CN113880045A - One-translation two-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform - Google Patents
One-translation two-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform Download PDFInfo
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- CN113880045A CN113880045A CN202111029592.6A CN202111029592A CN113880045A CN 113880045 A CN113880045 A CN 113880045A CN 202111029592 A CN202111029592 A CN 202111029592A CN 113880045 A CN113880045 A CN 113880045A
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- 230000008878 coupling Effects 0.000 claims abstract description 19
- 238000010168 coupling process Methods 0.000 claims abstract description 19
- 238000005859 coupling reaction Methods 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims description 18
- 230000003321 amplification Effects 0.000 claims description 13
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 13
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 abstract description 32
- 230000003287 optical effect Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 206010057071 Rectal tenesmus Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
Abstract
The invention discloses a translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform which comprises a fixed platform, wherein a movable platform is arranged above the fixed platform in a clearance mode, light holes are formed in the centers of the fixed platform and the movable platform, and the fixed platform is provided with four driving units, namely a first driving unit, a second driving unit, a third driving unit and a fourth driving unit; the four driving units are respectively and sequentially propped against four orthogonal directions below the movable platform; the first driving unit, the second driving unit, the third driving unit and the fourth driving unit are identical in structure and comprise a base fixed on the fixed platform, a lever assembly and a power device, wherein the lever assembly is connected to the bottom of the movable platform and the base respectively, the power device is applied to the lever assembly, and the four driving units are identical in structure and comprise a base first flexible piece, a lever, a second flexible piece and a power device. The invention has compact structural layout in the vertical thickness direction and large displacement stroke of the platform, and the displacement transmitted by the first flexible piece type lever can not generate coupling displacement.
Description
Technical Field
The invention belongs to the technical field of nano positioning, and particularly relates to a one-translation two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform.
Background
The piezoelectric micro-motion platform is a micro-displacement mechanism which can transmit displacement and force by a flexible mechanism which is driven by a piezoelectric actuator and can generate elastic deformation. Because the hinge and the bearing are not arranged, the assembly is not needed, no transmission gap exists, and no friction and abrasion are generated; the piezoelectric actuator is adopted for driving, so that the displacement resolution can reach the nanometer level, the response time can reach the millisecond level, and the piezoelectric actuator has the advantages of high rigidity, small volume and strong bearing capacity. Therefore, it is widely used in the technical fields requiring micro/nano positioning, such as precision machining and testing, optical fiber butt joint, optical adjustment, micro part assembly, cell micro-operation, etc. For example, in precision and ultra-precision machining, micro-feeding of a tool or compensation of machining errors can be realized; in the precision measurement, the fine adjustment of the sensor can be realized; in a scanning probe microscope, the measurement of the microstructure appearance can be realized by combining with a micro scanning probe; in the optical fiber butt joint, the precise alignment of two optical fibers with the diameters of several micrometers to tens of micrometers can be realized; in the optical field, the device is used for supporting an optical element, adjusting the direction of a light beam and realizing the rapid and accurate positioning of the light beam; in the assembly of MEMS (micro electro mechanical system), the micro shaft and the micro gear can be assembled into a micro component by combining with the micro clamp; in bioengineering, corresponding components can be injected into or extracted from cells by combining with micro-impact probes.
The existing flexible structure micro-motion platform is mostly based on a Stewart parallel platform structure and is realized by connecting a movable platform and a fixed platform through three or four levers for realizing a driving function. The platform of the implementation mode has high rigidity and quick response, but the following defects exist: the lever is long, so that the movable platform is far away from the fixed platform, and further, on one hand, the platform is large and not compact in structure, and on the other hand, the platform is too large in height and is difficult to apply to occasions requiring the platform to have low thickness; because a displacement amplification mechanism is not adopted, the displacement stroke of the platform is small; when rotating around one axis, a coupling angle around the other axis is generated.
Disclosure of Invention
The invention aims to solve the technical problem of the prior art and provides a translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micro-motion platform which is compact in structural layout, large in platform displacement stroke and free from coupling displacement.
