CN113832433A - Coating carrier assembly of gaseous organic coating material - Google Patents

Coating carrier assembly of gaseous organic coating material Download PDF

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Publication number
CN113832433A
CN113832433A CN202111203357.6A CN202111203357A CN113832433A CN 113832433 A CN113832433 A CN 113832433A CN 202111203357 A CN202111203357 A CN 202111203357A CN 113832433 A CN113832433 A CN 113832433A
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CN
China
Prior art keywords
gas distribution
distribution pipe
pipe
coating material
organic coating
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Pending
Application number
CN202111203357.6A
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Chinese (zh)
Inventor
姜翠宁
李小彭
高文波
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Zhejiang Shengbo Intelligent Equipment Co ltd
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Zhejiang Shengbo Intelligent Equipment Co ltd
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Application filed by Zhejiang Shengbo Intelligent Equipment Co ltd filed Critical Zhejiang Shengbo Intelligent Equipment Co ltd
Priority to CN202111203357.6A priority Critical patent/CN113832433A/en
Publication of CN113832433A publication Critical patent/CN113832433A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a coating carrier assembly of a gaseous organic coating material, which comprises an upper air inlet pipe and an air distribution pipe, wherein the upper air inlet pipe and the air distribution pipe are arranged in a heating device and are used for driving the gaseous organic coating material to be attached to the surface of a base material, the air inlet pipe is communicated with high-pressure air, the air distribution pipe is communicated with the air inlet pipe, and a binary air equalizing structure is arranged on the air distribution pipe. By adopting the structure, the coating carrier component provides additional power for the gaseous organic coating material in the heating device, so that the vaporized organic coating material can be uniformly and quickly attached to the base material through the nozzle, and the coating uniformity is effectively improved.

