CN113893797A - Special micro-reaction channel structure and acoustic micro-reactor and fluid mixing strengthening system based on same - Google Patents
Special micro-reaction channel structure and acoustic micro-reactor and fluid mixing strengthening system based on same Download PDFInfo
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- CN113893797A CN113893797A CN202111401416.0A CN202111401416A CN113893797A CN 113893797 A CN113893797 A CN 113893797A CN 202111401416 A CN202111401416 A CN 202111401416A CN 113893797 A CN113893797 A CN 113893797A
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 33
- 238000005728 strengthening Methods 0.000 title claims abstract description 10
- 239000012530 fluid Substances 0.000 title abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 239000000919 ceramic Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 7
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 7
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 6
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 6
- 229920000515 polycarbonate Polymers 0.000 claims description 5
- 239000004417 polycarbonate Substances 0.000 claims description 5
- -1 polydimethylsiloxane Polymers 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000004800 polyvinyl chloride Substances 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 2
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 2
- 230000004907 flux Effects 0.000 abstract description 4
- 230000001276 controlling effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
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- 230000035484 reaction time Effects 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
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Abstract
The invention discloses a special micro-reaction channel structure, an acoustic micro-reactor based on the same and a fluid mixing strengthening system, belongs to the technical field of fluid mixing and reaction strengthening, and can solve the problems of low output flux and easy blockage of the existing micro-reactor; has the advantages of avoiding the blockage of the micro-channel and flexibly regulating and controlling the liquid mixing efficiency. The design working scheme is as follows: an acoustic micro-reactor comprises a straight or bent micro-channel with the characteristic dimension of 0.05-2 mm, wherein the inner wall of the micro-channel is provided with a sharp structure inclined at a certain angle (5-85 degrees) along the flow direction, when mixed liquid flows through the sharp structure, micro-bubbles are generated due to surface tension, and when a piezoelectric ceramic transducer is arranged near the micro-channel, the micro-bubbles resonate to generate acoustic current at a certain working frequency, so that the liquid mixing is promoted.
Description
Technical Field
The invention belongs to the technical field of fluid mixing and reaction strengthening, and particularly relates to a special micro-reaction channel structure, and an acoustic micro-reactor and a fluid mixing strengthening system based on the same.
Background
Compared with the traditional macroscopic reactor, the micro-reactor receives more and more attention due to the obvious mass and heat transfer enhancement effect, and has great application potential in the fields of chemical engineering, chemistry, biomedicine, catalysis and the like. Microreactors are generally microreaction devices made by means of microfabrication techniques, and as a process intensification system, microreactors have microchannel structures with characteristic dimensions in the range of 5 μm to 2 mm. In the narrow microchannel, the flat homogeneity and the thermal diffusion efficiency can be greatly enhanced, so that the mixing and reaction process enhancement of the fluid in the microchannel can be realized.
Since the fluid in the microchannel is generally in a laminar flow state, which is generally not beneficial to the mixing and reaction process, the structure of the microchannel needs to be designed and manufactured specifically. At present, a plurality of different types of passive microreactors based on pressure driving have been invented at home and abroad. For example, CN205055990U proposes a microchannel based on a contraction-expansion mixing chamber, in which multiple streams of fluid are injected into the inlet of the microchannel, and then pass through the microchannel several tens of centimeters long to realize a mixing reaction process; CN112915940A proposes a micro-channel based on a round spherical shell or an oval spherical shell, and the generated Karman vortex street effect is utilized to enable different materials to be subjected to a multi-stage spherical shell structure to realize full mixing reaction; CN207941501U discloses a spiral microchannel, which enables the reaction materials to be uniformly mixed after passing through a reaction distance of tens of centimeters long; CN111434377A proposes a coiled-tube microreactor, which can realize the mixing and reaction of homogeneous or heterogeneous reaction raw materials through microchannels with a length of several tens of centimeters. It can be seen that a series of microreactor devices of different configurations have been developed to facilitate the mixing and reaction processes, as compared to conventional macro-reactors.
