CN113758435A - Bearing plate detection method and device - Google Patents
Bearing plate detection method and device Download PDFInfo
- Publication number
- CN113758435A CN113758435A CN202111064266.9A CN202111064266A CN113758435A CN 113758435 A CN113758435 A CN 113758435A CN 202111064266 A CN202111064266 A CN 202111064266A CN 113758435 A CN113758435 A CN 113758435A
- Authority
- CN
- China
- Prior art keywords
- height
- detected
- tested
- bearing plate
- feature point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 120
- 238000000034 method Methods 0.000 claims abstract description 55
- 238000012360 testing method Methods 0.000 claims abstract description 6
- 238000007689 inspection Methods 0.000 claims abstract 2
- 238000001771 vacuum deposition Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004579 marble Substances 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229930091051 Arenine Natural products 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
本申请提供一种承载板检测方法及装置，可以对待测承载板表面上的特征点的高度进行检测，得到特征点的检测高度，待测承载板置于检测平台上，特征点可以具有基准高度，基准高度是预先对置于检测平台上的待测承载板的标准件进行测量得到的，基准高度是标准件上的基准点的高度，基准点在基准板上的位置和特征点在待测承载板上的位置一致，若特征点的检测高度相对于基准高度的偏差大于预设值，说明待测承载板发生了形变使特征点的高度发生了变化，则可以确定待测承载板的翘曲度不合格，因此实现了承载板的自动检测，节省人力，同时对特征点的高度的检测准确率较高，因此得到的翘曲度不合格的结果也较为准确。
The present application provides a method and device for detecting a carrier board, which can detect the height of a feature point on the surface of a carrier board to be tested, and obtain the detected height of the feature point. The carrier board to be tested is placed on a testing platform, and the feature point can have a reference height. , the reference height is obtained by measuring the standard part of the carrier plate to be tested placed on the inspection platform in advance, the reference height is the height of the reference point on the standard part, the position of the reference point on the reference plate and the feature point in the test The positions on the carrier board are the same. If the deviation of the detection height of the feature point from the reference height is greater than the preset value, it means that the carrier board to be tested is deformed and the height of the feature point changes, and the warpage of the carrier board to be tested can be determined. The curvature is unqualified, so the automatic detection of the carrier plate is realized, which saves manpower, and at the same time, the detection accuracy of the height of the feature points is high, so the result of the unqualified warpage is also more accurate.
Description
Technical Field
The application relates to the technical field of energy, in particular to a bearing plate detection method and device.
Background
In a vacuum coating process, such as evaporation coating, magnetron sputtering or ion beam coating, a Carrier plate (Carrier) is required to carry a substrate to realize the transmission of the substrate in a vacuum coating chamber, the substrate can be made of glass, and the Carrier plate is in a groove form designed by titanium alloy and can be used for placing the substrate therein. However, the bearing plate is easy to warp in the coating process, the detection of the warp of the bearing plate is usually carried out regularly, the warp degree of the bearing plate is mostly detected by adopting a marble measuring table measuring mode at present, specifically, the measured bearing plate can be flatly placed on the marble measuring table, the four corners of the bearing plate are lightly knocked by hands manually to judge whether the bearing plate has the warp, and then specific data of the warp of the bearing plate is measured by using a plug gauge. The measuring method for judging the board warpage by manual offline consumes time and labor, has different data measured by different personnel, and has lower accuracy.
Disclosure of Invention
In view of this, an object of the present application is to provide a method and an apparatus for detecting a carrier plate, which can improve the detection efficiency and accuracy of the carrier plate.
In order to achieve the above object, the present application provides a method for detecting a bearing plate, including:
detecting the height of the characteristic point on the surface of the bearing plate to be detected to obtain the detection height of the characteristic point; the bearing plate to be detected is arranged on the detection platform; the characteristic points are provided with reference heights, the reference heights are the heights of reference points on the standard parts when the standard parts of the bearing plate to be detected are arranged on the detection platform, and the positions of the reference points on the reference plate are consistent with the positions of the characteristic points on the bearing plate to be detected;
and if the deviation of the detection height of the feature point relative to the reference height is larger than a preset value, determining that the warping degree of the bearing plate to be detected is unqualified.
