CN113857684B - Picosecond laser etching processing method for omega-shaped notch of metal diaphragm - Google Patents
Picosecond laser etching processing method for omega-shaped notch of metal diaphragm Download PDFInfo
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- 238000010329 laser etching Methods 0.000 title claims abstract description 77
- 239000002184 metal Substances 0.000 title claims abstract description 72
- 238000003672 processing method Methods 0.000 title claims abstract description 20
- 238000012545 processing Methods 0.000 claims abstract description 51
- 238000000034 method Methods 0.000 claims abstract description 41
- 238000013461 design Methods 0.000 claims abstract description 28
- 230000007547 defect Effects 0.000 claims abstract description 11
- 238000005516 engineering process Methods 0.000 claims abstract description 9
- 238000005530 etching Methods 0.000 claims description 15
- 239000011159 matrix material Substances 0.000 claims description 15
- 238000012937 correction Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 claims description 3
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000009966 trimming Methods 0.000 claims description 3
- 230000010076 replication Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000008569 process Effects 0.000 description 11
- 238000002679 ablation Methods 0.000 description 5
- 230000001788 irregular Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000003380 propellant Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
Abstract
The invention provides a picosecond laser etching processing method for omega-shaped scores of a metal diaphragm, which mainly solves the problem that the traditional laser etching path design method cannot realize irregular-shaped score processing and the problem that the processing efficiency is lower because a grid point set fills a laser etching path. Firstly, splitting and restoring a regular graph of an omega-shaped notch pattern, secondly, generating an omega-shaped notch point cluster by adopting point collection drawing software, and designing an omega-shaped notch path and carrying out primary drawing based on the point cluster; processing the omega-shaped nicks by using a picosecond laser processing technology again; finally, the defect is corrected to finish picosecond laser etching processing of the omega-shaped notch of the metal diaphragm. The design method provided by the invention can be used for picosecond laser processing of the omega-shaped scored metal diaphragm with large size, any scoring depth and any material, and further can be used for applying the metal diaphragm with the omega-shaped score to a liquid rocket engine diaphragm valve.
Description
Technical Field
The invention relates to a picosecond laser processing method of a metal strip or foil, in particular to a picosecond laser etching processing method of an omega-shaped notch of a metal diaphragm.
Background
The omega-shaped notched metal diaphragm is one blind slot with omega shape and certain depth machined on metal strip or plate and welded to the diaphragm valve of liquid rocket engine. The diaphragm valve is an important part for ensuring the reliable operation of the liquid rocket engine, and is in a normally closed state when propellant is filled and stored, so that the propellant is isolated from the inner cavity of the engine; when the engine works, the diaphragm valve breaks and opens at the omega-shaped notch under the action of a certain forward pressure difference.
The picosecond laser etching process can realize the processing of the metal diaphragm notch and ensure the performance of the design requirement. The C-shaped notch metal diaphragm matched with the existing diaphragm valve product forms a set of mature laser etching path design method: 1) Drawing a circular point set by adopting point set drawing software; 2) Correcting a C shape by adopting CAD drawing software; 3) And correcting the residual thickness of the nick and the morphology of the bottom of the nick by adopting CAD drawing software. However, the above method can only meet the laser path design of a "C-shaped" score or other regular-shaped score, and is not applicable to irregular-shaped scores at all.
Because of the product design requirement, the omega-shaped notch has a larger hinge length, so that the risk that the metal film falls off to form an engine surplus after being broken along the notch can be avoided, and the omega-shaped notch is increasingly applied to the design of the metal film with large size and large notch depth. Because the point set drawing software can only generate point sets based on regular patterns such as circles and rectangles and extension patterns such as rings and rectangular rings, omega-shaped scores cannot be drawn by the method.
Aiming at the design of the irregularly-shaped laser etching path point set, the conventional method adopts grid line point set filling and removing, but for the metal diaphragm matched with the diaphragm valve product, the design mode of the laser etching path can lead to frequent start and stop of a laser and further lead to the reduction of the production efficiency of the metal diaphragm, and can not be applied to industrial production because of the large notch size, the narrow width and the large depth of the metal diaphragm.
