CN113884082A - Double-shaft MEMS gyro component and calibration compensation method thereof - Google Patents
Double-shaft MEMS gyro component and calibration compensation method thereof Download PDFInfo
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- CN113884082A CN113884082A CN202111321173.XA CN202111321173A CN113884082A CN 113884082 A CN113884082 A CN 113884082A CN 202111321173 A CN202111321173 A CN 202111321173A CN 113884082 A CN113884082 A CN 113884082A
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000012545 processing Methods 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 8
- 238000013461 design Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 5
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 238000005457 optimization Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 10
- 238000012937 correction Methods 0.000 description 3
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- 230000017525 heat dissipation Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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Abstract
The invention discloses a double-shaft MEMS gyro component and a calibration compensation method thereof, wherein the component comprises: the mounting structure comprises a base, wherein a mounting cavity is arranged in the base, and a first mounting boss and a second mounting boss are arranged in the mounting cavity; the MEMS gyroscope control circuit board is positioned in the mounting cavity and arranged on the first mounting boss; and the cover plate is positioned at the top of the mounting cavity and arranged on the second mounting boss. Through reasonable hardware design, software calibration, compensation and structural layout optimization design, the measurement precision and the environmental adaptability of the product are improved, the size is reduced, the weight is reduced, and the like.
Description
Technical Field
The invention relates to the field of MEMS (micro-electromechanical systems) gyro component application technology and the like, in particular to a double-shaft MEMS gyro component and a calibration compensation method thereof.
Background
Along with the miniaturization development of weapon equipment in recent years, higher requirements are put forward on angular rate sensors in many fields, and the characteristics of high measurement precision, strong environment adaptability, small size, light weight and the like are required. At present, the MEMS gyroscope is in a high-speed development stage, the application technology of the MEMS gyroscope is mature day by day, the market prospect for developing a micro-miniature double-shaft MEMS gyroscope component is wide, and a mature technical scheme is not provided at present.
Disclosure of Invention
In order to solve the problems, the invention provides a double-shaft MEMS gyro component and a calibration compensation method thereof, which improve the measurement precision and environmental adaptability of a product through reasonable hardware design, software calibration, compensation and optimized design of structural layout, reduce the volume, lighten the weight and the like.
The technical scheme adopted by the invention is as follows: a dual-axis MEMS gyroscope assembly comprising:
the mounting structure comprises a base, wherein a mounting cavity is arranged in the base, and a first mounting boss and a second mounting boss are arranged in the mounting cavity;
the MEMS gyroscope control circuit board is positioned in the mounting cavity and arranged on the first mounting boss;
and the cover plate is positioned at the top of the mounting cavity and arranged on the second mounting boss.
As an optional technical scheme, a signal processor, a power supply circuit, a gyro signal output circuit and an acceleration signal circuit are arranged on the MEMS gyro control circuit board, wherein a signal output end of the gyro circuit is connected with a signal input end of the gyro signal output circuit, a signal output end of the gyro signal output circuit is connected with the signal processor, a signal output end of the acceleration signal circuit is connected with a signal input end of the signal processor, and the power supply circuit is connected with the signal processor.
As an optional technical scheme, the chip model of the signal processor is STM32F103VBT 6.
As an optional technical solution, the MEMS gyro control circuit board is further provided with a connection terminal connected with the signal processor.
As an optional technical solution, a gyro calibration program is embedded in the signal processor, and the gyro calibration program includes a receiving module, a zero compensation module, a temperature acquisition module, a temperature compensation module, an installation error compensation processing module, and a self-checking module.
The invention also discloses a calibration compensation method based on the double-shaft MEMS gyro component, which comprises the following steps:
initializing a system;
checking whether the time flag bit is set or not, if not, re-initializing, and if so, entering the next step;
receiving gyro rate data and clearing a time zone bit;
zero compensation is carried out through a zero compensation module;
acquiring temperature data through a temperature acquisition module, and performing temperature compensation through a temperature compensation module;
carrying out installation error compensation processing;
checking whether the self-checking mark is set or not, if not, re-checking whether the time mark is set or not and repeating the steps, and if so, entering the next step;
clearing the self-checking flag bit through the self-checking module, then rechecking whether the time flag bit is set and repeating the steps.
