CN113799491B - 一种无提取电极的阵列化电流体喷头 - Google Patents
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Abstract
本发明公开了一种无提取电极的阵列化电流体喷头,属于喷墨打印装置技术领域,喷头由墨盒、流道板、喷孔板、控制电极层等结构构成。墨盒包含进墨口、出墨口、安装孔、流道层入口、流道层出口等结构。流道板由绝缘材料加工而成,有引导墨液流入喷孔板、增大喷孔之间的电势差等作用,包含流道入口、流道出口、引流通道、微流通道等结构。喷孔板主体为绝缘材料,包含喷孔、喷孔电极等结构,每个喷孔间由微流通道形成分压单元,使加电喷孔上的电压分散在流道中,不对其它喷孔产生影响,实现每个喷孔独立可控的喷射。本发明提出的无提取电极的阵列化电流体喷头能够实现喷头的独立控制,具有高分辨率、高精度、高效率、可批量制造、低成本等优点。
Description
技术领域
本发明属于喷墨打印装置技术领域,更具体地,涉及一种无提取电极的阵列化电流体喷头。
背景技术
喷墨打印作为一种无掩膜、增材制造直写技术,具有高材料利用率,在很多生产制造领域都有较好的应用前景,如印刷显示、印刷OTFT、印刷太阳能电池等。目前压电/热泡等传统喷印技术,主要以压电喷印和热泡喷印为代表,使用挤压力为驱动力,使得喷印对墨水粘度十分敏感,并且挤压出的墨滴一般大于喷孔的直径,存在打印分辨率低(>20μm)、墨水黏度范围窄(1-20cP)等不足,难以满足多种材料和更高分辨率的喷印需求。电流体喷印技术采用电场为主要驱动力,通过电场对液体产生的“拉”力,使得喷印对溶液粘度依赖性大大减小,打印墨滴的尺寸可以远小于喷孔直径,喷印的分辨率可以达到亚微米甚至纳米级,极大的提高了传统喷印的分辨率。因此,电流体喷墨打印技术具有广阔的应用前景。
电流体喷头是实现电流体喷墨打印的关键。目前,实现电流体喷头的独立可控喷射都是通过外接电极环实现的,但射流易偏斜到外接的电极环上,使喷孔故障。而目前,无外接电极环的电流体喷头,可以满足并行打印的需求,但无法实现独立可控,因而难以满足按需喷印的电流体喷印在工业中的需求。
中国专利申请CN201410289239.5提出了喷头独立可控打印的实现方法,但需要在喷孔前方外加提取电极,墨液易偏斜至提取电极上,使喷头损坏,且结构复杂,制造困难。中国专利申请CN201510299992.7提出了一种微型的电喷雾芯片器件及制作方法,但其喷雾芯片无法实现对每个喷孔的喷印状态进行独立调控。
发明内容
针对现有技术的以上缺陷或改进需求,本发明提供了一种无提取电极的阵列化电流体喷头,其目的在于通过将加电喷孔、分压单元、非加电喷孔构成分压电路,通过调节分压单元的阻值大小,从而实现对喷孔的独立控制,由此解决无法实现对每个喷孔的喷印状态进行独立调控的技术问题。
为实现上述目的,按照本发明的一个方面,提供了一种无提取电极的阵列化电流体喷头,包括墨盒、流道板和喷孔板;
所述流道板设置于所述墨盒底部且其流道腔体内包括与所述墨盒连通的多条微流通道;
所述喷孔板设置于所述流道板底部;所述喷孔板包括多个喷孔和与之装配的喷孔电极,多个喷孔与多条微流通道对应设置并连通,墨液从所述墨盒流经所述流道腔体并从所述喷孔喷出;
不同喷孔间的微流通道与微流通道内的墨液形成多个分压单元,当向喷孔施加电压时,加电喷孔、分压单元与非加电喷孔形成分压电路,通过调节所述分压单元的电阻阻值或非加电喷孔的接地电阻阻值从而改变加电喷孔与非加电喷孔之间的电势差,以使施加电压与电势差的差小于开启阈值电压,从而实现喷孔的独立控制。
