CN113750730B - Chemical method polyimide film production waste gas treatment device and application thereof - Google Patents

Chemical method polyimide film production waste gas treatment device and application thereof Download PDF

Info

Publication number
CN113750730B
CN113750730B CN202111122211.9A CN202111122211A CN113750730B CN 113750730 B CN113750730 B CN 113750730B CN 202111122211 A CN202111122211 A CN 202111122211A CN 113750730 B CN113750730 B CN 113750730B
Authority
CN
China
Prior art keywords
gas
heat exchanger
catalyst
waste gas
exhaust gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202111122211.9A
Other languages
Chinese (zh)
Other versions
CN113750730A (en
Inventor
钱景卫
陈洋溢
黄明威
杨继明
刘贺
魏波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhongtian Electronic Material Co ltd
Original Assignee
Zhongtian Electronic Material Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhongtian Electronic Material Co ltd filed Critical Zhongtian Electronic Material Co ltd
Priority to CN202111122211.9A priority Critical patent/CN113750730B/en
Publication of CN113750730A publication Critical patent/CN113750730A/en
Application granted granted Critical
Publication of CN113750730B publication Critical patent/CN113750730B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/8621Removing nitrogen compounds
    • B01D53/8625Nitrogen oxides
    • B01D53/8628Processes characterised by a specific catalyst
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/343Heat recovery
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/8621Removing nitrogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/8621Removing nitrogen compounds
    • B01D53/8625Nitrogen oxides
    • B01D53/8631Processes characterised by a specific device
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/8668Removing organic compounds not provided for in B01D53/8603 - B01D53/8665
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/8678Removing components of undefined structure
    • B01D53/8687Organic components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/869Multiple step processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2251/00Reactants
    • B01D2251/20Reductants
    • B01D2251/206Ammonium compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2255/00Catalysts
    • B01D2255/10Noble metals or compounds thereof
    • B01D2255/102Platinum group metals
    • B01D2255/1021Platinum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2255/00Catalysts
    • B01D2255/20Metals or compounds thereof
    • B01D2255/204Alkaline earth metals
    • B01D2255/2047Magnesium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2255/00Catalysts
    • B01D2255/20Metals or compounds thereof
    • B01D2255/207Transition metals
    • B01D2255/20707Titanium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2255/00Catalysts
    • B01D2255/20Metals or compounds thereof
    • B01D2255/207Transition metals
    • B01D2255/20761Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/70Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/708Volatile organic compounds V.O.C.'s
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2258/00Sources of waste gases
    • B01D2258/02Other waste gases

Abstract

The invention relates to a treatment device for waste gas generated in the production of a polyimide film by a chemical method, which comprises a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected. Compared with the original treatment mode, the invention improves the treatment efficiency of the waste gas, realizes the standard treatment of the waste gas, reduces the cost and reduces the energy consumption of equipment.

