CN113881928A - Graphite boat carrying control method and device, electronic equipment and storage medium - Google Patents
Graphite boat carrying control method and device, electronic equipment and storage medium Download PDFInfo
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- CN113881928A CN113881928A CN202111219628.7A CN202111219628A CN113881928A CN 113881928 A CN113881928 A CN 113881928A CN 202111219628 A CN202111219628 A CN 202111219628A CN 113881928 A CN113881928 A CN 113881928A
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- graphite boat
- boat
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The application provides a graphite boat carrying control method, a graphite boat carrying control device, electronic equipment and a storage medium, and relates to the technical field of graphite boat film coating, wherein the method comprises the following steps: when the manipulator conveys the graphite boat to a set safety position, controlling the furnace tube to return pressure in advance and opening the furnace door; controlling the mechanical arm to place the graphite boat on a boat paddle and returning to the set safe position; conveying the boat paddle to a furnace tube to carry out a graphite boat film coating processing technology; when the graphite boat coating processing technology is finished, controlling the manipulator to run to the set safety position; and controlling the manipulator to operate to a paddle position to grab the graphite boat based on the position information of the paddle, and storing the graphite boat to a preset position. Can solve the problem of capacity reduction of the current graphite boat coating process.
Description
Technical Field
The application relates to the field of graphite boat coating, in particular to a graphite boat carrying control method and device, electronic equipment and a storage medium.
Background
In the graphite boat coating link, the capacity bottleneck is always limited by the coating machine, although the process of the coating machine is continuously optimized and the speed is increased, the optimization and the improvement of the process time can cause the defects of the graphite boat coating in the graphite boat coating process due to the deficiency of the process time, and the condition that the product quality falls is caused.
In the standard operation flow of the current graphite boat coating equipment, a lot of time is wasted, so that the problem of capacity reduction of the graphite boat coating process is caused.
Disclosure of Invention
Accordingly, an object of the present invention is to provide a graphite boat transportation control method, device, electronic apparatus and storage medium, so as to solve the problem of reduced productivity of the current graphite boat coating process.
In a first aspect, an embodiment of the present application provides a graphite boat handling control method, which is applied to a graphite boat coating processing technology, and includes:
when the manipulator conveys the graphite boat to a set safety position, controlling the furnace tube to return pressure in advance and opening the furnace door;
controlling the mechanical arm to place the graphite boat on a boat paddle and returning to the set safe position;
conveying the boat paddle to a furnace tube to carry out a graphite boat film coating processing technology;
when the graphite boat coating processing technology is finished, controlling the manipulator to run to the set safety position;
and controlling the manipulator to operate to a paddle position to grab the graphite boat based on the position information of the paddle, and storing the graphite boat to a preset position.
In the implementation process, the back pressure of the furnace tube is controlled when the manipulator is conveyed to a set safety position, so that the time from the graphite boat to the boat paddle to the graphite boat to the furnace tube can be saved, the graphite boat coating process can be more continuous by controlling the furnace tube to back pressure in advance and opening the furnace door, the waiting time of the manipulator can be shortened, and the productivity of the graphite boat coating process can be improved.
Optionally, the controlling the furnace tube to return pressure in advance and open the furnace door comprises:
judging whether the pressure in the furnace tube is atmospheric pressure or not according to the pressure value of the furnace tube;
controlling a furnace door valve to open the furnace door when the pressure in the furnace pipe is atmospheric pressure;
and when the pressure in the furnace pipe is not the atmospheric pressure, starting an inflation valve, adjusting the pressure in the furnace pipe to the atmospheric pressure, and controlling the furnace door valve to open the furnace door.
In the implementation process, the waiting time of the manipulator can be shortened by opening the furnace door in advance before the manipulator reaches the furnace door to grab the graphite boat, the pressure in the furnace tube is detected by the pressure sensor and whether the pressure is atmospheric pressure is judged, and the inflation valve is started to adjust the pressure in the furnace tube to the atmospheric pressure when the pressure is not atmospheric pressure, so that the safety of the graphite boat coating process can be improved.
Optionally, the controlling the robot to move to the set safety position comprises:
controlling the robot to execute an instruction stack, the instruction stack comprising: and finishing the ongoing task or starting to operate from the original position of the manipulator so as to enable the manipulator to preferentially run to the set safety position.
