CN113830524A - Silicon wafer conveying device - Google Patents

Silicon wafer conveying device Download PDF

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Publication number
CN113830524A
CN113830524A CN202010585671.4A CN202010585671A CN113830524A CN 113830524 A CN113830524 A CN 113830524A CN 202010585671 A CN202010585671 A CN 202010585671A CN 113830524 A CN113830524 A CN 113830524A
Authority
CN
China
Prior art keywords
wall
base
fixedly connected
silicon wafer
hydraulic pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010585671.4A
Other languages
Chinese (zh)
Inventor
刘爱军
曹丙强
庄艳歆
周浪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Jinvin Photovoltaic Co ltd
Original Assignee
Jiangsu Jinvin Photovoltaic Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Jinvin Photovoltaic Co ltd filed Critical Jiangsu Jinvin Photovoltaic Co ltd
Priority to CN202010585671.4A priority Critical patent/CN113830524A/en
Publication of CN113830524A publication Critical patent/CN113830524A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/915—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rotary movements only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02—Control or detection
    • B65G2203/0208—Control or detection relating to the transported articles
    • B65G2203/0233—Position of the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/042—Sensors
    • B65G2203/044—Optical

Abstract

The invention discloses a silicon wafer conveying device, which relates to the technical field of silicon wafer production and comprises a base, wherein a first supporting plate is arranged at the top of the base, the bottom of the first supporting plate is fixedly connected with the top of the base, a photoelectric sensor is arranged on the inner wall of the first supporting plate, a fixed column is arranged at the top of the base, a first hydraulic pump is arranged at the top of the fixed column, a first telescopic rod is arranged on the inner wall of the first hydraulic pump, a supporting frame is arranged at one end of the first telescopic rod, a bearing is fixedly arranged at the bottom of the supporting frame, and a correction belt is arranged on the outer wall of the bearing. The device detects the position of silicon chip through the photoelectric sensor who sets up, and when photoelectric sensor monitored the silicon chip offset, first hydraulic pump made first telescopic link extension, and both sides are corrected the area and are moved to the centre in step, correct the position of silicon chip, make the position readjustment of silicon chip to conveyer belt intermediate position to reach the position and correct, improve production quality's effect.