Description

Chemical polyimide film production waste gas treatment device and application thereof
Technical Field
The invention relates to the field of environmental protection, in particular to a chemical method polyimide film production waste gas treatment device and application thereof.
Background
The chemical imine method is a main production mode of a Polyimide (PI) film, and waste gas in the production process of the chemical imine method often contains harmful components and can reach the environmental emission standard after further treatment. The existing chemical method polyimide film production waste gas treatment mode is generally divided into two modes, one mode is direct-fired (TO) treatment, namely, waste gas is directly introduced into a combustion chamber TO be combusted and decomposed, and then is discharged after denitration treatment. But the problems of high manufacturing cost in the early stage and high using cost in the later stage of the equipment exist; one is a catalytic Combustion (CO) type, in which ammonia gas/urea is used as a reducing agent for catalytic reaction to treat exhaust gas, but the oxidation-reduction reaction of the exhaust gas treatment is an exothermic reaction, and when the exhaust gas temperature exceeds the temperature resistance limit of the metal oxidation-reduction catalyst, early failure of the metal catalyst is easily caused. There is a need to develop exhaust treatment devices that are more efficient and less costly to remove.
Disclosure of Invention
The invention aims to provide a device for treating polyimide waste gas by a chemical method, which comprises a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected.
According to the preferable technical scheme, the waste gas pipeline 1 and the second heat exchanger 14 form a circulating loop through the second gas inlet pipe 16 and the second gas outlet pipe 17, the second gas outlet pipe 17 is provided with the second heat exchanger control valve 3, and the amount of waste gas entering the second heat exchanger 14 is controlled, so that the temperature rise of the waste gas is controlled.
According to the preferable technical scheme, the waste gas pipeline 1 and the first heat exchanger 10 form a circulation loop through the first gas inlet pipe 18 and the first gas outlet pipe 19, the first gas outlet pipe 19 is provided with the first heat exchanger control valve 4, and the amount of waste gas entering the first heat exchanger 10 is controlled, so that the temperature rise of the waste gas is controlled.
In a preferred embodiment of the present invention, a first oxidation catalyst is placed in the first oxidation unit 9, and the first oxidation catalystOxidizing agents for oxidizing VOCs to NOx, preferably SiO 2 And Al 2 O 3 As a support, pt metal as a catalyst.
In a preferred embodiment of the present invention, a second oxidation catalyst is placed in the second oxidation unit 12, and the second oxidation catalyst is an oxidant for oxidizing trace amount of VOC remaining in the exhaust gas into Nox, preferably SiO 2 And Al 2 O 3 Is used as carrier and Pt metal is used as catalyst of catalyst.
In a preferred embodiment of the present invention, a reduction catalyst is placed in the first reduction unit 11, and the reduction catalyst is a reducing agent for reducing NOx into nitrogen, preferably SiO 2 And Al 2 O 3 As a support, pt and Ti metals are used as catalysts.
In a preferred embodiment of the present invention, a nitrogen-containing catalyst is placed in the second reduction unit 13, and the nitrogen-containing catalyst is a reducing agent for reducing the remaining NOx, and is preferably SiO 2 And Al 2 O 3 As carrier, mgO, cuO metal is used as catalyst.
In the preferred embodiment of the present invention, the bypass line 5 is provided with a control valve 8 for controlling the ratio of the exhaust gas passing through the combustion chamber 7 and the bypass line 5.
The invention aims to provide a method for treating waste gas produced by a chemical polyimide film by using the device, low-temperature waste gas enters a waste gas pipeline 1, the waste gas is divided into first waste gas and second waste gas under the action of a bypass pipeline 5 and a control valve 8, the first waste gas enters a combustion chamber 7 for ignition, heating and temperature rise, then is sent to a first oxidation unit 9 for oxidation reaction, and then is mixed with the second waste gas to obtain mixed gas; and the mixed gas is sequentially sent into a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13 and a second heat exchanger 14 to obtain the exhaust gas.
