CN113774349A - Auxiliary clamp for manufacturing intelligent tool of micro-thin film sensor - Google Patents
Auxiliary clamp for manufacturing intelligent tool of micro-thin film sensor Download PDFInfo
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- CN113774349A CN113774349A CN202111119245.2A CN202111119245A CN113774349A CN 113774349 A CN113774349 A CN 113774349A CN 202111119245 A CN202111119245 A CN 202111119245A CN 113774349 A CN113774349 A CN 113774349A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 239000010409 thin film Substances 0.000 title claims abstract description 18
- 238000003825 pressing Methods 0.000 claims abstract description 19
- 239000010408 film Substances 0.000 claims abstract description 17
- 238000002360 preparation method Methods 0.000 claims abstract description 4
- 230000033001 locomotion Effects 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 claims description 2
- 238000009826 distribution Methods 0.000 claims 1
- 239000004576 sand Substances 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000012827 research and development Methods 0.000 abstract 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
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- 230000009471 action Effects 0.000 description 1
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- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- 230000008569 process Effects 0.000 description 1
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- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to an auxiliary clamp for manufacturing an intelligent cutter of a micro-thin film sensor, which comprises a clamp fixing plate, a clamp rack, a horizontal driving device, a vertical pressure adjusting device and a transverse clamping device, wherein the clamp fixing plate is fixedly connected with the clamp rack; the horizontal driving device comprises a bracket, a horizontal lead screw, a cubic nut, a connecting rod and a push plate and provides a horizontal pre-tightening load for the cutter; the vertical pressure adjusting device comprises a vertical lead screw, a driving handle, an L-shaped pressing block and a T-shaped nut, and controls the cutter along the vertical direction; the transverse clamping device comprises a driving slide block, a fixed rack, a driving rack, a pressing plate and a hexagon bolt. The invention adopts simplified mechanical components and simple and convenient operation, combines the clamping unit with the load function, effectively converts the applied external load pressure into the clamping force of the processed cutter, combines the reference basis of the graduated scale, realizes the positioning and clamping of cutters with different sizes and shapes, obviously improves the preparation efficiency of the intelligent cutter of the micro-film sensor and the quality and compactness of the film, and is beneficial to the research and development design of the intelligent cutter.
Description
Technical Field
The invention particularly relates to an auxiliary clamp design for manufacturing an intelligent cutter of a micro-film sensor, and belongs to the field of material increase manufacturing of magnetron sputtering coating in a mechanical micro-manufacturing technology.
Background
In the metal cutting process, cutting force and cutting temperature are important physical quantities, and are one of important factors influencing machining precision, surface integrity and tool life. The real-time online monitoring of the change conditions of the cutting temperature and the stress strain in the cutting process becomes more important, and the development of intelligent cutters is further promoted.
At present, the mainstream intelligent cutter product in the market is a combination of a traditional cutter and a novel film sensor. The thin film sensor is mainly manufactured by additive manufacturing in micro-manufacturing, and the most important technology is magnetron sputtering (PVD). With continuous innovation of science and technology, magnetron sputtering equipment has various levels and the working principle is consistent. The film sensor is prepared on a cutter through PVD (physical vapor deposition), belongs to the field of micromachining and manufacturing, has high requirements on film precision and surface integrity, and also puts higher requirements on an auxiliary clamp required in the magnetron sputtering processing of the cutter in the manufacturing process. However, the existing fixture device has some problems in preparing the thin film sensor type intelligent cutter in the magnetron sputtering equipment: blades with different sizes and different shapes cannot be clamped and replaced, so that the film preparation efficiency is low; the mask part is difficult to be ensured to be closely and properly contacted with the blade, and the compactness of the film cannot meet the requirement; the clamping load is too large, and the cutter and the mask plate deform to influence the uniformity of the film; these drawbacks lead to a series of problems of inefficient smart tool fabrication and lack of quality assurance.
