CN113808907A - Magnet Structure for Negative Oxygen Ion Beam Generation and Extraction - Google Patents
Magnet Structure for Negative Oxygen Ion Beam Generation and Extraction Download PDFInfo
- Publication number
- CN113808907A CN113808907A CN202111097066.3A CN202111097066A CN113808907A CN 113808907 A CN113808907 A CN 113808907A CN 202111097066 A CN202111097066 A CN 202111097066A CN 113808907 A CN113808907 A CN 113808907A
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- Prior art keywords
- magnet
- magnets
- packaging body
- magnetic field
- negative oxygen
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- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 30
- 239000001301 oxygen Substances 0.000 title claims abstract description 30
- 238000010884 ion-beam technique Methods 0.000 title claims abstract description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 238000000605 extraction Methods 0.000 title claims description 7
- 238000004806 packaging method and process Methods 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000000696 magnetic material Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 27
- -1 oxygen ions Chemical class 0.000 abstract description 12
- 238000010276 construction Methods 0.000 abstract description 5
- 238000001914 filtration Methods 0.000 description 4
- 230000002035 prolonged effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010249 in-situ analysis Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002285 radioactive effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
本发明涉及一种用于负氧离子束产生与引出的磁铁结构，包括：磁铁封装本体，为中空的筒状结构，所述磁铁封装本体上沿其中心孔周向设置若干磁铁容置槽，且各磁铁容置槽沿轴向贯穿磁铁封装本体的两端面；磁铁，若干列所述磁铁分别封装于各个所述磁铁容置槽内，若干列磁铁被配置为在所述磁铁封装本体的中心轴线位置产生二极磁场。本发明能够提高引出负氧离子束的亮度；同时通过磁铁一端的过滤磁场，过滤掉与负氧离子一起被引出的电子，可以降低引出电源的功率及引出电极承受的热负载；通过该磁铁结构的引入，可以降低离子源的建造成本及显著延长离子源的运行寿命。
The invention relates to a magnet structure for generating and extracting negative oxygen ion beams, comprising: a magnet packaging body, which is a hollow cylindrical structure; And each magnet accommodating slot penetrates the two end surfaces of the magnet packaging body in the axial direction; for magnets, several rows of the magnets are respectively packaged in each of the magnet accommodating slots, and several rows of magnets are arranged in the center of the magnet packaging body. The axis position produces a dipole magnetic field. The invention can improve the brightness of the extracted negative oxygen ion beam; at the same time, through the filter magnetic field at one end of the magnet, the electrons extracted together with the negative oxygen ions can be filtered out, so that the power of the extracted power supply and the thermal load of the extracted electrode can be reduced; The introduction of the ion source can reduce the construction cost of the ion source and significantly prolong the operating life of the ion source.
Description
Technical Field
The invention relates to the technical field of negative oxygen ion beam targeting of a secondary ion mass spectrometer, in particular to a magnet structure for generating and extracting negative oxygen ion beams.
Background
The secondary ion mass spectrometer has high-precision, high-sensitivity, high-resolution and high-efficiency micro-area in-situ isotope and element analysis capability, and has wide application in the fields of earth science, material science, ocean science, nuclear science, life science and the likeThe wide application is one of the most advanced international large-scale micro-area in-situ analysis instruments. The radio frequency negative oxygen ion source is the most advanced ion source used on the current secondary ion mass spectrometer and is used for generating O-、O2 -The ion can be used for scientific research in the fields of geology and chronology and the like. The chronology analysis mainly utilizes radioactive isotope to determine the formation age of different types of rocks and ore deposits, and the target test ion is electropositive radioactive isotope ion due to strong electronegativity O-、O2 -The ions can effectively improve the yield of electropositive secondary ions and reduce the influence of the charge effect on analysis, and other types of ions can not efficiently generate secondary ions, so that the negative oxygen ion source is used as a primary ion beam ion source of a secondary ion mass spectrometer and is widely applied to in-situ analysis of geological and chronology micro-areas.
