CN113825985B - Gas measuring device and gas measuring method thereof - Google Patents

Gas measuring device and gas measuring method thereof Download PDF

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Publication number
CN113825985B
CN113825985B CN201980095598.8A CN201980095598A CN113825985B CN 113825985 B CN113825985 B CN 113825985B CN 201980095598 A CN201980095598 A CN 201980095598A CN 113825985 B CN113825985 B CN 113825985B
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gas
analyzer
flow
flow rate
measured
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CN113825985A (en
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郑庆焕
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume

Abstract

The present invention relates to a device for measuring a gas flow or mass and a method for measuring a gas flow or mass. The gas measuring device according to the present invention may include: an analyzer capable of measuring a flow rate of each of the plurality of gases; a first injector capable of injecting a reference gas into the analyzer at a constant predetermined flow rate; a second injector for injecting a gas to be analyzed into the analyzer; and a calculation unit for compensating the flow rate of the gas to be analyzed measured by the analyzer using the following formula, and deriving an actual flow rate of the gas to be analyzed. Actual flow of gas to be analyzed ] = [ flow of gas to be analyzed measured by analyzer ]/[ flow of reference gas measured by analyzer ] × [ predetermined flow in first injector ].

Description

Gas measuring device and gas measuring method thereof
Technical Field
The present invention relates to an apparatus for measuring gas and a method thereof, and more particularly, to an apparatus for measuring flow rate or mass of gas and a method thereof.
Background
Various devices for analyzing the composition and content of gases are known. As the run time of these devices increases, their sensitivity may decrease due to degradation of the relevant components, causing the gas concentration to be erroneously analyzed.
To overcome this disadvantage, it has been proposed to adjust the measured value to the desired value by multiplying by a uniform arbitrary constant. However, this approach is based on the assumption that: the proposed analysis device does not deteriorate when the analysis is performed. Therefore, in the case where the device is used for a long period of time, it may be difficult to appropriately cope with degradation occurring between an initial stage and a final stage of its operation and compensate for the degradation.
Disclosure of Invention
Technical problem
The embodiment of the invention provides a gas measuring device and a method thereof, which can accurately and easily obtain the actual flow (or mass) of sample gas to be analyzed.
Solution to the problem
According to one aspect of the present invention, there is provided a gas measurement apparatus including an analyzer that measures flow rates of a plurality of gases, a first injector that constantly injects a reference gas (reference gas) into the analyzer at a predetermined flow rate, a second injector that injects a sample gas to be analyzed into the analyzer, and an arithmetic operation unit that derives an actual flow rate of the sample gas by calibrating the sample gas flow rate measured by the analyzer using the following equation:
actual flow of sample gas ] = [ sample gas flow measured by analyzer ]/[ reference gas flow measured by analyzer ] × [ predetermined flow of first injector ].
The gas measurement apparatus may further include a calculation unit that derives an average flow rate of the reference gas flow rate measured by the analyzer within a predetermined time after the first injector injects the reference gas into the analyzer, wherein the arithmetic operation unit derives an actual flow rate of the sample gas using the following equation:
actual flow of sample gas ] = [ sample gas flow measured by analyzer ]/[ reference gas flow measured by analyzer ] × [ initial average flow of reference gas flow deduced by calculation unit ].
Further, the reference gas may be an inert gas.
Furthermore, the analyzer, the first syringe and the second syringe may be thermally insulated from the outside.
In addition, the first syringe may include a plurality of leakage valves (or referred to as leakage valves) connected to each other in series.
In addition, the first syringe may include a leakage valve and a capillary tube installed at a rear end of the leakage valve.
According to another aspect of the present invention, there is provided a gas measurement method comprising the steps of: (1) constantly injecting a reference gas into the analyzer at a predetermined flow rate, (2) injecting a sample gas to be analyzed into the analyzer, (3) measuring the reference gas flow rate and the sample gas flow rate injected into the analyzer, respectively, and (4) deriving an actual flow rate of the sample gas by calibrating the sample gas flow rate measured in step (3) using the following equation:
actual flow of sample gas = [ sample gas flow measured in step (3 ]/[ reference gas flow measured in step (3) ]× [ predetermined flow of step (1) ].
In addition, the gas measurement method may further include the steps of: (A) Measuring the flow rate of the reference gas of the analyzer for a predetermined time after step (1), and (B) deriving the average flow rate of the reference gas flow rate measured in step (a), wherein step (4) comprises deriving the actual flow rate of the sample gas using the following equation:
actual flow of sample gas = [ sample gas flow measured in step (3 ]/[ reference gas flow measured in step (3) ]× [ initial average flow of reference gas flow derived in step (B) ].
Further, the reference gas may be an inert gas.
Effects of the invention
As described above, in the gas measurement apparatus and method according to the present invention, the reference gas and the sample gas to be analyzed are injected to measure their flow rates (or masses), and the reference gas is constantly injected into the analyzer at a predetermined flow rate (or mass). Then, a difference between the actual reference gas flow rate (or mass) and the reference gas flow rate (or mass) measured by the analyzer is detected, and the sample gas flow rate (or mass) measured by the analyzer is calibrated based on the detected difference, thereby obtaining the actual flow rate of the sample gas.
Here, since the average flow rate of the reference gas flow rate measured by the analyzer is adopted as the actual flow rate (or mass) of the reference gas within a predetermined time after the reference gas is injected into the analyzer, any case where an error occurs in the quantitative injector for injecting the reference gas is appropriately dealt with, and the actual flow rate (or mass) of the sample gas is finally obtained more accurately.
Drawings
FIG. 1 is a schematic view of a gas measurement device according to one embodiment of the invention.
Fig. 2 is a flow chart of a gas measurement method according to one embodiment of the invention.
Fig. 3 is a graph illustrating a reference gas flow rate measured by an analyzer of the gas measuring device according to an embodiment of the present invention.
Fig. 4 is a graph illustrating a sample gas flow rate measured by an analyzer of a gas measurement device, according to one embodiment of the invention.
Fig. 5 is a graph illustrating an actual sample gas flow rate measured by an arithmetic operation unit of the gas measurement device according to one embodiment of the present invention.
Fig. 6 is a schematic view of a gas measurement device according to another embodiment of the invention.
Fig. 7 is a flow chart of a gas measurement method according to another embodiment of the present invention.
Detailed Description
Hereinafter, with reference to the drawings, the gas measuring devices 10 and 20 and the gas measuring method according to the embodiment of the present invention will now be described in detail.
Fig. 1 is a schematic view of a gas measurement device 10 according to one embodiment of the invention.
Referring to fig. 1, a gas measurement device 10 includes a first syringe 11, a second syringe 12, an analyzer 13, and an arithmetic operation unit 14.
The first injector 11 is connected to the analyzer 13, and injects a reference gas into the analyzer 13. Here, the reference gas is a gas which hardly reacts with the sample gas to be analyzed, i.e., the analysis target gas, and may be an inert gas such as helium, argon, or the like. However, the kind of such a reference gas may vary according to the characteristics of the individual sample gases and is not particularly limited.
The first syringe 11 may include a leakage valve. Accordingly, the leak valve is appropriately changed in response to the pressure of the analyzer 13, in other words, the pressure difference between opposite ends of the leak valve, thereby constantly maintaining the flow rate of the normal pressure reference gas. For example, in the case of injecting the reference gas at normal pressure, if the flow rate of the reference gas increases, the pressure of the analyzer 13 may increase, so that the pressure difference between the opposite ends of the air leakage valve decreases. In this case, the bleed valve may be operated to reduce the opening area to control the reference gas flow rate to be reduced. Conversely, if the reference gas flow rate decreases, the pressure of the analyzer 13 decreases, so that the pressure difference between the opposite ends of the leak valve increases.
Thus, the bleed valve may be operated to increase the open area to control the reference gas flow rate increase. That is, the air leakage valve may be suitably variably operated such that if the reference gas flow rate is increased beyond a predetermined flow rate, the opening area thereof is decreased, and if the reference gas flow rate is decreased below the predetermined flow rate, the opening area thereof is increased, thereby constantly maintaining the flow rate of the normal pressure reference gas.
