CN113899531A - Optical characteristic detecting device and method for manufacturing the same - Google Patents

Optical characteristic detecting device and method for manufacturing the same Download PDF

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Publication number
CN113899531A
CN113899531A CN202010577822.1A CN202010577822A CN113899531A CN 113899531 A CN113899531 A CN 113899531A CN 202010577822 A CN202010577822 A CN 202010577822A CN 113899531 A CN113899531 A CN 113899531A
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CN
China
Prior art keywords
light
chamber
transparent plate
opening
image sensor
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Pending
Application number
CN202010577822.1A
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Chinese (zh)
Inventor
邱伟庭
詹朱聪
柏桑迪
李嘉樟
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Young Optics Inc
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Young Optics Inc
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Publication date
Application filed by Young Optics Inc filed Critical Young Optics Inc
Priority to CN202010577822.1A priority Critical patent/CN113899531A/en
Publication of CN113899531A publication Critical patent/CN113899531A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0292Testing optical properties of objectives by measuring the optical modulation transfer function
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices

Abstract

An optical characteristic detection device comprises a heat insulation material layer, a first transparent plate, a second transparent plate, a heat conduction layer, a cooling source and an image sensor. The heat insulation material layer is provided with a first opening and a second opening which are opposite, the first light-transmitting plate is arranged at the first opening, the second light-transmitting plate is arranged at the second opening, and the heat insulation material layer, the first light-transmitting plate and the second light-transmitting plate define a cavity. The heat conduction layer is arranged in the cavity, the refrigeration source is coupled with the heat conduction layer, and the image sensor is arranged outside the cavity. The invention also provides a manufacturing method of the optical characteristic detection device.

