is made in the 3rd V-type electrical actuator (3) to amplify the upper end of lever (31) slightly below the least significant end of the 3rd drive block (56) in separating mechanism (5)，The 4th V-type electrical actuator (4) is made in the lower section of separating mechanism (5)，The 4th is made in the 4th V-type electrical actuator (4) to amplify the upper end of lever (41) slightly below the least significant end of the 4th drive block (57) in separating mechanism (5)，First way block (6a)、Second way block (6b)、The locked electrical actuator of the first order (S1)、The locked electrical actuator in the second level (S2)、First V-type electrical actuator (1)、Second V-type electrical actuator (2)、3rd V-type electrical actuator (3) and the 4th V-type electrical actuator 4 () are all produced in monocrystal silicon structure layer (9).
- null2. a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect according to claim 1，It is characterized in that: the locked electrical actuator of the described first order (S1) includes the first electrode anchor point (S12a) and the second electrode anchor point (S12b)，First electrode (S11a) and the second electrode (S11b) are produced on the first electrode anchor point (S12a) and the second electrode anchor point (S12b)，The two ends of the first V-structure in parallel are connected with the first electrode anchor point (S12a) and the second electrode anchor point (S12b) respectively，Connect with one end of the first middle brace rod (S13) in the middle part of first V-structure，The other end of the first middle brace rod (S13) stretches in the draw-in groove of the first locked bar (58) and plays locked effect，First electrode anchor point (S12a) is connected with silicon dioxide insulating layer (8) with the second electrode anchor point (S12b)，First V-structure、First middle brace rod (S13)、First electrode (S11a) and the second electrode (S11b) are suspension movable structure.
- 3. a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect according to claim 1, it is characterized in that: the structure of the locked electrical actuator in the described second level (S2) is identical with the locked electrical actuator of the first order (S1), the locked electrical actuator in the second level (S2) and the locked electrical actuator of the first order (S1) are oppositely arranged.
- null4. a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect according to claim 1，It is characterized in that: described separating mechanism (5) includes dividing plate (51)，Acceleration thorax bore (10) of lower section is blocked by dividing plate (51) completely，The lower end of the first drive block (54) and the second drive block (55) is connected with the upside of dividing plate (51)，3rd drive block (56) and the upper end of the 4th drive block (57) are connected with the downside of dividing plate (51)，The lower end of the first locked bar (58) is connected with the upside of dividing plate (51)，The upper end of the second locked bar (59) is connected with the downside of dividing plate (51)，The right-hand member of dividing plate (51) is connected with the left end of S type silicon spring (52)，The right-hand member of S type silicon spring (52) is connected with fixed anchor point (53)，Fixed anchor point (53) is connected with silicon dioxide insulating layer (8)，Dividing plate (51)、S type spring (52)、Four drive blocks (54-57) and two locked bars (58-59) are suspension movable structure.
- null5. a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect according to claim 1，It is characterized in that: the first described V-type electrical actuator (1) includes the 3rd electrode anchor point (12a) and the 4th electrode anchor point (12b)，3rd electrode (11a) and the 4th electrode (11b) are produced on the 3rd electrode anchor point (12a) and the 4th electrode anchor point (12b)，The two ends of the second V-structure in parallel are connected with the 3rd electrode anchor point (12a) and the 4th electrode anchor point (12b) respectively，Second V-structure and the 3rd middle brace rod (13) connect，One end of 3rd middle brace rod (13) is amplified lever (15) by the first flexible bending curved beam (14) with first and is connected，First upper end amplifying lever (15) is connected with the 5th fixed anchor point (17) by the second flexible bending curved beam (16)，First lower end amplifying lever (15) is triangular shape，And the least significant end of triangular shape contact is lower than the most significant end of the first drive block (54)，Ensure that the first V-type electrical actuator (1) can promote separating mechanism (5)，3rd electrode anchor point (12a)、4th electrode anchor point (12b) and the 5th fixed anchor point (17) are connected with silicon dioxide insulating layer (8)，Second V-structure、3rd middle brace rod (13)、First flexible bending curved beam (14)、First amplification lever (15) and the second flexible bending curved beam (16) are suspension movable structure.
- 6. a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect according to claim 1, it is characterized in that: the second described V-type electrical actuator (2) is similar with the first V-type electrical actuator (1) structure, unique difference is that in the second V-type electrical actuator (2), the second amplification lever (21) is broken line type, second amplifies the least significant end most significant end higher than the second drive block (55) of the triangular shape contact of lever (21) bottom simultaneously, ensure that the separating mechanism (5) contact not amplified lever (21) by second that is moved to the left during the first V-type electrical actuator (1) promotes stops.
- 7. a kind of linear drives MEMS fuse safety protection device based on electrocaloric effect according to claim 1, it is characterised in that: described the 3rd V-type electrical actuator (3), the structure of the 4th V-type electrical actuator (4) are identical with the second V-type electrical actuator (2).
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| CN107742598A (en) * | 2017-09-26 | 2018-02-27 | 西安交通大学 | A kind of electrothermal drive bistable state mems switch |
| CN109029137A (en) * | 2018-09-11 | 2018-12-18 | 西安交通大学 | A kind of bi-directional drive MEMS safety protection device |
| CN109307456A (en) * | 2018-09-05 | 2019-02-05 | 南京理工大学 | Micro electronmechanical power supply and timing logic control method |
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