CN113910119A - Polishing pad aging treatment method, roller clamp and operation method - Google Patents

Polishing pad aging treatment method, roller clamp and operation method Download PDF

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Publication number
CN113910119A
CN113910119A CN202111194922.7A CN202111194922A CN113910119A CN 113910119 A CN113910119 A CN 113910119A CN 202111194922 A CN202111194922 A CN 202111194922A CN 113910119 A CN113910119 A CN 113910119A
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CN
China
Prior art keywords
polishing pad
aging
resin
abrasive
powder
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Pending
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CN202111194922.7A
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Chinese (zh)
Inventor
徐暎昊
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Hangzhou Semiconductor Wafer Co Ltd
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Hangzhou Semiconductor Wafer Co Ltd
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Application filed by Hangzhou Semiconductor Wafer Co Ltd filed Critical Hangzhou Semiconductor Wafer Co Ltd
Priority to CN202111194922.7A priority Critical patent/CN113910119A/en
Publication of CN113910119A publication Critical patent/CN113910119A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0072Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

The invention discloses a polishing pad aging treatment method, a roller clamp and an operation method, wherein the method comprises the steps of filling a die piece with abrasive grains, an abrasive paste adhesive and an abrasive paste to a preset depth, and stopping the filling, wherein the die piece is regularly arranged; placing the die piece in an aging cylinder for heating and aging for 60-80 min, wherein the curing temperature is 75-80 ℃; filling the depression of the heated and aged die piece with a superposed adhesive without abrasive grains until reaching a predetermined depth, and then naturally drying; demolding the naturally dried die piece to obtain an aged grinding layer, bonding the grinding layer and the substrate material through a superposed adhesive, and curing to obtain the polishing pad; the technological performance of the polishing pad can be improved through aging, magnetic molecules in abrasive particles, abrasive paste adhesive and abrasive paste can be adsorbed by a magnetic field generated by the magnet in the aging process, the distance between materials in the polishing pad is reduced, and the performance of the polishing pad is improved.

