CN113770536B - Dynamic sealing ring with surface textured diamond coating and preparation method thereof - Google Patents
Dynamic sealing ring with surface textured diamond coating and preparation method thereof Download PDFInfo
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- CN113770536B CN113770536B CN202111032946.2A CN202111032946A CN113770536B CN 113770536 B CN113770536 B CN 113770536B CN 202111032946 A CN202111032946 A CN 202111032946A CN 113770536 B CN113770536 B CN 113770536B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/3568—Modifying rugosity
- B23K26/3576—Diminishing rugosity, e.g. grinding; Polishing; Smoothing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/355—Texturing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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Abstract
The invention discloses a preparation method of a movable sealing ring with a surface texture diamond coating, which comprises the following steps: (1) Diamond coating is deposited on the surface of the movable sealing ring matrix through hot filament chemical vapor deposition; (2) Polishing the diamond coating by using femtosecond laser; (3) And carrying out laser surface texturing treatment on the polished surface of the movable sealing ring substrate. Firstly, the diamond coating prepared by the hot wire chemical vapor deposition method is compact and uniform and has strong binding force; secondly, the femtosecond laser polishing treatment obviously reduces the surface roughness of the diamond coating, relieves the growth stress and improves the machinability of the diamond coating; finally, the laser etching texturing treatment is carried out to obtain the pit or stripe pattern with regular arrangement on the surface of the coating, so that the bearing capacity of the movable sealing ring can be improved, the abrasive particle abrasion can be reduced, and the service life of a workpiece can be prolonged. The dynamic sealing ring provided with the surface texture diamond coating, which is prepared by the method, can be applied to complex and changeable service environments.
Description
Technical Field
The invention belongs to the technical field of machinery, and particularly relates to a movable sealing ring with a surface textured diamond coating and a preparation method thereof.
Background
The mechanical seal used as a rotary mechanical shaft seal device has the characteristics of low friction energy consumption, small leakage quantity, stable performance and the like, and has wide application in the fields of aerospace, petrochemical industry and the like. The friction pair of the mechanical seal needs to rotate at a high speed in operation and bear a certain pressure, so that the sealing ring material is required to have excellent mechanical and tribological properties. In a common contact type mechanical seal, as the sealing medium is gas or liquid, a liquid film or a gas film exists on the end face of the mechanical seal, and most of the end faces of the mechanical seal are in a boundary friction or mixed friction state; however, when the mechanical seal is started or stopped or no sealing medium exists, the mechanical seal end faces are in a dry friction state, no stable liquid film or air film is generated between the seal end faces, the temperature of the seal end faces is increased due to heat generated by friction, and the friction performance and the service life of the end faces of the mechanical seal are greatly influenced. Therefore, the end face of the sealing ring is required to have lower friction and heat conduction performance in complex and variable service environments.
Ceramics and cemented carbides are currently widely used as typical sealing materials, however, their friction service properties as dynamic sealing rings in multiple environments still remain to be further improved. For example, silicon carbide ceramics have higher friction coefficient when being subjected to opposite grinding under water environment, and hard alloy has higher friction and abrasion when being subjected to opposite grinding under dry friction environment. The diamond coating prepared by the chemical vapor deposition (Chemical Vapor Deposition, CVD) method has the characteristics of high hardness, low friction, high heat conduction, stable surface chemistry and the like, can realize stable deposition on the surfaces of various substrates such as ceramics, metals, glass and the like, and has wide application in the field of surface protection.
The Chinese patent document with publication number of CN107541694B discloses a preparation method of a dynamic seal ring surface lubrication wear-resistant coating, which comprises the following process steps: the surface of the movable sealing ring is pretreated before spraying; (2) Spraying a hard alloy and graphite composite coating by adopting a supersonic flame spraying method; (3) carrying out heat treatment on the sprayed movable sealing ring; (4) And (3) machining the lubricating wear-resistant coating on the surface of the movable sealing ring until the surface is smooth and bright. In the invention, the surface lubricating and wear-resistant coating of the movable sealing ring is a hard alloy and graphite composite coating.
