CN113791092A - Water distributor for cooling transmission electron microscope and water distribution system thereof - Google Patents
Water distributor for cooling transmission electron microscope and water distribution system thereof Download PDFInfo
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- CN113791092A CN113791092A CN202110836107.XA CN202110836107A CN113791092A CN 113791092 A CN113791092 A CN 113791092A CN 202110836107 A CN202110836107 A CN 202110836107A CN 113791092 A CN113791092 A CN 113791092A
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 331
- 230000005540 biological transmission Effects 0.000 title claims abstract description 62
- 238000001816 cooling Methods 0.000 title claims abstract description 15
- 230000001105 regulatory effect Effects 0.000 claims abstract description 16
- 230000001276 controlling effect Effects 0.000 claims abstract description 7
- 238000004891 communication Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 13
- 239000008400 supply water Substances 0.000 abstract description 8
- 238000007789 sealing Methods 0.000 abstract description 5
- 239000000498 cooling water Substances 0.000 description 15
- 238000013461 design Methods 0.000 description 8
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000006378 damage Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/03—Investigating materials by wave or particle radiation by transmission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/31—Accessories, mechanical or electrical features temperature control
- G01N2223/3103—Accessories, mechanical or electrical features temperature control cooling, cryostats
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
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Abstract
The application relates to the technical field of water distribution of instruments, in particular to a water distributor for cooling a transmission electron microscope and a water distribution system thereof. The water distributor comprises a main flow pipe, one end of the main flow pipe is provided with a water flow port, a first cavity and a second cavity are arranged in the main flow pipe, and the first cavity is communicated with the water flow port; and the regulating valve is arranged on the main flow pipe and used for controlling the on-off of the first chamber and the second chamber. The water distribution system of this application connects the water distributor of this application respectively at the both ends of water distribution pipeline, the governing valve through adjusting the water distributor realizes switching on and closing of part water distribution pipeline, and then satisfy transmission electron microscope and toast in-process part water distribution pipeline (like vacuum pump and high voltage power supply) and need continuously supply water, and other water distribution pipeline (like coils such as objective coil) need not the condition that supplies water, need not to dismantle operations such as water distribution pipeline, the cost of labor has been saved is efficient simultaneously, can not lead to water distribution pipeline interface sealing performance to descend, the percolating water phenomenon has been avoided.
Description
Technical Field
The application relates to the technical field of water distribution of instruments, in particular to a water distributor for cooling a transmission electron microscope and a water distribution system thereof.
Background
In the operation process of the transmission electron microscope, sufficient cooling water needs to be provided for main heating components (such as a vacuum pump, a high-voltage power supply, a transmission electron microscope objective lens coil and the like) to ensure the normal operation of the electron microscope, and the damage to the measurement of the electron microscope and an internal precise assembly structure caused by high temperature is avoided. Because the transmission electron microscope has extremely high requirements on vacuum, the operation mode of improving the vacuum degree is baking, and the baking temperature needs to reach more than 100 ℃, so that cooling water does not exist in the objective coil of the transmission electron microscope and other coils of the transmission electron microscope under the condition that a vacuum pump and a high-voltage power supply normally work in the baking process, and the internal structure of the electron microscope is prevented from being damaged by vaporization expansion of the cooling water at high temperature.
At present, the water distribution system on the market can not satisfy the user demand of transmission electron microscope, and the operation is complicated when adopting the function of toasting, needs to dismantle the operation such as waiting to the water distribution system pipeline, and extravagant cost of labor is inefficiency simultaneously, and transmission electron microscope is higher to laboratory cleanliness factor and humidity requirement, and the frequent dismantlement of water distribution system pipeline easily leads to the sealing performance of interface to descend with the installation, leads to the percolating water phenomenon to produce, and then can pollute the laboratory place.
Disclosure of Invention
The application provides a be used for refrigerated water injection mandrel of transmission electron microscope and water distribution system thereof for solve present being used for refrigerated water injection mandrel of transmission electron microscope and water distribution system and operate complicacy when adopting the baking function and need dismantle the operation such as the water distribution system pipeline, extravagant cost of labor is inefficiency simultaneously, and transmission electron microscope requires higher to laboratory cleanliness factor and humidity, the frequent dismantlement of water distribution system pipeline easily leads to the sealing performance of interface to descend with the installation, lead to the percolating water phenomenon to produce, and then can pollute the problem in laboratory place.