Optionally, the feature points and the reference points are multiple, the multiple feature points at least include two feature points on two sides of a center point of the to-be-detected bearing plate, and if a deviation of a detection height of the feature points with respect to the reference height is greater than a preset value, it is determined that the warping degree of the to-be-detected bearing plate is unqualified, including:
and if the deviation of the detection height of at least one feature point relative to the reference height is larger than a preset value, determining that the warping degree of the bearing plate to be detected is unqualified.
Optionally, the feature points include a central point of the bearing plate to be tested and two end points of the cross beam, and the cross beam passes through the central point.
Optionally, a deviation of the detected height of the feature point with respect to the reference height is represented by an absolute value of a difference between the detected height and the reference height.
Optionally, detecting the height of the feature point on the surface of the bearing plate to be detected includes:
and carrying out laser ranging on the characteristic points on the surface of the bearing plate to be detected by utilizing a laser positioned above or below the bearing plate to be detected so as to obtain the detection heights of the characteristic points.
Optionally, before detecting the height of the feature point on the surface of the bearing plate to be detected, the method further includes:
and determining that the running times of the bearing plate to be tested are less than the preset times.
Optionally, before detecting the height of the feature point on the surface of the bearing plate to be detected, the method further includes:
and determining that the power of the photovoltaic glass assembly carried by the bearing plate to be tested is within a preset power range.
Optionally, before detecting the height of the feature point on the surface of the bearing plate to be detected, the method further includes:
and determining that the vacuum fluctuation in the vacuum coating cavity is within a preset range when the bearing plate to be tested moves into the vacuum coating cavity in the historical operation process.
Optionally, before detecting the height of the feature point on the surface of the bearing plate to be detected, the method further includes:
and determining that the times of the substrate splintering generated in the historical operation process of the bearing plate to be tested is lower than a preset value.
The application also provides a loading board detection device, includes:
the detection unit is used for detecting the height of the characteristic point on the surface of the bearing plate to be detected to obtain the detection height of the characteristic point; the bearing plate to be detected is arranged on the detection platform; the characteristic points are provided with reference heights, the reference heights are the heights of reference points on the standard parts when the standard parts of the bearing plate to be detected are arranged on the detection platform, and the positions of the reference points on the reference plate are consistent with the positions of the characteristic points on the bearing plate to be detected;
and the determining unit is used for determining that the warping degree of the bearing plate to be detected is unqualified if the deviation of the detection height of the feature point relative to the reference height is greater than a preset value.
Optionally, the feature points and the reference points are multiple, the multiple feature points at least include two feature points on two sides of a center point of the to-be-tested bearing plate, and the determining unit is specifically configured to:
and if the deviation of the detection height of at least one feature point relative to the reference height is larger than a preset value, determining that the warping degree of the bearing plate to be detected is unqualified.
Optionally, the feature points include a central point of the bearing plate to be tested and two end points of the cross beam, and the cross beam passes through the central point.
Optionally, a deviation of the detected height of the feature point with respect to the reference height is represented by an absolute value of a difference between the detected height and the reference height.
Optionally, the detection unit is specifically configured to:
and carrying out laser ranging on the characteristic points on the surface of the bearing plate to be detected by utilizing a laser positioned above or below the bearing plate to be detected so as to obtain the detection heights of the characteristic points.
Optionally, the apparatus further comprises:
the first determining unit is used for determining that the running times of the bearing plate to be detected are less than the preset times before the height of the characteristic point on the surface of the bearing plate to be detected is detected.
Optionally, the apparatus further comprises:
and the second determining unit is used for determining that the power of the photovoltaic glass assembly borne by the bearing plate to be tested is within a preset power range before the height of the characteristic point on the surface of the bearing plate to be tested is detected.
Optionally, the apparatus further comprises:
and the third determining unit is used for determining that the vacuum fluctuation in the vacuum coating cavity is within a preset range when the bearing plate to be detected moves into the vacuum coating cavity in the historical operation process before the height of the characteristic point on the surface of the bearing plate to be detected is detected.
Optionally, the apparatus further comprises:
and the fourth determining unit is used for determining that the times of the substrate splintering generated by the bearing plate to be detected in the historical operation process are lower than a preset value before the height of the characteristic point on the surface of the bearing plate to be detected is detected.