The invention has the beneficial effects that: the double-shaft MEMS gyro component has the advantages of simple structure, easiness in processing and convenience in assembly; the measurement accuracy of the MEMS gyroscope can be improved through calibration compensation, the vibration resistance and the shock resistance of the whole product are improved through reasonable structural design, the product has the characteristics of convenience in maintenance and excellent heat dissipation performance, and the size of the MEMS gyroscope component can be reduced.
Drawings
Fig. 1 is a schematic structural diagram of a biaxial MEMS gyroscope assembly.
Fig. 2 is a schematic view of fig. 1 with the cover plate removed.
Fig. 3 is a schematic diagram of the MEMS gyro control circuit board taken out of fig. 2.
Fig. 4 is a specific circuit configuration diagram of the signal processor.
Fig. 5 is a specific circuit configuration diagram of the power supply circuit.
Fig. 6 is a specific circuit configuration diagram of the gyro circuit.
Fig. 7 is a specific circuit configuration diagram of the gyro signal output circuit.
Fig. 8 is a specific circuit configuration diagram of the acceleration signal circuit.
Fig. 9 is a specific circuit configuration diagram of the connection terminal.
FIG. 10 is a calibration compensation data processing procedure.
FIG. 11 is a flow chart diagram of a calibration compensation method.
Fig. 12 is an interruption process diagram.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention is further described with reference to the following figures and specific embodiments.
Examples
As shown in fig. 1, 2 and 3, a dual-axis MEMS gyroscope assembly includes:
the mounting structure comprises a base 1, wherein a mounting cavity is arranged in the base 1, and a first mounting boss 2 and a second mounting boss 3 are arranged in the mounting cavity;
the MEMS gyroscope control circuit board 4 is positioned in the mounting cavity and arranged on the first mounting boss 2;
and the cover plate 5 is positioned at the top of the mounting cavity and arranged on the second mounting boss 3. Wherein, MEMS top control circuit board 4 passes through screw 6 to be installed on first installation boss 2. The first mounting boss 2 not only provides support for the MEMS gyro control circuit board 4, but also limits the MEMS gyro control circuit board 4; the second mounting boss 2 not only provides support for the cover plate 5, but also limits the cover plate 5. In the embodiment, through reasonable structural design, the vibration resistance and the shock resistance of the whole product are improved, the product has the characteristics of convenience in maintenance and excellent heat dissipation performance, and the size of the MEMS gyro component can be reduced.
As an optional implementation manner, a signal processor, a power supply circuit, a gyro signal output circuit and an acceleration signal circuit are arranged on the MEMS gyro control circuit board, wherein a signal output end of the gyro circuit is connected with a signal input end of the gyro signal output circuit, a signal output end of the gyro signal output circuit is connected with the signal processor, a signal output end of the acceleration signal circuit is connected with a signal input end of the signal processor, and the power supply circuit is connected with the signal processor. The chip model of the signal processor is STM32F103VBT 6. And the MEMS gyroscope control circuit board is also provided with a wiring terminal connected with the signal processor.
The specific circuit structure of the signal processor is shown in fig. 4, the specific circuit structure of the power supply circuit is shown in fig. 5, the specific circuit structure of the gyro circuit is shown in fig. 6, the specific circuit structure of the gyro signal output circuit is shown in fig. 7, the specific circuit structure of the acceleration signal circuit is shown in fig. 8, and the specific circuit structure of the connection terminal is shown in fig. 9. In this embodiment, the ARM chip STM32F103VBT6 is used as a core control chip to perform subsequent processing on the output signal of the MEMS gyroscope, thereby realizing the form of outputting digital quantity externally and realizing the selectivity of the output format of the product.
As an optional implementation manner, a gyro calibration program is embedded in the signal processor, and the gyro calibration program includes a receiving module, a zero compensation module, a temperature acquisition module, a temperature compensation module, an installation error compensation processing module, and a self-checking module. The calibration compensation formula is carried out through the modules, the specific data processing process is as shown in fig. 10, the data obtained by multiplying the gyro original data g by the addition data f and the linear acceleration correction matrix H is processed, then the temperature offset and the constant offset are carried out, then the scale factor processing is carried out, and finally the scale factor processing is carried out to be multiplied by the installation error correction matrix to obtain the final gyro output rate data r.