The application provides a water injection mandrel for transmission electron microscope cooling includes:
the water flow device comprises a main flow pipe, a water flow inlet is formed in one end of the main flow pipe, a first chamber and a second chamber are formed in the main flow pipe, and the first chamber is communicated with the water flow inlet;
and the regulating valve is arranged on the main flow pipe and used for controlling the on-off of the first chamber and the second chamber.
In one possible design, the device further comprises a first branch pipeline connector, and the first branch pipeline connector is communicated with the first cavity.
In a possible design, a second branch pipe connection is further included, which communicates with the second chamber.
In a possible design, a third branch line connection is also included, which communicates with the second chamber.
The application also provides a water distribution system for cooling the transmission electron microscope, which comprises a first water distributor, a water distribution pipeline and a second water distributor, wherein one end of the water distribution pipeline is connected with the first water distributor, and the other end of the water distribution pipeline is connected with the second water distributor;
the first water distributor and the second water distributor are both the water distributors; the water flow port of the first water distributor is a water inlet, and the water flow port of the second water distributor is a water outlet.
In one possible design, the water distribution pipeline comprises a first water distribution pipeline, one end of the first water distribution pipeline is connected with a first branch pipeline connector of the first water distributor, and the other end of the first water distribution pipeline is connected with a first branch pipeline connector of the second water distributor;
the water distribution pipeline also comprises a second water distribution pipeline, one end of the second water distribution pipeline is connected with a second branch pipeline connector of the first water distributor, and the other end of the second water distribution pipeline is connected with a second branch pipeline connector of the second water distributor;
and the first water distribution pipeline and the second water distribution pipeline are respectively provided with a first switch valve and a second switch valve.
In one possible design, the number of the first water distribution pipelines is two, and the first water distribution pipelines are used for distributing water for a vacuum pump of a transmission electron microscope and a high-voltage power supply; the number of the second water distribution pipes is one or more, and the second water distribution pipes are used for distributing water for the coil of the transmission electron microscope.
In one possible design, the water distribution system comprises an air compressor, and the air compressor is communicated with a third branch pipeline connector of the first water distributor through an air pressure pipeline; and a third switch valve is arranged on the air pressure pipeline.
In one possible design, the water distribution system further comprises an exhaust pipe, the exhaust pipe is communicated with a third branch pipe connector of the second water distributor; and an emptying valve is arranged on the exhaust pipeline.
In one possible design, the water distribution system further comprises a water inlet pipe and a water outlet pipe, the water inlet pipe is connected to the water inlet of the first water distributor, and the water outlet pipe is connected to the water outlet of the second water distributor; a fourth switch valve is arranged on the water inlet pipeline; and a fifth switch valve is arranged on the water outlet pipeline.
The application has the following advantages:
the utility model provides a water injection mandrel for transmission electron microscope cooling is including the mainstream pipe that has first cavity and second cavity, and install the governing valve on the mainstream pipe and be used for controlling the break-make of first cavity and second cavity, such water injection mandrel is when carrying out normal water distribution for the transmission electron microscope, open the governing valve, the water distribution pipeline with first cavity and second cavity intercommunication can both obtain the water distribution, in order to realize the normal cooling water distribution of vacuum pump in the transmission electron microscope, high voltage power supply, objective coil etc., when carrying out the water distribution for the transmission electron microscope in the baking process, close the governing valve, the normal water distribution of first cavity, the second cavity does not distribute water, can satisfy transmission electron microscope like this and need continuously supply water in the baking in-process part water distribution branch (like vacuum pump and high voltage power supply), and the condition that other branch roads (like objective coil and other coils) need not supply water. The water distributor can be switched between different water distribution scenes only by controlling the switch of the regulating valve, and does not need to detach the water distribution pipeline and the like, so that the water distributor is simple and convenient to operate and high in efficiency.
