CN113808895B - Broadband energy transmission window for terahertz vacuum electronic device - Google Patents
Broadband energy transmission window for terahertz vacuum electronic device Download PDFInfo
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- CN113808895B CN113808895B CN202110909273.8A CN202110909273A CN113808895B CN 113808895 B CN113808895 B CN 113808895B CN 202110909273 A CN202110909273 A CN 202110909273A CN 113808895 B CN113808895 B CN 113808895B
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- waveguide
- window
- broadband energy
- vacuum electronic
- metal groove
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims abstract description 29
- 230000007704 transition Effects 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000012545 processing Methods 0.000 abstract description 8
- 238000011031 large-scale manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/36—Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
- H01P5/082—Transitions between hollow waveguides of different shape, e.g. between a rectangular and a circular waveguide
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- Plasma Technology (AREA)
Abstract
The invention discloses a broadband energy transmission window for a terahertz vacuum electronic device, which comprises the following components: rectangular waveguide, transition section, circular waveguide and dielectric window sheet which are sequentially arranged from two ends inwards with the central axis; the dielectric window sheet is welded with the circular waveguides on the two sides in a sealing way; the broadband energy transmission window is symmetrical with respect to the dielectric window sheet; the transition section consists of a rectangular waveguide inner cavity and a metal groove formed on the outer side of a central line of the wide side of the rectangular waveguide; the metal groove is symmetrical about a plane where the central line and the central axis of the wide side of the rectangular waveguide are positioned; the length of the wide edge of the metal groove is smaller than that of the folded waveguide, and the vertical distance between the metal groove and the central axis is smaller than the radius of the circular waveguide. The broadband energy transmission window has smaller reflection characteristics, can meet the broadband requirement, has low sensitivity of the structural parameters of the waveguide, has small requirements on processing precision and assembly precision, has high processing yield, and is easy for large-scale production.
Description
Technical Field
The present invention relates to the field of vacuum electronic devices. And more particularly to a broadband energy delivery window for terahertz vacuum electronic devices.
Background
The vacuum electronic device has important application value in the fields of communication, imaging, detection and the like, and the main obstacle restricting the development of the vacuum electronic device is low output power level. Microwave energy delivery windows are an important component of vacuum electronics. The energy transmission window can ensure that the vacuum electronic device works under the vacuum condition, and the reflection is small and the input and output loss is low. In the terahertz frequency band, the electromagnetic wave loss passing through the window sheets is large, the structural size is very tiny, and the requirements on the strength, the thermal performance and the dielectric constant of the window frame and the window sheet materials are more stringent.
Most of currently used energy transmission windows are box-shaped windows. The box-shaped window has the advantages of simple structure, mature process, wider cold measurement bandwidth and the like, and the electric field on the surface of the window sheet is weaker, can bear high peak power, and is easy to cool structurally. Is widely used in the fields of vacuum electronic devices, magnetrons, gyrotrons, klystrons, accelerators and the like. The basic structure of a conventional box-shaped window is shown in fig. 1A and 1B. The standard rectangular waveguide is connected with two ends of the window, and a medium window sheet is welded at the center of the middle circular waveguide in a sealing way.
Although the bandwidth, loss and other electrical parameters of the traditional box-shaped window can meet the actual needs, the welding is difficult due to the adoption of a side wall sealing process, the structural strength is weak, and the reliability of vacuum tightness is low. Especially in terahertz frequency band, the structure size is very tiny, and the sealing is more difficult. In practice, therefore, a standard box-shaped window is generally used, the basic structure of which is shown in fig. 2A and 2B. The diameter of the dielectric window sheet of the standard box-shaped window is larger than that of the round waveguide, and the edge of the window sheet is used for sealing with the round waveguide, so that the structural strength and the airtight reliability are greatly improved.
At present, the reflection of a standard box-shaped window is smaller than-20 dB, the bandwidth can reach 49.5GHz, the requirement of 190-240GHz frequency bands is met, but the sensitivity of the diameter and the length of a circular waveguide is too high, the processing error + -0.01 mm can cause great deterioration of window performance, the yield is lower, and the method is not suitable for mass production.