Disclosure of Invention
The invention aims to provide a picosecond laser etching processing method for omega-shaped scores of a metal diaphragm, which mainly solves the problems that the traditional laser etching path design method cannot realize processing of irregular-shaped scores and the processing precision and efficiency are low due to filling of laser etching paths by grid point sets.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
the picosecond laser etching processing method of the omega-shaped notch of the metal diaphragm is characterized by comprising the following steps of:
step 1, splitting and restoring a regular graph according to the pattern of omega-shaped scores of a metal film, splitting the omega-shaped into an arc section and a straight line section, and restoring the arc section into a corresponding circle;
step 2, defining the coordinates of the circle center, the radius of the circle, the number of point sets, the number of single-circle points and the phase in the step 1 by using point set drawing software to form a circle point cluster, wherein the definition of the phase can enable the points of two or more adjacent single lines to be distributed at intervals; defining coordinates of a starting point and an ending point of the straight line segment in the step 1 by adopting CAD drawing software to form a straight line segment point cluster;
step 3, designing an omega-shaped single-line laser etching path based on the dot cluster formed in the step 2 by adopting CAD drawing software;
step 4: combining a plurality of adjacent single-line omega-shaped laser etching paths with different phases on the basis of the single-line laser etching paths by adopting CAD drawing software to form an omega-shaped notch matrix; aiming at the omega-shaped notch matrix, adopting offset replication to realize the preliminary drawing of an omega-shaped notch etching path to obtain design data of the omega-shaped notch;
step 5, adopting the design data obtained in the step 4, and processing omega-shaped scores of the metal diaphragm by using a picosecond laser processing technology;
step 6, measuring and analyzing the depth of the omega-shaped notch and the shape of the bottom of the omega-shaped notch by using a 3D laser measuring instrument to obtain data of local depth average values and shape of the bottom of the omega-shaped notch at different positions;
if the obtained data is consistent with the design data of the omega-shaped notch, finishing picosecond laser etching processing of the omega-shaped notch of the metal diaphragm;
if the obtained data is inconsistent with the design data of the omega-shaped notch, executing the step 7;
and 7, carrying out local defect correction on the position where the measured data is inconsistent with the design data of the omega-shaped notch, and completing picosecond laser etching processing of the omega-shaped notch of the metal film to obtain the required omega-shaped notch of the metal film.
Further, the scanning system recognizes the point set to carry out the route planning during picosecond laser etchingIn the step 2, in order to ensure the stability and consistency of the laser etching removal volumes at different positions of the omega shape, the number of single-circle points is determined according to the point spacing d of the circular point sets with different curvatures i To determine d i The formula needs to be satisfied: d, d i ＝d 0 ·r 0 /r i Wherein d 0 For the point spacing of any split circular point set, r 0 Is equal to d 0 Radius of corresponding circle, r i Is equal to d i Corresponding to the radius of the circle.
Further, in order to improve the efficiency of the laser etching process and simultaneously ensure the safety in the etching process, the point spacing d 0 And d i The following respectively satisfy: d is more than or equal to 0.2mm 0 D is less than or equal to 0.5mm and less than or equal to 0.2mm i ≤0.5mm。
Further, step 3 is specifically that the point clusters are comprehensively imported into CAD drawing software, and single-line point set drawing of omega shapes is realized by adopting a decomposition and trimming function; the combination and fitting functions are adopted to realize the conversion from the omega-shaped single-line point set to the multi-segment line fitting, and the design of the omega-shaped single-line laser etching path is realized.
Further, in step 4, the single lines with different phases are single lines with a pointing distribution phase difference, and the phase P of the single lines i According to formula P i ＝2π[r i +(i-1)△D]·(i-1)/(d i N) performing a calculation, wherein: delta D is the distance between two single lines, i is the sequential number of the single lines in the notched matrix, and the value set of i is { i ≡
Z|1 is not less than i is not less than N; n is the number of single wires in the matrix.
Further, in step 4, the offset distance offset=n·Δdof the offset copies, the number of times N of the offset copies offset ＝[H-(N-1)△D]/(N.DELTA.D), where: h is the width of the score.
Further, the distance Δd between the two single lines needs to satisfy: the delta D is more than or equal to 0.01mm and less than or equal to 0.1mm, the surface roughness of the bottom of the notch is easy to be poor when the delta D value is larger, the excessive ablation caused by the larger heat input quantity of the bottom of the notch is easy to be caused when the delta D value is smaller, and the rupture pressure of the product is further influenced.
