CN113830959A

CN113830959A - Front-end filtering device of vacuum pump

Info

Publication number: CN113830959A
Application number: CN202111266035.6A
Authority: CN
Inventors: 孙述; 任良为; 王春来; 金晨淦
Original assignee: Hengdian Group DMEGC Magnetics Co Ltd
Current assignee: Hengdian Group DMEGC Magnetics Co Ltd
Priority date: 2021-10-28
Filing date: 2021-10-28
Publication date: 2021-12-24

Abstract

The invention relates to the technical field of photovoltaic coating equipment and discloses a front-end filtering device of a vacuum pump. The front-end filtering device of the vacuum pump comprises a filtering box, and a heating assembly, a cooling assembly and a filtering assembly which are arranged in the filtering box. The filter box is provided with a water inlet, an air inlet and an air outlet which are communicated with each other, the water inlet is arranged at the bottom of the filter box and is used for communicating a water source, the air inlet is arranged on the side wall of the filter box, and the air outlet is arranged at the upper part of the filter box and is used for communicating a vacuum pump; a heating component, a cooling component and a filtering component are sequentially arranged between the air inlet and the air outlet from bottom to top; the heating assembly can heat water to atomize the water; cooling liquid is arranged in the cooling assembly; the tail gas can be sequentially subjected to water mist thermal reaction by the heating assembly, condensed by the cooling assembly to remove impurities, filtered by the filtering assembly and input into the vacuum pump after gas-liquid separation is completed. The front-end filtering device of the vacuum pump can ensure the effective operation environment of the vacuum pump and reduce the maintenance cost of the vacuum pump.

Description

Front-end filtering device of vacuum pump

Technical Field

The invention relates to the technical field of photovoltaic coating equipment, in particular to a front-end filtering device of a vacuum pump.

Background

Tubular PECVD equipment is one of the main equipment of film coating equipment in the photovoltaic industry at present. Along with the appearance of the aluminum oxide plating process, the conversion efficiency of the solar cell is improved to some extent, and the requirement on aluminum oxide equipment is increased more and more, but in the use process of the aluminum oxide equipment, because residual TMA gas after the process is pumped out by a vacuum pump, a large amount of dust can be generated in a vacuum pipeline, the vacuum pump can be blocked after the process is repeated for many times, the vacuum pump is blocked seriously, and the maintenance cost of the vacuum pump is higher. Therefore, a dust catcher is required to be additionally arranged at the front end of the vacuum pump, but the existing dust catcher has an unsatisfactory tail gas treatment effect, gas entering the vacuum pump still contains more impurities, the pump clamping period is short, and the capacity loss is still serious.

Therefore, a need exists for a vacuum pump front end filter assembly that solves the above problems.

Disclosure of Invention

Based on the above, the present invention is directed to provide a front-end filtering apparatus for a vacuum pump, which can filter the residual gas and reaction products in the alumina process more effectively, ensure the effective operation environment of the vacuum pump, improve the effective operation time of the vacuum pump, and reduce the maintenance cost of the vacuum pump.

In order to achieve the purpose, the invention adopts the following technical scheme:

a front-end filtering device of a vacuum pump comprises a filtering box, a heating assembly, a cooling assembly and a filtering assembly, wherein the heating assembly, the cooling assembly and the filtering assembly are arranged in the filtering box;

the filter box is provided with a water inlet, an air inlet and an air outlet which are communicated with each other, the water inlet is arranged at the bottom of the filter box and is used for being communicated with a water source, the air inlet is arranged on the side wall of the filter box, and the air outlet is arranged at the upper part of the filter box and is used for being communicated with a vacuum pump;

the heating assembly, the cooling assembly and the filtering assembly are sequentially arranged between the air inlet and the air outlet from bottom to top;

the heating component can heat water to atomize the water;

cooling liquid is arranged in the cooling assembly;

tail gas can in proper order by heating element carries out the hot reaction of water smoke, by cooling module condensation goes the impurity and by filtering component filters and inputs after accomplishing gas-liquid separation the vacuum pump.

As a preferable aspect of the front end filter device of the vacuum pump, the heating assembly includes:

a plurality of heating coil, set up along X axle direction interval, heating coil is spiral distribution along Z axle direction in the bottom of rose box.