Accordingly, it is desirable to provide an energy delivery window that is easy to process and that meets the needs of the frequency band.
Disclosure of Invention
An object of the present invention is to provide a broadband energy transmission window for terahertz vacuum electronic devices, which has low sensitivity of structural parameters of a waveguide, low requirements on machining precision and assembly precision, high machining yield, and easy mass production under the condition of meeting the needs of frequency bands and excellent reflection characteristics.
Another object of the present invention is to provide a terahertz vacuum electronic device including the broadband energy transmission window described above.
In order to achieve the above purpose, the invention adopts the following technical scheme:
A broadband energy delivery window for a terahertz vacuum electronic device, comprising:
rectangular waveguide, transition section, circular waveguide and dielectric window sheet which are sequentially arranged from two ends inwards with the central axis;
the dielectric window sheet is welded with the circular waveguides on the two sides in a sealing way;
the broadband energy transmission window is symmetrical with respect to the dielectric window sheet;
The transition section consists of a rectangular waveguide inner cavity and a metal groove formed on the outer side of a central line of the wide side of the rectangular waveguide;
the metal groove is symmetrical about a plane where the central line and the central axis of the wide side of the rectangular waveguide are positioned;
the length of the wide edge of the metal groove is smaller than that of the folded waveguide, and the vertical distance between the metal groove and the central axis is smaller than the radius of the circular waveguide.
Preferably, the shape of the metal groove is selected from square, rectangular or arc.
Preferably, the number of the transition sections at one side of the dielectric window sheet is one or more.
Preferably, when the number of the transition sections on one side of the dielectric window is plural, the shapes of the metal grooves in the plural transition sections are the same or different.
Preferably, the dielectric window sheet material is selected from CVD diamond, sapphire, beryllium oxide, or aluminum nitride.
A terahertz vacuum electronic device comprising the broadband energy transmission window.
The beneficial effects of the invention are as follows:
The invention provides a broadband energy transmission window for a terahertz vacuum electronic device, which is compared with a standard box-shaped window in the prior art, has a gradual change section between a rectangular waveguide and a circular waveguide, has smaller reflection characteristic, can meet the requirement of a frequency band, has low sensitivity of structural parameters of the waveguide, has small requirements on processing precision and assembly precision, has high processing yield, and is easy for mass production.
Drawings
The following describes the embodiments of the present invention in further detail with reference to the drawings.
Fig. 1A and 1B show a schematic structural view of a conventional box-shaped window.
Fig. 2A and 2B show a schematic structural view of a standard box-shaped window.
Fig. 3 shows a 45 degree side view schematic of a broadband energy delivery window structure in accordance with the present invention.
Fig. 4 shows a schematic front view of a broadband energy delivery window structure in accordance with the present invention.
Detailed Description
In order to more clearly illustrate the present invention, the present invention will be further described with reference to preferred embodiments and the accompanying drawings. Like parts in the drawings are denoted by the same reference numerals. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and that this invention is not limited to the details given herein.
The invention provides a graded section broadband energy transmission window for a terahertz vacuum electronic device, which is compared with a standard box-shaped window shown in fig. 2A and 2B in the prior art, and a graded section is arranged between a rectangular waveguide and a circular waveguide, so that the structure of the graded section broadband energy transmission window is shown in fig. 3 and 4. Specifically, the broadband energy transmission window in the invention comprises: rectangular waveguide 1, transition section 2, circular waveguide 3 and dielectric window 4 which are sequentially arranged with central axis 5 from two ends inwards; the dielectric window 4 is welded with the circular waveguides 3 on two sides in a sealing way, so that the vacuum property of the energy transmission window is ensured; the broadband energy transmission window is symmetrical about the dielectric window sheet 4, namely, waveguides on two sides of the dielectric window sheet 4 are symmetrically distributed; the transition section 2 consists of a rectangular waveguide 1 and a metal groove 21 formed on the outer side of a center line 6 of the wide side of the rectangular waveguide; the metal groove 21 is symmetrical about the plane where the central line 6 and the central axis 5 of the rectangular waveguide are located, the width length a 1 of the metal groove 21 is smaller than the width length a 2 of the rectangular waveguide 1, and the vertical distance R 2 between the metal groove 21 and the central axis 5 is smaller than the radius R 1 of the circular waveguide 3.