The technical scheme adopted by the invention for solving the technical problems is as follows: the piezoelectric micromotion platform comprises a fixed platform, a movable platform is arranged above the fixed platform in a clearance mode, light holes are formed in the centers of the fixed platform and the movable platform, and the fixed platform is provided with a first driving unit, a second driving unit, a third driving unit and a fourth driving unit;
the first driving unit, the second driving unit, the third driving unit and the fourth driving unit are sequentially jacked at four orthogonal positions below the movable platform respectively;
the first driving unit, the second driving unit, the third driving unit and the fourth driving unit are identical in structure and comprise a base fixed on the fixed platform, a first flexible part, a lever and a second flexible part which are sequentially connected to the bottom of the movable platform and the base, and a power device applied to the lever.
In order to optimize the technical scheme, the adopted measures further comprise:
the power device is connected with the lever through the third flexible piece, and the connecting position is positioned between the first flexible piece and the second flexible piece.
The power device comprises a closed-loop bridge type amplifying mechanism and a piezoelectric actuator supported in the bridge type amplifying mechanism.
The piezoelectric actuator is parallel to the movable platform, and the bridge type amplification mechanism comprises a first rigid body, a first double flexible thin plate, a second rigid body, a second double flexible thin plate, a third rigid body, a third double flexible thin plate, a fourth rigid body and a fourth double flexible thin plate which are sequentially connected in a closed loop manner; the first rigid body and the third rigid body are respectively propped against two ends of the piezoelectric actuator, the second rigid body and the fourth rigid body are respectively arranged on two sides of the piezoelectric actuator, the fourth rigid body is connected with the lever, and the position of the second rigid body is fixed.
The first double flexible thin plate, the second rigid body and the second double flexible thin plate form a shape which is concave towards the direction of the piezoelectric actuator; the third double flexible thin plate, the fourth rigid body, and the fourth double flexible thin plate are also formed in a shape recessed toward the piezoelectric actuator.
The base is provided with an auxiliary seat, and a fourth flexible part is connected between the auxiliary seat and the second rigid body.
Foretell fixed platform is equipped with the holding tank that holds first drive unit, second drive unit, third drive unit and fourth drive unit, and the holding tank is equipped with first set screw including the first inner wall of face light trap between base and the first inner wall.
The lever comprises a first section body, a second section body, a third section body and a fourth section body;
the first section body, the second section body, the third section body and the fourth section body are sequentially arranged from the first flexible piece to the second flexible piece and are integrally formed;
the fourth segment is connected to the third flexible piece and is parallel to the piezoelectric actuator;
the third section body is vertical to the fourth section body and is positioned between the bottom of the accommodating groove and the fourth section body;
the second segment is vertical to the third segment and parallel to the fourth segment;
the first segment is perpendicular to the second segment and parallel to the third segment.
The first flexible piece is in a square column shape and comprises a first side surface facing the first inner wall, a third side surface facing the light hole, a fourth side surface facing the direction of the fourth segment and a second side surface opposite to the fourth side surface;
two first through holes, two first vertical through grooves and two first inclined through grooves are arranged between the first side face and the third side face in a penetrating manner, wherein the first through holes, the first vertical through grooves and the first inclined through grooves which are positioned on the same side are sequentially communicated;
two second through holes are arranged between the second side face and the fourth side face in a penetrating mode, two second vertical through grooves and two second inclined through grooves are formed in the second side face and the fourth side face in a penetrating mode, the second through holes, the second vertical through grooves and the second inclined through grooves which are located on the same side are sequentially communicated, and the first inclined through grooves and the second inclined through grooves respectively penetrate through the three faces of the first flexible piece.
The movable platform, the accommodating groove and the fixed platform are of square symmetrical structures respectively, and the first flexible piece is arranged on the central axis of the movable platform in a propping mode.
Compared with the prior art, the large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform with translation and rotation and large stroke comprises a fixed platform, wherein a movable platform is arranged above the fixed platform in a clearance mode, light holes are formed in the centers of the fixed platform and the movable platform, and the fixed platform is provided with four driving units, namely a first driving unit, a second driving unit, a third driving unit and a fourth driving unit; the first driving unit, the second driving unit, the third driving unit and the fourth driving unit are sequentially jacked at four orthogonal positions below the movable platform respectively; the first driving unit, the second driving unit, the third driving unit and the fourth driving unit have the same structure and comprise a base fixed on the fixed platform, a lever assembly respectively connected to the bottom of the movable platform and the base, and a power device applied to the lever assembly, and the first driving unit, the second driving unit, the third driving unit and the fourth driving unit have the same structure and comprise a base fixed on the fixed platform, a first flexible part, a lever, a second flexible part and a power device applied to the lever, wherein the first flexible part, the lever and the second flexible part are sequentially connected to the bottom of the movable platform and the base.
