CN113909965A - Tool clamp for ultra-precision machining - Google Patents
Tool clamp for ultra-precision machining Download PDFInfo
- Publication number
- CN113909965A CN113909965A CN202111353204.XA CN202111353204A CN113909965A CN 113909965 A CN113909965 A CN 113909965A CN 202111353204 A CN202111353204 A CN 202111353204A CN 113909965 A CN113909965 A CN 113909965A
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- China
- Prior art keywords
- ultra
- product
- precision machining
- pad body
- support pad
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 title claims abstract description 35
- 238000009434 installation Methods 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 230000006978 adaptation Effects 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- -1 ferrous metals Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
- B23Q3/08—Work-clamping means other than mechanically-actuated
- B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Jigs For Machine Tools (AREA)
Abstract
The invention relates to the technical field of ultra-precision machining, in particular to a tool clamp for ultra-precision machining, which comprises a lathe vacuum sucker and a supporting cushion body provided with a micron-sized through hole, wherein the supporting cushion body is in surface-to-surface contact with a product to be machined, so that the stress area of the product is increased, the internal stress of the product is reduced, and the deformation of the product is effectively reduced; utilize vacuum chuck to adsorb through a plurality of micron order through-holes, provide sufficient adsorption affinity, guarantee simultaneously that the product does not drop.
Description
Technical Field
The invention relates to the technical field of ultra-precision machining, in particular to a tool clamp for ultra-precision machining.
Background
The ultra-precision machining refers to machining of submicron (dimension error is 0.03-0.3 mm, surface roughness is Ra0.03-0.005 um) and nanoscale (precision error is 0.03mm, surface roughness is less than Ra0.005um) precision, the ultra-precision machining mainly refers to ultra-precision cutting machining and ultra-precision grinding machining, and for aspheric surface machining, ultra-precision turning is mainly applied to machining of infrared materials or non-ferrous metal materials, and the ultra-precision grinding machining is mainly applied to machining of glass materials.
The ultra-high precision index that ultra-precision machining can reach leaves the high-precision frock clamp, and the design scheme of the frock clamp is many-sided to the influence of the machining precision, wherein the fixed mode of the product is the most important one, the scheme commonly used at present is mechanical fixed type and vacuum chuck type, its jack catch of mechanical fixed type or chuck type simple structure, clasp the jack catch or chuck type structure through the whorl or flange structure and fasten the product; however, stress is introduced at the edge of the product, and for a thin product or a product with a thin edge, the product is easily stressed and deformed during clamping, so that the machining precision is affected, and even the product may crack during machining due to stress concentration; vacuum suction is achieved by contact sealing of the product edge, followed by a vacuum system. The vacuum suction type also has stress influence on thinner products, and the sealing effect of the edge is important, otherwise, the product can be scrapped or even the cutter can be damaged due to the falling of the sheet caused by air leakage.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the utility model provides a frock clamp for ultra-precision machining improves anchor clamps and to holding power, the adsorption affinity of processing product, reduces stress, effectively solves the deformation problem, guarantees that the product does not drop.
In order to solve the technical problems, the invention adopts the technical scheme that:
the utility model provides a frock clamp for ultra-precision machining, includes lathe vacuum chuck, lathe vacuum chuck's horizontal one end is equipped with the installing opening, still including locating installing opening department's support pad body, the support pad body is kept away from the camber of installing opening's holding surface and is treated the camber looks adaptation of the holding surface of processing product, be equipped with a plurality ofly on the holding surface of the support pad body and the micron order through-hole and a plurality of with lathe vacuum chuck intercommunication the area that micron order through-hole covered and the area looks adaptation of the holding surface of processing product.
Furthermore, the support pad body is made of ceramic.
Furthermore, the supporting surface of the supporting cushion body, which is far away from the mounting opening, is a convex cambered surface, and the supporting surface of the product to be processed is a concave cambered surface.
Further, a base plate is arranged between the lathe vacuum sucker and the supporting pad body, one end of the base plate is connected with the mounting opening, a cavity connected with the supporting pad body is formed in the other end of the base plate, and a distance is reserved between the supporting pad body and the mounting opening.