Description

Coating carrier assembly of gaseous organic coating material
[ technical field ] A method for producing a semiconductor device
The invention relates to the field of vacuum coating, in particular to a coating carrier component of a gaseous organic coating material.
[ background of the invention ]
The conventional film preparation methods in a vacuum state include magnetron sputtering, evaporation, Plasma Enhanced Chemical Vapor Deposition (PECVD), and the like, and different film coating modes are selected according to the characteristics of raw materials. For some cases where the coating material is an organic liquid, the coating method in a vacuum state generally adopts a PECVD method, and some methods also adopt a method of directly coating the surface of the substrate in an atmospheric environment to prepare a thin film.
The film is prepared by adopting a PECVD mode in a vacuum state, and particularly when the film is coated on a flexible substrate, the preparation mode of the film has certain pollution to the interior of a box body (a vacuum chamber) and a transmission system, so that the substrate is damaged in the winding and walking process, and the relative efficiency of the substrate is reduced. In order to improve the efficiency, the thickness of one-time film forming needs to be increased, the number of PECVD sources is increased, so that the winding system of the equipment becomes complicated, the film is easy to wrinkle in the winding process, for the stacked film layers formed by different materials, the sources interfere with each other to different degrees, the trouble caused by solving the interference problem also causes the equipment to become large, the winding system becomes complicated, and the equipment processing difficulty increases steeply.
If the film layer is prepared in the atmosphere by a coating mode, the overall performance of the film layer cannot reach the performance of the film layer prepared in a vacuum state, and if the film layer is coated in the vacuum state, good film layer performance cannot be obtained, the cavity is seriously polluted, the efficiency is low, and an even and thin film layer cannot be obtained.
In order to solve the technical problems, the applicant specially develops an atomizing and heating device for vacuum coating with wide application range and high efficiency, and the invention is provided for solving the problem of insufficient coating uniformity.
[ summary of the invention ]
The invention aims to provide a coating carrier component for uniformly coating a gaseous organic coating material.
The purpose of the invention is realized as follows:
the utility model provides a gaseous state organic coating material's coating carrier subassembly, is including locating in heating device and being used for driving gaseous state organic coating material and attaching to last trachea and gas distribution pipe on the substrate surface, the intake pipe is linked together with high-pressure gas, the gas distribution pipe with the intake pipe is linked together, be equipped with binary system gas-equalizing structure on the gas distribution pipe.
By adopting the structure, the coating carrier component provides additional power for the gaseous organic coating material in the heating device, so that the vaporized organic coating material can be uniformly and quickly attached to the base material through the nozzle, and the coating uniformity is effectively improved.
The gas distribution pipe comprises a first gas distribution pipe, a second gas distribution pipe and a third gas distribution pipe which are sequentially attached from back to front, the end parts of the first gas distribution pipe, the second gas distribution pipe and the third gas distribution pipe are provided with plugs, and the binary gas equalizing structure comprises a first gas distribution inlet arranged at the rear side of the first gas distribution pipe, a first gas distribution outlet arranged at the front side of the first gas distribution pipe, a second gas distribution inlet arranged at the rear side of the second gas distribution pipe and corresponding to the first gas distribution outlet, a second gas distribution outlet arranged at the front side of the second gas distribution pipe, a third gas distribution inlet arranged at the rear side of the third gas distribution pipe and corresponding to the second gas distribution outlet, and a main gas distribution outlet arranged at the front side of the third gas distribution pipe. The binary gas-equalizing structure can make the vaporized organic coating material be more uniformly attached to the substrate.
The carrier assembly for coating the gaseous organic coating material has 2 first gas distribution inlets, 4 first gas distribution outlets and 4 second gas distribution inlets, 8 second gas distribution outlets and 8 third gas distribution inlets, and 16 total gas distribution outlets, so that the gaseous organic coating material can form a jet flow which is large enough and uniform to ensure that the gaseous organic coating material has enough pressure and is uniformly sprayed on the surface of the substrate.
According to the carrier assembly for coating the gaseous organic coating material, the output end of the air inlet pipe is provided with the tee joint, and the two output ends of the tee joint are provided with the air inlet branch pipes communicated with the first air distribution inlet, so that high-pressure air enters the air distribution pipe in two ways to uniformly disperse air inlet pressure.
The carrier component for coating the gaseous organic coating material further comprises an isolation cover covering the outer side of the heating device, and a heat insulation plate is arranged between the isolation cover and the heating device, so that the heat of the heating device is prevented from being diffused outwards, and the heat efficiency of the heating device is improved.
According to the carrier assembly for coating the gaseous organic coating material, the top edge of the isolation cover is provided with the air curtain vent hole communicated with the external high-pressure air source, and high-pressure air is sprayed towards the substrate through the air curtain vent hole, so that the annular closed air curtain is formed at the top edge of the isolation cover, the gaseous organic coating material is prevented from floating outwards, the pollution to a vacuum chamber is reduced, and the carrier assembly is clean and environment-friendly.
