CN113899533B - Device and method for measuring performance of reflective volume grating - Google Patents
Device and method for measuring performance of reflective volume grating Download PDFInfo
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- CN113899533B CN113899533B CN202111492666.XA CN202111492666A CN113899533B CN 113899533 B CN113899533 B CN 113899533B CN 202111492666 A CN202111492666 A CN 202111492666A CN 113899533 B CN113899533 B CN 113899533B
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- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a device and a method for measuring the performance of a reflective volume grating, wherein the device comprises a tunable laser, a diaphragm, a beam splitter, an electric turntable and a first power meter which are sequentially arranged on a horizontal line, wherein the electric turntable is provided with the reflective volume grating to be measured, and a light beam emitted by the tunable laser sequentially passes through the diaphragm, the beam splitter and the reflective volume grating to be measured and then enters the first power meter; a second power meter for receiving the reflected light beam of the light splitting sheet is arranged below the light splitting sheet; the tunable laser, the electric turntable, the first power meter and the second power meter are all connected to a computer. The device provided by the invention can accurately measure performance parameters of the reflection type volume grating with different specifications, such as central wavelength, reflection efficiency, full width at half maximum, inclination angle and the like, has a simple structure, and is clear in measuring method and data processing and universal.
Description
Technical Field
The invention relates to the technical field of reflective volume grating performance detection, in particular to a device and a method for measuring the reflective volume grating performance.
Background
The semiconductor laser has the advantages of high efficiency, small volume, light weight, long service life, convenient integration and the like, and is widely applied to the aspects of laser communication, optical storage, optical gyros, laser printing, distance measurement, radars and the like. However, the output spectral linewidth of the semiconductor laser is generally 2-5nm, and the central wavelength drift is larger along with the change of temperature, so that the external cavity lock wave and the spectrum compression technology are applied.
The patent with publication number CN110879433B discloses a method for manufacturing a reflective volume grating based on photo-thermal edge folding glass, which specifically introduces a method for manufacturing a reflective volume grating, and does not relate to how to detect the relevant performance of a reflective volume grating device.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide an apparatus and a method for measuring the performance of a reflective volume grating, which aim to solve the problem that the prior art cannot accurately detect the performance of a reflective volume grating device.
The technical scheme of the invention is as follows:
a device for measuring the performance of a reflective body grating comprises a tunable laser, a diaphragm, a beam splitter, an electric rotary table and a first power meter which are sequentially arranged on a horizontal line, wherein the electric rotary table is provided with the reflective body grating to be measured, and a light beam emitted by the tunable laser sequentially passes through the diaphragm, the beam splitter and the reflective body grating to be measured and then enters the first power meter; a second power meter for receiving the reflected light beam of the light splitting sheet is arranged below the light splitting sheet; the tunable laser, the electric turntable, the first power meter and the second power meter are all connected to a computer.
A method for measuring the performance of a reflective volume grating based on a device for measuring the performance of the reflective volume grating, wherein the method comprises the following steps:
setting a first wavelength range of laser emitted by a tunable laser without placing a reflective volume grating to be tested on an electric turntable, and respectively measuring the power of an initial test light beam and the power of an initial reference light beam through a first power meter and a second power meter to be recorded as
；
Installing the reflective body grating to be measured on an electric turntable, adjusting the posture of the reflective body grating to be measured to enable reflected light on the surface of the reflective body grating to be measured to be auto-collimated and coincide with incident light, and setting the position of the electric turntable as a zero position;
setting the first wavelength range of laser emitted by the tunable laser, testing the reflective volume grating to be tested, and measuring to obtain a data matrix of wavelength, test beam power and reference beam power
；
Processing the matrix to obtain a matrix of wavelength and grating reflectivity
，
And drawing a reflectivity curve of the reflective volume grating to be detected, and reading performance parameters of the reflective volume grating to be detected, wherein the performance parameters comprise a central wavelength lambdac, a reflection efficiency eta and a full width at half maximum (FWHM).
