CN113752244A

CN113752244A - Catalytic combustion type miniature linear driver and robot

Info

Publication number: CN113752244A
Application number: CN202110943724.XA
Authority: CN
Inventors: 许明; 孙启民
Original assignee: Hangzhou Dianzi University
Current assignee: Hangzhou Dianzi University
Priority date: 2021-08-17
Filing date: 2021-08-17
Publication date: 2021-12-07
Anticipated expiration: 2041-08-17
Also published as: CN113752244B

Abstract

The invention discloses a catalytic combustion type micro linear driver and a robot. The driver comprises a telescopic wire, a fixed plate, a movable plate, an elastic beam, a control valve and a base. The fixed plate is fixed on the base. Two ends of the elastic beam are respectively fixed with the fixed plate and the movable plate. The movable plate is connected with the fixed plate through one section or a plurality of sections of telescopic wires. The telescopic wire is made of shape memory alloy and can be contracted when being heated. The surface of the telescopic wire is provided with a catalyst for catalytic combustion. The elastic beam is in a bending state in an initial state, and the telescopic wire is positioned on the concave side of the elastic beam; the control valve is fixed on the base. The control valve is provided with three air inlets and three air outlets. One or more air outlets face the telescoping wire. The three air inlets can be independently controlled to be opened and closed. The invention adopts the submillimeter driver designed by adopting the geometric principle that the heating of the shape memory alloy is shortened and the heating is simple, and can effectively solve the problem of autonomous driving of the micro robot.

Description

Catalytic combustion type miniature linear driver and robot

Technical Field

The invention belongs to the technical field of micro robot driving. In particular to a micro driver which is driven by heating, shortening and deforming an expansion wire through catalytic combustion of high-energy density fuel on a platinum catalyst and a manufacturing process thereof.

Background

In recent years, a completely autonomous submicrometer-level micro-robot brings revolutionary changes to many fields such as monitoring, drug delivery, search and rescue, artificial pollination and the like. At present, the micro-actuator mainly adopts a piezoelectric actuator, and although the piezoelectric actuator has extremely high positioning precision, the generated moment is extremely small, so that the application range is relatively small. In addition, the traditional micro-drivers such as direct current motor type, electromagnetic type, mechanical type and the like all show the defect of insufficient driving force due to the limitation of geometric volume. Furthermore, most micro-robots are typically only operable in laboratories that are connected to a stationary power system due to the lack of sufficient power system to enable tetherless autonomous operation of the robot. The invention provides a micro-actuator which uses high-energy density fuel to burn on a platinum catalyst to lead the expansion wire to be heated and to shorten the deformation, namely, the chemical energy is converted into the mechanical energy to be used as a driving source, and a manufacturing process thereof, thereby solving the problem of autonomous driving of the micro-robot and improving the power density thereof.

Disclosure of Invention

The invention aims to design an actuator applied to a micro-robot at a sub-centimeter level and a manufacturing method thereof.

In a first aspect, the present invention provides a catalytic combustion type micro linear actuator, which includes a telescopic wire, a fixed plate, a movable plate, an elastic beam, a control valve and a base. The fixed plate is fixed on the base. Two ends of the elastic beam are respectively fixed with the fixed plate and the movable plate. The movable plate is connected with the fixed plate through one section or a plurality of sections of telescopic wires. The telescopic wire is made of shape memory alloy and can be contracted when being heated. The surface of the telescopic wire is provided with a catalyst for catalytic combustion. The elastic beam is in a bending state in an initial state, and the telescopic wire is positioned on the concave side of the elastic beam; the control valve is fixed on the base. The control valve is provided with three air inlets and three air outlets. One or more air outlets face the telescoping wire. The three air inlets can be independently controlled to be opened and closed. The three air inlets are respectively a hydrogen gas inlet, an air inlet and a cooling air inlet and are respectively connected with a hydrogen gas source, outside air and a cooling air source.