According to the carrier assembly for coating the gaseous organic coating material, the heating device comprises the heating box body communicated with the atomizing device and the heating assembly arranged on the heating box body and used for heating the heating box body, and the nozzle is arranged on one side, facing the substrate conveying device, of the heating box body. The heating assembly can rapidly heat the heating box body, so that the atomized liquid organic coating material is rapidly vaporized in the heating box body, and the vaporized organic coating material is ejected from the nozzle to the substrate on the substrate conveying device under the driving of the invention.
[ description of the drawings ]
The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings, in which:
FIG. 1 is an exploded view of the present invention;
FIG. 2 is one of the exploded structural schematic diagrams of the binary gas-equalizing structure according to the present invention;
FIG. 3 is a second exploded view of the binary gas-equalizing structure according to the present invention;
FIG. 4 is a schematic view of the structure of the vent holes of the air curtain of the present invention;
fig. 5 is a reference diagram of the use state of the present invention.
[ detailed description ] embodiments
The utility model provides a gaseous state organic coating material's coating carrier subassembly, is including locating in heating device 22 and being used for driving gaseous state organic coating material and attaching to substrate 10 on the surface intake pipe 231 and gas distribution pipe 232, intake pipe 231 is linked together with high-pressure gas, and gas distribution pipe 232 is linked together with intake pipe 231, is equipped with the equal gas structure of binary system on the gas distribution pipe 232.
In order to make the vaporized organic coating material more uniformly pass through the nozzle 2211 and be attached to the substrate 10, the gas distribution pipe 232 includes a first gas distribution pipe 2321, a second gas distribution pipe 2322 and a third gas distribution pipe 2323 which are sequentially attached from back to front, the ends of the first gas distribution pipe 2321, the second gas distribution pipe 2322 and the third gas distribution pipe 2323 are provided with a blocking head 2324, the binary gas equalizing structure includes a first gas distribution inlet 2325 arranged at the rear side of the first gas distribution pipe 2321, a first gas distribution outlet 2326 arranged at the front side of the first gas distribution pipe 2321, a second gas distribution inlet 2327 arranged at the rear side of the second gas distribution pipe 2322 and positioned corresponding to the first gas distribution outlet 2326, a second gas distribution outlet 2328 arranged at the front side of the second gas distribution pipe 2322, a third gas distribution inlet 2329 arranged at the rear side of the third gas distribution pipe 2323 and positioned corresponding to the second gas distribution outlet 2328, and a total gas distribution outlet 2320 arranged at the front side of the third gas distribution pipe 2323.
In order to form a sufficiently large and uniform jet flow of the gaseous organic coating material at the slit of the nozzle 2211, the number of the first gas distribution inlets 2325 is 2, the number of the first gas distribution outlets 2326 and the second gas distribution inlets 2327 is 4, the number of the second gas distribution outlets 2328 and the third gas distribution inlets 2329 is 8, and the number of the gas distribution total outlets 2320 is 16.
In order to uniformly disperse the intake pressure, the output end of the intake pipe 231 is provided with a tee 233, and two output ends of the tee 233 are provided with intake branch pipes 234 communicated with the first air distribution inlet 2325. The outside of the heating box 221 is provided with a high pressure joint 2310 for connecting the input end of the air inlet pipe 231, and the external high pressure air source is directly connected with the high pressure joint 2310. An external high-pressure air source enters the air distribution pipe 232 through the air inlet pipe 231 and is sprayed into the heating box body 221 through the air distribution main outlet 2320, so that the vaporized organic coating material is driven to be uniformly sprayed out from the nozzle 2211 onto the surface of the substrate 10 on the substrate conveying device 1.
In order to prevent the heat of the heating device 22 from being diffused outward, the carrier assembly for coating a gaseous organic coating material further includes a shielding cover 230 covering the outside of the heating device 22, and a heat insulating plate 2301 is disposed between the shielding cover 230 and the heating device 22.
To prevent the gaseous organic coating material from scattering outward and reduce the contamination of the vacuum chamber 100, the top edge of the shielding cover 230 is provided with an air curtain ventilation hole 2302 communicated with an external high pressure air source. External high pressure air is injected through the air curtain vents in the direction of the substrate 10, thereby forming an annular closed air curtain at the top edge of the cage 230.
The heating device 22 includes a heating box 221 communicated with the atomizing device 21, and a heating assembly 222 provided on the heating box 221 and used for heating the heating box 221, and a nozzle 2211 is provided on one side of the heating box 221 facing the substrate conveying device 1. The heating unit 222 can rapidly heat the heating chamber 221, so that the fine particle-shaped liquid organic coating material is rapidly vaporized in the heating chamber 221.
When the vacuum coating device is used, the vacuumizing device 101 firstly vacuumizes the vacuum chamber 100, so that the coating process is carried out in a vacuum state. Then the atomizing device 21 and the heating device 22 are started to work, the atomizing device 21 works to atomize the liquid organic coating material into tiny particles with a size less than 20 μm and spray the tiny particles into the heating box 221, at this time, the heating assembly 222 heats the heating box 221 to enable the internal temperature to reach a high temperature of 400 ℃, so that the tiny particle-shaped liquid organic coating material is quickly vaporized in the heating box 221 and quickly evaporated into gas molecules with pressure, at this time, an external high-pressure gas source enters the gas distribution pipe 232 through the gas inlet pipe 231 and is sprayed into the heating box 221 through the gas distribution main outlet 2320, so that the vaporized organic coating material is driven to be uniformly sprayed out to the surface of the substrate 10 wound on the substrate conveying device 1 through the nozzle 2211, at this time, the gaseous organic coating material is uniformly attached to the surface of the substrate 10, the substrate conveying device 1 cools the substrate 10, so that the gaseous organic coating material attached to the surface of the substrate 10 is liquefied and then cured or is directly desublimated, thereby being formed on the substrate 10.