The utility model provides a water distributor that this application is connected respectively at water distribution pipeline's both ends to a water distribution system for transmission electron microscope refrigerated, the governing valve through adjusting the water distributor realizes switching on and closing of partial water distribution pipeline, and then can satisfy transmission electron microscope and toast in-process partial water distribution pipeline (like vacuum pump and high voltage power supply) and need continuously supply water, and other water distribution pipeline (like objective coil and other coils) need not the condition that supplies water, need not to dismantle operations such as the water distribution pipeline, the cost of labor has been saved and is efficient simultaneously, and simultaneously, the interface sealing performance that can not appear leading to because frequent dismantlement and the installation of water distribution pipeline descends, lead to the percolating water phenomenon to produce.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
FIG. 1 is a schematic structural diagram of a water distributor for cooling by a transmission electron microscope provided by the application;
FIG. 2 is a schematic diagram of water distribution of a water distribution system for cooling a transmission electron microscope according to the present application when the water distribution system is used for normally supplying water to the transmission electron microscope;
fig. 3 is a schematic water distribution diagram of the water distribution system for cooling a transmission electron microscope in fig. 2 during baking of the transmission electron microscope.
Reference numerals:
1-a first water distributor;
11-a main flow pipe;
110-water flow port;
111 a first chamber;
112-a second chamber;
12-a regulating valve;
13-a first shunt conduit connector;
14-a second branch pipe connector;
15-a third branch line connector;
1' -a second water distributor;
12' -a regulating valve;
2-water distribution pipeline;
21-a first water distribution pipeline;
210-a first on-off valve;
22-a second water distribution pipeline;
220-a second on-off valve;
3, an air compressor;
4-a pneumatic pipeline;
40-a third on-off valve;
5-a water inlet pipeline;
50-a fourth switch valve;
6-water outlet pipeline;
60-a fifth on-off valve;
7-an exhaust duct;
70-emptying valve.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.
Detailed Description
For better understanding of the technical solutions of the present application, the following detailed descriptions of the embodiments of the present application are provided with reference to the accompanying drawings.
It should be understood that the embodiments described are only a few embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terminology used in the embodiments of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
It should be noted that the terms "upper", "lower", "left", "right", and the like used in the embodiments of the present application are described in terms of the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.
The embodiment of the application provides a water distributor for cooling a transmission electron microscope, as shown in fig. 1, the water distributor comprises a main flow pipe 11 and a regulating valve 12, a water flow port 110 is arranged at one end of the main flow pipe 11, a first chamber 111 and a second chamber 112 are arranged in the main flow pipe 11, and the first chamber 111 is communicated with the water flow port 110. A regulating valve 12 is installed on the main flow pipe 11 for controlling the opening and closing of the first chamber 111 and the second chamber 112.
In this embodiment, the water distributor comprises a main flow pipe 11 having a first chamber 111 and a second chamber 112, and a regulating valve 12 is arranged on the main flow pipe 11 for controlling the on-off of the first chamber 111 and the second chamber 112, when the water distributor is used for normally distributing water for the transmission electron microscope, the regulating valve 12 is opened, the water distribution pipes communicating with the first chamber 111 and the second chamber 112 are both able to receive water distribution, so as to realize normal cooling water distribution of a vacuum pump, a high-voltage power supply, an objective lens coil and the like in the transmission electron microscope, when the transmission electron microscope is supplied with water during the baking process, the regulating valve 12 is closed, the first chamber 111 is normally supplied with water, the second chamber 112 is not supplied with water, therefore, the situation that part of water distribution branches (such as a vacuum pump and a high-voltage power supply) need to be supplied with water continuously in the baking process of the transmission electron microscope, and other water distribution branches (such as an objective lens coil and other coils) do not need to be supplied with water can be met. The water distributor of this application when carrying out different water distribution scenes and switching, only need just can realize through the switch of control governing valve 12, need not dismantle operations such as to the water distribution pipeline, easy operation is convenient, and is efficient.
In another embodiment, a first branch pipe connector 13 is further included, and the first branch pipe connector 13 is in communication with the first chamber 111.