Further, the first syringe 11 may include a plurality of air leakage valves connected to each other in series. Accordingly, the reference gas flow rate can be adjusted in multiple steps to more constantly maintain the flow rate of the atmospheric reference gas.
In addition, the first syringe 11 may further include a capillary tube installed at the rear end of the air leakage valve. As mentioned above, the reference gas flow may be controlled mainly by the air leak valve and finally may be further controlled by the capillary tube.
The second injector 12 is connected to the analyzer 13, and injects a sample gas into the analyzer 13.
The analyzer 13 may include, for example, an Electron Multiplier Tube (EMT), and may measure the flow rates of the reference gas injected by the first injector 11 and the sample gas injected by the second injector 12 by fractionating the reference gas and the sample gas. However, since the specific configuration of the analyzer 13 is the same as known in the art, a detailed description thereof will not be given.
The first syringe 11, the second syringe 12 and the analyzer 13 are insulated from the outside, thereby constantly maintaining the temperature thereof.
Meanwhile, if the analyzer 13 is operated for a long period of time, for example, more than about 3 to 4 hours, the gas flow rate measured by the analyzer 13 may be lower than the actual flow rate due to degradation of various components associated with the analyzer 13.
The arithmetic operation unit 14 calibrates the sample gas flow rate using the reference gas flow rate and the sample gas flow rate measured by the analyzer 13. A method for calibrating the flow of sample gas will now be described.
For a better understanding, the overall gas measurement method will be described first in turn.
Fig. 2 is a flow chart of a gas measurement method according to one embodiment of the invention.
Referring to fig. 2, first, the first injector 11 constantly injects a reference gas into the analyzer 13 at a predetermined flow rate (S11).
Further, the second injector 12 injects a sample gas to be analyzed into the analyzer 13 (S12).
Here, the first syringe 11 injects the reference gas first, and then the second syringe 12 injects the sample gas, but this is not necessarily the case. In contrast, the first syringe 11 and the second syringe 12 may simultaneously inject the reference gas and the sample gas, respectively.
Next, the analyzer 13 measures the flow rate of the reference gas injected by the first injector 11 and the flow rate of the sample gas injected by the second injector 12, respectively (S13).
Here, since the reference gas is injected using the first injector 11, i.e., the quantitative injector, the reference gas flow rate measured by the analyzer 13 should be theoretically recorded as a constant level. However, as described above, due to the degradation of the analyzer 13, the reference gas flow rate may be recorded as a value that gradually decreases with the lapse of time as shown in fig. 3.
In this case, the sample gas flow rate measured by the analyzer 13 may be recorded as shown in fig. 4, which indicates that the measured sample gas flow rate recorded is lower than the actual flow rate with the lapse of time.
The arithmetic operation unit 14 derives the actual flow rate of the sample gas by calibrating the flow rate of the sample gas measured by the analyzer 13 using the following equation (1) (S14):
reference gas flow measured by analyzer 13: [ sample gas flow rate measured by analyzer 13 ] = [ actual flow rate of reference gas ]: [ actual flow of sample gas ] equation (1)
Wherein, since the actual flow rate of the reference gas is a predetermined flow rate of the first injector 11, an equation finally used to derive the actual flow rate of the sample gas is as follows:
actual flow of sample gas ] = [ sample gas flow measured by analyzer 13 ]/[ reference gas flow measured by analyzer 13 ] × [ predetermined flow of first injector 11 ] equation (2)
The actual flow of sample gas recorded may be as shown in fig. 5.
Thus, the sample gas flow rate measured by the analyzer 13 is calibrated based on the difference, thereby obtaining the actual flow rate of the sample gas.
Fig. 6 is a schematic view of a gas measurement device 20 according to another embodiment of the invention.
Referring to fig. 6, the gas measurement device 20 includes a first syringe 21, a second syringe 22, an analyzer 23, a calculation unit 24, and an arithmetic operation unit 25.
Here, the first syringe 21, the second syringe 22 and the analyzer 23 are substantially the same as the first syringe 11, the second syringe 12 and the analyzer 13 of the gas measuring device 10 which have been described above with reference to fig. 1 according to an embodiment of the present invention. However, the difference between the gas measuring apparatus 10 according to one embodiment of the present invention and the gas measuring apparatus 20 according to another embodiment of the present invention, which will be described later, is expected to be naturally modified by those skilled in the art, if any, and thus redundant description thereof will not be given.