Further, in step 5, the picosecond laser processing parameters include parameter settings of laser power, laser scanning rate, laser processing times, laser turn-on delay, laser turn-off delay and scanner jump delay in order to promote smooth progress of the laser etching process.
Further, the delay selection range of the turning-on and turning-off of the laser is 120 mu s-180 mu s; the jump delay selection range of the scanner is 200 mu s-800 mu s.
Further, since the ablation volume is excessively introduced into the secondary local defect due to the sudden stop in the laser etching process, the defect correction method in the step 7 specifically comprises the following steps: firstly drawing a local laser etching path of an omega-shaped notch to be corrected by adopting CAD drawing software through analyzing the notch depth dispersion difference at different positions and the data of the bottom inclination, and then dividing the local laser etching path to form a plurality of etching paths gradually transiting to a laser termination point, wherein the number of the etching paths is set according to the notch depth to be corrected, and the machining times of a single etching path is ensured to be less than or equal to 10; finally, the picosecond processing technology is used for processing the omega-shaped notch of the metal diaphragm, and picosecond laser etching processing of the omega-shaped notch of the metal diaphragm is completed, so that the required omega-shaped notch of the metal diaphragm is obtained.
The beneficial effects of the invention are as follows:
1. according to the laser etching processing method, the omega-shaped irregular graph is split, restored, point set generated, preliminarily drawn, processed in picoseconds and corrected, and the designed etching path can be matched with the laser start delay, the laser closing delay and the scanner jump delay of picosecond laser processing, so that the laser etching processing of the omega-shaped irregular notch is realized.
2. The point set drawing software adopted by the laser etching processing method can define the radius, the point number and the phase of a circle and specifically set parameters so as to generate different point clusters, and the point clusters are automatically identified by the scanning system to carry out route planning and processing during picosecond laser etching, so that the defect rate in the etching processing process is reduced, and the product processing precision and the product processing efficiency are improved.
3. According to the laser etching processing method, single-line omega-shaped laser etching paths with different phases are combined to form the omega-shaped notch matrix, offset copying is carried out on the omega-shaped notch matrix, and matrix units with different phases reduce heat accumulation at the same position in the laser processing process, so that the processing precision is further improved.
4. The laser etching processing method further corrects the defects after measuring the depth and the bottom morphology of the omega-shaped notch, ensures that the volume of partial etching is not excessive, reduces the roughness of the surface where the notch is located, and further improves the overall quality of the product.
5. Compared with the traditional grid filling laser processing technology, the point-integration picosecond laser processing technology adopted by the laser etching processing method can greatly reduce the start-stop frequency of a laser, and the production efficiency of the metal membrane can be improved by more than 500%.
6. The laser etching processing method can be used for picosecond laser processing of large-size metal films (the outer diameter of the metal film is more than or equal to 20mm, the notch diameter of the metal film is more than or equal to 18 mm), any notch depth and omega-shaped notch metal films made of any materials, and has a wide application range.
Drawings
FIG. 1 is a schematic diagram of an omega-shaped scored metal film in a picosecond laser etching process of the omega-shaped scored metal film of the present invention;
FIGS. 2A-2F are schematic diagrams illustrating regular pattern splitting of omega-shaped scores in a picosecond laser etching processing method of omega-shaped scores of a metal film according to the invention;
FIG. 3 is a schematic diagram showing the distribution of single line path point positions of different phases of an omega-shaped metal film in a picosecond laser etching processing method of omega-shaped scores of the metal film;
fig. 4 is a graph of partial measurement data of an omega-shaped notch in a picosecond laser etching processing method of the omega-shaped notch of a metal film according to the present invention.
Detailed Description
The invention provides a picosecond laser etching processing method for omega-shaped scores of a metal diaphragm, which is described in detail below with reference to the accompanying drawings and various embodiments, and the method needs to be described as follows: the drawings are in simplified form and are not to scale, but are for convenience and clarity of illustration only to assist in describing embodiments of the invention.
The invention discloses a picosecond laser etching processing method of an omega-shaped notch of a metal diaphragm, which comprises the following steps:
step 1, according to the pattern of the omega-shaped notch of the metal film (as shown in fig. 1), splitting and restoring the regular pattern, wherein the irregular pattern omega can be split into an arc section and two straight line sections, and the split arc section is restored into a circle.