Although the prior microchannel reactors have a certain degree of intensified mixing, the following disadvantages are common to these microreactors: 1. low flux, which results in low flux due to mixing in laminar flow conditions which relies primarily on molecular diffusion, typically on decreasing through-flow velocity, increasing reaction time in order to enhance mixing; 2. the controllability is poor, and after the reaction liquid enters the microchannel, the mixing degree can be controlled only by adjusting the reaction flow rate; 3. the micro-flow channel is easy to block, and reaction products are easy to deposit in the micro-flow channel due to the irregular bending structure of the micro-flow channel, so that the problem of serious blocking is caused.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a special micro-reaction channel structure, and an acoustic micro-reactor and a fluid mixing enhancement system based on the same, which are used for solving the problems of low flux, easy blockage and the like of the micro-channel reactor in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
the invention discloses a special micro-reaction channel structure, which comprises a substrate, wherein a micro-channel with the characteristic dimension of 0.05-2 mm is arranged on the substrate, one end of the micro-channel is provided with a liquid inlet, the other end of the micro-channel is provided with a liquid outlet, and the inner wall of the micro-channel is provided with a sharp micro-structure inclined along the flowing direction of mixed liquid;
the inclination angle of the sharp microstructure and the liquid flowing direction is 5-85 degrees;
the longitudinal section of the sharp microstructure is triangular, parallelogram, semiellipse or ellipse;
the sharp microstructures are distributed on one side of the inner wall of the microchannel, are arranged on two sides of the microchannel wall in a crossed mode or are arranged on two sides of the inner wall of the microchannel in an opposite mode.
Furthermore, the width of the sharp microstructure is 1/5-4/5 of the width of the micro channel.
Further, the shape of the microchannel is straight, arc, S-shaped, wave-shaped, annular or spiral.
Further, the microchannels and sharp microstructures are made of polydimethylsiloxane, polymethylmethacrylate, polystyrene, polycarbonate, or polyvinyl chloride.
Further, the substrate is made of a glass sheet or a silicon sheet.
Furthermore, the number of the liquid inlets is more than two, and the adjacent liquid inlets are Y-shaped, T-shaped or U-shaped.
The invention also discloses an acoustic micro-reactor consisting of the special micro-reaction channel structure, wherein one or more piezoelectric ceramic transducers are used as active strengthening modules, and the linear distance between the piezoelectric ceramic transducers and the micro-channel is not more than 3cm and is arranged on the same substrate; the working frequency of the piezoelectric ceramic transducer is 2 kHz-2 MHz.
The invention also discloses a liquid mixing and strengthening system which comprises the acoustic microreactor.
Compared with the prior art, the invention has the following beneficial effects:
the special micro-reaction channel structure disclosed by the invention is internally provided with a sharp microstructure, the characteristic dimension of the micro-channel can be shortened to 0.05-2 mm, the use of production raw materials is reduced, and the volume of a single micro-reactor device is reduced. The inclination angle between the sharp microstructure and the flowing direction of the liquid is 5-85 degrees, so that the sharp microstructure with a certain inclination angle can easily form micro-bubbles between the sharp microstructure and the wall surface of the channel through surface tension, and the micro-bubbles vibrate under the excitation of sound waves, so that the liquid is vigorously mixed, and the mixing efficiency is improved; the invention also discloses an acoustic micro-reactor composed of the special micro-reaction channel structure, wherein one or more acoustic piezoelectric ceramic transducers are introduced as an active mixing strengthening module, when mixed liquid flows through a sharp structure, the mixed liquid generates micro-bubbles due to surface tension, the micro-bubbles generate acoustic flow under the resonance action of the piezoelectric ceramic transducers, the mixing of the liquid is promoted, the heat and mass transfer efficiency is greatly improved, the reaction distance is shortened, and the hundred millisecond or even millisecond mixed reaction time can be realized.
The invention also discloses an acoustic micro-reactor formed by adopting the special micro-reaction channel structure, which can not only control the mixing degree by adjusting the flow rate of the mixed liquid, but also adjust the mixing degree by the change of the working voltage, frequency value and frequency type applied by the piezoelectric ceramic transducer. In addition, due to the violent movement and stirring action of the microbubbles, reaction products, particularly solid products, are easy to remove from the microchannel, so that the microreactor can run continuously for a long time, and the problem of blockage of the microreactor can be effectively solved.
