CN113848620A - High accuracy and high stability mirror body mounting structure - Google Patents
High accuracy and high stability mirror body mounting structure Download PDFInfo
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- CN113848620A CN113848620A CN202111128555.0A CN202111128555A CN113848620A CN 113848620 A CN113848620 A CN 113848620A CN 202111128555 A CN202111128555 A CN 202111128555A CN 113848620 A CN113848620 A CN 113848620A
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- 238000009434 installation Methods 0.000 claims abstract description 20
- 229910001374 Invar Inorganic materials 0.000 claims description 40
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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Abstract
The invention discloses a high-precision and high-stability mirror body installation structure, wherein a mirror body is fixedly installed in a shell in a three-point supporting mode through three flexible structure units, each flexible structure unit comprises an end flexible structure unit and two side flexible structure units respectively arranged on two sides of the mirror body, each flexible structure unit comprises a mirror body connecting part, an elastic part and a shell connecting part, each elastic part is installed on an installation part through the mirror body connecting part, a sensor is installed on the installation part, an actuator is installed on the mirror body connecting part, installation surfaces of the sensor and the actuator are parallel to a working surface of the mirror body, and the sensor and the actuator form a control closed loop. The invention can ensure the position precision of the dichroic mirror surface under a certain working condition and has high stability; the adjustment process is automatic, and the position precision of the dichroic mirror can be simply and efficiently ensured; the structure is simple, the influence on the working mirror surface of the dichroic mirror is small, and the method has the characteristics of high positioning precision and strong reliability.
Description
Technical Field
The invention relates to a positioning, mounting, connecting and adjusting structure of a mirror body, relates to the related technical field of telescope spectrometers, and particularly relates to the situation that a dichroic mirror used by the telescope spectrometer requires the working mirror surfaces of a plurality of mirrors to keep accurate relative positions.
Background
Among the terminal instruments of the optical telescope, the imaging spectrometer is an indispensable instrument. The dichroic mirror is an important component of the spectrometer and is responsible for separating the light into different wavelength bands for further analysis. In order to separate light of certain wavelength bands from a specified position, it is necessary that several dichroic mirrors maintain an accurate relative positional relationship in a housing, and that the dichroic mirrors meet optical performance requirements in the event of being subjected to gravity, impact, environmental temperature change, and the like.
The existing dichroic mirror mounting mode is that the dichroic mirror is simply arranged in a mirror chamber, and then the mirror chamber is connected with a shell by using screws, so that the flexibility is lacked, the mirror surface deformation is large when the mirror surface is subjected to gravity, impact and environmental temperature change, and the optical performance requirement cannot be met after the mirror surface exceeds the allowable range.
Disclosure of Invention
In view of the above problems in the prior art, the present invention provides a high-precision and high-stability mirror body mounting structure, which can maintain the position stability of a dichroic mirror under common working conditions by positioning and connecting the dichroic mirror and a housing using a flexible structure, and can finely adjust the position of the dichroic mirror by forming a closed-loop feedback through a sensor and an actuator. The installation and connection mode is simple in structure and high in stability and reliability.
In order to achieve the purpose, the invention provides the following technical scheme:
the technical scheme adopted by the invention is as follows:
a high-precision and high-stability mirror body installation structure is disclosed, wherein a mirror body is installed in a shell, the mirror body is fixedly installed in the shell in a three-point supporting mode through three flexible structure units, each flexible structure unit comprises an end portion flexible structure unit and two side portion flexible structure units respectively arranged on two sides of the mirror body, each flexible structure unit comprises a mirror body connecting portion, an elastic portion and a shell connecting portion, one end of each elastic portion is fixedly connected with the mirror body connecting portion, the other end of each elastic portion is fixedly connected with the shell connecting portion, installation pieces are respectively bonded on the mirror body according to the positions supported by the three points, the elastic portions are installed on the installation pieces through the mirror body connecting portions, sensors are installed on the installation pieces, actuators are installed on the mirror body connecting portions, installation surfaces of the sensors and the actuators are parallel to a working surface of the mirror body, and the sensors and the actuators form a control closed loop, the shell connecting part of the side flexible structure unit is fixedly arranged on the side surface of the shell, and the shell connecting part of the end flexible structure unit is fixedly arranged on the upper end surface or the lower end surface of the shell.
Further, the installed part is an L-shaped invar steel mat.
Furthermore, the mirror body connecting part adopts an invar steel pad, and the elastic part is a triangular annular spring piece.
Furthermore, the shell connecting part of the side flexible structure unit is a ladder-shaped invar pad, one side of the ladder-shaped invar pad is fixedly connected with the elastic part, and the other side of the ladder-shaped invar pad is fixed on the side surface of the shell.
