CN219819908U

CN219819908U - Planetary wheel lining clamping tool

Info

Publication number: CN219819908U
Application number: CN202321335679.0U
Authority: CN
Inventors: 张俊; 王巍; 沈兴潮; 王越峰; 陈浙校
Original assignee: Zhejiang Jinghong Precision Machinery Manufacturing Co ltd
Current assignee: Zhejiang Jinghong Precision Machinery Manufacturing Co ltd
Priority date: 2023-05-29
Filing date: 2023-05-29
Publication date: 2023-10-13
Anticipated expiration: 2033-05-29

Abstract

The utility model provides a planetary wheel lining clamping tool, and belongs to the technical field of semiconductor processing technology; comprising the following steps: the support seat is arranged on the base and is used for supporting the planetary wheel body, and the clamp assembly is arranged on the base and is used for clamping the lining; wherein, the anchor clamps subassembly includes: the first clamp and the second clamp are arranged on the base, the second clamp is vertically arranged on the first clamp, a clamping position is formed between the first clamp and the second clamp, and the lining to be cut is located at the clamping position. The technical problem that an existing planetary wheel lining clamping tool cannot meet the machining precision requirement of the inner lining of the planetary wheel is solved, and the technical effect of guaranteeing the cutting precision of the lining of the planetary wheel is achieved.

Description

Planetary wheel lining clamping tool

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a clamping tool for a liner of a star wheel.

Background

The star wheel is a fixture applied to various plane polishing procedures such as glass, lenses, silicon wafers, hard disks and the like, and is also called a polishing jig, a polishing pad and the like, and the function of the star wheel is mainly to maintain and guide the movement of a semiconductor wafer in the polishing process, and the conventional star wheel is shown in fig. 3 and comprises a star wheel body and a lining detachably connected with the star wheel body.

The existing star wheel base material for polishing the wafer is usually metal, and the direct contact between the metal and the wafer can cause collision damage on the edge of the wafer, so that an inner lining layer is required to be added between the metal and the wafer to block the contact between the wafer and the star wheel. The liner is made of a hard plastic material, but the inner diameter of the liner is usually smaller than the diameter of the wafer after molding, and in order to enable the star wheel liner to perfectly fit the semiconductor wafer, the liner is generally required to be cut. Because the precision requirement of wafer polishing processing is extremely high, higher requirements are also put forward on the cutting of the inner lining of the star wheel, but the existing clamping tool for the inner lining of the star wheel cannot meet the processing precision requirement of the inner lining of the star wheel.

Therefore, the technical problems of the prior art are: the existing planetary wheel lining clamping tool cannot meet the machining precision requirement of the lining inside the planetary wheel.

Disclosure of Invention

The utility model provides a liner clamping tool for a star wheel, which solves the technical problem that the existing liner clamping tool for the star wheel cannot meet the machining precision requirement of the liner inside the star wheel, and achieves the technical effect of ensuring the cutting precision of the liner of the star wheel.

The utility model provides a planetary wheel lining clamping tool, which adopts the following technical scheme:

an wandering star wheel inside lining centre gripping frock includes: base, supporting seat and anchor clamps subassembly, the supporting seat is installed in the base for support the star wheel body anchor clamps subassembly and install in the base and be used for the centre gripping inside lining, wherein, anchor clamps subassembly includes: the first clamp and the second clamp are arranged on the base, the second clamp is vertically arranged on the first clamp, a clamping position is formed between the first clamp and the second clamp, and the lining to be cut is located at the clamping position.

Preferably, the jig assembly further comprises: and the clamping pieces are arranged on the base and are used for vertically clamping the first clamp and the second clamp.

Preferably, the first clamp and the second clamp further comprise processing parts, and the shape of the processing parts on the first clamp and the second clamp is the same as the shape of the lining to be processed and is larger than the profile of the lining.

Preferably, the clamp assembly further comprises a pressing strip, and the pressing strip is fixedly connected with the base;

the second clamp is vertically arranged on the pressing strip, and clamping and positioning parts are arranged on the pressing strip and the second clamp.