Drawings
FIG. 1 is a top view of a particular micro-reaction channel structure with straight micro-channels according to the present invention;
FIG. 2 is a top view of a particular micro-reaction channel structure having arcuate micro-channels in accordance with the present invention;
FIG. 3 is a schematic representation of a straight microchannel acoustic microreactor in a fluidless condition in some embodiments of the invention;
FIG. 4 is a schematic representation of a straight microchannel acoustic microreactor in some embodiments of the present invention in the presence of fluid for microbubble formation;
FIG. 5 is a fluid mixing situation of a straight microchannel acoustic microreactor under soundfield-free conditions in some embodiments of the invention;
FIG. 6 is a fluid mixing situation of a straight microchannel acoustic microreactor under an acoustic field condition in some embodiments of the invention;
FIG. 7 is a view of an arcuate microchannel acoustic microreactor in a fluidless condition in some embodiments of the invention;
FIG. 8 is a schematic representation of an arcuate microchannel acoustic microreactor in some embodiments of the present invention in the presence of fluid for microbubble formation;
FIG. 9 is a fluid mixing situation of an arcuate microchannel acoustic microreactor under soundfield-free conditions in some embodiments of the invention;
FIG. 10 is a fluid mixing situation of an arc microchannel acoustic microreactor under the condition of an acoustic field in a part of embodiments of the invention;
wherein: 1-a substrate; 2-a microreactor channel wall; 3-a sharp microstructure; 4-microbubbles; 5-a liquid inlet; 6-a liquid outlet; the angle of inclination of the alpha-sharp microstructure to the direction of liquid flow; d-microchannel width; d-the width of the sharp microstructure; the A liquid, B liquid, C liquid and D liquid can be polar solution and nonpolar solution of any chemical or biological substance.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is described in further detail below with reference to the accompanying drawings:
example 1:
in a typical embodiment of the present application, as shown in fig. 1, a special micro-reaction channel structure comprises a substrate 1 made of glass sheet, a straight micro-channel 2 formed by Polydimethylsiloxane (PDMS) and having a characteristic dimension of 1mm, wherein the inner wall of the micro-channel 2 has protruding microstructures 3 with triangular cross-sectional shapes and sharp microstructures 3, and the sharp microstructures 3 are arranged on two sides of the micro-channel wall 2 in a crossed manner. When the mixed liquid flows through the sharp microstructures 3, microbubbles 4 are generated due to surface tension. The angle of inclination α of the sharp microstructure 3 in the flow direction is 45 °, and the width D of the sharp microstructure 3 is 1/2 of the microchannel width D; the liquid inlets 5 are formed in a Y shape.
An acoustic micro-reactor composed of the special micro-reaction channel structure is characterized in that a piezoelectric ceramic transducer (with the working frequency of 90kHz) is tightly attached to the vicinity of the polydimethylsiloxane micro-channel 2 and is driven by a signal generator and a signal amplifier.
Example 2:
example 2 is essentially the same as the device system of example 1, except that: as shown in fig. 2, Polydimethylsiloxane (PDMS) forms an arc-shaped microchannel structure 2, and the sharp microstructures 3 are inclined at an angle α of 60 ° in the flow direction.
Example 3:
example 3 is essentially the same as the device system of example 1, except that: the substrate 1 is a silicon wafer, a straight micro-channel structure 2 is formed by polymethyl methacrylate (PMMA), and the inclination angle alpha of the sharp micro-structure 3 along the flow direction is 30 degrees.
Example 4:
example 4 is essentially the same as the device system of example 1, except that: the substrate 1 is a silicon wafer, the angle alpha of inclination of the sharp microstructure along the flow direction is 75 degrees, and the working frequency of the piezoelectric ceramic transducer is 5 kHz.
Example 5:
example 5 is essentially the same as the device system of example 1, except that: polymethyl methacrylate (PMMA) forms a spiral micro-channel structure, the working frequency of the piezoelectric ceramic transducer is 100kHz, and the width D of the sharp microstructure is 2/3 of the width D of the micro-channel.
Example 6:
example 6 is essentially the same as the device system of example 1, except that: the sharp microstructures 3 are distributed on one side of the inner wall of the micro-channel 2, the longitudinal section of each sharp microstructure 3 is parallelogram, and the width D of each sharp microstructure is 4/5 of the width D of the micro-channel.
Example 7:
example 7 is essentially the same as the device system of example 1, except that: the micro-channel 2 is S-shaped, the sharp microstructures 3 are arranged on two sides of the inner wall of the micro-channel 2 at any position, and the cross section of each sharp microstructure 3 is oval.