As a preferable aspect of the front end filter device of the vacuum pump, the heating assembly further includes:

and the heat conduction fins are arranged on the heating coils along the Y-axis direction and the Z-axis direction in an array manner.

As a preferred scheme of the front-end filtering device of the vacuum pump, the heat conducting fins and the extension direction of the heating coil form an included angle.

As a preferable aspect of the front end filter device of the vacuum pump, the cooling module includes:

the cooling partition plate is arranged between the heating assembly and the filtering assembly, and is provided with a first through hole;

and the cooling pipeline is coiled on the cooling partition plate, and the cooling liquid is arranged in the cooling pipeline.

As a preferred scheme of vacuum pump front end filter equipment, filtering component includes filtering support and a filter screen section of thick bamboo, filtering support set up in the rose box, a filter screen section of thick bamboo set up in filtering support.

As a preferable scheme of the front end filter device of the vacuum pump, the front end filter device further comprises:

and the filtering pore plates are sequentially arranged between the cooling assembly and the filtering assemblies at intervals along the Z-axis direction, and each filtering pore plate is provided with a second through hole.

As a preferred scheme of the front-end filtering device of the vacuum pump, a spoiler is arranged on the lower surface of each filtering pore plate, and an included angle is formed between each spoiler and each filtering pore plate.

As a preferable scheme of the front-end filtering device of the vacuum pump, a plurality of spoilers are arranged on each filtering pore plate, the spoilers are arranged at intervals along the filtering pore plate, and the inclination directions of at least two spoilers relative to the filtering pore plate are different.

As a preferred scheme of the front-end filtering device of the vacuum pump, the front-end filtering device further comprises a valve and a controller, wherein the valve is connected with the controller, and the controller can control the start and stop of the valve and the start and stop duration of the valve.

The invention has the beneficial effects that:

the invention provides a front-end filtering device of a vacuum pump, which comprises a filtering box, and a heating assembly, a cooling assembly and a filtering assembly which are arranged in the filtering box. Because vacuum pump and rose box intercommunication, rose box internal gas pressure is close the vacuum, and because heating element is located the bottom of rose box, then can atomize from the water inlet gets into the water of box. Meanwhile, the residual tail gas in the alumina process stage enters the filter box from the gas inlet and is upwards input into the vacuum pump from the gas outlet along the filter box, and in the process, the tail gas firstly passes through the heating assembly and reacts with atomized water mist at high temperature. Atomized water smoke can contact tail gas completely, and high temperature environment helps the reaction of impurity and water smoke to combine in the tail gas, then through cooling module for the water smoke after the reaction condenses fast, is about to condense the impurity in the tail gas and breaks away from the tail gas, can also avoid containing too much moisture content in the tail gas and get into the vacuum pump and cause the damage to it. And finally, the tail gas subjected to water mist thermal reaction and condensed impurity removal passes through a filtering component, the filtering component filters out the residual large-particle impurities in the tail gas, and meanwhile, the water mist below can be prevented from entering a vacuum pump through a gas outlet to damage the vacuum pump. Under above-mentioned structure, tail gas just inputs to the vacuum pump in after the multichannel filtration process, can guarantee the effective operational environment of vacuum pump, improve the effective operating time of vacuum pump with more effectual filtration of aluminium oxide process stage residual gas and reaction product, reduce the maintenance cost of vacuum pump.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a front-end filter device of a vacuum pump provided in an embodiment of the present invention;

fig. 2 is a schematic view of the internal structure of a front-end filter device of a vacuum pump according to an embodiment of the present invention.