The bearing plate detection method and the device provided by the embodiment of the application can detect the height of the characteristic point on the surface of the bearing plate to be detected to obtain the detection height of the characteristic point, the bearing plate to be detected is arranged on the detection platform, the characteristic point can have a reference height, the reference height is obtained by measuring the standard part of the bearing plate to be detected arranged on the detection platform in advance, the reference height is the height of the reference point on the standard part, the position of the reference point on the reference plate is consistent with the position of the characteristic point on the bearing plate to be detected, if the deviation of the detection height of the characteristic point relative to the reference height is larger than a preset value, the bearing plate to be detected is deformed to change the height of the characteristic point, the warping degree of the bearing plate to be detected can be determined to be unqualified, therefore, the automatic detection of the bearing plate is realized, the labor is saved, and the detection accuracy of the height of the characteristic point is higher, therefore, the obtained result that the warping degree is unqualified is also more accurate.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic flow chart illustrating a method for detecting a carrier plate according to an embodiment of the present application;
FIG. 2 is a schematic diagram illustrating a detection position of a carrier board to be detected in an embodiment of the present application;
fig. 3 shows a schematic structural diagram of a detecting apparatus for a bearing plate according to an embodiment of the present application.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, but the present application may be practiced in other ways than those described herein, and it will be apparent to those of ordinary skill in the art that the present application is not limited by the specific embodiments disclosed below.
Next, the present application will be described in detail with reference to the drawings, and in the detailed description of the embodiments of the present application, the cross-sectional views illustrating the structure of the device are not enlarged partially according to the general scale for convenience of illustration, and the drawings are only examples, which should not limit the scope of the protection of the present application. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
As described in the background art, a carrier plate is prone to warpage in a semiconductor process, and warpage of the carrier plate is usually detected periodically, and at present, warpage of the carrier plate is mostly detected by a measurement method using a marble measurement table, the measured carrier plate is placed on the marble measurement table, and four corners of the carrier plate are lightly tapped by hands manually to determine whether the carrier plate has warpage, and then specific data of warpage of the carrier plate is measured by a "plug gauge". The measuring method for judging the board warpage by manual offline consumes time and labor, has different data measured by different personnel, and has lower accuracy. Because of the imperfection of the detection system, the correction of the bearing plate is generally processed uniformly and regularly, and the screening of the bearing plate can not be carried out in time, so that the unqualified bearing plate is put into use, the production cost is increased, and the production efficiency is reduced.
Based on the above technical problems, the embodiments of the present application provide a method and an apparatus for detecting a bearing plate, which can perform online detection on the height of a feature point on the surface of a bearing plate to be detected to obtain the detected height of the feature point, the bearing plate to be detected is placed on a detection platform, the feature point can have a reference height, the reference height is obtained by measuring a standard component of the bearing plate to be detected placed on the detection platform in advance, the reference height is the height of a reference point on the standard component, the position of the reference point on the reference plate is consistent with the position of the feature point on the bearing plate to be detected, if the deviation of the detected height of the feature point relative to the reference height is greater than a preset value, which indicates that the bearing plate to be detected is deformed to change the height of the feature point, the warping degree of the bearing plate to be detected can be determined to be unqualified, thereby realizing automatic detection of the bearing plate and saving labor, meanwhile, the detection accuracy of the height of the characteristic point is higher, so that the obtained result that the warping degree is unqualified is also more accurate.
For convenience of understanding, the following describes a method and an apparatus for detecting a carrier plate in detail with reference to the accompanying drawings.
Referring to fig. 1, a schematic flow chart of a method for detecting a carrier plate according to an embodiment of the present application is shown, and the method may include the following steps.
S101, detecting the height of the feature point on the surface of the bearing plate to be detected to obtain the detection height of the feature point, wherein the feature point has a reference height.
In the embodiment of the application, the bearing plate to be tested is used for bearing the substrate, so that the substrate is transmitted in the vacuum coating chamber. The bearing plate to be tested can be a square frame structure, specifically, a cross beam is erected in the middle of the bearing plate to be tested, the cross beam penetrates through the central point, and the material of the bearing plate to be tested can be titanium alloy.
The bearing plate to be detected can be provided with a unique identification code (ID) for identifying different bearing plates to be detected, each bearing plate to be detected can correspond to respective process data, the process data can be stored in an MES database, after the bearing plates to be detected are detected, a detection result is bound with the unique identification code of the bearing plates to be detected so as to carry out detection on a production line on a plurality of bearing plates to be detected, and the detection process is simple and quick.