The output directions of the four driving units are perpendicular to the movable platform, the displacement of the driving units is amplified through the levers and is transmitted to the movable platform, so that the structural layout is compact in the vertical thickness direction, the displacement stroke of the platform is large, and the displacement transmitted by the first flexible piece type lever cannot generate coupling displacement.
The two-stage amplification mechanism consisting of the bridge amplification mechanism and the lever is located in a uniform plane in the thickness direction, so that the four driving units occupy narrower space positions in the thickness direction, the light transmission hole in the center of the platform is as large as possible, a large hollow structure can be obtained, and the platform can have a larger light transmission hole diameter when used for optical adjustment.
The two-stage amplification mechanism in the four driving units can amplify the input displacement of the piezoelectric actuator by more than 5 times, so that the displacement stroke of the movable table top can be greatly enlarged.
Because the four driving units are provided with the first flexible parts rotating around the x axis and the y axis, and the first flexible parts are used as decoupling mechanisms, when the four piezoelectric actuators output the same displacement, the movable platform can output strict translational displacement along the z axis.
When a driving voltage u is applied to the first driving unit and 0.5u of driving voltage is applied to the second and fourth driving units at the same time, the movable table top only outputs angular displacement around the x axis and does not generate coupling displacement rotating around the y axis; when the driving voltage u is applied to the second driving unit and the driving voltage 0.5u is applied to the first and third driving units, the movable table top only outputs angular displacement around the y axis, and coupling displacement rotating around the x axis is not generated.
The driving unit is compact, only occupies half of the space of each groove on the four sides of the base, and reserves enough space for the base integrated displacement sensor, so that the integration of the displacement sensor is easy to realize.
Drawings
FIG. 1 is a schematic top view of the present invention;
FIG. 2 is a schematic sectional view taken along line A-A of FIG. 1;
FIG. 3 is an exploded schematic view of FIG. 1;
FIG. 4 is a schematic perspective view of the present invention;
FIG. 5 is an exploded schematic view of FIG. 4;
FIG. 6 is a schematic structural view of the driving unit of FIG. 5;
FIG. 7 is a top view of FIG. 6;
fig. 8 is a schematic perspective view of fig. 6.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings.
Fig. 1 to 8 are schematic structural views of the present invention. Wherein the reference numerals are: the fixed platform 1, the receiving groove 11, the first inner wall 111, the first fixing screw 112, the movable platform 2, the light transmission hole 3, the first driving unit 4, the second driving unit 5, the third driving unit 6, the fourth driving unit 7, the sub-seat 81, the fourth flexible member 811, the base 82, the second flexible member 83, the lever 84, the first segment 841, the second segment 842, the third segment 843, the fourth segment 844, the third flexible member 85, the first side 861, the second side 862, the third side 863, the fourth side 864, the first flexible member 88, the first through hole 881, the first vertical through groove 882, the first inclined through groove 883, the second through hole 884, the second vertical through groove 885, the second inclined through groove 886, the bridge amplification mechanism 9, the first body 91, the first flexible thin plate 92, the second rigid body 93, the second flexible thin plate 94, the third flexible thin plate 95, the third flexible thin plate 96, the fourth rigid body 97, the third flexible thin plate 95, the fourth rigid body 97, and the fourth flexible member 861, A fourth double flexible sheet 98, a piezoelectric actuator 99, and a second set screw 10.
Since the product of the present invention is used in a horizontal plane with the movable platform 2 facing upward, for the convenience of description, the description of the related directions will introduce the concepts of "up" and "down", and will not make any ambiguity, such as "the first through hole 881 extending upward".