Example 8:
example 8 is essentially the same as the device system of example 1, except that: polystyrene (PS) forms an arc-shaped micro-channel 2 with the characteristic dimension of 0.05mm, the inner wall of the micro-channel 2 is provided with a protruding cross section of a semi-elliptical sharp microstructure 3, and the sharp microstructures 3 are oppositely arranged on two sides of the inner wall of the micro-channel 2. When the mixed liquid flows through the sharp microstructures 3, microbubbles 4 are generated due to surface tension. The angle of inclination α of the sharp microstructure 3 in the flow direction is 5 °, and the width D of the sharp microstructure 3 is 1/5 of the microchannel width D; a T-shape is formed between the liquid inlets 5. The working frequency of the piezoelectric ceramic transducer is 2 MHz.
Example 9:
example 9 is essentially the same as the device system of example 1, except that: polyvinyl chloride (PVC) forms an S-shaped microchannel 2 with the characteristic dimension of 2mm, the inner wall of the microchannel 2 is provided with a protruding cross section of a semi-elliptical sharp microstructure 3, and the sharp microstructures 3 are oppositely arranged on two sides of the microchannel wall 2. When the mixed liquid flows through the sharp microstructures 3, microbubbles 4 are generated due to surface tension. The angle of inclination α of the sharp microstructure 3 in the flow direction is 85 °, and the width D of the sharp microstructure 3 is 4/5 of the microchannel width D; the liquid inlets 5 are formed in a U shape. The working frequency of the piezoelectric ceramic transducer is 2 kHz.
Example 10:
example 10 is essentially the same as the device system of example 1, except that: the Polycarbonate (PC) forms a wavy microchannel 2 with the characteristic dimension of 1mm, the inner wall of the microchannel 2 is provided with a protruding cross section of an elliptic sharp microstructure 3, and the sharp microstructure 3 is arranged at any position on two sides of the microchannel wall 2. When the mixed liquid flows through the sharp microstructures 3, microbubbles 4 are generated due to surface tension. The angle of inclination α of the sharp microstructure 3 in the flow direction is 15 °, and the width D of the sharp microstructure 3 is 3/5 of the microchannel width D; the liquid inlets 5 are formed in a U shape. Two piezoelectric ceramic transducers are adopted, the linear distance between the transducers and the micro-channel 2 is 1.5cm, and the working frequency is 100 kHz.
Example 11:
example 7 is essentially the same as the device system of example 1, except that: polycarbonate (PC) formed into a corrugated microchannel 2 with a characteristic dimension of 0.5 mm.
Example 12:
example 7 is essentially the same as the device system of example 1, except that: the Polycarbonate (PC) forms an annular micro-channel 2 with the characteristic dimension of 0.5mm, and the inner wall of the micro-channel 2 is provided with a protruding cross section of any arc-shaped sharp microstructure 3.
As shown in fig. 3, which is the case of the straight microchannel acoustic microreactor in the embodiment 1 under the condition of no fluid, and fig. 4, which is the case of the straight microchannel acoustic microreactor under the condition of fluid, micro-bubbles are formed, the solution a and the solution B are injected into the microchannel 2 through the Y-shaped liquid inlet 5, and due to the action of surface tension, the gas in the microchannel 2 is retained in the space formed by the sharp microstructure 3 and the inner wall of the microchannel 2 to form the micro-bubbles 4. Under the soundless field condition, as shown in fig. 5, the solution a and the solution B are in laminar flow state in the microchannel, and no obvious mixing effect exists. When driven by a signal generator and a signal amplifier to generate an acoustic field, as shown in fig. 6, instantaneous mixing of the a solution and the B solution can be achieved in the microchannel.