According to the preferable technical scheme, the main components of the low-temperature waste gas comprise particulate matters, NOx and non-methane total hydrocarbons, and the non-methane total hydrocarbons are preferably any one or combination of acetic acid, quinoline and DMF.
According to the preferred technical scheme, the temperature of the low-temperature waste gas is 90-160 ℃, and preferably 100-150 ℃.
According to a preferred embodiment of the present invention, the volume ratio of the first exhaust gas to the second exhaust gas is 2.
According to the preferable technical scheme, the first waste gas enters the second heat exchanger 14 through the second gas inlet pipe 16 for heat exchange and temperature rise, and then flows back to the waste gas pipeline 1 through the second gas outlet pipe 17.
According to the preferable technical scheme, the first waste gas enters the first heat exchanger 10 through the first gas inlet pipe 18 for heat exchange and temperature rise, and then flows back to the waste gas pipeline 1 through the first gas outlet pipe 19.
In a preferred embodiment of the present invention, the temperature of the first exhaust gas is raised to 200 to 350 ℃, preferably 270 to 330 ℃ by the first heat exchanger 10 and/or the second heat exchanger 14.
In a preferred embodiment of the present invention, the first oxidation unit contains a first oxidation catalyst capable of oxidizing VOC into NOx, and the first oxidation catalyst is preferably SiO 2 And Al 2 O 3 As a carrier, pt platinum metal as a catalyst, and the volume ratio of the first exhaust gas to the first oxidation catalyst is the amount of exhaust gas (Nm) 3 H)/amount of first oxidation catalyst (m) 3 ) 30000-40000, and the reaction temperature is 280-370 ℃.
In a preferred embodiment of the present invention, the first reduction unit includes a reduction catalyst capable of reducing NOx to nitrogen, and the reduction catalyst is preferably SiO 2 And Al 2 O 3 As a carrier, pt and Ti metal are used as catalysts, and the volume ratio of the mixed gas to the reduction catalyst is the mixed gas quantity (Nm) 3 H)/amount of reducing catalyst (m) 3 ) 30000-40000, and the reaction temperature is 300-370 ℃.
In a preferred embodiment of the present invention, the second oxidation unit contains a second oxidation catalyst capable of oxidizing a trace amount of VOC remaining in the exhaust gas to NOx, and the second oxidation catalyst is preferably SiO 2 And Al 2 O 3 As a carrier, pt metal is used as a catalyst, and the volume ratio of the mixed gas to the second oxidation catalyst is the mixed gas quantity (Nm) 3 H)/amount of second oxidation catalyst (m) 3 ) 30000-40000, and the reaction temperature is 280-350 ℃.
In a preferred embodiment of the present invention, the second reduction unit contains a nitrogen-containing catalyst capable of reducing the remaining NOx, and the nitrogen-containing catalyst is preferably SiO 2 And Al 2 O 3 As carrier, mgO and CuO metal as catalyst, and the volume ratio of mixed gas and nitrogen-containing catalyst is gas quantity (Nm) 3 Amount of nitrogen-containing catalyst (m)/h 3 ) 30000-40000, and the reaction temperature is 385-450 ℃.
According to the preferable technical scheme, the temperature of the mixed gas is reduced to 300-350 ℃ through the first heat exchanger 10, and then the mixed gas is sent to a reduction catalyst.
According to the preferable technical scheme, the temperature of the exhaust gas is reduced to be lower than 350 ℃ through the second heat exchanger 14, and then the exhaust gas is exhausted.
Unless otherwise indicated, when the present invention relates to percentages between liquids, said percentages are volume/volume percentages; when the invention relates to percentages between liquid and solid, said percentages are volume/weight percentages; the invention relates to the percentages between solid and liquid, said percentages being weight/volume percentages; the balance weight/weight percent.
Unless otherwise indicated, the invention was tested using the following method:
compared with the prior art, the invention has the following beneficial technical effects:
1. according to the invention, the waste gas is divided into the first waste gas and the second waste gas, so that the low-temperature waste gas entering the bypass pipeline is mixed with the high-temperature gas discharged from the combustion chamber 7, the gas temperature is reduced, the metal catalyst can work in a proper temperature range, and the service life of the metal catalyst is prolonged.
2. The invention reduces the exhaust temperature of the waste gas, reduces the volume, lowers the load of the exhaust fan, lowers the required operation frequency, and improves the power consumption and the service life through the action of the first heat exchanger and the second heat exchanger. Meanwhile, the heat exchanger recovers heat and recycles the heat to the waste gas preheating of the waste gas pipeline, so that the temperature of the waste gas entering the combustion chamber is increased, the ignition temperature of the front-end combustion chamber is reduced, and the consumption of natural gas is reduced.
3. The invention fully utilizes DMF component in the waste gas as a reducing agent, reduces the using amount of the reducing agent and reduces the operation cost.
4. Compared with the original treatment mode, the total weight of a single set of equipment is reduced by 60%, the early investment cost of the equipment is reduced by 60%, and the monthly energy consumption of the equipment is reduced by 80%.
Drawings
Fig. 1 is a chemical polyimide exhaust gas treatment device, which includes an exhaust gas pipe 1, an air inlet fan 2, a second heat exchanger control valve 3, a first heat exchanger control valve 4, a bypass pipe 5, a natural gas pipe 6, a combustion chamber 7, a bypass pipe control valve 8, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14, an exhaust fan 15, a second air inlet pipe 16, a second air outlet pipe 17, a first air inlet pipe 18, and a first air outlet pipe 19.
Detailed Description
The present invention will be further described with reference to the following examples.
Example 1: the invention relates to a device for treating polyimide waste gas by a chemical method
The device for treating the polyimide waste gas by the chemical method comprises a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected.
According to the preferable technical scheme, the waste gas pipeline 1 and the first heat exchanger 10 form a circulation loop through the first gas inlet pipe 18 and the first gas outlet pipe 19, the first gas outlet pipe 19 is provided with the first heat exchanger control valve 4, and the amount of waste gas entering the first heat exchanger 10 is controlled, so that the temperature rise of the waste gas is controlled.
The waste gas pipeline 1 and the second heat exchanger 14 form a circulation loop through a second gas inlet pipe 16 and a second gas outlet pipe 17, and a second heat exchanger control valve 3 is arranged on the second gas outlet pipe 17 and used for controlling the amount of waste gas entering the second heat exchanger 14, so that the temperature rise of the waste gas is controlled.
The first oxidation unit 9 is provided with a first oxidation catalyst, the first oxidation catalyst is an oxidant for oxidizing VOC into NOx and is SiO 2 And Al 2 O 3 As a support, pt metal as a catalyst.
The second oxidation unit 12 is provided with a second oxidation catalyst, which is an oxidant for oxidizing trace amount of VOC in the exhaust gas into Nox, and is made of SiO 2 And Al 2 O 3 Is used as carrier and Pt metal is used as catalyst of catalyst.
The first reduction unit 11 contains a reduction catalyst, which is a reducing agent for reducing NOx into nitrogen and SiO 2 And Al 2 O 3 As a carrier, pt and Ti metals are used as catalysts.
The second reduction unit 13 is provided with a nitrogen-containing catalyst, and the nitrogen-containing catalyst is a reducing agent for reducing the residual NOx and is SiO 2 And Al 2 O 3 As a carrier, mgO and CuO metal are used as a catalyst.
A control valve 8 is provided in the bypass line 5 to control the proportion of exhaust gas passing through the combustion chamber 7 and the bypass line 5.
Example 2: the invention relates to a method for treating polyimide waste gas by a chemical method
The waste gas discharged from the process of preparing polyimide film by the chemical imine method was collected and the composition thereof was measured as shown in table 1. The first oxidation catalyst, the second oxidation catalyst, the reduction catalyst and the nitrogen-containing catalyst used in the present invention are commercially available from Nighui Kabushiki Kaisha.
The specific waste gas treatment method comprises the following steps:
the waste gas is sucked into the waste gas pipeline 1 by the air inlet fan 2, and the temperature of the waste gas is 100-150 ℃. Opening second heat exchanger control valve 3 and first heat exchanger control valve 4, waste gas gets into second heat exchanger 14, first heat exchanger 10 through second intake pipe 16, first intake pipe 18 respectively and exchanges heat, rethread second outlet duct 17, first outlet duct 19 return to waste gas pipeline 1, and waste gas temperature rises to 200 ℃ this moment.
The waste gas after temperature rise is divided into first waste gas and second waste gas under the combined action of the bypass pipeline 5 and the bypass pipeline control valve 8, the first waste gas enters the combustion chamber, the second waste gas enters the bypass pipeline 5, and the volume ratio of the first waste gas to the second waste gas is 3.
The first waste gas enters a combustion chamber 7, the gas is heated to 280 ℃, and is sent to a first oxidation unit 9 to carry out oxidation reaction with a first oxidation catalyst which is SiO 2 And Al 2 O 3 As a carrier, pt metal as a catalyst, gas amount (Nm) 3 H)/amount of first oxidation catalyst (m) 3 ) The volume ratio is 30000.
The mixed gas is firstly sent into a first heat exchanger 10 for heat exchange, the temperature is reduced to 300 ℃, and then the mixed gas enters a first reduction unit 11 for reaction with a reduction catalyst which is SiO 2 And Al 2 O 3 As a carrier, pt and Ti metals as catalysts, gas amount (Nm) 3 In terms of/h)/amount of reducing catalyst (m) 3 ) The volume ratio is 30000.
The exhaust gas then passes through a second oxidation unit 12 to react with a second oxidation catalyst, which is SiO 2 And Al 2 O 3 As a carrier, pt metal as a catalyst and a volume ratio of gas amount (Nm) 3 H)/amount of second oxidation catalyst (m) 3 ) 30000 and a reaction temperature of 400 ℃; the trace amount of VOC remaining in the exhaust gas is oxidized into Nox.
The exhaust gas continuously passes through the second reduction unit 13 to react with the nitrogen-containing catalyst in the second reduction unit 13, and the nitrogen-containing catalyst is SiO 2 And Al 2 O 3 As a carrier, mgO and CuO metal are used as catalysts, and the volume ratio is gas volume (Nm) 3 Amount of nitrogen-containing catalyst (m)/h 3 ) 30000 and the reaction temperature is 440 ℃; the remaining NOx is reduced.
The outlet gas passes through the second heat exchanger 14, the temperature of the exhaust gas is further reduced to be below 350 ℃, and the outlet gas is sent to a rear end chimney through an exhaust fan 15 for emission.
The temperature of the rear-end gas is adjusted by adjusting the opening degrees of the second heat exchanger control valve 3 and the first heat exchanger control valve 4 so as to adapt to the suitable working condition temperature of the catalytic oxidation of the metal catalyst.
The proportion of the waste gas passing through the combustion chamber 7 and the bypass pipeline 5 is controlled by adjusting the opening degree of the bypass pipeline control valve 8, so that the amount of DMF (dimethyl formamide) participating in the reduction reaction at the rear end is controlled, and the optimal working condition point of the waste gas treatment equipment is achieved.
The preheating of the waste gas is recycled through the action of the first heat exchanger 10 and the second heat exchanger 14, the front-end waste gas is heated, and the amount of the natural gas required in the combustion chamber is reduced. Meanwhile, the exhaust temperature of the waste gas is reduced, the size is reduced, the load of the exhaust fan 15 is lower, the required operation frequency is lower, the power consumption is reduced, and the service life is prolonged.
The exhaust gas was tested to meet local emission standards and could be vented directly to the atmosphere (table 1). And compared with the traditional direct-fired treatment mode, the treatment mode has obvious economic advantages in earlier equipment investment and later operation and maintenance cost, and can save the cost by about 60 percent.
TABLE 1
Figure BDA0003277663830000101
The above description of the specific embodiments of the present invention is not intended to limit the present invention, and those skilled in the art may make various changes and modifications according to the present invention without departing from the spirit of the present invention, which is defined in the appended claims.

