CN113799386A - Double-coupling whispering gallery mode microcavity based on stereolithography 3D printing - Google Patents
Double-coupling whispering gallery mode microcavity based on stereolithography 3D printing Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
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- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
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- B33Y40/00—Auxiliary operations or equipment, e.g. for material handling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
- B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y70/00—Materials specially adapted for additive manufacturing
- B33Y70/10—Composites of different types of material, e.g. mixtures of ceramics and polymers or mixtures of metals and biomaterials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
Abstract
The invention discloses a double-coupling whispering gallery mode microcavity based on stereolithography 3D printing, which is characterized by comprising a tunable laser, an incident single-mode optical fiber, a tapered single-mode optical fiber, a double-ring photopolymer whispering gallery mode microcavity, an output single-mode optical fiber and a spectrum analyzer, wherein the double-ring photopolymer whispering gallery mode microcavity is prepared by utilizing photopolymer to rapidly print on a silicon dioxide substrate and couples an optical signal into the tapered single-mode optical fiber, and the tapered single-mode optical fiber is connected with the tunable laser through the incident single-mode optical fiber and is connected with the spectrum analyzer through the output single-mode optical fiber. According to the invention, the manufacturing speed of the echo wall micro-cavity is increased through the three-dimensional photoetching technology 3D printing, the geometric characteristics of the micro-cavity structure are improved, and meanwhile, the 3D printing also has the advantages of flexible design, rapid preparation and the like. The double-ring photopolymer whispering gallery mode microcavity improves the coupling coefficient, the quality factor and the sensing sensitivity through a double-ring structure.
Description
Technical Field
The invention belongs to the technical field of optical sensing, and particularly relates to a double-coupling whispering gallery mode microcavity based on stereolithography 3D printing.
Background
In recent years, optical sensors play an important role in the modern optical field, and some of the optical sensors have been widely used for sensing and detecting important physical parameters such as temperature, humidity, stress, refractive index and the like by virtue of high sensitivity and fast response speed. However, due to the limited optical sensing path, the degree of interaction between light and the substance to be detected in the common single-channel (optical fiber, straight waveguide) optical sensor is limited, thereby increasing the difficulty of improving the sensitivity of the optical sensor. An optical resonator is an effective solution to overcome the above difficulties, and light can be continuously circulated in a high-quality resonator, enhancing the interaction of light and a substance, and thus improving sensitivity. Optical whispering gallery mode microcavity has become a research hotspot in the field of optical resonator due to its ultra-high quality factor (Q value) and small mode volume. The spectral response of the optical whispering gallery mode microcavity is largely dependent on the geometric properties of the device, e.g., a smooth microcavity has a higher Q value than a rough surface; the microtubes and the microring cavities are more sensitive to changes in the filling in the microcavities due to the hollow structure. The traditional manufacturing method of the non-spherical optical whispering gallery mode microcavity mainly comprises four steps of photoetching, pattern transfer, selective chemical etching on an exposed area and selective reflow. These processes are complex and time consuming, and the resulting structure edges are often rough, limiting the application of optical whispering gallery mode cavities. In order to improve the manufacturing efficiency of the optical echo wall microcavity and the performance of the microcavity, the manufacturing process and the structure design need to be considered at the same time. The invention provides a double-coupling whispering gallery mode microcavity based on stereolithography 3D printing, which is used for rapidly manufacturing an optical whispering gallery mode microcavity with high quality factor and high sensitivity.
Disclosure of Invention
The invention aims to overcome the defects in the background technology and provide a double-coupling echo wall mode microcavity based on stereolithography 3D printing, which improves the manufacturing efficiency of an optical echo wall microcavity and simultaneously improves the edge smoothness of the microcavity by fast 3D printing based on stereolithography. The double-coupling echo wall micro-cavity model designed by the invention is of a double-ring structure, and the coupling coefficient can be improved through two adjacent annular micro-cavities, so that the sensitivity of the micro-cavity is improved.
The technical scheme adopted for realizing the technical purpose is as follows:
a double-coupling whispering gallery mode microcavity based on stereolithography 3D printing comprises a tunable laser (1), an incidence single-mode fiber (2), a tapered single-mode fiber (3), a double-ring photopolymer whispering gallery mode microcavity (4), an output single-mode fiber (5) and a spectrum analyzer (6), wherein the double-ring photopolymer whispering gallery mode microcavity (4) is manufactured by utilizing photopolymer rapid 3D printing on a silicon dioxide substrate and couples optical signals into the tapered single-mode fiber (3), the tapered single-mode fiber (3) is connected with the tunable laser (1) through the incidence single-mode fiber (2), and is connected with the spectrum analyzer (6) through the output single-mode fiber (5).