Disclosure of Invention
In order to solve the problems, the invention provides an auxiliary clamp for manufacturing an intelligent cutter of a micro-film sensor, which is used for rapidly clamping a machined blade in a magnetron sputtering device through a simplified mechanical component and simple operation, and simultaneously solves the problems that the existing clamp device cannot clamp and replace blades with different sizes and shapes, cannot ensure that a mask is fully and closely attached to a cutter base body with high precision, and cannot ensure the compactness and uniformity of a deposited thermocouple film in the magnetron sputtering device proposed in the background technology.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the utility model provides an auxiliary fixture for little film sensor intelligence cutter preparation for carry out the quick clamp to being processed the cutter in coating equipment and fix, and guarantee that mask part closely laminates with cutter base body high accuracy, its characterized in that, quick mounting fixture includes: the device comprises a clamp fixing plate, a clamp rack, a horizontal driving device, a vertical pressure adjusting device and a transverse clamping device.
The horizontal driving device comprises a bracket and a horizontal lead screw; the horizontal lead screw is arranged on the support, the stepped end of the horizontal lead screw is connected with the right end of the support through a nested rolling bearing, the horizontal lead screw is arranged between the two supporting pieces of the support, and threads are symmetrically distributed on the horizontal lead screw.
The vertical pressure adjusting device comprises a vertical lead screw and a gasket, the vertical lead screw is installed on the clamp rack, the stepped end of the vertical lead screw is connected with the top of the clamp rack through a stepped hole, and the tail end of the vertical lead screw is fixed with the bottom of the clamp rack through a positioning pin and a circular ring.
The transverse clamping device comprises a driving rack, a fixed rack and a driving sliding block; the driving rack is fixed at the bottom of one end of the driving sliding block and is movably meshed with the rack to restrain the position of the machined cutter; the fixed rack is fixed at one end of the clamp rack, and a pair of semi-cylindrical grooves is formed in the other end, corresponding to the furniture rack, of the fixed rack.
Further, the auxiliary clamp further comprises a hexagon bolt and a pressing plate; the hexagonal bolt is inserted into a threaded hole at the left end of the clamp rack, downward load is applied to the driving slider through the rotation of the hexagonal bolt, and the driving rack and the fixed rack are meshed and fixed at required positions; the pressing plate is arranged between the driving sliding block and the hexagon bolts and used for transmitting pressure and enabling the pressure borne by the driving sliding block to be uniform.
Further, the auxiliary clamp further comprises a T-shaped nut and an L-shaped pressing block; the T-shaped nut is arranged on the vertical screw rod, always keeps parallel constraint with the side surface of the clamp rack and vertically moves between the upper part and the lower part of the clamp rack; the L-shaped pressing block is mounted on the T-shaped nut, connected through a countersunk head screw and used for applying vertical pre-tightening force to the machined cutter.
Further, the auxiliary clamp also comprises a cubic nut, a push plate and a connecting rod; the cubic nuts are symmetrically arranged on the horizontal screw rod in pairs so as to ensure the reciprocating movement between the two cubic nuts; the push plate and the cubic nuts are connected by adopting a connecting rod, and the reciprocating motion between the cubic nuts on the horizontal screw rod is converted into the feeding motion of the push plate, so that the directional pre-tightening load is applied to the machined tool.
Furthermore, a stepped hole is formed in the top of the clamp rack and used for fixing the vertical lead screw; the side surface of the clamp rack is provided with a main graduated scale which is used for representing the driving range of vertical pressure regulation displacement; the T-shaped nut is provided with an auxiliary graduated scale which corresponds to the main graduated scale and is used for visually expressing the accurate positioning constraint of the T-shaped nut, so that the reasonable control of the clamping force of the clamp is ensured.
Furthermore, the driving unit of the vertical lead screw is a driving handle and provides rotary power for the vertical lead screw; and a covering plate and a mask plate are sequentially arranged below the L-shaped pressing block and are used for deposition in a specific thin-film thermocouple array mode.
Further, the fixture fixing plate and the fixture rack are installed and fixed through threaded holes by two screws; the horizontal driving device is welded on one side surface of the fixture fixing plate, and the bracket is always vertical to the fixture fixing plate; the push plate and the machined tool room are provided with driven sliding blocks, the push plate is arranged in a cavity bin of the driven sliding blocks, and the bottom of the right end of the driven sliding blocks is provided with semi-cylindrical protruding strips for the driven sliding blocks to move back and forth along the semi-cylindrical grooves in the clamp rack.