Description

Optical characteristic detecting device and method for manufacturing the same
Technical Field
The present invention relates to an optical characteristic detection device and a method for manufacturing the optical characteristic detection device.
Background
The existing low-temperature detection technology of the lens can simulate the degree of imaging performance of the image taking lens affected by low temperature in extreme weather. However, the optical property detecting machine with built-in cooling and temperature control function is very expensive, and the cooling by using the condensing agent cannot regulate and control the temperature, and it takes a long time to obtain the required low temperature, and the low temperature can only be maintained for a period of time. Therefore, there is a need for an optical property detection device with simple structure, low cost and temperature control.
The background section is only used to help understanding the technical solution of the present invention, and therefore the technical solution disclosed in the background section may include some prior art which does not constitute the knowledge of those skilled in the art. The technical solutions disclosed in the "background" section do not represent the technical solutions or problems to be solved by one or more embodiments of the present invention, which are known or recognized by those skilled in the art before the present application.
Disclosure of Invention
Other objects and advantages of the present invention will be further understood from the technical features disclosed in the present invention. In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
According to one aspect of the present invention, an optical property detection device includes a thermal insulation material layer, a first transparent plate, a second transparent plate, a heat conduction layer, a cooling source, an image sensor, and a flow guide structure. The heat insulation material layer is provided with a first opening and a second opening which are opposite, the first light-transmitting plate is arranged at the first opening, the second light-transmitting plate is arranged at the second opening, and the heat insulation material layer, the first light-transmitting plate and the second light-transmitting plate define a cavity. The heat-conducting layer is arranged in the cavity, the refrigeration source is coupled with the heat-conducting layer, the image sensor is arranged outside the cavity and positioned on one side of the second light-transmitting plate, which is back to the first light-transmitting plate, and the first flow guide structure is arranged between the defogging unit and the second light-transmitting plate.
According to one aspect of the present invention, there is provided an optical property detection device including a pattern light generation unit, a collimating element, a chamber, a heat conductive layer, a cooling source, and an image sensor. The pattern light generating unit is used for forming pattern light, the collimating element collimates the pattern light to form collimated pattern light, the chamber accommodates the optical piece to be tested, and the optical piece to be tested is located on a light path of the collimated pattern light. The heat conduction layer is arranged in the cavity, the refrigeration source is coupled with the heat conduction layer, the image sensor is arranged outside the cavity and located on the downstream of a light path of the cavity, and the collimation pattern light is imaged on the image sensor through the optical piece to be measured.
According to an aspect of the present invention, there is provided a method for manufacturing an optical characteristic detection device including the following steps. A layer of thermal insulation material having opposing first and second openings is provided. The first transparent plate is disposed in the first opening and the second transparent plate is disposed in the second opening, wherein the layer of thermally insulating material, the first transparent plate, and the second transparent plate define a chamber. The heat conducting layer is arranged in the cavity. A refrigeration source is coupled to the thermally conductive layer. An image sensor is arranged on one side of the second light-transmitting plate, which is back to the first light-transmitting plate. A defogging unit is provided to reduce moisture between the chamber and the image sensor.
According to the above aspects of the present invention, the design of the refrigeration source and the heat insulation cavity is utilized, a stable low temperature environment below-20 ℃ can be obtained with low manufacturing cost and simple structure, and the temperature can be accurately regulated and controlled by adjusting the current parameters. Moreover, the defogging design can avoid the condensation of fog at low temperature, and an accurate and stable optical measurement result can be obtained. In addition, since the image sensor is located outside the chamber of the optical characteristic detection device, the image sensor is not affected by the temperature of the chamber, and thus the measurement accuracy can be further improved.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
Fig. 1 and 2 are a schematic perspective view and a schematic plan view of an optical property detection apparatus according to an embodiment of the present invention.
Fig. 3 is a schematic plan view of an optical characteristic measuring apparatus according to another embodiment of the present invention.
Fig. 4 is a schematic diagram of an MTF inspection apparatus for inspecting the quality of a lens according to an embodiment of the invention.
Detailed Description
The foregoing and other technical and scientific aspects, features and advantages of the present invention will be apparent from the following detailed description of the embodiments, which is to be read in connection with the accompanying drawings. Directional terms as referred to in the following examples, for example: up, down, left, right, front or rear, etc., are referred to only in the direction of the attached drawings. Accordingly, the directional terminology is used for purposes of illustration and is in no way limiting.
Fig. 1 and fig. 2 are a schematic perspective view and a schematic plan view of an optical property detection device according to an embodiment of the invention, wherein fig. 2 further illustrates a defogging unit and a flow guide structure for the detection device. As shown in fig. 1, the optical property detection apparatus 100 may include a thermal insulation material layer 102, a first transparent plate 104, a second transparent plate 106, a heat conduction layer 108, a cooling chip 112, and an image sensor 114. The thermal insulation material layer 102 has a first opening 102a and a second opening 102b, the first transparent plate 104 is disposed in the first opening 102a, the second transparent plate 106 is disposed in the second opening 102b, and the thermal insulation material layer 102, the first transparent plate 104 and the second transparent plate 106 define a cavity 110 as a receiving space for receiving an optical element 120 to be tested. The first and second transparent plates 104 and 106 can be fixed to the thermal insulation material layer 102 in an airtight manner, for example, but not limited thereto. In the present embodiment, the optical device to be tested 120 is exemplified as a lens 120a including a plurality of lenses, and in other embodiments, the optical device to be tested may be a single lens or other optical elements without limitation. In this embodiment, a heat conductive layer 108, such as a copper sheet, may be disposed on the inner wall of the chamber 110, and a cold chip 112 is coupled to the heat conductive layer 108. The cooling chip 112 generates a cold side 112a and a hot side 112b opposite to each other when operating, in this embodiment, the cold side 112a is coupled to the heat conductive layer 108, and the hot side 112b can be coupled to a heat dissipation element such as a heat dissipation fin 122 and/or a heat pipe 124. The thermal insulation material layer 102 can be used as a shell or a cover and is entirely disposed on a holder (holder)132 of the inspection machine, and a plurality of air thermal insulation cavities 126 can be disposed inside the thermal insulation material layer 102. The cooling chip 112 can be used as a cooling source for reducing the temperature of the chamber 110 to a desired low temperature, and the plurality of air insulation chambers 126 surrounding the chamber 110 can reduce the heat exchange between the chamber 110 and the outside, so that the optical device 120 to be measured can be continuously maintained in a low temperature state required for measurement. As shown in fig. 2, the light I for detection can sequentially pass through the first transparent plate 104, the optical element 120 to be detected in the chamber 110, and the second transparent plate 106, and is imaged on the image sensor 114 located outside the chamber 110 through the lens 120 a. When performing low temperature detection, the optical property detection apparatus 100 can