Description

Polishing pad aging treatment method, roller clamp and operation method
Technical Field
The invention relates to the technical field of polishing pad production, in particular to a polishing pad aging treatment method, a roller clamp and an operation method.
Background
The polishing pad is also called polishing leather, polishing cloth, polishing sheet and important auxiliary materials for determining the surface quality in chemical mechanical polishing, and can be divided into an abrasive polishing pad and an abrasive-free polishing pad according to whether the polishing pad contains abrasives or not; according to different materials, the polishing pad can be divided into a polyurethane polishing pad, a non-woven fabric polishing pad and a composite polishing pad; the polishing pad can be roughly classified into a planar type, a grid type and a spiral type according to the difference of the surface structure, and the overall performance of the polishing pad manufactured in the current production process of the polishing pad is often unstable, so that a new design scheme needs to be provided to solve the problems in the background art.
Disclosure of Invention
It is an object of the present invention to provide a polishing pad conditioning method and roller clamp and method of operation and method of use that solve the above-mentioned problems of the prior art.
The invention aims to solve the problems that:
how to greatly improve the performance of the polishing pad by adding aging treatment.
The purpose of the invention can be realized by the following technical scheme:
in a first aspect, the present invention provides a method for conditioning a polishing pad, comprising the steps of:
the method comprises the following steps: filling the depressions of the mold pieces with a binder comprising abrasive grains, an abrasive slurry and an abrasive slurry, and stopping after reaching a predetermined depth, wherein the depressions of the mold pieces are regularly arranged;
step two: placing the die piece in an aging cylinder for heating and aging for 60-80 min, wherein the curing temperature is 75-80 ℃;
step three: filling the depression of the heated and aged die piece with a superposed adhesive without abrasive grains until reaching a predetermined depth, and then naturally drying;
step four: and demolding the naturally dried die piece to obtain an aged grinding layer, bonding the grinding layer and the base material through the superposed adhesive, and curing to obtain the polishing pad.
Furthermore, the aging barrel comprises a barrel-shaped shell, an electromagnetic induction coil is wound on the outer side wall of the barrel-shaped shell, and the end part of the electromagnetic induction coil is connected with an alternating current power supply;
the bottom of tube-shape shell is equipped with the intermediate layer, and interbedded one side sets up with interbedded opposite side back of the body mutually, and interbedded opposite side links to each other with the inside wall of tube-shape shell and prescribes a limit to the appearance chamber of tube-shape shell, is equipped with magnet in the intermediate layer, and magnet accounts for interbedded two-thirds's volume.
Further, a rotating disc is rotatably arranged at the bottom end of the accommodating cavity, and a fixed gap is formed between the edge of the rotating disc and the cavity side wall of the accommodating cavity;
the upper end of the rotating disc is provided with a plurality of negative ion oxidation particle filtering holes, the negative ion oxidation particle filtering holes are filled with a filtering plate, and the negative ion oxidation particle filtering holes extend to the shell of the aging cylinder along the side wall of the inner cavity of the containing cavity;
a plurality of exhaust fans are arranged on the shell of the aging cylinder, and the exhaust fans are correspondingly connected with the anion oxidized particle filtering holes.
Furthermore, the upper end of the rotating disc is also provided with a radiation lamp, the radiation lamp is used for curing the filler in the die piece, and the radiation lamp is an ultraviolet lamp.
Furthermore, the filter plate consists of negative ion ceramic composite powder, shale powder and medical stone powder;
wherein the anion ceramic composite powder, the shale powder and the medical stone powder are as follows by weight percent: 2-60% of negative ion ceramic composite powder, 30-70% of shale powder and the balance of medical stone powder;
the particle size of the negative ion ceramic composite powder is 6-120 um; the particle size of the added shale powder is 1-30 um; the particle size of the medical stone powder is 2-100um, and the particle size of the dried and molded negative ion ceramsite is 3-6 um.
Further, the abrasive slurry binder is selected from the group consisting of phenolic, aminoplast, urethane, epoxy, acrylate, acrylated isocyanurate, urea-formaldehyde, isocyanurate, acrylated urethane, acrylated epoxy, resol-phenolic, polyester, vinyl, melamine, and mixtures thereof;