The control valve can output the mixed gas of hydrogen and air to the telescopic wire to perform catalytic combustion, so that the temperature of the telescopic wire is increased, the length of the telescopic wire is contracted, and the movable plate is driven to be close to the fixed plate; the control valve can be used for outputting cooling gas for cooling to the telescopic wire, so that the temperature of the telescopic wire is reduced, the length of the telescopic wire is extended, and the movable plate is far away from the fixed plate under the elastic action of the elastic beam.

Preferably, the elastic beam is composed of four layers of unidirectional carbon fiber prepregs which are sequentially laminated. The angles of the fiber direction of the four layers of unidirectional carbon fiber prepregs sequentially stacked relative to the length direction of the elastic beam are respectively 0 degrees, 90 degrees and 0 degrees.

Preferably, the elastic beam comprises a bending section in the middle and two straight sections at both ends. The two straight sections are respectively fixed with the side surfaces of the fixed plate and the movable plate. The bending section is in an initial state, i.e. in a bent state.

Preferably, two wire penetrating holes which are arranged at intervals are formed in the opposite ends of the moving plate and the fixed plate. The telescopic wire sequentially penetrates through the two wire penetrating holes of the moving plate and the fixed plate, and the two ends of the telescopic wire are fixed together to form a tensioned closed ring.

Preferably, a plurality of longitudinal ducts are formed in the elastic beam; the longitudinal ducts are arranged at equal intervals along the width direction of the elastic beam.

Preferably, the fixed plate and the moving plate are both epoxy laminates.

Preferably, the cooling gas source adopts a liquid nitrogen tank or a liquid ammonia tank. The catalyst for catalytic combustion adopts platinum.

In a second aspect, the present invention provides a method for manufacturing the catalytic combustion type micro linear actuator, specifically comprising:

step one, cutting the epoxy laminated board by using a diode-pumped solid-state ultraviolet laser, and forming a processing groove on the epoxy laminated board. Two sides of each processing groove are provided with one or more pairs of bulges. The two paired bulges are opposite and arranged at intervals and respectively used as a fixed plate and a movable plate.

And step two, connecting the fixed plate and the movable plate by using one or more sections of telescopic wires, and smearing the joints of the telescopic wires, the fixed plate and the movable plate by using cyanoacrylate glue.

And step three, overlapping four layers of unidirectional carbon fiber prepregs together, and curing in a heating and pressurizing manner to generate carbon pile with the thickness of 90 microns. The spring beam is cut from the carbon pile using a laser system. The fiber direction of the unidirectional carbon fiber prepreg positioned on the two sides is parallel to the length direction of the elastic beam; the fiber direction of the two layers of unidirectional carbon fiber prepregs positioned in the middle is perpendicular to the length direction of the elastic beam. And fixing the two ends of the bent elastic beam with the fixed plate and the movable plate respectively. Thereafter, the fixed and moving plates were cut from the epoxy laminate.

And step four, arranging a platinum layer on the telescopic wire in an adhesion or plating mode. After the fixing plate is fixed on the base, the control valve is installed on the base.

In a third aspect, the invention provides a micro peristaltic robot, which comprises a driving system, a steering system, a one-way clamping foot, a connecting disc, a head block and a hose. The head of the driving system is fixed with one side of the connecting disc. The other side of the connecting disc is connected with the head block through a steering system. The drive system can be lengthened or shortened. The steering system can drive the head block to rotate left and right relative to the driving system. The tail end of the bottom of the driving system and the bottom of the head block are provided with a plurality of one-way clamping feet. The bottom end of the one-way clamping foot is sharp and inclines towards the tail part of the micro peristaltic robot.

The driving system comprises a first micro driver and a tank body. The steering system includes a second microactuator and a third microactuator. The first micro driver, the second micro driver and the third micro driver all adopt the catalytic combustion type micro linear driver. The stroke of the second micro-actuator is equal to that of the third micro-actuator and is smaller than that of the first micro-actuator. The base in the first microactuator is fixed to the two tanks. The moving plate in the first micro driver is fixed with the connecting disc. Hydrogen and cooling gas are stored in the two tanks respectively. A hydrogen inlet and a cooling inlet of a control valve in the first micro driver are respectively communicated with the output ports of the two tank bodies through hoses; the second micro driver and the third micro driver are arranged between the head block and the connecting disc in a left-right side-by-side mode. The hydrogen gas inlets and the cooling air inlets of the second micro driver and the third micro driver are respectively communicated with the output ports of the head ends of the two tank bodies through hoses.