Fig. 1 to 8 are schematic structural views of the present invention, and as shown in fig. 1, 3, 4 and 5, the present invention relates to a translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform, which includes a fixed platform 1, a movable platform 2 is arranged above the fixed platform 1 at a gap, light holes 3 are arranged in the centers of the fixed platform 1 and the movable platform 2, and the fixed platform 1 is provided with a first driving unit 4, a second driving unit 5, a third driving unit 6 and a fourth driving unit 7;
the first driving unit 4, the second driving unit 5, the third driving unit 6 and the fourth driving unit 7 are sequentially propped against four orthogonal directions below the movable platform 2 respectively;
as shown in fig. 2, the first driving unit 4, the second driving unit 5, the third driving unit 6 and the fourth driving unit 7 have the same structure, and include a base 82 fixed on the fixed platform 1, a first flexible member 88, a lever 84 and a second flexible member 83 sequentially connected to the bottom of the movable platform 2 and the base 82, and a power device applied to the lever 84.
In one embodiment, as shown in FIG. 2, the power unit is coupled to the lever 84 by a third flexible member 85, and the coupling is between the first flexible member 88 and the second flexible member 83.
In the embodiment, as shown in fig. 2, 6 and 8, the power unit includes a bridge amplification mechanism 9 in a closed loop type, and a piezoelectric actuator 99 supported in the bridge amplification mechanism 9.
In an embodiment, as shown in fig. 2, the piezoelectric actuator 99 is parallel to the movable platform 2, and as shown in fig. 2, 6 and 8, the bridge amplification mechanism 9 includes a first rigid body 91, a first double flexible thin plate 92, a second rigid body 93, a second double flexible thin plate 94, a third rigid body 95, a third double flexible thin plate 96, a fourth rigid body 97 and a fourth double flexible thin plate 98, which are sequentially connected in a closed loop; the first rigid body 91 and the third rigid body 95 are respectively pressed against two ends of the piezoelectric actuator 99, the second rigid body 93 and the fourth rigid body 97 are respectively arranged on two sides of the piezoelectric actuator 99, the fourth rigid body 97 is connected with the lever 84, and the position of the second rigid body 93 is fixed.
In the embodiment, as shown in fig. 2, 6 and 8, the first double flexible sheet 92, the second rigid body 93 and the second double flexible sheet 94 are formed in a concave shape toward the piezoelectric actuator 99; the third double flexible thin plate 96, the fourth rigid body 97, and the fourth double flexible thin plate 98 are also formed in a shape recessed toward the piezoelectric actuator 99.
In the embodiment shown in fig. 2, 6 and 8, the base 82 is provided with a secondary seat 81, and a fourth flexible element 811 is connected between the secondary seat 81 and the second rigid body 93.
In an embodiment, as shown in fig. 2 to 5, the fixed platform 1 is provided with a receiving groove 11 for receiving the first driving unit 4, the second driving unit 5, the third driving unit 6 and the fourth driving unit 7, the receiving groove 11 includes a first inner wall 111 facing the light hole 3, and a first fixing screw 112 is disposed between the base 82 and the first inner wall 111. The sub-seat 81 abuts against the bottom of the receiving slot 11, and the second section 842 has a gap with the bottom of the receiving slot 11.
In an embodiment, as shown in fig. 2, 6 and 8, the lever 84 includes a first segment 841, a second segment 842, a third segment 843 and a fourth segment 844;
the first section 841, the second section 842, the third section 843 and the fourth section 844 are sequentially arranged from the first flexible member 88 to the second flexible member 83 and are integrally formed;
the fourth segment 844 is connected to the third flexure 85 and parallel to the piezoelectric actuator 99;
the third segment 843 is perpendicular to the fourth segment 844 and is located between the bottom of the accommodating groove 11 and the fourth segment 844;
the first segment 841 is perpendicular to the second segment 842 and parallel to the third segment 843.
The U-shaped structure of the tenesmus formula that first section body 841, second section body 842, third section body 843 formed can not only prevent effectively that device during operation lever 84 from rocking, increases work precision, can also push up in the bottom of holding tank 11 under the super heavy burden condition of movable platform 2, prevents that lever 84 from being pressed the deformation.