the laminating adhesive is selected from phenolic resin, aminoplast resin, polyurethane resin, epoxy resin, acrylate resin, acrylated isocyanurate resin, urea-formaldehyde resin, isocyanurate resin, acrylated polyurethane resin, acrylated epoxy resin, resol-phenolic resin, polyester resin, vinyl resin, melamine resin and mixtures thereof;
the abrasive particles are selected from the group consisting of fused aluminum oxide, heat treated aluminum oxide, silicon carbide, aluminum oxide zirconia, garnet, diamond, cubic boron nitride, silica, ceria, sol-gel alumina, chromia, zirconia, iron oxide, and mixtures thereof.
In a second aspect, the present invention provides a roller clamp comprising a polishing pad as described in any one of the above, the roller clamp being shaped by machining of the polishing pad.
In a third aspect, the present invention provides a method of operating a roller clamp, comprising:
installing a polishing pad within a polishing machine;
fixing a roller clamp in a polishing machine;
and (4) switching on a power supply of the polishing machine, and driving the polishing pad to polish the roller clamp smoothly by the engine.
Compared with the prior art, the invention has the beneficial effects that:
an electromagnetic induction coil is wound on the outer side wall of the cylindrical shell, and the end part of the electromagnetic induction coil is connected with an alternating current power supply; the bottom of tube-shape shell is equipped with the intermediate layer, and interbedded one side sets up with interbedded opposite side mutually back to, and the chamber that holds of tube-shape shell is injectd to interbedded opposite side and tube-shape shell's inside wall, is equipped with magnet in the intermediate layer, and magnet accounts for interbedded two-thirds's volume for the polishing pad produces the magnetic field and can adsorb the grit, abrasive material paste thick liquid adhesive and the interior magnetic molecule that has of abrasive material paste thick liquid at ageing in-process magnet, reduces the interval between the material in the polishing pad, promotes the performance of polishing pad.
By starting the alternating current, countless strong small eddy currents are generated on the die piece in the aging cylinder along with the continuous change of the current direction of the alternating current, so that the die piece continuously heats, and the reaction of the mixture in the die piece in the aging cylinder is promoted.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of the principle of the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description of the embodiments, structures, features and effects according to the present invention will be made with reference to the accompanying drawings and preferred embodiments.
Referring to FIG. 1, a method for conditioning a polishing pad includes the steps of:
the method comprises the following steps: filling the depressions of the mold pieces with a binder comprising abrasive grains, an abrasive slurry and an abrasive slurry, and stopping after reaching a predetermined depth, wherein the depressions of the mold pieces are regularly arranged;
step two: placing the die piece in an aging cylinder for heating and aging for 60-80 min, wherein the curing temperature is 75-80 ℃;
step three: filling the depression of the heated and aged die piece with a superposed adhesive without abrasive grains until reaching a predetermined depth, and then naturally drying;
step four: and demolding the naturally dried die piece to obtain an aged grinding layer, bonding the grinding layer and the base material through the superposed adhesive, and curing to obtain the polishing pad.
In some embodiments, the polishing pad is an important accessory for determining surface quality in chemical mechanical polishing, and can be classified into an abrasive polishing pad and a non-abrasive polishing pad according to whether an abrasive is contained, and the polishing pad shown in the application is an abrasive polishing pad, and an aging step is added in the manufacturing process of the polishing pad, so that the performance of the polishing pad is improved.
In some embodiments, the abrasive material comprises a base material and an abrasive layer disposed on one surface of the base material, wherein the base material is flexible to facilitate processing of workpieces having spherical or arcuate shapes such as roller chucks.
The substrate material may be, for example, a polymer film (e.g., a polyester film). The polymer film may be primed with, for example, a polyethylene-acrylic material to promote adhesion of the base material to the abrasive composites.