Description

Silicon wafer conveying device
Technical Field
The invention relates to the technical field of silicon wafer production, in particular to a silicon wafer conveying device.
Background
The silicon element with the content of 25.8% in the crust provides an inexhaustible source for the production of monocrystalline silicon, and as the silicon element is one of the most abundant elements in the crust, for a product which is destined to enter a large-scale market (massmarket) like a solar cell, the advantage of the reserve is also one of the reasons for the silicon to become a main material of photovoltaic, the microelectronic technology is moving to aviation, aerospace, industry, agriculture and national defense, and is moving to every family, and the huge 'magic' of small silicon wafers is not imaginable at all by our predecessors.
In the production and processing process of the silicon wafers, the silicon wafers need to be conveyed from one process to the next process, in the conveying process, the positions of the silicon wafers may deviate, so that the production quality of the silicon wafers is affected, meanwhile, unqualified silicon wafers can also appear in the production process of the silicon wafers, if unqualified products cannot be selected in time in the production process, the subsequent production workload can be increased, and the production efficiency is reduced.
Disclosure of Invention
The invention aims to provide a silicon wafer conveying device, which has the advantages of adjusting the position of a silicon wafer, improving the production quality, selecting unqualified silicon wafers and improving the production efficiency, and solves the problems of high production failure rate, incapability of selecting unqualified products and low production efficiency caused by the position deviation of the silicon wafer in the conveying process of the traditional conveying device.
In order to solve the technical problems, the invention provides the following technical scheme: a silicon wafer conveying device comprises a base, wherein a first supporting plate is arranged at the top of the base, the bottom of the first supporting plate is fixedly connected with the top of the base, a photoelectric sensor is arranged on the inner wall of the first supporting plate, the outer wall of the photoelectric sensor is fixedly connected with the inner wall of the first supporting plate, a fixed column is arranged at the top of the base, the bottom of the fixed column is fixedly connected with the top of the base, a first hydraulic pump is arranged at the top of the fixed column, the bottom of the first hydraulic pump is fixedly connected with the top of the fixed column, a first telescopic rod is arranged on the inner wall of the first hydraulic pump, the outer wall of the first telescopic rod is fixedly connected with the inner wall of the first hydraulic pump, a supporting frame is arranged at one end of the first telescopic rod, the outer wall of the supporting frame is fixedly connected with one end of the first telescopic rod, and a bearing is fixedly arranged at the bottom of the supporting frame, the outer wall of the bearing is provided with a correction belt, and the inner wall of the correction belt is movably connected with the outer wall of the bearing.
The utility model discloses a hydraulic pump, including base, inner wall, fixed axle, first motor, second motor, fixed axle, second telescopic link, the top of base is provided with the second backup pad, the bottom of second backup pad and the top fixed connection of base, the inner wall of second backup pad is provided with the detector, the outer wall of detector and the inner wall fixed connection of second backup pad, the top of base is provided with first motor, the bottom of first motor and the top fixed connection of base, the axle center department of first motor is provided with the fixed axle, the one end of fixed axle and the axle center department roll connection of first motor, the other end fixed mounting of fixed axle has the second hydraulic pump, the inner wall of second hydraulic pump is provided with the second telescopic link, the outer wall of second telescopic link and the inner wall fixed connection of second hydraulic pump hydraulic, the one end of second telescopic link is provided with the hydraulic chuck, the top of hydraulic chuck and the one end fixed connection of second telescopic link.
Furthermore, a placing box is arranged at the top of the base, the bottom of the placing box is fixedly connected with the top of the base, a groove is formed in the outer wall of the placing box, and a groove is formed in the outer wall of the base.
Furthermore, the top of base is provided with the fixed plate, the bottom of fixed plate and the top fixed connection of base, the inner wall of fixed plate is provided with the roller bearing, the both ends of roller bearing and the inner wall swing joint of fixed plate.
Furthermore, the outer wall of the rolling shaft is provided with a conveyor belt, and the inner wall of the conveyor belt is movably connected with the outer wall of the rolling shaft.
Further, the top of base is provided with the support column, the bottom of support column and the top fixed connection of base, the top of support column is provided with the second motor, the bottom of second motor and the top fixed connection of support column.
Further, the axis of the second motor is fixedly connected with one end of the rolling shaft, a silicon wafer is arranged on the top of the conveying belt, and the bottom of the silicon wafer is movably connected with the top of the conveying belt.
Compared with the prior art, the silicon wafer conveying device has the following beneficial effects:
1. according to the invention, the photoelectric sensor is arranged to detect the position of the silicon wafer, when the photoelectric sensor detects that the position of the silicon wafer deviates, the first hydraulic pump enables the first telescopic rod to extend, the correction belts on the two sides synchronously move towards the middle, the position of the silicon wafer is corrected, and the position of the silicon wafer is readjusted to the middle position of the conveying belt, so that the effects of correcting the position and improving the production quality of the silicon wafer are achieved.
2. According to the invention, the quality of the produced silicon wafer is detected through the arranged detector, when the detector detects that the silicon wafer has defects and the product is unqualified, the second telescopic rod is extended, the hydraulic sucker sucks up the silicon wafer, and the unqualified silicon wafer is placed in the placing box, so that the effects of product detection and production efficiency improvement are achieved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a portion of the present invention;