The method comprises the following steps: an irregular omega-shaped graph can be split into an upper arc C1, a left lower arc C2, a right lower arc C3, an arc C4 for connecting C1 and C2, an arc C5 for connecting C1 and C3, an arc C6 at a left lower corner and an arc C7 at a right lower corner, and a straight line segment L1 at the left lower part and a straight line segment L2 at the right lower part, each split arc is restored to be a corresponding circle, an omega-shaped notch is split and restored to be 7 circles and 2 straight line segments L1 and L2 (as shown in fig. 2A-2F), basic parameters of each restored circle comprise circle center coordinates, radius of the circle, number of points, number of single points and phases, and basic parameters of each straight line segment respectively comprise coordinates of a starting point and a termination point.
Step 2, defining the center coordinates in the step 1 by adopting point set drawing software, and typing in the radius of a circle, the number of point set circles, the number of single-circle points and phases to form a circle point cluster, wherein the definition of the phases can lead the points of two or more adjacent single lines to be distributed at intervals; and (3) defining coordinates of a starting point and an ending point of the straight line segment in the step (1) by adopting CAD drawing software to form a straight line segment point cluster.
The point cluster includes 7 circular point clusters and 2 straight line segment combined point clusters. The circular point set is generated by point set drawing software, and the point set drawing software can realize that the circular point set is generated in a dxf vector file format, specifically: the circle center coordinates (namely the positions of circles) are imported into the point collection drawing software, the radius of the circles, the number of the point collection circles, the number of single-circle points and the phases are typed in to generate the circle point collection, and the point collection is identified by a scanning system to carry out route planning and processing during picosecond laser etching so as to ensure omegaThe laser etching removal volumes at different positions can be kept stable and consistent, so that the distribution accuracy of the point sets is improved, wherein the number of the point sets is keyed in 1, and the number of single-circle points is according to the point spacing d of the circular point sets with different curvatures i To determine that the specific formula is d i ＝d 0 ·r 0 /r i ，d 0 For the point spacing of any split circular point set, r 0 Is equal to d 0 Corresponding circular radius, r i Is equal to d i Corresponding circular radius, dot spacing d 0 And d i The requirements are as follows: d is more than or equal to 0.2mm 0 D is less than or equal to 0.5mm and less than or equal to 0.2mm i When the dot spacing is smaller than or equal to 0.5mm, on one hand, the risk of local ablation caused by excessive picosecond laser heat input is present, and on the other hand, the processing efficiency of the nicks is relatively low; when the distance between the two points is too large, the picosecond laser heat input quantity is insufficient to completely gasify the metal between the two points, and the purpose of laser etching cannot be achieved. The straight line segment L1 and the L2 point set are drawn through CAD software, and coordinates of a starting point and an ending point are input to directly generate.
And 3, designing an omega-shaped single-line laser etching path based on the dot cluster formed in the step 2 by adopting CAD drawing software.
Firstly, C1-C7 circular point clusters and L1-L2 straight line segment point clusters corresponding to the same omega-shaped graph are imported into a CAD file, the point clusters are decomposed into line segment sets containing all the graphs by adopting a decomposition function in CAD drawing software, then redundant line segments of each point cluster are removed by adopting a trimming function, so that the omega-shaped graph is formed, and single line drawing of the omega-shaped graph is realized;
secondly, the conversion from omega-shaped single-line point set to multi-segment line fitting is realized by adopting the merging and fitting functions, and the method specifically comprises the following steps: and sequentially inputting 'PE- & gt M' into a CAD command frame, selecting all line segment sets forming an omega-shaped graph, and sequentially inputting 'J- & gt 0- & gt F' into the command frame to realize conversion from the single line point set of the omega-shaped graph to a fitting multi-section line, thereby realizing the design of the single line laser etching path of the omega-shaped graph.
Step 4, combining a plurality of adjacent single-line omega-shaped laser etching paths with different phases on the basis of the single-line laser etching paths by adopting CAD drawing software to form an omega-shaped notched matrix; for the matrix of the omega-shaped notch, the initial drawing of the omega-shaped notch is realized by adopting offset copying, so that the design data of the omega-shaped notch is obtained.
