CN113884468B - Optical fiber humidity sensor based on metasurface and manufacturing method thereof - Google Patents
Optical fiber humidity sensor based on metasurface and manufacturing method thereof Download PDFInfo
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- CN113884468B CN113884468B CN202111159334.XA CN202111159334A CN113884468B CN 113884468 B CN113884468 B CN 113884468B CN 202111159334 A CN202111159334 A CN 202111159334A CN 113884468 B CN113884468 B CN 113884468B
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 85
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000000835 fiber Substances 0.000 claims abstract description 34
- 239000000126 substance Substances 0.000 claims abstract description 31
- 239000000853 adhesive Substances 0.000 claims abstract description 30
- 230000001070 adhesive effect Effects 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims abstract description 20
- 230000035945 sensitivity Effects 0.000 claims abstract description 16
- 206010070834 Sensitisation Diseases 0.000 claims abstract description 12
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 230000008313 sensitization Effects 0.000 claims abstract description 11
- 238000012544 monitoring process Methods 0.000 claims abstract description 7
- 239000002086 nanomaterial Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 16
- 238000001228 spectrum Methods 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000009471 action Effects 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 6
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- 238000001704 evaporation Methods 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000010953 base metal Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 238000009499 grossing Methods 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000000985 reflectance spectrum Methods 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
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- 238000005260 corrosion Methods 0.000 description 1
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- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
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- 238000012625 in-situ measurement Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B11/00—Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses an optical fiber humidity sensor based on a metasurface and a manufacturing method thereof, belonging to the technical field of sensing and measuring application. The optical fiber sensor disclosed by the invention mainly comprises an optical fiber, an adhesive, a metasurface and a sensitization substance. The fiber end face and the metasurface are secured together by an adhesive. The sensitizers are coated on the metasurfaces. The metasurface is composed of an array of nanopores of different sizes and different azimuth angles having a rectangular cross section. The optical fiber sensor adopts a metal micro-nano structure with different rotation angles to generate a plurality of resonance peaks with different refractive index sensitivities, and the measurement of a plurality of sensing parameters can be realized by monitoring the change of the characteristic parameters of the resonance peaks. The manufacturing method of the invention is beneficial to reducing the manufacturing cost and the manufacturing period of the fiber-end optical fiber sensor. The invention has the advantages of small effective sensing area, multiple resonance peaks and high robustness, and is applied to the fields of industry, agriculture, medical treatment, chemical biology and the like.
Description
Technical Field
The invention relates to an optical fiber humidity sensor based on a metasurface and a manufacturing method thereof, belonging to the field of humidity sensors.
Background
Sustained electrochemical damage caused by changes in external humidity conditions is an important cause of deterioration in the structural reliability of large buildings. The method has important significance in continuously monitoring the external humidity environment and timely repairing the environment before the performance of the environment is deteriorated. There is therefore a strong need for a real-time wetness monitoring tool that is compact in size and does not affect the mechanical properties of the metal structure itself.