In some embodiments, the aged abrasive layer has abrasive composites comprising a matrix of binder and abrasive particles dispersed in the matrix as a structural component, the abrasive composites being made from a slurry comprising a plurality of abrasive particles dispersed in the binder in an uncured, i.e., ungelled, state, and after curing, i.e., gelling, the abrasive composites are cured to a size that varies depending on the type of abrasive particle or the intended use of the abrasive, e.g., 0.01 to 1 micron, preferably 0.01 to 0.5 micron, more preferably 0.01 to 0.1 micron for final lapping and 0.5 to 20 microns, preferably 0.5 to 10 microns for curved surface forming rough lapping.
In particular embodiments, the abrasive particles are selected from the group consisting of fused aluminum oxide, heat treated aluminum oxide, silicon carbide, aluminum oxide zirconia, garnet, diamond, cubic boron nitride, silica, ceria, sol-gel alumina, chromia, zirconia, iron oxide, and mixtures thereof.
The abrasive slurry binder is cured or gelled to form the binder layer, and preferred examples of the abrasive slurry binder include phenolic resins, resol-phenolic resins, aminoplast resins, urethane resins, epoxy resins, acrylate resins, polyester resins, vinyl resins, melamine resins, acrylated isocyanurate resins, urea-formaldehyde resins, isocyanurate resins, acrylated urethane resins, acrylated epoxy resins, and mixtures thereof.
In some embodiments, the laminating adhesive is selected from the group consisting of phenolic, aminoplast, urethane, epoxy, acrylate, acrylated isocyanurate, urea-formaldehyde, isocyanurate, acrylated urethane, acrylated epoxy, resol-phenolic, polyester, vinyl, melamine, and mixtures thereof;
the laminating adhesive may be radiation curable, a radiation curable adhesive being an adhesive that is at least partially curable or at least partially polymerizable with radiation, using an energy source, such as heat, infrared radiation, electron beam radiation, ultraviolet radiation or visible radiation, depending on the adhesive used.
In the present invention, the irradiation lamp is a violet lamp, and thus a photoinitiator is required to initiate radical polymerization, for example, organic peroxides, azo compounds, quinones, benzophenones, nitroso compounds, acrylic halides, hydrazones, mercapto compounds, pyrylium compounds, triacrylimidazole, bisimidazole, chloroalkyltriazines, benzoin ethers, benzyl ketals, thioxanthones, and acetophenone derivatives.
In some embodiments, the mold sheet is placed in an aging cylinder for heating and aging for 60-80 min, the curing temperature is 75-80 ℃, and the process performance of the polishing pad can be improved by aging:
in some specific embodiments, the mold pieces are placed in an aging cylinder for heating and aging for 60min, and the curing temperature is 75 ℃; in some specific embodiments, the mold pieces are placed in an aging cylinder for heating and aging for 70min, and the curing temperature is 75 ℃; in some specific embodiments, the mold pieces are placed in an aging cylinder for heating and aging for 80min, and the curing temperature is 75 ℃; in some specific embodiments, the mold pieces are placed in an aging cylinder for heating and aging for 80min, and the curing temperature is 77 ℃; in some embodiments, the mold pieces are placed in an aging cylinder for thermal aging at a curing temperature of 80 ℃ for 80min, and the thermal aging is performed for 60-80 min, so that the curing temperature is 75-80 ℃ which is optimal for aging compared to the polishing pad.
In some specific embodiments, a cylindrical aging device, hereinafter referred to as an aging cylinder, is used, the aging cylinder includes a cylindrical housing, the stirring sleeve is made of heat-conducting aluminum, the stirring sleeve is made of ceramic, an electromagnetic induction coil is wound on the outer side wall of the cylindrical housing, and the end of the electromagnetic induction coil is connected with an alternating current power supply;
can produce certain heat through electromagnetic induction coil, heat the appearance chamber of an ageing section of thick bamboo, can change the temperature in the varactor intracavity through the regulation to alternating current power supply, the different ageing demands of being convenient for.
In some specific embodiments, the bottom of tube-shape shell is equipped with the intermediate layer, and interbedded one side sets up with interbedded opposite side back to back, and interbedded opposite side links to each other with the inside wall of tube-shape shell and prescribes a limit to the appearance chamber of tube-shape shell, is equipped with magnet in the intermediate layer, and magnet accounts for interbedded two-thirds's volume, can adsorb the interior molecule that has magnetism of grit, abrasive material paste thick liquid adhesive and abrasive material paste thick liquid through magnet production magnetic field, reduces the interval between the material in the polishing pad, promotes polishing pad's performance.
In some specific embodiments, the bottom end of the cavity is rotatably provided with a rotating disc, where the "rotating disc" is a rotating disc in a broad scope, and does not refer to a disc-shaped object, but may also be a platform or a protrusion having a bearing function, so that the shape and size of the rotating disc are not limited herein.