However, in many leading-edge fields and studies of hot spot problems, in order to improve the accuracy of event age measurement, a high-brightness high-spatial resolution negative oxygen ion beam is required. The existing radio frequency negative oxygen ion source does not introduce a magnetic field to restrain plasma and optimize the forming process of negative oxygen ions. In order to improve the brightness and the spatial resolution capability of the negative oxygen ion beam, the formation and extraction processes of the negative oxygen ion beam need to be interfered by introducing a magnetic field, so that the performance of the ion source can be obviously improved.
Disclosure of Invention
In view of the above problems, it is an object of the present invention to provide a magnet structure for negative oxygen ion beam generation and extraction capable of improving the brightness of an extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention relates to a magnet structure for generating and extracting negative oxygen ion beams, which comprises: the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet containing grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet containing groove penetrates through two end faces of the magnet packaging body along the axial direction; the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body.
Preferably, the number of the magnet accommodating grooves is 20, and the magnet accommodating grooves are uniformly distributed on the magnet packaging body in a radial shape; accordingly, the magnets are also 20 rows.
The magnet structure is preferably counted from the horizontal direction of the magnet packaging body along the counterclockwise direction, the magnets in odd-numbered rows are configured to generate a transverse magnetic field, and two adjacent magnets in odd-numbered rows form a group, and the magnetic field directions of the magnets in each group of adjacent magnets in odd-numbered rows are opposite; the magnets of even columns are configured to generate a radial magnetic field.
In the magnet structure, preferably, the magnets in the 2 nd, 6 th, 10 th, 14 th and 18 th even-numbered columns are N-pole magnets; the magnets in the 4 th, 8 th, 12 th, 16 th and 20 th rows of the even-numbered rows are S-pole magnets.
In the magnet structure, preferably, a part is cut off at one end of the magnets in the 5 th, 6 th and 7 th rows, and the cut-off part is replaced by an S-pole magnet; meanwhile, one end of the magnet in the 15 th, 16 th and 17 th rows is also partially cut off, and the cut-off part is replaced by an N-pole magnet; and the two cut-outs are located at the same end.
In the magnet structure, the magnet package body is preferably made of an aluminum material.
The magnet structure is preferably made of an all-permanent magnet material.
Preferably, the magnet structure has flange structures formed at two ends of the magnet package body, and each magnet accommodating groove penetrates through flange end faces at two ends of the magnet package body.
Due to the adoption of the technical scheme, the invention has the following advantages:
the invention can improve the brightness of the extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.
The invention provides a method for introducing a magnetic field on a negative oxygen ion source to act on the formation and extraction processes of negative oxygen ions, which is beneficial to improving the brightness of the extracted negative oxygen ion beam, is finally used for a secondary ion mass spectrometer to generate a primary ion beam with high brightness and high spatial resolution, and comprehensively improves the performance and maintenance period of the instrument.
Drawings
Fig. 1 is a schematic three-dimensional structure diagram of a magnet package body according to the present invention;
FIG. 2 is a schematic three-dimensional structure of the distribution of magnets according to the present invention;
fig. 3 is a schematic diagram of a magnet distribution and expansion structure according to the present invention.
The figures are numbered:
1-a magnet package body; 2-a magnet; 3-magnet containing groove.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.
The invention provides a magnet structure for generating and leading out negative oxygen ion beams, which comprises a magnet packaging body, wherein the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet accommodating grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet accommodating groove penetrates through two end faces of the magnet packaging body along the axial direction; the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body. The invention can improve the brightness of the extracted negative oxygen ion beam; meanwhile, electrons led out together with negative oxygen ions are filtered out through a filtering magnetic field at one end of the magnet, so that the power of an outgoing power supply and the heat load born by an outgoing electrode can be reduced; by introducing the magnet structure, the construction cost of the ion source can be reduced, and the service life of the ion source can be obviously prolonged.
As shown in fig. 1 and 2, the present invention provides a magnet structure for negative oxygen ion beam generation and extraction, comprising: the magnet packaging body 1 is of a hollow cylindrical structure, a plurality of magnet accommodating grooves 3 are formed in the magnet packaging body 1 along the circumferential direction of a central hole of the magnet packaging body, and each magnet accommodating groove 3 axially penetrates through two end faces of the magnet packaging body 1; and magnets 2, wherein a plurality of rows of magnets 2 are respectively packaged in each magnet containing groove 3, and the plurality of rows of magnets 2 are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body 1.