Furthermore, the shell connecting part of the end part flexible structure unit is a ladder-type invar steel pad, the inclined plane of the ladder-type invar steel pad is fixedly connected with the elastic part, and the platform body of the ladder-type invar steel pad is fixed on the upper end surface or the lower end surface of the shell.
Furthermore, the two side flexible structure units are symmetrically arranged at one third of the positions of the two sides of the long side of the mirror body, and the end flexible structure unit is arranged at the middle position of the short side of the mirror body.
Further, the mirror body is a dichroic mirror.
Further, the actuator is a piezoelectric ceramic actuator.
Compared with the prior art, the invention has the beneficial effects that:
1. when the dichroic mirror is subjected to vibration, impact and environmental temperature change in a transmission mounting mode, the position of the mirror surface can drift greatly, and the requirement on optical performance cannot be met. The invention adopts the flexible structure to install and position the dichroic mirror, can ensure the position precision of the mirror surface of the dichroic mirror under certain working conditions, and has high stability.
2. And a sensor system consisting of a displacement sensor and an angle sensor is used for acquiring the position information of the dichroic mirror in real time, the position information and the actuator are subjected to closed-loop control, and the position of the dichroic mirror is adjusted by the adjusting actuator according to the information fed back by the sensor. The adjustment process is automatic, and the position precision of the dichroic mirror can be simply and efficiently ensured.
3. The invention has the characteristics of simple structure, small influence on the working mirror surface of the dichroic mirror, high positioning precision and strong reliability.
Drawings
FIG. 1 is a side perspective view of a high precision and high stability mirror mounting structure;
FIG. 2 is a perspective view of a high precision and high stability scope mounting structure;
FIG. 3 is a schematic structural view of a side flexible structural unit;
FIG. 4 is a schematic structural view of an end flexible structural unit;
FIG. 5 is a diagram of the attachment structure of the flexible structural unit to the mirror body;
FIG. 6 is an enlarged view of a portion of the structure of FIG. 5;
FIG. 7 is a control schematic diagram of a closed loop system of sensors and actuators.
In the figure: 1-shell, 2-dichroic mirror, 3-cuboid invar pad, 4-triangular annular spring piece, 5-ladder invar pad, 6-ladder invar pad, 7-L invar pad, 8-displacement sensor, 9-angle sensor and 10-actuator.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The structure of the present invention is particularly suitable for the installation of dichroic mirrors used in telescope spectrometers, and therefore, the following embodiments are described by taking the installation of dichroic mirrors used in telescope spectrometers as an example. As shown in fig. 1-2, in a telescope spectrometer, several rectangular dichroic mirrors 2 are mounted in a housing 1 in an angular tilted relationship required for optical performance, while maintaining precise relative positions.
As shown in fig. 1-2, the mirror mounting structure of the present embodiment includes three flexible structural units, a dichroic mirror 2 is positioned, mounted and adjusted by the three flexible structural units, and the dichroic mirror 2 is fixedly mounted in the housing 1 in a three-point supporting manner by the three flexible structural units. This embodiment adopts flexible construction to install the location to the dichroic mirror, can guarantee the position accuracy of dichroic mirror surface under certain operating mode, has very high stability.
The three flexible structural units include one end flexible structural unit as shown in fig. 4 and two side flexible structural units as shown in fig. 3 which are respectively arranged at both sides of the mirror body. The flexible structure unit comprises a mirror body connecting part, an elastic part and a shell connecting part, wherein one end of the elastic part is fixedly connected with the mirror body connecting part, and the other end of the elastic part is fixedly connected with the shell connecting part. The housing connecting portion of the side flexible structure unit is fixedly mounted on the side surface of the housing 1, and the housing connecting portion of the end flexible structure unit is fixedly mounted on the upper end surface or the lower end surface of the housing 1.
As shown in fig. 5, the dichroic mirror 2 has attachment members bonded thereto at positions supported by the three points, and the elastic portion is attached to the attachment members via the mirror connecting portions. In this embodiment, the mounting member is preferably an L-shaped invar pad 7. As shown in fig. 6, a displacement sensor 8 and an angle sensor 9 are mounted on the L-shaped invar pad 7, an actuator 10 is mounted on the mirror connecting portion, and mounting surfaces of the displacement sensor 8, the angle sensor 9 and the actuator 10 are parallel to a working surface of the dichroic mirror 2, so that the three form a control closed loop as shown in fig. 7. In the embodiment, the position information of the dichroic mirror is acquired in real time by using a sensor system consisting of the displacement sensor 8 and the angle sensor 9, closed-loop control is performed on the position information and the actuator 10, the position of the dichroic mirror 2 is adjusted by the adjusting actuator 10 according to information fed back by the sensor, when the dichroic mirror is impacted, vibrated or deformed by temperature exceeding general working conditions, the sensor transmits the deviation information of the dichroic mirror to the control system in real time, and then the position of the dichroic mirror is adjusted by the actuator to recover the normal working posture, the adjusting process is automatic, and the position precision of the dichroic mirror can be simply and efficiently ensured.