In the figure:

1. a filter box; 11. a base; 12. a lower box body; 13. an upper box body; 14. supporting legs; 15. a roller; 10. an air inlet; 20. an air outlet;

2. a heating assembly; 21. a heating coil; 22. a heat conductive fin;

3. a cooling assembly; 31. cooling the partition plate; 32. a cooling duct;

4. a filter assembly; 41. a filtration rack; 42. a filter screen cylinder;

5. a filter orifice plate; 51. a spoiler;

6. a water bottle; 7. a first support column; 8. and a second support column.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

As shown in fig. 1 and 2, the present embodiment provides a vacuum pump front end filtering apparatus, which includes a filtering tank 1, and a heating assembly 2, a cooling assembly 3 and a filtering assembly 4 disposed in the filtering tank 1; the filter box 1 is provided with a water inlet, an air inlet 10 and an air outlet 20 which are communicated with each other, the water inlet is arranged at the bottom of the filter box 1 and is used for communicating a water source, the air inlet 10 is arranged on the side wall of the filter box 1, and the air outlet 20 is arranged at the upper part of the filter box 1 and is used for communicating a vacuum pump; a heating component 2, a cooling component 3 and a filtering component 4 are sequentially arranged between the air inlet 10 and the air outlet 20 from bottom to top; the heating assembly 2 can heat water to atomize the water; cooling liquid is arranged in the cooling component 3; the tail gas can be in turn subjected to water mist thermal reaction by the heating component 2, condensed by the cooling component 3 to remove impurities, filtered by the filtering component 4 and input into the vacuum pump after gas-liquid separation is completed. Because vacuum pump and filter tank 1 intercommunication, the air pressure is close the vacuum in filter tank 1, and because heating element 2 is located the bottom of filter tank 1, then the water that gets into the box from the water inlet can atomize. Meanwhile, the residual tail gas in the alumina process stage enters the filter box 1 from the gas inlet 10 and is upwards input into the vacuum pump from the gas outlet 20 along the filter box 1, and in the process, the tail gas firstly passes through the heating assembly 2 and reacts with atomized water mist at a high temperature. Atomizing water smoke can contact tail gas completely, and high temperature environment helps the reaction of impurity and water smoke to combine in the tail gas, then through cooling module 3 for the water smoke after the reaction condenses fast, is about to condense the impurity in the tail gas and breaks away from the tail gas, can also avoid containing too much moisture content in the tail gas and get into the vacuum pump and cause the damage to it. And finally, the tail gas subjected to water mist thermal reaction and condensed impurity removal passes through the filtering component 4, the filtering component 4 filters out the residual large particle impurities in the tail gas, and meanwhile, the water mist below can be prevented from entering the vacuum pump through the gas outlet 20 to damage the vacuum pump. Under above-mentioned structure, tail gas just inputs to the vacuum pump in after the multichannel filtration process, can guarantee the effective operational environment of vacuum pump, improve the effective operating time of vacuum pump with more effectual filtration of aluminium oxide process stage residual gas and reaction product, reduce the maintenance cost of vacuum pump.

In this embodiment, as shown in fig. 1, the filter box 1 includes a base 11, a lower box 12 and an upper box 13, the lower box 12 is detachably connected to the base 11, the upper box 13 is detachably connected to an upper port of the lower box 12, the upper box 13 is communicated with the lower box 12, the filter assembly 4 is disposed in the upper box 13, and the heating assembly 2 and the cooling assembly 3 are disposed on the base 11. Preferably, the lower end of the base 11 is supported by a plurality of supporting legs 14, and the bottom of each supporting leg 14 is provided with a roller 15, so that the filtering device at the front end of the vacuum pump is arranged off the ground, the arrangement of a water inlet is convenient, and the movement and the carrying are convenient. The base 11, the upper box body 13 and the lower box body 12 are arranged in a split mode, so that the disassembly, the overhaul, the replacement and the like of parts in the filter box 1 are facilitated. Exemplarily, the base 11, the upper box 13 and the lower box 12 are detachably connected through bolts respectively, and sealing rings are arranged between the base 11 and the lower box 12 and between the upper box 13 and the lower box 12, so that the sealing performance of the filter box 1 is ensured, and air leakage and temperature leakage are avoided. Of course, in other embodiments, the connection manner between the base 11 and the lower case 12 and the connection manner between the upper case 13 and the lower case 12 may be set according to actual requirements, for example, by hoop connection or the like. Preferably, the filter box 1 is cylindrical. Be cylindric rose box 1 the installation of arranging of heating element 2, cooling module 3 and filtering component 4 of being convenient for, the flow of the air current of being convenient for simultaneously improves its mobility to improve tail gas filtration efficiency. Of course, in other embodiments, the shape of the filter box 1 may be designed according to actual requirements.