Claims (7)

1. The utility model provides a gaseous state organic coating material's coating carrier subassembly, its characterized in that is including locating in heating device (22) and being used for driving gaseous state organic coating material and attaching to last intake pipe (231) and gas distribution pipe (232) on substrate (10) surface, intake pipe (231) are linked together with high-pressure gas, gas distribution pipe (232) with intake pipe (231) are linked together, be equipped with binary system gas-sharing structure on gas distribution pipe (232).
2. The carrier component for coating the gaseous organic coating material according to claim 1, wherein the gas distribution pipe (232) comprises a first gas distribution pipe (2321), a second gas distribution pipe (2322) and a third gas distribution pipe (2323) which are sequentially attached from back to front, the ends of the first gas distribution pipe (2321), the second gas distribution pipe (2322) and the third gas distribution pipe (2323) are provided with plugs (2324), the second gas distribution structure comprises a first gas distribution inlet (2325) arranged at the back side of the first gas distribution pipe (2321), a first gas distribution outlet (2326) arranged at the front side of the first gas distribution pipe (2321), a second gas distribution inlet (2327) arranged at the back side of the second gas distribution pipe (2322) and corresponding to the first gas distribution outlet (2326), a second gas distribution outlet (2328) arranged at the front side of the second gas distribution pipe (2322), and a second gas distribution outlet (2328) arranged at the back side of the third gas distribution pipe (2323) and corresponding to the second gas distribution outlet (2328) The gas distribution inlet (2329) and a gas distribution main outlet (2320) arranged at the front side of the third gas distribution pipe (2323).
3. The carrier component for coating a gaseous organic coating material according to claim 2, wherein the number of the first gas distribution inlets (2325) is 2, the number of the first gas distribution outlets (2326) and the second gas distribution inlets (2327) is 4, the number of the second gas distribution outlets (2328) and the third gas distribution inlets (2329) is 8, and the number of the gas distribution main outlets (2320) is 16.
4. The carrier assembly according to claim 2 or 3, wherein the outlet of the gas inlet pipe (231) is provided with a tee (233), and the two outlets of the tee (233) are provided with gas inlet branch pipes (234) communicated with the first gas distribution inlet (2325).
5. The carrier assembly for coating a gaseous organic coating material according to claim 1, further comprising a shielding cover (230) covering the outside of the heating unit (22), wherein a heat insulating plate (2301) is disposed between the shielding cover (230) and the heating unit (22).
6. The carrier module according to claim 5, wherein the top edge of the shielding case (230) is provided with air curtain ventilation holes (2302) which are communicated with an external high-pressure air source.
7. The carrier assembly for coating a gaseous organic coating material according to claim 1, wherein the heating device (22) comprises a heating chamber (221) in communication with the atomizing device (21) and a heating assembly (222) disposed on the heating chamber (221) for heating the heating chamber (221), and wherein the side of the heating chamber (221) facing the substrate transport device (1) is provided with a nozzle 2211.
CN202111203357.6A 2021-10-15 2021-10-15 Coating carrier assembly of gaseous organic coating material Pending CN113832433A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111203357.6A CN113832433A (en) 2021-10-15 2021-10-15 Coating carrier assembly of gaseous organic coating material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111203357.6A CN113832433A (en) 2021-10-15 2021-10-15 Coating carrier assembly of gaseous organic coating material

Publications (1)

Publication Number Publication Date
CN113832433A true CN113832433A (en) 2021-12-24

Family

ID=78965148

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111203357.6A Pending CN113832433A (en) 2021-10-15 2021-10-15 Coating carrier assembly of gaseous organic coating material

Country Status (1)

Country Link
CN (1) CN113832433A (en)

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