Preferably, the first microactuator and the outside of the tank are sleeved with a drive bellows. And steering bellows are sleeved outside the second micro-actuator and the third micro-actuator.

The invention has the beneficial effects that:

1. the driver of the invention adopts a submillimeter driver which is designed by adopting the geometrical principle that the shape memory alloy with thinner diameter is shortened by heating and is simple, and can be integrated into a micro-robot, thereby effectively solving the problem of autonomous driving of the micro-robot.

2. The platinum is coated on the telescopic wire as a catalyst, so that the combination of the catalytic combustion of the high-energy-density fuel and the shape memory alloy wire is realized, and the power density of the invention can be effectively improved.

3. The elastic beam design of the invention not only has unidirectional flexibility, but also can keep the tension of the telescopic wire, and can help the driver to recover the original shape when being bent.

Drawings

FIG. 1 is a structural view in an extended state of example 1 of the present invention;

FIG. 2 is a structural view of embodiment 1 of the present invention in a shortened state;

FIG. 3 is a schematic view of the working principle of embodiment 1 of the present invention;

FIG. 4 is a flow chart of a driver manufacturing process according to embodiment 1 of the present invention;

FIG. 5 is a schematic structural view of example 2 of the present invention;

fig. 6 is an exploded view of example 2 of the present invention.

Detailed Description

The present invention will be described in detail with reference to specific examples.

Example 1

As shown in fig. 1 and 2, a catalytic combustion type micro linear actuator includes a telescopic wire 1, a fixed plate 2, a moving plate 13, an elastic beam 3, a control valve 4 and a base 5. The fixed plate 2 is fixed to an end of the base 5. One end of the elastic beam 3 is fixed with the fixed plate 2, and the other end is fixed with the movable plate 13. The fixed plate 2 and the moving plate 13 are both high temperature reinforced epoxy laminates.

Two wire through holes are formed in the opposite ends of the moving plate 13 and the fixed plate 2. The telescopic wires 1 penetrate through the two wire penetrating holes of the moving plate 13 and the fixed plate 2, the two ends of the telescopic wires 1 are fixed together in a knotting mode to form a closed ring shape, and the two telescopic wires 1 connected in parallel are formed between the moving plate 13 and the fixed plate 2. At this time, the telescopic wire 1 is tightened and connects the moving plate 13 and the fixed plate 2; by the extension and contraction of the telescopic wire 1, the elastic beam 3 can be driven to bend, and the moving plate 13 can move transversely. The telescopic wire 1 is made of a shape memory alloy nickel-titanium wire, has stretchability, and is shortened when being heated and lengthened when being cooled. The surface of the telescopic wire 1 is coated with a platinum layer; the platinum layer acts as a catalyst.

The spring beam 3 comprises a curved section in the middle and two straight sections at both ends. The two straight sections are respectively bonded and fixed with the side surfaces of the fixed plate 2 and the movable plate 13. The bending section is in a bending state in an initial state; the telescopic wire 1 is positioned on one side of the elastic beam 3 which is concave inwards; this prevents the elastic beam 3 from bending in different directions when deformed many times. The elastic beam 3 is made of a central carbon fiber material; the elastic beam can deform and bend when being subjected to external force, and can recover to an initial state after the external force disappears. The elastic beam 3 is composed of four layers of unidirectional carbon fiber prepregs sequentially stacked in the thickness direction of the elastic beam. The angles of the fiber direction of the four layers of unidirectional carbon fiber prepregs sequentially stacked with respect to the longitudinal direction of the elastic beam 3 are 0 °, 90 °, and 0 °, respectively. A plurality of longitudinal pore channels 3-1 arranged along the length direction of the elastic beam 3 are arranged in the elastic beam; the longitudinal ducts 3-1 are arranged in sequence at equal intervals along the width direction of the elastic beam 3. Each longitudinal bore 3-1 further ensures that the flexible beam is only bent in the length direction and not twisted.