In the implementation process, the manipulator is controlled by using the instruction stack mode, the manipulator can be adjusted to place the graphite boat, grab the graphite boat and move the priority of each task of the boat in the cooling area, so that the graphite boat which is processed can be taken away from the boat paddle in time, the vacant waste of the furnace tube can be avoided, and the utilization rate of the furnace tube is improved.
Optionally, before controlling the robot to move to a paddle position to grab the graphite boat based on the position information of the paddle, the method further comprises:
acquiring a signal of a limit sensor, wherein the limit sensor is arranged at the set safety position, and when the boat oar reaches the set safety position, the limit sensor is triggered and is enabled to send out the signal;
and generating a control signal based on the signal of the limit sensor, sending the control signal to the manipulator, and controlling the manipulator to grab the graphite boat.
In the implementation process, when the graphite boat is conveyed out of the furnace tube by the boat paddle after being processed, the position of the boat paddle can be accurately obtained by the limiting sensor, and the manipulator is controlled to grab the processed graphite boat and place the graphite boat in a preset position for cooling based on the position of the boat paddle, so that the conveying efficiency of the manipulator can be improved, and the coating process capacity of the graphite boat is improved.
Optionally, the storing the graphite boat to a predetermined position comprises:
and placing the processed graphite boat in the order from bottom to top.
In the implementation process, the graphite boat which is processed and completed is placed according to the sequence from bottom to top, so that the cooling efficiency of the graphite boat can be increased, the cooling speed is increased, meanwhile, the frequency of moving the boat by the mechanical arm can be reduced by placing the graphite boat according to the sequence, the mechanical arm can preferentially grab the graphite boat which is processed and completed, and the productivity of the graphite boat coating process is further improved.
Optionally, the method further comprises:
and when the manipulator is in an idle state, executing a boat moving instruction, and adjusting the placing sequence of the processed graphite boat according to the cooling time.
In the implementation process, the mechanical arm is controlled to move the graphite boat in an idle state, the graphite boat which is just processed can be preferentially grabbed, the condition that the furnace tube is not vacant and waste is caused is guaranteed, the instruction priority for grabbing the graphite boat and adjusting the graphite boat placing sequence is adjusted, and the coating process efficiency of the graphite boat can be improved.
Optionally, after the controlling the robot to operate to a paddle position to grab the graphite boat and store the graphite boat to a predetermined position based on the position information of the paddle, the method further includes:
and matching and reserving the mechanical arm when the graphite boat coating processing technology is completed within the preset time, so as to control the mechanical arm to timely grab the graphite boat when the graphite boat coating processing technology is completed.
In the implementation process, the corresponding mechanical arm is matched when the graphite boat coating processing technology is to be completed, so that the mechanical arm can timely grab the graphite boat which is processed, the time wasted when the mechanical arm grabs the graphite boat can be reduced, and the productivity of the graphite boat coating technology is improved.
In a second aspect, an embodiment of the present application provides a graphite boat handling control apparatus, including:
the furnace door control module is used for controlling the furnace tube to return to the pressure in advance and opening the furnace door when the manipulator conveys the graphite boat to a set safety position;
the placing module is used for controlling the mechanical arm to place the graphite boat on the boat paddle and return to the set safe position;
the boat paddle conveying module is used for conveying the boat paddle to the furnace tube so as to carry out a graphite boat film coating processing technology;
the manipulator operation module is used for controlling the manipulator to operate to the set safety position when the graphite boat coating processing technology is finished;
and the storage module is used for controlling the manipulator to operate to the boat paddle position to grab the graphite boat based on the position information of the boat paddle and storing the graphite boat to a preset position.
In the implementation process, the back pressure of the furnace tube is controlled when the manipulator is conveyed to a set safety position, so that the time from the graphite boat to the boat paddle to the graphite boat to the furnace tube can be saved, the graphite boat coating process can be more continuous by controlling the furnace tube to back pressure in advance and opening the furnace door, the waiting time of the manipulator can be shortened, and the productivity of the graphite boat coating process can be improved.
Optionally, the oven door control module may comprise:
and the air pressure judgment submodule is used for judging whether the pressure in the furnace tube is atmospheric pressure or not according to the pressure value of the furnace tube.
The control submodule is used for controlling the furnace door valve to open the furnace door when the pressure in the furnace pipe is atmospheric pressure; and when the pressure in the furnace pipe is not atmospheric, starting an inflation valve, adjusting the pressure in the furnace pipe to atmospheric pressure, and controlling the furnace door valve to open the furnace door.