The optical fiber sensor has the advantages of durability, electromagnetic interference resistance, corrosion resistance, small volume, quick response and the like, and is very suitable for in-situ measurement. In recent years, various fiber humidity Sensors have been proposed by researchers, such as those based on grating structures (fiber bragg gratings (Optics Express,24 (2016) 1253-1260.Optics express,23 (2015) 15624-15634.Optics express,24 (2016) 1206-1213)) and long period fiber gratings (Sensors and Actuators B Chemical,227 (2016) 135-141.IEEE Photonics Technology Letters,19 (2007) 880-882.Measurement Science and Technology,20 (2009) 034002)), interferometer structures (fabry-perot interferometers (IEEE Photonics Technology Letters,27 (2015) 1495-1498.Sensors&Actuators B Chemical,196 (2014) 99-105)), sagnac interferometers (Sensors and Actuators B: chemical,231 (2016) 696-700.Microwave&Optical Technology Letters,55 (2013) 2305-2307), mach-Zehnder interferometers (Optics Express,27 (2019) 35609-35620.IEEE Photonics Technology Letters,31 (2019) 393-396) and Michelson interferometers (Journal of Lightwave Technology,10 (2019) 2452-2457.Sensors&Actuators B Chemical,223 (2016) 324-332), based on geometric deformations (mechanical polishing (Sensors and Actuators B: chemical,284 (2019) 623-627.Sensors and Actuators B:Chemical,255 (2018) 57-69), etched optical fibers (Sensors, 17 (2017) 2129.Sensors&Actuators B Chemical,233 (2016) 7-16.Optics Express,28 (2020) 24682-24692), U-bend optical fibers (Optics & Laser Technology,43 (2011) 1301-1305.Sensors and Actuators B:Chemical,160 (2011) 1340-1345), tapered optical fibers (IEEE Photonics Technology Letters), 25 (2013) 2201-2204.IEEE Sensors Journal,3 (2017) 644-649) and photonic crystal fibers (Sensors & Actuators B Chemical,242 (2016) 1065-1072.Optics express,21 (2013) 6313-6320). However, most optical fiber humidity sensors are coated with a humidity-sensitive material on the side of the optical fiber, or the humidity-sensitive material is used as a filling material for the resonator, and the effective sensing volume thereof is large, which becomes an obstacle to further miniaturization of the optical fiber humidity sensor. Furthermore, fiber optic sensors have been plagued by the limited number of measured sensing parameters resulting from cross-sensitivity. Multimodal technology is an effective approach to addressing cross-sensitivity, however existing fiber optic sensors have a limited number of effective resonant peaks, and therefore there is an urgent need for a fiber optic humidity sensor with a small effective sensing area, multiple resonant peaks.
Disclosure of Invention
In order to solve the problems in the conventional optical fiber humidity sensor, the invention aims to provide an optical fiber humidity sensor based on a metasurface and a manufacturing method thereof, and the optical fiber humidity sensor based on the metasurface realizes humidity measurement and has the advantages of small effective sensing area, multiple resonance peaks and high robustness.
The aim of the invention is achieved by the following technical scheme.
The fiber end metasurface-based optical fiber humidity sensor comprises an optical fiber, an adhesive, a metasurface and a humidity sensitization substance. The adhesive is used for bonding the optical fiber and the metasurface together; the humidity-sensitized substance is used for improving the humidity sensitivity of the optical fiber sensor.
Preparing the metasurface on a substrate; the end face of the optical fiber is smoothed for adhesive attachment. The optical fiber and the metasurface are filled with an adhesive and the center of the fiber core and the center of the metasurface are aligned. And curing the adhesive, and improving the bonding effect between the optical fiber and the metasurface by the adhesive to ensure the stripping effect of the metasurface from the substrate. And coating a humidity-sensitive substance on the end face of the optical fiber attached with the metasurface.
The metasurface generates surface plasmons under the action of an incident light field, and the resonance light field interacts with a humidity-sensitized substance adsorbed on the metasurface to change the resonance characteristic of the light field, so that the spectrum resonance peak of the fiber-end metasurface-based optical fiber humidity sensor is changed. The primary region of action of the metasurface optical field is in the region of overlap of the fiber core and metasurface, which significantly reduces the sensing area due to the small fiber core diameter.
The metasurface is composed of a periodic array of holes or rods, and the number of spectral resonance peaks of the fiber optic sensor is controlled by controlling the geometry of the holes or rods of the array. The optical field has a plurality of resonance modes on the metasurface, the optical field has different field distributions at different positions of the metasurface, and resonance peaks in different resonance modes have different responses to the refractive index of the sensitization material. The change in external humidity will cause a change in the characteristic parameters of the moisture-sensitive substance, including refractive index and thickness. The optical fiber sensor acquires the change of sensing parameters by detecting different resonance peaks of the spectrum in the sensing measurement process. And establishing the relationship among the outside humidity change, the refractive index of the humidity-sensitized substance and the central wavelength of the spectrum resonance peak. And a plurality of resonance peaks with different refractive index sensitivities are generated by adopting metal micro-nano structures with different rotation angles, and the humidity is measured by monitoring the center wavelength of the resonance peaks.