Preferably, as shown in fig. 1 and 2, the water inlet is connected to an external water bottle 6 through a pipe, and the water bottle 6 is used for providing an aqueous medium capable of reacting with each other when the residual trimethyl aluminum enters the cavity. Let the water of water-jug 6 get into rose box 1 through the pressure differential, directly atomize the influent water at the bottom through the high vacuum and the high temperature in rose box 1. More preferably, a valve is provided at the water inlet or the water outlet of the water bottle 6, by which the amount of water entering the filter tank 1 is controlled. The valve is preferably an electric control valve, the electric control valve is connected with a controller, and the controller controls the start-stop and start-stop duration of the valve; simultaneously, all be provided with pressure sensor in water-jug 6 and the rose box 1, pressure sensor is connected with signal receiver, and signal receiver and controller are connected, and according to the pressure in water-jug 6 and the rose box 1, the opening of control electric control valve is stopped and is stopped when opening to accurate control water yield effectively prevents that too much steam from getting into the vacuum pump, leads to vacuum pump secondary reaction and vacuum pump temperature shock. Illustratively, the electronically controlled valve is controlled to be alternately started and stopped for 0.2s of opening time and 1.8s of stopping time.

Specifically, heating element 2 includes a plurality of heating coil 21, and a plurality of heating coil 21 set up along X axle direction interval, and heating coil 21 is the spiral along Z axle direction and distributes in the bottom of rose box 1. Under above-mentioned structure, a plurality of heating coil 21 heating range is great, and can make temperature distribution even, is favorable to the distribution of air current and the distribution of water smoke to improve the hot reaction efficiency of water smoke of tail gas. More specifically, a heating medium flows through the heating coil 21, and both ends of the heating coil 21 respectively protrude out of the filter box 1 and communicate with an external heating device. Preferably, a temperature sensor is arranged at the bottom in the filter box 1, and the heating temperature of the heating assembly 2 is controlled according to the temperature sensed by the temperature sensor, so that the thermal reaction of the water mist is ensured to be carried out at the optimal temperature. Alternatively, the heating assembly 2 may comprise heating wires or rods arranged in the same or different manner as the heating coil 21, for example, at the bottom of the filter box 1. Of course, in other embodiments, the heating temperature of the heating assembly 2 ranges from 360 ℃ to 400 ℃ in the present embodiment. The Z-axis direction is the height direction of the filter box 1.

Preferably, the heating coil 21 is provided with heat conductive fins 22. The heat conduction fins 22 can effectively conduct the heat of the heating coil 21 to the surrounding environment, and the heat exchange efficiency is improved; meanwhile, the heat conducting fins 22 can also disturb the airflow, so that the reaction speed and the reaction completeness of the water mist and the tail gas are further improved. Specifically, the heat transfer fins 22 are provided in plural numbers, and the plural heat transfer fins 22 are arranged in an array in the Y-axis direction and the Z-axis direction on the plurality of heating coils 21. More preferably, the heat conducting fins 22 are arranged at an angle to the extension direction of the heating coil 21. The heat conduction fins 22 are obliquely arranged, so that the space can be saved, the space occupied by the filter box 1 is small, and a certain flow blocking effect can be achieved, so that the tail gas and the water mist can be fully mixed, and complete reaction is facilitated.

Further, the cooling module 3 includes a cooling partition plate 31 and a cooling pipeline 32, the cooling partition plate 31 is disposed between the heating module 2 and the filtering module 4, a first through hole is opened on the cooling partition plate 31, the cooling pipeline 32 is coiled on the cooling partition plate 31, and a cooling liquid is disposed in the cooling pipeline 32. The cooling partition plate 31 plays a role in supporting and fixing the cooling pipeline 32, and can increase the heat exchange area and improve the cooling efficiency. The water mist and the tail gas undergo thermal reaction and then rise along the filter tank 1, and are condensed under the cooling action of the cooling pipeline 32 and the cooling partition plate 31, and the condensed water can be attached to the cooling partition plate 31. In the process, the water mist removes part of impurities in the tail gas. Preferably, the cooling pipe 32 is disposed on the upper surface of the cooling partition plate 31 to prevent the cooling module 3 and the heating module 2 from affecting each other, so as to improve the cooling effect above the cooling module 3, and the tail gas can be continuously condensed in the rising process, thereby improving the impurity removing effect.