In an embodiment, as shown in fig. 7, the first flexible member 88 has a square column shape, and includes a first side 861 facing the first inner wall 111, a third side 863 facing the light-transmitting hole 3, a fourth side 864 facing the fourth segment 844, and a second side 862 opposite to the fourth side 864;
two first through holes 881 are arranged between the first side 861 and the third side 863 in a penetrating manner, two second through holes 884 are arranged between the second side 862 and the fourth side 864 in a penetrating manner, and the first through holes 881 are positioned below the second through holes 884;
each first through hole 881 is extended upward to form a first vertical through groove 882 and a first inclined through groove 883 which is completely opened on three surfaces of the first flexible member 88, and the first vertical through groove 882 is intersected with the second through hole 884;
each of the second through holes 884 is downwardly extended with a second vertical through slot 885 and a second inclined through slot 886 completely opened to three sides of the first flexible member 88, and the second vertical through slot 885 meets the first through hole 881. The arrangement enables the first flexible piece 88 to have extremely strong flexibility and rigidity and good decoupling performance.
In the embodiment, as shown in fig. 1 to 5, the movable platform 2, the accommodating groove 11 and the fixed platform 1 are respectively of a square symmetrical structure, and the first flexible member 88 is disposed on the central axis of the movable platform 2. Therefore, the driving unit on each side is compact as a whole, the driving unit only occupies half of the space position of each accommodating groove 11 on the four sides of the base, enough space is reserved for the base to integrate the displacement sensor, and the integration of the displacement sensor is easy to realize.
In the embodiment, the four driving units are all applied with voltage, because the movable platform 2 needs to be lifted to perform the next action.
In the embodiment, a second fixing screw 10 is connected between the first flexible member 88 and the movable platform 2 for fixing.
The principle of the device is as follows: let the first driving unit 4 to the third driving unit 6 be in the y-axis direction, the second driving unit 5 to the fourth driving unit 7 be in the x-axis direction, and the moving platform 2 be oriented in the z-axis forward direction.
1. Along the z-axis. When the same driving voltage u is applied to the four piezoelectric actuators 99 at the same time, the bridge amplification mechanism 9 and the lever 84 can output the same displacement, and the movable platform 2 can output strict translational displacement along the z-axis.
2. When the driving voltage u is applied to the first driving unit 4 and the driving voltage 0.5u is applied to the second and fourth driving units 7, the movable table top only outputs angular displacement around the x axis, and coupling displacement rotating around the y axis is not generated; when the driving voltage u is applied to the second driving unit 5 and the driving voltage 0.5u is applied to the first driving unit 4 and the third driving unit 6, the movable table top only outputs angular displacement around the y axis, and coupling displacement rotating around the x axis is not generated.
While the preferred embodiments of the present invention have been illustrated, various changes and modifications may be made by one skilled in the art without departing from the scope of the invention.
Claims (10)
1. A translation two rotates big space parallelly connected piezoelectricity fine motion platform of big stroke no coupling, including deciding platform (1), decide platform (1) top clearance be equipped with move platform (2), characterized by: the center of the fixed platform (1) and the center of the movable platform (2) are provided with light holes (3), and the fixed platform (1) is provided with a first driving unit (4), a second driving unit (5), a third driving unit (6) and a fourth driving unit (7);
the first driving unit (4), the second driving unit (5), the third driving unit (6) and the fourth driving unit (7) are sequentially propped against four orthogonal directions below the movable platform (2) respectively;
the structure of the first driving unit (4), the second driving unit (5), the third driving unit (6) and the fourth driving unit (7) is the same, and the first driving unit, the second driving unit, the third driving unit and the fourth driving unit (7) comprise a base (82) fixed on the fixed platform (1), a first flexible part (88), a lever (84) and a second flexible part (83) which are sequentially connected to the bottom of the movable platform (2) and the base (82), and a power device applied to the lever (84).
2. The micro-motion platform of claim 1, wherein the micro-motion platform comprises: the power device is connected with the lever (84) through a third flexible piece (85), and the connection position is positioned between the first flexible piece (88) and the second flexible piece (83).
3. A translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform as claimed in claim 2, which is characterized in that: the power device comprises a closed-loop bridge type amplification mechanism (9) and a piezoelectric actuator (99) supported in the bridge type amplification mechanism (9).