The geometric parameters include length, width, period and rotation angle.
In order to solve the common cross-sensitivity problem in the optical fiber sensor, preferably, the center wavelengths of a plurality of resonance peaks with different sensitivities in the optical spectrum of the optical fiber sensor are monitored, a multi-element primary equation of the center wavelengths of the plurality of resonance peaks and a plurality of sensing parameters is constructed according to a multi-peak method, the multi-parameter measurement is realized by solving the multi-element primary equation, and the cross-sensitivity problem between measured parameters can be avoided.
The multiple parameters include humidity, temperature.
In order to enhance the resonance peak spectral contrast, it is preferable that the core center of the optical fiber and the metasurface center coincide, the metasurface area being larger than the area of the optical fiber core and completely covering the optical fiber core.
In order to prevent wrinkling of the metasurface, it is preferable that the adhesive has the characteristics of higher viscosity and lower coefficient of thermal expansion.
In order to ensure easy peeling between the metal film and the substrate in the latter stage, it is preferable that there is no adhesion layer between the metal film and the substrate.
The invention also discloses a method for manufacturing the optical fiber humidity sensor with the fiber-end metasurface, which is used for manufacturing the optical fiber humidity sensor with the fiber-end metasurface and comprises the following steps:
step one: the substrate is cleaned and a metal film is prepared on the substrate surface by using a film plating machine.
Step two: and preparing a micro-nano structure on the base metal film to form a metasurface.
Step three: the optical fiber and the metasurface are filled with an adhesive and the center of the fiber core and the center of the metasurface are aligned. And curing the adhesive, and improving the bonding effect between the optical fiber and the metasurface by the adhesive to ensure the stripping effect of the metasurface from the substrate.
Step four: a humidity-enhancing substance is coated on the metasurface.
For better spectral quality in fiber optic sensors, it is preferable that the substrate be a double-sided polished silica substrate. The metal film is a gold film. The preparation method of the gold film adopts a thermal resistance evaporation coating mode. The thickness of the metal film is 50nm-100nm. The metasurface pattern is a rectangular array of nanopores. The length of the rectangular nano-pore is 500-700 nm, the width is 150-250 nm, and the lattice period of the pore array is 500-1000 nm.
A periodic rectangular nanopore array with different rotation angles is used to generate resonance peaks with different sensitivities. The rotation angle of a single rectangular nanopore is expressed as
Where r is the distance between the rectangular nanopore and the center of the metasurface. K and A determine coefficients of the degree of change of the rotation angle.
The beneficial effects are that:
1. the invention discloses an optical fiber humidity sensor based on a metasurface and a manufacturing method thereof, wherein the quantity of spectrum resonance peaks of the optical fiber sensor is controlled by geometric parameters of the metasurface. The optical field has a plurality of resonance modes on the metasurface, the optical field has different field distributions at different positions of the metasurface, and resonance peaks in different resonance modes have different responses to the refractive index of the sensitization material. The change in external humidity will cause a change in the characteristic parameters of the moisture-sensitive substance, including refractive index and thickness. The optical fiber sensor acquires the change of sensing parameters by detecting different resonance peaks of the spectrum in the sensing measurement process. And establishing the relationship among the outside humidity change, the refractive index of the humidity-sensitized substance and the central wavelength of the spectrum resonance peak. The humidity measurement is realized by adopting the metal micro-nano structure with different rotation angles to generate a plurality of resonance peaks with different refractive index sensitivities and monitoring the center wavelength of the resonance peaks.
2. According to the optical fiber humidity sensor based on the metasurface and the manufacturing method thereof disclosed by the invention, the metasurface generates surface plasmons under the action of an incident light field, and a resonance light field interacts with a humidity substance adsorbed on the metasurface to change the resonance characteristic of the light field, so that the spectrum resonance peak of the optical fiber humidity sensor based on the fiber end metasurface is changed. The primary region of action of the metasurface optical field is in the region of overlap of the fiber core and metasurface, which significantly reduces the sensing area due to the small fiber core diameter.