Furthermore, the width of the cavity is matched with that of the support cushion body.
Furthermore, the base plate is made of copper.
The invention has the beneficial effects that:
the tool clamp for ultra-precision machining comprises a lathe vacuum chuck and a supporting cushion body provided with a micron-sized through hole, so that the supporting cushion body is in surface-to-surface contact with a product to be machined, the stress area of the product is increased, the internal stress of the product is reduced, and the deformation of the product is effectively reduced; utilize vacuum chuck to adsorb through a plurality of micron order through-holes, provide sufficient adsorption affinity, guarantee simultaneously that the product does not drop.
Drawings
FIG. 1 is an assembly view of a tooling fixture for ultra-precision machining according to the present invention;
FIG. 2 is an exploded view of a tooling fixture for ultra-precision machining according to the present invention;
fig. 3 is a sectional view of a tool holder for ultra-precision machining according to the present invention;
description of reference numerals:
1. a lathe vacuum chuck;
2. a support pad body;
3. a chassis;
4. an installation opening;
5. a support surface for supporting the cushion body;
6. a support surface for a product to be processed;
7. a cavity;
8. and (5) products to be processed.
Detailed Description
In order to explain technical contents, achieved objects, and effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
Referring to fig. 1 to 3, the tooling fixture for ultra-precision machining provided by the invention comprises a lathe vacuum chuck, wherein an installation opening is formed in one horizontal end of the lathe vacuum chuck, the tooling fixture further comprises a support cushion body arranged at the installation opening, the curvature of a support surface, away from the installation opening, of the support cushion body is matched with the curvature of a support surface of a product to be machined, a plurality of micron-sized through holes communicated with the lathe vacuum chuck are formed in the support surface of the support cushion body, and the area covered by the micron-sized through holes is matched with the area of the support surface of the product to be machined.
From the above description, the beneficial effects of the present invention are: the tool clamp for ultra-precision machining comprises a lathe vacuum chuck and a supporting cushion body provided with a micron-sized through hole, so that the supporting cushion body is in surface-to-surface contact with a product to be machined, the stress area of the product is increased, the internal stress of the product is reduced, and the deformation of the product is effectively reduced; utilize vacuum chuck to adsorb through a plurality of micron order through-holes, provide sufficient adsorption affinity, guarantee simultaneously that the product does not drop.
Furthermore, the support pad body is made of ceramic.
From the above description, the ceramics have better permeability and thermal conductivity, which is beneficial to the improvement of product quality.
Furthermore, the supporting surface of the supporting cushion body, which is far away from the mounting opening, is a convex cambered surface, and the supporting surface of the product to be processed is a concave cambered surface.
Further, a base plate is arranged between the lathe vacuum sucker and the supporting pad body, one end of the base plate is connected with the mounting opening, a cavity connected with the supporting pad body is formed in the other end of the base plate, and a distance is reserved between the supporting pad body and the mounting opening.
From the above description, the connection among the support pad, the chassis and the lathe vacuum washing plate is more stable.
Furthermore, the width of the cavity is matched with that of the support cushion body.
Furthermore, the base plate is made of copper. From the above description, it is beneficial to improve the product quality.
Application scenarios:
the scheme is directed at the processing of the aspheric lens, the aspheric lens is of a structure with a spherical surface on one side of the aspheric surface, the spherical surface is easily obtained through a traditional cold processing scheme, and the spherical surface is used as a supporting surface to fix the lens.