Preferably, the first jig includes: the clamping part is located the first anchor clamps keep away from the vertical terminal surface of planetary gear, the clamping part is used for the first anchor clamps with the clamp of second anchor clamps.

Preferably, the first clamp further includes: and the transition section is positioned on the inner side of the first clamp.

Preferably, the second clamp is the same height as the support base.

Preferably, the support base includes: the mounting part is fixedly connected with the base; the support part is connected with the installation part, the height of the support part is not lower than that of the installation part, and the support part is used for supporting the planet wheel.

Preferably, the support base further includes: and the supporting and positioning part is matched with the positioning hole on the star wheel body and used for mounting and positioning the star wheel.

Preferably, at least part of the fixture assembly is a flexible member, and the flexible member is used for abutting against the star wheel.

In summary, the beneficial technical effects of the utility model are as follows:

1. the clamping tool for the inner lining of the free star wheel is suitable for cutting and processing of the inner lining of the existing free star wheel and comprises a base, a supporting seat and a clamp assembly for clamping the free star wheel; the clamp assembly comprises a first clamp and a second clamp which are vertically installed, the clamping of the free star wheel can be completed through the arrangement of the first clamp and the second clamp, the support and clamping of the free star wheel can be completed through the cooperation of the support base and the base, and the machining precision of the free star wheel lining is guaranteed.

2. The utility model provides a star wheel inside lining centre gripping frock is equipped with a plurality of support location portions that can cooperate with the star wheel on the centre gripping frock, the position to the star wheel of finishing fast through the support location portion that sets up, saves installation time, improves machining precision.

Drawings

FIG. 1 is a top view of a liner clamping fixture for a star wheel of the present utility model when clamping the star wheel;

FIG. 2 is a schematic diagram of a structure of the liner clamping tool for a star wheel in the present utility model when clamping the star wheel;

FIG. 3 is a schematic diagram of a star wheel according to the present utility model;

FIG. 4 is a schematic structural view of a liner clamping tooling for a planet wheel according to the present utility model;

FIG. 5 is a left side view of a liner clamping tooling for a star wheel in accordance with the present utility model;

FIG. 6 is a schematic view of a second clamp according to the present utility model;

FIG. 7 is a schematic view of a part of the structure of the clamp assembly of the present utility model.

The reference numerals in the figures are: 100. a base; 200. a support base; 210. a mounting part; 220. a support part; 230. a supporting and positioning part; 300. a clamp assembly; 310. a first clamp; 311. a processing section; 312. a clamping part; 313. a transition section; 320. a second clamp; 330. a clamping member; 340. pressing strips; 341. a clamping and positioning part; 400. a star wheel; 410. a star wheel body; 411. positioning holes; 420. and (5) lining.

Detailed Description

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The term "coupled" as used herein includes both direct and indirect coupling (coupling), unless otherwise indicated. In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

The star wheel 400 is a fixture applied to various planar polishing processes such as glass, lenses, silicon wafers, hard disks, etc., and is also called a polishing jig, a polishing pad, etc., and the function of the star wheel 400 is mainly to maintain and guide the movement of a semiconductor wafer during polishing, and the star wheel 400 is shown in fig. 3 and comprises a star wheel body and a liner detachably connected with the star wheel body. The conventional carrier 400 for polishing wafers is usually made of metal, and the direct contact between the metal and the wafer may cause the collision damage on the wafer edge, so a liner 420 needs to be added between the metal and the wafer to block the contact between the wafer and the carrier 400. The liner 420 is made of a mainly rigid plastic material, but the inner diameter of the liner 420 after molding is generally smaller than the diameter of the wafer, and in order to allow the liner to perfectly fit the semiconductor wafer, it is generally necessary to cut the liner 420. Because the precision requirement of the wafer polishing process is extremely high, a higher requirement is also put forward on the cutting of the liner of the star wheel, but the existing liner 420 clamping tool of the star wheel 400 cannot meet the processing precision requirement of the liner 420 of the star wheel 400.