In this embodiment, the cooling partition plate 31 is fixed in the filter box 1 by a plurality of first support columns 7, and the first support columns 7 are vertically connected to the base 11 of the filter box 1. The lower box body 12 is convenient to disassemble, and after the lower box body 12 is disassembled, the heating assembly 2 and the cooling assembly 3 are convenient to overhaul, replace and the like. Of course, in other embodiments, the cooling partition 31 may be attached to the side wall of the filtration tank 1. Preferably, the first support column 7 is provided with a spoiler to improve airflow disturbance, so that the reaction completeness of the water mist and the tail gas is improved.

In order to fully condense after water mist and tail gas react, the front end filtering device of the vacuum pump further comprises a plurality of filtering pore plates 5, the filtering pore plates 5 are sequentially arranged between the cooling assembly 3 and the filtering assembly 4 at intervals along the Z-axis direction, a second through hole is formed in each filtering pore plate 5, airflow passes through the filtering pore plates 5 from the second through holes, and the number and the distribution positions of the second through holes are designed according to actual requirements. The arrangement of the filter orifice plate 5 can prolong the rise time of the water mist and the tail gas, so that the reaction is more complete; and the filtering pore plate 5 can improve the cooling efficiency, so that the tail gas and the water mist are gradually condensed in the rising process, and the impurity removing effect is better. In this embodiment, the filtering hole plates 5 are provided with three layers, and the three layers of filtering hole plates 5 are spaced and uniformly distributed. Of course, in other embodiments, the number of the filtering hole plates 5 can be set according to actual conditions. Preferably, the multi-layer filtering orifice 5 is fixed by a plurality of second supporting columns 8, and the second supporting columns 8 are vertically connected to the base 11 or vertically connected to the cooling partition 31.

Preferably, each lower surface of the filtering pore plate 5 is provided with a spoiler 51, and the spoilers 51 and the filtering pore plate 5 are arranged at an included angle. The spoiler 51 arranged at the included angle between the water mist and the filter orifice plate 5 can avoid the air flow from rising unimpededly, the residence time of the water mist and the tail gas below each layer of the filter orifice plate 5 can be prolonged, the water mist and the tail gas can impact the spoiler 51 in the rising time, the water mist and the tail gas are mixed more uniformly, and the reaction completion degree and the reaction efficiency are improved. More preferably, a plurality of spoilers 51 are provided on each perforated filtering plate 5, the plurality of spoilers are spaced apart from each other, and the inclination directions of at least two spoilers 51 with respect to the perforated filtering plate 5 are different. The spoilers 51 arranged in different inclined directions can increase air flow disturbance, and further prolong the retention time of water mist and tail gas below each layer of filtering pore plate 5, so that the reaction completeness and the reaction efficiency are improved. Optionally, the orientation of the spoiler 51 on one side of the filtering orifice 5 is opposite to that of the spoiler 51 on the other side, or the orientation of two adjacent spoilers 51 is opposite, that is, the spoilers 51 with different orientations are alternately arranged, so that the turbulence degree is greatly improved, and the impurity removing effect is improved. Of course, in other embodiments, the arrangement of the spoilers 51 can be designed according to actual conditions.

Further, the filter assembly 4 includes a filter holder 41 and a filter screen cylinder 42, the filter holder 41 being disposed in the filter tank 1, and the filter screen cylinder 42 being disposed in the filter holder 41. Specifically, the lower port of the upper case 13 is provided with a step portion, and the filter holder 41 can be loaded into the upper case 13 from the upper end and supported on the step portion of the upper case 13, facilitating the attachment and detachment and replacement of the filter assembly 4. More specifically, the filter screen cylinder 42 is formed by winding and wrapping a plurality of layers of filter screen wires, preferably 2 layers. Preferably, the filter wire mesh has a pore size of 0.5 cm. Of course, the number of layers and the aperture of the filtering steel wire mesh can be designed according to actual requirements. The filter assembly 4 with dense meshes can carry out secondary filtration on alumina and secondary products, block most fine particles, greatly protect the vacuum pump, and prevent the process residual gas from carrying out secondary reaction inside the vacuum pump to cause blockage.