4. A translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform as claimed in claim 3, wherein: the piezoelectric actuator (99) is parallel to the movable platform (2), and the bridge type amplification mechanism (9) comprises a first rigid body (91), a first double flexible thin plate (92), a second rigid body (93), a second double flexible thin plate (94), a third rigid body (95), a third double flexible thin plate (96), a fourth rigid body (97) and a fourth double flexible thin plate (98) which are sequentially connected in a closed loop manner; the first rigid body (91) and the third rigid body (95) are respectively abutted against two ends of the piezoelectric actuator (99), the second rigid body (93) and the fourth rigid body (97) are respectively arranged on two sides of the piezoelectric actuator (99), the fourth rigid body (97) is connected with the lever (84), and the position of the second rigid body (93) is fixed.
5. The micro-motion platform of claim 4, wherein the micro-motion platform comprises: the first double flexible thin plate (92), the second rigid body (93) and the second double flexible thin plate (94) form a shape which is concave towards the direction of the piezoelectric actuator (99); the third double flexible thin plate (96), the fourth rigid body (97) and the fourth double flexible thin plate (98) are also formed into a shape concave towards the piezoelectric actuator (99).
6. The micro-motion platform of claim 5, wherein the micro-motion platform comprises: the base (82) is provided with an auxiliary seat (81), and a fourth flexible part (811) is connected between the auxiliary seat (81) and the second rigid body (93).
7. The micro-motion platform of claim 6, wherein the micro-motion platform comprises: decide platform (1) be equipped with holding tank (11) that hold first drive unit (4), second drive unit (5), third drive unit (6) and fourth drive unit (7), holding tank (11) including first inner wall (111) towards light trap (3), base (82) with first inner wall (111) between be equipped with first set screw (112).
8. The micro-motion platform of claim 7, wherein the micro-motion platform comprises: the lever (84) comprises a first section body (841), a second section body (842), a third section body (843) and a fourth section body (844);
the first section body (841), the second section body (842), the third section body (843) and the fourth section body (844) are sequentially arranged from the first flexible piece (88) to the second flexible piece (83) and are integrally formed;
said fourth segment (844) is connected to said third flexible member (85) and parallel to said piezoelectric actuator (99);
the third segment (843) is perpendicular to the fourth segment (844) and is positioned between the bottom of the accommodating groove (11) and the fourth segment (844);
said second section (842) being perpendicular to said third section (843) and parallel to said fourth section (844);
the first section (841) is perpendicular to the second section (842) and parallel to the third section (843).
9. A translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform as claimed in claim 8, wherein: the first flexible piece (88) is in a square column shape and comprises a first side face (861) facing the first inner wall (111), a third side face (863) facing the light transmission hole (3), a fourth side face (864) facing the direction of the fourth section (844) and a second side face (862) opposite to the fourth side face (864);
two first through holes (881) are arranged between the first side surface (861) and the third side surface (863) in a penetrating manner, two second through holes (884) are arranged between the second side surface (862) and the fourth side surface (864) in a penetrating manner, and the first through holes (881) are positioned below the second through holes (884);
each first through hole (881) is provided with a first vertical through groove (882) extending upwards and a first inclined through groove (883) completely opening at three surfaces of the first flexible piece (88), and the first vertical through groove (882) is intersected with the second through hole (884);
each second through hole (884) is downwardly extended with a second vertical through groove (885) and a second inclined through groove (886) which is completely opened on three surfaces of the first flexible member (88), and the second vertical through groove (885) is intersected with the first through hole (881).
10. A translational two-rotation large-stroke non-coupling large-hollow parallel piezoelectric micromotion platform as claimed in claim 9, wherein: the movable platform (2), the accommodating groove (11) and the fixed platform (1) are of square symmetrical structures respectively, and the first flexible piece (88) is arranged on the central axis of the movable platform (2) in a propping mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111029592.6A CN113880045A (en) | 2021-09-03 | 2021-09-03 | One-translation two-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111029592.6A CN113880045A (en) | 2021-09-03 | 2021-09-03 | One-translation two-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113880045A true CN113880045A (en) | 2022-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111029592.6A Withdrawn CN113880045A (en) | 2021-09-03 | 2021-09-03 | One-translation two-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113880045A (en) |
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2021
- 2021-09-03 CN CN202111029592.6A patent/CN113880045A/en not_active Withdrawn
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