CN113797667A - Metal fluoride trap and excimer laser - Google Patents
Metal fluoride trap and excimer laser Download PDFInfo
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- CN113797667A CN113797667A CN202010535285.4A CN202010535285A CN113797667A CN 113797667 A CN113797667 A CN 113797667A CN 202010535285 A CN202010535285 A CN 202010535285A CN 113797667 A CN113797667 A CN 113797667A
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- dust removal
- pipe
- metal fluoride
- supporting plate
- dust removing
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- 229910001512 metal fluoride Inorganic materials 0.000 title claims abstract description 68
- 239000000428 dust Substances 0.000 claims abstract description 135
- 239000002245 particle Substances 0.000 claims abstract description 26
- 238000001914 filtration Methods 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 3
- 239000007769 metal material Substances 0.000 claims description 17
- 238000010276 construction Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 14
- 238000005245 sintering Methods 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000007723 die pressing method Methods 0.000 claims 1
- 239000002759 woven fabric Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005367 electrostatic precipitation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Abstract
The invention relates to the technical field of laser, in particular to a metal fluoride catcher and an excimer laser, which comprise: the device comprises a cylinder body, a first tube bundle supporting plate, a second tube bundle supporting plate, a dust removing tube and a filter medium structure; the two ends of the plurality of dust removing pipes are supported and fixed by the first pipe bundle supporting plate and the second pipe bundle supporting plate and then are installed in the cylinder body, the first pipe bundle supporting plate and the second pipe bundle supporting plate penetrate through the two ends of the dust removing pipes, the first pipe bundle supporting plate and the second pipe bundle supporting plate are arranged in a sealing mode with the cylinder body, the dust removing pipes form a dust removing pipe bundle, a filter medium structure is wrapped on the dust removing pipe bundle, a dust removing pipe air inlet is formed in each dust removing pipe, and an air inlet is formed in the cylinder body; the airflow carrying charged metal fluoride particles enters from the air inlet of the cylinder body, is filtered by the filter medium structure, is filtered by the dust removal pipe through the air inlet of the dust removal pipe, is discharged from two ports of the dust removal pipe, is subjected to double filtration by the filter medium structure and the dust removal pipe, and obviously improves the metal fluoride filtering capacity of the metal fluoride catcher.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a metal fluoride catcher and an excimer laser.
Background
In the working process of the excimer laser, a large amount of metal fluoride can be generated in a laser cavity, the performance of the laser can be reduced, a window sheet can be damaged when the metal fluoride is deposited on the inner surface of a Brewster window, and the service life of the laser is shortened. The conventional excimer laser includes a Metal Fluoride Trap (MFT) (metal Fluoride trap) structure, which adsorbs metal Fluoride with charges by using an electrostatic precipitation principle, but the existing MFT structure has low precipitation capability and incomplete precipitation.
Disclosure of Invention
The embodiment of the invention provides a metal fluoride catcher and an excimer laser, which at least solve the technical problem of low dust removal capability of the existing metal fluoride catcher.
According to an embodiment of the present invention, there is provided a metal fluoride trap including: the device comprises a cylinder body, a first tube bundle supporting plate, a second tube bundle supporting plate, a dust removing tube and a filter medium structure;
the two ends of the plurality of dust removing pipes are supported and fixed by the first pipe bundle supporting plate and the second pipe bundle supporting plate and then are installed in the cylinder body, the first pipe bundle supporting plate and the second pipe bundle supporting plate penetrate through the two ends of the dust removing pipes, the first pipe bundle supporting plate and the second pipe bundle supporting plate are arranged in a sealing mode with the cylinder body, the dust removing pipes form a dust removing pipe bundle, a filter medium structure is wrapped on the dust removing pipe bundle, a dust removing pipe air inlet is formed in each dust removing pipe, and an air inlet is formed in the cylinder body; the air flow carrying charged metal fluoride particles enters from the air inlet of the cylinder body, is filtered by the filter medium structure, passes through the air inlet of the dust removal pipe, is filtered by the dust removal pipe, and is discharged from two ports of the dust removal pipe.
Further, the trap further comprises: a baffle; the guide plate is sleeved on the dedusting pipe bundle in a clearance mode, and two ends of the guide plate are arranged with the first pipe bundle supporting plate and the second pipe bundle supporting plate in a clearance mode; the air current that carries electrified metal fluoride granule gets into by the air inlet of cylinder body, receives blockking of guide plate to flow to both ends, and reverse flow when flowing to tube bank backup pad one, tube bank backup pad two passes through the filtration of filter medium structure in proper order, after through the dust removal pipe filtration of dust removal pipe air inlet, discharges at the both ends mouth of dust removal pipe.
Further, the mode that the filter medium structure coats the dust removal tube bundle is full coating or sectional coating.
Furthermore, the mode of coating the dust removal tube bundle by the filter medium structure is two-section coating, and a gap is arranged between the two sections of coating; the dust removal pipe is provided with a dust removal pipe air inlet corresponding to the spacing position of the two-section type coating.
Furthermore, the mode of coating the dust removal tube bundle by the filter medium structure is to coat all the dust removal tubes or only coat a plurality of the dust removal tubes.
Furthermore, the filter medium structure is tightly coated on the outer surface of the dust removal pipe and extends into the dust removal pipe bundle.
Furthermore, the structure form of the filter medium structure is integral, two-body type or three-body type; and/or the material of the filter medium structure is metallic material stainless steel 304, stainless steel 316 or non-metallic material ceramic; and/or the filter medium structure adopts a metal material braided fabric mould pressing structure, a metal material sintering structure or a ceramic material sintering structure.
Further, the trap further comprises: the end cover I and the end cover II are connected; the first end cover and the second end cover are covered at two ends of the cylinder body, and air outlets are respectively formed in the positions, located between the first end cover and the first tube bundle supporting plate, and located between the second end cover and the second tube bundle supporting plate, of the two ends of the cylinder body.
Further, the number of the dust removing pipes is 9, 1 dust removing pipe is arranged at the center, and the rest 8 dust removing pipes are uniformly distributed on the periphery.
According to another embodiment of the present invention, there is provided an excimer laser including the metal fluoride trap as defined in any one of the above.
In the metal fluoride catcher and the excimer laser in the embodiment of the invention, the airflow carrying charged metal fluoride particles enters from the air inlet of the cylinder body, is filtered by the filter medium structure, is filtered by the dust removal pipe through the air inlet of the dust removal pipe, and is discharged from two ports of the dust removal pipe, and the airflow carrying charged metal fluoride particles is subjected to double filtration by the filter medium structure and the dust removal pipe, so that the metal fluoride filtering capacity of the metal fluoride catcher is obviously improved, and the dust removal effect is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic diagram of the basic structure of a discharge chamber of a conventional excimer laser;
FIG. 2 is a sectional view showing the structure of a metal fluoride trap according to the present invention;
FIG. 3 is a schematic view of the cylinder block of FIG. 2 with the cylinder block removed;
FIG. 4 is a sectional view of the structure of FIG. 3 with the first end cap and the second end cap removed;
FIG. 5 is a schematic view of the structure of FIG. 4 with the baffle removed;
fig. 6 is a schematic structural view of a filter medium structure in the metal fluoride trap of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The basic structure of an excimer laser discharge chamber is schematically shown in figure 1. The discharge chamber of the excimer laser comprises a discharge chamber cavity 101, a fan 102, an anode base 103, an anode 104, a cathode ceramic plate 105, a cathode 106, a heat sink 107. The other is charged metal fluoride particles 201, which are gas flows 202, 203, 204, 205 carrying the charged metal fluoride particles, and the connection relationship between the elements inside the discharge chamber and the elements inside the discharge chamber, and the function of each element are known technologies of excimer lasers, and are not described herein again.
When the anode 104 and the cathode 106 are discharged, charged metal fluoride particles 201 are generated in a discharge area, the fan 102 rotates at a high speed to generate an air flow 205 carrying the charged metal fluoride particles in the discharge chamber, and after the air flow 205 carrying the charged metal fluoride particles sweeps the cathode 106 and the charged metal fluoride particles 201 generated in the discharge process of the anode 104 discharge area, air flows 202, 203 and 204 carrying the charged metal fluoride particles are formed continuously. The gas stream 204 carrying the charged metal fluoride particles enters the MFT structure 300 through the gas inlet of the MFT structure 300, is filtered by the MFT structure 300, and then flows back to the discharge chamber through the gas outlet of the MFT structure 300.
Example 1
According to an embodiment of the present invention, there is provided a metal fluoride trap including: the device comprises a cylinder body 301, a tube bundle support plate I305, a tube bundle support plate II 306, a dust removal pipe 307 and a filter medium structure 302;
the two ends of the plurality of dust removing pipes 307 are supported and fixed by the first pipe bundle supporting plate 305 and the second pipe bundle supporting plate 306 and then are installed in the cylinder body 301, the two ends of the dust removing pipes 307 penetrate through the first pipe bundle supporting plate 305 and the second pipe bundle supporting plate 306, the first pipe bundle supporting plate 305 and the second pipe bundle supporting plate 306 are hermetically arranged with the cylinder body 301, the plurality of dust removing pipes 307 form a dust removing pipe 307 bundle, the dust removing pipe 307 bundle is coated with the filter medium structure 302, the dust removing pipe 307 is provided with a dust removing pipe 307 air inlet, and the cylinder body 301 is provided with an air inlet; the gas flow 204 carrying the charged metal fluoride particles enters from the air inlet of the cylinder 301, is filtered by the filter medium structure 302, passes through the air inlet of the dust removal pipe 307, is filtered by the dust removal pipe 307, and is discharged from two ports of the dust removal pipe 307.
In the metal fluoride catcher in the embodiment of the invention, the airflow 204 carrying charged metal fluoride particles enters from the air inlet 3011 of the cylinder 301, is filtered by the filter medium structure 302, is filtered by the dust removal pipe 307 through the dust removal pipe air inlet 3071, and is discharged from two ports of the dust removal pipe 307, and the airflow 204 carrying charged metal fluoride particles is double filtered by the filter medium structure 302 and the dust removal pipe 307, so that the metal fluoride filtering capacity of the metal fluoride catcher is obviously improved, and the dust removal effect is improved.
Wherein, the catcher further comprises: a deflector 308; the guide plate 308 is sleeved on the dedusting pipe 307 bundle in a clearance way, and two ends of the guide plate 308 are arranged with the first tube bundle support plate 305 and the second tube bundle support plate 306 in a clearance way; the air flow 204 carrying the charged metal fluoride particles enters from the air inlet of the cylinder 301, flows to both ends under the blockage of the guide plate 308, flows in the reverse direction when flowing to the first tube bundle support plate 305 and the second tube bundle support plate 306, is filtered by the filter medium structure 302, passes through the air inlet of the dust removal tube 307 and the dust removal tube 307, and is discharged from both ends of the dust removal tube 307. Through the double filtration of filter medium structure 302 and dust removal pipe 307 in proper order, show the metal fluoride filtration ability that improves metal fluoride trapper, promote the dust removal effect.
The filter medium structure 302 covers the bundle of dust removing pipes 307 in a full-covering or segmented-covering manner.
Wherein, the mode of coating the dust removal pipe 307 bundle by the filter medium structure 302 is two-section coating, and a gap is arranged in the middle; the dust removal pipe 307 is provided with a dust removal pipe 307 air inlet at the position corresponding to the interval of the two-section coating.
The way of coating the dust removal tube 307 bundle by the filter medium structure 302 is to coat all the dust removal tubes 307, or to coat only a plurality of the dust removal tubes 307.
Wherein the filter medium structure 302 is tightly wrapped on the outer surface of the dust removing pipe 307 and extends into the interior of the bundle of dust removing pipes 307.
Wherein, the structure form of the filter medium structure 302 is integral, two-body type, three-body type; and/or the material of the filter medium structure 302 is metallic material stainless steel 304, stainless steel 316 or non-metallic material ceramic; and/or the filter media construction 302 may be a stamped construction of a metal material braid, a sintered construction of a metal material, or a sintered construction of a ceramic material.
Wherein, the catcher further comprises: a first end cover 303 and a second end cover 304; the first end cover 303 and the second end cover 304 are covered at two ends of the cylinder body 301, and air outlets are respectively formed in the positions, located between the first end cover 303 and the first tube bundle supporting plate 305, and located between the second end cover 304 and the second tube bundle supporting plate 306, at the two ends of the cylinder body 301. The filtered gas is discharged through the gas outlet after double filtering by the filter medium structure 302 and the dust removing pipe 307.
The number of the dust removing pipes 307 is 9, the number of the dust removing pipes is 1 at the center, and the rest 8 dust removing pipes are uniformly distributed at the periphery.
The present invention will be described in detail below with reference to specific examples.
The MFT structure 300 is shown in fig. 2. MFT structure 300 includes, but is not limited to, cylinder 301, first end cap 303, second end cap 304, first tube bundle support plate 305, second tube bundle support plate 306, dust removal tube 307, filter media structure 302, flow guide plate 308, and mounting flange 309.
The cylinder 301 serves as a housing for the entire MFT structure 300; the first end cover 303 and the second end cover 304 are connected with the cylinder body 301 through screws, and the MFT structure 300 is sealed at two ends of the cylinder body 301; the first tube bundle support plate 305 and the second tube bundle support plate 306 play a role in fixing 9 dust removal tubes 307, and the dust removal tubes 307 are welded and fixed with the first tube bundle support plate 305 and the second tube bundle support plate 306; during assembly, a welding assembly formed by the first tube bundle support plate 305, the second tube bundle support plate 306 and the dust removal tube 307 extends into the cylinder body 301 from one end of the cylinder body, the other end of the welding assembly is connected to the first tube bundle support plate 305 through a fixing flange 309 through screws, and meanwhile, the welding assembly is positioned through limiting of a step surface on the inner side of the cylinder body 301.
The MFT structure 300 works as follows: the gas flow 204 containing the charged metal fluoride particles enters the MFT structure 300 through the gas inlet 3011 of the cylinder 301, flows to both ends under the blocking of the flow guide plate 308, flows to the ends close to the first tube bundle support plate 305 and the second tube bundle support plate 306 in opposite directions, is filtered by the filter medium structure 302 to reach the center of the dust removal tube 307, enters the dust removal tube 307 through the dust removal tube gas inlet 3071, flows out from both ends of the dust removal tube 307 after electrostatic dust removal in the dust removal tube 307, and flows back to the discharge cavity through the gas outlet 3012 on the cylinder 301.
The traditional MFT has no filter medium structure 302, and only passes through the electrostatic dust removal effect of the dust removal pipe 307, so that the dust removal effect is not ideal. To further explain the structure of the present invention, fig. 3 is a structural view with the cylinder 301 removed. Fig. 4 is a structural diagram with the first end cap 303 and the second end cap 304 removed. Fig. 5 is a block diagram with the baffle 308 removed.
The filter media construction 302 is assembled with the dust extraction tube 307 as shown in fig. 4-5. The filter media construction 302 is tightly wrapped around the outer surface of the dust removal tubes 307 and extends into the interior of the dust removal tube bundle assembly formed by the plurality of dust removal tubes 307.
It is necessary for the filter media construction 302 to be fluoride corrosion resistant, such as metallic materials stainless steel 304, stainless steel 316, non-metallic materials ceramic, and the like. And metal fluoride particles generated by the discharge cavity of the molecular laser must be aligned, for example, the particle diameter is 5 μm-8 μm, so that the metal fluoride particles have a good filtering effect, and the filter medium structure 302 must have a certain porosity to ensure the circulation of gas.
The requirements for the fabrication process of the filter media construction 302: the processing and manufacturing process is not limited as long as the requirement on the filtering performance of the metal fluoride particles can be met. For example, a metal material braided fabric mould pressing structure (a net structure), a metal material sintering structure and a ceramic material sintering structure can be adopted, wherein the two structures of the metal material sintering structure and the ceramic material sintering structure are different from the net structure, and the porosity of the different structures is also different. Preferably, the porosity of the braid molded structure is 30 to 35%, and the porosity of the sintered structure is 25 to 30%. For the structural form aspect of the filter media construction 302: the filter media construction 302 components may take a unitary form, or may take a separate form, such as unitary, two-piece, three-piece, etc. Figure 6 schematically shows monolithic, two-piece and three-piece structures.
For the number of installations of the filter media construction 302. The length of the structure can be increased or decreased appropriately according to the difficulty of the processing technology of the product, the requirement on the filtering capacity of particles and the like, the dust removal pipes 307 can be completely wrapped or divided into a plurality of sections, a certain interval is arranged in the middle, the installation number of the dust removal pipes can be changed to a certain extent, all the dust removal pipes 307 can be wrapped, and only a few dust removal pipes 307 can be wrapped.
After the dust removal tube bundle is sleeved with the plurality of filter medium structures 302, the dust removal tube bundle is fixed, air flow is guided to move according to a designated path, and the guide plates 308 are coated on the outer side of the dust removal tube bundle and are bound by a binding belt.
Example 2
According to another embodiment of the present invention, there is provided an excimer laser including the metal fluoride trap as above.
In the excimer laser in the embodiment of the invention, the air flow 204 carrying charged metal fluoride particles enters from the air inlet 3011 of the cylinder 301, is filtered by the filter medium structure 302, is filtered by the dust removal pipe 307 through the dust removal pipe air inlet 3071, and is discharged from two ports of the dust removal pipe 307, and the air flow 204 carrying charged metal fluoride particles is double-filtered by the filter medium structure 302 and the dust removal pipe 307, so that the metal fluoride filtering capacity of the metal fluoride catcher is obviously improved, and the dust removal effect is improved.
The invention adds a filter medium structure on the basis of the traditional MFT structure, and can greatly improve the dust removal capability of the MFT structure. The invention provides a metal fluoride catcher and an excimer laser, which can effectively solve the following problems: the dust removal capability is low, and the dust removal is not thorough. The filtering capacity of the MFT structure to the metal fluoride is enhanced by coating a filtering medium structure on the outer side of a dust removal pipe on the metal fluoride catcher, namely the MFT structure. Compared with the prior art, the invention can obtain the following beneficial effects: the metal fluoride filtering capacity of the MFT structure is obviously improved, and the dust removal effect is improved.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
In the above embodiments of the present invention, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the embodiments provided in the present application, it should be understood that the disclosed technology can be implemented in other ways. The above-described system embodiments are merely illustrative, and for example, a division of a unit may be a logical division, and an actual implementation may have another division, for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, units or modules, and may be in an electrical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic or optical disk, and other various media capable of storing program codes.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A metal fluoride trap, comprising: the device comprises a cylinder body, a first tube bundle supporting plate, a second tube bundle supporting plate, a dust removing tube and a filter medium structure;
the two ends of the plurality of dust removing pipes are supported and fixed by the first pipe bundle supporting plate and the second pipe bundle supporting plate and then are installed in the cylinder body, the first pipe bundle supporting plate and the second pipe bundle supporting plate penetrate through the two ends of the dust removing pipes, the first pipe bundle supporting plate and the second pipe bundle supporting plate are arranged in a sealing mode with the cylinder body, the dust removing pipes form a dust removing pipe bundle, the dust removing pipe bundle is wrapped with the filter medium structure, the dust removing pipes are provided with dust removing pipe air inlets, and the cylinder body is provided with air inlets; and the airflow carrying charged metal fluoride particles enters from the air inlet of the cylinder body, is filtered by the filter medium structure, passes through the air inlet of the dust removal pipe, is filtered by the dust removal pipe, and is discharged from two ports of the dust removal pipe.
2. The metal fluoride trap of claim 1, further comprising: a baffle; the guide plate is sleeved on the dedusting tube bundle in a clearance mode, and two ends of the guide plate are arranged in a clearance mode with the tube bundle supporting plate I and the tube bundle supporting plate II; the air flow carrying charged metal fluoride particles enters from the air inlet of the cylinder body, flows to two ends under the blocking of the guide plate, flows to the first tube bundle support plate and the second tube bundle support plate in a reverse direction, sequentially passes through the filtering of the filter medium structure and the air inlet of the dust removal tube, passes through the two end ports of the dust removal tube after being filtered.
3. The metal fluoride trap of claim 1, wherein the filter media construction is coated around the dust removal tube bundle in a full or segmented coating.
4. The metal fluoride trap of claim 3, wherein the filter media construction is wrapped around the dust removal tube bundle in a two-stage wrap with a space in between; and the dust removal pipe is provided with a dust removal pipe air inlet at an interval position corresponding to the two-section type coating.
5. The metal fluoride trap of claim 1, wherein the filter media construction wraps the bundle of dust removal tubes in a manner that wraps all of the dust removal tubes, or only a number of the dust removal tubes.
6. The metal fluoride trap of claim 1, wherein the filter media construction is tightly wrapped over the outer surface of the dust removal tube and into the interior of the dust removal tube bundle.
7. The metal fluoride trap of claim 1, wherein the filter media structure is in the form of a monolith, a two-piece, a three-piece; and/or the material of the filter medium structure is metallic material stainless steel 304, stainless steel 316 or non-metallic material ceramic; and/or the filter medium structure adopts a metal material braided fabric die pressing structure, a metal material sintering structure or a ceramic material sintering structure.
8. The metal fluoride trap of claim 7,
the porosity of the woven fabric mould pressing structure is 30-35%, and the porosity of the sintering structure is 25-30%.
9. The metal fluoride trap of claim 1, wherein the number of the dust removal tubes is 9, 1 at the center, and the remaining 8 are uniformly distributed at the periphery.
10. An excimer laser comprising the metal fluoride trap of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010535285.4A CN113797667A (en) | 2020-06-12 | 2020-06-12 | Metal fluoride trap and excimer laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010535285.4A CN113797667A (en) | 2020-06-12 | 2020-06-12 | Metal fluoride trap and excimer laser |
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| CN113797667A true CN113797667A (en) | 2021-12-17 |
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| WO2019112809A1 (en) * | 2017-12-05 | 2019-06-13 | Cymer, Llc | Nonwoven screens for dust trapping in laser discharge chambers |
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2020
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8524367D0 (en) * | 1985-10-02 | 1985-11-06 | Boc Health Care | Scavenging & filtration apparatus |
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Application publication date: 20211217 |