A control valve 4 in the form of a semi-cylinder is fixed to a base 5. The control valve 4 has three inlet ports 4-1 and a set of outlet ports 4-2 communicating with each other. The air outlet 4-2 is positioned on one side of the plane of the control valve 4 and faces the telescopic wire 1. The three air inlets 4-1 are positioned on one side of the arc surface of the control valve 4 and respectively comprise a hydrogen inlet, an air inlet and a cooling inlet. Electromagnetic control on-off valves are arranged on the three air inlets 4-1, and independent control can be achieved. The air outlet 4-2 is plural. The air outlets 4-2 are evenly distributed on the plane of the control valve 4. The hydrogen inlet is connected with a hydrogen source (hydrogen tank); the air inlet is connected with the outside air through an air pump; the cooling air inlet is connected with a low-temperature nitrogen source (a liquid nitrogen tank).

When hydrogen and air are co-fed into the control valve 4; the gas outlet of the control valve 4 sprays the mixed gas of hydrogen and air to the telescopic wire 1, and the hydrogen and the oxygen in the air are subjected to catalytic combustion under the action of a platinum catalyst on the surface of the telescopic wire 1, so that the temperature of the telescopic wire 1 is increased and the telescopic wire 1 is contracted; the contraction of the telescopic wire 1 drives the elastic beam 3 to bend and the moving plate 13 to move inwards. When low-temperature nitrogen obtained by gasifying liquid nitrogen is input into the control valve 4; a gas outlet of the control valve 4 sprays low-temperature nitrogen to the telescopic wire 1, and the low-temperature nitrogen absorbs the heat of the telescopic wire 1, so that the temperature of the telescopic wire 1 is reduced and the telescopic wire is extended; the elastic beam 3 stretches under the action of the elastic force thereof to drive the moving plate 13 to move outwards.

The aforementioned liquid nitrogen can be replaced by liquid ammonia or other substances that can be used for cooling.

As shown in fig. 3, the driving method of the catalytic combustion type micro linear actuator includes the following specific steps:

the method comprises the following steps: when the catalytic combustion type micro linear driver needs to be shortened, the hydrogen inlet and the air inlet of the control valve 4 are communicated, the cooling inlet is closed, and the hydrogen-air mixture is sprayed to the telescopic wire 1 from the air outlet 4-2 of the control valve 4. When the hydrogen-air mixture comes into contact with the surface of the stretch yarn 1, a catalytic combustion reaction occurs under the action of the platinum coating, thereby increasing the temperature of the stretch yarn 1. Therefore, the stretch yarn 1 activates the shape memory effect and shortens the length. Thereby, the fixed plate 2 and the movable plate 13 have opposite movement trends in the axial direction of the telescopic wire 1, and the elastic beam 3 is bent in the vertical direction.

Step two: when the catalytic combustion type micro linear driver needs to be extended, the hydrogen inlet and the air inlet of the control valve 4 are closed, the cooling inlet is communicated, and stable cooling gas (low-temperature nitrogen obtained by gasifying liquid nitrogen) is sprayed from the gas outlet 4-2 of the control valve 4 to the telescopic wire 1, so that the telescopic wire 1 is rapidly cooled and is restored to the initial state. The moving plate 13 is pushed outward by the elastic force of the elastic beam 3.

The first step and the second step are a driving period, and the driver can continuously work in a reciprocating mode by repeatedly controlling the on-off of the three air inlets.

As shown in fig. 4, the preparation method of the catalytic combustion type micro linear actuator specifically comprises the following steps:

step one, as shown in part a of fig. 4, a diode-pumped solid state uv laser is used to cut a 127 μm thick high temperature reinforced epoxy laminate and a machined groove is cut in the epoxy laminate. Two sides of each processing groove are provided with one or more pairs of bulges. The two paired protrusions are opposite and arranged at intervals and used as a fixed plate 2 and a moving plate 13 (the back ends of the fixed plate 2 and the moving plate 13 are connected with the high-temperature reinforced epoxy laminated plate main body). The relative position of the fixed plate 2 and the moving plate 13 at this time is the same as the relative position of the fixed plate 2 and the moving plate 13 in the initial state of the catalytic combustion type micro linear actuator; in the laser cutting process, two wire penetrating holes are formed in opposite ends of the fixed plate 2 and the moving plate 13.