FIG. 3 is a partial schematic view of the structure of the present invention;
FIG. 4 is an enlarged view of a portion of the structure of the present invention;
fig. 5 is a top view of a portion of the structure of the present invention.
In the figure: 1. a base; 2. a first support plate; 3. a photosensor; 4. fixing a column; 5. a first hydraulic pump; 6. a first telescopic rod; 7. a support frame; 8. a bearing; 9. a correction belt; 10. a second support plate; 11. a detector; 12. a first motor; 13. a fixed shaft; 14. a second hydraulic pump; 15. a second telescopic rod; 16. a hydraulic sucker; 17. placing a box; 18. a fixing plate; 19. a roller; 20. a conveyor belt; 21. a support pillar; 22. a second motor; 23. a silicon wafer; 24. and (4) a groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: a silicon wafer conveying device comprises a base 1, wherein a first supporting plate 2 is arranged at the top of the base 1, the bottom of the first supporting plate 2 is fixedly connected with the top of the base 1, a photoelectric sensor 3 is arranged on the inner wall of the first supporting plate 2, the photoelectric sensor 3 is used for detecting whether the position of a silicon wafer 23 deviates or not, the outer wall of the photoelectric sensor 3 is fixedly connected with the inner wall of the first supporting plate 2, a fixed column 4 is arranged at the top of the base 1, the bottom of the fixed column 4 is fixedly connected with the top of the base 1, a first hydraulic pump 5 is arranged at the top of the fixed column 4, the silicon wafer 23 is corrected by the first hydraulic pump 5 to provide power, the bottom of the first hydraulic pump 5 is fixedly connected with the top of the fixed column 4, a first telescopic rod 6 is arranged on the inner wall of the first hydraulic pump 5, the outer wall of the first telescopic rod 6 is fixedly connected with the inner wall of the first hydraulic pump 5, a supporting frame 7 is arranged at one end of the first telescopic rod 6, the outer wall of the support frame 7 is fixedly connected with one end of the first telescopic rod 6, the bottom of the support frame 7 is fixedly provided with a bearing 8, the bearing 8 enables the correcting belt 9 to rotate to prevent the silicon wafer 23 from being damaged, the outer wall of the bearing 8 is provided with the correcting belt 9, the correcting belt 9 is used for correcting the silicon wafer 23, and the inner wall of the correcting belt 9 is movably connected with the outer wall of the bearing 8.
Preferably, a second support plate 10 is arranged on the top of the base 1, the bottom of the second support plate 10 is fixedly connected with the top of the base 1, a detector 11 is arranged on the inner wall of the second support plate 10, the detector 11 is used for detecting whether the silicon wafer 23 is qualified or not, the outer wall of the detector 11 is fixedly connected with the inner wall of the second support plate 10, a first motor 12 is arranged on the top of the base 1, the first motor 12 is used for transversely moving the unqualified silicon wafer 23, the bottom of the first motor 12 is fixedly connected with the top of the base 1, a fixed shaft 13 is arranged at the shaft center of the first motor 12, one end of the fixed shaft 13 is in rolling connection with the shaft center of the first motor 12, a second hydraulic pump 14 is fixedly installed at the other end of the fixed shaft 13, a second telescopic rod 15 is arranged on the inner wall of the second hydraulic pump 14, the outer wall of the second telescopic rod 15 is fixedly connected with the inner wall of the second hydraulic pump 14, and one end of the second telescopic rod 15 is provided with a hydraulic sucker 16, the silicon wafer storage device comprises a hydraulic sucker 16, a storage box 17 is arranged at the top of a base 1, the bottom of the storage box 17 is fixedly connected with the top of the base 1, a groove 24 is formed in the outer wall of the storage box 17, the groove 24 is used for taking out the unqualified silicon wafer 23 in the storage box 17 conveniently, and the groove 24 is formed in the outer wall of the base 1.
The top of the base 1 is provided with a fixing plate 18, the bottom of the fixing plate 18 is fixedly connected with the top of the base 1, the inner wall of the fixing plate 18 is provided with a roller 19, two ends of the roller 19 are movably connected with the inner wall of the fixing plate 18, the outer wall of the roller 19 is provided with a conveyor belt 20, the inner wall of the conveyor belt 20 is movably connected with the outer wall of the roller 19, the top of the base 1 is provided with a support column 21, the bottom of the support column 21 is fixedly connected with the top of the base 1, the top of the support column 21 is provided with a second motor 22, the second motor 22 provides power for the conveyor belt 20, the bottom of the second motor 22 is fixedly connected with the top of the support column 21, the axis of the second motor 22 is fixedly connected with one end of the roller 19, the top of the conveyor belt 20 is provided with a silicon wafer 23, and the bottom of the silicon wafer 23 is movably connected with the top of the conveyor belt 20.
When the silicon wafer conveying device is used, the conveying device is placed between two processing procedures, a silicon wafer 23 is conveyed on a conveying belt 20, when the silicon wafer 23 is conveyed below a photoelectric sensor 3, the photoelectric sensor 3 monitors the position of the silicon wafer 23, when the position of the silicon wafer 23 is detected to be deviated, a first hydraulic pump 5 extends a first telescopic rod 6 to enable a support frame 7 to extend deeply, the support frame 7 drives a correcting belt 9 to adjust the position of the silicon wafer 23, the two first hydraulic pumps 5 synchronously operate to enable the silicon wafer 23 to be placed in the middle position of the conveying belt 20, the silicon wafer 23 with the adjusted position continues to move on the conveying belt 20, when the silicon wafer 23 moves below a detector 11, the detector 11 monitors the silicon wafer 23, when the detector 11 detects that the silicon wafer 23 is unqualified, a second hydraulic pump 14 enables a second telescopic rod 15 to extend downwards, a hydraulic sucker 16 sucks up the unqualified silicon wafer 23, the first motor 12 operates to enable the fixed shaft 13 to rotate, when the hydraulic sucker 16 rotates to the position above the placing box 17, the second telescopic rod 15 extends, unqualified silicon wafers 23 are placed in the placing box 17, and qualified silicon wafers 23 are continuously conveyed to the next procedure for processing.