The utility model provides a liner clamping tool for a star wheel, which solves the technical problem that the existing liner clamping tool for the star wheel cannot meet the machining precision requirement of the liner 420 inside the star wheel 400, and achieves the technical effect of ensuring the cutting precision of the liner of the star wheel.

In order to better understand the above technical solutions, the following detailed description will refer to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

A star wheel inside lining centre gripping frock, as shown in FIG. 1-2, includes: a base 100, a support base 200, and a clamp assembly 300; the support base 200 is mounted on the base 100 and is used for supporting the body of the star wheel 400, and the clamp assembly 300 is mounted on the base 100 and is used for clamping the liner 420; as shown in the figure, the star wheel 400 is generally disc-shaped with a relatively thin thickness, and a plurality of positioning holes 411 for mounting a workpiece to be machined are formed in the star wheel 400 at intervals, and the star wheel body 410 can be supported by the support base 200, so that a gap is reserved between the star wheel body 410 and the base 100, and subsequent cutting processing is facilitated; by providing the clamp assembly 300, clamping and positioning of the star wheel 400 is accomplished, avoiding displacement during subsequent cutting operations.

Further, referring to fig. 4, the clamp assembly 300 includes: the first clamp 310 and the second clamp 320, the first clamp 310 is installed on the base 100, the second clamp 320 is vertically installed on the first clamp 310, a clamping position is formed between the first clamp 310 and the second clamp, and the lining 420 to be cut is located at the clamping position; the thickness of the liner 420 is smaller, and the requirement on the processing precision is high, and the first clamp 310 and the second clamp 320 which are vertically connected are arranged to clamp the star wheel 400 in the vertical direction in a surface contact mode, so that the processing precision of the liner 420 is ensured, and the liner 420 can be clamped while the damage to the star wheel body 410 and the liner 420 is avoided.

With continued reference to fig. 4, the fixture assembly 300 further includes a clamping member 330, where the plurality of clamping members 330 are mounted on the base 100 for vertically clamping the first fixture 310 and the second fixture 320; specifically, the star wheel 400 is mounted at a clamping position between the first clamp 310 and the second clamp 320, and the clamping piece 330 is provided to clamp the first clamp 310 and the second clamp 320, so that the problem that the star wheel 400 is displaced or dithered during the processing process to influence the processing precision of the liner 420 is avoided; the clamping member 330 may be selected from various types, such as a quick clamp as shown in fig. 4, or other clamping methods may be used to clamp the first clamp 310 and the second clamp 320, and a specific clamping method may be selected according to actual needs. It is conceivable that, in order to better complete the clamping of the star wheel 400, the number of the clamping members 330 is preferably two or more, and the plurality of clamping members 330 apply clamping forces to the first clamp 310 and the second clamp 320 from different directions, respectively, to complete the clamping of the clamping members 330.

Referring to fig. 6-7, the first fixture 310 and the second fixture 320 further include a processing portion 311, and the profile of the processing portion 311 on the first fixture 310 and the second fixture 320 is the same as the profile of the liner 420 to be processed and is larger than the profile of the liner 420; the star wheel 400 is in a sheet shape, and in the subsequent processing process, the inner liner 420 of the star wheel 400 needs to be cut, and a certain space needs to be reserved to avoid a knife collision during cutting, and the processing part 311 is arranged on the first clamp 310 and the second clamp 320, so that the cutter for cutting can penetrate through the first clamp 310 to cut the inner liner 420 at the clamping position, and meanwhile, the collision between the cutter and the second clamp 320 in the cutting process can be avoided. It is conceivable that, in order to more conveniently and quickly complete the cutting process of the inner liner 420, the shape of the processing portion 311 is preferably the same as the shape of the inner liner 420 and greater than the contour of the inner liner 420, and the cutter may complete the process of the inner liner 420 in the processing portion 311 at one time; meanwhile, as the shape of the processing part 311 is the same as that of the liner 420, the clamping force can be better applied to the liner 420, so that the stress of the whole liner 420 is more uniform, and the processing precision of the liner 420 is improved.