Before the height detection of the characteristic points on the surface of the bearing plate to be detected, the unique identification code of the bearing plate to be detected can be obtained. Specifically, the bearing plate to be tested can be provided with a coding hole, and the unique identification code of the bearing plate to be tested can be acquired through the coding hole. The code holes may be binary coded.
After the bearing plate to be detected is arranged on the detection platform, the bearing plate to be detected can be subjected to warping degree test, specifically, the height of the characteristic point on the surface of the bearing plate to be detected can be detected, and the detection height of the characteristic point is obtained. The characteristic points of the bearing plate to be tested can also be multiple, the multiple characteristic points can be points which are easy to identify on the surface of the bearing plate to be tested, such as points at edge positions or a central point, and the multiple characteristic points at least comprise two characteristic points at two sides of the central point of the bearing plate to be tested.
Specifically, the feature points may include a central point of the to-be-detected bearing board and two end points of the cross beam, and the cross beam passes through the central point, as shown in fig. 2, which is a schematic diagram of the detection position of the to-be-detected bearing board in the embodiment of the present application, where P1 and P3 are the two end points of the cross beam, and P2 is the central point of the to-be-detected bearing board. Of course, the plurality of feature points may also include a center point of the to-be-tested bearing plate and two end points of a diagonal position, and the plurality of feature points may also include nine points, which are four vertexes of the to-be-tested bearing plate, two end points of the cross beam, two middle points of two edges parallel to the cross beam, and one center point.
The characteristic point of the bearing plate to be detected has a reference height, the reference height is the height of a reference point on the standard part when the standard part of the bearing plate to be detected is arranged on the detection platform, the position of the reference point on the reference plate is consistent with the position of the characteristic point on the bearing plate to be detected, when the bearing plate to be detected is not deformed, the height of the reference point and the height of the characteristic point are consistent, namely the detection height of the characteristic point is consistent with the reference height. The standard part and the bearing plate to be tested have the same shape, the standard part can be an unused bearing plate, for example, a common standard part can be arranged for a batch of bearing plates, or the standard part and the bearing plate to be tested can be the same bearing plate, namely, the standard part can be the bearing plate when not used, and the bearing plate to be tested is the bearing plate after being used.
Specifically, the reference points may be multiple, and the multiple reference points may be easily recognized points on the surface of the loading board to be tested, such as points at edge positions, or a center point, where the multiple reference points include at least two reference points on two sides of the center point of the standard component. In particular, the datum point may comprise a center point of the standard and two end points of the beam, the beam passing through the center point. Of course, the plurality of reference points may also be a center point of the standard and two end points of the diagonal position, and the plurality of reference points may also include four vertices on the standard, two end points of the beam, two middle points of two sides parallel to the beam, and one center point, which are nine points. The height of the reference point on the standard part is detected in advance, and the bearing plate to be detected does not need to be detected again when being detected.
In addition, in this application embodiment, the loading board that awaits measuring can be the partial loading board in a plurality of loading boards, and a plurality of loading boards can have unique identification code, to a plurality of loading boards, can carry out other detections earlier, will carry out the angularity as the loading board that awaits measuring through the loading board that other detected and detect, and will not judge as unqualified (not good, NG) through the loading board that other detections, do not carry out the angularity as the loading board that awaits measuring and detect, the loading board that is judged NG can flow into and maintain the workshop and carry out manual cleaning and correction. That is, before the height of the feature point on the surface of the bearing plate to be detected is detected, other detection can be performed.
Specifically, because Carrier operation number of times is many after, its upper surface can cover one deck coating film foreign matter, after the operation number of times reaches certain degree, this Carrier goes up the covering and can absorb water in the atmosphere, causes the vacuum fluctuation of vacuum coating cavity, and then influences the coating film process, can influence the power of subassembly finally. And when the Carrier is used and operated for a long time, the self parts of the Carrier can also fall off and the like.
Therefore, before the height of the characteristic point on the surface of the bearing plate to be detected is detected, it can be determined that the operation frequency of the bearing plate to be detected is less than the preset frequency, that is, the height detection of the characteristic point on the surface of the bearing plate to be detected is performed after the operation frequency of the bearing plate to be detected is less than the preset frequency, otherwise, the bearing plate NG is judged, the height detection of the characteristic point is not needed, that is, the warping degree detection of the bearing plate to be detected is not performed. For example, if the number of times of operation of carrier No. 33 has reached the threshold value of 500, NG is determined.