Referring to fig. 1 to fig. 3, a first embodiment of the present invention is:
the invention provides a tool clamp for ultra-precision machining, which comprises a lathe vacuum sucker 1, a supporting pad body 2 and a chassis 3;
in this embodiment, an installation opening 4 is provided at a horizontal end of the lathe vacuum chuck 1, the support cushion body 2 is provided at the installation opening 4, a support surface 5 of the support cushion body 2, which is far away from the installation opening 4, is a convex arc surface, a support surface 6 of the product to be processed is a concave arc surface, a curvature of the support surface 5 of the support cushion body 2, which is far away from the installation opening 4, is adapted to a curvature of the support surface of the product to be processed 8, so that when the product to be processed is assembled onto the support cushion body, the product to be processed can be tightly attached to the support surface of the support cushion body, and further the adsorption effect can be further improved by using surface tension, a plurality of micron-sized through holes communicated with the lathe vacuum chuck 1 are provided on the support surface 5 of the support cushion body 2, and an area covered by the micron-sized through holes is adapted to an area of the support surface 6 of the product to be processed, that is, the supporting surface 6 of the product to be processed can completely cover all the micron-sized through holes;
the base plate 3 is arranged between the lathe vacuum chuck 1 and the supporting cushion body 2, one end of the base plate 3 is connected with the mounting opening 4, the other end of the base plate 3 is provided with a cavity 7 connected with the supporting cushion body 2, a distance is formed between the supporting cushion body 2 and the mounting opening 4, and the distance can be adjusted according to actual needs;
in this embodiment, the supporting pad 2 is made of ceramic, and the chassis is made of copper; the support cushion body 2 is made of the existing microporous ceramic and has certain hardness, and other materials with micropores can be adopted. The chassis can also adopt non-ferrous metals such as aluminum and the like.
The working principle is as follows: the chassis is used for supporting and protecting the supporting cushion body, the supporting cushion body has the characteristic of micron-sized through holes, a lathe vacuum sucker can be used, one side of the supporting cushion body is processed into a convex spherical surface matched with the curvature of a concave spherical surface of a lens, when the supporting cushion body is used, only the non-spherical lens is lightly pressed on the supporting cushion body, the lathe vacuum sucker is started, sufficient adsorption force can be generated through the micron-sized through holes, and the non-spherical lens is tightly fixed on a tool for aspheric surface ultra-precision machining.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent changes made by using the contents of the present specification and the drawings, or applied directly or indirectly to the related technical fields, are included in the scope of the present invention.
Claims (6)
1. The utility model provides a frock clamp for ultra-precision machining, includes lathe vacuum chuck, lathe vacuum chuck's horizontal one end is equipped with the installing opening, its characterized in that, still including locating installing opening's support pad body, the support pad body is kept away from the camber of installing opening's holding surface and is waited to process the camber looks adaptation of the holding surface of product, it is just a plurality of with the micron order through-hole of lathe vacuum chuck intercommunication and a plurality of to be equipped with on the holding surface of the support pad body the area that micron order through-hole covered and the area looks adaptation of the holding surface of waiting to process the product.
2. The tooling clamp for ultra-precision machining according to claim 1, wherein the supporting pad is made of ceramic.
3. The tooling clamp for ultra-precision machining according to claim 1, wherein the support surface of the support pad body away from the mounting opening is a convex arc surface, and the support surface of the product to be machined is a concave arc surface.
4. The tooling clamp for ultra-precision machining according to claim 1, wherein a base plate is further arranged between the lathe vacuum chuck and the support pad body, one end of the base plate is connected with the installation opening, the other end of the base plate is provided with a cavity connected with the support pad body, and a distance is reserved between the support pad body and the installation opening.
5. The tooling clamp for ultra-precision machining according to claim 4, wherein the width of the cavity is adapted to the width of the support pad.