优选地,所述流道腔体还包括流道入口、流道出口和引流通道;所述流道入口和所述流道出口分别位于所述流道腔体两端;所述引流通道设置于所述流道入口与多条微流通道、流道出口与多条微流通道之间,用于将墨盒内的墨液引流至微流通道中或将微流通道中的墨液引流至墨盒内。
优选地,所述多条微流通道包括树状分叉式、分叉形、长条形结构分布。
优选地,所述墨盒盒体以及设置于所述盒体的安装孔、插槽、进墨口、出墨口、流道层入口和流道层出口;所述插槽位于所述盒体的两侧,所述安装孔设置于所述插槽上;所述进墨口和所述出墨口设置于所述盒体的上端;所述流道层入口设置于所述盒体的下端并与所述流道入口连通;所述流道层出口设置于所述盒体的下端并与所述流道出口连通。
优选地,所述分压单元电阻的调节通过调整墨液电阻率和/或微流通道几何尺寸实现。
优选地,所述喷孔为绝缘材料制成,所述喷孔的一端为空心凸台结构,并与所述微流通道的通孔一一对应。
优选地,所述喷孔板还包括疏水层,所述疏水层设置于所述喷孔和所述喷孔电极的外表面。
优选地,所述墨盒为绝缘材料或导电材料加一层绝缘材料制成。
总体而言,通过本发明所构思的以上技术方案与现有技术相比,由于将不同喷孔间通过流道腔体、墨液等连接结构组成分压单元,抑制喷孔间的电压干扰。当某一喷孔施加电压并开启喷射时,喷头中形成加电喷孔-分压单元-非加电喷孔的分压电路,当经过分压单元后,非加电喷孔上分到的电压降低到开启电压以下的时候,即可实现独立可控喷射。此时,控制电极可单独对每个喷孔处的电场大小进行调节,从而控制每一个喷孔的加电状态,解决了目前电喷印喷头难以实现独立可控打印、效率低、喷孔间存在串扰等问题,具有高分辨率、高精度、高效率、可批量制造、低成本等优点。
附图说明
图1是本发明无提取电极的阵列化电流体喷头的立体图;
图2是本发明无提取电极的阵列化电流体喷头的结构爆炸图;
图3是本发明无提取电极的阵列化电流体喷头墨盒剖面图;
图4是本发明无提取电极的阵列化电流体喷头流道板的结构示意图;
图5是本发明无提取电极的阵列化电流体喷头喷孔板的结构示意图;
图6是本发明无提取电极的阵列化电流体喷头的原理图;
图7本发明无提取电极的阵列化电流体喷头不同分压单元非加电喷孔电极的电势图。
在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:1-墨盒;11-进墨口;12-出墨口;13-流道层入口;14-流道层出口;15-安装孔;2-流道板;21-流道入口;22-流道出口;23-引流通道;24-微流通道;3-喷孔板;31-喷孔;32-喷孔电极。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。
如图1-7所示,本发明提出一种无提取电极的阵列化电流体喷头,包括墨盒1、流道板2和喷孔板3。
所述流道板2包括引流部分、分压部分。所述引流部分连接了墨盒1和每个喷孔31的分支流道,用于将墨液引入各自的分支流道。所述分压部分用于控制不同喷孔之间的电势降,可进行几何尺寸设计实现更好的独立控制。
所述喷孔板3在流道板2下方,包括喷孔31、喷孔电极32和疏水层。所述喷孔板3上有多个通孔并形成空心凸台结构,构成喷孔31,便于电场集中,墨液更易喷射。所述喷孔电极32包括图案化的粘附层和导电层,粘附层用于提高导电层和喷孔板3连接的稳定性。喷孔电极32环形部分与喷孔31连接。其中每个喷孔处的电极电压均单独可调,从而控制每个喷孔处点火状态。最后,制作突出喷孔面疏水层,避免墨液扩散。