Specifically, as shown in fig. 3, the side flexible structure unit includes a rectangular invar pad 3, a triangular ring-shaped spring plate 4 and a ladder-shaped invar pad 5 connected to the side of the housing, and the three are connected by screws. The ladder-shaped invar steel pad 5 is ladder-shaped, one side is fixedly connected with the triangular annular spring piece 4 by two screws, and the side vertical to the triangular annular spring piece is fixed on the shell 1 by two screws. One end of the cuboid invar pad 3 and the triangular annular spring piece 4 is fixed on the L-shaped invar pad 7 by a screw, and the ladder-shaped invar pad 5 is fixed on the side surface of the dichroic mirror shell 1 by two screws. Specifically, as shown in fig. 4, the end portion flexible structure unit includes a rectangular parallelepiped invar steel pad 3, a triangular annular spring piece 4, and a ladder-shaped invar steel pad 6 connected to the end face of the housing, and the three are connected by screws. The trapezoidal invar steel pad 6 is a trapezoidal platform, the inclined plane is connected with the triangular annular spring piece 4, and the square platform body is fixed on the upper end surface or the lower end surface of the shell 1 by four screws. One end of the cuboid invar pad 3 and the triangular annular spring piece 4 is fixed on the L-shaped invar pad 7 by one screw, and the ladder-type invar pad 6 is fixed on the upper or lower end surface of the dichroic mirror shell 1 by four screws. The flexible structure and the invar steel pad, the invar steel pad and the shell are connected by screws, so that the position accuracy of the installation and connection of the dichroic mirror is ensured.
Preferably, as shown in FIG. 5, the dichroic mirror 2 is mounted and positioned in a three-point manner, and three L-shaped invar pads 7 are bonded to the dichroic mirror 2, two of which are bonded to one third of the side surfaces of the dichroic mirror 2, and the other is bonded to the middle of the end surfaces of the dichroic mirror 2. The L-shaped invar pad is bonded with the dichroic mirror, so that the influence on the working surface of the dichroic mirror is reduced as much as possible.
A displacement sensor 8 and an angle sensor 9 are mounted on the surface of the L-shaped invar pad parallel to the working surface of the dichroic mirror for acquiring the position information of the mirror surface of the dichroic mirror in real time, and the mounting positions of the displacement sensor 8, the angle sensor 9 and the actuator 10 are as shown in fig. 6. The closed-loop control is formed by using a displacement and angle sensor and a piezoelectric ceramic adjusting actuator, the drifting condition of the mirror surface is monitored in real time, and the actuator is used for adjusting the position of the mirror surface of the dichroic mirror, and when the dichroic mirror deviates from the original position, the dichroic mirror is adjusted to the original working position so as to be always kept in an allowable working range.
In summary, the present invention discloses a high precision and high stability mirror body mounting structure, wherein a dichroic mirror is fixed on a housing through three flexible structures, so as to ensure the position stability under the conditions of vibration, impact and environmental temperature change. The flexible structure is composed of two different invar steel pads and a triangular spring piece which are connected together through screws, and two ends of the flexible structure are respectively fixed on the shell and the 'L-shaped' invar steel pad which is bonded with the dichroic mirror. And two L-shaped invar pads are symmetrically bonded on two sides of the long side of the dichroic mirror by glue in a three-point supporting mode, and the other L-shaped invar pad is bonded in the middle of the short side of the dichroic mirror. And a high-precision displacement sensor and an angle sensor are arranged on the invar steel pad surface, and the displacement and rotation conditions of the mirror surface of the dichroic mirror are monitored in real time. When the displacement and rotation of the dichroic mirror surface are too large to exceed the allowable range, the position of the dichroic mirror is adjusted by an actuator, and the position accuracy of the dichroic mirror is ensured. The invention utilizes the flexible structure to connect and fix the dichroic mirror and the shell, ensures the position of the dichroic mirror in the shell to be stable, collects displacement rotation data of the mirror surface through the high-precision sensor, and forms a control closed loop by matching with the actuator, so that the working mirror surface of the dichroic mirror can be automatically adjusted to the original position under the conditions of vibration, impact, temperature change and the like.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A high-precision and high-stability mirror body installation structure is characterized in that a mirror body is fixedly installed in a shell in a three-point supporting mode through three flexible structure units, each flexible structure unit comprises an end portion flexible structure unit and two side portion flexible structure units respectively arranged on two sides of the mirror body, each flexible structure unit comprises a mirror body connecting portion, an elastic portion and a shell connecting portion, one end of each elastic portion is fixedly connected with the mirror body connecting portion, the other end of each elastic portion is fixedly connected with the shell connecting portion, installation pieces are respectively bonded on the mirror body according to the positions of the three-point supporting, each elastic portion is installed on the installation pieces through the mirror body connecting portions, sensors are installed on the installation pieces, actuators are installed on the mirror body connecting portions, and installation surfaces of the sensors and the actuators are parallel to a working surface of the mirror body, the sensor and the actuator form a control closed loop, the shell connecting part of the side flexible structure unit is fixedly arranged on the side surface of the shell, and the shell connecting part of the end flexible structure unit is fixedly arranged on the upper end surface or the lower end surface of the shell.
