CN113782414A - Low-energy-dispersion high-brightness negative oxygen ion generating device - Google Patents
Low-energy-dispersion high-brightness negative oxygen ion generating device Download PDFInfo
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- CN113782414A CN113782414A CN202111037613.9A CN202111037613A CN113782414A CN 113782414 A CN113782414 A CN 113782414A CN 202111037613 A CN202111037613 A CN 202111037613A CN 113782414 A CN113782414 A CN 113782414A
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- discharge chamber
- negative oxygen
- ceramic window
- brightness
- metal flange
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- 239000001301 oxygen Substances 0.000 title claims abstract description 33
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 33
- 239000006185 dispersion Substances 0.000 title claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 16
- -1 oxygen ion Chemical class 0.000 claims description 23
- 150000002500 ions Chemical class 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims description 3
- 230000021715 photosynthesis, light harvesting Effects 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 abstract description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 8
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004480 active ingredient Substances 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010249 in-situ analysis Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention relates to a low-energy-dissipation high-brightness negative oxygen ion generating device, which comprises a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline, wherein the discharge chamber is arranged on the ceramic window; the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber; the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed; the radio frequency antenna is arranged on the ceramic window; the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber. The invention can generate the negative oxygen ion beam with low energy dispersion and high brightness, and improve the brightness and the spatial resolution of the ion beam.
Description
Technical Field
The invention relates to the technical field of negative oxygen ion generating devices, in particular to a low-energy-dissipation high-brightness negative oxygen ion generating device.
Background
The secondary ion mass spectrometer has high-precision and high-resolution in-situ element analysis capability, is widely applied to multiple subject fields such as earth science and the like, and is one of the most advanced micro-area element analysis instruments at present. The chronology research of geology is carried out on a mass spectrometer, the incident primary ion beam is required to be negative oxygen ion, and the target test ion is electropositive radioisotope ionAnd (4) adding the active ingredients. Due to strong electronegativity of O-、O2 -The ions can effectively improve the yield of electropositive secondary ions and reduce the influence of charge effect on analysis, and other types of ion sources can not efficiently generate the secondary ions, so that the double plasma ion source or the radio frequency ion source can be used as a primary ion beam ion source of a secondary ion mass spectrometer to generate negative oxygen ions and can be widely applied to in-situ analysis of geological and chronology micro-areas.
However, the ion source currently used on secondary ion mass spectrometers generates O-、O2 -The ion beam can be dispersed greatly, which is not beneficial to the formation of tiny beam spots (can disperse dozens of electron volts, even hundreds of electron volts), so a technical scheme is needed to generate the negative oxygen ion beam with low energy dispersion and high brightness, and the brightness and the spatial resolution of the ion beam are improved.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a low energy dispersion high brightness negative oxygen ion generating device, which can generate a low energy dispersion high brightness negative oxygen ion beam, and improve the brightness and spatial resolution of the ion beam.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention relates to a low-energy-dissipation high-brightness negative oxygen ion generating device, which comprises a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline, wherein the discharge chamber is arranged on the ceramic window; the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber; the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed; the radio frequency antenna is arranged on the ceramic window; the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber.
The device for generating negative oxygen ions with low energy dispersion and high brightness preferably further comprises a multi-peak magnet, and the multi-peak magnet is sleeved outside the discharge chamber.
Preferably, the radio frequency antenna is formed by spirally winding a tubular antenna body on the ceramic window and forming leading-out ends at two ends of the tubular antenna body.
The low-energy-dispersion high-brightness negative oxygen ion generating device is preferably characterized in that the ceramic window is made of a ceramic material with high strength and high thermal conductivity coefficient.
The negative oxygen ion generating device with low energy dispersion and high brightness is preferably characterized in that the discharge chamber is made of a nonmagnetic material.
Preferably, the non-magnetic material is aluminum.
Preferably, the metal flange is made of a copper material.
The low-energy-dispersion high-brightness negative oxygen ion generating device is preferably characterized in that the tubular antenna body is made of a copper material.
Preferably, the tubular antenna body is filled with cooling water.
Due to the adoption of the technical scheme, the invention has the following advantages:
(1) the invention can improve the ion beam brightness and the spatial resolution of the existing mass spectrometer by several times, and simultaneously, the design structure of the ion source is simple and compact, and the manufacturing cost is lower.
(2) The negative oxygen ion source can completely replace the existing negative oxygen ion source on a secondary ion mass spectrometer, and the analysis effect, the service life, the maintenance period and the like of a mass spectrometer sample are comprehensively improved.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
fig. 2 is a schematic perspective view of the present invention.
The figures are numbered:
1-a radio frequency antenna; 2-a ceramic window; 3-an air inlet duct; 4-a multimodal magnet; 5-a discharge chamber; 6-ion extraction hole; 7-metal flange.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.
The invention provides a low-energy-dissipation high-brightness negative oxygen ion generating device, which comprises a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline, wherein the discharge chamber is arranged in the ceramic window; the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber; the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed; the radio frequency antenna is arranged on the ceramic window; the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber. The invention can generate the negative oxygen ion beam with low energy dispersion and high brightness, and improve the brightness and the spatial resolution of the primary ion beam of the spectrometer.
As shown in FIG. 1, the device for generating negative oxygen ions with low energy dissipation and high brightness provided by the present invention comprises a discharge chamber 5, a ceramic window 2, a radio frequency antenna 1 and an air inlet pipe 3; the discharge chamber 5 is of a cavity structure with one end open and the other end closed, the open end of the discharge chamber 5 is provided with a metal flange 7, and the closed end of the discharge chamber 5 is provided with an ion extraction hole 6 for extracting negative oxygen ions; the ceramic window 2 is attached to the flange surface of the metal flange 7, and the flange opening of the metal flange 7 is sealed; the radio frequency antenna 1 is arranged on the ceramic window 2, and the radio frequency antenna 1 is connected with a radio frequency power supply and used for emitting radio frequency power to heat gas to generate plasma; the gas inlet pipeline 3 is arranged at the top of the metal flange 7 and is positioned behind the ceramic window 2, the gas inlet pipeline 3 is communicated with the discharge chamber 5, one end of the gas inlet pipeline 3 is connected with an oxygen source, the other end of the gas inlet pipeline is communicated into the discharge chamber 5, and oxygen entering from the gas inlet pipeline 3 is heated by fed-in radio frequency power near the ceramic window 2 to generate plasma so as to form negative oxygen ions.
In the above embodiment, preferably, the present invention further includes a multimodal magnet 4, the multimodal magnet 4 is sleeved outside the discharge chamber 5, and the multimodal magnet 4 is formed by splicing permanent magnets, and can generate a multimodal magnetic field to confine plasma, so as to increase plasma density.
In the above embodiment, preferably, as shown in fig. 2, the rf antenna 1 is formed by spirally winding a tubular antenna body on the ceramic window 2 and forming the terminals at both ends of the tubular antenna body. Wherein, the number of turns of the spiral winding is 3-5, and the radio frequency antenna 1 is arranged on the ceramic window 2 in the middle.
In the above embodiment, preferably, the ceramic window 2 is made of a high-hardness, high-thermal-conductivity ceramic material, such as aluminum nitride; the ceramic window 2 is attached to the radio frequency antenna 1, radio frequency power can penetrate through the ceramic window and feed into the discharge chamber 5, the thickness of the ceramic window 2 is larger than 3mm, and the diameter of the ceramic window is larger than the whole size of the spiral winding part of the radio frequency antenna 1; wherein, the ceramic window is adhered to the metal flange by adopting high heat conduction silicon rubber and is sealed and vacuumized.
In the above embodiment, it is preferable that the discharge chamber 5 is made of a nonmagnetic material, wherein the nonmagnetic material is aluminum, the diameter of the discharge chamber is larger than the overall size of the spirally wound portion of the radio frequency antenna, and the axial length is not less than 1.5 times the axial size of the radio frequency antenna; the radio frequency heating discharge generates plasma in the discharge chamber 5, the discharge chamber 5 is vacuum, and the plasma is confined therein.
In the above embodiment, the metal flange 7 is preferably made of a copper material.
In the above embodiment, preferably, the tubular antenna body is made of a copper material.
In the above embodiment, it is preferable that cooling water is introduced into the tubular antenna body, whereby the ceramic window 2 can be cooled by taking away heat by heat conduction.
The working process of the invention is as follows: oxygen is fed into the discharge chamber 5 through the gas inlet pipe 3, and the vacuum of the discharge chamber 5 is adjusted at 10-2mbar magnitude is about; then, radio frequency power is fed in through the ceramic window 2 to enter the discharge chamber 5, and the gas is heated and ionized to generate plasma, so that negative oxygen ions are generated; the negative oxygen ion beam with low energy dispersion and high brightness can be extracted and accelerated through the ion extraction hole 6 on one side of the discharge chamber 5.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A low-energy-dispersion high-brightness negative oxygen ion generating device is characterized by comprising a discharge chamber, a ceramic window, a radio frequency antenna and an air inlet pipeline;
the discharge chamber is of a cavity structure with one end open and the other end closed, a metal flange is arranged at the open end of the discharge chamber, and an ion leading-out hole is arranged at the closed end of the discharge chamber;
the ceramic window is attached to the flange surface of the metal flange, and the flange opening of the metal flange is sealed;
the radio frequency antenna is arranged on the ceramic window;
the gas inlet pipeline is arranged at the top of the metal flange and behind the ceramic window, and the gas inlet pipeline is communicated with the discharge chamber.
2. The device for generating low-energy-dissipation high-brightness negative oxygen ions according to claim 1, further comprising a multi-peak magnet, wherein the multi-peak magnet is sleeved outside the discharge chamber.
3. The device for generating negative oxygen ions with low energy dispersion and high brightness as claimed in claim 1, wherein the radio frequency antenna is formed by spirally winding a tubular antenna body on the ceramic window and forming leading-out terminals at two ends of the tubular antenna body.
4. The device of claim 1, wherein the ceramic window is made of a high strength, high thermal conductivity ceramic material.
5. The device of claim 1, wherein the discharge chamber is made of a non-magnetic material.
6. The device of claim 5, wherein the non-magnetic material is aluminum.
7. The device for generating negative oxygen ions with low energy dissipation and high brightness according to claim 1, wherein the metal flange is made of copper material.
8. The device as claimed in claim 3, wherein the tubular antenna body is made of copper material.
9. The device for generating negative oxygen ions with low energy dissipation and high brightness as claimed in claim 8, wherein cooling water is introduced into said tubular antenna body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111037613.9A CN113782414A (en) | 2021-09-06 | 2021-09-06 | Low-energy-dispersion high-brightness negative oxygen ion generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111037613.9A CN113782414A (en) | 2021-09-06 | 2021-09-06 | Low-energy-dispersion high-brightness negative oxygen ion generating device |
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| Publication Number | Publication Date |
|---|---|
| CN113782414A true CN113782414A (en) | 2021-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111037613.9A Pending CN113782414A (en) | 2021-09-06 | 2021-09-06 | Low-energy-dispersion high-brightness negative oxygen ion generating device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07262945A (en) * | 1994-03-18 | 1995-10-13 | Hitachi Ltd | Negative ion generating apparatus |
| JP2001210245A (en) * | 2000-01-26 | 2001-08-03 | Shincron:Kk | Ion source and ion extracting electrode |
| CN201134408Y (en) * | 2007-12-17 | 2008-10-15 | 中国电子科技集团公司第四十八研究所 | Ion beam source device capable of implanting into vacuum chamber |
| US20140077699A1 (en) * | 2012-09-14 | 2014-03-20 | Oregon Physics, Llc | Rf system, magnetic filter, and high voltage isolation for an inductively coupled plasma ion source |
| CN111385953A (en) * | 2018-12-28 | 2020-07-07 | 核工业西南物理研究院 | Radio frequency induction coupling linear ion source |
| CN111755317A (en) * | 2020-06-30 | 2020-10-09 | 中国科学院近代物理研究所 | Radio frequency negative ion source for secondary ion mass spectrometer |
-
2021
- 2021-09-06 CN CN202111037613.9A patent/CN113782414A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07262945A (en) * | 1994-03-18 | 1995-10-13 | Hitachi Ltd | Negative ion generating apparatus |
| JP2001210245A (en) * | 2000-01-26 | 2001-08-03 | Shincron:Kk | Ion source and ion extracting electrode |
| CN201134408Y (en) * | 2007-12-17 | 2008-10-15 | 中国电子科技集团公司第四十八研究所 | Ion beam source device capable of implanting into vacuum chamber |
| US20140077699A1 (en) * | 2012-09-14 | 2014-03-20 | Oregon Physics, Llc | Rf system, magnetic filter, and high voltage isolation for an inductively coupled plasma ion source |
| CN111385953A (en) * | 2018-12-28 | 2020-07-07 | 核工业西南物理研究院 | Radio frequency induction coupling linear ion source |
| CN111755317A (en) * | 2020-06-30 | 2020-10-09 | 中国科学院近代物理研究所 | Radio frequency negative ion source for secondary ion mass spectrometer |
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