Specifically, before detecting the height of the characteristic point on the surface of the bearing plate to be detected, it can be further determined that the power of the photovoltaic glass assembly borne by the bearing plate to be detected is within a preset power range, that is, the height detection of the characteristic point on the surface of the bearing plate to be detected is performed when the power of the photovoltaic assembly borne by the bearing plate to be detected is within the preset power range, otherwise, the NG of the bearing plate is determined, the height detection of the characteristic point is not required, and that of the bearing plate to be detected is not performed. For example, if the average power of the photovoltaic glass assemblies carried by the plurality of carrier plates is 135W-145W, the predetermined power range can be set to be 120-150W, and if the power of the photovoltaic glass assembly carried by the No. 22 carrier plate is less than 120W, the carrier plate NG is determined.
Specifically, before the height of the characteristic point on the surface of the bearing plate to be detected is detected, the bearing plate to be detected can be determined in the historical operation process, the vacuum fluctuation in the vacuum coating cavity is within the preset range when the bearing plate to be detected moves into the vacuum coating cavity, namely, the height detection of the characteristic point on the surface of the bearing plate to be detected is carried out when the vacuum fluctuation in the vacuum coating cavity is within the preset range when the bearing plate to be detected moves into the vacuum coating cavity in the historical operation process, otherwise, the bearing plate NG is judged, the height detection of the characteristic point is not needed, and the warping degree detection of the bearing plate to be detected is not carried out. For example, Carrier No. 25 causes a large vacuum fluctuation after entering the vacuum chamber, marks it in the chamber, and is judged NG after it is brought on line again.
Specifically, before the height of the characteristic point on the surface of the bearing plate to be detected is detected, it can be determined that the number of times of splitting of the substrate generated in the historical operation process of the bearing plate to be detected is lower than a preset value, that is, the height of the characteristic point on the surface of the bearing plate to be detected is detected when the number of times of splitting of the substrate generated in the historical operation process of the bearing plate to be detected is lower than the preset value, otherwise, the bearing plate NG is judged, the height detection of the characteristic point is not needed, and that is, the warping degree detection of the bearing plate to be detected is not performed. This is because the defective carrier plate is likely to cause cracking in the subsequent processes, for example, cracking is likely to be caused in the processes of drilling and mechanical load testing, and thus, in the historical operation process, the number of times of cracking caused by the carrier plate is too large, which indicates that the carrier plate is defective.
In this application embodiment, will carry out the angularity through the loading board of other detections as the loading board that awaits measuring and detect, above other detections can carry out one of them, also can carry out the multinomial, and the loading board through other detections indicates through going on all other detections. For example, the number of times of operation of the No. 20 bearing plate is less than the preset number of times, the power of the borne photovoltaic glass assembly is within the preset power range, the vacuum fluctuation in the vacuum coating chamber is within the preset range when the bearing plate moves into the vacuum coating chamber in the historical operation process, and the number of times of splintering of the substrate generated in the historical operation process is less than the preset value, warpage detection can be performed, that is, the step of detecting the height of the feature point on the surface of the bearing plate to be detected in S101 is performed.
S102, if the deviation of the detection height of the feature point relative to the reference height is larger than a preset value, determining that the warping degree of the bearing plate to be detected is unqualified.
In this application embodiment, can come the displacement of representation characteristic point for the deviation of reference height through the detection height of characteristic point, represent the deformation of the loading board that awaits measuring promptly, if the detection height of characteristic point is too big for the deviation of reference height, explain the deformation of the loading board that awaits measuring great, then can confirm that the angularity of the loading board that awaits measuring is unqualified, NG promptly. Specifically, when the deviation of the detection height of the feature point relative to the reference height is greater than a preset value, it is determined that the warping degree of the bearing plate to be detected is unqualified.
The deviation of the detection height of the feature point relative to the reference height can be represented by using the absolute value of the difference between the detection height and the reference height, and can also be represented by using the absolute value of the ratio of the detection height to the reference height, because in the practical application process, whether the bearing plate to be detected tilts upwards or bends downwards can not be judged, so that only the offset amount needs to be known, and the offset direction can not be analyzed. The preset value is a preset value and can be determined according to actual conditions. For example, if the detection height at the position P3 in fig. 2 is-0.05 and the reference height is 0.28, the absolute value of the difference between the detection height of the feature point and the reference height is | -0.05-0.28| -0.33, and if the preset value is 0.25, the warp of the to-be-measured carrier plate is determined to be unqualified.