A diamond-like coated piston ring is disclosed in chinese patent publication No. CN109372651B, comprising: the outer circumferential surface of the piston ring matrix is provided with a titanium nitride transition layer with increasing nitrogen content, the outer surface of the titanium nitride transition layer is provided with a plurality of groups of diamond-like composite coatings from inside to outside, and the diamond-like composite coatings comprise a soft diamond-like coating and a hard diamond-like coating which are arranged from inside to outside; the diamond-like coating piston ring has complex structure and complex preparation process.
A method for growing diamond texture coating of a cutter by a shape and position limiting method is disclosed in chinese patent publication No. CN107523799a, which comprises: pre-treating the substrate to facilitate deposition of the diamond coating; secondly, covering a mask with a hollowed-out structure on the surface of the pretreated substrate; thirdly, depositing a layer of high-melting-point material coating and a layer of anti-growth element coating on the substrate corresponding to the hollow structure; after the mask is taken off from the matrix or directly etching the position deposited with the high-melting-point material coating and the anti-growth element coating to form texture protrusions with the shape opposite to that of the final cutter; diamond powder is coated in the etched groove so as to facilitate easy nucleation during subsequent nano diamond deposition; placing the substrate in a deposition furnace to deposit nano diamond on the etched area and the whole substrate surface; and removing texture protrusions of the undeposited nano diamond coating on the surface of the matrix to expose the nano diamond deep lamination. The method for preparing the diamond texture coating is complex.
Disclosure of Invention
Aiming at the problem that the friction performance of the existing movable sealing ring is limited in a complex and changeable environment, the invention provides a preparation method of the movable sealing ring provided with the surface texture diamond coating, and the preparation method combines a hot wire chemical vapor deposition technology and a laser surface modification technology, so that the prepared surface texture diamond coating has good compactness, strong binding force and low stress, and the surface texture stripes or pits can capture abrasive dust, provide dynamic pressure effect, and the movable sealing ring provided with the surface texture diamond coating has excellent friction performance in the complex and changeable service environment.
The technical scheme adopted is as follows:
a method of making a dynamic seal ring with a surface textured diamond coating, comprising the steps of:
(1) Diamond coating is deposited on the surface of the movable sealing ring matrix through hot filament chemical vapor deposition;
(2) Polishing the diamond coating by using femtosecond laser;
(3) And carrying out laser surface texturing treatment on the polished surface of the movable sealing ring substrate to prepare the movable sealing ring provided with the surface textured diamond coating.
Preferably, the movable sealing ring substrate needs to be pretreated before the diamond coating is deposited, and the pretreatment steps are as follows: sequentially cleaning the movable sealing ring substrate with petroleum ether, ethanol and acetone for 10-30 min, and removing greasy dirt and impurities on the surface of the substrate; in order to facilitate nucleation in the coating growth process, the cleaned movable sealing ring substrate is placed in ethanol suspension of micron diamond powder for ultrasonic oscillation for 10-30 min, taken out and dried by nitrogen.
Preferably, the concentration of the ethanol suspension of the micron diamond powder is 1-3 mol/L, and the particle size of the micron diamond powder is 2-5 mu m.
Preferably, in the step (1), the hot wire chemical vapor deposition is divided into a first stage and a second stage, and parameters of the first stage are as follows: the flow rate of methane is 6-10 sccm, the flow rate of hydrogen is 200-400 sccm, the deposition air pressure is 2.5-4 KPa, and the deposition time is 20-30 min; the parameters of the second stage are: methane flow is 2-10 sccm, hydrogen flow is 100-400 sccm, nitrogen flow is 0-20 sccm, deposition air pressure is 1-4 KPa, and deposition time is 5-20 h; wherein, the parameters of the first stage are favorable for diamond nucleation, and the parameters of the second stage are favorable for diamond growth.