In a specific implementation, the shape of the metal groove in the small transition section includes, but is not limited to, square, rectangular, arc, etc., and the metal groove in fig. 3 and 4 is arc. When the metal groove is arc-shaped, the vertical distance between the metal groove and the central axis refers to the radius of the arc of the cross section of the arc-shaped metal groove.
As will be appreciated by those skilled in the art, the number of transition sections on one side of the dielectric window may be one or more for different frequency bands, different powers, different sizes of folded waveguide vacuum electronic devices; when the number of the transition sections is multiple, the shapes of the metal grooves in the multiple transition sections can be the same or different; and the size adjustment of each structural parameter of the broadband energy transmission window are all within the protection scope of the invention.
In particular examples, the dielectric window sheet material includes, but is not limited to, CVD diamond, sapphire, beryllium oxide, aluminum nitride, or the like.
In the implementation process, the smaller the reflection coefficient at the two ports where the energy transmission window is connected with the rectangular waveguide is, the better the matching is, and the wider the frequency band is. For example, when the target reflection characteristics S11 and S22 of the energy transmission window are required to be < -20dB and the bandwidth is larger than 40GHz, the target reflection characteristics and the bandwidth can be ensured when the processing error is +/-0.02 mm based on the structural advantage of the broadband energy transmission window provided by the invention.
The technical scheme of the invention is further described below by combining specific comparative examples and examples.
Comparative example
The standard box-shaped window in the comparative example 1 is shown in fig. 2A and 2B, the dielectric window of the standard box-shaped window is a CVD diamond window, the center frequency is 200-260 GHz, the rectangular waveguide is a standard waveguide with 220GHz frequency band, the radius r=0.85-0.95 mm of the circular waveguide, the length h=0.25-0.35 mm, the tolerance of the radius R of the circular waveguide is +/-0.005 mm, the tolerance of the length h is +/-0.01 mm, the sensitivity of the structural parameter is extremely high, and the implementation is extremely difficult in the process through analyzing the sensitivity curve of the waveguide parameter.
Examples
The structure of the broadband energy transmission window with the gradual change section is shown in fig. 3 and 4, the dielectric window sheet of the broadband energy transmission window is a CVD diamond window sheet, one side of the window sheet is provided with a gradual change section, and the metal groove is arched. For a broadband energy transmission window with the center frequency of 200-260 GHz, the rectangular waveguide is a standard waveguide with the frequency band of 220GHz, the radius R 1 of the circular waveguide is 0.85-0.95 mm, and the length h 1 is 0.25-0.35 mm; the height R 2 of the metal groove is 0.25-0.35 mm, and the length h 2 is 0.45-0.55 mm. By analyzing the waveguide parameter sensitivity curve, the tolerance of the height R 2 of the metal groove is-0.04 mm to +0.06mm, and the tolerance of the length h 2 is +/-0.1 mm; the tolerance of the radius R 1 and the length h 1 of the circular waveguide is ±0.02mm. The wideband energy transmission window has low sensitivity of structural parameters, small requirements on processing precision and assembly precision, and is easy to realize in process. Meanwhile, the reflection characteristic S 11 < -30dB of the broadband energy transmission window can meet the requirement.
Compared with the prior art, the broadband energy transmission window provided by the invention has the advantages that on the basis of meeting the requirements of reflection characteristics and frequency bandwidth, the sensitivity of the waveguide structure parameters is lower, the process is easier to realize, the batch processing can be realized, and the broadband energy transmission window has wider application prospect.
It should be understood that the foregoing examples of the present invention are provided merely for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention, and that various other changes and modifications may be made therein by one skilled in the art without departing from the spirit and scope of the present invention as defined by the appended claims.
