CN113767309A - 一种可调光学滤波器件和光谱成像系统 - Google Patents

一种可调光学滤波器件和光谱成像系统 Download PDF

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Publication number
CN113767309A
CN113767309A CN202080022971.XA CN202080022971A CN113767309A CN 113767309 A CN113767309 A CN 113767309A CN 202080022971 A CN202080022971 A CN 202080022971A CN 113767309 A CN113767309 A CN 113767309A
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CN
China
Prior art keywords
substrate
filter device
optical filter
tunable optical
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080022971.XA
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English (en)
Chinese (zh)
Inventor
郭斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Haippi Nanooptical Technology Co ltd
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Shenzhen Haippi Nanooptical Technology Co ltd
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Application filed by Shenzhen Haippi Nanooptical Technology Co ltd filed Critical Shenzhen Haippi Nanooptical Technology Co ltd
Publication of CN113767309A publication Critical patent/CN113767309A/zh
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/281Interference filters designed for the infrared light
    • G02B5/282Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/284Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/285Interference filters comprising deposited thin solid films

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN202080022971.XA 2020-05-28 2020-05-28 一种可调光学滤波器件和光谱成像系统 Pending CN113767309A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/092910 WO2021237567A1 (fr) 2020-05-28 2020-05-28 Dispositif de filtre optique accordable et système d'imagerie spectrale

Publications (1)

Publication Number Publication Date
CN113767309A true CN113767309A (zh) 2021-12-07

Family

ID=78745391

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080022971.XA Pending CN113767309A (zh) 2020-05-28 2020-05-28 一种可调光学滤波器件和光谱成像系统

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CN (1) CN113767309A (fr)
WO (1) WO2021237567A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103872563A (zh) * 2014-03-24 2014-06-18 苏州旭创科技有限公司 可调谐光学标准具及具有其的外腔激光器
CN104062699A (zh) * 2013-03-18 2014-09-24 精工爱普生株式会社 密封结构、干涉滤波器、光学模块以及电子设备
US20170227398A1 (en) * 2015-09-11 2017-08-10 L-3 Communications Cincinnati Electronics Corporation Hyperspectral optical element for monolithic detectors
CN111142179A (zh) * 2018-11-02 2020-05-12 唯亚威通讯技术有限公司 阶梯结构光滤波器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7355714B2 (en) * 2005-12-29 2008-04-08 Xerox Corporation Reconfigurable MEMS fabry-perot tunable matrix filter systems and methods
JP6003168B2 (ja) * 2012-04-11 2016-10-05 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
FI125612B (en) * 2012-05-08 2015-12-15 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot Interferometer
US20180170093A1 (en) * 2015-06-30 2018-06-21 Spectral Devices Inc. Flexible pixelated fabry-perot filter
US9933546B2 (en) * 2015-09-24 2018-04-03 Baker Hughes, A Ge Company, Llc Displacement measurements using a multi-cavity sensor
WO2017180129A1 (fr) * 2016-04-14 2017-10-19 Halliburton Energy Services, Inc. Détection de température à base de cavité fabry-pérot

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104062699A (zh) * 2013-03-18 2014-09-24 精工爱普生株式会社 密封结构、干涉滤波器、光学模块以及电子设备
CN103872563A (zh) * 2014-03-24 2014-06-18 苏州旭创科技有限公司 可调谐光学标准具及具有其的外腔激光器
US20170227398A1 (en) * 2015-09-11 2017-08-10 L-3 Communications Cincinnati Electronics Corporation Hyperspectral optical element for monolithic detectors
CN111142179A (zh) * 2018-11-02 2020-05-12 唯亚威通讯技术有限公司 阶梯结构光滤波器

Also Published As

Publication number Publication date
WO2021237567A1 (fr) 2021-12-02

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