After the warping degree of the bearing plate to be detected is determined to be unqualified, the mobile equipment can be controlled to flow the unqualified bearing plate to be detected into a maintenance workshop for subsequent correction and cleaning.
Certainly, if the angularity of the loading board that awaits measuring is qualified, then can control mobile device and deliver to the material loading end with the loading board that awaits measuring and put into use, specifically, can bear the glass substrate at the material loading end frame, then get into the vacuum coating cavity, later unload the glass substrate at the unloading end, realize the separation of substrate and loading board, later can carry out the detection of loading board again.
When the number of the feature points and the reference points is multiple, if the deviation of the detection height of the feature points relative to the reference height is greater than a preset value, it is determined that the warpage of the bearing plate to be detected is not qualified. That is to say, when there are a plurality of feature points and reference points, if the deviation between the detection height of one feature point and the reference height is too large, it is determined that the warpage of the to-be-measured bearing plate is not qualified.
For example, the detection heights of the feature points P1, P2, and P3 of the to-be-detected carrier board are 0.3, 0.42, -0.05, and the reference heights of the feature points are 0.2, 0.32, and 0.28, so that the absolute value of the difference between the P1 positions is: 0.3-0.2| ═ 0.1; the absolute difference between the P2 positions is: 0.42-0.32| ═ 0.1; the absolute difference between the P3 positions is: 0.05-0.28| ═ 0.33; and if the preset value is 0.25, the deviation between the detection height of the P3 and the reference height is larger than the preset value, and if one deviation among the P1, the P2 and the P3 exceeds the preset value, the NG of the bearing plate to be detected is judged, and the bearing plate to be detected enters a maintenance workshop to be corrected. Specifically, the height of the feature point on the surface of the bearing board to be detected is detected, and specifically, laser ranging is performed on the feature point on the surface of the bearing board to be detected by using a laser located above or below the bearing board to be detected, so as to obtain the detection height of the feature point. The detection height of the feature point may be the height of the feature point relative to the detection platform, or the height of the feature point relative to the laser, and the detection height may be the same as the reference object of the reference height. The distance between the detection platform and the laser is known, and after the distance between the feature point and the laser is obtained through detection, the height of the feature point relative to the detection platform can be calculated according to the distance between the detection platform and the laser.
The bearing plate detection method provided by the embodiment of the application can detect the height of the characteristic point on the surface of the bearing plate to be detected to obtain the detection height of the characteristic point, the bearing plate to be detected is arranged on the detection platform, the characteristic point can have a reference height, the reference height is obtained by measuring the standard part of the bearing plate to be detected arranged on the detection platform in advance, the reference height is the height of the reference point on the standard part, the position of the reference point on the reference plate is consistent with the position of the characteristic point on the bearing plate to be detected, if the deviation of the detection height of the characteristic point relative to the reference height is larger than a preset value, the bearing plate to be detected is deformed to change the height of the characteristic point, the warping degree of the bearing plate to be detected can be determined to be unqualified, therefore, the automatic detection of the bearing plate is realized, the labor is saved, and the detection accuracy rate of the height of the characteristic point is higher, therefore, the obtained result that the warping degree is unqualified is also more accurate.
Based on the above method for detecting a bearing plate, an embodiment of the present application further provides a bearing plate detection apparatus, which is shown in fig. 3 and is a schematic structural diagram of the bearing plate detection apparatus provided in the embodiment of the present application, and the apparatus includes:
the detection unit 110 is configured to detect the height of a feature point on the surface of the bearing plate to be detected, so as to obtain the detection height of the feature point; the bearing plate to be detected is arranged on the detection platform; the characteristic points are provided with reference heights, the reference heights are the heights of reference points on the standard parts when the standard parts of the bearing plate to be detected are arranged on the detection platform, and the positions of the reference points on the reference plate are consistent with the positions of the characteristic points on the bearing plate to be detected;
the determining unit 120 is configured to determine that the warping degree of the to-be-measured bearing plate is unqualified if the deviation of the detected height of the feature point relative to the reference height is greater than a preset value.