6. A tool clamp for ultra-precision machining according to claim 4, wherein the base plate is made of copper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111353204.XA CN113909965A (en) | 2021-11-16 | 2021-11-16 | Tool clamp for ultra-precision machining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111353204.XA CN113909965A (en) | 2021-11-16 | 2021-11-16 | Tool clamp for ultra-precision machining |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113909965A true CN113909965A (en) | 2022-01-11 |
Family
ID=79246454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111353204.XA Pending CN113909965A (en) | 2021-11-16 | 2021-11-16 | Tool clamp for ultra-precision machining |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113909965A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006015457A (en) * | 2004-07-02 | 2006-01-19 | Nikon Corp | Adsorbing device, polishing device, semiconductor device manufacturing method, and semiconductor device manufactured by the method |
| JP2008060307A (en) * | 2006-08-31 | 2008-03-13 | Taiheiyo Cement Corp | Vacuum suction device, and its manufacturing method |
| CN102139465A (en) * | 2010-09-16 | 2011-08-03 | 湖南大学 | High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor |
| CN103341818A (en) * | 2013-07-04 | 2013-10-09 | 浙江工业大学 | Vacuum adsorption clamp used for aspheric surface machining |
| CN107498356A (en) * | 2017-08-18 | 2017-12-22 | 上海现代先进超精密制造中心有限公司 | Single point diamond turning o clamp for machining and method for ultra thin plate class optical element |
| CN109622991A (en) * | 2018-11-11 | 2019-04-16 | 上海航天控制技术研究所 | A kind of precision turning processing method of monocrystalline silicon lens |
| CN110434656A (en) * | 2019-07-30 | 2019-11-12 | 中国工程物理研究院材料研究所 | A kind of conveyed by vacuum system for the attached automation processing of thin-wall part suction |
| CN111168870A (en) * | 2020-02-27 | 2020-05-19 | 石嘴山市新宇兰山电碳有限公司 | Special curved surface processing vacuum adsorption mould of numerical control lathe |
| CN211762677U (en) * | 2020-02-27 | 2020-10-27 | 石嘴山市新宇兰山电碳有限公司 | Special curved surface processing vacuum adsorption mould of numerical control lathe |
| CN112192252A (en) * | 2020-09-01 | 2021-01-08 | 中国工程物理研究院材料研究所 | Clamping and aligning device and method suitable for ultra-precise turning of shell type rotary parts |
| CN212526942U (en) * | 2019-11-15 | 2021-02-12 | 西华大学 | Machining is with hemisphere casing vacuum adsorption frock clamp |
-
2021
- 2021-11-16 CN CN202111353204.XA patent/CN113909965A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006015457A (en) * | 2004-07-02 | 2006-01-19 | Nikon Corp | Adsorbing device, polishing device, semiconductor device manufacturing method, and semiconductor device manufactured by the method |
| JP2008060307A (en) * | 2006-08-31 | 2008-03-13 | Taiheiyo Cement Corp | Vacuum suction device, and its manufacturing method |
| CN102139465A (en) * | 2010-09-16 | 2011-08-03 | 湖南大学 | High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor |
| CN103341818A (en) * | 2013-07-04 | 2013-10-09 | 浙江工业大学 | Vacuum adsorption clamp used for aspheric surface machining |
| CN107498356A (en) * | 2017-08-18 | 2017-12-22 | 上海现代先进超精密制造中心有限公司 | Single point diamond turning o clamp for machining and method for ultra thin plate class optical element |
| CN109622991A (en) * | 2018-11-11 | 2019-04-16 | 上海航天控制技术研究所 | A kind of precision turning processing method of monocrystalline silicon lens |
| CN110434656A (en) * | 2019-07-30 | 2019-11-12 | 中国工程物理研究院材料研究所 | A kind of conveyed by vacuum system for the attached automation processing of thin-wall part suction |
| CN212526942U (en) * | 2019-11-15 | 2021-02-12 | 西华大学 | Machining is with hemisphere casing vacuum adsorption frock clamp |
| CN111168870A (en) * | 2020-02-27 | 2020-05-19 | 石嘴山市新宇兰山电碳有限公司 | Special curved surface processing vacuum adsorption mould of numerical control lathe |
| CN211762677U (en) * | 2020-02-27 | 2020-10-27 | 石嘴山市新宇兰山电碳有限公司 | Special curved surface processing vacuum adsorption mould of numerical control lathe |
| CN112192252A (en) * | 2020-09-01 | 2021-01-08 | 中国工程物理研究院材料研究所 | Clamping and aligning device and method suitable for ultra-precise turning of shell type rotary parts |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20220111 |