The method for measuring the performance of the reflective volume grating further comprises the following steps: adjusting the wavelength of laser emitted by the tunable laser to be smaller than the central wavelength of the reflective body grating to be measured, setting the electric rotary table to be in a preset measurement angle range, testing the reflective body grating to be measured, and measuring to obtain a data matrix of the angle, the power of the reference light beam and the power of the test light beam
；
Data matrix
Processing data to obtain angle and grating reflectivity matrix
，
；
Drawing an angular spectrum curve of the reflective volume grating to be measured, wherein two angle values of the read curve peak value are respectively
And
the tilt angle of the reflective volume grating to be measured is
。
The method for measuring the performance of the reflective volume grating further comprises the following steps before the power of the initial test beam and the initial reference beam is measured:
and opening the tunable laser, preheating at full power for a preset time, and calibrating the wavelength of the output light of the tunable laser by using an absolute wavelength meter.
Has the advantages that: the invention provides a device and a method for measuring the performance of a reflective volume grating, wherein the device can accurately measure performance parameters of the reflective volume grating with different specifications, such as central wavelength, reflection efficiency, full width at half maximum, inclination angle and the like, has simple structure, clear measuring method and data processing and universality.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for measuring the performance of a reflective volume grating according to the present invention.
FIG. 2 is a graph of the reflectivity curve of the reflective volume grating in the embodiment of the present invention.
FIG. 3 is a graph of the results of the angular spectrum curve measurement of the reflective volume grating in the embodiment of the present invention.
Detailed Description
The present invention provides a device and a method for measuring the performance of a reflective volume grating, and the present invention is further described in detail below in order to make the purpose, technical scheme and effect of the present invention clearer and clearer. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a device for measuring the performance of a reflective volume grating according to the present invention, and as shown in the figure, the device includes a tunable laser 1, a diaphragm 2, a beam splitter 3, an electric turntable 4, and a first power meter 5, which are sequentially disposed on a horizontal line, wherein a reflective volume grating 8 to be measured is disposed on the electric turntable 5, and a light beam emitted by the tunable laser 1 sequentially passes through the diaphragm 2, the beam splitter 3, and the reflective volume grating 8 to be measured and then enters the first power meter 5; a second power meter 6 for receiving a reflected light beam of the light splitting sheet 3 is arranged below the light splitting sheet 3; the tunable laser 1, the electric turntable 4, the first power meter 5 and the second power meter 6 are all connected to a computer 7.
In this embodiment, the computer 7 can control and adjust the wavelength, the step length, and the power of the tunable laser 1 in a Labview environment, can control and adjust the angle and the step length of the electric turntable 4, and can receive the power values acquired by the first power meter 5 and the second power meter 6. The reflective body grating to be measured is placed on the electric rotary table 4, the electric rotary table 4 has the functions of fine adjustment of pitching, deflection and other postures of the reflective body grating to be measured, and the measurement of performance parameters of the reflective body grating with different central wavelengths can be met by selecting a proper tunable laser 1.
Based on the device, the invention also provides a method for measuring the performance of the reflective volume grating based on the device for measuring the performance of the reflective volume grating, which comprises the following steps:
s10, turning on the tunable laser, and after preheating for a preset time at full power, calibrating the wavelength of the output light of the tunable laser by using an absolute wavelength meter;
s20, placing no reflection type body grating to be tested on the electric turntable, setting a first wavelength range of laser emitted by the tunable laser, and respectively measuring the power of the initial test beam and the power of the initial reference beam through the first power meter and the second power meter, and recording the power as the power of the initial test beam and the power of the initial reference beam
；
S30, mounting the reflective body grating to be tested on an electric turntable, adjusting the posture of the reflective body grating to be tested to enable the reflected light on the surface of the reflective body grating to be tested to be auto-collimated and coincide with the incident light, and setting the position of the electric turntable as a zero position;
s40, setting the first wavelength range of the laser emitted by the tunable laser, testing the reflective grating to be tested, and measuring to obtain a data matrix of wavelength, test beam power and reference beam power
；
S50, processing the matrix to obtain the wavelengthAnd a grating reflectivity matrix
，
And drawing a reflectivity curve of the reflective volume grating to be detected, and reading performance parameters of the reflective volume grating to be detected, wherein the performance parameters comprise a central wavelength lambdac, a reflection efficiency eta and a full width at half maximum (FWHM).