And step two, as shown in a part b of fig. 4, the expansion wire 1 sequentially passes through the wire-passing holes on the fixed plate 2 and the moving plate 13, and then the rear end parts of the wire-passing holes are knotted, so that the expansion wire 1 is kept in a tensioned state. Then, cyanoacrylate glue is used for coating the joints of the telescopic wires 1, the fixed plate 2 and the movable plate 13.

And step three, as shown in parts c and d in fig. 4, laminating four layers of unidirectional carbon fiber prepregs together, and curing in a heating and pressurizing manner to generate carbon piles with the thickness of 90 microns, and pre-bending the carbon piles. The flexible beam 3 is cut out of the carbon pile with a laser system. The fiber direction of the unidirectional carbon fiber prepreg positioned on the two sides is parallel to the length direction of the elastic beam 3; the fiber direction of the two layers of unidirectional carbon fiber prepregs positioned in the middle is perpendicular to the length direction of the elastic beam 3. Two ends of the elastic beam 3 are respectively bonded and fixed with the fixed plate 2 and the movable plate 13. Thereafter, the fixed plate 2 and the moving plate 13 were cut from the high temperature reinforced epoxy laminate.

And step four, as shown in part e of fig. 4, uniformly coating hot glue on the telescopic wire 1 to form a hot glue coating.

And step five, as shown in parts f and g in fig. 4, pouring platinum powder on the hot glue coating of the telescopic wire 1, so that the platinum powder is adhered to the telescopic wire 1 to form a platinum layer. The fixing plate 2 is bonded to the base 5.

Example 2

As shown in figures 5 and 6, the micro peristaltic robot comprises a driving system 6, a steering system 7, a one-way clamping foot 9, a connecting disc 10, a head block 8 and a hose 12. The connecting plate 10 is disc-shaped and is provided with two through holes. The head of the drive system 6 is fixed to one side of the connecting disc 10. The other side of the connecting disc 10 is connected with the head block 8 through a steering system 7. The drive system 6 can drive the connecting disc to move forwards or backwards. The steering system 7 can drive the head block 8 to rotate left and right relative to the drive system.

The tail end of the bottom of the driving system 6 and the bottom of the head block are both provided with a plurality of one-way clamping feet 9. The bottom end of the one-way clamping foot 9 is sharp and inclines downwards to the tail part of the micro peristaltic robot. Because of the shape and orientation of the one-way clamping foot 9 (the one-way clamping foot is a smooth curved surface in the forward direction, the friction force with the ground is reduced, the contact area with the ground in the backward direction is a sharp blade part, and the one-way clamping foot is in contact with the ground to form reverse movement and self-locking), the resistance of the one-way clamping foot 9 in the forward direction on the ground is obviously smaller than that in the backward direction.

The drive system 6 includes a first microactuator 6-1, a tank 11, and a drive bellows 6-2. The steering system 7 comprises a second micro-actuator 7-1, a third micro-actuator 7-2 and a steering bellows 7-3. The first micro actuator 6-1, the second micro actuator 7-1 and the third micro actuator 7-2 are all the catalytic combustion type micro linear actuator described in embodiment 1. The stroke of the second micro-actuator 7-1 and the third micro-actuator 7-2 is equal and smaller than the stroke of the first micro-actuator 6-1.