Optionally, the feature points and the reference points are multiple, the multiple feature points at least include two feature points on two sides of a center point of the to-be-tested bearing plate, and the determining unit is specifically configured to:
and if the deviation of the detection height of at least one feature point relative to the reference height is larger than a preset value, determining that the warping degree of the bearing plate to be detected is unqualified.
Optionally, the feature points include a central point of the bearing plate to be tested and two end points of the cross beam, and the cross beam passes through the central point.
Optionally, a deviation of the detected height of the feature point with respect to the reference height is represented by an absolute value of a difference between the detected height and the reference height.
Optionally, the detection unit is specifically configured to:
and carrying out laser ranging on the characteristic points on the surface of the bearing plate to be detected by utilizing a laser positioned above or below the bearing plate to be detected so as to obtain the detection heights of the characteristic points.
Optionally, the apparatus further comprises:
the first determining unit is used for determining that the running times of the bearing plate to be detected are less than the preset times before the height of the characteristic point on the surface of the bearing plate to be detected is detected.
Optionally, the apparatus further comprises:
and the second determining unit is used for determining that the power of the photovoltaic glass assembly borne by the bearing plate to be tested is within a preset power range before the height of the characteristic point on the surface of the bearing plate to be tested is detected.
Optionally, the apparatus further comprises:
and the third determining unit is used for determining that the vacuum fluctuation in the vacuum coating cavity is within a preset range when the bearing plate to be detected moves into the vacuum coating cavity in the historical operation process before the height of the characteristic point on the surface of the bearing plate to be detected is detected.
Optionally, the apparatus further comprises:
and the fourth determining unit is used for determining that the times of the substrate splintering generated by the bearing plate to be detected in the historical operation process are lower than a preset value before the height of the characteristic point on the surface of the bearing plate to be detected is detected.
The bearing plate detection device provided by the embodiment of the application can detect the height of the characteristic point on the surface of the bearing plate to be detected to obtain the detection height of the characteristic point, the bearing plate to be detected is arranged on the detection platform, the characteristic point can have the reference height, the reference height is obtained by measuring the standard part of the bearing plate to be detected on the detection platform in advance, the reference height is the height of the reference point on the standard part, the position of the reference point on the reference plate is consistent with the position of the characteristic point on the bearing plate to be detected, if the deviation of the detection height of the characteristic point relative to the reference height is larger than the preset value, the bearing plate to be detected is deformed to change the height of the characteristic point, the warping degree of the bearing plate to be detected can be determined to be unqualified, therefore, the automatic detection of the bearing plate is realized, the labor is saved, and the detection accuracy rate of the height of the characteristic point is higher, therefore, the obtained result that the warping degree is unqualified is also more accurate.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the apparatus embodiment, since it is substantially similar to the method embodiment, it is relatively simple to describe, and reference may be made to some descriptions of the method embodiment for relevant points.
The foregoing is merely a preferred embodiment of the present application and, although the present application discloses the foregoing preferred embodiments, the present application is not limited thereto. Those skilled in the art can now make numerous possible variations and modifications to the disclosed embodiments, or modify equivalent embodiments, using the methods and techniques disclosed above, without departing from the scope of the claimed embodiments. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application still fall within the protection scope of the technical solution of the present application without departing from the content of the technical solution of the present application.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111064266.9A CN113758435A (en) | 2021-09-10 | 2021-09-10 | Bearing plate detection method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111064266.9A CN113758435A (en) | 2021-09-10 | 2021-09-10 | Bearing plate detection method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113758435A true CN113758435A (en) | 2021-12-07 |