The calculation unit 24 may obtain the average flow rate of the reference gas flow rate measured by the analyzer 23 within a predetermined time after the first injector 21 injects the reference gas into the analyzer 23 and then starts measuring the reference gas flow rate. Here, the predetermined time may be a time when the analyzer 23 is not deteriorated after starting to operate, for example, 1 hour. However, the time may vary depending on the design or use condition of the analyzer 23, and is not particularly limited.
The arithmetic operation unit 25 calibrates the sample gas flow rate using the flow rates of the reference gas and the sample gas measured by the analyzer 23 and the initial average flow rate of the reference gas flow rate derived by the calculation unit 24. A method of calibrating the flow of sample gas will now be described.
Fig. 7 is a flow chart of a gas measurement method according to another embodiment of the present invention.
Referring to fig. 7, first, the first injector 21 constantly injects a reference gas into the analyzer 23 at a predetermined flow rate (S21).
Then, the analyzer 23 measures the flow rate of the reference gas injected by the first injector 21 (S22).
Here, the calculation unit 24 derives an average flow rate of the reference gas flow rate measured by the analyzer 23 within a predetermined time after the first injector 21 starts injecting the reference gas, that is, an initial average flow rate of the reference gas flow rate (S23).
Next, the second injector 22 injects the sample gas into the analyzer 23 (S24).
Then, the analyzer 23 measures the flow rate of the reference gas injected by the first injector 21 and the flow rate of the sample gas injected by the second injector 22, respectively (S25).
The arithmetic operation unit 25 derives the actual flow rate of the sample gas by calibrating the flow rate of the sample gas measured by the analyzer 23 using the following equation (3) (S26):
reference gas flow measured by analyzer 23: sample gas flow measured by analyzer 23= [ actual flow of reference gas ]: [ actual flow of sample gas ] equation (3)
Wherein the actual flow of the reference gas adopts the initial average flow of the reference gas flow deduced by the calculation unit 24. Thus, the equation ultimately used to derive the actual flow of the sample gas is as follows:
[ actual flow of sample gas ] = [ sample gas flow measured by analyzer 23 ]/[ reference gas flow measured by analyzer 23 ] × [ initial average flow of reference gas flow deduced by calculation unit 24 ] equation (4)
With this configuration, in the case where there is a difference between the predetermined flow rate of the first injector 21 and the actual flow rate of the reference gas injected by the first injector 21 due to an error occurring on the first injector 21, appropriate measures can be taken to cope with such a problem. Thus, the actual flow rate of the sample gas can be obtained more accurately.
Although it has been described in the above embodiment that the reference gas is injected by the first injector 21, the initial average flow rate of the reference gas flow rate is first derived by the calculation unit 24, and then the sample gas is injected by the second injector 22, the reference gas and the sample gas may be simultaneously injected by the first injector 21 and the second injector 22, respectively.
In this case, the flow rate of the sample gas measured by the analyzer 23 is regarded as the actual flow rate of the sample gas within a predetermined time after the first syringe 21 and the second syringe 22 are simultaneously injected with the reference gas and the sample gas, respectively, because the analyzer 23 is not degraded within a predetermined time after the start of operation.
At the same time, the calculation unit 24 derives an initial average flow of the reference gas flow. After a predetermined time, as described above, the flow rate derived by the arithmetic operation unit 25 is regarded as the actual flow rate of the sample gas.
The above-described embodiments of the invention do not limit the spirit and concepts of the invention, the scope of which is defined by the appended claims. At the same time, the concept of the invention will be modified or varied in various ways by those skilled in the art. For example, while the present invention has been shown and described in the above embodiments with respect to gas flow measurement devices and methods, those skilled in the art can readily implement gas mass measurement devices and methods in accordance with the gas flow measurement devices and methods shown and described herein. Modifications and variations of the inventive concept will be apparent to those skilled in the art, insofar as such modifications or variations are within the scope and spirit of the invention.