The two tank bodies 11 are arranged side by side and are both in a strip shape. The base 5 of the first micro-actuator 6-1 is fixed to the ends of the two tanks 11. The moving plate 13 of the first microactuator 6-1 is fixed to the connecting pad. The driving bellows 6-2 is sleeved outside the first microactuator 6-1 and the tank 11 and can be freely stretched. The two tanks 11 store hydrogen gas and liquid nitrogen, respectively. Two jar bodies 11 all are provided with two delivery outlets, and one of them delivery outlet is in jar side of body 11, and another delivery outlet is located jar head end of body 11. A hydrogen inlet and a cooling inlet of a control valve 4 in the first micro driver 6-1 are respectively communicated with output ports at the side parts of the two tank bodies 11 through hoses 12;

the second micro driver 7-1 and the third micro driver 7-2 are disposed side by side left and right between the head block 8 and the land 10. The steering bellows 7-3 is sleeved outside the second micro actuator 7-1 and the third micro actuator 7-2. The hydrogen gas inlet and the cooling gas inlet of the second micro-driver 7-1 and the third micro-driver 7-2 are respectively communicated with the output ports of the head ends of the two tanks 11 through hoses 12.

The hose 12 is a common airtight gas pipe for gas transmission between components. The head block 8 is a light hemisphere. The peristaltic robot advances by reciprocating extension and retraction of the first micro-actuator 6-1. The steering is realized by the difference of the telescopic states of the second micro actuator 7-1 and the third micro actuator 7-2, and the reciprocating telescopic of the first micro actuator 6-1.

Claims

1. A catalytic combustion type micro linear actuator comprises a telescopic wire (1), a fixed plate (2), a movable plate (13), an elastic beam (3), a control valve (4) and a base (5); the method is characterized in that: the fixed plate (2) is fixed on the base (5); two ends of the elastic beam (3) are respectively fixed with the fixed plate (2) and the movable plate (13); the moving plate (13) is connected with the fixed plate (2) through one or more sections of telescopic wires (1); the telescopic wire (1) is made of shape memory alloy and can be contracted when being heated; the surface of the telescopic wire (1) is provided with a catalyst for catalytic combustion; the elastic beam (3) is in a bending state in an initial state, and the telescopic wire (1) is positioned on the concave side of the elastic beam (3); the control valve (4) is fixed on the base (5); the control valve (4) is provided with three air inlets (4-1) and three air outlets (4-2); one or more air outlets (4-2) face the telescopic wire (1); the three air inlets (4-1) can be independently controlled to be opened and closed; the three air inlets (4-1) are respectively a hydrogen air inlet, an air inlet and a cooling air inlet and are respectively connected with a hydrogen source, outside air and a cooling air source;

the control valve (4) can output the mixed gas of hydrogen and air to the telescopic wire (1) to generate catalytic combustion, so that the temperature of the telescopic wire (1) is increased, the length of the telescopic wire is contracted, and the movable plate (13) is driven to be close to the fixed plate (2); the control valve (4) can output cooling gas for cooling to the telescopic wire (1), so that the temperature of the telescopic wire (1) is reduced, the length of the telescopic wire is extended, and the movable plate (13) is far away from the fixed plate (2) under the action of the elastic force of the elastic beam (3).

2. A catalytic combustion micro linear actuator as claimed in claim 1, wherein: the elastic beam (3) is composed of four layers of unidirectional carbon fiber prepregs which are sequentially stacked; the angles of the fiber direction of the four layers of unidirectional carbon fiber prepregs sequentially stacked relative to the length direction of the elastic beam (3) are respectively 0 degree, 90 degree and 0 degree.

3. A catalytic combustion micro linear actuator as claimed in claim 1, wherein: the elastic beam (3) comprises a bending section positioned in the middle and two straight sections positioned at two ends; the two straight sections are respectively fixed with the side surfaces of the fixed plate (2) and the movable plate (13); the bending section is in an initial state, i.e. in a bent state.

4. A catalytic combustion micro linear actuator as claimed in claim 1, wherein: two wire penetrating holes which are arranged at intervals are formed in the opposite ends of the moving plate (13) and the fixed plate (2); the telescopic wire (1) sequentially penetrates through the two wire penetrating holes of the moving plate (13) and the fixed plate (2), and the two ends of the telescopic wire are fixed together to form a tensioned closed ring.

5. A catalytic combustion micro linear actuator as claimed in claim 1, wherein: a plurality of longitudinal pore channels (3-1) are arranged in the elastic beam (3); the longitudinal ducts (3-1) are arranged at equal intervals along the width direction of the elastic beam (3).