S60, adjusting the wavelength of the laser emitted by the tunable laser to be smaller than the central wavelength of the reflective body grating to be measured, setting the electric turntable to be in a preset measurement angle range, testing the reflective body grating to be measured, and measuring to obtain a data matrix of the angle, the power of the reference light beam and the power of the test light beam
；
S70, data matrix
Processing data to obtain angle and grating reflectivity matrix
，
；
S80, drawing an angular spectrum curve of the reflective volume grating to be measured, wherein two angle values of the read curve peak value are respectively
And
the tilt angle of the reflective volume grating to be measured is
。
The method for measuring the performance of the reflective volume grating provided by the embodiment has the advantages that the measuring process is simple, the data processing is clear, the performance parameters of the reflective volume grating, such as the center wavelength, the reflection efficiency, the half-height width, the inclination angle and the like, can be accurately measured and obtained through the method, and the method has universality and can be used for measuring the reflective volume gratings with different specifications.
The following explains the apparatus and method for measuring the performance of a reflective volume grating according to the present invention by an embodiment:
as shown in fig. 1, the device for measuring the performance of the reflective volume grating provided in this embodiment includes a tunable laser 1, a diaphragm 2, a beam splitter 3, an electric turntable 4, a first power meter 5, a second power meter 6, a computer 7, and a reflective volume grating 8 to be measured, where the tunable laser 1, the electric turntable 4, the first power meter 5, and the second power meter 6 are all connected to the computer 7, a light beam emitted by the tunable laser 1 passes through the diaphragm 2, the beam splitter 3, and the reflective volume grating 8 to be measured in sequence and then enters the first power meter 5, and the light beam is marked as a test light beam; the other light reflected by the beam splitter 3 enters a second power meter 6, and the path of the light is marked as a reference beam.
The device for measuring the performance of the reflective volume grating is used for measuring the reflective volume grating sample with the center wavelength of about 975nm, and comprises the following specific steps:
1. opening the tunable laser, preheating at full power for half an hour, and calibrating the wavelength of output light of the tunable laser by adopting an absolute wavelength meter;
2. setting the measurement wavelength range of the tunable laser to 974.7-976 nm and the step length of 0.01nm without placing a sample to be measured, selecting the measurement range of the power meter, measuring the power of the initial test beam and the initial reference beam, and recording the power as the power of the initial test beam and the power of the initial reference beam
；
3. Placing the reflective body grating to be measured on an electric turntable, adjusting the posture of the reflective body grating to be measured to enable reflected light on the surface of the reflective body grating to be measured to be auto-collimated and coincide with incident light, and setting the position of the electric turntable as a zero position;
4. selecting the same measurement wavelength range and step length as those in step 2 by the tunable laser, testing the reflective type body grating to be tested, and measuring to obtain a data matrix of the wavelength, the test light beam power and the reference light beam power
(ii) a Processing the matrix to obtain a matrix of wavelength and grating reflectivity
，
(ii) a The reflectivity curve of the reflective volume grating is plotted, and the result is shown in fig. 2, from which fig. 2 the central wavelength λ of the reflective volume grating can be readc=975.355nm, reflection efficiency η =11.3%, full width at half maximum FWHM =160 pm.