In the implementation process, the waiting time of the manipulator can be shortened by opening the furnace door in advance before the manipulator reaches the furnace door to grab the graphite boat, the pressure in the furnace tube is detected by the pressure sensor and whether the pressure is atmospheric pressure is judged, and the inflation valve is started to adjust the pressure in the furnace tube to the atmospheric pressure when the pressure is not atmospheric pressure, so that the safety of the graphite boat coating process can be improved.
Optionally, the robot operating module may be specifically configured to:
controlling the robot to execute an instruction stack, the instruction stack comprising: and finishing the ongoing task or starting to operate from the original position of the manipulator so as to enable the manipulator to preferentially run to the set safety position.
In the implementation process, the manipulator is controlled by using the instruction stack mode, the manipulator can be adjusted to place the graphite boat, grab the graphite boat and move the priority of each task of the boat in the cooling area, so that the graphite boat which is processed can be taken away from the boat paddle in time, the vacant waste of the furnace tube can be avoided, and the utilization rate of the furnace tube is improved.
Optionally, the storage module may include:
the acquisition submodule is used for acquiring signals of a limit sensor, the limit sensor is arranged at the set safe position, and when the boat oar reaches the set safe position, the limit sensor is triggered and made to send signals.
And the signal generation submodule is used for generating a control signal based on the signal of the limit sensor and sending the control signal to the manipulator to control the manipulator to grab the graphite boat.
In the implementation process, when the graphite boat is conveyed out of the furnace tube by the boat paddle after being processed, the position of the boat paddle can be accurately obtained by the limiting sensor, and the manipulator is controlled to grab the processed graphite boat and place the graphite boat in a preset position for cooling based on the position of the boat paddle, so that the conveying efficiency of the manipulator can be improved, and the coating process capacity of the graphite boat is improved.
Alternatively, the storage module may be specifically configured to place the processed graphite boats in a bottom-up order.
In the implementation process, the graphite boat which is processed and completed is placed according to the sequence from bottom to top, so that the cooling efficiency of the graphite boat can be increased, the cooling speed is increased, meanwhile, the frequency of moving the boat by the mechanical arm can be reduced by placing the graphite boat according to the sequence, the mechanical arm can preferentially grab the graphite boat which is processed and completed, and the productivity of the graphite boat coating process is further improved.
Optionally, the storage module may be further specifically configured to execute a boat moving instruction when the robot is in an idle state, and adjust a placement order of the processed graphite boats according to the cooling time.
In the implementation process, the mechanical arm is controlled to move the graphite boat in an idle state, the graphite boat which is just processed can be preferentially grabbed, the condition that the furnace tube is not vacant and waste is caused is guaranteed, the instruction priority for grabbing the graphite boat and adjusting the graphite boat placing sequence is adjusted, and the coating process efficiency of the graphite boat can be improved.
Optionally, the graphite boat handling control device may further include an appointment module, configured to match and appointment the manipulator when the graphite boat coating process is completed within a preset time, so as to control the manipulator to grasp the graphite boat in time when the graphite boat coating process is completed.
In the implementation process, the corresponding mechanical arm is matched when the graphite boat coating processing technology is to be completed, so that the mechanical arm can timely grab the graphite boat which is processed, the time wasted when the mechanical arm grabs the graphite boat can be reduced, and the productivity of the graphite boat coating technology is improved.
In a third aspect, an embodiment of the present application further provides an electronic device, where the electronic device includes a memory and a processor, where the memory stores program instructions, and the processor executes the steps in any one of the foregoing implementation manners when reading and executing the program instructions.
In a fourth aspect, an embodiment of the present application further provides a storage medium, where the readable storage medium stores computer program instructions, and the computer program instructions are read by a processor and executed to perform the steps in any of the foregoing implementation manners.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
FIG. 1 is a schematic diagram illustrating steps of a graphite boat handling control method according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram illustrating a process for controlling a furnace door based on furnace gas pressure according to an embodiment of the present application;
fig. 3 is a schematic diagram illustrating a step of controlling a robot based on a signal of a limit sensor according to an embodiment of the present disclosure;
fig. 4 is a schematic view of a graphite boat handling control apparatus according to an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application. For example, the flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions. In addition, the functional modules in the embodiments of the present invention may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
The standard process in the current graphite boat coating process comprises the steps of grabbing and placing a graphite boat from a boat bracket to be coated to be temporarily stored in the middle through a mechanical arm, grabbing the coated boat from a paddle to a temporary storage position after the coated boat of a furnace tube comes out, and grabbing and placing the boat to be coated in the temporary storage position in the middle onto the paddle. Meanwhile, the coated boat placed in the middle for temporary storage waits according to the cooling time set by the system.