6. A catalytic combustion micro linear actuator as claimed in claim 1, wherein: the fixed plate (2) and the moving plate (13) are both epoxy laminated plates.

7. A catalytic combustion micro linear actuator as claimed in claim 1, wherein: the cooling gas source adopts a liquid nitrogen tank or a liquid ammonia tank; the catalyst for catalytic combustion adopts platinum.

8. The method of manufacturing a catalytic combustion type micro linear actuator as set forth in claim 1, wherein: cutting an epoxy laminated board by using a diode-pumped solid-state ultraviolet laser, and forming a processing groove on the epoxy laminated board; two sides of each processing groove are provided with one or more pairs of bulges; the two paired bulges are opposite and arranged at intervals and are respectively used as a fixed plate (2) and a movable plate (13);

connecting the fixed plate (2) with the movable plate (13) by using one or more sections of the telescopic wires (1), and smearing the joints of the telescopic wires (1), the fixed plate (2) and the movable plate (13) by using cyanoacrylate glue;

step three, superposing four layers of unidirectional carbon fiber prepregs together, and curing in a heating and pressurizing manner to generate carbon pile with the thickness of 90 microns; cutting the elastic beam (3) from the carbon pile by using a laser system; the fiber direction of the unidirectional carbon fiber prepreg positioned on the two sides is parallel to the length direction of the elastic beam (3); the fiber direction of the two layers of unidirectional carbon fiber prepregs positioned in the middle is vertical to the length direction of the elastic beam (3); fixing two ends of the bent elastic beam (3) with the fixed plate (2) and the movable plate (13) respectively; then, cutting the fixed plate (2) and the moving plate (13) from the epoxy laminated plate;

fourthly, a platinum layer is arranged on the telescopic wire (1) in an adhesion or plating mode; after the fixing plate (2) is fixed on the base (5), the control valve (4) is installed on the base (5).

9. A micro peristaltic robot, comprising: the steering mechanism comprises a driving system (6), a steering system (7), a one-way clamping foot (9), a connecting disc (10), a head block (8) and a hose (12); the head of the driving system (6) is fixed with one side of the connecting disc (10); the other side of the connecting disc (10) is connected with the head block (8) through a steering system (7); the drive system (6) can be extended or shortened; the steering system (7) can drive the head block (8) to rotate left and right relative to the driving system; the tail end of the bottom of the driving system (6) and the bottom of the head block are provided with a plurality of one-way clamping feet (9); the bottom end of the one-way clamping foot (9) is sharp and inclines towards the tail part of the micro peristaltic robot;

the driving system (6) comprises a first micro driver (6-1) and a tank body (11); the steering system (7) comprises a second micro driver (7-1) and a third micro driver (7-2); the first micro driver (6-1), the second micro driver (7-1) and the third micro driver (7-2) adopt a catalytic combustion type micro linear driver as claimed in any one of claims 1 to 7; the stroke of the second micro driver (7-1) and the stroke of the third micro driver (7-2) are equal and smaller than the stroke of the first micro driver (6-1); a base (5) in the first micro driver (6-1) is fixed with the two tank bodies (11); a moving plate (13) in the first micro driver (6-1) is fixed with the connecting disc; hydrogen and cooling gas are respectively stored in the two tank bodies (11); a hydrogen inlet and a cooling inlet of a control valve (4) in the first micro driver (6-1) are respectively communicated with the output ports of the two tank bodies (11) through hoses (12); the second micro driver (7-1) and the third micro driver (7-2) are arranged between the head block (8) and the connecting disc (10) in a left-right side-by-side mode; the hydrogen gas inlets and the cooling air inlets of the second micro driver (7-1) and the third micro driver (7-2) are respectively communicated with the output ports of the head ends of the two tanks (11) through hoses (12).

10. A micro peristaltic robot as set forth in claim 9, wherein: a driving corrugated pipe (6-2) is sleeved outside the first micro driver (6-1) and the tank body (11); the steering corrugated pipe (7-3) is sleeved outside the second micro actuator (7-1) and the third micro actuator (7-2).