3. According to the optical fiber humidity sensor based on the metasurface and the manufacturing method thereof, disclosed by the invention, the center wavelengths of a plurality of resonance peaks with different sensitivities in a spectrum in the optical fiber sensor are monitored, a multi-element primary equation of the center wavelengths of the resonance peaks and a plurality of sensing parameters is constructed according to a multimodal method, the multi-parameter measurement is realized by solving the multi-element primary equation, and the cross sensitivity problem among measured parameters can be avoided.
Drawings
Fig. 1 illustrates a metasurface-based fiber optic humidity sensor of the present invention.
FIG. 2 is a schematic diagram of the preparation process of the present invention.
FIG. 3 is a schematic structural diagram of a metasurface in accordance with the present invention.
Fig. 4 is a reflectance spectrum of the fiber optic humidity sensor.
FIG. 5 shows the variation of center wavelength of a plurality of resonance peaks with humidity.
Wherein: 1-optical fiber, 2-adhesive, 3-metasurface, 4-humidity sensitization material, 1-optical fiber core and 3-1-metal film.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and examples. The technical problems and the beneficial effects solved by the technical proposal of the invention are also described, and the described embodiment is only used for facilitating the understanding of the invention and does not have any limiting effect.
As shown in fig. 2, the preparation method of the optical fiber humidity sensor based on the fiber end metasurface disclosed in the embodiment is specifically implemented as follows:
step one: firstly, cleaning a substrate, and preparing a metal film 3-1 on one surface of the substrate by using a film plating machine, wherein the metal film can be usually prepared by adopting a thermal resistance evaporation film plating mode, an electron beam evaporation film plating mode, an ion beam evaporation film plating mode, a magnetic sputtering film plating mode and the like.
In order to ensure that the metal film 3-1 and the substrate are easily peeled off later, no adhesion layer is arranged between the metal film 3-1 and the substrate. The substrate is a double-sided polished silicon dioxide substrate. The metal film 3-1 is a gold film. The preparation method of the metal film 3-1 adopts a thermal resistance evaporation coating mode. The thickness of the metal film 3-1 is 100nm.
Step two: micro-nano structures are then fabricated on the metal film 3-1 using a suitable metasurface 3 processing method, typically using either a focused ion beam etching method or an electron beam lithography method. To solve the cross-sensitivity problem common in fiber optic sensors, cross-sensitivity is addressed by monitoring the center wavelength of multiple resonance peaks in the optical spectrum of the fiber optic sensor with different sensitivities.
In order to prepare the metasurface 3 with good quality and a proper sensing spectrum, the processing method of the metasurface 3 is an electron beam lithography method. The metasurface 3 pattern is a rectangular array of nanopores. The length of the rectangular nano-holes is 610nm, the width is 210nm, and the lattice period of the hole array is 750nm.
A periodic rectangular nanopore array with different rotation angles is used to generate resonance peaks with different sensitivities. The rotation angle of a single rectangular nanopore is expressed as
Wherein r is a rectangular nanometerDistance between the hole and the center of the metasurface. K and A determine coefficients of the degree of change of the rotation angle. The values of K and A are 28.6 μm respectively -1 and 150μm。
The schematic structure of the metasurface 3 is shown in fig. 3, and the rotation angle of the rectangular nanopore is the same at the same distance between the centers of the nanopore and the metasurface.
Step three: the optical fiber 1 is cut or ground, so that the whole end face of the optical fiber 1 is smooth and burr-free, and a little adhesive 2 is dropped on the end face of the optical fiber 1. To prevent the adhesive 2 from impregnating the nanopores of the metasurface 3 during bonding with the metasurface 3, the adhesive 2 needs to be pre-cured to increase viscosity. The center of the optical fiber 1 is aligned with the center of the metasurface 3 and brought into close contact by the adhesive 2. The optical fiber 1 is firmly bonded with the metasurface 3 by adopting a proper curing mode and curing time. The metasurface 3 is then peeled off the substrate.