5. The wavelength of the tunable laser is adjusted to 975.1nm, and the measuring range of the electric turntable is [ -4 DEG, 4 DEG ]]And the step length is 0.005 DEG, the reflective type volume grating to be tested is tested, and the angle, the power of the reference light beam and the power of the test light beam are measured to obtain a data matrix
(ii) a Processing the matrix to obtain an angle and grating reflectivity matrix
，
(ii) a The angular spectrum curve of the reflective volume grating is drawn, and the result is shown in fig. 3, and the two angle values of the curve peak value which can be read from fig. 3 are respectively
And
the tilt angle of the reflective volume grating
。
In summary, the device for measuring the performance of the reflective volume grating provided by the invention can meet the performance parameter measurement of the reflective volume grating, the measuring device has the advantages of simple optical path, easy construction, flexible and accurate adjustment and simple data processing method, the method for measuring the performance of the reflective volume grating based on the device provided by the invention has universality, and the reflective volume grating with different central wavelengths can be measured by selecting a proper tunable laser.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (2)
1. A method for measuring the performance of a reflective volume grating based on a device for measuring the performance of the reflective volume grating is characterized in that the device comprises a tunable laser, a diaphragm, a beam splitter, an electric rotary table and a first power meter which are sequentially arranged on a horizontal line, wherein the electric rotary table is provided with the reflective volume grating to be measured, the step length of the tunable laser is 0.01nm, and a light beam emitted by the tunable laser sequentially passes through the diaphragm, the beam splitter and the reflective volume grating to be measured and then enters the first power meter; a second power meter for receiving the reflected light beam of the light splitting sheet is arranged below the light splitting sheet; the tunable laser, the electric turntable, the first power meter and the second power meter are all connected to a computer, and the method comprises the following steps:
setting a first wavelength range of laser emitted by a tunable laser without placing a reflective volume grating to be tested on an electric turntable, and respectively measuring the power of an initial test beam and the power of an initial reference beam by a first power meter and a second power meter to be recorded as
；
Installing the reflective body grating to be measured on an electric turntable, adjusting the posture of the reflective body grating to be measured to enable reflected light on the surface of the reflective body grating to be measured to be auto-collimated and coincide with incident light, and setting the position of the electric turntable as a zero position;
setting the first wavelength range of laser emitted by the tunable laser, testing the reflective volume grating to be tested, and measuring to obtain a data matrix of wavelength, test beam power and reference beam power
；
Processing the matrix to obtain a matrix of wavelength and grating reflectivity
，
Drawing a reflectivity curve of the reflective volume grating to be measured, and reading performance parameters of the reflective volume grating to be measured, wherein the performance parameters comprise a central wavelength lambdac, a reflection efficiency eta and a full width at half maximum (FWHM); adjusting the wavelength of laser emitted by the tunable laser to be smaller than the central wavelength of the reflective body grating to be measured, setting the electric rotary table to be in a preset measurement angle range, testing the reflective body grating to be measured, and measuring to obtain a data matrix of the angle, the power of the reference light beam and the power of the test light beam
；
Data matrix
Processing data to obtain angle and grating reflectivity matrix
，
；
Drawing an angular spectrum curve of the reflective volume grating to be measured, wherein two angle values of the read curve peak value are respectively
And
the tilt angle of the reflective volume grating to be measured is
。
2. The method of claim 1, further comprising, before measuring the power of the initial test beam and the initial reference beam:
and opening the tunable laser, preheating at full power for a preset time, and calibrating the wavelength of the output light of the tunable laser by using an absolute wavelength meter.
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| CN114779382B (en) * | 2022-06-22 | 2022-11-01 | 杭州拓致光电科技有限公司 | Volume Bragg grating wavelength beam combiner based on photo-thermal conversion glass and preparation method thereof |
| CN116222984B (en) * | 2023-05-09 | 2023-07-25 | 上海隐冠半导体技术有限公司 | Grating ruler reflectivity measuring device |
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