As shown in fig. 11, the invention further discloses a calibration compensation method based on the dual-axis MEMS gyro component, which includes the following steps:
initializing a system;
checking whether the time flag bit is set or not, if not, re-initializing, and if so, entering the next step;
receiving gyro rate data and clearing a time zone bit;
zero compensation is carried out through a zero compensation module;
acquiring temperature data through a temperature acquisition module, and performing temperature compensation through a temperature compensation module;
carrying out installation error compensation processing;
checking whether the self-checking mark is set or not, if not, re-checking whether the time mark is set or not and repeating the steps, and if so, entering the next step;
clearing the self-checking flag bit through the self-checking module, then rechecking whether the time flag bit is set and repeating the steps. The method further involves an interrupt process, and specifically, as shown in fig. 12, outputs angular rate data after the system time is updated and a dog is kicked, and terminates the interrupt. In the embodiment, the method can be used for performing zero compensation, temperature compensation, scale factor compensation and mounting error correction on the MEMS gyroscope, so that the measurement accuracy of the MEMS gyroscope is improved.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope disclosed in the present application, and all the technical solutions falling within the scope of the present invention defined by the claims fall within the scope of the present invention.
Claims (6)
1. A dual-axis MEMS gyroscope assembly, comprising:
the mounting structure comprises a base, wherein a mounting cavity is arranged in the base, and a first mounting boss and a second mounting boss are arranged in the mounting cavity;
the MEMS gyroscope control circuit board is positioned in the mounting cavity and arranged on the first mounting boss;
and the cover plate is positioned at the top of the mounting cavity and arranged on the second mounting boss.
2. The dual-axis MEMS gyroscope assembly of claim 1, wherein: the MEMS gyroscope control circuit board is provided with a signal processor, a power supply circuit, a gyroscope signal output circuit and an acceleration signal circuit, wherein the signal output end of the gyroscope circuit is connected with the signal input end of the gyroscope signal output circuit, the signal output end of the gyroscope signal output circuit is connected with the signal processor, the signal output end of the acceleration signal circuit is connected with the signal input end of the signal processor, and the power supply circuit is connected with the signal processor.
3. The dual-axis MEMS gyroscope assembly of claim 2, wherein: the chip model of the signal processor is STM32F103VBT 6.
4. The dual-axis MEMS gyroscope assembly of claim 2, wherein: and the MEMS gyroscope control circuit board is also provided with a wiring terminal connected with the signal processor.
5. The dual-axis MEMS gyroscope assembly of claim 2, wherein: the gyroscope calibration program is embedded in the signal processor and comprises a receiving module, a zero compensation module, a temperature acquisition module, a temperature compensation module, an installation error compensation processing module and a self-checking module.
6. A calibration compensation method for the dual-axis MEMS gyro component based on claim 5 is characterized by comprising the following steps:
initializing a system;
checking whether the time flag bit is set or not, if not, re-initializing, and if so, entering the next step;
receiving gyro rate data and clearing a time zone bit;
zero compensation is carried out through a zero compensation module;
acquiring temperature data through a temperature acquisition module, and performing temperature compensation through a temperature compensation module;
carrying out installation error compensation processing;
checking whether the self-checking mark is set or not, if not, re-checking whether the time mark is set or not and repeating the steps, and if so, entering the next step;
clearing the self-checking flag bit through the self-checking module, then rechecking whether the time flag bit is set and repeating the steps.
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| CN202111321173.XA CN113884082A (en) | 2021-11-09 | 2021-11-09 | Double-shaft MEMS gyro component and calibration compensation method thereof |
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| CN202111321173.XA CN113884082A (en) | 2021-11-09 | 2021-11-09 | Double-shaft MEMS gyro component and calibration compensation method thereof |
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| US20110259100A1 (en) * | 2010-04-27 | 2011-10-27 | Tsung-Lin Chen | Mems gyroscope |
| CN103196462A (en) * | 2013-02-28 | 2013-07-10 | 南京航空航天大学 | Compensation method for error calibration of MEMS gyroscope in MIMU |
| US20150204667A1 (en) * | 2010-07-02 | 2015-07-23 | Tiax Llc | Strapdown heading sensors and systems, and methods of calibrating and compensating the same |
| CN105841715A (en) * | 2016-03-18 | 2016-08-10 | 北京信息科技大学 | High-dynamic dual-axis angular-rate gyroscope, and error compensation for zero offset and scale factor |
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2021
- 2021-11-09 CN CN202111321173.XA patent/CN113884082A/en active Pending
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