Claims (6)

1. The utility model provides a silicon chip conveyor, includes base (1), its characterized in that: the device comprises a base (1), a first supporting plate (2) is arranged at the top of the base (1), the bottom of the first supporting plate (2) is fixedly connected with the top of the base (1), a photoelectric sensor (3) is arranged on the inner wall of the first supporting plate (2), the outer wall of the photoelectric sensor (3) is fixedly connected with the inner wall of the first supporting plate (2), a fixed column (4) is arranged at the top of the base (1), the bottom of the fixed column (4) is fixedly connected with the top of the base (1), a first hydraulic pump (5) is arranged at the top of the fixed column (4), the bottom of the first hydraulic pump (5) is fixedly connected with the top of the fixed column (4), a first telescopic rod (6) is arranged on the inner wall of the first hydraulic pump (5), the outer wall of the first telescopic rod (6) is fixedly connected with the inner wall of the first hydraulic pump (5), and a supporting frame (7) is arranged at one end of the first telescopic rod (6), the outer wall of the support frame (7) is fixedly connected with one end of the first telescopic rod (6), a bearing (8) is fixedly installed at the bottom of the support frame (7), a correcting belt (9) is arranged on the outer wall of the bearing (8), and the inner wall of the correcting belt (9) is movably connected with the outer wall of the bearing (8);
the hydraulic oil pump is characterized in that a second supporting plate (10) is arranged at the top of the base (1), the bottom of the second supporting plate (10) is fixedly connected with the top of the base (1), a detector (11) is arranged on the inner wall of the second supporting plate (10), the outer wall of the detector (11) is fixedly connected with the inner wall of the second supporting plate (10), a first motor (12) is arranged at the top of the base (1), the bottom of the first motor (12) is fixedly connected with the top of the base (1), a fixed shaft (13) is arranged at the axis center of the first motor (12), one end of the fixed shaft (13) is in rolling connection with the axis center of the first motor (12), a second hydraulic pump (14) is fixedly installed at the other end of the fixed shaft (13), a second telescopic rod (15) is arranged on the inner wall of the second hydraulic pump (14), the outer wall of the second telescopic rod (15) is fixedly connected with the inner wall of the second hydraulic pump (14), one end of the second telescopic rod (15) is provided with a hydraulic sucker (16), and the top of the hydraulic sucker (16) is fixedly connected with one end of the second telescopic rod (15).
2. The silicon wafer conveying apparatus according to claim 1, wherein: the novel multifunctional storage box is characterized in that a storage box (17) is arranged at the top of the base (1), the bottom of the storage box (17) is fixedly connected with the top of the base (1), a groove (24) is formed in the outer wall of the storage box (17), and a groove (24) is formed in the outer wall of the base (1).
3. The silicon wafer conveying apparatus according to claim 1, wherein: the top of base (1) is provided with fixed plate (18), the bottom of fixed plate (18) and the top fixed connection of base (1), the inner wall of fixed plate (18) is provided with roller (19), the both ends of roller (19) and the inner wall swing joint of fixed plate (18).
4. The silicon wafer conveying apparatus according to claim 3, wherein: the outer wall of the roller (19) is provided with a conveyor belt (20), and the inner wall of the conveyor belt (20) is movably connected with the outer wall of the roller (19).
5. The silicon wafer conveying apparatus according to claim 1, wherein: the top of base (1) is provided with support column (21), the bottom of support column (21) and the top fixed connection of base (1), the top of support column (21) is provided with second motor (22), the bottom of second motor (22) and the top fixed connection of support column (21).
6. The silicon wafer conveying apparatus according to claim 5, wherein: the axis of the second motor (22) is fixedly connected with one end of the rolling shaft (19), a silicon wafer (23) is arranged on the top of the conveying belt (20), and the bottom of the silicon wafer (23) is movably connected with the top of the conveying belt (20).
CN202010585671.4A 2020-06-24 2020-06-24 Silicon wafer conveying device Pending CN113830524A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010585671.4A CN113830524A (en) 2020-06-24 2020-06-24 Silicon wafer conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010585671.4A CN113830524A (en) 2020-06-24 2020-06-24 Silicon wafer conveying device

Publications (1)

Publication Number Publication Date
CN113830524A true CN113830524A (en) 2021-12-24

Family

ID=78964515

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010585671.4A Pending CN113830524A (en) 2020-06-24 2020-06-24 Silicon wafer conveying device

Country Status (1)

Country Link
CN (1) CN113830524A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115231192A (en) * 2022-06-25 2022-10-25 深圳市优达智控技术有限公司 New energy battery snatchs and transport mechanism based on servo module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115231192A (en) * 2022-06-25 2022-10-25 深圳市优达智控技术有限公司 New energy battery snatchs and transport mechanism based on servo module

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Application publication date: 20211224

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