Referring to fig. 6-7, the fixture assembly 300 further includes a pressing bar 340, the pressing bar 340 being fixedly connected with the base 100; the second clamp 320 is vertically installed on the pressing bar 340, and the pressing bar 340 and the second clamp 320 are provided with a clamping and positioning portion 341. Through setting up layering 340, layering 340 and base 100 fixed connection, when handling the star wheel 400 of different models, only need change second anchor clamps 320 can, second anchor clamps 320 are connected with layering 340 simultaneously, install in the second anchor clamps 320 installation accuracy of layering 340 higher, also higher to the cutting accuracy of axle sleeve. The second clamp 320 is detachably connected with the pressing strip 340, and clamping and positioning parts 341 correspondingly arranged are arranged on the pressing strip 340 and the second clamp 320, and the clamping and positioning parts 341 are preferably connected with pin holes.

Referring to fig. 7, the first clamp 310 includes a clamping portion 312, the clamping portion 312 is located on a vertical end surface of the first clamp 310 away from the star wheel 400, and the clamping portion 312 is used for clamping the first clamp 310 and the second clamp 320. As described above, the clamping member 330 is used to apply a clamping force to the first clamp 310 and the second clamp 320 to complete the clamping of the star wheel 400, by providing the clamping portion 312 on the first clamp 310, connecting the clamping member 330 with the clamping portion 312, and applying a clamping force to the first clamp 310 and the second clamp 320 through the clamping portion 312; the clamping portion 312 is preferably shaped as a horizontal end surface as shown, which is located at the top end of the first clamp 310, to which the output end of the clamping member 330 is adapted, preferably a clamping head with a horizontal end surface, and the clamping member 330 and the clamping portion 312 transmit the clamping force through surface contact, so as to better complete the clamping of the planet wheel 400.

Referring to fig. 7, the first fixture 310 further includes a transition section 313, and the transition section 313 is located inside the first fixture 310. The first clamp 310 approaches the star wheel 400 from the vertical direction, the cutting tool enters from the first clamp 310 to complete the cutting processing of the liner 420, and by providing the transition section 313 with the cross-sectional area gradually expanding from the star wheel 400 to the star wheel 400, the first clamp 310 can better complete the fixing of the star wheel 400 and avoid the possible cutter collision condition of the cutter, and the cutting tool can better enter into the processing position.

Referring to fig. 5, the height of the second fixture 320 is the same as that of the supporting seat 200, and the supporting seat 200 is used for supporting the star wheel 400. The second fixture 320 is also used for supporting the star wheel 400. Therefore, after the installation is completed, the height of the second fixture 320 is the same as that of the supporting seat 200, and both the two fixtures are used for supporting the star wheel 400.

Referring to fig. 4, the support base 200 includes: the installation part 210, the installation part 210 base 100 is fixedly connected; the supporting part 220 is connected with the mounting part 210, the height of the supporting part 220 is not lower than that of the mounting part 210, the supporting part 220 is used for supporting the star wheel 400, the supporting seat 200 is used for supporting the star wheel 400, meanwhile, the supporting seat 200 and the base 100 are fixedly mounted, and the precision of the supporting plane is inevitably influenced if the supporting part is mounted and supported on the same plane in the process of dismounting and processing due to the high processing precision requirement of the star wheel 400, so that the processing precision of the star wheel 400 is influenced; by providing the mounting portion 210 and the supporting portion 220 in the mounting base respectively, and the height of the supporting portion 220 is equal to or higher than the height of the mounting portion 210, the supporting portion 220 is separated from the mounting portion 210, so that the influence of the mounting portion 210 on the supporting plane of the supporting base 200 is avoided, and the machining precision of the supporting plane on the supporting base 200 is exploded.

Referring to fig. 4, the support base 200 further includes a support positioning portion 230, where the support positioning portion 230 cooperates with a positioning hole 411 on the star wheel body 410 for positioning and installing the star wheel 400. The star wheel 400 is provided with a plurality of positioning holes 411 for positioning, and the mounting position of the star wheel 400 on the support seat 200 is fixed by arranging the support positioning part 230 matched with the positioning holes 411, and the support positioning part 230 is preferably a pin hole, and the mounting hole is connected with the support positioning part 230 through a pin shaft for positioning.