stably detect a state of 20 ℃ below zero or lower, and since the chamber 110 is maintained at a very low temperature and the outside is maintained at room temperature, the second transparent plate 106 located between the optical element 120 to be detected and the image sensor 114 is prone to condensing moisture and fogging, which affects light penetration and results in measurement error or failure in measurement. In the present embodiment, as shown in fig. 2, a defogging unit 140 may be provided, for example, the defogging unit 140 may transmit a dry gas to an area between the chamber 110 and the image sensor 114, and a flow guide structure 116, such as an air flow channel, may be disposed between the defogging unit 140 and the second transparent plate 106. The flow guiding structure 116 may communicate with the defogging unit 140 and the area between the chamber 110 and the image sensor 114. In the embodiment, the flow guiding structure 116 may be disposed in the thermal insulation material layer 102 and has an opening facing the second transparent plate 106, the defogging unit 140 may be, for example, an air dryer and may provide a dry gas (e.g., air) with a humidity lower than 50%, and the defogging unit 140 may continuously blow the dry gas to the surface of the second transparent plate 106 through the flow guiding structure 116 to dehumidify the surface of the second transparent plate 106, so as to prevent the second transparent plate 106 from fogging or frosting, and obtain a more accurate and stable optical measurement result. The defogging unit 140 only needs to provide the effect of preventing the transparent plate 106 from fogging or frosting, and the structure or form thereof is not limited at all. In other embodiments, the defogging unit 140 may be an electrically heated defogging line, and the airflow guide structure 116 may be omitted. In addition, in the embodiment, the defogging unit 140 performs a defogging design on the second transparent plate 106 along the flow guide structure 116 disposed below, but the invention is not limited thereto. In another embodiment, as shown in the optical property detection apparatus 100a of fig. 3, the defogging unit 140 may also perform defogging on the upper first transparent plate 104 as required, and the insulating material layer 102 may also be provided with another flow guide structure 118 on one side of the first transparent plate 104.
Fig. 4 is a schematic diagram of an MTF inspection apparatus for inspecting the quality of a lens according to an embodiment of the invention. As shown in fig. 4, in the MTF detection apparatus 200, the light source 202, the converging lens 204 and the stop 206 form a pattern light generating unit, and the light emitted from the light source 202 is guided to the stop 206 with a slit through the converging lens 204 to generate a pattern light IP. After the pattern light IP is collimated by the collimating lens 208, the collimated pattern light IP enters the optical characteristic detecting apparatus 100 and is imaged on the image sensor 210. The optical property detection apparatus 100 may be disposed on a holder 132 of the detection machine, and the holder 132 and the image sensor 210 may be disposed on a carrier 220. Furthermore, the image sensor 210 can move along the single axis of the carrier 220 for precise focusing, and the image pattern data of the image sensor 210 can be processed by subsequent signals to obtain the measurement value of Modulation Transfer Function (MTF). MTF detection can provide quantitative analysis of the overall image quality or contrast of the optical system, which can be used as a criterion for judging the performance of the optical system. It should be noted that the above embodiments of the optical characteristic detecting apparatus for MTF detection are only examples, and the optical characteristic detecting apparatus of the present invention can also be used for detecting other imaging characteristics or parameters without limitation. The generation of the low temperature environment by the refrigeration chip is only an example, and other refrigeration sources such as a low temperature compressor and a freezing trap may be used without limitation. In another embodiment, a thermal chip or other heating element may be used to generate a desired high temperature environment, and the optical property detection apparatus of the above embodiments may be used to detect the degree of imaging performance of the lens affected by the high temperature.
By means of the design of the embodiments of the invention, the design of the refrigeration source matched with the heat insulation cavity is utilized, the stable low-temperature environment below minus 20 ℃ can be obtained only by low manufacturing cost and simple structure, and the temperature can be accurately regulated and controlled by adjusting the current parameters. Moreover, the defogging design can avoid the condensation of fog at low temperature, and an accurate and stable optical measurement result can be obtained. In addition, since the image sensor is located outside the chamber of the optical characteristic detection device, the image sensor is not affected by the temperature of the chamber, and thus the measurement accuracy can be further improved.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. An optical characteristic detecting device, comprising:
the heat insulation material layer is provided with a first opening and a second opening which are opposite;
the first light-transmitting plate is arranged at the first opening;
a second transparent plate disposed in the second opening, wherein the layer of thermal insulation material, the first transparent plate, and the second transparent plate define a chamber;
a heat conducting layer disposed within the chamber;
a uniform cold source coupled to the heat conducting layer; and
and the image sensor is arranged outside the cavity and positioned on one side of the second light-transmitting plate, which is back to the first light-transmitting plate.
2. An optical characteristic detecting device, comprising:
a pattern light generating unit for forming a pattern light;
a collimating element for collimating the pattern light to form a collimated pattern light;
a chamber for accommodating an optical element to be measured, wherein the optical element to be measured is positioned on the light path of the collimation pattern light;
a heat conducting layer disposed within the chamber;
a uniform cold source coupled to the heat conducting layer; and
and the image sensor is arranged outside the cavity and positioned on the downstream of the optical path of the cavity, wherein the collimated pattern light is imaged on the image sensor through the optical element to be detected.
3. The device as claimed in claim 1 or 2, wherein the cooling source is a cooling chip having a cold side and a hot side, the cold side is coupled to the heat conductive layer, and the hot side is coupled to a heat dissipation element.
4. The optical property detection device of claim 3, wherein the heat conductive layer is a copper sheet, and the heat dissipation element comprises at least one of a heat pipe and a heat dissipation fin.
5. The optical property detection device of claim 2 further comprising a layer of thermally insulating material defining the chamber, a first transparent plate, and a second transparent plate.
6. The optical property detection device of claim 1 or 5, further comprising:
and the first flow guide structure is arranged between the demisting unit and the second light-transmitting plate.
7. The optical property detection device of claim 6 further comprising:
and the second flow guide structure is arranged between the demisting unit and the first light-transmitting plate.
8. The optical property detection device of claim 6 wherein the defogging unit is an air dryer and the air dryer delivers a dry gas to an area between the chamber and the image sensor.
9. The optical property detection device of claim 1 or 5, further comprising:
and the air heat insulation cavities are arranged in the heat insulation material layer.
10. A method for manufacturing an optical characteristic inspection apparatus, comprising:
providing a heat insulation material layer with a first opening and a second opening which are opposite;
disposing a first transparent plate in the first opening and a second transparent plate in the second opening, wherein the layer of thermally insulating material, the first transparent plate, and the second transparent plate define a chamber;
disposing a heat conductive layer within the chamber;
coupling a uniform cooling source to the thermally conductive layer;
arranging an image sensor on one side of the second light-transmitting plate, which is back to the first light-transmitting plate; and
a defogging unit is provided to reduce moisture between the chamber and the image sensor.
CN202010577822.1A 2020-06-22 2020-06-22 Optical characteristic detecting device and method for manufacturing the same Pending CN113899531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010577822.1A CN113899531A (en) 2020-06-22 2020-06-22 Optical characteristic detecting device and method for manufacturing the same