Further, the tapered single-mode fiber (3) is manufactured through a fiber micro-processing platform, and the excessive taper region length, the taper flat region length and the taper region diameter of the fiber are respectively controlled to be 50 micrometers, 300 micrometers and 2 micrometers.
Further, the double-ring photopolymer whispering gallery mode microcavity (4) is made by rapid 3D printing of a photopolymer on a silicon dioxide substrate, and the specific preparation method comprises the following steps:
1) placing the silicon dioxide substrate on an electric loading platform (8), and coating a photopolymer on the surface of the silicon dioxide substrate;
2) drawing a double-ring photopolymer whispering gallery mode microcavity three-dimensional model to be printed by using computer aided design software (CAD) (9), digitally slicing the generated three-dimensional model into a series of cross-sectional images (10), and then loading the cross-sectional images into a spatial light modulator (DMD) (11);
3) projecting ultraviolet light (UV) from an ultraviolet light emitting diode (12) into a DMD (11) for spatial modulation, the spatially modulated light beam being projected by a projection lens assembly (13) into a photopolymer coated surface of a silica substrate;
4) under the irradiation of ultraviolet rays, the liquid photopolymer is quickly converted into a solid to form a layer of the required model;
5) vertically lowering an electric carrying platform (8) where a printing object is positioned, projecting the next image onto the ongoing image to form a new layer, and repeating the process in all the layers until the printing of the three-dimensional model is finished;
6) after printing, the sample is placed on a heating platform at 95 ℃ and heated for 15 minutes, and after heating treatment, the sample is soaked in Propylene Glycol Methyl Ether Acetate (PGMEA) solution and cultured for 5 minutes.
Further, the photopolymer is SU-8 photoresist.
Further, the printing time of each layer of image is about 300 milliseconds, and the total printing time is about 1 minute.
Further, the three-dimensional model is two circular ring structures (7) with the outer diameter of 225 microns, the inner diameter of 220 microns, the thickness of 20 microns and the interval of 1 micron.
Furthermore, the tapered single-mode optical fiber (3) is also placed on a silicon dioxide substrate and is adjacent to the double-ring photopolymer whispering gallery mode microcavity (4), and the interval between the two is 180 nanometers.
Compared with the prior art, the invention has the following advantages:
the three-dimensional lithography-based 3D printing provided by the invention can quickly manufacture the micro-volume annular echo wall micro-cavity and overcomes the defects of complexity, long time consumption and the like of the traditional manufacturing method of the non-spherical echo wall micro-cavity. And the surface and the edge of the manufactured micro-cavity have higher smoothness, and an ultrahigh Q value can be obtained. Therefore, the 3D printing based on the stereolithography technology has great prospect in the aspect of rapidly manufacturing various polymer optical whispering gallery mode resonators, and can be used for developing multifunctional and compact photonic devices. Meanwhile, the double-ring photopolymer whispering gallery mode resonator provided by the invention effectively improves the coupling efficiency of the resonator, increases the area of interaction of optical substances, improves the sensitivity of the resonator, can detect trace substances quickly and with high sensitivity, and has wide application prospects in various fields such as biochemical sensing and the like.
Drawings
Fig. 1 is a diagram of a double-coupling whispering gallery mode microcavity experimental apparatus based on stereolithography 3D printing provided by the invention.
Fig. 2 is a schematic view of a dual-ring photopolymer whispering gallery mode microcavity of a dual-coupling whispering gallery mode microcavity based on stereolithography 3D printing according to the present invention.
Fig. 3 is a schematic view of a stereolithography-based 3D printing apparatus provided in the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and the detailed description.
Example 1
The double-coupling whispering gallery mode microcavity based on stereolithography 3D printing mainly comprises a tunable laser (1), an incident single-mode fiber (2), a tapered single-mode fiber (3), a double-ring photopolymer whispering gallery mode microcavity (4), an output single-mode fiber (5) and a spectrum analyzer (6). The double-ring photopolymer whispering gallery mode microcavity (4) is made by rapid 3D printing with photopolymer on a silicon dioxide substrate and couples the optical signal into a tapered single mode optical fiber (3). The tapered single-mode fiber (3) is connected with the tunable laser (1) through the incident single-mode fiber (2) and is connected with the spectrum analyzer (6) through the output single-mode fiber (5).