In some embodiments, a fixed gap is formed between the edge of the rotating disc and the side wall of the cavity, so that the rotating disc can rotate in the cavity, the longest diameter of the rotating disc is smaller than the minimum diameter of the cavity, only then, the rotating disc can smoothly rotate in the cavity, a plurality of negative ion oxidized particle filtering holes are formed in the upper end of the rotating disc, filter plates are filled in the negative ion oxidized particle filtering holes, and the negative ion oxidized particle filtering holes extend to the shell of the aging cylinder along the side wall of the cavity.
During specific aging, the manufactured die piece is placed on a rotating disc in an aging cylinder, alternating current is started, countless strong small eddy currents are generated on the die piece in the aging cylinder along with the continuous change of the current direction of the alternating current, so that the die piece continuously generates heat, the reaction of a mixture in the die piece in the aging cylinder is promoted, and meanwhile, magnetic poles with continuously changed magnets can adsorb magnetic molecules in abrasive particles, abrasive paste adhesive and abrasive paste, so that the abrasive particles, the abrasive paste adhesive and the abrasive paste in the die piece in the aging cylinder are continuously associated, and the aging is accelerated.
Wherein, the filter plate comprises anion ceramic composite powder, shale powder and medical stone powder in percentage by weight: 2-60% of negative ion ceramic composite powder, 30-70% of shale powder and the balance of medical stone powder;
the particle size of the negative ion ceramic composite powder is 6-120 um; the particle size of the added shale powder is 1-30 um; the particle size of the medical stone powder is 2-100um, and the particle size of the dried and molded negative ion ceramsite is 3-6 um.
A plurality of exhaust fans are arranged on the shell of the aging cylinder, and the exhaust fans are correspondingly connected with the anion oxidized particle filtering holes.
The filtration of the pores by the anion oxidized particles can filter out toxic gases generated by the evaporation of the solvent in the abrasive slurry binder and abrasive slurry due to heating.
The polishing pad formed by the processing can be additionally processed with a roller clamp, and the operation method comprises the following steps: installing a polishing pad within a polishing machine; fixing a roller clamp in a polishing machine; and (4) switching on a power supply of the polishing machine, and driving the polishing pad to polish the roller clamp smoothly by the engine.
In summary, the outer side wall of the cylindrical shell is wound with the electromagnetic induction coil, and the end part of the electromagnetic induction coil is connected with the alternating current power supply; the bottom of tube-shape shell is equipped with the intermediate layer, and interbedded one side sets up with interbedded opposite side mutually back to, and the chamber that holds of tube-shape shell is injectd to interbedded opposite side and tube-shape shell's inside wall, is equipped with magnet in the intermediate layer, and magnet accounts for interbedded two-thirds's volume for the polishing pad produces the magnetic field and can adsorb the grit, abrasive material paste thick liquid adhesive and the interior magnetic molecule that has of abrasive material paste thick liquid at ageing in-process magnet, reduces the interval between the material in the polishing pad, promotes the performance of polishing pad.
The alternating current is started, countless strong small eddy currents are generated on the die pieces in the aging cylinder along with the continuous change of the current direction of the alternating current, so that the die pieces continuously generate heat, and the reaction of the mixture in the die pieces in the aging cylinder is promoted.
The filter plate comprises anion ceramic composite powder, shale powder and medical stone powder in percentage by weight: 2-60% of negative ion ceramic composite powder, 30-70% of shale powder and the balance of medical stone powder; the particle size of the negative ion ceramic composite powder is 6-120 um; the particle size of the added shale powder is 1-30 um; the particle size of the medical stone powder is 2-100um, and the particle size of the dried and molded negative ion ceramsite is 3-6 um. A plurality of exhaust fans are arranged on the shell of the aging cylinder, and the exhaust fans are correspondingly connected with the anion oxidized particle filtering holes. The filtration of the pores by the anion oxidized particles can filter out toxic gases generated by the evaporation of the solvent in the abrasive slurry binder and abrasive slurry due to heating.
Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (8)