Furthermore, the cubic nut is also provided with a limiting cylinder, and the cubic nut is connected with the connecting rod through the limiting cylinder and the bolt; the push plate further comprises a supporting cylinder and a bearing seat, the bearing seat is installed at a position, symmetrically distributed on one side face of the push plate, and the connecting rod and the bearing seat are connected through the supporting cylinder and used for driving the push plate to move forwards and backwards.
The invention has the following beneficial effects:
(1) the auxiliary clamp for manufacturing the intelligent cutter of the micro-film sensor is provided with a driving slide block and a driven slide block; designing a corresponding driving slide block and a corresponding driven slide block according to the shape of the blade in the existing market; when the shape of the machined blade is not square, various blades can be clamped and fixed only by replacing the driving slide block and the driven slide block of the fixing clamp, the operation is simple, convenient and quick, and the problem that the clamp is not easy to replace for different types of machined blades is solved.
(2) The auxiliary clamp for manufacturing the intelligent tool of the micro-film sensor comprises three matching devices, a positioning device and a clamping device, wherein the three matching devices are used for positioning and clamping a machined blade; the jig frame is provided with a graduated scale and a vertical pressure adjusting device and is used for applying vertical load to tightly attach the mask plate to the surface to be processed of the blade; when the blade is clamped, the position of the T-shaped nut on the graduated scale is determined according to the thickness of the blade, the mask plate and the cover plate, so that the problem that the mask plate is extruded and deformed due to overlarge and overlarge applied load during clamping is effectively solved; not only ensures the close fit of the mask plate and the blade, but also prevents the influence of the deformation of the mask plate on the film deposition effect caused by overlarge load.
(3) The fixed rack and the driving rack which can move relatively are respectively arranged on the clamp rack and the driving slider, the driving slider is determined by the driving rack according to the size of a machined blade, and the screwing force of the hexagon bolt is converted into the clamping force for fixing the position of the driving slider, so that the defect that the existing mechanical equipment clamp is difficult to realize the clamping and fixing of a machined cutter by simplifying mechanical components and quickly operating can be effectively overcome, and the clamp has the advantages of small size and simplicity particularly in a magnetron sputtering system device.
Drawings
FIG. 1 is a schematic structural diagram of an auxiliary fixture for smart tool fabrication of a micro thin film sensor according to an embodiment of the present invention;
FIG. 2 is a schematic side view of an auxiliary fixture for smart tool fabrication with micro thin film sensors according to an embodiment of the present invention;
FIG. 3 is an enlarged schematic view of portion A of FIG. 1;
FIG. 4 is an enlarged schematic view of portion B of FIG. 2;
FIG. 5 is a schematic perspective view of a horizontal driving device according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a driving slider according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a follower slide according to an embodiment of the present invention;
in the figure: 1. a support; 2. a driven slider; 3. driving the slide block; 4. a mask plate; 5. a cover plate; 6. a clamp frame; 7. a hexagon bolt; 8. a stepped hole; 9. a drive handle; 10. a vertical lead screw; an L-shaped compact; 12. countersunk head screws; 13. pushing the plate; 14. a connecting rod; 15. a threaded hole; 16. a cubic nut; 17. fixing a clamp plate; 18. a horizontal lead screw; 19. a semi-cylindrical recess; 20 positioning pins; 21. a circular ring; 22. a gasket; 23. a main scale; 24. a secondary scale; a T-nut; 26. a spring; 27. pressing a plate; 28. a drive rack; 29. fixing a rack; 30. a thread; 31. a limiting cylinder; 32. a bolt; 33. a support cylinder; 34. a bearing seat; 35. a card slot; 36. a cavity bin; 37. and semi-cylindrical convex strips.
Detailed Description
In order to explain technical contents and structural features of the auxiliary fixture for manufacturing the intelligent tool of the micro-film sensor, which is provided by the invention, in detail, the following description is provided with reference to the accompanying drawings of the invention.
Referring to fig. 1 to 7, the present invention provides an auxiliary fixture for manufacturing an intelligent tool of a micro thin film sensor, which is used for matching a fixture fixing plate and a fixture frame in a coating apparatus to rapidly clamp and fix a processed tool, and ensuring high-precision close attachment of a mask portion and a tool substrate, so as to facilitate a magnetron sputtering coating experiment.