In the above embodiment, preferably, the number of the magnet accommodating grooves 3 is 20, and the magnet accommodating grooves 3 are radially and uniformly distributed on the magnet package body 1; accordingly, the magnets 2 are also 20 rows.
In the above embodiment, preferably, as shown in fig. 2 and 3, starting from the horizontal direction of the magnet package body 1 in the counterclockwise direction, the magnets 2 in odd columns (1, 3,5 … … 15,17,19 in the figures) are configured to generate a transverse magnetic field (denoted by symbol T in the figures), and two adjacent odd columns of magnets 2 are in one group, and the magnetic field directions of each group of adjacent odd columns of magnets 2 are opposite; the magnets 2 of the even columns (2, 4,6 … … 16,18,20 in the figure) are configured to generate a radial magnetic field (denoted by the symbol N or S in the figure, representing the N pole or S pole respectively), with the N pole magnets and the S pole magnets being arranged alternately.
In the above embodiment, preferably, as shown in fig. 3, the magnets 2 in the even-numbered columns 2, 6, 10, 14, 18 are N-pole magnets; the magnets 2 in the even- numbered rows 4, 8, 12, 16, and 20 are S-pole magnets.
In the above embodiment, preferably, a portion is cut out at one end of the magnets 2 in the 5 th, 6 th and 7 th rows, and the cut-out portion is replaced with an S-pole magnet; at the same time, a part is also cut out at one end of the magnets 2 in the 15 th, 16 th and 17 th columns, the cut out part is replaced with an N-pole magnet, and the two cut out parts are located at the same end. When the magnetic field configuration is applied to an ion source, one end of the magnetic field configuration is used for plasma confinement, and the other end (comprising 3 rows of shorter N-pole or S-pole magnets respectively) is placed at an ion beam extraction position and can filter electrons. According to the design scheme, a dipolar magnetic field can be generated at the central axis position of the magnet packaging body 1 and is used for filtering electrons led out along with negative oxygen ions, after the electrons are filtered, the power of a power supply system is greatly reduced, the heat bombardment borne by the led-out electrodes is also obviously reduced, the construction cost of the ion source is reduced, and the long-term operation life of the ion source is prolonged.
In the above embodiment, it is preferable that the magnet package body 1 is made of an aluminum material having a small influence on the magnetic field distribution, and if a plasma is generated in the central region of the magnet package body in practical use, the plasma bombards the aluminum material to emit secondary electrons, thereby increasing the negative oxygen ion yield.
In the above embodiment, the magnet 2 is preferably an all permanent magnet material.
In the above embodiment, it is preferable that both ends of the magnet package body 1 form flange structures, and each magnet receiving groove 3 penetrates through flange end faces of both ends of the magnet package body 1.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (8)
1. A magnet structure for negative oxygen ion beam generation and extraction, comprising:
the magnet packaging body is of a hollow cylindrical structure, a plurality of magnet containing grooves are formed in the magnet packaging body along the circumferential direction of a central hole of the magnet packaging body, and each magnet containing groove penetrates through two end faces of the magnet packaging body along the axial direction;
the magnets are respectively packaged in the magnet containing grooves, and the magnets in the rows are configured to generate a dipolar magnetic field at the central axis position of the magnet packaging body.
2. The magnet structure according to claim 1, wherein the number of the magnet receiving slots is 20, and each of the magnet receiving slots is radially and uniformly distributed on the magnet package body; accordingly, the magnets are also 20 rows.
3. The magnet structure according to claim 2, wherein starting from the horizontal direction of the magnet package body in the counterclockwise direction, the magnets of odd-numbered columns are configured to generate a transverse magnetic field, and two adjacent odd-numbered columns of magnets are in one group, and the magnetic field directions of the magnets of each group of adjacent odd-numbered columns are opposite;
the magnets of even columns are configured to generate a radial magnetic field.
4. The magnet structure according to claim 3, wherein the magnets of the even-numbered columns 2, 6, 10, 14, 18 are N-pole magnets;
the magnets in the 4 th, 8 th, 12 th, 16 th and 20 th rows of the even-numbered rows are S-pole magnets.