1. A method for conditioning a polishing pad, comprising the steps of:
the method comprises the following steps: filling the depressions of the mold pieces with a binder comprising abrasive grains, an abrasive slurry and an abrasive slurry, and stopping after reaching a predetermined depth, wherein the depressions of the mold pieces are regularly arranged;
step two: placing the die piece in an aging cylinder for heating and aging for 60-80 min, wherein the curing temperature is 75-80 ℃;
step three: filling the depression of the heated and aged die piece with a superposed adhesive without abrasive grains until reaching a predetermined depth, and then naturally drying;
step four: and demolding the naturally dried die piece to obtain an aged grinding layer, bonding the grinding layer and the base material through the superposed adhesive, and curing to obtain the polishing pad.
2. The method of claim 1, wherein the aging cylinder comprises a cylindrical housing, an electromagnetic coil is wound around an outer sidewall of the cylindrical housing, and an ac power supply is connected to an end of the electromagnetic coil;
the bottom of tube-shape shell is equipped with the intermediate layer, and interbedded one side sets up with interbedded opposite side back of the body mutually, and interbedded opposite side links to each other with the inside wall of tube-shape shell and prescribes a limit to the appearance chamber of tube-shape shell, is equipped with magnet in the intermediate layer, and magnet accounts for interbedded two-thirds's volume.
3. The method of aging a polishing pad as recited in claim 2, wherein a rotating disk is rotatably disposed at the bottom end of the chamber, and a fixed gap is provided between the edge of the rotating disk and the chamber sidewall of the chamber;
the upper end of the rotating disc is provided with a plurality of negative ion oxidation particle filtering holes, the negative ion oxidation particle filtering holes are filled with a filtering plate, and the negative ion oxidation particle filtering holes extend to the shell of the aging cylinder along the side wall of the inner cavity of the containing cavity;
a plurality of exhaust fans are arranged on the shell of the aging cylinder, and the exhaust fans are correspondingly connected with the anion oxidized particle filtering holes.
4. The method of conditioning a polishing pad as recited in claim 3, wherein the upper end of the rotating disk is further provided with a lamp for curing the filler in the mold sheet, wherein the lamp is a UV lamp.
5. The method of claim 3, wherein the filter plate comprises an anionic ceramic composite powder, a shale powder and a medical stone powder;
wherein the anion ceramic composite powder, the shale powder and the medical stone powder are as follows by weight percent: 2-60% of negative ion ceramic composite powder, 30-70% of shale powder and the balance of medical stone powder;
the particle size of the negative ion ceramic composite powder is 6-120 um; the particle size of the added shale powder is 1-30 um; the particle size of the medical stone powder is 2-100um, and the particle size of the dried and molded negative ion ceramsite is 3-6 um.
6. The method of claim 1 wherein the abrasive slurry binder is selected from the group consisting of phenolic, aminoplast, urethane, epoxy, acrylate, acrylated isocyanurate, urea-formaldehyde, isocyanurate, acrylated urethane, acrylated epoxy, resole-phenolic, polyester, vinyl, melamine and mixtures thereof;
the laminating adhesive is selected from phenolic resin, aminoplast resin, polyurethane resin, epoxy resin, acrylate resin, acrylated isocyanurate resin, urea-formaldehyde resin, isocyanurate resin, acrylated polyurethane resin, acrylated epoxy resin, resol-phenolic resin, polyester resin, vinyl resin, melamine resin and mixtures thereof;
the abrasive particles are selected from the group consisting of fused aluminum oxide, heat treated aluminum oxide, silicon carbide, aluminum oxide zirconia, garnet, diamond, cubic boron nitride, silica, ceria, sol-gel alumina, chromia, zirconia, iron oxide, and mixtures thereof.
7. A roller holder comprising the polishing pad of any one of claims 1-6, wherein the roller holder is formed by machining the polishing pad.
8. A roller clamp according to claim 7, characterized in that the operating method comprises:
installing a polishing pad within a polishing machine;
fixing a roller clamp in a polishing machine;
and (4) switching on a power supply of the polishing machine, and driving the polishing pad to polish the roller clamp smoothly by the engine.
CN202111194922.7A 2021-10-13 2021-10-13 Polishing pad aging treatment method, roller clamp and operation method Pending CN113910119A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111194922.7A CN113910119A (en) 2021-10-13 2021-10-13 Polishing pad aging treatment method, roller clamp and operation method

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Application Number Priority Date Filing Date Title
CN202111194922.7A CN113910119A (en) 2021-10-13 2021-10-13 Polishing pad aging treatment method, roller clamp and operation method

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Publication Number Publication Date
CN113910119A true CN113910119A (en) 2022-01-11

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1411403A (en) * 1999-12-21 2003-04-16 3M创新有限公司 Abrasive material having abrasive layer of three-dimensional structure
CN106281937A (en) * 2016-11-17 2017-01-04 贵州省仁怀市茅台镇汉室酒业(集团)有限公司 White spirit ageing device
CN211575518U (en) * 2020-01-21 2020-09-25 克拉玛依博奥工贸有限责任公司 Portable roller heating system for producing filtrate reducer for drilling fluid

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1411403A (en) * 1999-12-21 2003-04-16 3M创新有限公司 Abrasive material having abrasive layer of three-dimensional structure
CN106281937A (en) * 2016-11-17 2017-01-04 贵州省仁怀市茅台镇汉室酒业(集团)有限公司 White spirit ageing device
CN211575518U (en) * 2020-01-21 2020-09-25 克拉玛依博奥工贸有限责任公司 Portable roller heating system for producing filtrate reducer for drilling fluid

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