The diamond coating prepared by the hot wire chemical vapor deposition method is a micron diamond coating, a nano diamond coating or a super nano diamond coating; wherein, the diamond grain size in the micron diamond coating is 2-5 mu m, the diamond grain size in the nano diamond coating is 10-100 nm, and the diamond grain size in the ultra-nano diamond coating is 2-10 nm.
Polishing the diamond coating can obviously reduce the surface roughness of the diamond coating, relieve the growth stress, improve the machinability of the diamond coating and improve the machining precision, and preferably, in the step (2), the femtosecond laser energy density is 0.3-0.8J/cm 2 The pulse width is 200-250 fs, the repetition frequency is 50-70 MHz, the spot diameter is 10-15 μm, and the etching scanning interval of the femtosecond laser is 3-6 μm.
The polished surface of the movable sealing ring substrate is textured by laser etching to obtain patterns such as pits, stripes and the like, so that the bearing capacity of the movable sealing ring can be improved, abrasive wear can be reduced, the film deposition stress can be buffered, and the service life of a workpiece can be prolonged.
Preferably, in the step (3), parameters of the laser surface texturing treatment are as follows: the wavelength of the laser is 1.064 mu m, the diameter of the light spot is 40-50 mu m, the power of the laser pulse is 8-10W, the pulse frequency is 2-4 kHz, the pulse width is 4-25 mu s, the scanning speed is 4-6 mm/s, and the overlapping rate of the light spot is more than or equal to 90%.
Further preferably, in the laser surface texturing treatment, the stripes are textured, and the inter-stripe distance is 0.1 to 1.0mm.
Further preferably, in the laser surface texturing treatment, hemispherical pits are used as the texture shape, and the inter-pit spacing is 0.1-1.0 mm.
Preferably, the number of texturing times in the laser surface texturing treatment is 1-10.
The invention also provides the movable sealing ring provided with the surface textured diamond coating, which is prepared by the preparation method of the movable sealing ring provided with the surface textured diamond coating.
Preferably, in the dynamic seal ring provided with the surface texture diamond coating, the thickness of the surface texture diamond coating is 5-30 μm.
Preferably, the width of the stripes obtained by texturing the surface of the movable sealing ring substrate by the parameters of the laser surface texturing treatment is about 10-30 mu m, and the depth is about 10-35 mu m.
Preferably, the parameters of the laser surface texturing treatment are selected to obtain the pithead radius of about 1-5 mm on the surface of the movable sealing ring substrate. There is a loss of energy during laser texturing and a certain taper in the deep processing, so although hemispherical pits are preferred as the set parameters, the pits obtained by processing are not standard hemispheres.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the invention, the diamond coating is prepared on the surface of the movable sealing ring matrix by adopting hot filament chemical vapor deposition, so that the lubricating performance of the sealing ring can be improved; the surface in-situ polishing treatment is carried out on the diamond coating by adopting the femtosecond laser beam focusing, so that the surface roughness of the diamond coating is reduced, the surface structure of the diamond coating is changed by laser in-situ induction, and the processing difficulty of surface laser texturing is reduced; finally, after texturing of the laser pattern, the grooves or pits improve the tribological properties of the dynamic seal ring in complex environments by trapping wear debris, or providing a dynamic pressure effect as a media reservoir, etc.
(2) The dynamic sealing ring provided with the surface texture diamond coating, which is prepared by the invention, can effectively improve the friction performance of a single dynamic sealing ring under various friction conditions such as dry friction, boundary lubrication and the like, and can be applied to complex and changeable service environments.
(3) The diamond coating is prepared by regulating and controlling the technological parameters of hot filament chemical vapor deposition, and has compact and uniform coating and strong binding force.
(4) The preparation method of the dynamic sealing ring provided with the surface texture diamond coating is simple and efficient, good in controllability and high in repetition rate.
Drawings
FIG. 1 is a flow chart of the preparation of a dynamic seal ring provided with a surface textured diamond coating in example 1.