Claims (9)

1. A gas measurement device comprising:
an analyzer that measures flow rates of a plurality of gases;
a first injector that constantly injects a reference gas into the analyzer at a predetermined flow rate;
a second injector injecting a sample gas to be analyzed into the analyzer simultaneously with the first injector injecting the reference gas into the analyzer; and
an arithmetic operation unit that calibrates the sample gas flow rate measured by the analyzer by using the following equation, thereby deriving an actual flow rate of the sample gas:
actual flow of sample gas ] = [ sample gas flow measured by analyzer ]/[ reference gas flow measured by analyzer ] × [ predetermined flow of first injector ].
2. The gas measurement device according to claim 1, further comprising a calculation unit that derives an average flow rate of the reference gas flow rate measured by the analyzer within a predetermined time after the first injector injects the reference gas into the analyzer, wherein the arithmetic operation unit derives the actual flow rate of the sample gas using the following equation:
actual flow of sample gas ] = [ sample gas flow measured by analyzer ]/[ reference gas flow measured by analyzer ] × [ initial average flow of reference gas flow deduced by the calculation unit ].
3. The gas measurement device according to claim 1 or 2, wherein the reference gas is an inert gas.
4. The gas measurement device according to claim 1 or 2, wherein the analyzer, the first syringe and the second syringe are insulated from the outside.
5. The gas measurement device according to claim 1 or 2, wherein the first injector comprises a plurality of air leakage valves connected in series with each other.
6. The gas measuring device according to claim 1 or 2, wherein the first syringe includes a gas leakage valve and a capillary tube mounted at a rear end of the gas leakage valve.
7. A gas measurement method comprising the steps of:
(1) Constantly injecting a reference gas into the analyzer at a predetermined flow rate;
(2) Simultaneously with the step (1), injecting a sample gas to be analyzed into the analyzer;
(3) Measuring a flow rate of the reference gas and a flow rate of the sample gas injected into the analyzer, respectively; and
(4) Deriving the actual flow of the sample gas by calibrating the flow of the sample gas measured in step (3) using the following equation:
actual flow of sample gas = [ sample gas flow measured in step (3 ]/[ reference gas flow measured in step (3) ]× [ predetermined flow of step (1) ].
8. The gas measurement method according to claim 7, further comprising the steps of:
(A) Measuring a reference gas flow rate of the analyzer for a predetermined time after step (1); and
(B) Deriving an average flow of the reference gas flow measured in step (a), wherein step (4) comprises deriving an actual flow of the sample gas using the following equation:
actual flow of sample gas = [ sample gas flow measured in step (3 ]/[ reference gas flow measured in step (3) ]× [ initial average flow of reference gas flow derived in step (B) ].
9. The gas measurement method according to claim 7 or 8, wherein the reference gas is an inert gas.
CN201980095598.8A 2019-05-24 2019-05-24 Gas measuring device and gas measuring method thereof Active CN113825985B (en)

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