The applicant has found that the following problems exist in the above process:
the time from the graphite boat being put on the paddle to the time from the paddle actually starting to run and feeding the graphite boat to the furnace tube is wasted. The time depends on the time of the manipulator returning to the set safety position, the time of the furnace tube returning to the normal pressure and the speed of opening the furnace door.
After the graphite boat comes out of the furnace tube, the waiting time of the manipulator is wasted. Ideally, the manipulator is ready to grab the hot boat immediately after the boat is stopped to a limit position, and the furnace door is closed in the process of grabbing the hot boat.
The number of the graphite boats to be processed is too small, the number of the automatic capacity is far larger than that of the graphite boats, so that the graphite boats to be processed are detained, and the empty tubes of the furnace tubes are caused if enough graphite boats to be processed are not available; the priority level of the mechanical arm moving the boat is too high, and the prior art graphite boat on the boat paddle can not be taken out in time, so that the vacant waste of the furnace tube is caused, and the utilization rate of the furnace tube is low.
Therefore, an embodiment of the present invention provides a graphite boat transportation control method, please refer to fig. 1, where fig. 1 is a schematic diagram illustrating steps of the graphite boat transportation control method according to the embodiment of the present invention, and the method may include the following steps:
in step S11, when the manipulator transports the graphite boat to a set safe position, the furnace tube is controlled to be pressed back in advance and the furnace door is opened.
The set safety position is a transition position in the movement process of the manipulator and can be a three-dimensional coordinate point set according to the position parameter of the manipulator. The robot passes through the set safety position each time the robot picks up or transports a graphite boat.
In step S12, the robot is controlled to place the graphite boat on a boat paddle and retract to the set safe position.
The boat paddle is a transmission device of the graphite boat and is used for conveying the graphite boat to the furnace tube for coating processing.
In step S13, the paddle is transported to a furnace tube for a graphite boat coating process.
In step S14, when the graphite boat coating process is completed, the robot is controlled to move to the set safety position.
In step S15, the robot is controlled to move to a paddle position to grab the graphite boat based on the position information of the paddle, and the graphite boat is stored to a predetermined position.
Therefore, when the manipulator is conveyed to a set safety position, the back pressure of the furnace tube is controlled, the time from the graphite boat to the boat paddle to the graphite boat to be conveyed to the furnace tube can be saved, the graphite boat coating process can be more continuous by controlling the furnace tube to back pressure in advance and opening the furnace door, the waiting time of the manipulator can be shortened, and the productivity of the graphite boat coating process can be improved.
Optionally, with reference to step S11, an implementation step of controlling the oven door based on the oven internal pressure is provided in the embodiment of the present application, please refer to fig. 2, and fig. 2 is a schematic diagram illustrating the implementation step of controlling the oven door based on the oven internal pressure provided in the embodiment of the present application, and the implementation step may include the following steps:
in step S111, it is determined whether the pressure in the furnace tube is atmospheric pressure or not according to the furnace tube pressure value.
In step S112, the oven door is controlled to open the oven door when the pressure in the oven tube is atmospheric.
In step S113, when the pressure in the furnace pipe is not at atmospheric pressure, the charging valve is activated to adjust the pressure in the furnace pipe to atmospheric pressure, and the furnace door valve is controlled to open the furnace door.
For example, a pressure sensor may be disposed in the furnace tube for detecting a pressure value in the furnace tube, and a solenoid valve of a cylinder of the furnace door may be used to control the opening and closing of the furnace door. The charging valve can be a nitrogen charging valve, and because nitrogen is inert gas and cannot react with substances in the furnace tube under the condition of high temperature, the air pressure in the furnace tube can be recovered by adopting a nitrogen introducing mode.
When the air pressure in the furnace tube is atmospheric pressure, a Programmable Logic Controller (PLC) program instruction segment can be sent out by the server to control the opening of the furnace door; when the air pressure in the furnace tube is not the atmospheric pressure, the nitrogen gas charging valve can be started, and nitrogen gas is charged into the furnace tube to restore the air pressure in the furnace tube to the atmospheric pressure, so that the furnace door can be normally opened.