Fig. 2 is an SEM image of the diamond coating in step (2) of example 1.
Fig. 3 is an SEM image of the diamond coating after the polishing treatment in step (3) in example 2.
Fig. 4 is a 3D topography of the surface of the textured diamond coated dynamic seal ring of example 1 with stripes.
Fig. 5 is a 3D topography of the surface of the textured diamond coated dynamic seal ring of example 2 with pits as texture.
Detailed Description
The invention is further elucidated below in connection with the drawings and the examples. It is to be understood that these examples are for illustration of the invention only and are not intended to limit the scope of the invention.
Example 1
In this embodiment, a flowchart of a preparation process of a dynamic seal ring provided with a surface textured diamond coating is shown in fig. 1, and the preparation method includes the following steps:
(1) Pretreatment of a dynamic seal ring matrix: the method comprises the steps of adopting a silicon carbide movable sealing ring substrate, sequentially ultrasonically cleaning the movable sealing ring substrate by petroleum ether, ethanol and acetone for 15-30 min, removing oil stains and dust on the surface, and drying by nitrogen. Then placing the movable sealing ring matrix in ethanol suspension of 1mol/L diamond powder with the particle size of 2-5 mu m for ultrasonic oscillation for 20min, forming scratches on the end face of the movable sealing ring matrix so as to facilitate the subsequent deposition of the diamond coating, then placing the movable sealing ring matrix in ethanol solution for ultrasonic cleaning, taking out and drying with nitrogen.
(2) And (3) hot wire chemical vapor deposition diamond coating, namely placing the pretreated movable sealing ring substrate in a hot wire vacuum chamber, wherein parameters in the first stage are as follows: the flow rate of methane is 8sccm, the flow rate of hydrogen is 200sccm, the deposition air pressure is 2.5KPa, and the deposition time is 0.5h, so that diamond nucleation is facilitated; the second stage has methane flow of 6sccm, hydrogen flow of 200sccm, deposition pressure of 3KPa and deposition time of 8h, so as to facilitate the growth of diamond on the surface of the movable sealing ring substrate. SEM pictures of the diamond coating are shown in figure 2, the nano grains are closely arranged into the diamond coating, and the compactness is good.
(3) And (3) femtosecond laser polishing: focusing the femtosecond laser beam on the surface of the diamond coating, and performing femtosecond laser polishing etching treatment, wherein the energy density of the femtosecond laser is 0.4J/cm 2 The pulse width was 200fs, the repetition frequency was 60MHz, the spot diameter was 10 μm, and the etching scan pitch of the femtosecond laser was 4 μm. SEM pictures of the diamond coating after the polishing treatment are shown in fig. 3, and the surface roughness of the diamond coating is remarkably reduced after the polishing treatment.
(4) And (3) carrying out laser surface texturing treatment: carrying out laser surface texturing treatment on the polished surface of the movable sealing ring substrate, wherein the wavelength of a laser is 1.064 mu m, the diameter of a light spot is 40 mu m, the pulse power of the laser is 8W, the pulse frequency is 2kHz, the pulse width is 4 mu s, the scanning speed is 4mm/s, and the overlapping rate of the light spot is 92%; the stripes were set to be textured with a spacing of 0.3mm between the stripes.
The 3D topography of the surface of the movable sealing ring with the surface textured diamond coating, which takes the stripes as the texture shape, is shown in fig. 4, and the texture stripes on the surface of the movable sealing ring are regular in topography, so that abrasive dust can be captured, and the friction performance of the movable sealing ring is improved.
Example 2
In this embodiment, the method for manufacturing the dynamic seal ring provided with the surface textured diamond coating includes the following steps:
(1) Pretreatment of a dynamic seal ring matrix: the method comprises the steps of adopting a movable sealing ring substrate made of alloy, sequentially ultrasonically cleaning the movable sealing ring substrate by petroleum ether, ethanol and acetone for 15min, removing oil stains and dust on the surface, and drying by nitrogen. And then placing the movable sealing ring substrate in ethanol suspension of 3mol/L diamond powder with the particle size of 2-5 mu m for ultrasonic oscillation for 20min, forming scratches on the end face of the movable sealing ring substrate so as to facilitate the subsequent deposition of the diamond coating, then placing the movable sealing ring substrate in ethanol solution for ultrasonic cleaning, taking out and drying with nitrogen.