Claims (6)
1. A broadband energy delivery window for a terahertz vacuum electronic device, comprising:
rectangular waveguide, transition section, circular waveguide and dielectric window sheet which are sequentially arranged from two ends inwards with the central axis;
the dielectric window sheet is welded with the circular waveguides on the two sides in a sealing way;
the broadband energy transmission window is symmetrical with respect to the dielectric window sheet;
The transition section consists of a rectangular waveguide inner cavity and a metal groove formed on the outer side of a central line of the wide side of the rectangular waveguide;
the metal groove is symmetrical about a plane where the central line and the central axis of the wide side of the rectangular waveguide are positioned;
the length of the wide edge of the metal groove is smaller than that of the folded waveguide, and the vertical distance between the metal groove and the central axis is smaller than the radius of the circular waveguide.
2. The broadband energy delivery window for terahertz vacuum electronic devices of claim 1, wherein the shape of the metal slot is selected from rectangular or arc.
3. The broadband energy delivery window for terahertz vacuum electronic devices of claim 1, wherein the number of transition sections on one side of the dielectric window sheet is one or more.
4. The broadband energy delivery window for terahertz vacuum electronic devices of claim 1, wherein when the number of the transition sections on one side of the dielectric window sheet is plural, the shapes of the metal grooves in the plural transition sections are the same or different.
5. The broadband energy delivery window for terahertz vacuum electronic devices of claim 1, wherein the dielectric window sheet material is selected from CVD diamond, sapphire, beryllium oxide, or aluminum nitride.
6. A terahertz vacuum electronic device comprising a broadband energy delivery window for a terahertz vacuum electronic device as set forth in any one of claims 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110909273.8A CN113808895B (en) | 2021-08-09 | 2021-08-09 | Broadband energy transmission window for terahertz vacuum electronic device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110909273.8A CN113808895B (en) | 2021-08-09 | 2021-08-09 | Broadband energy transmission window for terahertz vacuum electronic device |
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| Publication Number | Publication Date |
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| CN113808895A CN113808895A (en) | 2021-12-17 |
| CN113808895B true CN113808895B (en) | 2024-07-12 |
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Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19621809B4 (en) * | 1996-05-31 | 2005-06-23 | Eads Radio Communication Systems Gmbh & Co.Kg | Transition from a rectangular waveguide to a circular waveguide |
| CN101478066A (en) * | 2009-01-21 | 2009-07-08 | 电子科技大学 | Wide-band micro-wave kit shaped energy delivery window |
| US9287598B2 (en) * | 2013-05-09 | 2016-03-15 | The Board Of Trustees Of The Leland Stanford Junior University | RF window assembly comprising a ceramic disk disposed within a cylindrical waveguide which is connected to rectangular waveguides through elliptical joints |
| CN105931936B (en) * | 2016-06-15 | 2017-10-31 | 西南交通大学 | High power truncation type microwave output window |
| CN110462923B (en) * | 2017-03-24 | 2021-11-05 | Nec网络传感器系统株式会社 | High frequency window and method of manufacturing the same |
| CN207426100U (en) * | 2017-11-01 | 2018-05-29 | 江苏贝孚德通讯科技股份有限公司 | A kind of ultra-wideband orthogonal mode coupler |
| CN109148243B (en) * | 2018-08-21 | 2020-03-24 | 电子科技大学 | Broadband high-power energy transmission structure suitable for helix traveling wave tube |
| CN109767964A (en) * | 2018-12-30 | 2019-05-17 | 中国电子科技集团公司第十二研究所 | A kind of microwave seal window |
| CN112736394B (en) * | 2020-12-22 | 2021-09-24 | 电子科技大学 | H-plane waveguide probe transition structure for terahertz frequency band |
-
2021
- 2021-08-09 CN CN202110909273.8A patent/CN113808895B/en active Active
Non-Patent Citations (1)
| Title |
|---|
| Broadband 220-GHz Vacuum Window for a Traveling-Wave Tube Amplifier;Alan M. Cook，et al;《IEEE TRANSACTIONS ON ELECTRON DEVICES》;20130124;第60卷(第3期);1257-1259 * |
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| CN113808895A (en) | 2021-12-17 |
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