The vacuum pump front end filtering device provided by the embodiment has internal heating, a complete panel cooling area, multi-layer partition filtering and a filter screen with dense meshes. The method not only can more effectively filter the residual gas and reaction products in the alumina process stage, but also can ensure that the vacuum pump obtains a long-term effective operation environment, greatly reduces the maintenance cost of the vacuum pump, effectively solves the problem of short maintenance period of the vacuum pump, and effectively controls the capacity loss caused by pump blockage. According to the actual test result, the pump clamping period can be effectively prolonged to 6-8 months.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. The front-end filtering device of the vacuum pump is characterized by comprising a filtering box (1), and a heating assembly (2), a cooling assembly (3) and a filtering assembly (4) which are arranged in the filtering box (1);

the water inlet, the air inlet (10) and the air outlet (20) which are communicated with each other are arranged on the filter box (1), the water inlet is arranged at the bottom of the filter box (1) and is used for being communicated with a water source, the air inlet (10) is arranged on the side wall of the filter box (1), and the air outlet (20) is arranged at the upper part of the filter box (1) and is used for being communicated with a vacuum pump;

the heating component (2), the cooling component (3) and the filtering component (4) are sequentially arranged between the air inlet (10) and the air outlet (20) from bottom to top;

the heating component (2) can heat water to atomize the water;

cooling liquid is arranged in the cooling assembly (3);

tail gas can in proper order by heating element (2) carry out water smoke thermal reaction, by cooling module (3) condensation goes the impurity and by filtering component (4) filter and accomplish the input behind the gas-liquid separation the vacuum pump.

2. Vacuum pump front end filter arrangement according to claim 1, characterized in that the heating assembly (2) comprises:

a plurality of heating coil (21), set up along X axle direction interval, heating coil (21) are spiral distribution along Z axle direction in the bottom of rose box (1).

3. Vacuum pump front end filter arrangement according to claim 2, characterized in that the heating assembly (2) further comprises:

and the heat conduction fins (22) are arranged on the heating coils (21) in an array manner along the Y-axis direction and the Z-axis direction.

4. Vacuum pump front end filter arrangement according to claim 3, characterized in that the heat conducting fins (22) are arranged at an angle to the extension of the heating coil (21).

5. Vacuum pump front end filter arrangement according to claim 1, characterized in that the cooling assembly (3) comprises:

the cooling partition plate (31) is arranged between the heating assembly (2) and the filtering assembly (4), and a first through hole is formed in the cooling partition plate (31);

and the cooling pipeline (32) is coiled on the cooling partition plate (31), and the cooling liquid is arranged in the cooling pipeline (32).

6. Vacuum pump front end filter arrangement according to claim 1, characterized in that the filter assembly (4) comprises a filter holder (41) and a filter screen drum (42), the filter holder (41) being arranged within the filter box (1), the filter screen drum (42) being arranged in the filter holder (41).

7. The vacuum pump front end filter assembly as recited in claim 1, further comprising:

a plurality of filter orifice plates (5), along Z axle direction in proper order the interval set up in cooling module (3) with between filter assembly (4), every the second through-hole has all been seted up on filter orifice plate (5).

8. Vacuum pump front end filter device according to claim 7, characterized in that each filter orifice plate (5) is provided with a spoiler (51) on its lower surface, said spoilers (51) being arranged at an angle to the filter orifice plate (5).

9. The vacuum pump front end filter device according to claim 8, wherein a plurality of spoilers (51) are provided on each filter orifice plate (5), a plurality of spoilers (51) are provided at intervals along the filter orifice plate (5), and the inclination direction of at least two spoilers (51) with respect to the filter orifice plate (5) is different.

10. The vacuum pump front end filter device according to any one of claims 1 to 9, further comprising a valve and a controller, wherein the valve is disposed at the water inlet, the valve is connected to the controller, and the controller is capable of controlling start-stop and start-stop duration of the valve.