5. A magnet structure according to claim 4, characterized in that a part is cut out at one end of the magnets in the 5 th, 6 th and 7 th columns, and the cut-out part is replaced with an S-pole magnet; meanwhile, one end of the magnet in the 15 th, 16 th and 17 th rows is also partially cut off, and the cut-off part is replaced by an N-pole magnet; and the two cut-outs are located at the same end.
6. The magnet structure according to claim 1, characterized in that the magnet package body is made of aluminum material.
7. The magnet structure according to claim 1, characterized in that the magnets are of an all permanent magnetic material.
8. The magnet structure according to claim 1, wherein the two ends of the magnet package body form flange structures, and each magnet accommodating groove penetrates through the flange end faces of the two ends of the magnet package body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111097066.3A CN113808907B (en) | 2021-09-18 | 2021-09-18 | Magnet structure for generating and extracting negative oxygen ion beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111097066.3A CN113808907B (en) | 2021-09-18 | 2021-09-18 | Magnet structure for generating and extracting negative oxygen ion beam |
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| Publication Number | Publication Date |
|---|---|
| CN113808907A true CN113808907A (en) | 2021-12-17 |
| CN113808907B CN113808907B (en) | 2024-06-18 |
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| CN202111097066.3A Active CN113808907B (en) | 2021-09-18 | 2021-09-18 | Magnet structure for generating and extracting negative oxygen ion beam |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1179003A (en) * | 1996-08-02 | 1998-04-15 | 易通公司 | Ion beam neutralizing method and apparatus |
| JP2008128887A (en) * | 2006-11-22 | 2008-06-05 | Ae Kiki Engineering Co Ltd | Plasma source, high frequency ion source using it, negative ion source, ion beam processor, neutral particle beam incident device for nuclear fusion |
| FR2936091A1 (en) * | 2008-09-15 | 2010-03-19 | Centre Nat Rech Scient | Ion beam generating device for treating substrate in industrial application, has magnets to generate magnetic field at opening of electrode for deviating charged particles attracted by ion source such that particles do not reach source |
| CN202068658U (en) * | 2010-12-30 | 2011-12-07 | 中国原子能科学研究院 | Magnet structure capable of generating virtual filter magnetic field |
| CN202998637U (en) * | 2012-11-23 | 2013-06-12 | 中国原子能科学研究院 | Filtering magnetic field adjusting and beam correction device for multimodal field negative hydrogen ion source |
| CN111755317A (en) * | 2020-06-30 | 2020-10-09 | 中国科学院近代物理研究所 | A radio frequency negative ion source for secondary ion mass spectrometer |
| CN112888139A (en) * | 2020-12-29 | 2021-06-01 | 中国科学院近代物理研究所 | System and method for adjusting energy of electron beam at outlet of coaxial cavity accelerator |
-
2021
- 2021-09-18 CN CN202111097066.3A patent/CN113808907B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1179003A (en) * | 1996-08-02 | 1998-04-15 | 易通公司 | Ion beam neutralizing method and apparatus |
| JP2008128887A (en) * | 2006-11-22 | 2008-06-05 | Ae Kiki Engineering Co Ltd | Plasma source, high frequency ion source using it, negative ion source, ion beam processor, neutral particle beam incident device for nuclear fusion |
| FR2936091A1 (en) * | 2008-09-15 | 2010-03-19 | Centre Nat Rech Scient | Ion beam generating device for treating substrate in industrial application, has magnets to generate magnetic field at opening of electrode for deviating charged particles attracted by ion source such that particles do not reach source |
| CN202068658U (en) * | 2010-12-30 | 2011-12-07 | 中国原子能科学研究院 | Magnet structure capable of generating virtual filter magnetic field |
| CN202998637U (en) * | 2012-11-23 | 2013-06-12 | 中国原子能科学研究院 | Filtering magnetic field adjusting and beam correction device for multimodal field negative hydrogen ion source |
| CN111755317A (en) * | 2020-06-30 | 2020-10-09 | 中国科学院近代物理研究所 | A radio frequency negative ion source for secondary ion mass spectrometer |
| CN112888139A (en) * | 2020-12-29 | 2021-06-01 | 中国科学院近代物理研究所 | System and method for adjusting energy of electron beam at outlet of coaxial cavity accelerator |
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| CN113808907B (en) | 2024-06-18 |
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