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Application Number Priority Date Filing Date Title
CN202010577822.1A CN113899531A (en) 2020-06-22 2020-06-22 Optical characteristic detecting device and method for manufacturing the same

Publications (1)

Publication Number Publication Date
CN113899531A true CN113899531A (en) 2022-01-07

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3619073A (en) * 1968-12-02 1971-11-09 Michel Ossona De Mendez Sample holder for optical measurements at low temperatures
JP2006060152A (en) * 2004-08-24 2006-03-02 Nikon Corp Optical characteristic measuring apparatus, stage apparatus and exposure device
JP2009031222A (en) * 2007-07-30 2009-02-12 Sumitomo Electric Ind Ltd Thermostatic bath and modulation transfer function measuring device
TW200937000A (en) * 2008-02-29 2009-09-01 Hon Hai Prec Ind Co Ltd Optical lens testing apparatus and method
CN102507146A (en) * 2011-09-29 2012-06-20 中国航空工业第六一八研究所 Device and method for testing reflector parameters under high temperature and low temperature conditions
CN107064004A (en) * 2017-06-08 2017-08-18 东北石油大学 Optical characteristic measurement optics cavity under a kind of liquid medium low temperature environment
CN109916603A (en) * 2019-04-28 2019-06-21 京东方科技集团股份有限公司 Laser gun lens transmission efficiency test device and test method
CN209861063U (en) * 2019-07-10 2019-12-27 深圳市通用核心光电有限公司 Temperature-controllable lens performance detection device
US20200025608A1 (en) * 2016-08-05 2020-01-23 Primes Gmbh Beam Power Measurement with Widening

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3619073A (en) * 1968-12-02 1971-11-09 Michel Ossona De Mendez Sample holder for optical measurements at low temperatures
JP2006060152A (en) * 2004-08-24 2006-03-02 Nikon Corp Optical characteristic measuring apparatus, stage apparatus and exposure device
JP2009031222A (en) * 2007-07-30 2009-02-12 Sumitomo Electric Ind Ltd Thermostatic bath and modulation transfer function measuring device
TW200937000A (en) * 2008-02-29 2009-09-01 Hon Hai Prec Ind Co Ltd Optical lens testing apparatus and method
CN102507146A (en) * 2011-09-29 2012-06-20 中国航空工业第六一八研究所 Device and method for testing reflector parameters under high temperature and low temperature conditions
US20200025608A1 (en) * 2016-08-05 2020-01-23 Primes Gmbh Beam Power Measurement with Widening
CN107064004A (en) * 2017-06-08 2017-08-18 东北石油大学 Optical characteristic measurement optics cavity under a kind of liquid medium low temperature environment
CN109916603A (en) * 2019-04-28 2019-06-21 京东方科技集团股份有限公司 Laser gun lens transmission efficiency test device and test method
CN209861063U (en) * 2019-07-10 2019-12-27 深圳市通用核心光电有限公司 Temperature-controllable lens performance detection device

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