Therefore, the waiting time of the manipulator can be reduced by opening the furnace door in advance before the manipulator reaches the furnace door to grab the graphite boat, the pressure in the furnace tube is detected by the pressure sensor and is judged whether to be atmospheric pressure, and the inflation valve is started to adjust the atmospheric pressure in the furnace tube to the atmospheric pressure when the atmospheric pressure is not the atmospheric pressure, so that the safety of the graphite boat coating process can be improved.
Optionally, for step S14, the controlling the manipulator to move to the set safety position includes:
controlling the robot to execute an instruction stack, the instruction stack comprising: and finishing the ongoing task or starting to operate from the original position of the manipulator so as to enable the manipulator to preferentially run to the set safety position.
The stack instruction may be a first-in, first-out (FIFO) instruction or a last-in, first-out, LIFO instruction, so that data access can only be performed in the stack top unit, and the stack instruction is used to call the manipulator and adjust the priority of each work task of the manipulator.
Therefore, the manipulator is controlled by using the instruction stack mode, the priorities of the graphite boat, the graphite boat grabbing and the boat moving in the cooling area for each task can be adjusted, so that the graphite boat which is processed can be taken away from the boat paddle in time, the vacant waste of the furnace tube can be avoided, and the utilization rate of the furnace tube is improved.
Optionally, with reference to step S15, an implementation step of controlling a robot based on a signal of a limit sensor is provided in the embodiment of the present application, please refer to fig. 3, where fig. 3 is a schematic diagram of the step of controlling the robot based on the signal of the limit sensor provided in the embodiment of the present application, and the step may include the following steps:
in step S151, a signal of a limit sensor is obtained, the limit sensor is disposed at the set safe position, and when the boat oar reaches the set safe position, the limit sensor is triggered and made to send a signal.
In step S152, a control signal is generated based on the signal of the limit sensor and sent to the robot, so as to control the robot to grasp the graphite boat.
The limit sensor is an electric switch for limiting the movement limit position of the mechanical equipment, and the limit sensor can be a magnetic control dry reed relay, a Hall sensor, a proximity switch and an infrared device.
When the limit sensor detects that the paddle reaches a set safe position, the limit sensor can send a signal to the server, and when the server receives that the paddle reaches the set safe position, the server controls the manipulator to grab the processed graphite boat and stores the graphite boat to a preset position for cooling.
In addition, the server can also send a PLC program instruction to control the closing of the oven door when receiving the signal of the limit sensor.
Therefore, when the graphite boat is conveyed out of the furnace tube by the boat paddle after being processed, the position of the boat paddle can be accurately obtained by the limiting sensor, the manipulator is controlled to grab the processed graphite boat and place the graphite boat in a preset position for cooling based on the position of the boat paddle, the conveying efficiency of the manipulator can be improved, and the coating process capacity of the graphite boat is improved.
Optionally, for step S15, the storing the graphite boat to a predetermined position includes:
and placing the processed graphite boat in the order from bottom to top.
The graphite boat is stored to a preset position for cooling, and the graphite boat which just completes the processing technology is placed on the previous graphite boat according to the sequence from bottom to top, so that the graphite boat which just completes the processing technology can be prevented from carrying out secondary heating on the graphite boat which has been cooled for a period of time.
Therefore, the graphite boat which is processed is placed according to the sequence from bottom to top, the cooling efficiency of the graphite boat can be increased, the cooling speed is increased, meanwhile, the frequency of moving the boat by the mechanical arm can be reduced by placing the graphite boat according to the sequence, the mechanical arm can preferentially grab the graphite boat which is processed, and the capacity of the graphite boat coating process is further improved.
Optionally, when the manipulator is in an idle state, a boat moving instruction may be further executed, and the placing sequence of the processed graphite boats is adjusted according to the cooling time.
After the graphite boat is cooled for a certain time, the cooled graphite boat needs to be placed at other positions to vacate the position of a cooling area, at the moment, a stacking instruction mode can be used, an instruction for moving the boat is taken as a low-priority instruction, when no graphite boat needs to be grabbed, the cooled graphite boat is moved to other positions, and the placing sequence of other graphite boats in a cooling area is adjusted.