The single lines of different phases are single lines indicating that there is a phase difference in the distribution, and the phase Pi of the single line is represented by the formula pi=2pi [ r ] i +(i-1)△D]·(i-1)/(d i N) performing a calculation, wherein: delta D is the distance between two single lines, i is the sequential number of the single lines in the notched matrix, the value set of i is { i.c. Z|1 +.i +.N }, N is the number of single lines of the notched matrix. Δd needs to satisfy: the delta D is more than or equal to 0.01mm and less than or equal to 0.1mm, the surface roughness of the bottom of the notch is easy to be poor when the delta D value is larger, the excessive ablation caused by the larger heat input quantity of the bottom of the notch is easy to be caused when the delta D value is smaller, and the rupture pressure of the product is further influenced. The offset copy can ensure that the width of the whole pattern is consistent with the width of the notch, further improves the processing precision, and has offset distance offset=n·Δdand offset copy times N offset ＝[H-(N-1)△D]/(N.DELTA.D), where: h is the width of the score.
And 5, processing the omega-shaped notch of the metal film by using the design data obtained in the step 4 and using a picosecond laser processing technology. In order to promote the smooth performance of the laser etching processing process, picosecond laser processing process parameters comprise main parameter settings such as laser power, laser scanning speed, laser processing times, laser turning-on delay, laser turning-off delay, scanner jumping delay and the like, wherein the selection range of the laser turning-on delay and the laser turning-off delay is generally 120 mu s-180 mu s; the scanner jump delay is typically selected in the range of 200 mus to 800 mus. The laser etching path designed by the invention can greatly reduce the start-stop frequency of the laser, reduce the defect rate of omega-shaped nicks of the metal film, further improve the integral precision of the metal film and improve the production efficiency of the metal film by more than 500 percent.
Step 6, measuring and analyzing the depth of the omega-shaped notch and the shape of the bottom of the omega-shaped notch by using a 3D laser measuring instrument to obtain data of local depth average values and shape of the bottom of the omega-shaped notch at different positions; if the obtained data is consistent with the design data of the omega-shaped notch, finishing picosecond laser etching processing of the omega-shaped notch of the metal diaphragm; if the obtained data is inconsistent with the design data of the omega-shaped notch, step 7 is executed.
Step 7, carrying out local defect correction on the position where the measured data is inconsistent with the design data of the omega-shaped notch, wherein the excessive ablation volume generated by sudden stop in the laser etching process introduces secondary local defects, and the defect correction method of step 7 specifically comprises the following steps: drawing a local laser etching path of the omega-shaped notch to be corrected by adopting CAD drawing software through analyzing depth dispersion differences of notches at different positions and data (part of data is shown in figure 4), dividing the local laser etching path to form a plurality of etching paths gradually transiting to a laser termination point, and specifically setting the number of the etching paths according to the notch depths to be corrected, wherein the machining times of a single etching path are less than or equal to 10; and then adopting the set parameters, carrying out the processing of the omega-shaped notch of the metal diaphragm by using the picosecond processing technology again, and completing the picosecond laser etching processing of the omega-shaped notch of the metal diaphragm, thereby obtaining the required omega-shaped notch of the metal diaphragm.
The laser etching processing method can be used for picosecond laser processing of large-size metal films with the outer diameter of the metal film being more than or equal to 20mm and the notch diameter of the metal film being more than or equal to 18mm, and omega-shaped notch metal films with any notch depth and any materials, and has a wide application range.
The above embodiments are merely for illustrating the technical concept and features of the present invention, and it should be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by those skilled in the art within the scope of the present invention.
Claims (10)
1. The picosecond laser etching processing method of the omega-shaped notch of the metal diaphragm is characterized by comprising the following steps of:
step 1, splitting and restoring a regular graph according to the pattern of omega-shaped scores of a metal film, splitting the omega-shaped into an arc section and a straight line section, and restoring the arc section into a corresponding circle;
step 2, defining the circle center coordinates, the radius of the circle, the number of point sets, the number of single-circle points and the phase of the circle in the step 1 by adopting point set drawing software to form a circle point cluster; defining coordinates of a starting point and an ending point of the straight line segment in the step 1 by adopting CAD drawing software to form a straight line segment point cluster;
step 3, designing an omega-shaped single-line laser etching path based on the dot cluster formed in the step 2 by adopting CAD drawing software;
step 4: combining a plurality of adjacent single-line omega-shaped laser etching paths with different phases on the basis of the single-line laser etching paths by adopting CAD drawing software to form an omega-shaped notch matrix; based on the omega-shaped notch matrix, adopting offset replication to realize preliminary drawing of an omega-shaped notch etching path, and obtaining design data of the omega-shaped notch;
step 5, adopting the design data obtained in the step 4, and processing omega-shaped scores of the metal diaphragm by using a picosecond laser processing technology;
step 6, measuring and analyzing the depth of the omega-shaped notch and the shape of the bottom of the omega-shaped notch by using a 3D laser measuring instrument to obtain data of local depth average values and shape of the bottom of the omega-shaped notch at different positions;
if the obtained data is consistent with the design data of the omega-shaped notch, finishing picosecond laser etching processing of the omega-shaped notch of the metal diaphragm;
if the obtained data is inconsistent with the design data of the omega-shaped notch, executing the step 7;
and 7, carrying out local defect correction on the position where the measured data is inconsistent with the design data of the omega-shaped notch, and completing picosecond laser etching processing of the omega-shaped notch of the metal film to obtain the required omega-shaped notch of the metal film.
2. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 1, wherein the method comprises the following steps:
in the step 2, the number of the single-circle points is according to the point distance d of the circular point sets with different curvatures i To determine that the number of the groups of groups,d i the formula needs to be satisfied: d, d i ＝d 0 ·r 0 /r i Wherein d 0 The point spacing of any split circular point set is 0.2mm less than or equal to d 0 ≤0.5mm；r 0 Is equal to d 0 Radius of corresponding circle, r i Is equal to d i Corresponding to the radius of the circle.
3. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 2, wherein the method comprises the following steps:
the dot spacing d i The method meets the following conditions: d is more than or equal to 0.2mm i ≤0.5mm。
4. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 3, wherein the method comprises the following steps of:
step 3, comprehensively importing the point clusters into CAD drawing software, and realizing omega-shaped single-line point set drawing by adopting a decomposition and trimming function; the combination and fitting functions are adopted to realize the conversion from the omega-shaped single-line point set to the multi-segment line fitting, and the design of the omega-shaped single-line laser etching path is realized.
5. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 4, wherein the method comprises the following steps:
in step 4, the single lines with different phases are single lines with pointing distribution phase difference, and the phase P of the single lines i According to formula P i ＝2π[r i +(i-1)△D]·(i-1)/(d i N) performing a calculation, wherein: Δd is the distance between two single lines; i is the sequence number of single lines in the notched matrix, and the value set of i is { i ≡Z|1 +.i +.n }; n is the number of score matrix element wires.
6. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 5, wherein the method comprises the following steps:
in step 4, the offset distance offset=n·Δdof the offset copy; the offset copy number N offset ＝[H-(N-1)△D]/(N·△D)，Wherein: h is the width of the score.
7. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 5 or 6, wherein the method comprises the following steps of:
the distance DeltaD between the two single lines needs to satisfy: delta D is more than or equal to 0.01mm and less than or equal to 0.1mm.
8. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 7, wherein the method comprises the following steps:
in step 5, the picosecond laser processing parameters include parameter settings of laser power, laser scanning rate, laser processing times, laser turn-on delay, laser turn-off delay and scanner jump delay.
9. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 8, wherein the method comprises the following steps of:
the delay selection range of the opening and closing of the laser is 120-180 mu s; the jump delay selection range of the scanner is 200 mu s-800 mu s.
10. The picosecond laser etching method for the omega-shaped notch of the metal diaphragm according to claim 9, wherein the method comprises the following steps:
the step 7 is specifically as follows: firstly drawing a local laser etching path of an omega-shaped notch to be corrected by adopting CAD drawing software through analyzing the notch depth dispersion difference at different positions and the data of the bottom inclination, and then dividing the local laser etching path to form a plurality of etching paths gradually transiting to a laser termination point, wherein the number of the etching paths is set according to the notch depth to be corrected, and the machining times of a single etching path is ensured to be less than or equal to 10; finally, the picosecond processing technology is used for processing the omega-shaped notch of the metal diaphragm, and picosecond laser etching processing of the omega-shaped notch of the metal diaphragm is completed, so that the required omega-shaped notch of the metal diaphragm is obtained.
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| ITMI20111389A1 (en) * | 2011-07-26 | 2013-01-27 | Donadon Safety Discs And Devices S R L | METHOD FOR PRODUCING BREAKAGE / SECURITY DISCS |
| TWI532560B (en) * | 2015-01-09 | 2016-05-11 | 位元奈米科技股份有限公司 | Laser etching method for transparent conductive plate and transparent conductive plate made therefrom |
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