The working principle of the invention is as follows: optical whispering gallery mode resonance is a phenomenon formed by the continuous total reflection of light in micro-cavities such as rings, spheres and the like. One of the conditions under which optical echo wall resonance occurs is that the refractive index of the dielectric cavity is greater than the refractive index of the environment; secondly, the frequency of the incident light is consistent with the resonance frequency of the microcavity. In this case, when light satisfying the resonant frequency is coupled into the microcavity through the waveguide, the light is confined in the cavity and continuously reflected along the curved boundary of the dielectric cavity. If the phase matching condition is satisfied after one cycle of light transmission, stable optical field distribution is formed, and a stable resonance mode is formed. For the microcavity with a smooth surface prepared from a low-loss material, an optical field generated by resonance can be dissipated after a long enough time, which shows that the microcavity with low loss has strong binding capability to light, so that the whispering gallery microcavity has an ultrahigh quality factor and energy density.
The whispering gallery mode is a surface mode, when incident light is continuously reflected along the boundary of the microcavity, an evanescent field can be excited in the microcavity, and the evanescent field and substances filled in the microcavity interact repeatedly. When the refractive index of the filling material in the microcavity changes, the effective refractive index of the optical echo wall resonance changes, which shifts the echo wall resonance wavelength. The double-ring photopolymer whispering gallery mode microcavity comprises two ring-structure resonators, wherein the ring resonator close to the tapered single-mode fiber can be used as a microfluidic channel to detect the refractive index of liquid. Due to its thin wall, the spectral position and the interference state of the coupling-ring resonator can be tuned by passing a liquid through the ring resonator. The interference between the resonant whispering gallery modes in the two ring resonators can cause mode splitting, and the light intensity transmitted through the tapered single-mode fiber can be expressed as:
wherein the content of the first and second substances,
electric field transmission for a single ring resonator coupled to a waveguide;
for the round-trip phase shift between the two ring resonators, li is the circumferential length of the ring, λ is the wavelength, i ═ 1, 2 denote ring resonators 1 and 2, n respectivelyj effFor the effective refractive index, α, of each ring resonatoriTo an absorption coefficient, r1And r2The reflection coefficients of the tapered single-mode fiber to the ring resonator 1 and the ring resonator 1 to the ring resonator 2 are respectively.
When the resonator 1 and the resonator 2 are coupled, one mode in the resonator 1 remains unchanged, and the other mode, i.e., the resonance mode, is split because the two ring structures obtained by 3D printing are not completely identical and all the modes in the resonator 1 do not completely resonate with the resonator 2. N is varied by varying the refractive index of the filling liquid in the ring resonator 11 effThereby changing the resonance of the resonator 1 and the resonance with the resonator 2. In turn, since the change of the interference state of the double-coupled resonator indicates the change of intrinsic parameters such as refractive index and absorption loss, the detection of the parameters such as refractive index can be realized.
With reference to the attached drawing 1, the double-coupling whispering gallery mode microcavity based on stereolithography 3D printing comprises a tunable laser (1), an incident single-mode fiber (2), a tapered single-mode fiber (3), a double-ring photopolymer whispering gallery mode microcavity (4), an output single-mode fiber (5) and a spectrum analyzer (6). The double-ring photopolymer whispering gallery mode microcavity (4) is made by rapid 3D printing with photopolymer on a silicon dioxide substrate and couples the optical signal into a tapered single mode optical fiber (3). The tapered single-mode fiber (3) is connected with the tunable laser (1) through the incident single-mode fiber (2) and is connected with the spectrum analyzer (6) through the output single-mode fiber (5).
With reference to fig. 2, a dual-ring photopolymer whispering gallery mode microcavity (4) specifically includes two ring structures (7) with an outer diameter of 225 microns, an inner diameter of 220 microns, a thickness of 20 microns, and a spacing of 1 micron. And optical signals are coupled through the tapered single-mode optical fiber, and the length of the transition tapered region, the length of the tapered flat region and the diameter of the tapered region of the tapered single-mode optical fiber (3) are respectively controlled to be 50 micrometers, 300 micrometers and 2 micrometers. The interval between the tapered single-mode fiber and the double-ring photopolymer whispering gallery mode resonator is 180 nanometers.
With reference to fig. 3, a method based on stereolithography 3D printing is used to fabricate a double-coupled whispering gallery mode microcavity, and the specific fabrication steps are as follows:
1) the silica substrate is placed on an electrically powered stage (8) and the photopolymer is applied to the surface of the silica substrate.
2) A computer aided design software (CAD) (9) is used for drawing a double-ring photopolymer whispering gallery mode microcavity three-dimensional model to be printed, and the generated three-dimensional model is digitally sliced into a series of cross-sectional images (10) and then loaded into a spatial light modulator (DMD) (11).
3) Ultraviolet light (UV) from an ultraviolet light emitting diode (12) is projected into a DMD (11) for spatial modulation, and the spatially modulated light beam is projected through a projection lens assembly (13) into a photopolymer coated surface of a silica substrate.
4) Under uv irradiation, the liquid photopolymer rapidly transforms into a solid, forming a layer of the desired pattern.
5) Vertically lowering an electric carrying platform (8) where a printing object is positioned, projecting the next image onto the ongoing image to form a new layer, and repeating the process in all the layers until the printing of the three-dimensional model is finished;
6) after printing, the sample is placed on a heating platform at 95 ℃ and heated for 15 minutes, and after heating treatment, the sample is soaked in Propylene Glycol Methyl Ether Acetate (PGMEA) solution and cultured for 5 minutes.
Claims (8)
1. A double-coupling whispering gallery mode microcavity based on stereolithography 3D printing is characterized by comprising a tunable laser, an incident single-mode fiber, a tapered single-mode fiber, a double-ring photopolymer whispering gallery mode microcavity, an output single-mode fiber and a spectrum analyzer, wherein the double-ring photopolymer whispering gallery mode microcavity is manufactured by utilizing rapid 3D printing of photopolymer on a silicon dioxide substrate and couples optical signals into the tapered single-mode fiber, and the tapered single-mode fiber is connected with the tunable laser through the incident single-mode fiber and is connected with the spectrum analyzer through the output single-mode fiber.
2. The double-coupled whispering gallery mode microcavity based on stereolithography 3D printing as claimed in claim 1, wherein the tapered single-mode fiber is made by fiber micro-machining platform, and the transition taper region length, the taper flat region length and the taper region diameter are controlled at 50 microns, 300 microns and 2 microns respectively.
3. The double-coupled whispering gallery mode microcavity based on stereolithography 3D printing as claimed in claim 1, wherein the double-ring photopolymer whispering gallery mode microcavity is made by rapid 3D printing with photopolymer on a silica substrate, the manufacturing method comprises the following steps:
1) placing a silicon dioxide substrate on an electric carrying platform, and coating a photopolymer on the surface of the silicon dioxide substrate;
2) drawing a double-ring photopolymer whispering gallery mode microcavity three-dimensional model to be printed by using computer aided design software (CAD), digitally slicing the generated three-dimensional model into a series of cross-sectional images, and then loading the cross-sectional images into a spatial light modulator (DMD);
3) projecting Ultraviolet (UV) light from an ultraviolet light emitting diode into the DMD for spatial modulation, the spatially modulated light beam being projected through a projection lens assembly into a photopolymer coated on the surface of the silica substrate;
4) under the irradiation of ultraviolet rays, the liquid photopolymer is quickly converted into a solid to form a layer of the required model;
5) vertically lowering an electric carrying platform where a printing object is located, projecting the next image onto an ongoing image to form a new layer, and repeating the process in all the layers until the printing of the three-dimensional model is completed;
6) after printing, the sample is placed on a heating platform at 95 ℃ and heated for 15 minutes, and after heating treatment, the sample is soaked in Propylene Glycol Methyl Ether Acetate (PGMEA) solution and cultured for 5 minutes.
4. The double-coupled whispering gallery mode microcavity based on stereolithography 3D printing as claimed in claim 3, wherein the photopolymer is SU-8 photoresist.
5. The double-coupled whispering gallery mode microcavity based on stereolithography 3D printing as claimed in claim 3, wherein the printing time of each layer of image is about 300 milliseconds, and the total printing time is about 1 minute.
6. The double-coupled whispering gallery mode microcavity based on stereolithography 3D printing as claimed in claim 3, wherein the double-ring photopolymer whispering gallery mode microcavity three-dimensional model is two circular ring structures with 225 μm outer diameter, 220 μm inner diameter, 20 μm thickness and 1 μm spacing.
7. The stereolithography 3D printing-based double-coupled whispering gallery mode microcavity of claim 1, wherein said tapered single-mode fiber is also placed on a silica substrate adjacent to said double-ring photopolymer whispering gallery mode microcavity with a spacing of 180 nm.
8. A double-coupling whispering gallery mode microcavity based on stereolithography 3D printing is characterized in that a tunable laser, an input single-mode fiber, a tapered fiber, an output single-mode fiber and a spectrum analyzer are connected in series in sequence.
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|---|---|---|---|---|
| CN114895413A (en) * | 2022-03-28 | 2022-08-12 | 深圳技术大学 | Waveguide with pore cladding structure and preparation method thereof |
| CN114895413B (en) * | 2022-03-28 | 2023-12-19 | 深圳技术大学 | Waveguide with pore cladding structure and preparation method thereof |
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