The clamp assembly 300 is at least partially a flexible member configured to abut the star wheel 400. By providing a flexible member, damage to the body of the star wheel 400 and the liner 420 during the clamping process is avoided.

The technical effects are as follows:

1. providing a star wheel lining clamping tool, comprising a base 100, a supporting seat 200 and a clamp assembly 300 for clamping a star wheel 400; the clamp assembly 300 includes a first clamp 310 and a second clamp 320 that are vertically installed, and by setting the first clamp 310 and the second clamp 320, clamping of the star wheel 400 can be completed, and supporting and clamping of the star wheel 400 can be completed by matching the supporting seat 200 and the base 100, so that the processing precision of the liner 420 is ensured.

2. The utility model provides a star wheel inside lining centre gripping frock is equipped with a plurality of support location portion 230 that can cooperate with star wheel 400 on the centre gripping frock, can accomplish the position to star wheel 400 fast through the support location portion 230 that sets up, saves installation time, improves machining precision.

While preferred embodiments of the present utility model have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the utility model. It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims

1. An wandering star wheel inside lining centre gripping frock for carry out centre gripping to wandering star wheel, its characterized in that includes:

a base (100);

the support base (200) is installed on the base (100) and is used for supporting the star wheel body (410); and

a clamp assembly (300), the clamp assembly (300) mounted to the base (100) for clamping the liner (420), comprising:

-a first clamp (310), the first clamp (310) being mounted to the base (100);

-a second clamp (320), the second clamp (320) being vertically mounted to the first clamp (310);

wherein a clamping position is formed between the first clamp (310) and the second clamp (320), and the lining (420) to be cut is positioned at the clamping position.

2. The planet liner clamping tooling of claim 1, wherein the clamp assembly (300) further comprises:

and the clamping pieces (330) are arranged on the base (100) and are used for vertically clamping the first clamp (310) and the second clamp (320).

3. The starwheel liner clamping tooling of claim 2, wherein the first clamp (310) and the second clamp (320) further comprise a machining portion (311), wherein the shape of the machining portion (311) on the first clamp (310) and the second clamp (320) is the same as the shape of the liner (420) to be machined and is larger than the profile of the liner (420).

4. A starwheel liner clamping tooling as in claim 3, wherein the clamp assembly (300) further comprises:

the pressing strip (340), the pressing strip (340) is fixedly connected with the base (100);

the second clamp (320) is vertically arranged on the pressing strip (340), and clamping and positioning parts (341) are arranged on the pressing strip (340) and the second clamp (320).

5. A starwheel liner clamping tooling as in claim 3, wherein the first clamp (310) comprises:

and the clamping part (312), wherein the clamping part (312) is positioned on the vertical end surface of the first clamp (310) far away from the star wheel, and the clamping part (312) is used for clamping the first clamp (310) and the second clamp (320).

6. A starwheel liner clamping tooling as in claim 3, wherein the first clamp (310) further comprises:

-a transition section (313), the transition section (313) being located inside the first clamp (310).

7. The planet liner clamping tooling of claim 1, wherein the second clamp (320) is the same height as the support base (200).

8. The planet liner clamping tooling of claim 7, wherein the support base (200) comprises:

a mounting part (210), wherein the mounting part (210) is fixedly connected with the base (100);

the support part (220), the support part (220) with installation department (210) is connected, support part (220) height is not less than installation department (210) height, support part (220) are used for supporting the star wheel.

9. The planet liner clamping tooling of claim 7, wherein the support base (200) further comprises:

and the supporting and positioning part (230), wherein the supporting and positioning part (230) is matched with a positioning hole (411) on the star wheel body (410) for mounting and positioning the star wheel.

10. The planet liner clamping fixture of claim 1, wherein at least a portion of the clamp assembly (300) is a flexible member configured to abut the planet.