2. A high precision and high stability mirror body mounting structure according to claim 1, wherein said mounting member is an L-shaped invar pad.
3. A high precision and high stability mirror body installation structure as claimed in claim 1, wherein said mirror body connecting portion is made of invar pad, and said elastic portion is a triangular ring-shaped spring leaf.
4. A high precision and high stability mirror body mounting structure according to claim 3, wherein the housing connecting portion of the side flexible structure unit is a ladder-shaped invar pad, one side of which is fixedly connected with the elastic portion, and the other side is fixed on the side of the housing.
5. A high precision and high stability mirror body installation structure according to claim 3, wherein the housing connection portion of the end flexible structure unit is a ladder-type invar pad, the inclined surface thereof is fixedly connected with the elastic portion, and the stage body thereof is fixed on the upper end surface or the lower end surface of the housing.
6. A high precision and high stability mirror mounting structure according to claim 1, wherein two of said side flexible structure units are symmetrically disposed at one third of both sides of the long side of the mirror, and one of said end flexible structure units is disposed at the middle of the short side of the mirror.
7. A high accuracy and high stability mirror mounting structure according to claim 1, wherein said mirror is a dichroic mirror.
8. A high precision and high stability mirror mounting structure according to claim 1, wherein said actuator is a piezoelectric ceramic actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111128555.0A CN113848620A (en) | 2021-09-26 | 2021-09-26 | High accuracy and high stability mirror body mounting structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111128555.0A CN113848620A (en) | 2021-09-26 | 2021-09-26 | High accuracy and high stability mirror body mounting structure |
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| CN113848620A true CN113848620A (en) | 2021-12-28 |
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| CN202111128555.0A Pending CN113848620A (en) | 2021-09-26 | 2021-09-26 | High accuracy and high stability mirror body mounting structure |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243359A (en) * | 2011-06-20 | 2011-11-16 | 北京空间机电研究所 | Flexible supporting method of large-aperture lens |
| CN103969788A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Lateral flexible supporting structure of space optical remote sensor circulator reflector |
| CN105137562A (en) * | 2015-10-15 | 2015-12-09 | 中国科学院长春光学精密机械与物理研究所 | Optical element three-degree-of-freedom micro displacement adjusting device |
| CN107703603A (en) * | 2017-09-30 | 2018-02-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of flexible support structure for being applied to back of the body inspection formula rectangle speculum |
| CN109298505A (en) * | 2018-10-10 | 2019-02-01 | 中国航空工业集团公司洛阳电光设备研究所 | Split type metal reflecting mirror and angle adaptive regulation method with flexible installing structure |
| CN109669253A (en) * | 2019-01-31 | 2019-04-23 | 中国科学院西安光学精密机械研究所 | Large caliber reflecting mirror vibration damping flexible support structure and mirror assembly |
| CN110727078A (en) * | 2019-11-27 | 2020-01-24 | 长光卫星技术有限公司 | Single-point supporting flexible structure suitable for medium and small-caliber space reflector |
-
2021
- 2021-09-26 CN CN202111128555.0A patent/CN113848620A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243359A (en) * | 2011-06-20 | 2011-11-16 | 北京空间机电研究所 | Flexible supporting method of large-aperture lens |
| CN103969788A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Lateral flexible supporting structure of space optical remote sensor circulator reflector |
| CN105137562A (en) * | 2015-10-15 | 2015-12-09 | 中国科学院长春光学精密机械与物理研究所 | Optical element three-degree-of-freedom micro displacement adjusting device |
| CN107703603A (en) * | 2017-09-30 | 2018-02-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of flexible support structure for being applied to back of the body inspection formula rectangle speculum |
| CN109298505A (en) * | 2018-10-10 | 2019-02-01 | 中国航空工业集团公司洛阳电光设备研究所 | Split type metal reflecting mirror and angle adaptive regulation method with flexible installing structure |
| CN109669253A (en) * | 2019-01-31 | 2019-04-23 | 中国科学院西安光学精密机械研究所 | Large caliber reflecting mirror vibration damping flexible support structure and mirror assembly |
| CN110727078A (en) * | 2019-11-27 | 2020-01-24 | 长光卫星技术有限公司 | Single-point supporting flexible structure suitable for medium and small-caliber space reflector |
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Application publication date: 20211228 |