In a specific embodiment, the auxiliary fixture for manufacturing the intelligent tool of the micro-thin film sensor comprises a fixture fixing plate 17, a fixture frame 6, a vertical pressure adjusting device, a transverse clamping device and a horizontal driving device. The fixture fixing plate 17 is a base of the fixture device, and a fixture rack 6 is arranged above the fixture fixing plate 17 and used for arranging a vertical pressure adjusting device; the left end of the clamp rack 6 is provided with a fixed rack 29, the right end of the clamp rack 6 is provided with a semi-cylindrical groove 19 with symmetrical axes, and the clamp fixing plate 17 and the clamp rack 6 are fixedly connected through a threaded hole 15; the fixture frame 6 is provided with a stepped hole 8 for mounting a vertical lead screw 10, and the side surface of the fixture frame 6 is provided with a main graduated scale 23 for quantitative reference of the vertical load application size; a T-shaped nut 25 is arranged on the thread of the vertical lead screw 10, an L-shaped pressing block 11 is arranged on one side surface of the T-shaped nut 25, and the T-shaped nut 25 and the L-shaped pressing block 11 are connected through a countersunk head screw 12; a mask plate 4 and a covering plate 5 are sequentially arranged between the L-shaped pressing block 11 and the blade to be processed from bottom to top; the other side surface of the T-shaped nut 25 is provided with an auxiliary graduated scale 24; the upper end of the vertical lead screw 10 is provided with a driving handle 9, the vertical lead screw 10 and the driving handle 9 are connected in a nested manner, the lower end of the vertical lead screw 10 is provided with a circular ring 21 and is fixedly connected through a positioning pin 20, and a gasket 22 is arranged between the circular ring 21 and the clamp rack 6 and used for limiting the axial degree of freedom of the vertical lead screw; be provided with anchor clamps fixed plate 17, anchor clamps frame 6, vertical lead screw 10, T shape nut 25, L shape briquetting 11, actuating handle 9, packing ring 22, ring 21 and locating pin 20, vertical pressure adjustment device has been assembled into jointly, when being installed on the anchor clamps fixed plate by the processing blade, combine blade thickness, the operator confirms main vice scale relative position through the rotary drive handle, easy and simple to handle is convenient, effectively ensure the inseparable laminating of mask plate and blade, prevent when pressing from both sides tightly, it is too big too violent to apply the load, lead to the problem of mask plate extrusion deformation.
The side surface of the front end of the fixture fixing plate 17 is provided with a bracket 1, and the fixture fixing plate 17 is connected with the bracket 1 through welding; a horizontal screw 18 is arranged on the bracket 1, threads 30 with central axes symmetrically distributed are carved on the horizontal screw 18, and cubic nuts 16 are arranged on each thread 30; a limiting cylinder 31 is arranged on the cubic nut 16, a connecting rod 14 is arranged on the limiting cylinder 31, and the limiting cylinder 31 and the connecting rod 14 are fixed through a bolt 32; the other end of the connecting rod 14 is arranged on the push plate 13, the side surface of the push plate 13 is provided with symmetrical bearing seats 34, the connecting rod 14 is connected with the push plate 13 through a supporting column 33, and the push plate 13 is always vertical to the fixture fixing plate 17; a driven slide block 2 is arranged between a push plate 13 and a processed blade, the push plate 13 is connected with a cavity 36 of the driven slide block 2, symmetrical semi-cylindrical protruding strips 37 are arranged at the bottom of the right end of the driven slide block 2, and the end of the driven slide block is arranged in a semi-cylindrical groove 19 at the right end of a clamp rack 6, so that the driven slide block 2 is ensured to horizontally feed, clamp and slide along the semi-cylindrical groove 19 under the action of the push plate; the horizontal driving device is provided with a bracket 1, a horizontal lead screw 18, a cubic nut 16, a connecting rod 14, a push plate 13 and a driven slide block 2, and is used for clamping a machined blade in the front-back horizontal direction.