Claims (13)

1. A method for treating waste gas generated in the production of polyimide film by chemical method is characterized in that a device for treating waste gas generated in the production of polyimide film by chemical method is used for treating waste gas generated in the production of polyimide film by chemical method,
the device for treating the waste gas generated in the production of the polyimide film by the chemical method comprises a waste gas pipeline (1), an air inlet fan (2), a bypass pipeline (5), a natural gas pipeline (6), a combustion chamber (7), a first oxidation unit (9), a first heat exchanger (10), a first reduction unit (11), a second oxidation unit (12), a second reduction unit (13), a second heat exchanger (14) and an exhaust fan (15), wherein the waste gas pipeline (1) is provided with two outlets, one outlet is connected with the combustion chamber (7), and the other outlet is connected with the bypass pipeline (5); the bypass pipeline (5) is connected with a first heat exchanger (10), and the combustion chamber (7), the first oxidation unit (9), the first heat exchanger (10), the first reduction unit (11), the second oxidation unit (12), the second reduction unit (13), the second heat exchanger (14) and the exhaust fan (15) are sequentially connected;
the processing method specifically comprises the following steps: the low-temperature waste gas enters a waste gas pipeline (1), under the action of a bypass pipeline (5) and a control valve (8), the waste gas is divided into first waste gas and second waste gas, the first waste gas enters a combustion chamber (7), is ignited, heated and heated, is sent to a first oxidation unit (9) for oxidation reaction, and is mixed with the second waste gas to obtain mixed gas; the mixed gas is sequentially sent into a first heat exchanger (10), a first reduction unit (11), a second oxidation unit (12), a second reduction unit (13) and a second heat exchanger (14) to obtain exhaust gas;
the volume ratio of the first exhaust gas to the second exhaust gas is 2;
the main components of the low-temperature waste gas comprise particulate matters, NOx and non-methane total hydrocarbons; the non-methane total hydrocarbon is a combination of acetic acid, quinoline and DMF;
the first oxidation unit contains a first oxidation catalyst which is SiO 2 And Al 2 O 3 As a carrier, pt metal as a catalyst, and the volume ratio of the first exhaust gas to the first oxidation catalyst is gas volume (Nm) 3 In terms of catalyst amount (m) /) 3 ) 30000-40000, the reaction temperature is 280-370 ℃;
the first reduction unit comprises reductionA catalyst, the reduction catalyst is SiO 2 And Al 2 O 3 As a carrier, pt and Ti metal as a catalyst, and the volume ratio of the mixed gas to the reduction catalyst is gas volume (Nm) 3 In terms of catalyst amount (m) /) 3 ) 30000-40000, the reaction temperature is 300-370 ℃;
the second oxidation unit contains a second oxidation catalyst which is SiO 2 And Al 2 O 3 As a carrier, pt metal is used as a catalyst, and the volume ratio of the mixed gas to the second oxidation catalyst is gas volume (Nm) 3 In terms of catalyst amount (m) /) 3 ) 30000-40000, the reaction temperature is 280-350 ℃;
the second reduction unit contains a nitrogen-containing catalyst which is SiO 2 And Al 2 O 3 As carrier, mgO and CuO metal as catalyst, and the volume ratio of the mixed gas to the nitrogen-containing catalyst is gas quantity (Nm) 3 H)/amount of catalyst (m) 3 ) 30000-40000 and the reaction temperature is 385-450 ℃.
2. The method of claim 1, wherein the temperature of the low temperature exhaust gas is from 90 ℃ to 160 ℃.
3. The method of claim 2, wherein the temperature of the low temperature exhaust gas is from 100 ℃ to 150 ℃.
4. The method according to claim 1, wherein the volume ratio of the first exhaust gas to the second exhaust gas is 3.
5. The method of claim 1, wherein the first off-gas is warmed to a gas temperature of 200 ℃ to 350 ℃.
6. The method of claim 5, wherein the first off-gas is warmed to a gas temperature of 270 ℃ to 330 ℃.
7. The method according to claim 1, characterized in that the first exhaust gas is fed into the second heat exchanger (14) through the second inlet pipe (16) for heat exchange and temperature rise, and then returned to the exhaust gas pipe (1) through the second outlet pipe (17).
8. The method according to claim 7, characterized in that the first exhaust gas is fed into the first heat exchanger (10) through the first inlet pipe (18) for heat exchange and temperature rise, and then returned to the exhaust gas pipe (1) through the first outlet pipe (19).
9. The method as claimed in claim 1, characterized in that the gas mixture is cooled to 300-350 ℃ by means of a first heat exchanger (10) and is fed to a reduction catalyst.
10. The method as claimed in claim 9, characterized in that the exhaust gas is cooled to below 350 ℃ by the second heat exchanger (14) and is discharged.
11. A method according to claim 1, characterized in that a control valve (8) is arranged in the bypass line (5) to control the ratio of exhaust gases passing through the combustion chamber (7) and the bypass line (5).
12. A method according to claim 1, characterized in that the exhaust gas conduit (1) and the second heat exchanger (14) form a circulation circuit via a second inlet conduit (16) and a second outlet conduit (17), and a second heat exchanger control valve (3) is arranged in the second outlet conduit (17) to control the amount of exhaust gas entering the second heat exchanger (14) and thereby the temperature of the exhaust gas.
13. A method according to claim 1, characterized in that the exhaust gas conduit (1) forms a circulation circuit with the first heat exchanger (10) via a first inlet conduit (18) and a first outlet conduit (19), and a first heat exchanger control valve (4) is arranged on the first outlet conduit (19) to control the amount of exhaust gas entering the first heat exchanger (10) and thereby the temperature of the exhaust gas.
CN202111122211.9A 2021-09-24 2021-09-24 Chemical method polyimide film production waste gas treatment device and application thereof Active CN113750730B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111122211.9A CN113750730B (en) 2021-09-24 2021-09-24 Chemical method polyimide film production waste gas treatment device and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111122211.9A CN113750730B (en) 2021-09-24 2021-09-24 Chemical method polyimide film production waste gas treatment device and application thereof