Therefore, the mechanical arm is controlled to move the graphite boat in an idle state, the graphite boat which is just processed can be preferentially grabbed, waste caused by the fact that the furnace tube is not vacant is avoided, the instruction priority of grabbing the graphite boat and adjusting the graphite boat placing sequence is adjusted, and the coating process efficiency of the graphite boat can be improved.
Optionally, after step S15, the method may further include the steps of:
and matching and reserving the mechanical arm when the graphite boat coating processing technology is completed within the preset time, so as to control the mechanical arm to timely grab the graphite boat when the graphite boat coating processing technology is completed.
Therefore, the corresponding mechanical arm is matched when the graphite boat coating processing technology is to be completed, so that the mechanical arm can timely grab the graphite boat which is processed, the time wasted when the mechanical arm grabs the graphite boat can be reduced, and the productivity of the graphite boat coating technology is improved.
Based on the same inventive concept, an embodiment of the present invention further provides a graphite boat transportation control device 40, please refer to fig. 4, and fig. 4 is a schematic diagram of the graphite boat transportation control device according to the embodiment of the present invention. The apparatus may include:
the furnace door control module 41 is used for controlling the furnace tube to return to the pressure in advance and opening the furnace door when the manipulator conveys the graphite boat to a set safety position;
the placing module 42 is used for controlling the mechanical arm to place the graphite boat on the boat paddle and return to the set safe position;
the boat paddle conveying module 43 is used for conveying the boat paddle to the furnace tube so as to carry out a graphite boat film coating processing technology;
the manipulator operation module 44 is used for controlling the manipulator to operate to the set safety position when the graphite boat coating processing process is finished;
and the storage module 45 is used for controlling the manipulator to operate to the boat paddle position to grab the graphite boat based on the position information of the boat paddle and storing the graphite boat to a preset position.
Alternatively, the door control module 41 may include:
and the air pressure judgment submodule is used for judging whether the pressure in the furnace tube is atmospheric pressure or not according to the pressure value of the furnace tube.
The control submodule is used for controlling the furnace door valve to open the furnace door when the pressure in the furnace pipe is atmospheric pressure; and when the pressure in the furnace pipe is not atmospheric, starting an inflation valve, adjusting the pressure in the furnace pipe to atmospheric pressure, and controlling the furnace door valve to open the furnace door.
Alternatively, the robot operating module 44 may be specifically configured to:
controlling the robot to execute an instruction stack, the instruction stack comprising: and finishing the ongoing task or starting to operate from the original position of the manipulator so as to enable the manipulator to preferentially run to the set safety position.
Alternatively, the storage module 45 may include:
the acquisition submodule is used for acquiring signals of a limit sensor, the limit sensor is arranged at the set safe position, and when the boat oar reaches the set safe position, the limit sensor is triggered and made to send signals.
And the signal generation submodule is used for generating a control signal based on the signal of the limit sensor and sending the control signal to the manipulator to control the manipulator to grab the graphite boat.
Alternatively, the storage module 45 may be specifically used to place the graphite boats after processing in a bottom-up order.
Optionally, the storage module 45 may be further specifically configured to execute a boat moving instruction when the robot is in an idle state, and adjust a placement sequence of the processed graphite boats according to the cooling time.
Optionally, the graphite boat handling control device may further include an appointment module, configured to match and appointment the manipulator when the graphite boat coating process is completed within a preset time, so as to control the manipulator to grasp the graphite boat in time when the graphite boat coating process is completed.
Based on the same inventive concept, an embodiment of the present application further provides an electronic device, where the electronic device includes a memory and a processor, where the memory stores program instructions, and the processor executes the steps in any one of the above implementation manners when reading and executing the program instructions.
Based on the same inventive concept, an embodiment of the present application further provides a storage medium, where the readable storage medium stores computer program instructions, and the computer program instructions are read by a processor and executed to perform the steps in any of the above implementation manners.
The storage medium may be a Random Access Memory (RAM), a Read Only Memory (ROM), a Programmable Read Only Memory (PROM), an Erasable Read Only Memory (EPROM), an electrically Erasable Read Only Memory (EEPROM), or other media capable of storing program codes. The storage medium is used for storing a program, and the processor executes the program after receiving an execution instruction.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one logical division, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
In addition, units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
Furthermore, the functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
Alternatively, all or part of the implementation may be in software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loaded and executed on a computer, cause the processes or functions described in accordance with the embodiments of the invention to occur, in whole or in part.