A driving rack 28 is arranged below the left end of the driving slide block 3, the left end of the driving slide block 3 is arranged at the left end of the clamp rack 6, and the position of the driving slide block 3 is determined by the meshing of a fixed rack 29 and the driving rack 28; a pressing plate 27 is arranged between the upper part of the driving sliding block 3 and the clamp rack 6, a hexagon bolt 7 is arranged above the pressing plate 27, the hexagon bolt 7 is converted into a clamping force in the vertical direction for fixing the position of the driving sliding block 3 through screwing force, and a spring 26 is arranged between the hexagon bolt 7 and the clamp rack 6, so that the defect that the existing mechanical equipment clamp is difficult to realize mechanical component simplification and quick operation for clamping and fixing a machined tool can be effectively overcome; the right end of the driving slide block 3 is provided with a clamping groove 35 which is connected with the left end of the driven slide block 2; the transverse clamping device and the horizontal driving device are matched and linked with each other, so that the blades with different sizes are effectively clamped and fixed, and the magnetron sputtering coating experiment of the blades is conveniently carried out.
In order to solve the problem that the clamps are not easy to replace for different types of machined blades, according to the shape of the blades in the existing market, the invention designs corresponding driving slide blocks and driven slide blocks, such as square, triangular, rhombic, circular and the like, and only the slide blocks need to be replaced in the clamping process, so that the rapid positioning and clamping are realized. In the present embodiment, only the square blade is taken as an example, and specific technical details refer to fig. 1 to 7, but other tool types only need to design the driven slider and the driving slider according to the concept of the present invention.
Furthermore, the foregoing description should be considered as merely illustrative of specific features and structural features of an embodiment of the present invention, and not in limitation thereof. It should be understood that any equivalents and modifications made within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (8)
1. The utility model provides an auxiliary fixture for little film sensor intelligence cutter preparation for carry out the quick clamp to being processed the cutter in coating equipment and fix, and guarantee that mask part closely laminates with cutter base body high accuracy, its characterized in that, quick mounting fixture includes: the clamp fixing plate (17), the clamp frame (6), the horizontal driving device, the vertical pressure adjusting device and the transverse clamping device;
the horizontal driving device comprises a bracket (1) and a horizontal lead screw (18); the horizontal screw (18) is arranged on the support (1), the stepped end of the horizontal screw (18) is connected with the right end of the support (1) through a nested rolling bearing, the horizontal screw (18) is arranged between two supporting pieces of the support (1), and threads (30) are symmetrically distributed on the horizontal screw (18);
the vertical pressure adjusting device comprises a vertical lead screw (10) and a gasket (22), the vertical lead screw (10) is installed on the clamp rack (6), the stepped end of the vertical lead screw (10) is connected with the top of the clamp rack (6) through a stepped hole (8), and the tail end of the vertical lead screw (10) is fixed with the bottom of the clamp rack (6) through a positioning pin (20) and a circular ring (21);
the transverse clamping device comprises a driving rack (28), a fixed rack (29) and a driving slide block (3); the driving rack (28) is fixed at the bottom of one end of the driving sliding block (3), and position constraint is carried out on the machined tool through moving and meshing of the rack; the fixed rack (29) is fixed at one end of the clamp rack (6), and a pair of semi-cylindrical grooves (19) is formed in the other end, corresponding to the furniture rack (6).
2. The auxiliary clamp for manufacturing the micro-thin film sensor intelligent tool is characterized by further comprising a hexagon bolt (7) and a pressing plate (27); the hexagonal bolt (7) is inserted into a threaded hole at the left end of the clamp rack (6), downward load is applied to the driving slider (3) through rotation of the hexagonal bolt (7), and the driving rack (28) and the fixed rack (29) are meshed and fixed at a required position; the pressing plate (27) is arranged between the driving sliding block (3) and the hexagon bolt (7) and used for transmitting pressure and enabling the pressure borne by the driving sliding block (3) to be uniform.
3. The auxiliary fixture for the smart tool of micro thin film sensors as claimed in claim 1, further comprising a T-shaped nut (25) and an L-shaped pressing block (11); the T-shaped nut (25) is arranged on the vertical screw rod (10), always keeps parallel constraint with the side surface of the clamp rack (6) and vertically moves between the upper part and the lower part of the clamp rack (6); the L-shaped pressing block (11) is mounted on the T-shaped nut (25), connected through a countersunk head screw (12) and used for applying vertical pre-tightening force to a machined cutter.