Fig. 7 shows the arc-shaped microchannel acoustic microreactor in a non-fluid condition, and fig. 8 shows the arc-shaped microchannel acoustic microreactor in a fluid condition in which microbubbles are formed, and microbubbles 4 are formed after a liquid flows through the sharp microstructures 3. Under the soundless field condition, as shown in fig. 9, the solution a and the solution B are in laminar flow state in the microchannel, and no obvious mixing effect exists. Under the condition of the sound field, as shown in FIG. 10, the solution A and the solution B can be instantaneously mixed in the micro-channel.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (8)
1. A special micro-reaction channel structure is characterized by comprising a substrate (1), wherein a micro-channel (2) with the characteristic dimension of 0.05 mm-2 mm is arranged on the substrate (1), one end of the micro-channel (2) is provided with a liquid inlet (5), the other end of the micro-channel is provided with a liquid outlet (6), and the inner wall of the micro-channel is provided with a sharp micro-structure (3) inclined along the flowing direction of mixed liquid;
the inclination angle of the sharp microstructure (3) and the liquid flowing direction is 5-85 degrees;
the longitudinal section of the sharp microstructure (3) is triangular, parallelogram, semiellipse or ellipse;
the sharp microstructures (3) are distributed on one side of the inner wall of the microchannel (2), are arranged on two sides of the microchannel wall (2) in a crossed mode or are arranged on two sides of the inner wall of the microchannel (2) oppositely.
2. The special micro-reaction channel structure as claimed in claim 1, wherein the width of the sharp microstructure (3) is 1/5-4/5 of the width of the micro-channel (2).
3. A special micro-reaction channel structure according to claim 1, characterized in that the shape of the micro-channel (2) is straight, curved, S-shaped, wavy, circular or spiral.
4. The special micro-reaction channel structure according to claim 1, characterized in that the micro-channels (2) and the sharp microstructures (3) are made of polydimethylsiloxane, polymethylmethacrylate, polystyrene, polycarbonate or polyvinylchloride.
5. A special micro-reaction-channel structure according to claim 1, characterized in that the substrate (1) is made of a glass or silicon sheet.
6. The special micro-reaction channel structure as claimed in claim 1, wherein the number of the inlets (5) is greater than two, and the adjacent inlets (5) are Y-shaped, T-shaped or U-shaped.
7. An acoustic microreactor comprising a special micro-reaction channel structure according to any of claims 1 to 6, wherein one or more piezoelectric ceramic transducers are used as active strengthening modules, said piezoelectric ceramic transducers are located at a linear distance of not more than 3cm from the microchannel (2) and are on the same substrate (1); the working frequency of the piezoelectric ceramic transducer is 2 kHz-2 MHz.
8. A liquid mixing enhancement system comprising an acoustic microreactor as claimed in claim 7.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115193352A (en) * | 2022-02-22 | 2022-10-18 | 天津大学 | Efficient micro mixer for nanoparticle synthesis based on inertia and acoustic wave effects |
| WO2023164955A1 (en) * | 2022-03-01 | 2023-09-07 | 中国科学院大连化学物理研究所 | Ultrasonic micromixer having millisecond mixing performance |
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| US20150017023A1 (en) * | 2013-07-11 | 2015-01-15 | The Penn State Research Foundation | Apparatuses and methods for modulating fluids using acoustically oscillating solid structures |
| CN104923468A (en) * | 2014-03-19 | 2015-09-23 | 中国科学院大连化学物理研究所 | Large power ultrasonic wave micro-reactor |
| CN113203302A (en) * | 2020-12-03 | 2021-08-03 | 山东大学 | Micro-channel heat exchange device for enhancing mixing of two micro-fluids |
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2021
- 2021-11-19 CN CN202111401416.0A patent/CN113893797A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150017023A1 (en) * | 2013-07-11 | 2015-01-15 | The Penn State Research Foundation | Apparatuses and methods for modulating fluids using acoustically oscillating solid structures |
| CN104923468A (en) * | 2014-03-19 | 2015-09-23 | 中国科学院大连化学物理研究所 | Large power ultrasonic wave micro-reactor |
| CN113203302A (en) * | 2020-12-03 | 2021-08-03 | 山东大学 | Micro-channel heat exchange device for enhancing mixing of two micro-fluids |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115193352A (en) * | 2022-02-22 | 2022-10-18 | 天津大学 | Efficient micro mixer for nanoparticle synthesis based on inertia and acoustic wave effects |
| CN115193352B (en) * | 2022-02-22 | 2024-03-26 | 天津大学 | Efficient micromixer for nanoparticle synthesis based on inertia and acoustic wave effects |
| WO2023164955A1 (en) * | 2022-03-01 | 2023-09-07 | 中国科学院大连化学物理研究所 | Ultrasonic micromixer having millisecond mixing performance |
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