CN113774493B - 一种连续式晶体硅高效应力释放设备 - Google Patents
一种连续式晶体硅高效应力释放设备 Download PDFInfo
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- CN113774493B CN113774493B CN202111168550.0A CN202111168550A CN113774493B CN 113774493 B CN113774493 B CN 113774493B CN 202111168550 A CN202111168550 A CN 202111168550A CN 113774493 B CN113774493 B CN 113774493B
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- Prior art keywords
- water inlet
- vertical
- sliding
- heating furnace
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 141
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 138
- 239000010703 silicon Substances 0.000 claims abstract description 138
- 239000000463 material Substances 0.000 claims abstract description 130
- 238000010438 heat treatment Methods 0.000 claims abstract description 114
- 230000007246 mechanism Effects 0.000 claims abstract description 98
- 239000002893 slag Substances 0.000 claims abstract description 54
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 136
- 238000009825 accumulation Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 description 10
- 239000000498 cooling water Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
- F27B9/2469—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollable bodies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/38—Arrangements of devices for charging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/39—Arrangements of devices for discharging
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111168550.0A CN113774493B (zh) | 2021-09-30 | 2021-09-30 | 一种连续式晶体硅高效应力释放设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111168550.0A CN113774493B (zh) | 2021-09-30 | 2021-09-30 | 一种连续式晶体硅高效应力释放设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113774493A CN113774493A (zh) | 2021-12-10 |
CN113774493B true CN113774493B (zh) | 2024-06-04 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202111168550.0A Active CN113774493B (zh) | 2021-09-30 | 2021-09-30 | 一种连续式晶体硅高效应力释放设备 |
Country Status (1)
Country | Link |
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CN (1) | CN113774493B (zh) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101508151A (zh) * | 2009-04-07 | 2009-08-19 | 宝鸡宝色特种金属有限责任公司 | 多晶硅棒热力学破碎工艺与装备 |
JP2010017635A (ja) * | 2008-07-09 | 2010-01-28 | Teoss Corp | シリコン加熱炉及びこれを用いたシリコン破砕装置 |
CN206278555U (zh) * | 2016-12-02 | 2017-06-27 | 浙江晶盛机电股份有限公司 | 一种用于硅块单线截断机的全自动硅块上下料装置 |
CN110923433A (zh) * | 2019-12-20 | 2020-03-27 | 翟述基 | 滚动传输式大型加热炉 |
CN112060380A (zh) * | 2020-09-28 | 2020-12-11 | 青岛高测科技股份有限公司 | 一种硅棒输送装置 |
CN113304848A (zh) * | 2021-07-08 | 2021-08-27 | 江苏鑫华半导体材料科技有限公司 | 一种硅块破碎装置及使用方法、硅块破碎方法及应用方法 |
CN215856461U (zh) * | 2021-09-30 | 2022-02-18 | 吴利德 | 一种连续式晶体硅高效应力释放设备 |
-
2021
- 2021-09-30 CN CN202111168550.0A patent/CN113774493B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010017635A (ja) * | 2008-07-09 | 2010-01-28 | Teoss Corp | シリコン加熱炉及びこれを用いたシリコン破砕装置 |
CN101508151A (zh) * | 2009-04-07 | 2009-08-19 | 宝鸡宝色特种金属有限责任公司 | 多晶硅棒热力学破碎工艺与装备 |
CN206278555U (zh) * | 2016-12-02 | 2017-06-27 | 浙江晶盛机电股份有限公司 | 一种用于硅块单线截断机的全自动硅块上下料装置 |
CN110923433A (zh) * | 2019-12-20 | 2020-03-27 | 翟述基 | 滚动传输式大型加热炉 |
CN112060380A (zh) * | 2020-09-28 | 2020-12-11 | 青岛高测科技股份有限公司 | 一种硅棒输送装置 |
CN113304848A (zh) * | 2021-07-08 | 2021-08-27 | 江苏鑫华半导体材料科技有限公司 | 一种硅块破碎装置及使用方法、硅块破碎方法及应用方法 |
CN215856461U (zh) * | 2021-09-30 | 2022-02-18 | 吴利德 | 一种连续式晶体硅高效应力释放设备 |
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CN113774493A (zh) | 2021-12-10 |
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Effective date of registration: 20231229 Address after: 611541 Group 4, Erlong Village, Jiaguan Town, Qionglai City, Chengdu City, Sichuan Province Applicant after: Gao Liping Address before: 620000 1st Road, science and Technology Industrial Park, Dongpo District, Meishan City, Sichuan Province Applicant before: Wu Lide |
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Effective date of registration: 20240320 Address after: 620041 No.1, 1st Floor, Building 1, No. 36 Shunjiang Avenue, Chongli Town, Dongpo District, Meishan City, Sichuan Province (East District of Meishan Economic Development Zone) Applicant after: SICHUAN HEMU MACHINERY MANUFACTURING CO.,LTD. Country or region after: China Address before: 611541 Group 4, Erlong Village, Jiaguan Town, Qionglai City, Chengdu City, Sichuan Province Applicant before: Gao Liping Country or region before: China |
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