4. The auxiliary fixture for the micro thin film sensor smart tool manufacturing according to claim 1, further comprising a cubic nut (16), a push plate (13) and a connecting rod (14); the cubic nuts (16) are symmetrically arranged on the horizontal screw rod (10) in pairs so as to ensure the reciprocating movement between the two cubic nuts (16); the push plate (13) and the cubic nuts (16) are connected by adopting a connecting rod (14), and the reciprocating motion between the cubic nuts (16) on the horizontal screw rod (10) is converted into the feeding motion of the push plate (13) for applying directional pre-tightening load to the machined tool.
5. The auxiliary fixture for manufacturing the intelligent micro-thin film sensor cutter as claimed in claim 3, wherein a stepped hole (8) is formed in the top of the fixture frame (6) and used for fixing a vertical lead screw (10); a main graduated scale (23) is arranged on the side surface of the clamp rack (6) and used for indicating the vertical pressure regulation displacement driving range; and the T-shaped nut (25) is provided with an auxiliary scale (24) which corresponds to the main scale (23) and is used for visually expressing the accurate positioning constraint of the T-shaped nut (25).
6. The auxiliary fixture for smart tool fabrication of micro-thin film sensor according to claim 3, wherein the driving unit of the vertical lead screw (10) is a driving handle (9) for providing a rotating power for the vertical lead screw (10); and a covering plate (5) and a mask plate (4) are sequentially arranged below the L-shaped pressing block (11) and are used for deposition in a specific thin-film thermocouple array mode.
7. The auxiliary fixture for smart tool manufacturing of micro thin film sensors as claimed in claims 3 and 4, wherein the fixture fixing plate (17) is fixed to the fixture frame (6) by two screws through the threaded holes (15); the horizontal driving device is welded on one side surface of the fixture fixing plate (17), and the bracket (1) is always vertical to the fixture fixing plate (17); install driven slider (2) between push pedal (13) and the cutter of being processed, and push pedal (13) are settled in cavity storehouse (36) of driven slider (2), and driven slider (2) right-hand member bottom is equipped with semi-cylinder sand grip (37) for driven slider is along the last semi-cylinder recess (19) back-and-forth movement of anchor clamps frame.
8. The auxiliary fixture for manufacturing the micro-thin film sensor intelligent tool is characterized in that the cubic nut (16) is further provided with a limiting cylinder (31), and the cubic nut (16) is connected with the connecting rod (14) through the limiting cylinder (31) and a plug pin (32); the push plate (13) further comprises a supporting cylinder (33) and a bearing seat (34), the bearing seat (34) is installed at the symmetrical distribution position of one side face of the push plate (13), and the connecting rod (14) is connected with the bearing seat (34) through the supporting cylinder (33) and used for driving the push plate (13) to move forwards and backwards.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111119245.2A CN113774349A (en) | 2021-09-24 | 2021-09-24 | Auxiliary clamp for manufacturing intelligent tool of micro-thin film sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111119245.2A CN113774349A (en) | 2021-09-24 | 2021-09-24 | Auxiliary clamp for manufacturing intelligent tool of micro-thin film sensor |
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| Publication Number | Publication Date |
|---|---|
| CN113774349A true CN113774349A (en) | 2021-12-10 |
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|---|---|---|---|
| CN202111119245.2A Pending CN113774349A (en) | 2021-09-24 | 2021-09-24 | Auxiliary clamp for manufacturing intelligent tool of micro-thin film sensor |
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| CN (1) | CN113774349A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070104871A1 (en) * | 2005-10-18 | 2007-05-10 | Stout Gregory L | Apparatus and method for masking and coating tool blades |
| CN204125521U (en) * | 2014-08-14 | 2015-01-28 | 昆山萬豐電子有限公司 | A kind of mask clamping fixture for magnetron sputtering technique |
| CN112410741A (en) * | 2019-08-23 | 2021-02-26 | 哈尔滨理工大学 | Mask clamp based on hard alloy blade coating |
-
2021
- 2021-09-24 CN CN202111119245.2A patent/CN113774349A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070104871A1 (en) * | 2005-10-18 | 2007-05-10 | Stout Gregory L | Apparatus and method for masking and coating tool blades |
| CN204125521U (en) * | 2014-08-14 | 2015-01-28 | 昆山萬豐電子有限公司 | A kind of mask clamping fixture for magnetron sputtering technique |
| CN112410741A (en) * | 2019-08-23 | 2021-02-26 | 哈尔滨理工大学 | Mask clamp based on hard alloy blade coating |
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Application publication date: 20211210 |