更进一步的说明,分压单元由喷头中不同喷孔间的微流通道等连接结构组成。其几何尺寸设计可由分压原理计算得到的电阻求得,电阻可由得到,其中R为分压结构电阻,ρ为墨液的电阻率,l为喷孔之间流道的长度,S为流道横截面积。
当喷射的开启电压为U0时,可由此调节点火喷孔电极的电压为U1,此时可得点火喷孔与非点火喷孔之间的电势差为其中R0为非点火喷孔的接地电阻。当U1-ΔU<U0时,即可使非点火喷孔不受影响,从而达到喷孔独立可控。
电势差ΔU的调控通过控制分压结构的电阻R或调节非加电喷孔的接地电阻R0来实现。当满足独立可控时,电阻R存在条件具体调控方法为控制墨水电阻率ρ和流道几何参数长度l、横截面积S。对于一系列不同墨水,为满足喷头的独立可控,可以墨水的最低电阻率ρmin为基础,设计喷头的流道结构来满足反之,对于已经加工完成的喷头,可通过来确定满足独立可控需求的最小墨水电阻率。
更进一步的说明,喷头喷印过程中,对于非加电喷孔,可施加调控电压U2,用于对喷头的电场进行调控,使加电喷孔的喷射落点偏差更小。施加U2的取值范围为U1-ΔU<U2<U0,需保证其大于加电喷孔的分压值,并同时小于开启阈值,避免非加电喷孔喷射。
更进一步的说明,所述墨盒1使用绝缘材料使用注塑、3D打印等工艺制备。墨盒1上有进墨口11,用于加注墨液,有出墨口12,用于排出多余的墨液。墨盒下部分有流道层入口13和流道层出口14,便于墨液进入或流出流道板2。
更进一步的说明,所述流道板可使用激光烧蚀、光刻、喷砂等工艺在绝缘基板上方加工出树状分叉微流道凹槽结构得到,树状分叉微流通道用于保证每个喷孔的供墨流量均匀。
更进一步的说明,在流道板2的下方加工出喷孔凸台结构和电极结构。喷孔电极,粘附层为铬,导电层为金,通过磁控溅射、蒸镀等工艺制备图案化电极。
本发明的优选实施例中,所述墨盒1使用有机玻璃等绝缘材料加工制备。墨盒1的进墨口11,用于加注墨液,出墨口12,用于排出多余的墨液。墨盒1下部分有流道层入口13,便于墨液注入流道板,流道层出口14,便于气泡的排除,墨盒安装定位的安装孔15。
流道板2的流道腔体使用激光在陶瓷片上烧蚀出树状分叉微流道凹槽结构得到,宽度约为100μm,深度100μm,分为流道入口21、流道出口22、引流通道23和微流通道24。对于乙二醇墨液,表面张力46mN/m,相对介电常数41,电导率1μS/cm(测),分压部分长度1mm。
喷孔板的喷孔凸台结构用SU-8光刻胶在流道层板的下方光刻制备,喷孔直径为50μm,突出高度50μm,喷孔8个,间距500μm。喷孔电极32包括粘附层和导电层,粘附层为铬,厚度100nm,导电层为金,厚度70nm,通过磁控溅射工艺制备,使用PI胶带打孔作为掩膜,磁控溅射溅射以后揭下胶带可制得电极图案。电极环形部分外径200μm,引线宽度50μm。其中每个喷孔处的电极电压均单独可调,从而控制每个喷孔处点火状态。最后,在制作突出喷孔面蒸镀特氟龙疏水层,避免墨液扩散。随后将墨盒1和流道板2用环氧树脂胶粘合,并用导电胶带将电极引脚引出,使用环氧树脂胶密封。
使用喷头打印时,先将墨盒1上的安装孔15对准实验平台上螺纹孔,通过螺栓将打印头固定于实验平台上,并调节打印头夹具使喷孔突出结构与打印基板保持平行。通过夹具使得喷头地面与打印基板平行。使用塑胶软管将供墨系统与进墨口连接,供墨系统通过流量泵,将过滤并除去气泡的墨液注入打印头,填充墨盒、流道腔体和喷孔等内部空腔,并将原有气体从出墨口和喷孔部分排出。填充墨液完成后,将引出的导电胶带与高电压发生模块连接。将喷头调节至适当高度,通过工控机控制基板的运动与高压电信号的触发,完成图案化的打印。