(2) And (3) hot wire chemical vapor deposition diamond coating, namely placing the pretreated movable sealing ring substrate in a hot wire vacuum chamber, wherein parameters in the first stage are as follows: methane flow rate is 8sccm, hydrogen flow rate is 200sccm, deposition air pressure is 2.5KPa, and deposition time is 0.5h, so that diamond nucleation is facilitated; the second stage has methane flow rate of 6sccm, hydrogen flow rate of 200sccm, nitrogen flow rate of 10sccm, deposition pressure of 3.5KPa and deposition time of 12h, so as to facilitate the growth of diamond on the surface of the movable sealing ring substrate.
(3) And (3) femtosecond laser polishing: focusing the femtosecond laser beam on the surface of the diamond coating, and performing femtosecond laser polishing etching treatment, wherein the energy density of the femtosecond laser is 0.8J/cm 2 The pulse width was 250fs, the repetition frequency was 50MHz, the spot diameter was 15 μm, and the etching scan pitch of the femtosecond laser was 6 μm.
(4) And (3) carrying out laser surface texturing treatment: carrying out laser surface texturing treatment on the polished surface of the movable sealing ring substrate, wherein the wavelength of a laser is 1.064 mu m, the diameter of a light spot is 50 mu m, the pulse power of the laser is 10W, the pulse frequency is 3kHz, the pulse width is 20 mu s, the scanning speed is 5mm/s, and the overlapping rate of the light spot is 95%; hemispherical pits are arranged in a texture shape, and the interval between the pits is 0.3mm.
The 3D surface morphology diagram of the movable sealing ring with the pits as the texture shape and provided with the surface texture diamond coating is shown in fig. 5, and the texture pits on the surface of the movable sealing ring are regularly arranged, so that abrasive dust can be captured, and the friction performance of the movable sealing ring is improved.
Example 3
In this embodiment, the method for manufacturing the dynamic seal ring provided with the surface textured diamond coating includes the following steps:
(1) Pretreatment of a dynamic seal ring matrix: the method comprises the steps of sequentially ultrasonically cleaning a movable sealing ring substrate made of silicon carbide by using petroleum ether, ethanol and acetone for 15min, removing oil stains and dust on the surface, and drying by using nitrogen. Then placing the movable sealing ring matrix in ethanol suspension of 1mol/L diamond powder with the particle size of 2-5 mu m for ultrasonic oscillation for 20min, forming scratches on the end face of the movable sealing ring matrix so as to facilitate the subsequent deposition of the diamond coating, then placing the movable sealing ring matrix in ethanol solution for ultrasonic cleaning, taking out and drying with nitrogen.
(2) And (3) hot wire chemical vapor deposition diamond coating, namely placing the pretreated movable sealing ring substrate in a hot wire vacuum chamber, wherein parameters in the first stage are as follows: methane flow rate is 6sccm, hydrogen flow rate is 400sccm, deposition air pressure is 3KPa, and deposition time is 20min, so that diamond nucleation is facilitated; the second stage has the parameters of methane flow of 10sccm, hydrogen flow of 300sccm, nitrogen flow of 20sccm, deposition pressure of 2.5KPa and deposition time of 15h, so that diamond grows on the surface of the movable sealing ring substrate.
(3) And (3) femtosecond laser polishing: focusing the femtosecond laser beam on the surface of the diamond coating, and performing femtosecond laser polishing etching treatment, wherein the energy density of the femtosecond laser is 0.6J/cm 2 The pulse width was 250fs, the repetition frequency was 70MHz, the spot diameter was 15 μm, and the etching scan pitch of the femtosecond laser was 4 μm.