Family
ID=78795020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111064266.9A Pending CN113758435A (en) | 2021-09-10 | 2021-09-10 | Bearing plate detection method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113758435A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114485450A (en) * | 2022-02-11 | 2022-05-13 | 上海威固信息技术股份有限公司 | PCB warpage detection device, method and system |
| TWI804366B (en) * | 2022-06-27 | 2023-06-01 | 超能高新材料股份有限公司 | Improved detection method of substrate and improved detection device thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120295383A1 (en) * | 2010-01-20 | 2012-11-22 | Showa Denko K.K. | Method for producing semiconductor wafer |
| CN106681032A (en) * | 2016-12-29 | 2017-05-17 | 惠科股份有限公司 | Detection device and detection method for display panel curvature |
| CN106885520A (en) * | 2017-03-29 | 2017-06-23 | 荆州环球汽车零部件制造有限公司 | A kind of camshaft measurement method of axial size |
| CN111275671A (en) * | 2020-01-15 | 2020-06-12 | 江苏众远智能装备有限公司 | A method for visual recognition of robots with 3D technology |
| CN111457852A (en) * | 2020-04-08 | 2020-07-28 | Tcl华星光电技术有限公司 | Substrate warping degree detection monitoring equipment and detection monitoring method |
| CN213456087U (en) * | 2021-04-01 | 2021-06-15 | 台湾积体电路制造股份有限公司 | Test platform |
-
2021
- 2021-09-10 CN CN202111064266.9A patent/CN113758435A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120295383A1 (en) * | 2010-01-20 | 2012-11-22 | Showa Denko K.K. | Method for producing semiconductor wafer |
| CN106681032A (en) * | 2016-12-29 | 2017-05-17 | 惠科股份有限公司 | Detection device and detection method for display panel curvature |
| CN106885520A (en) * | 2017-03-29 | 2017-06-23 | 荆州环球汽车零部件制造有限公司 | A kind of camshaft measurement method of axial size |
| CN111275671A (en) * | 2020-01-15 | 2020-06-12 | 江苏众远智能装备有限公司 | A method for visual recognition of robots with 3D technology |
| CN111457852A (en) * | 2020-04-08 | 2020-07-28 | Tcl华星光电技术有限公司 | Substrate warping degree detection monitoring equipment and detection monitoring method |
| CN213456087U (en) * | 2021-04-01 | 2021-06-15 | 台湾积体电路制造股份有限公司 | Test platform |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114485450A (en) * | 2022-02-11 | 2022-05-13 | 上海威固信息技术股份有限公司 | PCB warpage detection device, method and system |
| CN114485450B (en) * | 2022-02-11 | 2023-11-14 | 上海威固信息技术股份有限公司 | PCB warp detection device, method and system |
| TWI804366B (en) * | 2022-06-27 | 2023-06-01 | 超能高新材料股份有限公司 | Improved detection method of substrate and improved detection device thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113758435A (en) | Bearing plate detection method and device | |
| EP3093611B1 (en) | Measuring method and device to measure the straightness error of bars and pipes | |
| CN103646893B (en) | Wafer defect detection method | |
| CN103646899B (en) | Wafer defect detection method | |
| US5766538A (en) | Method of quality control during production of concrete blocks | |
| KR102264851B1 (en) | Fork robot and methode of calculating inserting distance of a fork | |
| CN118521587B (en) | Steel pipe production management and control method, system, equipment and medium based on industrial Internet of things | |
| CN110954044A (en) | Connecting rod detection method | |
| CN118115048B (en) | Product quality evaluation system based on tray welding jig | |
| CN107731705B (en) | Method for setting sampling rate in defect detection and detection control method of production line | |
| CN110118525A (en) | Multiple spot matrix form current vortex sensor detects metal flat degree detection method | |
| CN113414248A (en) | Method and device for detecting workpiece forming process | |
| CN111426281A (en) | Flexible three-dimensional automatic measurement system and method for large-size flange sealing surface | |
| CN114038776B (en) | Method for solving alignment deviation caused by wafer warping deformation | |
| CN111380475A (en) | Truss hanging rail inspection method based on three-dimensional scanner technology | |
| JP2022094957A (en) | Method of determining component height deviations | |
| KR20130029600A (en) | Measuring apparatus and method of average sprayed paint of specimen for vessels | |
| CN111721255A (en) | Flatness detection method and system | |
| CN111098191A (en) | Method for simply detecting whether aluminum alloy thick plate is deformed during machining | |
| CN114136253B (en) | Deflection detection device | |
| CN102003937B (en) | Punched sheet detection method and measurement seat thereof for detection | |
| KR20230020728A (en) | Surface crack inspection device for metal rod s | |
| KR20000026546A (en) | Apparatus and method for checking flat display | |
| KR100612619B1 (en) | Structural deformation inspection device of liquid crystal display glass cassette | |
| CN118936375B (en) | Device and method for measuring surface flatness and included angle of concrete test block |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211207 |
|
| RJ01 | Rejection of invention patent application after publication |