此时喷孔的开启电压为2000V。喷头使用时,点火喷孔施加电压2200V,开启喷射。此时,非点火喷孔的分压约为100V,远低于开启阈值,不会发生喷射。喷头可实现独立可控的打印。更进一步,如需要对喷头的电场进行调控,可在非点火喷孔上施加调控电压,电压范围在100V-2000V之间,用以调控喷头的喷印落点精度,同时保证独立可控。
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。
Claims (7)
1.一种无提取电极的阵列化电流体喷头,其特征在于,包括墨盒(1)、流道板(2)和喷孔板(3);
所述流道板(2)设置于所述墨盒(1)底部且其流道腔体内包括与所述墨盒(1)连通的多条微流通道(24);
所述喷孔板(3)设置于所述流道板(2)底部;所述喷孔板(3)包括多个喷孔(31)和与之装配的喷孔电极(32),多个喷孔(31)与多条微流通道(24)对应设置并连通,墨液从所述墨盒(1)流经所述流道腔体并从所述喷孔(31)喷出;
不同喷孔间的微流通道与微流通道内的墨液形成多个分压单元,当向喷孔施加电压时,加电喷孔、分压单元与非加电喷孔形成分压电路,通过调节所述分压单元的电阻阻值或非加电喷孔的接地电阻阻值从而改变加电喷孔与非加电喷孔之间的电势差,以使施加电压与电势差的差小于开启阈值电压,从而实现喷孔的独立控制;
所述分压单元电阻的调节通过调整墨液电阻率和/或微流通道几何尺寸实现。
2.根据权利要求1所述的一种无提取电极的阵列化电流体喷头,其特征在于,所述流道腔体还包括流道入口(21)、流道出口(22)和引流通道(23);所述流道入口(21)和所述流道出口(22)分别位于所述流道腔体两端;所述引流通道(23)设置于所述流道入口(21)与多条微流通道(24)、流道出口(22)与多条微流通道(24)之间,用于将墨盒内的墨液引流至微流通道(24)中或将微流通道(24)中的墨液引流至墨盒内。
3.根据权利要求2所述的一种无提取电极的阵列化电流体喷头,其特征在于,所述多条微流通道(24)包括分叉形、长条形结构分布。
4.根据权利要求2或3所述的一种无提取电极的阵列化电流体喷头,其特征在于,所述墨盒(1)盒体以及设置于所述盒体的安装孔(15)、插槽、进墨口(11)、出墨口(12)、流道层入口(13)和流道层出口(14);所述插槽位于所述盒体的两侧,所述安装孔(15)设置于所述插槽上;所述进墨口(11)和所述出墨口(12)设置于所述盒体的上端;所述流道层入口(13)设置于所述盒体的下端并与所述流道入口(21)连通;所述流道层出口(14)设置于所述盒体的下端并与所述流道出口(22)连通。
5.根据权利要求1所述的一种无提取电极的阵列化电流体喷头,其特征在于,所述喷孔(31)为绝缘材料制成,所述喷孔(31)的一端为空心凸台结构,并与所述微流通道(24)的通孔一一对应。
6.根据权利要求1所述的一种无提取电极的阵列化电流体喷头,其特征在于,所述喷孔板(3)还包括疏水层,所述疏水层设置于所述喷孔(31)和所述喷孔电极(32)的外表面。
7.根据权利要求1所述的一种无提取电极的阵列化电流体喷头,其特征在于,所述墨盒(1)为绝缘材料或导电材料加一层绝缘材料制成。
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