In order to ensure a suitable overlap area of the optical fiber 1 and the metasurface 3, the optical fiber 1 is a multimode fiber having a large mode field diameter, and the core/cladding diameters are 50um/125um, respectively.
In order to ensure that the adhesive 2 has a better adhesive effect, the adhesive 2 is a thermosetting adhesive with smaller shrinkage and higher light transmittance, is in a gel-like liquid state in a normal state, is cured into a solid after being subjected to high temperature, and is convenient to use. If cured at normal temperature, the curing time is prolonged compared to high temperature curing. The pre-curing treatment is normal temperature curing for 12 hours. The curing mode is normal temperature curing. The suitable curing time is 48 hours.
Step four: the humidity-sensitizing substance 4 is prepared by a suitable coating method on the fiber end where the metasurface 3 is prepared. Humidity-sensitive films are generally prepared by dip coating, spin coating, or the like. The preparation of the fiber humidity sensor based on the fiber end metasurface is completed.
In order to ensure a good coating effect, the suitable coating method is dip coating. The humidity-sensitive material is gelatin.
To demonstrate the performance of the prepared fiber optic sensor, the fiber optic sensor reflectance spectrum is shown in fig. 4. As can be seen from fig. 4, the reflection spectrum of the humidity sensor based on the fiber-end metasurface 3 proposed by the present invention has a plurality of resonance peaks.
The change of the center wavelength of the above-mentioned plural resonance peaks/valleys with the outside humidity is shown in fig. 5. As can be seen from fig. 5, as humidity increases, a portion of the resonance peak is linear and monotonic over a specific humidity range. For cross-sensitivity issues, reference may be made to multi-device methods used in literature (IEEE Sensors Journal,18 (2018) 8012-6.) and multimodal methods used in literature (Optics Express,28 (2020) 6084-94.Optics&Laser Technology,120 (2019) 105754.). The multi-device method and the multimodal method are well known to those skilled in the art and thus do not fall within the scope of the present invention and are not specifically discussed herein.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (10)
1. Optical fiber humidity sensor based on fiber end metasurface, its characterized in that: comprises an optical fiber (1), an adhesive (2), a metasurface (3) and a humidity sensitization substance (4); the adhesive (2) is used for bonding the optical fiber (1) and the metasurface (3) together; the humidity sensitization substance (4) is used for improving the humidity sensitivity of the optical fiber sensor;
-preparing the metasurface (3) on a substrate; smoothing the end face of the optical fiber (1) so as to attach the adhesive (2); filling an adhesive (2) between the optical fiber (1) and the metasurface (3), and aligning the center of the optical fiber core (1-1) with the center of the metasurface (3); curing the adhesive (2), and improving the bonding effect between the optical fiber (1) and the metasurface (3) through the adhesive to ensure the stripping effect of the metasurface (3) from the substrate; coating a humidity-sensitization substance (4) on the end face of the optical fiber (1) attached with the metasurface (3);
the metasurface (3) generates surface plasmons under the action of an incident light field, and the resonance light field interacts with the humidity-sensitized substance (4) adsorbed on the metasurface (3) to change the resonance characteristic of the light field, so that the spectrum resonance peak of the fiber-end metasurface (3) -based optical fiber humidity sensor is changed; the main action area of the optical field of the metasurface (3) is in the overlapped area of the optical fiber core (1-1) and the metasurface, and the sensing area is obviously reduced due to the small diameter of the optical fiber core (1-1);
the metasurface (3) consists of a periodic hole array or a rod array, and the number of spectral resonance peaks of the optical fiber sensor is controlled by controlling the geometric parameters of holes or rods of the array; the optical field has a plurality of resonance modes on the metasurface (3), the optical field has different field distributions at different positions of the metasurface (3), and resonance peaks under different resonance modes have different responses to the refractive index of the sensitization substance (4); the change of the external humidity can cause the characteristic parameters of the sensitization substance to change, wherein the characteristic parameters of the humidity sensitization substance (4) comprise refractive index and thickness; the optical fiber sensor acquires the change of sensing parameters by detecting different resonance peaks of the spectrum in the sensing measurement process; establishing the relation of the outside humidity change, the refractive index of the humidity sensitization substance (4) and the central wavelength of the spectrum resonance peak; the humidity measurement is realized by adopting the metal micro-nano structure with different rotation angles to generate a plurality of resonance peaks with different refractive index sensitivities and monitoring the center wavelength of the resonance peaks.