Publications (2)

Publication Number Publication Date
CN113750730A CN113750730A (en) 2021-12-07
CN113750730B true CN113750730B (en) 2022-11-11

Family

ID=78797247

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111122211.9A Active CN113750730B (en) 2021-09-24 2021-09-24 Chemical method polyimide film production waste gas treatment device and application thereof

Country Status (1)

Country Link
CN (1) CN113750730B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104379237A (en) * 2013-01-29 2015-02-25 化学热处理技术有限责任公司 Method and device for scrubbing exhaust gases
EP3085431A1 (en) * 2015-04-24 2016-10-26 HeidelbergCement AG Treatment of exhaust gases from the production of concrete

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4685266B2 (en) * 2001-05-21 2011-05-18 川崎重工業株式会社 Method and apparatus for removing nitrogen oxides in diesel engine exhaust gas
WO2004071646A2 (en) * 2003-02-12 2004-08-26 Delphi Technologies, Inc. SYSTEM AND METHOD OF NOx ABATEMENT
CN101600858A (en) * 2006-12-01 2009-12-09 巴斯福催化剂公司 Emission treatment systems and method
US7931881B2 (en) * 2009-09-25 2011-04-26 Babcock Power Environmental Inc. Integrated boiler and air pollution control systems
FI20096286A (en) * 2009-12-04 2011-06-05 Formia Emissions Control Oy VOC gas treatment equipment
JP6469457B2 (en) * 2015-01-22 2019-02-13 日野自動車株式会社 Exhaust purification equipment
CN109668157B (en) * 2018-12-27 2021-02-12 北京中电联环保股份有限公司 Waste gas catalytic incineration treatment system and regulation control method thereof
US11378278B2 (en) * 2019-12-11 2022-07-05 Umicore Ag & Co. Kg System and process for efficient SCR at high NO2 to NOx ratios
CN110898666A (en) * 2019-12-12 2020-03-24 福建艾尔普环保股份有限公司 High-concentration nitrogen-containing organic waste gas catalytic purification device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104379237A (en) * 2013-01-29 2015-02-25 化学热处理技术有限责任公司 Method and device for scrubbing exhaust gases
EP3085431A1 (en) * 2015-04-24 2016-10-26 HeidelbergCement AG Treatment of exhaust gases from the production of concrete

Also Published As

Publication number Publication date
CN113750730A (en) 2021-12-07

Similar Documents

Publication Publication Date Title
CN105605595B (en) The industrial waste gas integrated purifying method and system of class containing cyanogen, hydro carbons and NOx
CN103900391B (en) Selective sintering-machine flue-gas heat exchange and denitration system and method thereof
CN103154451B (en) For reducing assembly and the method for nitrogen oxides, carbon monoxide and Hydrocarbon in I. C. engine exhaust
CN112403258B (en) System and method for removing carbon monoxide and denitration of flue gas
CN103657404A (en) Tail gas catalysis combustion treatment system
CN101301580A (en) Tail gas treatment process of butane method maleic anhydride device
CN113750730B (en) Chemical method polyimide film production waste gas treatment device and application thereof
CN101058056B (en) An annealing and pickling line and process for denoxification of off-gases from annealing and pickling lines
CN105749738A (en) Denitration system and process of low-temperature industrial waste gas
CN112902680A (en) Sintering flue gas SCR denitration energy-saving emission-reducing method and system
US20200392884A1 (en) Method of producing heat in a power station
CN104785100A (en) Treatment method for exhaust gas from dicumyl peroxide DCP devices
CN115957620A (en) Reaction equipment for reducing CO emission in flue gas and energy-saving emission-reducing method
CN212481334U (en) High concentration organic waste gas catalytic combustion processing system
CN212039849U (en) Pellet flue gas denitration treatment device
CN112403221B (en) Flue gas denitration and decarburization treatment system and method
CN108759495B (en) Low-energy-consumption sintering flue gas denitration system and process
CN215027430U (en) A remove regeneration desorption car for active carbon adsorption purifies organic waste gas system
CN106838888B (en) Combustion system and method of operating the same
CN220531230U (en) Organic waste gas, organic waste liquid and flue gas cooperative treatment system
CN215810254U (en) Desulfurization and denitrification dust removal device of heating furnace
CN214345605U (en) A safe processing apparatus for high concentration waste gas
CN107930367B (en) Coke oven flue gas denitration process and coke oven flue gas denitration system
CN115337774B (en) Integrated system for capturing and utilizing carbon dioxide in kiln flue gas
CN215276478U (en) Sintering flue gas multi-pollutant ultralow emission system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant