CN1137809C - Equipment for sticking resistant pieces - Google Patents
Equipment for sticking resistant pieces Download PDFInfo
- Publication number
- CN1137809C CN1137809C CNB991239369A CN99123936A CN1137809C CN 1137809 C CN1137809 C CN 1137809C CN B991239369 A CNB991239369 A CN B991239369A CN 99123936 A CN99123936 A CN 99123936A CN 1137809 C CN1137809 C CN 1137809C
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- Prior art keywords
- screening glass
- wafer
- sticker
- adherent coating
- substrate
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Abstract
The present invention relates to a device for sticking resistant pieces, which is used for manufacturing silicon single crystal pieces. The present invention comprises a first moving device, a second moving device, a sticking agent application and preparation device, a third moving device, an extruding device, a fourth moving device, a model, a feeding device, a swing loader, a thin sticky layer and a coiling device, wherein the first moving device is used for moving a first base plate out of a first material box; a second moving device is used for moving a crystal circle out of a second material box. A sandwich combination with the resistant pieces, sticking agents, the crystal circle, the other layer of sticking agents and a base plate can be automatically formed.
Description
[technical field]
The present invention relates to a kind of screening glass adhibiting device that the semiconductor monocrystal sheet is made that is used for.
[background technology]
In the manufacture process of wafer, no matter it is of a size of six inches, eight inches or he and plants size, all after finishing, the silicon crystal growth cuts into blocks of flat thin rounded flakes usually, as shown in Fig. 1 and Fig. 2, generally speaking this wafer 10 needs further processing, utilizes for actual to form less crystal grain.
The processing procedure of the less crystal grain of known a kind of formation; be that number screening glass 11 pastes on wafer 10 in artificial mode more than will being made by metal or plastics; as shown in Figure 2; the grain colony of desire acquisition to screen; utilize the suitable material of carborundum (corundum) or other kinds then; mode with blast is worn erosion with not protected 11 wafer segment of screening, to form the flattened round tiny crystal grains of separation one by one.
Above-mentioned screening glass is covered on known operating type on the wafer, system is all by manually being finished, not only efficient is low, labor intensive, and the staff must possess skillful skill and begin to reach, its detailed step comprises that (1) is melted in wax (being generally a kind of high temperature wax) in the constant temperature groove roughly as shown in Figure 3; (2 staff are stained with it with tweezers clamping wafer and are dipped in this high temperature wax pan, make wax be attached to the both sides of wafer; (3) this wafer is placed on one of preheating sheet glass on the hot plate; (4) staff utilizes a shaking tray, screening glass is shaken into one have in the model of required pattern, will arrange good screening glass with adhesive plaster again and paste, and adhesive plaster is cut into a slice a slice; (5) adhesive plaster that will post screening glass places on the hot plate and heats, and screening glass up; (6) wafer and the sheet glass combination with (3) step covers on the adhesive plaster that is stained with screening glass, and sheet glass up; (7) staff uses a pressure bar to be pressed on the sheet glass, and does smearing of appropriateness, drives out of with the bubble that may produce between wafer and sheet glass; And (8) take off the combination of sheet glass, wafer and screening glass on hot plate, treat the wax cooling after, adhesive plaster is torn off, can obtain sandwich-type combination as shown in Figure 2, so that carry out blast operation thereafter.Wherein, this sandwich-type combination from top to bottom is screening glass 11, ground floor wax 12, wafer 10, second layer wax 14 and sheet glass 13 in regular turn.
The above-mentioned known technology that pastes, though can reach required purpose, it has multinomial shortcoming.At first, because the whole operation process is all by manually carrying out, unusual labor intensive, for lack of labor now, the reality that cost of labor improves constantly, the inevitable manufacturing cost that constantly increase.Secondly, must be dependent on the skillful skill of operating personnel in the operation, begin be controlled at the content of bubble to a certain degree below, to guarantee higher yields.Especially, lean on the result of personnel operation fully, make the quality and quantity of its product all be subjected to the influence of factors such as personal mood or health condition, can't keep stable high standard.Moreover the operation of high temperature wax is also undertaken by manual, and the needs of further improvement are all arranged on safety and health; In addition, manual work tends to use the wax of volume, because this wax needs to be dissolved with acetone in follow-up processing procedure usually, therefore, if can reduce the use amount of wax, can reduce the use amount of acetone, pastes the pollution of operation to environment with attenuating.
[summary of the invention]
The object of the present invention is to provide a kind of screening glass adhibiting device, make the whole protecting sheet paste the processing procedure automation,, reduce production costs, shorten the activity duration to boost productivity.
Technical scheme of the present invention is:
A kind of screening glass adhibiting device is characterized in that: comprising:
First mobile device that one substrate is shifted out in first magazine;
Second mobile device that one wafer is shifted out in second magazine;
One first groove fills sticker in it;
One sticker dispensing device, it absorbs quantitative sticker in this first groove, it is dispensed in the middle position of this wafer again;
One the 3rd mobile device in order to this substrate is covered on this wafer, makes both stick together by this sticker;
One pressurizing unit imposes a pressure to this substrate, drives out of with the bubble that will produce between this substrate and this wafer, and obtains a uniform sticker thickness;
One second groove also fills this sticker in it;
One the 4th mobile device, this substrate of the back of will adhering moves to this second groove with this wafer, makes this wafer be stained with another layer sticker with respect to the whole surface of the opposite side of this substrate;
One model, it has most depressions and is arranged in required pattern;
One feeding device is supplied to most screening glass on this model;
One shakes a year device, and most screening glass are shaken in the depression that is loaded onto this model;
One adherent coating sticks to this screening glass on it according to its pattern of arranging in this model;
The 4th mobile device moves this substrate and cover to this screening glass and this adherent coating with this wafer, and this wafer is sticked together by its last sticker and this screening glass in surface; And
One rolling device in order to mobile this adherent coating, and can separate it by the moving direction that changes this adherent coating with these screening glass, form a sandwich-type that has this screening glass, sticker, this wafer, another layer sticker and this substrate in regular turn and make up.
Described screening glass adhibiting device is characterized in that: this sticker is the wax of fusion.
Described screening glass adhibiting device is characterized in that: this first groove and this second groove respectively have a temperature controller.
Described screening glass adhibiting device is characterized in that: this substrate is a sheet glass, and is that slices are stacked in this first magazine, and by this first mobile device with its taking-up and place preheating on one first hot plate.
Described screening glass adhibiting device is characterized in that: this wafer is that slices are stacked in this second magazine, and by this second mobile device with its taking-up and place preheating on one second hot plate.
Described screening glass adhibiting device is characterized in that: this pressurizing unit has a pressure head, and its surface is the outstanding tapers of central authorities.
Described screening glass adhibiting device; it is characterized in that: this adherent coating can order about it by a [and contact with this screening glass that will be positioned at its depression with this model and be bonded on this adherent coating; this [returns back to the preceding state of this adherent coating of not oppressing then; and by this rolling device with this adherent coating's scrolling one distance, can repeat the step of this adherent coating of above-mentioned compressing for this [with this screening glass of adhering.
Described screening glass adhibiting device is characterized in that; This substrate cover with this wafer this wafer and this screening glass are sticked together to this screening glass and this adherent coating after, this adherent coating along continuous straight runs on a slideway is moved a segment distance by this rolling device, allows this sticker solidify so that the time to be provided; Other comprises a platform; its be located on the horizontal direction of this slideway and with its formation one gap; and the top of this slideway and this platform is positioned at sustained height; this adherent coating's moving direction is from the angle of this space change one greater than 90 degree, makes the sandwich-type combination of this screening glass, sticker, this wafer, another layer sticker and this substrate separate with this adherent coating and moves on this platform.
Described screening glass adhibiting device is characterized in that:
This first, second, third and fourth mobile device is respectively robotic arm.
One of major advantage of the present invention is that it can overcome the known disappearance of utilizing manual operation fully, the processing procedure automation that the whole protecting sheet is pasted; not only exempted huge labour costs; reduce the processing procedure expense, and lifting efficient that can be significantly, the activity duration shortened.
Another advantage of the present invention is whole processing procedure automation can be guaranteed the stability of product quality, makes it can not be subjected to the influence of factors such as personal mood or health condition, obtains consistent screening glass and pastes quality.
The present invention's another advantage is to avoid personnel to carry out the operation of high temperature wax, obtains further improvement on safety and health; In addition, the present invention can reduce the use amount of wax significantly, reduces the use amount of follow-up acetone simultaneously, pastes the pollution of lining operation for environment so can lower.
The present invention's structure and characteristics can be consulted the detailed description of following graphic and preferred embodiment and obtained to be well understood to.
[description of drawings]
Fig. 1 is for pasting screening glass in the prior art schematic top plan view that is lining in behind the wafer;
Fig. 2 is the generalized section of Fig. 1;
Fig. 3 is the flow chart of known subsides lining technology;
Fig. 4 provides the flow chart of processing procedure for the institute of device of the present invention;
Fig. 5 is the part schematic top plan view of a preferred embodiment of the present invention, uses to show its primary structure;
Fig. 6 is the end view of Fig. 5;
Fig. 7 is the part schematic top plan view of the foregoing description, uses the structure that shows another part; And
Fig. 8 is the end view of Fig. 7.
[embodiment]
Screening glass adhibiting device of the present invention is mainly used in the processing procedure of semiconductor, and each step system that it carried out is shown in the flow chart of Fig. 4, and the structure of one preferred embodiment then is illustrated among Fig. 5 to Fig. 8.The present invention's screening glass adhibiting device; comprise one first magazine 20; as Fig. 5 and shown in Figure 6; in order to ccontaining most substrates; in this preferred embodiment, these substrates are sheet glass 21, and are that slices are stacked in this first magazine 20; and by one first mobile device 22 with its automatic supply, and pass preheating to one first hot plate 23.The present invention also comprises one second magazine 24, in order to ccontaining most wafers 25, and is that slices are stacked in this second magazine 24, and by one second mobile device, as robotic arm 26 one of in this preferred embodiment, with its taking-up and place preheating on one second hot plate 27.The quantity of first hot plate 23 and second hot plate 27 can be provided with more than one according to need, as shown in Figure 5, and can set its temperature respectively, make the preheating of sheet glass 21 and wafer 25 can be divided into several stages, so that thermal shock is reduced, avoid sheet glass 21 or wafer 25 to break because of temperature raises to overrun.This first magazine 20 and second magazine 24 can be provided with in addition a sensor (figure does not show) respectively, when being lower than a certain certain height with the storage in magazine of convenient sheet glass 21 or wafer 25, and the message that gives a warning, and replenished by the staff.
The present invention also comprises one the 3rd mobile device, as another robotic arm 28 of this preferred embodiment, and the wafer 25 that it can be good with preheating, the mode of utilizing vacuum is with its absorption and place on some wax station 29; These robotic arms 26 and 28 also can be used for these sheet glass 21 and wafer 25 are moved between the hot plate of difference in regular turn.The present invention also has one first groove 30, fills a sticker in it, and in this preferred embodiment, this sticker is the wax of a fusion, and this first groove 30 then has the temperature of a temperature controller (figure does not show) with the control molten wax.The present invention also comprises a sticker dispensing device, some wax machines 31 as shown in Figure 5, and it absorbs quantitative wax in this first groove 30, rotate to the position of a wax point 29 then, wax is dripped the roughly middle position in wafer 25, as shown in Figure 5 again.Then, this robotic arm 28 can make both stick together by wax in order to sheet glass 21 is covered on this wafer 25, sheet glass 21 and wafer 25 is moved in the lump on the extruding station 32, as shown in Figure 6 again.The present invention has a pressurizing unit 33 in addition, and it imposes a pressure with the slightly outstanding conical indenter 34 of central authorities to this sheet glass 21, may driving out of at the bubble of this sheet glass 21 and 25 generations of this wafer, and obtains an even sticker thickness.Conical indenter 34 is made by a plastic material that omits tool elasticity usually, and its centre is outstanding slightly, in present embodiment, because the degree of inclination is minimum, so do not show in graphic.Pressure head 34 is made as the main cause of taper, outwards pushes this wafer 25 for making sheet glass 21 gradually by central authorities, making can residually not have bubble in the wax of 25 of sheet glass 21 and wafers, and it is thick to obtain even wax.If this pressure head 34 is not set as taper, then possibly can't allow sheet glass 21 from-inner-to-outers oppress wafer 25, and in extrusion process, fail bubble is driven out of fully, so will cause wafer 25 unreal with sheet glass 21 adhesions, and in follow-up blast process, cause wafer on the bubble to be blown off easily and cause dead wight loss.Sheet glass 21, wax and the wafer 25 of extruding back can be moved to by another mechanical arm 36 and do slightly on the relay station 35 to cool off to make it stable.
The present invention comprises one second groove 37 in addition, as shown in Figure 7, also fills this sticker in it, and as the molten wax in the present embodiment, this second groove 37 also can have the temperature of a temperature controller (figure does not show) with the control molten wax.Then with one the 4th mobile device, robotic arm 38 as another group, to adhere the sheet glass 21 of back in wafer 25 moves to this second groove 37, make this wafer 25 be stained with another layer wax with respect to the whole surface of the opposite side of sheet glass 21, can set firmly scraper (figure does not show) on this second groove 37 in addition, make robotic arm 38 when the sheet glass 21 of this being stained with wax and wafer 25 move, unnecessary wax can be struck off from wafer 25 bottom surfaces.
The present invention still comprises a tabular model 39, and as shown in Figure 8, its surface has most depressions (figure do not show) and is arranged in required pattern, and in this preferred embodiment, these depressions are rounded and be arranged in the identical pattern of screening glass 11 among many groups and Fig. 1.The present invention utilizes a feeding device 40; the circular screening glass of majority is supplied on this model 39; the depression of its undersized on model 39; shake with one then and carry device 41; this model 39 is shaken; make most screening glass fall into each depression of this model 39, shaking year device 41 then can make unnecessary screening glass fall into a gatherer 42 to reclaim this model 39 inclinations one angle.The present invention is with an adherent coating, and for example an adhesive plaster 43 sticks to the pattern of these screening glass according to its arrangement in this model 39 on it; This adhesive plaster 43 can be by a [; as removable roller bearing 44 one of in the present embodiment; order about it to move down and glue with screening glass that this model 39 contacts will be positioned at its depression; this roller bearing 44 can return back to the preceding state of adhesive plaster 39 of not oppressing then; and by a rolling device 45 with this adhesive plaster 43 scrollings one suitable distance, can repeat the step of above-mentioned compressing adhesive plaster 43 for this removable roller bearing 44 with these screening glass of adhering.This adhesive plaster 43 that is stained with screening glass will be moved on the slideway 46 by scrolling subsequently; as shown in Fig. 7 and Fig. 8; then; robotic arm 38 can move the sheet glass 21 that glued wax and cover to the screening glass and adhesive plaster 43 that are positioned on the slideway 46 with wafer 25; the action of this robotic arm 38 can be set at smears earlier row pressurization more slightly; can utilize 47 pairs of sheet glass 21 of another pressurizing unit to impose a pressure then, make wafer 25 closely bond with screening glass by its last wax in surface.
This adhesive plaster 43 can be continued to move a segment distance by this rolling device 45 by along continuous straight runs on this slideway 46; to provide the time to allow this molten wax solidify; the end of this slideway 46 comprises a platform 48 in addition; its be located on the horizontal direction of this slideway 46 and with its formation one gap 49; and this slideway 46 roughly is positioned at sustained height with the top system of this platform 48; the moving direction of this adhesive plaster 43 49 changes an angle greater than 90 degree from this gap, makes the sandwich-type of screening glass, wax, wafer 25, another layer wax and sheet glass 21 make up 51 and separates with adhesive plaster and move on this platform.
Use the adhesive plaster 43 of back can roll up at last on a roller bearing 50; as shown in Figure 8; state sandwich-type combination 51 on pasting and finish screening glass; then continue its drive by a conveyer belt 52; the sandwich-type that piles up makes up 53 belows then a sensing and a push lifting device (figure does not show); so when conveyer belt 52 moves to sandwich-type combination 51 when making up 53 near the sandwich-type that has piled up; push away in the sandwich-type combination 52 that can utilize push lifting device to pile up after sensing apparatus predicts, sandwich-type combination 51 is moved to its bottom in order to conveyer belt 52.Then identical as for these sandwich-type combination 51 formations with person shown in Fig. 1 and Fig. 2, to carry out follow-up blast operation, form the flattened round tiny crystal grains of separation one by one.
Claims (9)
1, a kind of screening glass adhibiting device is characterized in that: comprising:
First mobile device that one substrate is shifted out in first magazine;
Second mobile device that one wafer is shifted out in second magazine;
One first groove fills sticker in it;
One sticker dispensing device, it absorbs quantitative sticker in this first groove, it is dispensed in the middle position of this wafer again;
One the 3rd mobile device in order to this substrate is covered on this wafer, makes both stick together by this sticker;
One pressurizing unit imposes a pressure to this substrate, drives out of with the bubble that will produce between this substrate and this wafer, and obtains a uniform sticker thickness;
One second groove also fills this sticker in it;
One the 4th mobile device, this substrate of the back of will adhering moves to this second groove with this wafer, makes this wafer be stained with another layer sticker with respect to the whole surface of the opposite side of this substrate;
One model, it has most depressions and is arranged in required pattern;
One feeding device is supplied to most screening glass on this model;
One shakes a year device, and most screening glass are shaken in the depression that is loaded onto this model;
One adherent coating sticks to this screening glass on it according to its pattern of arranging in this model;
The 4th mobile device moves this substrate and cover to this screening glass and this adherent coating with this wafer, and this wafer is sticked together by its last sticker and this screening glass in surface; And
One rolling device in order to mobile this adherent coating, and can separate it by the moving direction that changes this adherent coating with these screening glass, form a sandwich-type that has this screening glass, sticker, this wafer, another layer sticker and this substrate in regular turn and make up.
2, screening glass adhibiting device according to claim 1 is characterized in that: this sticker is the wax of fusion.
3, screening glass adhibiting device according to claim 2 is characterized in that: this first groove and this second groove respectively have a temperature controller.
4, screening glass adhibiting device according to claim 1, it is characterized in that: this substrate is a sheet glass, and is that slices are stacked in this first magazine, and by this first mobile device with its taking-up and place preheating on one first hot plate.
5, screening glass adhibiting device according to claim 1 is characterized in that: this wafer is that slices are stacked in this second magazine, and by this second mobile device with its taking-up and place preheating on one second hot plate.
6, screening glass adhibiting device according to claim 1, it is characterized in that: this pressurizing unit has a pressure head, and its surface is the outstanding tapers of central authorities.
7, screening glass adhibiting device according to claim 1; it is characterized in that: this adherent coating can order about it by a [and contact with this screening glass that will be positioned at its depression with this model and be bonded on this adherent coating; this [returns back to the preceding state of this adherent coating of not oppressing then; and by this rolling device with this adherent coating's scrolling one distance, can repeat the step of this adherent coating of above-mentioned compressing for this [with this screening glass of adhering.
8, screening glass adhibiting device according to claim 7 is characterized in that; This substrate cover with this wafer this wafer and this screening glass are sticked together to this screening glass and this adherent coating after, this adherent coating along continuous straight runs on a slideway is moved a segment distance by this rolling device, allows this sticker solidify so that the time to be provided; Other comprises a platform; its be located on the horizontal direction of this slideway and with its formation one gap; and the top of this slideway and this platform is positioned at sustained height; this adherent coating's moving direction is from the angle of this space change one greater than 90 degree, makes the sandwich-type combination of this screening glass, sticker, this wafer, another layer sticker and this substrate separate with this adherent coating and moves on this platform.
9, screening glass adhibiting device according to claim 1 is characterized in that:
This first, second, third and fourth mobile device is respectively robotic arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB991239369A CN1137809C (en) | 1999-11-17 | 1999-11-17 | Equipment for sticking resistant pieces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB991239369A CN1137809C (en) | 1999-11-17 | 1999-11-17 | Equipment for sticking resistant pieces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1296879A CN1296879A (en) | 2001-05-30 |
| CN1137809C true CN1137809C (en) | 2004-02-11 |
Family
ID=5283064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB991239369A Expired - Fee Related CN1137809C (en) | 1999-11-17 | 1999-11-17 | Equipment for sticking resistant pieces |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1137809C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114161324B (en) * | 2021-11-11 | 2023-03-10 | 中国石油大学(华东) | Post-mixing foam abrasive jet rock breaking experimental system and method |
-
1999
- 1999-11-17 CN CNB991239369A patent/CN1137809C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1296879A (en) | 2001-05-30 |
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