(4) And (3) carrying out laser surface texturing treatment: carrying out laser surface texturing treatment on the polished surface of the movable sealing ring substrate, wherein the wavelength of a laser is 1.064 mu m, the diameter of a light spot is 40 mu m, the pulse power of the laser is 8W, the pulse frequency is 2kHz, the pulse width is 4 mu s, the scanning speed is 4mm/s, and the overlapping rate of the light spot is 90%; the pits are arranged in a texture shape, and the interval between the pits is 1mm.
Sample analysis
In examples 1-3, the total thickness of the surface textured diamond coating was 12-18 μm, and the results of the friction performance test showed that the dynamic seal ring provided with the surface textured diamond coating had a friction coefficient of less than 0.02 in the water lubrication state and a wear rate of 10 -5 Magnitude, friction coefficient under dry friction condition is less than 0.1, and wear rate reaches 10 -4 Compared with a single sealing ring substrate material, the friction performance is greatly improved, and the sealing ring can be applied to complex and changeable service environments.
While the foregoing embodiments have been described in detail in connection with the embodiments of the invention, it should be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and any modifications, additions, substitutions and the like made within the principles of the invention are intended to be included within the scope of the invention.
Claims (5)
1. A method of making a dynamic seal ring with a surface textured diamond coating, comprising the steps of:
(1) Diamond coating is deposited on the surface of the movable sealing ring matrix through hot filament chemical vapor deposition;
(2) Polishing the diamond coating by using femtosecond laser;
(3) Performing laser surface texturing treatment on the polished surface of the movable sealing ring substrate to prepare the movable sealing ring provided with the surface textured diamond coating;
in the step (2), the energy density of the femtosecond laser is 0.3-0.8J/cm 2 The pulse width is 200-250 fs, the repetition frequency is 50-70 MHz, the spot diameter is 10-15 mu m, and the etching scanning interval of the femtosecond laser is 3-6 mu m;
in the laser surface texturing treatment, stripes are used as texture shapes, and the interval between the stripes is 0.1-1.0 mm; or in the laser surface texturing treatment, hemispherical pits are used as texture shapes, and the interval between the pits is 0.1-1.0 mm.
2. The method for preparing a dynamic seal ring provided with a surface textured diamond coating according to claim 1, wherein the dynamic seal ring substrate is subjected to pretreatment before the diamond coating is deposited, and the pretreatment steps are as follows: sequentially cleaning the movable sealing ring substrate with petroleum ether, ethanol and acetone; and taking out, and then placing the obtained product in an ethanol suspension of the micron diamond powder for ultrasonic vibration.
3. The method of claim 1, wherein in step (1), the hot wire chemical vapor deposition is divided into a first stage and a second stage, and parameters of the first stage are as follows: the flow rate of methane is 6-10 sccm, the flow rate of hydrogen is 200-400 sccm, the deposition air pressure is 2.5-4 KPa, and the deposition time is 20-30 min; the parameters of the second stage are: the flow rate of methane is 2-10 sccm, the flow rate of hydrogen is 100-400 sccm, the flow rate of nitrogen is 0-20 sccm, the deposition pressure is 1-4 KPa, and the deposition time is 5-20 h.
4. The method for producing a dynamic seal ring provided with a surface texturing diamond coating according to claim 1, wherein in step (3), the parameters of the laser surface texturing treatment are: the wavelength of the laser is 1.064 mu m, the diameter of a light spot is 40-50 mu m, the power of laser pulse is 8-10W, the pulse frequency is 2-4 kHz, the pulse width is 4-25 mu s, the scanning speed is 4-6 mm/s, and the overlapping rate of the light spot is more than or equal to 90%.
5. The method for manufacturing a dynamic seal ring provided with a surface textured diamond coating according to claim 1, wherein the thickness of the surface textured diamond coating in the dynamic seal ring provided with the surface textured diamond coating is 5-30 μm.
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