2. The fiber-end metasurface-based optical fiber humidity sensor of claim 1, wherein: the geometric parameters include length, width, period and rotation angle.
3. The fiber-end metasurface-based optical fiber humidity sensor of claim 2, wherein: in order to solve the common cross sensitivity problem in the optical fiber sensor, the center wavelengths of a plurality of resonance peaks with different sensitivities in the spectrum of the optical fiber sensor are monitored, a multi-element primary equation of the center wavelengths of the resonance peaks and a plurality of sensing parameters is constructed according to a multimodal method, the multi-parameter measurement is realized by solving the multi-element primary equation, and the cross sensitivity problem among measurement parameters can be avoided.
4. The fiber-end metasurface-based optical fiber humidity sensor of claim 3, wherein: the multiple parameters include humidity, temperature.
5. The fiber-end metasurface-based optical fiber humidity sensor of claim 4, wherein: in order to enhance the resonance peak spectral contrast, the center of the core (1-1) of the optical fiber (1) and the center of the metasurface (3) coincide, the metasurface (3) has an area larger than that of the optical fiber core (1-1) and completely covers the optical fiber core (1-1).
6. The fiber-end metasurface-based fiber humidity sensor of claim 5, wherein: in order to prevent wrinkling of the metasurface, the adhesive (2) has the characteristics of a higher viscosity and a lower coefficient of thermal expansion.
7. The fiber-end metasurface-based fiber humidity sensor of claim 6, wherein: in order to ensure that the metal film and the substrate are conveniently peeled off later, an adhesion layer is not arranged between the metal film and the substrate.
8. A method of making a fiber-end metasurface optical fiber humidity sensor for making a fiber-end metasurface-based optical fiber humidity sensor according to claim 1, 2, 3, 4, 5, 6 or 7, characterized by: comprises the following steps of the method,
step one: cleaning a substrate, and preparing a metal film on the surface of the substrate by using a film plating machine;
step two: preparing a micro-nano structure on a base metal film (3-1) to form a metasurface (3);
step three: filling an adhesive (2) between the optical fiber (1) and the metasurface (3), and aligning the center of the optical fiber core (1-1) with the center of the metasurface (3); curing the adhesive (2), and improving the bonding effect between the optical fiber and the metasurface (3) through the adhesive (2) to ensure the stripping effect of the metasurface (3) from the substrate;
step four: a humidity-sensitizing substance (4) is coated on the metasurface (3).
9. The method of making an optical fiber humidity sensor for fiber end metasurfaces of claim 8, wherein: in order to have better spectral quality in the optical fiber sensor, the substrate is a double-sided polished silicon dioxide substrate; the metal film is a gold film; the preparation method of the gold film adopts a thermal resistance evaporation coating mode; the thickness of the metal film is 50nm-100nm; the pattern of the metasurface (3) is a rectangular nano-pore array; the length of the rectangular nano-pore is 500-700 nm, the width is 150-250 nm, and the lattice period of the pore array is 500-1000 nm.
10. The method of making an optical fiber humidity sensor for fiber end metasurfaces of claim 9, wherein: using a periodic rectangular nanopore array with different rotation angles to generate resonance peaks with different sensitivities; the rotation angle of a single rectangular nanopore is expressed as
Wherein r is the distance between the rectangular nanopore and the center of the metasurface; k and A determine coefficients of the degree of change of the rotation angle.
Priority Applications (1)
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| CN202111159334.XA CN113884468B (en) | 2021-09-30 | 2021-09-30 | Optical fiber humidity sensor based on metasurface and manufacturing method thereof |
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