The computer may be a general purpose computer, a special purpose computer, a network of computers, or other programmable device. The computer instructions may be stored in a computer readable storage medium or transmitted from one computer readable storage medium to another, for example, from one website site, computer, server, or data center to another website site, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, Digital Subscriber Line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.).
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A graphite boat carrying control method is characterized by being applied to a graphite boat coating processing technology and comprising the following steps:
when the manipulator conveys the graphite boat to a set safety position, controlling the furnace tube to return pressure in advance and opening the furnace door;
controlling the mechanical arm to place the graphite boat on a boat paddle and returning to the set safe position;
conveying the boat paddle to a furnace tube to carry out a graphite boat film coating processing technology;
when the graphite boat coating processing technology is finished, controlling the manipulator to run to the set safety position;
and controlling the manipulator to operate to a paddle position to grab the graphite boat based on the position information of the paddle, and storing the graphite boat to a preset position.
2. The method of claim 1, wherein the controlling the furnace tube to advance back pressure and open the furnace door comprises:
judging whether the pressure in the furnace tube is atmospheric pressure or not according to the pressure value of the furnace tube;
controlling a furnace door valve to open the furnace door when the pressure in the furnace pipe is atmospheric pressure;
and when the pressure in the furnace pipe is not the atmospheric pressure, starting an inflation valve, adjusting the pressure in the furnace pipe to the atmospheric pressure, and controlling the furnace door valve to open the furnace door.
3. The method of claim 1, wherein said controlling said robot to travel to said set safety position comprises:
controlling the robot to execute an instruction stack, the instruction stack comprising: and finishing the ongoing task or starting to operate from the original position of the manipulator so as to enable the manipulator to preferentially run to the set safety position.
4. The method of claim 1, wherein before controlling the robot to move to a paddle position to grasp the graphite boat based on the position information of the paddle, the method further comprises:
acquiring a signal of a limit sensor, wherein the limit sensor is arranged at the set safety position, and when the boat oar reaches the set safety position, the limit sensor is triggered and is enabled to send out the signal;
and generating a control signal based on the signal of the limit sensor, sending the control signal to the manipulator, and controlling the manipulator to grab the graphite boat.
5. The method of claim 1, wherein said storing said graphite boats to predetermined positions comprises:
and placing the processed graphite boat in the order from bottom to top.
6. The method of claim 5, further comprising:
and when the manipulator is in an idle state, executing a boat moving instruction, and adjusting the placing sequence of the processed graphite boat according to the cooling time.
7. The method of claim 1, wherein after the controlling the robot to operate to a paddle position to grasp the graphite boat and store the graphite boat to a predetermined position based on the position information of the paddle, the method further comprises:
and matching and reserving the mechanical arm when the graphite boat coating processing technology is completed within the preset time, so as to control the mechanical arm to timely grab the graphite boat when the graphite boat coating processing technology is completed.
8. A graphite boat conveyance control device, characterized by comprising:
the furnace door control module is used for controlling the furnace tube to return to the pressure in advance and opening the furnace door when the manipulator conveys the graphite boat to a set safety position;
the placing module is used for controlling the mechanical arm to place the graphite boat on the boat paddle and return to the set safe position;
the boat paddle conveying module is used for conveying the boat paddle to the furnace tube so as to carry out a graphite boat film coating processing technology;
the manipulator operation module is used for controlling the manipulator to operate to the set safety position when the graphite boat coating processing technology is finished;
and the storage module is used for controlling the manipulator to operate to the boat paddle position to grab the graphite boat based on the position information of the boat paddle and storing the graphite boat to a preset position.
9. An electronic device comprising a memory having stored therein program instructions and a processor that, when executed, performs the steps of the method of any of claims 1-7.
10. A storage medium having stored thereon computer program instructions for executing the steps of the method according to any one of claims 1 to 7 when executed by a processor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111219628.7A CN113881928A (en) | 2021-10-20 | 2021-10-20 | Graphite boat carrying control method and device, electronic equipment and storage medium |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111219628.7A CN113881928A (en) | 2021-10-20 | 2021-10-20 | Graphite boat carrying control method and device, electronic equipment and storage medium |
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| CN113881928A true CN113881928A (en) | 2022-01-04 |
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| CN202111219628.7A Pending CN113881928A (en) | 2021-10-20 | 2021-10-20 | Graphite boat carrying control method and device, electronic equipment and storage medium |
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