In this embodiment, a first branch pipeline connector 13 communicated with the first chamber 111 is arranged on the water distributor and is used for connecting a vacuum pump of the transmission electron microscope and a water distribution pipeline of the high-voltage power supply, so that water distribution of the vacuum pump of the transmission electron microscope and the high-voltage power supply by the water distributor is realized.
In one embodiment, a second branch line connector 14 is included, the second branch line connector 14 being in communication with the second chamber 112.
In this embodiment, the water distributor is provided with a second branch pipeline connector 14 communicated with the second chamber 112, and the second branch pipeline connector is used for connecting the objective lens coil and other coils of the transmission electron microscope, so as to distribute water to the coil of the transmission electron microscope.
In another embodiment, a third branch line connection 15 is included, the third branch line connection 15 being in communication with the second chamber 112.
In this embodiment, through set up the third tributary pipe connection head 15 with second chamber 112 intercommunication on the water injection mandrel, this third tributary pipe connection head 15 can be used for connecting the purging device, for example, the air compressor machine purges the device, when transmission electron microscope is in the stoving mode, governing valve 12 closes, do not distribute water in the second chamber 112, simultaneously in order to prevent remaining cooling water in the second chamber 112 vaporization expansion destruction electron microscope inner structure under high temperature, blow out remaining cooling water through the pipeline through the third tributary pipe connection head 15 connection purging device.
The embodiment of the application also provides a water distribution system for cooling a transmission electron microscope, as shown in fig. 2 and 3, the water distribution system comprises a first water distributor 1, a water distribution pipeline 2 and a second water distributor 1', wherein one end of the water distribution pipeline 2 is connected with the first water distributor 1, and the other end of the water distribution pipeline is connected with the second water distributor 1'.
The first water distributor 1 and the second water distributor 1' are both the water distributors of the present application, and specifically, the water flow port 110 of the first water distributor 1 is a water inlet, and the water flow port 110' of the second water distributor 1' is a water outlet.
In this embodiment, the two ends of the water distribution pipeline 2 are respectively connected with the first water distributor 1 and the second water distributor 1', the on and off of part of the water distribution pipeline 2 are realized by adjusting the regulating valves (12, 12') of the first water distributor 1 and the second water distributor 1', so that the situation that part of the water distribution pipeline 2 (such as a vacuum pump and a high-voltage power supply) needs to continuously supply water in the baking process of the transmission electron microscope can be met, and the other water distribution pipeline 2 (such as an objective lens coil and other coils) does not need to supply water, the operations such as disassembling the water distribution pipeline and the like are not needed, the labor cost is saved, the efficiency is high, meanwhile, the interface sealing performance reduction caused by frequent disassembling and assembling of the water distribution pipeline can be avoided, and the water leakage phenomenon can be caused.
In another embodiment, the water distribution pipe 2 comprises a first water distribution pipe 21, one end of the first water distribution pipe 21 is connected with the first branch pipe connection 13 of the first water distributor 1, and the other end is connected with the first branch pipe connection 13 'of the second water distributor 1'.
The water distribution pipe 2 further comprises a second water distribution pipe 22, one end of the second water distribution pipe 22 is connected with the second branch pipe connector 14 of the first water distributor 1, and the other end is connected with the second branch pipe connector 14 'of the second water distributor 1'.
The first and second distribution pipes 21 and 22 are provided with a first and second on-off valves 210 and 220, respectively.
Specifically, the number of the first water distribution pipes 21 is two, and the first water distribution pipes are used for distributing water to a vacuum pump of a transmission electron microscope and a high-voltage power supply. The number of the second water distribution pipes 22 is two, and the two second water distribution pipes are used for distributing water for an objective lens coil and other coils of the transmission electron microscope.
In this embodiment, through set up first distribution pipe 21 and second distribution pipe 22 in the water distribution system, be used for transmission electron microscope's vacuum pump and high voltage power supply's water distribution and transmission electron microscope's objective coil and other coil's water distribution respectively, and communicate first distribution pipe 21 and second distribution pipe 22 with the different cavity of water distributor, the control of rethread water distributor adjusting valve, realize switching on and closing of different distribution pipes, guarantee transmission electron microscope when normal water distribution, first distribution pipe 21 and second distribution pipe 22 can both continuously supply water, in the baking process, first distribution pipe 21 continuously supplies water, and second distribution pipe 22 does not supply water. The first and second distribution pipes 21 and 22 are opened and closed by providing a first and second switching valves 210 and 220 on the first and second distribution pipes 21 and 22, respectively.
In another embodiment, the water distribution system comprises an air compressor 3, and the air compressor 3 is communicated with a third branch pipeline connector 15 of the first water distributor 1 through an air pressure pipeline 4. The pneumatic pipe 4 is provided with a third on/off valve 40.
In this embodiment, set up air compressor machine 3 in the water distribution system to air compressor machine 3 is through the third tributary pipe connection head 15 intercommunication of atmospheric pressure pipeline 4 with first water injection mandrel 1, and air compressor machine 3 can realize that transmission electron microscope sweeps remaining cooling water in the second cavity 112 with third tributary pipe connection head 15 intercommunication through gas in toasting the in-process, prevents that remaining cooling water from vaporizing expansion destruction electron microscope inner structure under high temperature in second cavity 112 and the second water injection pipeline 22.
In a particular embodiment, the water distribution system further comprises a gas discharge conduit 7, the gas discharge conduit 7 communicating with a third branch conduit connection 15 'of the second water distributor 1'. The exhaust pipe 7 is provided with an emptying valve 70.
In this embodiment, an exhaust pipe 7 is provided in the water distribution system, and the exhaust pipe 7 communicates with the third branch pipe connection 15 'of the second water distributor 1'. The cooling water blown by the air compressor 3 in the baking process of the transmission electron microscope is discharged out of the second water distribution pipeline 22 through the exhaust pipeline 7. By installing the air release valve 70 on the exhaust pipe 7, the air release valve 70 is closed during normal water distribution by the transmission electron microscope, so as to ensure normal water supply of the second water distribution pipe 22.
In another embodiment, the water distribution system further comprises a water inlet pipe 5 and a water outlet pipe 6, the water inlet pipe 5 being connected to the water inlet of the first water distributor 1 and the water outlet pipe 6 being connected to the water outlet of the second water distributor 1'. The inlet pipe 5 is provided with a fourth on-off valve 50. The outlet pipe 6 is provided with a fifth on-off valve 60.
In this embodiment, the water distribution system further includes a water inlet pipe 5 and a water outlet pipe 6, the water supply of the whole water distribution system is realized through the water inlet pipe 5, the water inlet pipe 5 is connected to the water inlet of the first water distributor 1, and the water is distributed through the first water distributor 1. The water outlet of the whole water distribution system is realized through the water outlet pipeline 6, the water outlet pipeline 6 is connected with the water outlet of the second water distributor 1', and water is collected through the second water distributor 1'. The water inlet pipe 5 and the water outlet pipe 6 are closed and opened by arranging the fourth on-off valve 50 on the water inlet pipe 5 and the fifth on-off valve 60 on the water outlet pipe 6.
The application method of the water distribution system for cooling the transmission electron microscope comprises the following steps:
when the transmission electron microscope is used for normal water distribution, as shown in fig. 2, the regulating valve 12', the first switch valve 210, the second switch valve 220, the fourth switch valve 50 and the fifth switch valve 60 are opened and regulated to a proper flow, the third switch valve 40 and the emptying valve 70 are closed, cooling water flows into the first water distributor 1 through the water inlet pipe 5 and then is distributed through the first water distributor 1, and the cooling water is divided into four paths and flows into the vacuum pump, the high-voltage power supply, the transmission electron microscope objective coil and other coils of the transmission electron microscope through the two first water distribution pipes 21 and the two second water distribution pipes 22. The cooling water flows through the heat generating components, then flows into the first water distributor 1', and then flows back to the water cooler through the water outlet pipe 6.
When the transmission electron microscope is used for baking, as shown in fig. 3, the first switch valve 210, the second switch valve 220, the third switch valve 40, the fourth switch valve 50, the fifth switch valve 60 and the emptying valve 70 are opened, the proper flow is adjusted, the regulating valve 12 and the regulating valve 12 'are closed, cooling water flows into the first water distributor 1 through the water inlet pipeline 5, is divided into two paths through the first water distributor 1, flows into the vacuum pump and the high-voltage power supply through the two first water distribution pipelines 21, the normal operation of the vacuum pump and the high-voltage power supply is ensured, then the cooling water converges into the first water distributor 1', and then flows back into the water cooler through the water outlet pipeline 6. Meanwhile, the air compressor 3 provides compressed air which enters the first water distributor 1 through the air pressure pipeline 4 and is divided into two paths to flow into the objective lens coil of the transmission electron microscope and other coils of the transmission electron microscope through the two second water distribution pipelines 22, after the residual liquid in the air compressor is completely blown, the compressed air carrying the residual liquid flows into the second water distributor 1', and then is discharged out of the water distribution system through the exhaust pipeline 7.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A water distributor for transmission electron microscope cooling, comprising:
the water flow pipe comprises a main flow pipe (11), wherein one end of the main flow pipe (11) is provided with a water flow port (110), a first chamber (111) and a second chamber (112) are arranged in the main flow pipe (11), and the first chamber (111) is communicated with the water flow port (110);
and the regulating valve (12) is arranged on the main flow pipe (11) and is used for controlling the on-off of the first chamber (111) and the second chamber (112).
2. A water distributor as claimed in claim 1, further comprising a first branch conduit connector (13), the first branch conduit connector (13) communicating with the first chamber (111).
3. A water distributor as claimed in claim 1, further comprising a second branch flow conduit connector (14), the second branch flow conduit connector (14) communicating with the second chamber (112).
4. A water distributor as claimed in claim 1, further comprising a third branch flow conduit connection (15), the third branch flow conduit connection (15) communicating with the second chamber (112).
5. The water distribution system for cooling the transmission electron microscope is characterized by comprising a first water distributor (1), a water distribution pipeline (2) and a second water distributor (1'), wherein one end of the water distribution pipeline (2) is connected with the first water distributor (1), and the other end of the water distribution pipeline is connected with the second water distributor (1');
-said first (1) and second (1') water distributors are each as claimed in any one of claims 1-4; the water flow port (110) of the first water distributor (1) is a water inlet, and the water flow port (110') of the second water distributor (1') is a water outlet.
6. Water distribution system according to claim 5, wherein the water distribution conduit (2) comprises a first water distribution conduit (21), one end of the first water distribution conduit (21) being connected to a first branch conduit connection (13) of the first water distributor (1) and the other end being connected to a first branch conduit connection (13') of the second water distributor (1');
the water distribution pipeline (2) further comprises a second water distribution pipeline (22), one end of the second water distribution pipeline (22) is connected with a second branch pipeline connector (14) of the first water distributor (1), and the other end of the second water distribution pipeline is connected with a second branch pipeline connector (14') of the second water distributor (1');
the first water distribution pipeline (21) and the second water distribution pipeline (22) are respectively provided with a first switch valve (210) and a second switch valve (220).
7. Water distribution system according to claim 6, wherein said first water distribution conduit (21) is two in number, for distribution of vacuum pumps of transmission electron microscopes and of high voltage power supplies; the number of the second water distribution pipes (22) is one or more, and the second water distribution pipes are used for distributing water for the coil of the transmission electron microscope.
8. Water distribution system according to claim 5, characterized in that it comprises an air compressor (3), said air compressor (3) being in communication with a third branch conduit connector (15) of said first water distributor (1) through a pneumatic conduit (4); and a third switch valve (40) is arranged on the air pressure pipeline (4).
9. Water distribution system according to claim 8, further comprising a gas exhaust duct (7), said gas exhaust duct (7) being in communication with a third branch-duct connection head (15') of said second water distributor (1'); and an emptying valve (70) is arranged on the exhaust pipeline (7).
10. Water distribution system according to claim 5, further comprising a water inlet conduit (5) and a water outlet conduit (6), said water inlet conduit (5) being connected to a water inlet of said first water distributor (1) and said water outlet conduit (6) being connected to a water outlet of said second water distributor (1'); a fourth switch valve (50) is arranged on the water inlet pipeline (5); and a fifth switch valve (60) is arranged on the water outlet pipeline (6).
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